JPH0946792A - Composite piezoelectric body and composite piezoelectric oscillator - Google Patents
Composite piezoelectric body and composite piezoelectric oscillatorInfo
- Publication number
- JPH0946792A JPH0946792A JP7195212A JP19521295A JPH0946792A JP H0946792 A JPH0946792 A JP H0946792A JP 7195212 A JP7195212 A JP 7195212A JP 19521295 A JP19521295 A JP 19521295A JP H0946792 A JPH0946792 A JP H0946792A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- zirconia fiber
- zirconia
- composite
- composite piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 title claims description 52
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 102
- 239000000835 fiber Substances 0.000 claims abstract description 49
- 239000002245 particle Substances 0.000 claims abstract description 30
- 230000008878 coupling Effects 0.000 abstract description 7
- 238000010168 coupling process Methods 0.000 abstract description 7
- 238000005859 coupling reaction Methods 0.000 abstract description 7
- 239000000919 ceramic Substances 0.000 abstract description 6
- 230000002542 deteriorative effect Effects 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 abstract 6
- 241001274197 Scatophagus argus Species 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000009694 cold isostatic pressing Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 101100371219 Pseudomonas putida (strain DOT-T1E) ttgE gene Proteins 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Transducers For Audible Bands (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、複合圧電体および
複合圧電振動子に関するもので、例えば、圧力,超音波
などを検出するセンサー、ラジュバン型変成器、フィル
ター、発振子、及びブザー，ポンプ，スピーカー，バイ
モルフ，ユニモルフなどの印加電圧に応じて収縮振動す
るアクチュエータなどに用いられる複合圧電体および複
合圧電振動子に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite piezoelectric body and a composite piezoelectric vibrator, for example, a sensor for detecting pressure and ultrasonic waves, a Rajuvan transformer, a filter, an oscillator, a buzzer, a pump, The present invention relates to a composite piezoelectric body and a composite piezoelectric vibrator used for an actuator that contracts and vibrates according to an applied voltage, such as a speaker, a bimorph, and a unimorph.
【０００２】[0002]
【従来技術】従来から、圧電センサやラジュバン型変成
器などに用いられる複合圧電振動子としては、圧電粒子
とポリマーなどの高分子材料とを複合させた複合圧電振
動子などが知られていた。2. Description of the Related Art Conventionally, as a composite piezoelectric vibrator used in piezoelectric sensors, Rajuvan-type transformers, and the like, a composite piezoelectric vibrator in which piezoelectric particles and a polymer material such as a polymer are composited has been known.
【０００３】また、圧電素子をフィルターとして使用す
る場合、保証減衰量を大きくしなければならないことか
ら、並列共振子に比べ直列共振子の容量を小さくするた
めに、直列共振子の電極を部分電極構造としていた。When the piezoelectric element is used as a filter, the guaranteed attenuation amount must be increased. Therefore, in order to reduce the capacitance of the series resonator as compared with the parallel resonator, the electrode of the series resonator is a partial electrode. It had a structure.
【０００４】さらに、ユニモルフやバイモルフ等のアク
チュエータは、金属板や特定のセラミックス基板上の少
なくとも一方の面上に圧電素子を形成して構成してい
た。Further, actuators such as unimorphs and bimorphs are formed by forming a piezoelectric element on at least one surface of a metal plate or a specific ceramic substrate.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、この従
来の圧電粒子と高分子とを複合させた複合圧電振動子
は、容量が小さくなることから比較的大きな圧電出力定
数を有するが、圧電歪定数が著しく小さくなるため、信
号を出し、信号を検出する両方の機能を同時に満足する
ことはできなかった。また、音響インピーダンスが小さ
くなることから、ハイパワー用として使えないなどの問
題があり、さらに、高分子を使用するが故、高温下にお
ける特性劣化などが問題視されていた。However, the conventional composite piezoelectric vibrator in which the piezoelectric particles and the polymer are combined has a relatively large piezoelectric output constant because the capacitance is small, but the piezoelectric strain constant is Since it becomes extremely small, it was not possible to satisfy both functions of issuing a signal and detecting a signal at the same time. Further, since the acoustic impedance becomes small, there is a problem that it cannot be used for high power, and further, because a polymer is used, characteristic deterioration at high temperatures has been regarded as a problem.
