JPH09323174A - Joining method of member, joined member, and disassembly method of joined member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To strongly join two members or more while maintaining high strength of amorphous alloy. SOLUTION: A joining part of at least one member among two members or more to be mutually joined is made of the amorphous alloy having over cooling liquid region, at least the joining part is heated to the over cooling liquid region together with the joining part of other member, after both joining parts are mutually pressed, it is cooled, joining is executed under the state in which a rate of crystallizing of amorphous alloy at the joining part of one member is <=70%.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a method for joining two or more members by using an amorphous alloy, a joined member and a method for disassembling the joined member.

[0002]

2. Description of the Related Art As a conventional method for joining members using an amorphous alloy having a supercooled liquid region, Japanese Patent Laid-Open No. 5-13
The method described in Japanese Patent No. 1279 is known. In this method, an amorphous alloy is sandwiched between the metals to be joined, and the amorphous alloy is heated to a temperature in a supercooled liquid region that causes viscous flow that reduces the deformation resistance of the amorphous alloy. The amorphous alloy is pressurized via the. Due to this pressurization, the microscopic asperities on the surface of the amorphous alloy are deformed according to the asperities on the surfaces of the metals to be joined, so that the amorphous alloy and the metal are brought into surface contact. By maintaining this surface contact state, diffusion progresses at a low temperature, so that bonding can be performed.

As a method of joining metals without using an amorphous alloy having the above supercooled liquid region, there are known methods such as brazing, welding and adhesion. In FIG. 23, among these, the brazing is used for joining, so
The method described in Japanese Patent No. 141 is shown. In this method, the node ring main body 102 of the node ring 100 used for the endoscope and the wire receiver 101 are joined by brazing. The node ring 100 is a member that constitutes a curved portion of the insertion portion of the endoscope, and is configured by the node ring main body 102 and a plurality of wire receivers 101 brazed to the inner surface of the node ring main body 102. . In addition, the insertion port 10 of the wire receiver 101
An operation wire 105 is inserted through 7, and the node ring main body 1
A mesh tube 119 is provided on the outer periphery of 02.

Note that the node ring 100 is a hollow cylindrical member, and the upper and lower positions are locally shown in cross section in FIG.
As shown by connecting adjacent node rings by pivots, a plurality of node rings 100 are connected by a connecting portion so that they can slope freely.
Then, the operation wire 105 inserted through the insertion port 107 of the wire receiver 101 brazed to the inner peripheral portion of each node ring 100.
When the operator of the endoscope operates the endoscope by hand, the slope of the endoscope is curved in a desired direction.

As shown in FIG. 23, the notch 11 is provided at the attachment position of the wire receiver 101 in the node ring main body 102.
7 is formed, and the wire receiver 101 is formed in the notch 117.
The wire receiver 101 is fixed in a state where the wire receiver 101 is inserted.
This fixing is performed by applying a brazing material 118 around the contact portion of the wire receiver that comes into contact with the node ring main body 102 and brazing.

[0006]

The conventional method of using an amorphous alloy for joining metals is to use diffusion as a joining mechanism. In order to perform this diffusion, the amorphous alloy is supercooled with a liquid. After heating to the area, for a long time of about several hundred minutes,
It is necessary to maintain the temperature in the supercooled liquid zone. However, by keeping the temperature of the supercooled liquid region isothermal, the amorphous alloy is crystallized in several tens of minutes.
In general, amorphous alloys have much higher mechanical strength than crystal alloys of the same composition because there are no grain boundaries, but when crystallization occurs, the mechanical strength decreases. However, the high strength and high fracture toughness, which are the characteristics of the amorphous alloy, are impaired. Therefore, for the purpose of promoting the diffusion phenomenon, the amorphous alloy that is heated and isothermally held in the supercooled liquid region for a long time while being inserted between the metals to be joined becomes a fragile intermediate layer due to crystallization. However, there is a problem that the bonding strength is lowered.

On the other hand, the joining method which does not use an amorphous alloy having a supercooled liquid region also has respective problems. In welding, since a member is heated to a temperature equal to or higher than its melting point, the base material is deteriorated by heat to reduce the strength of the joint portion, and the solidification contraction after heating causes distortion to reduce the dimensional accuracy. The same is true for brazing, and the base material deteriorates due to the heat effect of heating, and the strength of the joint decreases. In bonding, the bonding strength is low, practical bonding cannot be performed, and since the softening point of the adhesive is low, it cannot be used in a high temperature environment.

Next, the joint ring main body 102 of the endoscope and the wire receiver 101 are joined by brazing.
The method of 6141 has the following problems. Flux is used for brazing, but this flux must be removed after brazing. In addition, when brazing, the molten brazing material easily enters the insertion opening 107 of the operation wire 105, and the brazing material entering the insertion opening 107 needs to be removed in a later step. Further, the notch 117 has to be processed in the node ring main body 102 for brazing, which makes the processing troublesome. These operations increase the number of steps, complicate the entire manufacturing process, and require a long time for manufacturing. In addition to these,
The brazing material adheres to the mesh tube 119 around the node ring main body 102,
This causes the mesh tube 119 to be consumed early.

The present invention has been made in consideration of such conventional problems, and when joining using an amorphous alloy having a supercooled liquid region, high strength of the amorphous alloy is obtained. It is an object of the present invention to provide a joining method capable of joining members made of an amorphous alloy to each other or members made of an amorphous alloy and a member made of another metal with high accuracy while maintaining the above. Another object of the present invention is to provide a member joined by this method, and further to provide a method for disassembling the joined member.

[0010]

In order to achieve the above object, the joining method according to the first aspect of the present invention includes:
The joint portion of at least one member is made of an amorphous alloy having a supercooled liquid zone, and at least the joint portion of this one member is heated together with the joint portion of the other member to the supercooled liquid zone, and both joint portions are joined together. After they are pressed against each other, they are cooled and joined.

An amorphous alloy having a supercooled liquid region is heated to the supercooled liquid region, whereby 10 ⁸ to 10 ¹⁰ P
Viscous flow of about a · S is exhibited, and plastic deformation is possible by a low pressure of about several MPa. Therefore, appropriate pressing force,
Select a pressing condition such as a pressing atmosphere, heat at least the joint of one member made of an amorphous alloy to the temperature of the supercooled liquid region together with the joint of the other member, and press both joints against each other. As a result, extremely large plastic deformation due to viscous flow locally occurs at the joint portion of one member. Due to this plastic deformation, the oxide film or the like of the joint made of the amorphous alloy is destroyed and the new surface is exposed, and the joint can be brought into close contact with the joint of the other member.

Since the new surface as described above is a metal surface in a clean state, it is extremely active. When this active surface adheres to the surface of the other member, a chemical reaction occurs at the contact interface. Joining is done. The present invention exposes a new surface by viscous flow of such an amorphous alloy, and applies a reaction phenomenon between the active surface of the exposed new surface and the surface of the other member.

The time required for joining depends on the amorphous alloy used for joining, the composition of the other metal to be the mating member, the joining temperature, and the pressing force, but it depends on the joining mechanism within the extremely limited range of the joining interface. Therefore, it is extremely short as compared with the joining method using the diffusion phenomenon, and it is completed in about 15 minutes at the longest. Since the time required for joining is short like this,
The thickness of the diffusion layer is several hundreds nm or less, which is negligibly thin. On the other hand, if the diffusion layer is thick,
Since it is a fragile layer that appears as an intermediate layer between the members to be joined, the effect of contributing to the joining strength is reduced. In order to prevent the formation of such a thick diffusion layer and increase the bonding strength, it is preferable that the bonding time be within 15 minutes.

After the above joining, the joined members are cooled. By this cooling, crystallization and weakening of the amorphous alloy can be prevented, and the joining can be performed without lowering the original high strength and high hardness of the amorphous alloy.

By assuming such a method,
In the present invention, each specific means described in the following (a) to (g) can be appropriately adopted. (A) Of the two or more members that are joined to each other, at least one of the members is made of an amorphous alloy having a supercooled liquid region, and at least the joint is formed together with at least the other member. By heating to the cooling liquid region, pressing the joint portion of one member and the joint portion of the other member against each other, and then cooling, the crystallization rate of the amorphous alloy in the joint portion of the one member is It is joined to the joint portion of the other member in a state of 70% or less.

In this method, in addition to the method described above, the crystallization rate of the joint portion of one member is kept to 70% or less by cooling after pressing. Even if the amorphous alloy is crystallized due to the joining, the crystallization rate is 70%.
By controlling the content to be not more than%, it is possible to prevent the mechanical strength of the amorphous alloy from being extremely lowered. If the crystallization rate exceeds 70%, the brittleness of the member becomes remarkable and sufficient mechanical strength cannot be maintained.

(B) Of the two or more members made of an amorphous alloy having a supercooled liquid region at the joint, at least the joint of at least one member is supercooled together with at least the joint of the other member. After heating to a liquid region, pressing both joints against each other, and then cooling the joints.

