JPH0935437A - Magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate the need of milling work of Al-TiC material and resist removing work by applying a photosensitive material to the surface of a slider material, exposing and developing the photosensitive material. SOLUTION: Three polyimide patterns 2 are formed on the surface 11 of an attic slider material 1 facing a medium and an element 3 is bonded to the rear end part of central pattern. More specifically, a photosensitive material, e.g. polyimide, is applied to the surface of three polyimide patterns 2 and then is exposed while being masked and developed to remove the unnecessary part thus forming three polyimide patterns 2. The surface of central polyimide pattern 2 serves as a flying surface facing a disc medium. Furthermore, an element 3 is bonded to the rear end of central polyimide pattern 2 such that they are flush with each other thus completing a magnetic head.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a hard disk device.

[0002]

2. Description of the Related Art FIG. 6 is a cross-sectional view showing an example of a conventional method of manufacturing a magnetic head in the order of steps.

The magnetic head used in the hard disk device increases the storage capacity of the hard disk device.
From the magnetic head of the taper flat 2-rail slider,
The mainstream is a magnetic head using a negative pressure slider (NPS) in which a change in YAW angle due to the influence of a rotary reactor and a change in flying height due to a change in peripheral speed due to a radial position of a disk medium (magnetic medium) are small. Is coming.

The conventional manufacturing method of such an NPS magnetic head is as shown in FIG.
A resist 5 of a photosensitizer is applied to the medium facing surface 11c of the slider material 1c made of (altic) material, which faces the disk medium (FIG. 6A), and a mask is placed thereon to expose the unnecessary portion. Then, the air bearing surface pattern 31 is formed by removing unnecessary portions by developing (FIG. 6B), and the slider material 1c of the portion where the resist 5 has been removed is cut off by milling (FIG. 6B).
(C)) The air bearing surface 32 of the slider material 1c is exposed by removing the resist remaining on the air bearing surface pattern 31 to manufacture a magnetic head (FIG. 6).
(D)).

As described above, in the conventional magnetic head, the air bearing surface 32 is formed by cutting the slider material 1c by milling and then removing the resist pattern 31, but the milling speed of the Al--TiC material is 10 times.
Since it is about nm / min, it takes several hours to tens of hours to process one magnetic head, and a step of removing the resist pattern 31 remaining after the milling process is also required. Further, as shown in FIG. 6D, the edge 33 of the air bearing surface 32 is in a state where sharp edges remain, and burrs are generated by reattachment (resputtering) of the Al—TiC material during milling. It may occur.

[0006]

As described above, in the conventional magnetic head, the air bearing surface is formed by cutting the slider material by milling.
Since the milling speed of the C material is about 10 nm / min, it takes several hours to several tens of hours as the processing time for one magnetic head, and the step of removing the resist pattern remaining after the milling is also necessary. Is. Therefore, the conventional magnetic head has a drawback of low productivity. In addition, sharp edges are left on the edge of the air bearing surface, and burrs may occur due to milling resputtering, which poses a high risk of damaging the disk medium. There is.

[0007]

According to a first magnetic head of the present invention, a photosensitive polyimide, a UV curable resin, or a thermosetting resin is formed on the entire surface of a slider material formed of an AlTiC material facing a medium. A film of a molecular material is formed, and the film is exposed and developed using a mask to remove unnecessary portions to form a pattern having an air bearing surface. The head element is fixed, and the surface of the pattern having the air bearing surface is made flush with the surface of the magnetic head element. Further, a protective film made of diamond-like carbon is formed on the surface of the pattern having the air bearing surface. Is provided.

In the second magnetic head of the present invention, a portion of the surface of the slider material made of AlTiC material other than the portion forming the magnetic head element is removed to a certain depth.
A film of a photosensitive polyimide, a UV curable resin, or a thermosetting polymer material having a certain thickness is formed on the removed portion, and the film is exposed and developed using a mask to remove unnecessary portions. A pattern having an air bearing surface is removed to form a pattern having the air bearing surface, and the rear end of the pattern having the air bearing surface is brought into contact with the magnetic head element of the slider material, and the surface of the pattern having the air bearing surface and the surface of the magnetic head element. Including that and are on the same plane,
Further, a protective film made of diamond-like carbon is provided on the surface of the pattern having the air bearing surface.

[0009]

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a first embodiment of a magnetic head of the present invention, FIG. 2 is a cross-sectional view taken along the line AA showing the method of manufacturing the magnetic head of FIG. 1 in the order of steps, and FIG. Example B
FIG. 4 is a vertical cross-sectional view taken along line B.

In this embodiment, as shown in FIG. 1, three polyimide patterns 2 are formed on the medium facing surface 11 on the surface of a rectangular parallelepiped slider material 1 made of an AlTiC material, and the central polyimide pattern 2 is formed. The magnetic head element (element) 3 is bonded to the rear end of the magnetic head element.