【０００６】次に、圧電素子をフィルターとして用いる
場合、保証減衰量を大きくしなければならないため、容
量が大きく異なる２種類の振動子が必要となる。そのた
め一方の振動子の容量を小さくするため部分電極構造と
していた。その結果、スプリアスやリップルが発生しフ
ィルターとしての所定の特性が得られないなどの問題が
あった。また、材料組成を異ならせ容量比を獲得する場
合、共振，反共振などの温度特性が非常に悪くなった
り、電気機械結合係数，機械的品質係数Ｑｍなどの材料
物性が異なることによるフィルター波形の対象性が無く
なるなどの問題があり、単に容量のみを小さくすること
はできなかった。Next, when the piezoelectric element is used as a filter, the guaranteed attenuation amount must be increased, so that two types of vibrators having greatly different capacitances are required. Therefore, a partial electrode structure is used to reduce the capacitance of one of the vibrators. As a result, there is a problem that spurious and ripples are generated and predetermined characteristics as a filter cannot be obtained. Further, when different material compositions are used to obtain a capacitance ratio, temperature characteristics such as resonance and anti-resonance become extremely poor, and filter physical properties such as electromechanical coupling coefficient and mechanical quality coefficient Qm cause different filter waveforms. Due to problems such as loss of symmetry, it was not possible to simply reduce the capacity.
【０００７】また、バイモルフ，ユニモルフなどのアク
チュエータやラジュバン型変成器においては、金属ある
いはセラミックス基板上に接着剤を介して、圧電素子を
接合する方法が知られているが、金属板上に圧電素子を
形成する場合、圧電素子の焼成温度が約１２００℃であ
ることから厚膜形成法による作製はできず、樹脂系の接
着剤による接合を行なわなければならないことから、小
型化が進むに従い、圧電素子の駆動時における振動の吸
収が接着層により起こり、所定の変位や高周波での駆動
ができないなどの問題があった。さらに、ハイパワー用
として使用する場合、接着強度が弱いという問題があっ
た。これを改善するため基板にアルミナやジルコニアな
どのセラミックスを用い、その上に圧電素子を熱接合す
る例が特開平３−１２８６８１号公報などによって開示
されている。しかしながら、このようなセラミックス基
板を用いる場合、金属に比べ弾性係数の一種である弾性
スティフネスが約２〜７倍も大きいため変位しにくく、
変位を大きくするには基板を著しく薄くしなければなら
ず、そのため作製が難しく取扱が非常に困難になり、ま
た大型化ができないなどの欠点を有していた。For actuators such as bimorphs and unimorphs, and Rajuvan-type transformers, a method is known in which a piezoelectric element is bonded onto a metal or ceramic substrate via an adhesive agent. In the case of forming a piezoelectric element, the firing temperature of the piezoelectric element is about 1200 ° C., so that the piezoelectric element cannot be manufactured by the thick film forming method, and bonding with a resin-based adhesive must be performed. Vibration is absorbed by the adhesive layer when the element is driven, and there is a problem that the element cannot be driven at a predetermined displacement or high frequency. Further, when used for high power, there is a problem that the adhesive strength is weak. In order to improve this, an example in which ceramics such as alumina or zirconia is used for a substrate and a piezoelectric element is thermally bonded thereon is disclosed in JP-A-3-128681. However, when such a ceramic substrate is used, the elastic stiffness, which is a kind of elastic coefficient, is about 2 to 7 times larger than that of a metal, so that it is difficult to displace,
In order to increase the displacement, the substrate must be made extremely thin, which makes it difficult to manufacture and very difficult to handle, and it has a drawback that it cannot be upsized.
