JPH09326352A5 - - Google Patents

Info

Publication number
JPH09326352A5
JPH09326352A5 JP1996163848A JP16384896A JPH09326352A5 JP H09326352 A5 JPH09326352 A5 JP H09326352A5 JP 1996163848 A JP1996163848 A JP 1996163848A JP 16384896 A JP16384896 A JP 16384896A JP H09326352 A5 JPH09326352 A5 JP H09326352A5
Authority
JP
Japan
Prior art keywords
light source
lens elements
illumination optical
illumination
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1996163848A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09326352A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8163848A priority Critical patent/JPH09326352A/ja
Priority claimed from JP8163848A external-priority patent/JPH09326352A/ja
Publication of JPH09326352A publication Critical patent/JPH09326352A/ja
Publication of JPH09326352A5 publication Critical patent/JPH09326352A5/ja
Withdrawn legal-status Critical Current

Links

JP8163848A 1996-06-04 1996-06-04 照明光学装置 Withdrawn JPH09326352A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8163848A JPH09326352A (ja) 1996-06-04 1996-06-04 照明光学装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8163848A JPH09326352A (ja) 1996-06-04 1996-06-04 照明光学装置

Publications (2)

Publication Number Publication Date
JPH09326352A JPH09326352A (ja) 1997-12-16
JPH09326352A5 true JPH09326352A5 (cg-RX-API-DMAC10.html) 2004-11-04

Family

ID=15781911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8163848A Withdrawn JPH09326352A (ja) 1996-06-04 1996-06-04 照明光学装置

Country Status (1)

Country Link
JP (1) JPH09326352A (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4238390B2 (ja) 1998-02-27 2009-03-18 株式会社ニコン 照明装置、該照明装置を備えた露光装置および該露光装置を用いて半導体デバイスを製造する方法
JP5924037B2 (ja) * 2012-03-09 2016-05-25 ソニー株式会社 照明装置および表示装置

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