This means (b) differs from the means (a) in that both joints of the members to be joined are amorphous alloys. By heating both joints made of an amorphous alloy to the supercooled liquid region, extremely large plastic deformation due to viscous flow occurs at the joint interface of both joints. Then, due to this plastic deformation, the oxide film on the surface of both amorphous alloys is destroyed and the new surface is exposed. By contacting the new surface, mutual bonding of metal atoms occurs and bonding can be performed. .

In the means (a), the reaction action between the surface of another metal and the new surface of the amorphous alloy exposed by viscous flow is applied. In the means (b), in addition to this, the metal is added. A complicated bonding mechanism such as a reaction with oxygen contained in the surface oxide film and other reactions acts. Further, by forming both of the joint portions of the members to be joined with an amorphous alloy, both joint surfaces are plastically deformed with each other, so that it is possible to shorten the time required for the adhesion of the joint surfaces,
Further, the degree of adhesion becomes higher, which enables strong bonding.

(C) A method of joining two members having joints made of an amorphous alloy having different center temperatures in the supercooled liquid region, wherein the supercooled liquid region is relatively high in temperature. After heating the joint part made of the alloy to its supercooled liquid region and deforming it to expose the new surface, the joint part made of an amorphous alloy whose supercooled liquid region is at a relatively low temperature is joined together with the joint part. After heating to the supercooled liquid region and deforming to expose the new surface, the new surface and the new surface of the joint are pressed against each other and then cooled to bond.

This means (c) differs from the means (b) in that amorphous alloys having different central temperatures in the supercooled liquid region are joined. The joint made of an amorphous alloy in which the supercooled liquid region has a relatively high temperature is heated to the supercooled liquid region and deformed to generate viscous flow. The active surface is partially destroyed, exposing the new surface. Then, the new surface described above is cooled to the supercooled liquid region of the amorphous alloy where the supercooled liquid region is relatively low temperature, and the joint where the supercooled liquid region is low temperature is heated to the supercooled liquid region. Then, the new surface is exposed by deforming. After that, these new surfaces are pressed against each other and brought into close contact with each other, thereby joining the new surfaces to each other.

In the means (b), all the amorphous alloys used for joining are required to be in the temperature range of the glass transition temperature Tg or higher and the crystallization start temperature Tx or lower. In the means (c), it is possible to join even if the temperature regions of the supercooled liquid regions of the amorphous alloy used for joining do not overlap at all.

(D) Friction force in a state where the joint surface of the first member made of an amorphous alloy having a supercooled liquid region is brought into contact with the joint portion of the second member made of a metal softer than the same member. And abrading the surface to deform the joint portion of the second member to expose the new surface, and at least the joint portion of the first member together with at least the joint portion of the second member. Heating to a cooling liquid region, deforming the joint to expose the new surface, and pressing the exposed new surface and the new surface of the second member against each other; cooling the first member and the second member And the step of performing.

In this means (d), the second member made of a metal softer than the first member made of an amorphous alloy is abraded by applying a frictional force to expose the new surface. In addition to this, the first
At least the joint portion of the member (1) is heated to its supercooled liquid region and deformed, so that the newly formed surface is similarly exposed. Then, these newly-formed surfaces are pressed against each other and brought into close contact with each other, so that the bond between the metal atoms at the bonding site is promoted, and thereby bonding can be performed.

(E) Among the members to be joined, one member is made of an amorphous alloy having a supercooled liquid region, the other member is made of a metal having a coefficient of thermal expansion different from that of the one member,
After heating at least the joint portion of one member together with at least the joint portion of the other member to the supercooled liquid region and pressing both joint portions against each other, both joint portions are cooled and joined.

(F) In the above means (e), the other member has a coefficient of thermal expansion larger than that of the one member, and one of the joints is heated to a supercooled liquid region. It is assumed that the joint portion has a recess filled with.

(G) In the above means (e), the other member has a coefficient of thermal expansion smaller than that of the one member, and the member is heated to the supercooled liquid region. It is assumed that the joint has a convex portion filling the periphery thereof.

In these means (e) to (g), one of the members to be joined is made of an amorphous alloy having a supercooled liquid region, and the other member is different in thermal expansion from the amorphous alloy. It is a requirement that it consists of a metal with a coefficient. In the means (e), the joining portion of such two members is heated to the supercooled liquid region of the first member, the joining portions are pressed against each other, and then cooled to join. This joining mechanism is similar to the above-mentioned means (a) to (d).

The means (f) and (g) are the same as the means (e).
In addition to this, the viscous flow of the first member generated by heating to the supercooled liquid region is utilized, and the second member is provided with a structure that is filled with the viscous flow to cause mechanical coupling. .

In the means (f), the coefficient of thermal expansion of the second member is larger than that of the first member, and the first member is supercooled at the joint of the second member. A recess is provided so that it can be filled in the liquid region. After cooling,
Since a stress that causes the inner surface of the recess of the second member and the bonding interface of the first member filled in the recess to come into close contact with each other is generated, more firm bonding can be achieved.

In the means (g), the coefficient of thermal expansion of the second member is smaller than that of the first member, and the first member in the supercooled liquid region is joined to the joint portion of the second member. Is provided with a convex portion that can be filled around the member. After cooling, a stress that causes the outer circumference of the convex portion of the second member and the bonding interface of the first member filled around the convex portion to come into close contact with each other is generated, so that stronger bonding can be achieved.

According to a second aspect of the present invention, there is provided a joined member, wherein at least the joint portion is made of an amorphous alloy having a supercooled liquid region, and at least the joint portion is heated to the supercooled liquid region. A second part having at least a part joined by being cooled by being pressed by
And a member.

The first member and the second member are the method according to claim 1 or the specific means (a) to (g) described above.
It is joined by any of the above methods, and is in a strongly joined state.

According to a third aspect of the present invention, the joint portion of at least one member is made of an amorphous alloy having a supercooled liquid region, and at least the joint portion is heated to the supercooled liquid region to join the other member. A method for disassembling two joined members by pressing them against a portion and then cooling, wherein at least the joint portion of the one member is heated to a temperature of the supercooled liquid region or higher and decomposed. To do.

The temperature above the supercooled liquid region in this method is a temperature above the temperature set at the time of joining, and the temperature at which at least one member has a negative thermal expansion coefficient, and the amorphous alloy. And a temperature equal to or higher than the crystallization start temperature of the member consisting of. Therefore, this method includes the following specific means (h) and (i).

(H) With respect to the members joined by the method described in any one of the means (e) to (g), the temperature is equal to or higher than the temperature set at the time of joining, and the thermal expansion is performed. At least one of the members is heated to a temperature at which the coefficient becomes negative or higher to decompose one member and the other member.

Amorphous alloys produced by liquid quenching or casting have the property of having a negative coefficient of thermal expansion in the supercooled liquid region and contract. Therefore, when the amorphous alloy is reheated to a temperature equal to or higher than the temperature set at the time of joining, the amorphous alloy heated in the supercooled liquid region contracts again, so that the joining surface with the other member is joined. And dissociation occurs. Thereby, the joined members can be separated and disassembled.

(I) The joining portion of a member made of an amorphous alloy having at least a supercooled liquid region is joined to a member joined by the method described in any one of the means (a) to (g). Both members are decomposed by heating above the crystallization start temperature.

By heating above the crystallization start temperature Tx, the amorphous alloy starts to crystallize within a few minutes. or,
The crystallized amorphous alloy is more
Mechanical strength is extremely reduced. Therefore, even if they are bonded, they are cooled again after being reheated to the crystallization start temperature Tx or higher.
In the above member, since the member made of the amorphous alloy is crystallized and becomes brittle, the member can be easily broken, and the member can be decomposed by this breaking.

[0040]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) In this embodiment, a member made of an amorphous alloy having a supercooled liquid region (hereinafter referred to as an amorphous alloy unless otherwise specified) and another member With respect to the joining method, the node ring main body 2 of the node ring 9 that is a member that constitutes the bending portion of the endoscope
The bonding between the wire receiver 1 and the wire receiver 1 will be described as an example with reference to FIGS. The node ring is a member for adjusting the bending direction of the bending portion of the endoscope by passing the wire through the wire insertion port 8 of the wire receiver 1 joined to the inside of the node ring body 2 and operating the wire at hand. . FIG. 1 shows the arrangement of a node ring 9 and usually two or four wire receivers 1 and heating means, one node ring body 2
2 is a partially cutaway front view showing the wire receiver 1 and FIG. 2 is a partially cutaway front view showing a state of the node ring 9 after heating.

The wire receiver 1 is refined by molding an amorphous alloy having a supercooled liquid region having an absolute temperature of 50 K or more into a ring shape. The node ring body 2 is made of metal such as stainless steel. An amorphous alloy having a supercooled liquid region has a glass transition temperature (Tg) at a temperature lower than the crystallization start temperature (Tx), and a clear supercooled liquid region ΔT (Tx-T
g). In this supercooled liquid region, the amorphous alloy has a property of becoming a completely Newtonian fluid, and by utilizing this property, the wire receiver 1 and the node ring main body 2 can be joined.