【０００８】本発明は、かかる従来の問題点に鑑み、圧
電素子の本来の機能を失うことなく容量のみを小さくす
ることで、大きな圧電出力定数と圧電歪定数を兼ね備え
た振動子を得ると共に、さらに圧電素子とほぼ同等な弾
性スティフネスを持ち、高い破壊靭性を有する複合圧電
体および複合圧電振動子を提供しようとするものであ
る。In view of such conventional problems, the present invention obtains a vibrator having both a large piezoelectric output constant and a piezoelectric strain constant by reducing only the capacitance without losing the original function of the piezoelectric element. Further, it is an object of the present invention to provide a composite piezoelectric body and a composite piezoelectric vibrator having an elastic stiffness almost equal to that of a piezoelectric element and high fracture toughness.
【０００９】[0009]
【課題を解決するための手段】本発明の複合圧電体は、
ジルコニア繊維と、該ジルコニア繊維間に分散された圧
電粒子とからなるものである。また、本発明の複合圧電
振動子は、ジルコニア繊維と、該ジルコニア繊維間に分
散された圧電粒子とからなる複合圧電体の両面に、それ
ぞれ電極を形成してなるものである。また、ジルコニア
繊維と、該ジルコニア繊維間に分散された圧電粒子とか
らなる複合圧電体の表面に、圧電体層とこれを挟持する
一対の電極とからなる圧電素子を設けたものである。The composite piezoelectric material of the present invention comprises:
It is composed of zirconia fibers and piezoelectric particles dispersed between the zirconia fibers. Further, the composite piezoelectric vibrator of the present invention comprises electrodes formed on both surfaces of a composite piezoelectric body composed of zirconia fibers and piezoelectric particles dispersed between the zirconia fibers. In addition, a piezoelectric element including a piezoelectric layer and a pair of electrodes sandwiching the piezoelectric layer is provided on the surface of a composite piezoelectric body including zirconia fibers and piezoelectric particles dispersed between the zirconia fibers.
【００１０】[0010]
【作用】本発明の複合圧電体および複合圧電振動子で
は、ジルコニア繊維間にＰｂＺｒＴｉＯ3 （ＰＺＴ）や
ＰｂＴｉＯ3 （ＰＴ）などの圧電粒子を分散させ焼き固
めてコンポジットを作製したため、全体に占めるジルコ
ニア量の増加に従い、誘電率を著しく小さくすることが
でき、フィルターとして用いた場合に補償減衰量を大き
くでき、共振，反共振などの温度特性を向上することが
できる。In the composite piezoelectric body and the composite piezoelectric vibrator of the present invention, piezoelectric particles such as PbZrTiO 3 (PZT) and PbTiO 3 (PT) are dispersed between zirconia fibers and baked to form a composite. As the amount increases, the dielectric constant can be remarkably reduced, the compensation attenuation amount can be increased when used as a filter, and the temperature characteristics such as resonance and anti-resonance can be improved.
【００１１】また、圧電粒子の含有量が適量である場
合、電気機械結合係数をさほど低減させることなく誘電
率を小さくできることから、圧電センサやフィルターの
直列共振子などに有用な特性、例えば全面電極が可能と
なり、帯域内でのスプリアス等の発生を抑制することが
できる。Further, when the content of the piezoelectric particles is appropriate, the dielectric constant can be reduced without significantly reducing the electromechanical coupling coefficient, so that a characteristic useful for a piezoelectric sensor or a series resonator of a filter, such as a full-face electrode. It is possible to suppress the occurrence of spurious in the band.
