JPH09322591A - Motor mechanism and inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce an arrangement space and miniaturize a motor mechanism and at the same time, secure a high position accuracy and a fast drive speed. SOLUTION: A drive shaft 9 for driving such drive target as an inspection table is connected and fixed to a rotary shaft 23a of a rough-move motor 23. A housing 20 where the rough-move motor 23 is housed so that it can rotate in one piece is fixed to an output shaft 26 of a reduction gear 24 where a rotary shaft 25a of a fine-move motor 25 with a higher resolution than the rough-move motor 23 is connected as an input shaft so that the housing 20 can be rotated in one piece. An electromagnetic clutch 23 is disconnected and the rough-move motor 23 is driven while the drive shaft 9 and the housing 20 are being disconnected, thus enabling the drive shaft 9 to be driven at a drive speed according to the resolution of the rough-move motor 23. Also, an electromagnetic clutch 27 is connected and the fine-move motor 25 is driven while the drive shaft 9 and the housing 20 are connected, thus enabling the drive shaft 9 to be driven at a drive speed corresponding to the resolution of the fine-move motor 25.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention requires relatively high-precision (for example, micron unit) positioning and a relatively long (for example, 1 meter) moving stroke such as an inspection table for inspecting a large substrate. The present invention relates to a motor mechanism and an inspection device for driving an object to be driven.

For example, a plasma display device (PD
For inspection of large substrates such as P), an inspection device equipped with an inspection object such as a microscope (magnifying glass) for enlarging the inspection location and an inspection table for moving the large substrate relative to the inspection object. Done by Since inspection of a large-sized substrate is performed by observing a microscopic area enlarged by a microscope or the like on a monitor or the like, positional accuracy of the inspection table is required in order to capture a microscopic target location within the visual field range of the monitor. Further, since the moving stroke of the inspection table is relatively long in order to inspect a large-sized board, it is necessary to move the inspection table speedily in order to improve the inspection work efficiency.

[0003]

2. Description of the Related Art Normally, an inspection table is driven by a motor as a drive source. When driving with one motor,
If the resolution of the motor is lowered, the moving speed of the inspection table can be secured to some extent, but the required positional accuracy cannot be obtained. On the other hand, if the resolution of the motor is increased, the positional accuracy of the inspection table can be secured, but the moving speed of the inspection table cannot be secured, and the work efficiency of the inspection is significantly reduced.
Therefore, in order to secure both high-speed movement and position accuracy of the inspection table, two motors having different resolutions have been used in combination as shown in FIGS. 7 and 8.

In the motor mechanism shown in FIG. 7, one drive shaft 52 for driving the inspection table 51 is provided with a coarse movement motor 53 having a low resolution and a fine movement motor 54 having a high resolution. Drive through. Clutch 5
One of the two motors 53 and 54 is operatively connected to the drive shaft 52 by the switching control of Nos. 8 and 59, so that the moving speed of the inspection table 51 can be switched to the required resolution. For example, when the inspection table 51 is moved speedily, it is driven by the coarse movement motor 53, and when the inspection table 51 approaches the target position, it is switched to the fine movement motor 54 and stopped at the target position with good position accuracy.

On the other hand, in the motor mechanism shown in FIG. 8, a coarse movement motor 63 and a fine movement motor 6 for driving the inspection table 51.
The coarse movement shaft 61 and the fine movement shaft 62, which are independent of each other, are connected to each other, and the inspection table 51 is driven to travel by these two drive shafts. The rotation shafts of both motors 63 and 64 are configured to idle when they are not driven, and by driving either one of the motors 63 and 64, the resolution when the inspection table 51 is moved is switched.

[0006]

However, in both of the motor mechanisms shown in FIGS. 7 and 8, the coarse movement motors 53 and 63 and the fine movement motors 54 and 64 must be arranged in parallel, so that a large installation space is required. However, there is a problem that it is difficult to downsize the motor mechanism. Particularly, in the case of the motor mechanism shown in FIG. 8, since two axes of the coarse movement shaft 61 and the fine movement shaft 62 are required,
It is necessary to secure more space by that amount, and the cost becomes expensive.