As shown in FIG. 1, the method of joining the wire receiver 1 and the node ring main body 2 is as follows.
The outer diameter portion of the contact portion 1a is abutted, and the contact portion 1a of the wire receiver 1 is locally heated by the heater 5 to the supercooled liquid region of the amorphous alloy, so that the amorphous alloy in the contact portion 1a is Newtonian. Soften until it shows flow. As a result, the contact portion 1a becomes the fluid portion 1b as shown in FIG. 2 and is brought into close contact with the inner surface of the saving body 2. After that, heating is stopped, the fluid portion 1b is solidified, and the wire receiver 1 and the node ring main body 2 are fixed to each other. At this time, since the wire receiver 1 is fixed as a fluid only by the thickness of the contact portion 1 a, the height of the wire receiver 1 in the center direction on the inner surface of the node ring body 2 is the thickness of the wire receiver 1. The thickness is lowered and the parts are joined. Since the contact portion 1a of the wire receiver 1 is sensitive to temperature and abruptly softens, the entire wire receiver 1 will not be heated and deformed if heated within several tens of seconds.

3 and 4 show further details of the present embodiment. FIG. 3 is a schematic front view of an apparatus for joining a wire receiver and a node ring body, and FIG. 4 is a wire receiver 1 and a node ring body. Two
It is an enlarged partial fracture front view of the joined part with.

As shown in FIG. 3, the node ring main body 2 is vertically sandwiched by two node ring main body supports 3 and 3. The two wire receivers 1, 1 which are symmetrical with respect to the center of the node ring are supported by two wire receiving supports 4, 4 which are horizontally inserted into the inner surface of the node ring body 2.
An air passage (not shown) penetrates through the wire receiving supports 4 and 4 having a shape along the outer circumference of the wire receiver 1 in the longitudinal direction, and sucks and holds the wire receivers 1 and 1.
The wire receiving supports 4 and 4 are connected to a drive system (not shown) to press the wire receivers 1 and 1 against the inner surface of the node ring main body 2. Wire receivers 1, 1 are amorphous alloys Zr having a supercooled liquid region manufactured by the liquid quenching method.
₆₅ Cu _27.5 Al _7.5 (subscripts are atomic%, glass transition temperature (Tg) 367 ° C., crystallization start temperature (Tx) 467 ° C.,
Supercooled liquid region (△ T) 100 ℃, maturation expansion coefficient 10 × 10
^-6 ).

Contact portions of the wire receivers 1 and 1 with the node ring body 2
Two heaters 5 and 5 serving as means for heating 1a and 1a are arranged so as to face each other so that 1 of each of the wire receivers 1 and 1 can be heated from the node ring main body 2 side. The heaters 5 and 5 are connected to a power source via a voltage regulator (not shown) so that the voltage for heating can be adjusted. Furthermore, the heaters 5 and 5 have tubes 6 and 6, respectively.
Is connected, and Ar not shown is shown through the flowmeters 7, 7.
It is possible to regulate the supplied inert gas by communicating with an inert gas source.

Next, among the wire receivers at the symmetrical positions,
A method of joining the pair of wire receivers 1 and the saving body 2 will be described. As shown in FIG. 3, the wire receiver 1 is brought into contact with the attachment position of the wire receiver 1 of the node ring main body 2 which is sandwiched by the node ring main body support 3 from above and below. Contact force is 1
00 to 500 gf is good. The inert gas whose flow rate is adjusted by the flow meter 7 is guided from the tube 6 to the heater 5 and heated in the heater 5, and the hot fluid is jetted to heat the wire receiver 1 from the node ring main body 2 side. The temperature of the node ring main body 2 rises due to heating, and then the wire receiver 1 rises in temperature due to heat conduction from the node ring main body 2. The contact portion 1a of the wire receiver 1 has a glass transition temperature Tg (367 ° C.)
When reaching the above, the amorphous alloy of the contact portion 1a becomes a Newtonian fluid, and as shown in FIG. 4, the contact portion 1a becomes a fluid portion 1b and comes into close contact with the inner surface of the node ring main body 2.

After that, the heating is stopped and the fluid portion 1b is solidified to fix the wire receiver 1 and the node ring main body 2 to each other. At this time, the thickness of the contact portion 1a of the wire receiver 1 becomes a fluid and is fixed to the inner surface of the node ring body 2, so that the height of the wire receiver 1 toward the center of the node ring body 2 is
The wire receiver 1 is reduced in thickness by the thickness of the wire receiver 1 and is joined.

During heating by the heater 5, only the contact portion 1a of the wire receiver 1 becomes Newtonian fluid, and the voltage of the heater 5 and flow rate are adjusted so that even the operation wire insertion port 8 does not become Newtonian fluid. The heating temperature history is controlled by adjusting the flow rate by the meter 7. In this embodiment, the heating temperature of the heater is 367 ° C to 467 ° C and the heating time is 10 to 30 seconds.

Upon heating, the amorphous alloy Zr ₆₅ Al _7.5 Cu
_In order to prevent _27.5 oxidation, the entire atmosphere is an inert gas atmosphere such as Ar. Further, if the cooling rate after joining is as high as possible, it is effective in preventing embrittlement of the amorphous alloy due to heating. Since the heating time is short in this embodiment, a sufficient cooling rate can be obtained even by natural cooling. Further, if necessary, after joining, the heating of the heater 5 is stopped, and a cooling air of an inert gas is blown to the heating portion, whereby the cooling rate can be improved. As a result of the examination, when the cooling rate was 50 ° C./min or more, 90% or more of the material strength before forming could be maintained. Further, although the amorphous alloy may be crystallized depending on the bonding time and the aging temperature, in the present embodiment, the crystallization did not occur because the bonding time was as short as several tens of seconds. . The maximum heating time is 0.5 minutes, the maximum bonding time is about 1 minute, the maximum heating temperature is 467 ° C, and the cooling rate is 50 ° C / m.
Since it is more than in, the time to cool to a temperature of 120 ° C. or lower, which is sufficiently lower than the supercooled liquid region, is within 7 minutes, and further, it is within 9 minutes from the start of heating to the end of cooling,
Weakness of the joint was prevented, and high strength could be maintained.

According to the present embodiment, since the brazing material is not used for joining the wire receiver which has been conventionally performed by brazing, flux cleaning is not required and the wire receiver made of an amorphous alloy is used. Since only the joint between 1 and the node ring body 2 which is a member made of another metal material is heated, the insertion hole 8 for the operation wire is not filled with the brazing material. In addition, there is no need for a notch for fitting the wire receiver 1 to the node ring main body 2, which facilitates molding and also allows fluid to flow out to a mesh pipe that is provided outside the node ring main rest 2. Absent. As a result, the manufacturing cost is significantly reduced, and an inexpensive node ring can be obtained.

In this embodiment, a heater is used as the heating means, but instead of this, heating by a high-density energy beam such as a laser beam or an electron beam, or high frequency induction heating may be used. Although the case where two wire receivers are joined at the same time is shown, the number of wire receivers is not limited.

(Embodiment 2) In the present embodiment, a method for joining a member made of an amorphous alloy having a supercooled liquid region and another member, will be described. An example of joining with and will be described with reference to FIGS. 5 and 6.
FIG. 5 is a cross-sectional view of an apparatus for joining the wire receiver 1 and the node ring main body 2, and FIG. 6 is an enlarged cross-sectional view of a joining portion between the wire receiver and the node ring main body. The configuration of the second embodiment is the same as that of the first embodiment except that the heating means is omitted. Therefore, the same parts are designated by the same reference numerals and duplicate description will be omitted.

The feature of the second embodiment is that ultrasonic vibration is used as the heating means. In FIG. 5, the pin 11 is inserted through the operation wire insertion opening 8 of the wire receiver 1. The bottle 11 is connected to an ultrasonic generator (not shown) and acts so as to transmit the ultrasonic vibration from the ultrasonic generator to the wire receiver 1. An air passage 12 penetrates in the longitudinal direction in the wire receiving support 4 that presses the wire receiving 1 against the node ring body 2, and sucks and holds the wire receiving 1.

The method of joining the wire receiver 1 and the node ring main body 2 is as follows.
On the inner surface of the node ring body 2 sandwiched from the up and down direction, about 30 ~
Contact with a contact force of 500 gf. The bottle 11 is inserted into the insertion port 8 of the wire receiver 1. The ultrasonic generator is driven to transmit ultrasonic vibration to the wire receiver 1 through the bin 11.
The frequency of ultrasonic waves is 30 to 100 kHz, and the output is 100 W
It was set to 3 kW.

Due to the ultrasonic vibration, the contact portion 1a of the wire receiver 1 is heated by friction with the node ring 2. Abutment part 1a
When the temperature of 1 reaches 367 ° C. or higher, the amorphous alloy of the contact portion 1a becomes a Newtonian fluid, and the contact portion 1a becomes a fluid portion 1b as shown in FIG. At the same time that the contact portion 1a becomes a Newtonian fluid, the wire receiver 1 is attached to the node ring main body 2 at the same time.
Press on. It is preferable that the pressing force is 300 gf to 1 kgf and the pressing time is 100 seconds. Due to this pressing force, the fluid body portion 1b of the wire receiver 1 can be brought into close contact with the node ring body 2.