【００１２】さらに、繊維ジルコニアと圧電粒子とをコ
ンポジットとした複合圧電体の場合、複合圧電体の持つ
比較的小さい弾性スティフネスとジルコニアの持つ高い
破壊靭性との組合せにより、バイモルフ，ユニモルフな
どのアクチュエータにおける圧電素子を載置するための
基板（シム板）として非常に優れた特性、例えば、撓み
やすく壊れにくい等の特性を示すようになる。Further, in the case of a composite piezoelectric body in which fiber zirconia and piezoelectric particles are composites, due to the combination of the relatively small elastic stiffness of the composite piezoelectric body and the high fracture toughness of zirconia, it can be used in actuators such as bimorphs and unimorphs. As a substrate (shim plate) for mounting the piezoelectric element, it exhibits very excellent characteristics, for example, characteristics that it is easily bent and hardly broken.
【００１３】[0013]
【発明の実施の形態】本発明の複合圧電振動子を図面を
用いて詳細に説明する。図１において、符合１は複合圧
電体であり、この複合圧電体１の両面には、例えば、
金，銀，銅等からなる電極２がそれぞれ形成され、本発
明の複合圧電振動子が構成されている。複合圧電体１
は、直径１〜３０μｍで、アスペクト比が５以上のジル
コニア繊維３と、このジルコニア繊維３間に分散された
平均結晶粒径０．５〜１０μｍの圧電粒子４とから構成
されている。BEST MODE FOR CARRYING OUT THE INVENTION The composite piezoelectric vibrator of the present invention will be described in detail with reference to the drawings. In FIG. 1, reference numeral 1 is a composite piezoelectric body, and both surfaces of the composite piezoelectric body 1 are, for example,
The electrodes 2 made of gold, silver, copper or the like are formed, respectively, to form the composite piezoelectric vibrator of the present invention. Composite piezoelectric body 1
Is composed of zirconia fibers 3 having a diameter of 1 to 30 μm and an aspect ratio of 5 or more, and piezoelectric particles 4 having an average crystal grain size of 0.5 to 10 μm dispersed between the zirconia fibers 3.
【００１４】このような複合圧電振動子は、例えば、ジ
ルコニア繊維がランダムに絡み合った所定の厚みの繊維
集合体を作製し、そのジルコニア繊維集合体の上に、Ｐ
ＺＴを主成分とした圧電ペーストを塗布して繊維集合体
の間隙に圧電ペーストを含浸させた後、これを乾燥し、
１１００〜１３００℃で焼成し、複合圧電体を作製す
る。この複合圧電体は、例えば、ジルコニア繊維集合体
をＰＺＴを主成分とする溶液中に浸し、冷間静水圧成形
法（ＣＩＰ）により加圧成形して作製しても良い。In such a composite piezoelectric vibrator, for example, a fiber assembly having a predetermined thickness in which zirconia fibers are randomly intertwined with each other is prepared, and P is placed on the zirconia fiber assembly.
A piezoelectric paste containing ZT as a main component is applied to impregnate the gap between the fiber aggregates with the piezoelectric paste, and then dried.
The composite piezoelectric body is manufactured by firing at 1100 to 1300 ° C. This composite piezoelectric body may be produced, for example, by immersing a zirconia fiber aggregate in a solution containing PZT as a main component and press-molding it by a cold isostatic pressing method (CIP).
【００１５】本発明では、ジルコニア繊維と圧電粒子と
を複合して複合圧電振動子を構成したため、ジルコニア
繊維の増加に伴い誘電率を小さくすることができるた
め、フィルターとして用いた場合に補償減衰量を大きく
でき、共振，反共振などの温度特性を向上することがで
きるとともに、圧電センサやフィルターの直列共振子な
どに有用な特性、例えば全面電極が可能となり、帯域内
でのスプリアス等の発生を抑制することができる。そし
て、圧電粒子の含有量を適量とすることにより、電気機
械結合係数をさほど低減させることなく誘電率を小さく
することができ、圧電センサやフィルターの直列共振子
などに有用な特性を得ることができる。In the present invention, since the composite piezoelectric vibrator is constructed by combining the zirconia fiber and the piezoelectric particle, the dielectric constant can be decreased with the increase of the zirconia fiber. It is possible to improve the temperature characteristics such as resonance and anti-resonance, and it is possible to use characteristics that are useful for piezoelectric resonators and series resonators of filters, such as full-face electrodes, and to prevent spurious emission in the band. Can be suppressed. Then, by adjusting the content of the piezoelectric particles to an appropriate amount, it is possible to reduce the dielectric constant without significantly reducing the electromechanical coupling coefficient, and it is possible to obtain useful characteristics for a piezoelectric sensor, a series resonator of a filter, or the like. it can.