Further, if the position accuracy of the inspection table is different by several tens of microns, the target portion is out of the visual field range of the microscope (for example, several tens to several hundreds of microns). Precision was needed.
Therefore, the motor mechanism of FIG. 7 has a problem that sufficient positional accuracy cannot be ensured due to the influence of misalignment of the gears 55 to 57. If the position accuracy is poor and the target location cannot be captured by the monitor, the target location must be searched manually by looking at the monitor, and the work efficiency of the inspection is significantly reduced.

Further, according to the motor mechanism of FIG. 8, since the gear train is not provided, the positional accuracy can be secured, but since the drive shafts 61 and 62 are independent of each other, the respective motors 63 and 64 are provided.
There is also a problem that the position control of the inspection table 51 becomes complicated because the total movement amount can be obtained only by managing the coordinates of the above and individually adding the movement amounts (rotation amounts) of the axes 61 and 62.

The present invention has been made in view of the above problems, and an object thereof is to make it possible to reduce the installation space and to downsize the motor mechanism, and yet to achieve high position accuracy and high driving speed. An object of the present invention is to provide a motor mechanism and an inspection device capable of ensuring the above.

[0010]

In order to solve the above problems, in the invention according to claim 1, a drive shaft for driving an object to be driven is connected to the rotary shaft of the first motor.
The first motor is integrally rotatably connected to the output shaft of the second motor having a resolution different from that of the first motor. The switching means switches the first motor and its rotary shaft between a connected state in which they can rotate integrally and a disconnected state in which they can rotate relative to each other.

According to a second aspect of the invention, in the motor mechanism according to the first aspect, the first motor is a coarse movement motor having a low resolution, and the second motor is a fine movement motor having a high resolution.

According to a third aspect of the present invention, in the motor mechanism according to the first or second aspect, the output shaft that is operatively connected to the second motor and integrally rotates the first motor is A penetrating portion that penetrates the shaft center is formed, and the wiring of the first motor penetrates the penetrating portion of the output shaft and is connected to the power supply side wiring through a connector that is relatively rotatable so as to twist the wiring. It is connected.

According to a fourth aspect of the invention, the inspection device is driven to travel by the rotational force of the drive shaft driven by the motor mechanism according to any one of the first to third aspects. An inspection table is provided.

(Operation) Therefore, according to the first aspect of the invention, the drive shaft for driving the drive target is in a disconnected state in which the first motor and the rotary shaft thereof are relatively rotatable by the switching means. By doing so, it is driven at a drive speed according to the resolution of the first motor. Further, the first motor and the rotary shaft thereof are connected to each other so that the first motor and the rotary shaft thereof can be integrally rotated, so that the first motor and the rotary shaft thereof are integrally rotated with the rotation of the output shaft of the second motor, and are driven. The shaft is driven at a drive speed according to the resolution of the second motor. Therefore, the object to be driven moves at high speed by driving the first motor and the second motor based on the driving force of the lower resolution of the first motor and the second motor by the switching control by the switching means, and the motor of the higher resolution of both motors is driven. The driving target moves at a very low speed so that the driving target can be stopped with high positional accuracy.

According to the second aspect of the invention, since the first motor rotates integrally with the output shaft of the second motor, the wiring of the first motor may be twisted when the second motor is driven. Since the second motor is a fine speed motor having high resolution, there is no fear that the wiring of the first motor will be twisted so much.

According to the third aspect of the present invention, even if the first motor is integrally rotated with the output shaft of the second motor driven by the second motor, the twisting of the wiring of the first motor penetrating the penetrating portion of the output shaft. Is removed by rotating its wiring relative to the power supply side wiring through the connector. Therefore, the first
There is no need to worry about twisting the wiring of the motor, and there is no need to limit the amount of rotation of the second motor.