The three polyimide patterns 2 are shown in FIG.
As shown in (a), first, a polyimide 6 having a thickness of 6 μm is entirely formed on the medium facing surface 11 of the slider material 1.
Then, a mask is placed on it, exposed and developed to remove unnecessary portions. As a result,
Three polyimide patterns 2 as shown in (b) are formed. The surface of the central polyimide pattern 2 of these three polyimide patterns 2 becomes the air bearing surface 21 facing the disk medium. Next, as shown in FIG.
The magnetic head is completed by bonding the element 3 to the rear end of the central polyimide pattern 2 so that their surfaces are flush with each other. The magnetic head manufactured in this way has an edge 22 (see FIG. 2) of the polyimide pattern 2.
In (b)), since a radius of about 1 to 2 μm is formed, there is no fear of damaging the disk medium. Also, 2
As a result of performing the contact start stop (CSS) and seek test for 0,000 times, the increase amount of the frictional force after the test was less than 10% of the frictional force before the test.

FIG. 4 is a vertical sectional view showing a second embodiment of the magnetic head of the present invention.

This embodiment has almost the same structure as the embodiment of FIG. 1, but the element 3a is formed integrally with the slider material 1a made of AlTiC material. When the present magnetic head is manufactured, the surface of the slider material 1a has a depth of 6 μm except for the portion forming the element 3a at the rear end of the central portion.
Scraped only, apply a photosensitive polyimide with a thickness of 6 μm to the scraped part, bake and harden it, polish it so that the polyimide and the element 3a are on the same surface, expose the polyimide and develop it Remove the part. Also in the case of this embodiment, since the edges of the polyimide pattern 2a are rounded, there is no fear of damaging the disk medium.

FIG. 5 is a transverse sectional view showing a third embodiment of the magnetic head of the present invention.

In this embodiment, diamond-like carbon (DL) is formed on the surface of the polyimide pattern 2 of the embodiment shown in FIG.
The protective film 4 such as C) is provided. By providing such a protective film 4, it is possible to prevent the magnetic head from adhering to the disk medium and reduce the frictional force between the magnetic head and the disk medium. A protective film can be provided also in the embodiment of FIG. 4, and the same effect can be expected.

In the above-mentioned embodiments, polyimide is used as a photosensitive material, but a photosensitive ultraviolet (UV) curable resin or a thermosetting (hard cure) polymer material is used instead of polyimide. Can be used.

[0018]

As described above, the magnetic head of the present invention is unnecessary by applying a photosensitive material such as polyimide on the surface of a slider material formed of AlTiC material, exposing the photosensitive material and developing it. By removing a portion to form a plurality of patterns and forming a magnetic head element at the rear end of one of the patterns to make their surfaces flush with each other, a milling process of an Al-TiC material and a resist are performed. There is an effect that the removal work of is unnecessary, and therefore it is possible to improve productivity. Further, since the edge of the air bearing surface can be rounded, there is no fear of damaging the disk medium, and there is an effect that a highly reliable magnetic disk device can be obtained. Further, by providing the protective film on the surface of the pattern having the air bearing surface, it is possible to prevent adsorption to the disk medium and to suppress an increase in frictional force with the disk medium.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of a magnetic head of the present invention.

2A is a flow chart showing a method of manufacturing the magnetic head of FIG.
It is a cross-sectional view taken along the line A.

FIG. 3 is a vertical sectional view taken along line BB of the embodiment shown in FIG.

FIG. 4 is a vertical sectional view showing a second embodiment of the magnetic head of the present invention.

FIG. 5 is a transverse sectional view showing a third embodiment of the magnetic head of the present invention.

FIG. 6 is a cross-sectional view showing an example of a conventional method of manufacturing a magnetic head in the order of steps.

[Explanation of symbols]

 1.1a / 1c Slider material 2.2a Polyimide pattern 3.3a Element 4 Protective film 5 Resist 6 Polyimide 11 / 11c Medium facing surface 21/32 Air bearing surface 22/33 Edge 31 Air bearing surface pattern

Claims (3)

[Claims] 1. A film of a photosensitive polyimide, a UV curable resin, or a heat curable polymer material is formed on the entire surface of a slider material formed of an Altic material, which is opposed to a medium, and the film is formed using a mask. A pattern having an air bearing surface by removing unnecessary parts by exposing and developing the magnetic head element, and fixing a magnetic head element to the rear end of the pattern having the air bearing surface, and the surface of the pattern having the air bearing surface. And a surface of the magnetic head element that is flush with the surface of the magnetic head element. 2. A portion of the surface of a slider material made of Altic material other than a portion for forming a magnetic head element is removed to a certain depth, and the removed portion is made of a photosensitive polyimide or UV having a certain thickness. A film of a curable resin or a thermosetting polymer material is formed, and the film is exposed and developed using a mask to remove unnecessary portions to form a pattern having an air bearing surface. And a magnetic head element made of the slider material in contact with the rear end of the pattern, so that the surface of the pattern having the air bearing surface and the surface of the magnetic head element are flush with each other. . 3. The magnetic head according to claim 1, wherein a protective film made of diamond-like carbon is provided on the surface of the pattern having the air bearing surface.