【００１６】また、ジルコニア繊維と圧電粒子とをコン
ポジットとした複合圧電体の場合、複合圧電体の持つ比
較的小さな弾性スティフネスとジルコニアの持つ高い破
壊靭性との組合せにより、バイモルフ，ユニモルフなど
のシム板として、撓み易く壊れにくい等の非常に優れた
特性を示すことができる。Further, in the case of a composite piezoelectric body which is a composite of zirconia fibers and piezoelectric particles, due to the combination of the relatively small elastic stiffness of the composite piezoelectric body and the high fracture toughness of zirconia, shim plates such as bimorphs and unimorphs are used. As a result, it is possible to exhibit extremely excellent characteristics such as easy bending and less breakage.
【００１７】また、図２に示すように、ジルコニア繊維
と、このジルコニア繊維間に分散された圧電粒子とから
なる複合圧電体１の表面に、例えば、電極膜５により圧
電膜６を挟持してなる圧電素子７を設けると、ユニモル
フとして用いることができる。Further, as shown in FIG. 2, a piezoelectric film 6 is sandwiched by an electrode film 5 on the surface of a composite piezoelectric body 1 composed of zirconia fibers and piezoelectric particles dispersed between the zirconia fibers. When the piezoelectric element 7 is formed, it can be used as a unimorph.
【００１８】さらに、図３に示すように、ジルコニア繊
維と、このジルコニア繊維間に分散された圧電粒子とか
らなる圧電材料により流体通路１１を有するポンプ本体
１３を形成し、上下の薄い複合圧電体１の表面に、例え
ば、電極膜５により圧電膜６を挟持してなる圧電素子７
を設けると、圧電ポンプとして用いることができる。Further, as shown in FIG. 3, a pump body 13 having a fluid passage 11 is formed of a piezoelectric material composed of zirconia fibers and piezoelectric particles dispersed between the zirconia fibers, and the upper and lower thin composite piezoelectric bodies are formed. For example, a piezoelectric element 7 having a piezoelectric film 6 sandwiched between electrode films 5 on the surface of
When provided, it can be used as a piezoelectric pump.
【００１９】上下の薄い複合圧電体１のみをジルコニア
繊維と、このジルコニア繊維間に分散された圧電粒子と
からなる圧電材料により形成しても良い。尚、上記ユニ
モルフと圧電ポンプでは、電極膜５により圧電膜６を挟
持してなる圧電素子７を設けた例について説明したが、
必ずしも膜である必要はない。Only the upper and lower thin composite piezoelectric bodies 1 may be formed of a piezoelectric material composed of zirconia fibers and piezoelectric particles dispersed between the zirconia fibers. In the above unimorph and piezoelectric pump, the example in which the piezoelectric element 7 in which the piezoelectric film 6 is sandwiched between the electrode films 5 is provided has been described.
It does not necessarily have to be a film.
【００２０】[0020]
実施例１ 直径が１０μｍ、アスペクト比が１０以上のジルコニア
繊維がランダムに絡み合った厚み１５０μｍのジルコニ
ア繊維集合体を作製し、そのジルコニア繊維集合体上に
ＰＺＴを主成分とした圧電ペーストを塗布して、ジルコ
ニア繊維集合体の隙間に圧電ペーストを充填させた後、
これを乾燥し、１２５０℃で焼成し、複合圧電体を作製
した。Example 1 A zirconia fiber aggregate having a thickness of 150 μm in which zirconia fibers having a diameter of 10 μm and an aspect ratio of 10 or more were randomly intertwined was prepared, and a piezoelectric paste containing PZT as a main component was applied onto the zirconia fiber aggregate. , After filling the gap of the zirconia fiber aggregate with the piezoelectric paste,
This was dried and fired at 1250 ° C. to manufacture a composite piezoelectric body.