After that, the ultrasonic vibration is stopped and the fluid portion 1
b is solidified by cooling, and the wire receiver 1 and the node ring main body 2 are joined. If the cooling rate after joining is as high as possible, it is effective in preventing embrittlement of the amorphous alloy due to heating. In the present embodiment, the cooling rate was 50 ° C./min or more, and 90% or more of the material strength before molding could be maintained. Further, the amorphous alloy may be crystallized depending on the bonding time and the heating temperature. In the case of the present embodiment, however, since the bonding time is as short as 100 seconds, adverse crystallization does not occur. It was The crystallization rate of the wire receiver is 70
%, The strength was not practically sufficient due to the embrittlement of the material.

According to the second embodiment, the first embodiment
In addition to the effect of, the connection between the wire receiver 1 and the node ring main body 2 is
Since the joint part is locally heated by frictional heat, temperature control becomes easy. Also, since heating with a heater or the like is unnecessary,
There is no oxidation of the peripheral part, and the oxide film removal process after joining is unnecessary. Further, since the pin 11 is inserted through the operation wire insertion hole 8, it is possible to prevent the operation wire insertion hole 8 from being crushed due to the pressing of the wire receiver 1.

In the second embodiment, as the wire receiver 1, Zr ₆₅ Al _7.5 Cu which is a Zr type amorphous alloy is used.
_27.5 (subscript indicates atomic%) was used, but instead of this, the material of the joint ring main suspension 2 was Zr-based amorphous alloy Zr ₆₅ Al.
The same effect can be obtained by using _7.5 Cu _27.5 (subscript indicates atomic%) and using the wire receiver 1 as a metal such as stainless copper.

(Embodiment 3) In the present embodiment, a method of joining members made of an amorphous alloy having a supercooled liquid region to each other is described. An example of the joining method will be described with reference to FIGS. 5, 6 and 7. 5 and 6 are the same as those of the second embodiment except that the structure of the node ring main body is different, and FIG. 7 is an enlarged cross-sectional view of the joint between the wire receiver and the node ring main body.

In this embodiment, the wire receiver 1 is set to Zr.
System amorphous alloy Zr ₆₅ Al _7.5 Cu _{27 .5} (subscript indicates atomic%, the same characteristics as in the first embodiment), and the node ring body 13 Zr-based amorphous alloy Zr ₅₅ Cu ₃₀ Al ₁₀ Ni ₅ (The subscripts are atomic%, glass transition temperature (Tg) 420 ° C., crystallization start temperature (Tx) 504 ° C., supercooled liquid region (ΔT) 84 ° C., and thermal expansion coefficient 10 × 10 ⁻⁶ ). Other configurations are the same as those of the second embodiment of the invention except for the material of the node ring main body 13, and therefore the description of the same parts will be omitted.

When the wire receiver 1 and the node ring main body 13 are joined, as shown in FIG. 5, the wire receiver 1 is sucked and held by the wire receiving support body 4, and the node ring main body 13 (node node of FIG. 5) is held. The same as the main body 2) is brought into contact with the inner surface with a contact force of about 30 to 500 gf. Then, the pin 11 is inserted into the insertion hole 8 of the operation wire of the wire receiver l. An ultrasonic generator (not shown) is driven to transmit ultrasonic vibration to the wire receiver 1 through the pin 11. The frequency of ultrasonic waves is 30 to 100 kH
z, and the output was 100 W to 3 kW. Due to this ultrasonic vibration, the contact portion 1a of the wire receiver 1 is heated by friction with the node ring body 13.

When the temperature of the contact portion 1a reaches 367 ° C. or higher, the amorphous alloy of the contact portion 1a becomes a Newtonian fluid, and the contact portion 1a becomes the fluid portion 1b as shown in FIG. . At the same time that the contact portion 1a becomes a Newtonian fluid,
The wire receiver 1 is pressed against the node ring main body 13 (the same as the node ring main body 2 in FIG. 6). The pressing force was 300 gf to 1 kgf, and the pressing time was 60 seconds. By this pressing, the fluid portion 1b of the wire receiver 1 is deformed as shown in FIG.
It becomes fixed on the inner surface of the.

When ultrasonic vibration is further continued, as shown in FIG. 7, the contact portion of the node ring main body 13 with the wire receiver 1 becomes 42.
The temperature is raised to 0 ° C. or higher to become a Newtonian fluid to form a fluid portion 13b, and the fluid portion 1b of the wire receiver 1 is mixed therewith. After that, the ultrasonic vibration is stopped, the fluid parts 1b and 13b are solidified by cooling, and the wire receiver 1
And the node ring main body 13 are joined. At this time, by using an inert gas such as Ar for the atmosphere of the joint or the whole, Zr
Oxidation of the amorphous alloys can be prevented. Furthermore, by setting the atmosphere during processing to a vacuum of 10 ^-2 Pa or less, not only is there no oxidation, but the generation of voids due to the mixing of gas can be prevented, and the bonding strength is improved. If the cooling rate after joining is as high as possible, it is effective in preventing embrittlement of the amorphous alloy due to heating. In the present embodiment, the cooling rate was 50 ° C./min or more, and 90% or more of the material strength before molding could be maintained. Further, although the amorphous alloy may be crystallized depending on the bonding time and the heating temperature, in the case of the present embodiment, since the bonding time is as short as 60 seconds, no crystallization that causes an adverse effect occurs. It was When the crystallization rate of the wire receiver was 70% or more, practically sufficient strength could not be obtained due to embrittlement of the material.

According to this embodiment, in addition to the effect of the second embodiment, since both members are made of an amorphous alloy, the joint strength can be strengthened, so that the reliability of the node ring is improved. In this embodiment, the wire receiver 1 is made of Zr-based amorphous alloy Zr ₆₅ Al _7.5 Cu _27.5 (subscript is atomic%), and the node ring body 13 is made of Zr-based amorphous alloy Zr ₅₅ Cu ₃₀ Al.
_{Although 10} Ni ₅ (subscript is atomic%) is used, this may be replaced.

(Embodiment 4) In the present embodiment, as a method of joining members having different central temperatures of a supercooled liquid region to each other, a joining method of a node ring body of a node ring of an endoscope and a wire receiver is described. An example will be described with reference to FIGS. FIG.
FIG. 7 is an enlarged cross-sectional view of a joint between the wire receiver 18 and the node ring main body 13. In the fourth embodiment of the present invention, the wire receiver 1
8 is a Pd-based amorphous alloy Pd ₄₀ Cu ₃₀ Ni ₁₀ P ₂₀ (subscript is atomic%, glass transition temperature (Tg) 302 ° C., crystallization start temperature (Tx) 397 ° C., supercooled liquid region (ΔT) 95 ℃,
The thermal expansion coefficient is 6 × 10 ⁻⁶ ), and the ring body 13 is made of a Zr-based amorphous alloy Zr ₅₅ Cu ₃₀ Al ₁₀ Ni ₅ (subscript is atomic%, glass transition temperature (Tg) 420 ° C., crystallization start temperature ( T
x) 504 ° C., supercooled liquid region (ΔT) 84 ° C., coefficient of thermal expansion 10 × 10 ⁻⁶ ).

As shown in FIG. 8, the wire receiver 18 and the node ring main body 13 are joined by an inner wall 13b of the node ring main body 13 with a pressing force of 1 kgf of the indenter 14 heated to 450 ° C. by an internal heater (not shown). Press on. Due to heat conduction from the indenter tip portion 14a accompanying this pressing, the inner wall 13b of the node ring body 13 is heated and fluidized in the supercooled liquid region,
The indenter tip portion 14a is embedded in the inner wall 13b of the node ring body 13. At this time, the metal plate 15 is brought into contact with the outer wall of the node ring body 13 so that the node ring body 13 is not deformed.

The indenter tip portion 14a is connected to the inner wall 1 of the node ring main body 13.
After burying a predetermined amount in 3b, the indenter 14 is retracted.
After the retreat, as shown in FIG. 9, a space 16 having a shape corresponding to the outer shape of the indenter tip portion 14a is formed in the inner wall 13b of the node ring main body 13. In this case, a clean new surface 16a is formed on the inner surface of the space 16 by performing the above steps in a vacuum of 10 ^-3 Pa or less.

Next, as shown in FIG. 9, the wire receiver 18 held by the pin 11 and the holding tool 17 is inserted into the space 16
The wire receiver 18 is placed at the upper position and is inserted into the operation wire insertion hole 8 of the wire receiver 18 to bring the wire receiver 18 into contact with the opening of the space 16 of the inner wall 13b of the node ring body 13
Abut at 00 gf. Further, an ultrasonic generator (not shown) is driven to transmit the ultrasonic vibration to the wire receiver 18 through the pin 11. The frequency of ultrasonic waves is 30-100k
Hz and the output was 100 W to 3 kW. Due to this ultrasonic vibration, the contact portion of the wire receiver 18 is heated by friction with the node ring body 13. When the temperature of the abutting portion reaches 302 ° C. or higher, the amorphous alloy in the abutting portion 18a becomes a Newtonian fluid, and as shown in FIG. 10, the abutting portion becomes the fluid portion 18b.
Becomes

At the same time that the contact portion becomes the fluid 18b,
The wire receiver 18 is pressed against the node ring main body 13. Pressing force is 3
00gf to 1kgf, pressing time is 100 seconds. By this pressing, the fluid portion 18b of the wire receiver 18 is deformed and filled in the space 16 formed in the node ring main body 13.
At this time, the new surface generated on the surface of the fluid portion 18b due to the deformation and the new surface 16a inside the space 16 come into contact with each other, so that the metal atoms are firmly bonded to each other.