According to the invention described in claim 4, the inspection table provided in the inspection device has the rotational force of the drive shaft driven by the motor mechanism according to any one of claims 1 to 3. Is driven by. Therefore, both high speed movement and positional accuracy of the inspection table are secured.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. 3 and 4 show the inspection device 1. As shown in the figure, the inspection device 1 has a box shape having a concave portion 2a in the upper portion, and a plurality of leg portions 2b (see FIG. 3).
(Shown in FIG. 2) is provided with the base 2 supported on the floor surface. In the recess 2a of the base 2, the base 3 is accommodated and arranged in a non-contact state with the base 2 via a plurality of anti-vibration air springs 4, so that vibrations from the floor are not transmitted to the base 3. It is like this.

A pair of rails 5 are extended on the base 3 in the front-back direction (vertical direction in FIG. 4). The inspection table 6 as a driving object is equipped so as to be able to travel on the rail 5 via a pair of traveling portions 7 (shown in FIG. 3) provided on the back surface thereof. A nut member 8 (shown in FIG. 3) is fixed to the center of the back surface of the inspection table 6, and a screw shaft (hereinafter referred to as a drive shaft) 9 screwed to the nut member 8 is a motor mechanism 10 (see FIG. 4). The inspection table 6 is driven to travel on the rail 5 by a ball screw mechanism which is driven in the forward and reverse directions by the driving force (shown).

A gate-shaped support block 1 is provided on the base 3.
1 is supported, and a microscope 12 is mounted on the front surface of the upper part of the microscope 1 so as to be movable in the left-right direction along a rail 14 (shown in FIG. 3) via a base 13.

Next, the structure of the motor mechanism 10 is shown in FIGS.
It will be described in detail based on. As shown in FIGS. 1 and 2,
On the upper surface of the support plate 15 attached to the upper surface of the base 3,
Two supports 16 and 17 are provided upright, and each support 1
Housings 6 and 17 are rotatably supported by bearings (deep groove ball bearings) 18 and 19, respectively.

The housing 20 has a cylindrical case 21 with a bottom.
And a lid 22 for closing the opening of the case 21. The coarse motor 23 as the first motor is the case 2
The lid 2 fixed to the case 21 in the state of being housed in
It is assembled and fixed to the inner surface side of 2. Therefore, the coarse movement motor 23 can rotate integrally with the housing 20. The rotary shaft 23a of the coarse movement motor 23 is exposed from the housing 20 through a hole 22a formed in the lid 22, and the exposed rotary shaft 23a has the drive shaft (screw shaft).
9 are connected so as to be integrally rotatable. This coarse motor 2
3 has a relatively low resolution that allows the inspection table 6 to travel at high speed.

A speed reducer 24 is arranged at the rear portion of the support 16 (on the left side in FIG. 1). A rotary shaft 25a of a fine movement motor 25 as a second motor having a resolution much higher than that of the coarse movement motor 23 is connected to the reduction gear 24 as an input shaft. The driving force of the fine movement motor 25 is decelerated and output to the output shaft 26 via the gear train 24a incorporated in the speed reducer 24, and the housing 20 is integrally rotatable with the output shaft 26 at the rear portion thereof. It is connected with. The output shaft 26, the rotary shaft 23a of the coarse movement motor 23, and the drive shaft 9 are arranged so that their respective axial centers lie on the same straight line.

At the front part of the housing 20, between the drive shaft 9 and the housing 20, the housing 20 and the drive shaft 9 serve as a switching means for switching between a connected state in which they can rotate integrally and a disconnected state in which they can rotate relative to each other. The electromagnetic clutch 27 is interposed. The electromagnetic clutch 27 is a clutch plate 28 fixed integrally rotatably to the drive shaft 9, and a clutch rotatably provided integrally with the housing 20 and movable in a direction in which the clutch plate 28 can come into contact with and separate from the clutch plate 28. A plate 29 and an electromagnetic coil 30 that is excited and demagnetized so as to bring the clutch plate 29 into contact with and separate from the clutch plate 28 are provided.