【００２１】この後、両面に銀電極を焼付け分極処理を
施し、図１に示すような複合圧電振動子を作製した。こ
こで、複合圧電体のジルコニア繊維と圧電粒子との体積
比率を、ジルコニア繊維／圧電粒子＝０／１０，３／
７，６／４とした。これらの試料について、電子材料工
業会（ＥＭＡＳ）の規格化された測定法に基づき、比誘
電率，電気機械結合係数，圧電出力定数および弾性ステ
ィフネスを求めるとともに、破壊靱性を予亀裂導入破壊
試験法（ＳＥＰＢ）により測定し、その結果を表１に示
す。After that, silver electrodes were baked on both sides and subjected to polarization treatment to prepare a composite piezoelectric vibrator as shown in FIG. Here, the volume ratio of the zirconia fiber and the piezoelectric particle of the composite piezoelectric body is calculated as follows: zirconia fiber / piezoelectric particle = 0 / 10,3 /
It was set to 7,6 / 4. The dielectric constant, electromechanical coupling coefficient, piezoelectric output constant, and elastic stiffness of these samples are determined based on the standardized measurement method of the Electronic Materials Manufacturers Association (EMAS), and the fracture toughness is evaluated by the pre-cracking fracture test method. It measured by (SEPB) and the result is shown in Table 1.
【００２２】[0022]
【表１】 [Table 1]
【００２３】この結果から明かなように、ジルコニア繊
維と圧電粒子との複合振動子を形成することで、大きな
圧電出力定数が得られ、さらに高い電気機械結合係数を
有しながら小さな比誘電率となることから、圧電センサ
やフィルターの直列共振子などの振動子用として、上記
したように、補償減衰量や温度特性の向上並びにスプリ
アスの発生の抑制等、有用な特性が得られることがわか
る。As is clear from these results, a large piezoelectric output constant can be obtained by forming a composite oscillator of zirconia fibers and piezoelectric particles, and a high relative electromechanical coupling coefficient and a small relative dielectric constant can be obtained. From the above, it can be seen that useful properties such as an improvement in compensation attenuation amount and temperature characteristics and suppression of spurious emission can be obtained for a vibrator such as a piezoelectric sensor or a series resonator of a filter.
【００２４】また、圧電粒子の割合が少なくなるに伴い
基板の弾性スティフネスが１２×１０10Ｎ／ｍ2 から１
７×１０10Ｎ／ｍ2 となり、また、破壊靱性値は０．８
ＭＰａ・ｍ1/2 から３．２ＭＰａ・ｍ1/2 と大きくな
り、圧電素子の比較的小さい弾性スティフネスを維持し
ながら破壊靭性を大幅に向上させることができたことが
わかる。Further, the elastic stiffness of the substrate decreases from 12 × 10 10 N / m 2 to 1 as the proportion of piezoelectric particles decreases.
7 × 10 10 N / m 2 and a fracture toughness value of 0.8
From MPa · m 1/2 increases with 3.2 MPa · m 1/2, it can be seen that it is possible to significantly improve the fracture toughness while maintaining a relatively small elastic stiffness of the piezoelectric element.