After that, the ultrasonic vibration is stopped and the fluid portion 18
b is solidified by cooling, and the wire receiver 18 and the node ring main body 13 are joined. The atmosphere during the above processing is preferably a vacuum of 10 ⁻³ Pa or less from the viewpoint of preventing oxidation of the new surface. In addition, if the cooling rate after joining is as high as possible, it is effective in preventing the embrittlement of the amorphous metal containing metal due to aging. In the present embodiment, the cooling rate was 50 ° C./min or more, and 90% or more of the material strength before molding could be maintained. Further, the amorphous alloy may be crystallized depending on the bonding time and the aging temperature, but in the case of the present embodiment, the crystallization does not occur because the bonding time is a relatively short time of 100 seconds. It was When a sample of the joint portion thus joined was taken and observed with an electron microscope at a magnification of 50,000 times, the thickness of the diffusion layer was about 200 nm.
It turned out to be a negligible thickness. Therefore, it became clear that there was almost no brittle intermediate layer and the bonding strength was maintained high. When the crystallization rate of the wire receiver was 70% or more, practically sufficient strength could not be obtained due to embrittlement of the material.

According to this embodiment, as compared with the third embodiment.
In addition to the effect, the joining effect due to the contact between new surfaces
Bonding strength is achieved by the mechanical bonding between the fruit and the formed irregularities.
Can be further increased. The form of this implementation
In the state, the wire receiver 18 is Pd₄₀Cu₃₀Ni_TenP₂₀When
Then, the node ring main body 13 is made of a Zr-based amorphous alloy Zr.₅₅Cu₃₀Al
_TenNi_FiveHowever, the amorphous alloy used for the wire receiver 1
Is a supercooled liquid of the amorphous alloy of the node ring body 13.
If it is on the lower temperature side than the body area, it has another supercooled liquid area
A combination of amorphous alloys can be used.

(Embodiment 5) In this embodiment, description will be given with reference to FIG. 11 by taking as an example the joining of a pipe made of an amorphous alloy having a supercooled liquid region and a pipe made of another metal material. To do. In FIG. 11A, the first pipe 2
0 is an amorphous alloy Zr ₅₅ Cu ₃₀ Al ₁₀ Ni ₅ (glass transition temperature (Tg) 420 ° C., crystallization start temperature (Tx) 504 ° C., which has a supercooled liquid region manufactured by a liquid quenching method.
It has dimensions of an outer diameter of 16 mm, a wall thickness of 1 mm, and a length of 80 mm made up of a supercooled liquid region (ΔT) of 84 ° C. and a subscript of atomic%. The second pipe 21 is made of stainless steel (SUS30
4) The outer diameter is 18 mm, the wall thickness is 1 mm, and the length is 100 mm. Therefore, the first pipe 20 can be inserted into the second pipe 21.

First, as shown in FIG. 11A, the first pipe 20 is fixed by a jig (not shown) so that it can be inserted into the second pipe 21. At this time, the ambient atmosphere is set to a vacuum of 10 ^-2 Pa or less or an inert atmosphere such as Ar or He having a purity of 99.999% or more so that the amorphous alloy is not oxidized at the time of joining.

Next, as shown in FIG. 11 (b), the first pipe 20 is inserted into the second pipe 21 by a predetermined amount (10 mm in the present embodiment), and a resistance heater (not shown) is incorporated therein. The plunger 22 made of stainless steel (SUS304) is inserted from the second pipe 21 side. The plunger 22 has a large-diameter portion 22b having the same outer diameter as the inner diameter of the second pipe, and a large-diameter portion 22b connected to the large-diameter portion 22b via a tapered portion 22a so as to have the same outer diameter as the inner diameter of the first pipe 20. It is formed by the small-diameter portion 22c on the small tip side having a diameter. In the inserted state of the plunger 22, the tapered portion 22 a of the plunger 22 and the inner surface 21 a of the second pipe 21
A space 24 is formed between the end surface of the first pipe 20 and the end surface of the first pipe 20. At this time, in order to prevent the outer diameters of the pipes 20 and 21 from being deformed, a holding metal fitting 23 made of stainless steel (SUS304) is brought into contact with the outer surface.

In the next step, the resistance heater inside the plunger 22 is energized to heat the pipe, and the pipe 20 and the pipe 21 are heated.
The joint part of is heated up to 450 ° C. in the supercooled liquid region of the amorphous alloy at an average heating rate of 20 ° C./min. On this occasion,
If necessary, a resistance heater may be built in the pressing member 23, or auxiliary heating may be performed from the outside by high-frequency heating, a radiant heating device, or the like to increase the temperature rising rate. By increasing the heating rate, the amorphous alloy can be rapidly heated to the bonding temperature and bonded,
It is possible to prevent crystallization of the amorphous alloy.

After this temperature rise, as shown in FIG.
The plunger 22 is pressed in the arrow direction. With this pressure,
The tapered portion 22a of the blanker 22 deforms the first pipe 20 made of an amorphous alloy that has been aged in the supercooled liquid region, fills the space 24, and closely contacts the inner surface of the second pipe 21. In this embodiment, the pressing force of 30 kgf causes
Pressing was performed for 00 seconds.

After pressing, as shown in FIG. 11 (d), 50
It was quickly cooled to 300 ° C or lower at a cooling rate of ° C / min or more, the plunger 22 and the press fitting 23 were removed, further cooled to 100 ° C or less, and then taken out into the atmosphere. If the cooling rate from the joining temperature (450 ° C.) to 300 ° C. is as high as possible, it is effective in preventing embrittlement of the amorphous alloy due to heating. In this embodiment, the cooling rate is 50.
℃ / min or more, it was possible to maintain 90% or more of the material strength before molding.

The pipes 20 and 21 thus joined together have a linear thermal expansion coefficient of 10 × 10 ^-6 of the amorphous alloy Zr ₅₅ Cu ₃₀ Al ₁₀ Ni ₅ and a linear thermal expansion coefficient of SUS 304 of 16
It is fastened in a shrink-fit state due to a difference of × 10 ^-6 , and as a result of a tensile test, it shows a fastening force of 200 kgf or more,
It was possible to carry out the fastening without any practical problems.

In this embodiment, as shown in FIG. 11 (e), a joint 26 may be provided on the inner surface 25a of the second pipe 25, whereby the joint strength can be further increased.

The pipes joined as described above are various dispensing nozzles utilizing the high corrosion resistance, hardness, wear resistance, and fracture toughness of the amorphous alloy Zr ₅₅ Cu ₃₀ Al ₁₀ Ni _5. , Which can be used for the distal end of ultrasonic treatment instruments for endoscopes, heater sheath for heating corrosive liquids, etc. And the assemblability can be improved.

(Embodiment 6) In the present embodiment, supercooling is performed.
A member made of an amorphous alloy having a liquid phase, and the amorphous
About joining with members made of metal softer than fine alloys,
An example of joining pipes will be described with reference to FIG.
You. In FIG. 12A, the first pipe 30 is a liquid
Pd-based amorphous having a supercooled liquid region manufactured by a cooling method
Quality alloy Pd₄₀Cu ₃₀Ni_TenP₂₀(Subscript is atomic%, glass
Transition temperature (Tg) 302 ° C., crystallization start temperature (Tx) 3
Outer diameter consisting of 97 ℃, supercooled liquid area (△ T) 95 ℃) 1
6 mm, wall thickness 1 mm, length 80 mm
You. The second pipe 31 is aluminum alloy A2017
Outer diameter 16 mm, wall thickness 1 mm, length 80 mm
It has become. Each connection in these pipes 30 and 31
The tip ends of the mating sides have tapered portions 30a, 31 that come into contact with each other.
a is formed.

First, as shown in FIG. 12A, the tapered portions 30a, 31 of the first pipe 30 and the second pipe 31 are formed.
The rotation jig 32 is connected to a motor (not shown) and a speed reducer so as to be able to abut while rotating a, and a rotation jig 33 having a brake (not shown). At this time, the surrounding atmosphere is a vacuum of 10 ^-2 Pa or less or an inert atmosphere such as Ar or He having a purity of 99.999% or more so as to prevent the oxidation of the aluminum alloy A2017 at the time of joining. improves.

Next, as shown in FIG. 12B, while rotating the first pipe 30 at a rotation speed of 2000 rpm,
The tapered portion 30a is replaced with the tapered portion 31 of the second pipe 31.
Press a. In the case of this embodiment, the pressing force is 20 kg.
f. In this pressing, the aluminum alloy, which is the material of the second pipe 31, is softer than the amorphous alloy, which is the material of the first pipe 30, so that the second pipe 3 is rubbed by friction.
The inner surface of the taper portion 31a on the first side is worn and the new surface is exposed. Further, the amorphous alloy is heated to a supercooled liquid region at about 340 ° C. by friction caused by continuing pressing. As a result, the tapered surface 30a of the first pipe 30 is deformed and the new surface is exposed, and the new surface of the tapered portion 31a of the second pipe 31 exposed in the previous step is contacted and joined.