Therefore, with the electromagnetic clutch 27 (that is, the electromagnetic coil 30) being demagnetized and the housing 20 and the drive shaft 9 being in the disengaged state, only the coarse movement motor 23 is driven, so that the drive shaft 9 is driven. It is rotationally driven at a speed according to the resolution of the coarse movement motor 23. In addition, the electromagnetic clutch 27
Is excited and the housing 20 and the drive shaft 9 are connected to each other, and only the fine movement motor 25 is driven, so that the drive shaft 9 is decelerated via the speed reducer 24 according to the resolution of the fine movement motor 25. It is designed to be rotationally driven at a specified speed. The coarse movement motor 23, the fine movement motor 25, and the electromagnetic clutch 27 are all driven and controlled by the controller 31 shown in FIG.

A ring member 32 having three discs 32a is fitted on the outer peripheral surface of the housing 20.
Three sensors 33 are arranged in a state of being supported by a support bracket 34 provided upright on the support plate 15 so as to detect each of the disks 32a. A slit (notch) is formed in the detection area of the sensor 33 on the three disks 32a, and the amount of rotation of the housing 20 is detected by the controller 31 by detecting this slit. The sensor 33 detects the slit formed on the disk 32a to detect the origin of the housing 20 and the rotation allowable limit points (limits) in the forward and reverse directions with respect to the origin.

Further, the controller 31 is preset with an inspection point of the PDP (plasma display device) 35 (that is, an inspection stop position of the inspection table 6). When the PDP 35 is placed at a predetermined position on the upper surface of the inspection table 6 at the origin position, the inspection table 6 moves at high speed to the first position before the target position preset for each inspection location, and the first position
After reaching the position and temporarily stopping, the vehicle is moved at a slow speed from the first position to the target position and stopped at the target position.

The fact that the inspection table 6 has reached the origin position, the first position and the target position means that the sensor 36 disposed on the side portion of the base 3 extends to one side portion of the inspection table 6 to be detected. The controller 31 detects the slit (not shown). Also, P
The housing 20 is returned to the origin during the movement to the next target position every time the inspection of one of the plurality of inspection points of the DP 35 is completed. The permissible rotation range of the fine movement motor 25 is about 10 around the origin of the housing 20.
The angle range is set to about 0 degrees, and the fine movement motor 25 starts to be driven from the state where the housing 20 is always returned to the origin, so that the insertion hole 20a of the housing 20 is inserted.
From the wiring 23b of the coarse motor 23 (see FIG. 2).
) Is prevented from twisting more than a predetermined amount.

Next, the inspection device 1 configured as described above.
The operation of will be described. The PDP 35 is placed on the inspection table 6 at the origin position. The inspection table 6 is moved in the X-axis direction in order to inspect each inspection point of the PDP 35 in order, and the microscope 12 is moved in the Y direction so that the microscope 12 is moved.
The driving control is performed so that the inspection location falls within the visual field range.
When the inspection table 6 is at the origin position, the housing 20 (that is, the fine movement motor 25) is arranged at the origin.

When it is detected that the PDP 35 to be inspected is placed on the inspection table 6 at the origin position, the controller 31 controls the inspection table 6 so that each inspection point of the PDP 35 falls within the visual field range of the microscope 12. . First, in the controller 31, the PDP 35 sets the inspection table 6
When it is detected that the electromagnetic clutch 27 is placed on the upper side, only the coarse movement motor 23 is driven while the electromagnetic clutch 27 is demagnetized to start traveling the inspection table 6 toward the target position.
As a result, the inspection table 6 on which the PDP 35 is mounted travels speedily toward the target position at a moving speed according to the resolution of the coarse movement motor 23.

The position of the inspection table 6 at this time is recognized by the controller 31 when the sensor 36 detects the detected portion 6a of the inspection table 6. Inspection table 6
When the vehicle reaches the first position, which is a predetermined distance before the target position that is currently heading, the controller 31 stops the driving of the coarse movement motor 23. As a result, the inspection table 6 temporarily stops at the first position corresponding to the target position. The positional accuracy at the first position is not so high.