【００２５】実施例２ 実施例１の試料Ｎo.２と同様にして作製したジルコニア
繊維と圧電粒子からなる厚さ５０μｍの複合圧電体上
に、下部電極となる銀とパラジウムの混合ペーストを塗
布し、その上部にＰＺＴを主成分とした圧電ペーストを
厚膜形成法により作製後、１２００℃で焼成した。その
後、上部銀電極を蒸着により取り付けた後、分極処理を
行ない、図２に示すようなユニモルフを作製し、ユニモ
ルフとしての評価を行なった。評価はレーザー変位計に
より電圧印加時の変位量と１０10回駆動後の変位量の変
化率（耐久性）とを測定することにより行った。Example 2 On a composite piezoelectric body having a thickness of 50 μm and made of zirconia fibers and piezoelectric particles prepared in the same manner as in Sample No. 2 of Example 1, a mixed paste of silver and palladium serving as a lower electrode was applied. Then, a piezoelectric paste containing PZT as a main component was formed on the upper portion by a thick film forming method, and then fired at 1200 ° C. Then, after attaching the upper silver electrode by vapor deposition, polarization treatment was performed to prepare a unimorph as shown in FIG. 2, and evaluation as a unimorph was performed. The evaluation was carried out by measuring the amount of displacement when a voltage was applied and the rate of change (durability) of the amount of displacement after driving 10 10 times with a laser displacement meter.
【００２６】比較のため、厚さ５０μｍのＹ2 Ｏ3 を３
モル％含有した部分安定化ジルコニア焼結体（ＹＳＺ）
の表面に、上記と同様の下部電極，圧電膜，上部電極か
らなる圧電素子を形成したものに対して、上記と同様に
評価を行った。For comparison, 3 μm of Y 2 O 3 having a thickness of 50 μm was used.
Partially stabilized zirconia sintered body (YSZ) containing mol%
The same evaluation as above was performed on the surface of which a piezoelectric element including the same lower electrode, piezoelectric film and upper electrode as described above was formed.
【００２７】[0027]
【表２】 [Table 2]
【００２８】この表２により、圧電体をジルコニア（Ｙ
ＳＺ）としたときより、ジルコニア繊維と圧電粒子との
複合基板としたときのほうが、繰り返し駆動による耐久
性を劣化させることなく大きな変位が得られることがわ
かった。According to Table 2, the piezoelectric material is determined by zirconia (Y
It was found that when the composite substrate of zirconia fibers and piezoelectric particles was used, a larger displacement could be obtained without deteriorating the durability due to repeated driving, as compared with the case of SZ).
【００２９】[0029]
【発明の効果】以上説明したように本発明は、ジルコニ
ア繊維中に圧電粒子を分散させ焼き固めたコンポジット
を構成することで、電気機械結合係数などの圧電性をさ
ほど劣化させることなく、誘電率を大きく低下させるこ
とができる。さらに圧電セラミックスとほぼ同等の弾性
スティフネスを保ちながら破壊靭性を大きく向上させる
ことができる。また、高分子などを用いないことから、
音響インピーダンスが高くハイパワー用振動子に有用な
特性が得られる。従って、センサー，フィルター，発振
子などの振動子として、さらにブザー，バイモルフ，ユ
ニモルフ，ポンプなどの基板用シム材として、優れた特
性を示すことができる。As described above, according to the present invention, by forming a composite in which piezoelectric particles are dispersed in zirconia fiber and baked, the dielectric constant can be obtained without deteriorating the piezoelectricity such as electromechanical coupling coefficient. Can be greatly reduced. Further, the fracture toughness can be greatly improved while maintaining the elastic stiffness almost equal to that of the piezoelectric ceramics. Also, since no polymer is used,
High acoustic impedance provides useful characteristics for high-power transducers. Therefore, excellent characteristics can be exhibited as a vibrator such as a sensor, a filter, and an oscillator, and as a shim material for a substrate such as a buzzer, a bimorph, a unimorph, and a pump.
【図１】本発明の複合圧電振動子の断面模式図である。FIG. 1 is a schematic sectional view of a composite piezoelectric vibrator of the present invention.
【図２】本発明の複合圧電振動子を用いたユニモルフの
斜視図である。FIG. 2 is a perspective view of a unimorph using the composite piezoelectric vibrator of the present invention.
【図３】本発明の複合圧電振動子を用いた圧電ポンプの
断面模式図である。FIG. 3 is a schematic cross-sectional view of a piezoelectric pump using the composite piezoelectric vibrator of the present invention.