After this pressing, as shown in FIG. 12C, the brake of the jig 33 is released in about 300 seconds, and the second pipe 31 is synchronized with the rotation of the jig 32 to generate friction heat. Stop and cool. The pipes 30 and 31 thus joined were firmly joined by the new surfaces coming into contact with each other without voids, and as a result of the tensile test, they showed a fastening force to be broken by the base material of the aluminum alloy A2017.

In this embodiment, as shown in FIG. 12D, the metal plates 35 and 36 connected to the rotary jig 32 may be brought into contact with the inner and outer surfaces of the pipes 30 and 31.
Buckling and deformation of the pipes 30 and 31 at the time of joining can be prevented.

The pipes joined in this manner utilize various corrosion nozzles and hardness of the amorphous alloy Pd ₄₀ Cu ₃₀ Ni ₁₀ P ₂₀ to dispense various nozzles and the tip of the ultrasonic treatment instrument for endoscopes. Department,
It can be used as a heater sheath for heating corrosive liquids. Further, since it is joined to an aluminum alloy having a high thermal conductivity, the heat conduction characteristics and heat dissipation characteristics are improved, and it is possible to prevent the amorphous alloy portion from becoming brittle or soft.

(Embodiment 7) In this embodiment, a member made of an amorphous alloy having a supercooled liquid region and a metal having a coefficient of thermal expansion different from that of the amorphous alloy are used. Joining with other members will be described with reference to FIG. 13 by taking as an example the joining of the sliding surface of the precision stage. FIG.
The guide base 40 shown in FIG. 3A has a thermal expansion coefficient of 16 ×
It was manufactured by machining 10 ⁻⁶ SUS303. The guide base has a width F of 90 mm and a length L of 100
mm, the height H is 25 mm, and the dovetail groove portion 41 having a width f of 30 mm is formed on the upper surface. The dovetail groove 41 serves as a sliding surface, and the dovetail grooves 41a and 41b are provided on both side surfaces.
However, an escape portion 41c is formed at the bottom. The dimensional accuracy of each part is about 0.1 mm, the surface roughness Rmax of both side surfaces of the V groove part 41 is 12.5 μm, and the flatness is 0.1 mm.
It is a degree.

Next, the Zr type amorphous alloy Z having the guide base 40 and the supercooled liquid region produced by the liquid quenching method.
r ₅₅ Cu ₃₀ Al ₁₀ Ni ₅ (subscript is atomic%, glass transition temperature (Tg) 420 ° C., crystallization start temperature (Tx) 504
℃, supercooled liquid region (△ T) 84 ℃, coefficient of thermal expansion 10 × 1
A plate material 43a, 43b having a thickness of 2 mm made of 0 ^-6 ) is brought into contact with the dovetail groove portion 41, and these are arranged below the die 42 connected to a pressing device (not shown) as shown in FIG. 13 (b). To do. A resistance heater (not shown) is provided inside the mold 42, and the side surface 42a has a flatness of 1 μm and a surface roughness Rmax of 0.4 μm. At this time, Z
In order to prevent the r-based amorphous alloy from being oxidized at the time of joining, the surrounding atmosphere is vacuumed at 10.2 Pa or less, or the purity is 99.999.
% Or more of an inert atmosphere of Ar, He, or the like.

While the resistance heater inside the die 42 is energized and heated, the die 42 is pressed against the plate members 43a and 43b by a pressing force of 5
It was pressed with kg and heated to a temperature of 450 ° C. in the supercooled liquid region of the Zr-based amorphous alloy at an average heating rate of 20 ° C./min. At this time, the heating rate can be increased by externally performing high-frequency heating, auxiliary heating using a radiant heating device, or the like, if necessary. By increasing the temperature rising rate, the Zr-based amorphous alloy can be rapidly heated to the bonding temperature and bonded, so that crystallization of the amorphous alloy can be prevented.

After the temperature was raised, the mold 42 was lowered and pressed as shown in FIG. 13 (c). The Zr-based amorphous alloy plate materials 43a, 43 heated to the supercooled liquid region by this pressing
b is deformed, and the dovetail grooves 41a and 41b and the escape portion 41c are filled and joined to the stage base 40. It should be noted that the dovetail grooves 41a, 41b are formed at the end of the molding / bonding so that the plate materials 43a, 43b do not have a thin wall during the molding / bonding.
Also, the plate thickness is determined by calculating the volumes of the plate members 43a and 43b so that an appropriate gap 41d is generated in the space inside the escape portion 41c. In this embodiment, a pressing force of 200 kgf is 50
Pressing was performed for 0 seconds.

After pressing, the mold 42 was rapidly cooled to 200 ° C. or less at a cooling rate of 50 ° C./min or more, the mold 42 was released, further cooled to 100 ° C. or less, and taken out into the atmosphere. If the cooling rate from the molding temperature (450 ° C.) to 300 ° C. is as high as possible, embrittlement of the Zr-based amorphous alloy due to heating can be prevented. In this embodiment, the cooling rate is 50 ° C.
/ Min or more, which results in a material strength of 9 before molding.
We were able to maintain 0% or more.

FIG. 14 shows the sliding surface 44 and the stage base 40 molded and joined as described above. These are the dovetail grooves 41a and 41b and the relief portion 41c, and the linear thermal expansion coefficient of the Zr-based amorphous alloy. Due to the difference between 10 × 10 ⁻⁶ and the coefficient of linear thermal expansion of SUS304 of 16 × 10 ⁻⁶ , they are fastened in a shrink-fitted state, and the dovetail grooves 41a and 41b are fastened geometrically firmly. The molded / joined sliding surface 44 has a hardness of 430 Hv, a flatness of 2 μm, and a surface roughness R.
Molding and joining could be performed with a maximum of 0.5 μm.

In the above joining method, the members 43a, 43b and the members 43a, 4b made of an amorphous alloy having a supercooled liquid region are used.
3b is a method of joining with the V-groove portion 41 of the guide base 40, which is another member having a larger expansion coefficient than 3b and having a recess such as a dovetail groove filled with an amorphous alloy. A member made of a material having a lower expansion coefficient than that of the amorphous alloy and having a convex portion and a member made of the amorphous alloy can be similarly joined.

That is, as shown in FIG. 15A, the stage is made of a material (for example, silicon nitride, low thermal expansion cast iron, etc.) having a linear thermal expansion coefficient smaller than the linear thermal expansion coefficient of 10 × 10 ⁻⁶ of the Zr type amorphous alloy. When the base 45 is manufactured, the protrusions 46a and 46b are provided on both side surfaces of the V groove portion 46, and a plate material made of a Zr-based amorphous alloy is arranged in the V groove portion 41 in the same manner as above, and after heating to the temperature described above. By pressing the plate material with the mold 42 and then cooling it, as shown in FIG.
The sliding surface 47 can be formed. In this case, the coefficient of thermal expansion of the Zr-based amorphous alloy that is bonded and formed around the protrusions 46a and 46b is larger than that of the protrusions 46a and 46b. The deformed portion of the plate material is fastened in a shrink-fitted state. Therefore, the same operation and effect as those of the above-described joining method can be obtained.

The sliding surface formed and joined in this manner has high quality and little variation due to the hardness, abrasion resistance and precision formability of the amorphous alloy, and improves the motion accuracy of the stage itself. be able to. Further, since it is a highly productive manufacturing method such as molding and joining, the cost can be reduced. Further, in the present embodiment, the guide base 40 is manufactured by machining, but dimensional accuracy of this degree can also be manufactured by die casting, which can further increase productivity.

(Embodiment 8) In this embodiment, a member made of an amorphous alloy having a supercooled liquid region and a material having a thermal expansion coefficient different from the thermal expansion coefficient of this amorphous alloy are used. With respect to a method of joining with other members and a method of disassembling the members joined by this joining method, a member constituting a treatment tool of an endoscope is taken as an example, and FIGS.
8 will be described.

FIG. 16 shows an assembled state diagram of members constituting the endoscopic treatment tool of the present embodiment. Zr-based amorphous alloy Zr ₅₅ Cu having supercooled liquid region produced by liquid quenching method
₃₀ Al ₁₀ Ni ₅ (subscript is atomic%, glass transition temperature (T
g) Scissors 50, 51 manufactured by machining using 420 ° C., crystallization start temperature (Tx) 504 ° C., supercooled liquid region (ΔT) 84 ° C., thermal expansion coefficient 10 × 10 ⁻⁶ ).
And a Pd-based amorphous alloy Pd ₄₀ cast by liquid quenching
Cu ₃₀ Ni ₁₀ P ₂₀ (subscript is atomic%, glass transition temperature (T
g) 302 ° C., crystallization start temperature (Tx) 397 ° C., supercooled liquid region (ΔT) 95 ° C., thermal expansion coefficient 8 × 10 ⁻⁶ ) made pin 53 and tip cover 54 made of SUS420j2, wire jumper 52 and ring 55 are assembled as shown. The pin 53 has a diameter of l. 2mm, length 4m
m, the ring 55 has an outer diameter of 2.0 mm, a wall thickness of 0.4 mm, and a length of 2.8 mm.