When the controller 31 confirms that the driving of the coarse movement motor 23 is stopped, it excites the electromagnetic clutch 27, and after this excitation, the housing 20 and the drive shaft 9 are securely connected so as to be integrally rotatable. , Starts driving the fine movement motor 25. When the fine shaft motor 25 is driven and the output shaft 26 rotates at a speed reduced by the speed reducer 24, the housing 20 located at the origin rotates in a predetermined direction and is driven via the electromagnetic clutch 27 in the connected state. The shaft 9 rotates integrally with the housing 20. In this way, the inspection table 6 moves from the first position to the target position at a slow speed.

When the controller 31 recognizes that the inspection table 6 has reached the target position based on the detection signal from the sensor 36, the controller 31 stops the drive of the fine movement motor 25. Since the fine movement motor 25 has a very high resolution, the inspection table 6 stops at the target position with high positional accuracy due to the stop of the drive of the fine movement motor 25. Around this time, the position of the microscope 12 is aligned in the Y-axis direction of the inspection location, and the inspection table 6 is stopped at the target position with high positional accuracy, whereby the microscope 1
The target inspection location can be reliably captured within the visual field range of 2.

Fine speed motor 25 (that is, housing 20)
The rotation amount of the disk 3 fixed to the outer periphery of the housing 20
It is recognized by the controller 31 based on the detection signal from the sensor 33 that detects the rotation of 2a. The fine movement motor 25 is
Since the housing 20 is only driven to rotate within an angle range of about 100 degrees around the origin, there is almost no fear of the wiring 23b being twisted.

When the inspection of one inspection point is completed in this way, the inspection table 6 is moved toward the target position of the next inspection point.
Runs. That is, when confirming the completion of the inspection, the controller 31 demagnetizes the electromagnetic clutch 27 to bring the coarse movement motor 23 and the drive shaft 9 into a disengaged state in which the relative movement is possible, the fine movement motor 25 is returned to the origin, and the inspection table 6 is moved. The coarse movement motor 23 is driven to move to the next target position. The origin return of the fine movement motor 25 is performed based on the detection signal from the sensor 33.

Fine motor 25 (that is, housing 20)
The origin return is completed before the inspection table 6 reaches the first position corresponding to the next target position, and after the inspection table 6 is temporarily stopped at the first position, the fine movement motor 25 is driven from the origin. Will be implemented promptly. Thus, each time the inspection table 6 completes one movement and starts the next movement, the fine movement motor 25 is returned to the origin, the fine movement motor 25 is always driven from the origin, and the amount of rotation per movement is about 5.
Since it is as small as 0 degrees or less, there is no fear of the wiring 23b kinking.

In this way, the preset inspection points are sequentially inspected, and when the inspection of all the inspection points is completed, the inspection table 6 returns to the origin position and the PDP 3 which has been inspected.
When the next PDP 35 is placed after waiting for the exchange of 5 with the PDP 35 to be inspected next, the same inspection work is executed again. Then, the same work is repeated for each PDP 35. If the inspection location cannot be captured on the monitor, the inspection location is searched for on the monitor by manually driving the fine movement motor 25.

As described above in detail, according to the present embodiment,
The following effects are obtained. (A) The coarse movement motor 2 is housed in the housing 20 that is integrally rotated with the output shaft 26 by the fine movement motor 25 through the speed reducer 24.
3 and the two motors 23 and 25 are arranged substantially in series. Therefore, as compared with the motor mechanism structure in which two motors are arranged in parallel like the motor mechanism of FIGS. 7 and 8 described in the prior art. The installation space can be reduced.
Therefore, the motor mechanism 10 can be downsized, which in turn can downsize the inspection device 1 itself.