１・・・複合圧電体 ２・・・電極 ３・・・ジルコニア繊維 ４・・・圧電粒子 ５・・・電極膜 ６・・・圧電膜 ７・・・圧電素子 DESCRIPTION OF SYMBOLS 1 ... Composite piezoelectric material 2 ... Electrode 3 ... Zirconia fiber 4 ... Piezoelectric particle 5 ... Electrode film 6 ... Piezoelectric film 7 ... Piezoelectric element
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０３Ｈ 9/17 Ｈ０１Ｌ 41/18 １０１Ｚ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification number Office reference number FI Technical display location H03H 9/17 H01L 41/18 101Z
Claims (3)
分散された圧電粒子とからなる複合圧電体。1. A composite piezoelectric body comprising zirconia fibers and piezoelectric particles dispersed between the zirconia fibers.
分散された圧電粒子とからなる複合圧電体の両面に、そ
れぞれ電極を形成してなる複合圧電振動子。2. A composite piezoelectric vibrator comprising electrodes formed on both surfaces of a composite piezoelectric body composed of zirconia fibers and piezoelectric particles dispersed between the zirconia fibers.
分散された圧電粒子とからなる複合圧電体の表面に、圧
電体層とこれを挟持する一対の電極とからなる圧電素子
を設けた複合圧電振動子。3. A composite piezoelectric device comprising a piezoelectric device comprising a piezoelectric layer and a pair of electrodes sandwiching the piezoelectric layer on the surface of a composite piezoelectric body composed of zirconia fibers and piezoelectric particles dispersed between the zirconia fibers. Oscillator.
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|---|---|---|---|
| JP07195212A JP3138190B2 (en) | 1995-07-31 | 1995-07-31 | Composite piezoelectric body and composite piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07195212A JP3138190B2 (en) | 1995-07-31 | 1995-07-31 | Composite piezoelectric body and composite piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0946792A true JPH0946792A (en) | 1997-02-14 |
| JP3138190B2 JP3138190B2 (en) | 2001-02-26 |
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ID=16337331
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013047875A1 (en) * | 2011-09-30 | 2013-04-04 | 富士フイルム株式会社 | Electroacoustic converter film, flexible display, vocal cord microphone, and musical instrument sensor |
| WO2014157684A1 (en) * | 2013-03-29 | 2014-10-02 | 富士フイルム株式会社 | Speaker system |
| WO2014162976A1 (en) * | 2013-04-01 | 2014-10-09 | 富士フイルム株式会社 | Electroacoustic transduction film |
| JP2015219011A (en) * | 2014-05-13 | 2015-12-07 | 株式会社豊田中央研究所 | Distortion-sensitive resistive paste and dynamic quantity sensor element |
-
1995
- 1995-07-31 JP JP07195212A patent/JP3138190B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013047875A1 (en) * | 2011-09-30 | 2013-04-04 | 富士フイルム株式会社 | Electroacoustic converter film, flexible display, vocal cord microphone, and musical instrument sensor |
| CN103843365A (en) * | 2011-09-30 | 2014-06-04 | 富士胶片株式会社 | Electroacoustic converter film, flexible display, vocal cord microphone, and musical instrument sensor |
| CN103843365B (en) * | 2011-09-30 | 2016-08-17 | 富士胶片株式会社 | Electroacoustic conversion film, flexible display, vocal cords mike and musical instrument transducer |
| WO2014157684A1 (en) * | 2013-03-29 | 2014-10-02 | 富士フイルム株式会社 | Speaker system |
| WO2014162976A1 (en) * | 2013-04-01 | 2014-10-09 | 富士フイルム株式会社 | Electroacoustic transduction film |
| JP2015219011A (en) * | 2014-05-13 | 2015-12-07 | 株式会社豊田中央研究所 | Distortion-sensitive resistive paste and dynamic quantity sensor element |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3138190B2 (en) | 2001-02-26 |
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