FIG. 17 shows a molding / joining process of the pin 53 in the hinge portion 56 of the endoscopic treatment tool after assembly. In addition,
In FIG. 16, the protrusion 8 provided at the end of the scissors 50.
1b meshes with the cam groove 52a of the wire jumper 52, and similarly the projection 81a provided at the end of the scissors 51 has a cam groove 52b (not shown) provided on the opposite side of the cam groove 52a.
However, since these members are located outside the hinge portion 56, they are not shown in FIG. After assembling as shown in FIG. 16, the pin 53 is held as shown in FIG. 17A by punches 60, 61 which are connected to a pressing device (not shown) and have a resistance heater built therein. Next, the resistance heaters of the punches 60 and 61 are energized to heat the pin 53 to a temperature of 350 ° C. in the supercooled liquid region as quickly as possible. This temperature is 5 scissors
Since the temperature is sufficiently lower than the glass transition temperature of 420 ° C. of 0 and 51, the scissors 50 and 51 are not affected by heat.

At the time of heating, it is not necessary to pay attention to the atmosphere because the Pd-based amorphous alloy does not oxidize. However, since the Zr-based amorphous alloy is oxidized when heated to 200 ° C. or higher in the atmosphere, Ar, It is desirable to heat with an inert gas atmosphere such as He. In the case of the present embodiment, the average heating rate is 50 ° C. /
The heating was performed in a He atmosphere of min and a purity of 99.999%.

Next, as shown in FIG. 17B, the punch 6
The pins 53 were pressed in the direction of the arrow for 120 seconds with a pressing force of 5 kgf by a pressing device (not shown). After pressing
By injecting He gas at room temperature onto the molded / joined pin 53a, the cooling speed of 50 ° C./min rapidly increases to 150.
The mixture was cooled to ℃ or below, and further naturally cooled to 50 ℃ or below. If the cooling rate from the molding temperature (350 ° C.) to 150 ° C. is as high as possible, embrittlement of the Pd amorphous alloy due to aging can be prevented. In the present embodiment, the cooling rate is 50 ° C./min or more, and the material strength before forming is 90%.
%, The tensile strength could be maintained at 0.9 GPa.

FIG. 17 molded and joined in this way
In the pin 53a, the tip cover 54, and the ring 55 shown in (c), the linear thermal expansion coefficient of the Pd-based amorphous alloy is 8 × 10 ⁻⁶ ) and the linear thermal expansion coefficient of the SUS420j2 is 11 × 10 ^{− on} the inner surface 55a of the ring 55. It is fastened in a shrink-fit state due to the difference of ⁶ , and the countersink portion 54a of the tip cover 54,
54b is geometrically fastened, and the hinge portion 56 of the endoscopic treatment tool could be configured with practically sufficient strength. With this hinge portion 56, the scissors 50, 5
1 is openably and closably assembled, and is opened and closed by operating the wire 58 attached to the wire jumper 52.

FIG. 18 shows a step of re-disassembling the members constituting the endoscopic treatment instrument manufactured by the above steps. Except for the heating means 60 such as a soldering iron, the same members as in FIG. 17C are used. When it becomes necessary to disassemble the hinge portion 56 of the endoscopic treatment tool for repair or the like, a known heating means 60 such as a soldering iron is brought into contact with the pin 53a made of a Pd-based amorphous alloy to Crystallization start temperature (Tx) 39
Heat to above 7 ° C. Heating means 60 on the pin 53a
When the portion pressed by is heated above the crystallization start temperature, the amorphous alloy in that portion crystallizes and becomes brittle.

After embrittlement, the pressing means 6 as shown in FIG.
When 1 is lightly pressed in the direction of the arrow, the upper portion 53b of the embrittled pin 53 is crushed and the pin 53 can be pulled out, so that the hinge portion 56 can be easily disassembled. The embrittled and crushed crushed pieces 53b and the remaining portion 53a are collected, heated to a temperature equal to or higher than the melting point by high-frequency heating or the like, and then re-cast by the liquid quenching method to be used again.

As described above, in the present embodiment, it is possible to easily assemble a hinge using a pin having a small diameter, which is difficult to assemble by a conventional joining means such as caulking and laser welding. Furthermore, by utilizing the embrittlement of the amorphous alloy, it is possible to easily disassemble the hinge portion 56, which is impossible with the conventional joining means. In addition, in this embodiment, the scissors portion is taken as an example of the member constituting the treatment tool of the endoscope,
In addition, it can be applied to a member having a hinge-shaped movable part such as a cup-shaped forceps treatment tool.

(Embodiment 9) In this embodiment, a member made of an amorphous alloy having a supercooled liquid region and a material having a thermal expansion coefficient different from the thermal expansion coefficient of this amorphous alloy are used. A method of joining with another member and a method of disassembling the member joined by this joining method will be described with reference to FIGS. 19 to 22 by taking a constituent member of a treatment tool of an endoscope as an example.

FIG. 19 shows an assembled state diagram of this embodiment. Tip cover 54, wire jumper 52, scissors 73, 7 made of stainless steel SUS420j2
4 and pin 71 made of stainless steel (SUS304)
Are assembled as shown. The pin 71 has a diameter of 1.3 mm,
It has a length of 4 mm, and has a dish-shaped collar portion 71b on one side and a hole portion 71a with a diameter of 0.8 mm and a depth of 2 mm on the other side. The combined state of the wire harness 52 and the scissors 73, 74 is the same as that in the eighth embodiment, and thus the description thereof is omitted.

20 (a) and 20 (b) are internal views after assembly.
The molding and joining of the mirror treatment tool hinge portion 75 are shown. Liquid quench
Zr-based amorphous alloy with supercooled liquid region manufactured by the method
Zr ₅₅Cu₃₀Al_TenNi_Five(Subscript is atomic%, glass transition
Temperature (Tg) 420 ° C., crystallization start temperature (Tx) 504
℃, supercooled liquid region (△ T) 84 ℃, coefficient of thermal expansion 10 × 1
0^-6The pin material 72 made of) is joined to the pin 71.

After assembling as shown in FIG. 19,
As shown in FIG. 20A, the punch 76 and the pin material 7 which are connected to a pressing device (not shown) and have a built-in resistance heater.
2 and the sleeve 77 having a clearance of 15 μm from the punch 76 is provided at one of the hinge holes 5 of the tip cover 54.
It is arranged so as to abut on 4a. A backup punch 78 is in contact with the other hinge hole 54b so as not to drop the pin 71.

Next, the resistance heater of the punch 76 is energized to heat the pin material 72 to the temperature of 450 ° C. in the supercooled liquid region as quickly as possible. During heating, the Zr-based amorphous alloy oxidizes when heated to 200 ° C. or higher in the atmosphere,
Set the ambient atmosphere to a vacuum of 10 ^-2 Pa or less, or Ar, H
It is desirable to heat in an atmosphere of an inert gas such as e. In the case of this embodiment, the average heating rate is 50 ° C./mi
Heating was performed in a He atmosphere of n and a purity of 99.999%.

Next, as shown in FIG. 20B, the pin material 72 was pressed with a pressing force of 7 kgf for 200 seconds through a punch 76 by a pressing device (not shown). After pressing, the pin 72a which is molded and joined to the pin 71 is rapidly cooled to 300 ° C. or lower at a cooling rate of 50 ° C./min or more by injecting He gas at room temperature, the punch 76, the sleeve 77, and the backup. The punch 78 was released, cooled to 100 ° C. or lower, and then taken out into the atmosphere. If the cooling rate from the molding temperature (450 ° C.) to 300 ° C. is as high as possible, embrittlement of the Zr-based amorphous alloy due to heating can be prevented. In this embodiment, the cooling rate is 50 ° C. /
It was at least min, and could maintain 90% or more of the material strength before molding.

The pin 72 molded and joined in this way
a and the pin 71 are fastened together in the hole 71a of the pin 71 in a shrink-fit state due to the difference between the linear thermal expansion coefficient of 10 × 10 ^{−6 of the} amorphous alloy and the linear thermal expansion coefficient of 16 × 10 ⁻⁶ of SUS304. Therefore, the hinge portion 75 of the endoscopic treatment tool could be formed with practically sufficient strength.

FIG. 21 shows a step of disassembling the endoscopic treatment instrument manufactured by the above steps. When it becomes necessary to disassemble the hinge portion 75 of the endoscopic treatment tool for repair or the like, the Zr-based amorphous alloy pin 72a is heated by a heating means such as the radiant heater 80.