(B) Switching between the coarse movement motor 23 and the fine movement motor 25 is performed by the electromagnetic clutch 27 that connects and disconnects the housing 20 and the drive shaft 9. Therefore, unlike the motor mechanism of FIG. 7 described in the related art, the gear meshing does not affect the position accuracy.
The inspection table 6 can be stopped at the target position with high position accuracy. Since the electromagnetic clutch 27 is used,
Almost no misalignment occurs when switching.

(C) Since only one drive shaft 9 is required for each of the motors 23 and 25, the space for disposing the drive shaft for driving the inspection table can be reduced and the cost of the drive shaft can be kept low. . In the case where the rotation amount of the drive shaft is detected and the position of the inspection table is detected, as in the motor mechanism of FIG. It is not necessary to calculate the total amount of rotation.

(D) The motor for rotating the other motor together with the drive shaft is a fine movement motor 25 having a very high resolution.
The rotation range is narrow, and the origin is returned by the next movement each time the inspection table 6 is stopped once. Therefore, even if the coarse movement motor 23 is integrally rotated with the drive shaft 9, the wiring 23b of the coarse movement motor 23 is
You don't have to worry about kinking.

The present invention is not limited to the above embodiments, and the following configurations can be adopted without departing from the spirit of the invention. (1) FIG. 5 shows a modified example of the motor mechanism, in which the reduction gear 24 is omitted from the structure of the above-described embodiment, and the rotary shaft 37a of the fine movement motor 37 as the second motor is directly connected to the housing 20 so as to be integrally rotatable. ing. This fine speed motor 3
Reference numeral 7 is a hollow motor having an insertion hole 37b as a penetrating portion passing through the axis of the rotating shaft 37a and a penetrating portion 38 penetrating the axis of the motor housing 37c. The wiring 23b of the coarse movement motor 23 penetrates the fine movement motor 37 through the insertion hole 20b, the insertion hole 37b, and the penetrating portion 38 formed in the rear portion of the housing 20, and is connected to the power supply side wiring 40 through the connector 39. ing. Connector 39 has both wires 23
b and 40 are connected so as to be rotatable relative to each other.

According to this structure, even if the fine movement motor 37 is driven and the coarse movement motor 23 rotates together with the housing 20, the twisting of the wiring 23b of the coarse movement motor 23 causes the connector 3 to rotate.
Removed by 9. Therefore, the rotation range of the fine movement motor 37 is not limited by the twist of the wiring 23b. As a result, it is not necessary to control the housing 20 to return to the origin every time the inspection table 6 is moved once as in the above embodiment. The speed reducer 24 and the output shaft 26
By forming a penetrating portion that penetrates the wiring 23b, the rotation of the fine movement motor 37 may be decelerated as in the above embodiment.

(2) FIG. 6 shows another modification of the motor mechanism, in which the coarse motor 41 as the first motor for connecting the rotary shaft 41a to the drive shaft 9 is used as a brake built-in motor, and as a built-in switching means. The brake 41b is applied to lock the motor housing 41c and the rotation shaft 41a so that they do not rotate relative to each other, so that the drive shaft 9 and the housing 20 are in an integrally rotatable connection state. Also, the brake 41b
By releasing the braking of the drive shaft 9,
It is set in a disconnected state in which relative rotation with respect to 0 is possible. That is,
By operating and releasing the brake 41b, the drive shaft 9
The motor to be the drive source of is selected. According to this configuration, the brake 4 built in the coarse motor 41 is
Since the drive shaft 9 and the housing 20 are connected and disconnected by 1b, the electromagnetic clutch 27 can be eliminated and the number of parts can be reduced as much as possible. However, an error (rotational deviation of the rotation shaft 41a with respect to the motor housing 41c) of the brake 41b is more likely to occur at the time of switching than that of the electromagnetic clutch. Therefore, a preload should be applied every time the brake 41b is operated to absorb the error. Therefore, it is possible to obtain the same positional accuracy as when the electromagnetic clutch is adopted.