FIG. 22 shows the Zr type amorphous alloy at room temperature to 700.
It exhibits thermal expansion behavior up to ° C. The measurement was performed by TMA (thermo-mechanical analyzer). As shown in FIG. 22, cast Z
to r-based amorphous alloy is room temperature to 450 ° C., while indicating a substantially constant linear thermal expansion coefficient of 10 × 10 ^-6, abrupt shrinkage at 460 ° C. or more regions (linear thermal expansion coefficient of -228 × 10 ^{- 6} ) is shown. It is presumed that this is because the stress generated during shrinkage during casting was released due to the decrease in viscosity in the supercooled liquid region. When it is further heated and exceeds the crystallization temperature Tx (500 ° C.), the Zr-based amorphous is crystallized, and the linear thermal expansion coefficient is 18 × 10.
Indicates ^-6 .

Therefore, when the pin 72a molded and joined at 450 ° C. or lower is heated to 460 ° C. or higher, contraction occurs and the pin 72a can be disassembled from the hole 71a of the pin 71 as shown in FIG. In the case of the present embodiment, the pin 72a could be pulled out by heating to 480 ° C. in a He atmosphere having an average temperature rising rate of 20 ° C./min and a purity of 99.999%, holding it for 200 seconds, and then naturally cooling. . The atmosphere at the time of heating may be in the air if it is not necessary to consider the oxidation prevention of the pin 72a. However, the pin 72a extracted while preventing oxidation can be recovered, heated to a temperature higher than the melting point by high-frequency heating or the like, recast by the liquid quenching method, and reused.

As described above, in the present embodiment, it is possible to easily assemble a hinge using a pin having a small diameter, which was difficult to assemble by a conventional joining means such as caulking and laser welding. Further, by utilizing the shrinkage behavior of the amorphous alloy in the supercooled liquid region, it is possible to decompose it without damaging other constituent members. In addition, in the present embodiment, the scissors portion is taken as an example of the member constituting the treatment tool of the endoscope, but it can be applied to a member having a hinge-shaped movable portion such as a cup-shaped forceps treatment tool. .

In the above embodiment, Zr system, P
The amorphous alloy having a d-based supercooled liquid region has been described.
Other amorphous alloys such as ₅₅ Al ₂₅ Ni ₂₀ (glass transition point Tg = 200 ° C., crystallization start temperature Tx = 275 ° C.) can be used.

From the above description, the present invention also includes the following inventions. (1) Of the two or more members to be bonded to each other, at least one of the members is made of an amorphous alloy having a supercooled liquid region, and at least the bonding portion is bonded to at least the bonding portion of the other member. By heating to the cooling liquid region, pressing the joint portion of one member and the joint portion of the other member against each other, and then cooling, the crystallization rate of the amorphous alloy in the joint portion of the one member is A method for joining members, which comprises joining to the joining portion of the other member in a state of 70% or less.

(2) Of the two or more members whose joints are made of an amorphous alloy having a supercooled liquid region, at least the joint of at least one member is supercooled together with at least the joint of the other member. A method for joining members, wherein the members are heated to a liquid region, pressed against each other, and then cooled to join.

(3) A method of joining two members having joints made of an amorphous alloy having different center temperatures of the supercooled liquid region, wherein the supercooled liquid region is relatively high in temperature. Heating the alloy joint to its supercooled liquid region,
After deforming and exposing the new surface, the joint made of an amorphous alloy whose supercooled liquid region is at a relatively low temperature is heated to the supercooled liquid region together with the joint and deformed to expose the new surface. Then, the new surface and the new surface of the bonding portion are pressed against each other, and then cooled to bond the members.

(4) Frictional force with the joint surface of the first member made of an amorphous alloy having a supercooled liquid region in contact with the joint portion of the second member made of a metal softer than the same. And abrading the surface to deform the joint portion of the second member to expose the new surface, and at least the joint portion of the first member together with at least the joint portion of the second member. After heating to the cooling liquid area and deforming the joint to expose the new surface, the exposed new surface and the second
And a step of cooling the first member and the second member against each other, and a joining method of the members.

(5) Of the members to be joined, one member is made of an amorphous alloy having a supercooled liquid region, the other member is made of a metal having a coefficient of thermal expansion different from that of the one member, and one member is Of at least the joint part of the other member together with at least the joint part of the other member is heated to the supercooled liquid region, and after pressing the both joint parts against each other, both joint parts are cooled and joined. Method of joining members.

(6) The coefficient of thermal expansion of the other member is larger than that of the one member, and
The method for joining members according to the above (5), wherein a recess filled with one of the joints heated to the supercooled liquid region is formed in the joint.

(7) The coefficient of thermal expansion of the other member is smaller than that of the one member, and
The method for joining members according to (5) above, characterized in that the joint portion of one of the members heated to the supercooled liquid region has a convex portion formed around the joint portion.

(8) With respect to the members joined by the method according to any one of the above items (5) to (7), the temperature is equal to or higher than the temperature set at the time of joining, and
A method for disassembling a joined member, characterized in that at least one member is heated to a temperature at which the coefficient of thermal expansion becomes negative or higher to decompose one member and the other member.

(9) A joining portion of a member made of an amorphous alloy having at least a supercooled liquid region, to a member joined by the method described in any one of the above items (1) to (7), A method for disassembling a joined member, which comprises heating the crystallization temperature or higher to decompose both members.

(10) A joined member which is joined by the joining method described in any one of the above items (1) to (7).

[0127]

As described above, according to the first aspect of the present invention, the amorphous alloy is heated to its supercooled liquid region, pressed against the mating member, and then cooled, so that the amorphous alloy has high strength. It is possible to accurately join the members made of the amorphous alloy to each other or the members made of the amorphous alloy and the members made of other metal to each other while maintaining the same.

According to the second aspect of the present invention, it is possible to provide a joining member having excellent strength and good shape accuracy.

According to the third aspect of the invention, since the shrinkage or crystallization of the amorphous alloy is used, even members that are strongly joined and joined can be satisfactorily decomposed.

[Brief description of drawings]

FIG. 1 is a partially cutaway front view of a first embodiment of the present invention before joining.

FIG. 2 is a partially cutaway front view of the first embodiment after joining.

FIG. 3 is a front view showing details of joining in the first embodiment.

FIG. 4 is an enlarged cross-sectional view showing details of a joined state of the first embodiment.

FIG. 5 is a cross-sectional view showing joining in the second embodiment.

FIG. 6 is an enlarged cross-sectional view of a joint portion according to the second embodiment.

FIG. 7 is an enlarged cross-sectional view of a joint portion according to the third embodiment.

FIG. 8 is a sectional view of a fourth embodiment before joining.

FIG. 9 is a cross-sectional view of the fourth embodiment at the time of joining.

FIG. 10 is an enlarged cross-sectional view of a joined state of the fourth embodiment.

11A to 11D are cross-sectional views showing a joining process of the fifth embodiment, and FIG. 11E is a cross-sectional view of a modified example thereof.

12A to 12C are cross-sectional views showing a joining process of the sixth embodiment, and FIG. 12D is a cross-sectional view of a modified example thereof.

13A to 13C are views showing Embodiment 7 in the order of joining steps.

FIG. 14 is a perspective view of a precision stage manufactured according to the seventh embodiment.

15A and 15B are front views showing a modified example of the seventh embodiment in the order of steps.

FIG. 16 is an exploded perspective view showing the endoscopic treatment tool according to the eighth embodiment.

17A to 17C are cross-sectional views showing a joining process of the eighth embodiment.

18 (a) and 18 (b) are cross-sectional views showing disassembly in Embodiment 8 in order of steps.

FIG. 19 is an exploded perspective view of the endoscopic treatment tool according to the ninth embodiment.

20A and 20B are cross-sectional views showing a joining process of the ninth embodiment.

21 (a) and 21 (b) are sectional views showing disassembly in the ninth embodiment.

FIG. 22 is a characteristic diagram of the coefficient of thermal expansion of the amorphous alloy mold used in the ninth embodiment.

FIG. 23 is a partially cutaway front view showing conventional joining by brazing.

[Explanation of symbols]

 1 wire receiver 2 node ring main body 3 node ring main body support 4 wire receiving support 5 heater 6 tube 7 flow meter 8 wire insertion hole

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Norihiro Yamada 2-34-2 Hatagaya, Miyakoya-ku, Tokyo Olympus Optical Industry Co., Ltd. (72) Seiya Takahashi 2-43-2 Hatagaya, Tokyo Olympus Optical Industry Co., Ltd.

Claims (3)

[Claims] 1. Among the members to be joined to each other, the joint portion of at least one member is made of an amorphous alloy having a supercooled liquid region, and at least the joint portion of this one member together with the joint portion of the other member. Heating to the subcooled liquid region,
A method for joining members, characterized in that both joining portions are pressed against each other and then cooled to join. 2. A first member, at least a joint portion of which is made of an amorphous alloy having a supercooled liquid region, wherein at least the joint portion is heated and pressed to the supercooled liquid region and then cooled. And a second member at least partially having a joint portion joined together by the above. 3. A joint portion of at least one member is made of an amorphous alloy having a supercooled liquid region, and at least the joint portion is heated to the supercooled liquid region and pressed against the joint portion of the other member. A method for disassembling two joined members by cooling, wherein at least the joint portion of the one member is heated to a temperature of the supercooled liquid region or higher to decompose the joined member. Disassembly method.