(3) In the structure of FIG. 5, the first motor directly connected to the drive shaft 9 may be a fine motion motor, and the second motor may be a hollow motor may be a coarse motion motor. In this case, the wiring of the fine movement motor penetrates the coarse movement motor and is connected to the connector 39. If the coarse motor is used at a rotational speed such that the twist of the wiring of the fine motor is removed by the connector 39, there is no problem even with such a configuration.

(4) The coarse movement motor and the fine movement motor do not have to be arranged in a straight line. For example, in the above-described embodiment, the output shaft 26 from the reduction gear 24 may be on the same axis as the rotation shaft 23a of the coarse movement motor 23.
The connection direction of the fine motor 25 with respect to can be set arbitrarily. That is, the axis of the coarse movement motor 23 and the axis of the fine movement motor 25 may form a predetermined angle, or the axes may be displaced in parallel. Also with this configuration, space saving can be realized as compared with a configuration in which two motors are arranged in parallel. Further, as described in (1), in the configuration in which the speed reducer 24 and the output shaft 26 are formed with penetrating portions so that the wiring of the first motor penetrates to the rear side, the second motor has the axis center line of the output shaft 26 If they are arranged so as to be offset from each other, it is sufficient to connect the wiring of the first motor to the connector 39 without penetrating the second motor. Therefore, it is not necessary to make the second motor a hollow motor.

(5) The switching means is not limited to the electromagnetic clutch and the brake with a built-in motor, and any suitable means capable of integrally rotating the first motor and its rotating shaft and switching the connection state can be adopted. .

(6) It is not always necessary to directly fix the rotary shaft and the drive shaft of the first motor (coarse motion motor) as in the above embodiment and the motor mechanism of FIGS. 5 and 6. For example,
The structure may be such that the rotation shaft of the first motor and the drive shaft are operatively connected via a power transmission mechanism. With this configuration,
In addition to the space saving of the motor mechanism, the torque required for the first motor can be obtained even by using the first motor as a small motor by reducing the rotational force of the first motor by the power transmission mechanism.

(7) The position of the inspection table 6 may be detected by detecting the rotation amount of the drive shaft 9. (8) The inspection contents of the inspection device to which the present invention is applied can be changed as appropriate. For example, the present invention may be applied to an inspection device for inspecting a film thickness.

(9) The motor mechanism of the present invention is not limited to application to an inspection device. It can be widely adopted as a drive source of a drive target object that requires position accuracy and high-speed drive (including not only movement but also rotational displacement). Further, the present invention is not limited to the position accuracy and high-speed movement characteristics, and can be adopted as a drive source of a drive target object that requires different torques, for example. For example, it may be adopted as a driving source of a vehicle driven by a motor such as an electric vehicle, driven by a coarse movement motor during normal traveling, and driven by a driving force of a fine movement motor when particularly large torque is required.

The invention, which is grasped from the above-mentioned embodiment and is not described in the scope of claims, will be described below together with its effect. (A) In the invention of claim 3, the output shaft is a rotary shaft of a second motor that is integrally rotatably connected to the first motor, and the second motor is inserted from a through portion of the rotary shaft. The hollow motor includes a hollow portion that can pass through the wiring from the first motor. According to this configuration, when the structure in which the first motor is integrally rotatably connected to the rotation shaft of the second motor is adopted, the same effect as in claim 3 can be easily obtained by using the hollow motor as the second motor. In addition, it is not necessary to process the penetrating portion for penetrating the wiring to the output shaft.

(B) In the invention of any one of claims 1 to 3, the switching means is an electromagnetic clutch. According to this configuration, the connection state / disconnection state between the first motor and the rotary shaft thereof is switched by the electromagnetic clutch, so that the deviation occurring at the time of switching can be made as small as possible without impairing the position accuracy. it can.

(C) In the invention of any one of claims 1 to 3, the switching means is a braking means built in the first motor. According to this configuration, the first motor is braked by the braking means incorporated in the first motor, so that the first motor and the rotation shaft thereof are connected so that they can rotate integrally, and the braking of the first motor is released. By being done,
The first motor and its rotating shaft are in a disconnected state in which they can rotate relative to each other. Therefore, it is not necessary to provide a switching means such as an electromagnetic clutch as another component.

[0054]

Therefore, according to the first aspect of the invention, the first motor is integrally rotatably provided on the output shaft of the second motor, which is different from the first motor in disassembly, and the first motor is used as the rotation shaft. By driving the first motor in the disconnected state, the drive shaft is driven at a drive speed according to the resolution of the first motor, and by connecting the first motor to the rotary shaft and driving the first motor, the drive shaft is driven. Since the second motor is driven at a driving speed corresponding to the resolution, it is possible to secure both high-speed movement and positional accuracy of the driving target. Further, since the first motor is arranged in series so as to be integrally rotatable with respect to the output shaft of the second motor, the space for disposing the motor mechanism can be reduced.

According to the second aspect of the invention, the second motor is a fine movement motor having high resolution, and the rotation amount thereof is small. Therefore, the first motor rotates integrally with the output shaft of the second motor. Even then, it is possible to prevent the wiring of the first motor from being severely twisted.

According to the third aspect of the present invention, the wiring of the first motor is passed through the penetrating portion of the output shaft of the second motor, and the twist of the wiring is removed from the wiring on the power source side through the connector. Since the connection is made such that relative rotation is possible, it is possible to avoid limiting the rotation amount of the second motor.

According to the invention described in claim 4, the drive source of the drive shaft for driving the inspection table provided in the inspection device is the motor mechanism according to any one of claims 1 to 4. Therefore, it is possible to secure both high-speed movement and position accuracy of the inspection table.

[Brief description of drawings]

FIG. 1 is a side sectional view of a motor mechanism according to an embodiment.

FIG. 2 is a plan view of a motor mechanism.

FIG. 3 is a schematic front sectional view of an inspection device.

FIG. 4 is a schematic plan view of an inspection device.

FIG. 5 is a side sectional view of a motor mechanism of another example.

FIG. 6 is a side sectional view of a motor mechanism of another example.

FIG. 7 is a schematic plan view of a motor mechanism according to a conventional technique.

FIG. 8 is a schematic plan view of a motor mechanism according to a conventional technique.

[Explanation of symbols]

1 ... inspection device, 6 ... inspection table as driving object,
9 ... Drive shaft, 10 ... Motor mechanism, 23 ... Coarse motion motor as first motor, 23a ... Rotation shaft, 23b ... Wiring, 25
... fine movement motor as second motor, 26 ... output shaft, 27
... Electromagnetic brake as switching means, 37 ... Fine movement motor as second motor, 37a ... Rotating shaft as output shaft, 3
7b ... Insertion hole as a penetrating portion, 39 ... Connector, 40 ...
Power supply side wiring, 41 ... Coarse motor as first motor, 4
1a ... Rotary shaft, 41b ... Brake as switching means.

Claims (4)

[Claims] 1. A first motor having a rotation shaft connected to a drive shaft for driving an object to be driven, and a resolution different from that of the first motor, and an output shaft connected to the first motor so as to be integrally rotatable. A motor mechanism comprising: the second motor, and a switching means for switching the first motor and its rotation shaft into a connected state in which they can rotate integrally and a disconnected state in which they can rotate relative to each other. 2. The motor mechanism according to claim 1, wherein the first motor is a coarse movement motor having a low resolution, and the second motor is a fine movement motor having a high resolution. 3. The output shaft, which is operatively connected to the second motor and integrally rotates the first motor, has a penetrating portion formed through the shaft center thereof, and the wiring of the first motor is the wiring line. 3. The power source side wiring is connected through a connector that is capable of penetrating the through portion of the output shaft and relatively rotating so as to twist the wiring.
The motor mechanism described in. 4. An inspection apparatus comprising: an inspection table that is driven to travel by the rotational force of the drive shaft driven by the motor mechanism according to claim 1. Description: .