JPH093219A - Production of mold release sheet or mold release film - Google Patents

Production of mold release sheet or mold release film

Info

Publication number
JPH093219A
JPH093219A JP15596695A JP15596695A JPH093219A JP H093219 A JPH093219 A JP H093219A JP 15596695 A JP15596695 A JP 15596695A JP 15596695 A JP15596695 A JP 15596695A JP H093219 A JPH093219 A JP H093219A
Authority
JP
Japan
Prior art keywords
film
gas
sheet
mold release
release
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15596695A
Other languages
Japanese (ja)
Other versions
JP3465999B2 (en
Inventor
Keisuke Miyake
啓介 三宅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP15596695A priority Critical patent/JP3465999B2/en
Publication of JPH093219A publication Critical patent/JPH093219A/en
Application granted granted Critical
Publication of JP3465999B2 publication Critical patent/JP3465999B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/56Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/60Releasing, lubricating or separating agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/56Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/68Release sheets

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

PURPOSE: To produce a mold release sheet or mold release film high in productivity, not enlarged in peel force with time and excellent in adhesivity between a mold-releasing agent and a base sheet or film. CONSTITUTION: A method for producing a mold release sheet or mold release film comprises arranging a base sheet or film (e.g. glassine paper, polyethylene terephthalate film) between mutually faced metal electrodes wherein a solid dielectric material is placed on at least one of the mutually faced surfaces, and subsequently applying an electric voltage between the metal electrodes under a pressure around the atmospheric pressure in a gas mixture comprising <=10vol.% of a fluorine gas-containing gas and the remaining amount of an inert gas to treat the base sheet or film with the generated discharged plasma. The treated mold release sheet or film has a contact angle of >=100 degree with water.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、両面テープ用、ラベル
用、工程用等に使用される、片面又は両面が離型処理さ
れた離型シート又は離型フィルムの製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a release sheet or a release film which is used for double-sided tapes, labels, processes, etc. and has one or both sides subjected to a release treatment.

【0002】[0002]

【従来の技術】離型シート又は離型フィルムは、例え
ば、両面テープやラベルなどの粘着剤層の保護のために
使用され、両面テープやラベル製品の使用時に表面から
剥離されて廃棄されたり、キャストコートや各種成形工
業品の製造に際し粘着剤層を一時的に形成するための工
程用として使用される。
2. Description of the Related Art A release sheet or release film is used, for example, for protecting an adhesive layer of a double-sided tape or a label, and is peeled off from the surface when the double-sided tape or a label product is used and discarded. It is used for the step of temporarily forming the pressure-sensitive adhesive layer in the production of cast coat and various molded industrial products.

【0003】従来、離型シート又は離型フィルムの多く
は、基材シート又はフィルムの片面又は両面に、離型剤
が塗工されたものであった。このような離型剤として
は、アルキルウレタン基を持ったセルロース誘導体のよ
うな長鎖アルキル基含有ポリマー系(特公昭34−97
6号公報参照)や熱硬化型シリコーンのようなシリコー
ンポリマー系(例えば、特開平2−191796号公報
参照)のものが使用され、処理方法としては、マイヤー
バーコーターやグラビヤコーターで塗布する方式が取ら
れている。
Conventionally, many release sheets or release films have a release agent coated on one side or both sides of a base sheet or film. As such a releasing agent, a polymer system containing a long chain alkyl group such as a cellulose derivative having an alkyl urethane group (Japanese Patent Publication No. 34-97).
No. 6) or a silicone polymer type such as thermosetting silicone (see, for example, Japanese Patent Application Laid-Open No. 2-191796) is used, and as a treatment method, a method of applying with a Meyer bar coater or a gravure coater is used. Has been taken.

【0004】これらの離型剤は溶剤に溶解されて使用さ
れるものが主であり、この場合、処理時の安全面及び労
働環境面に問題がある。
Most of these releasing agents are used after being dissolved in a solvent, and in this case, there are problems in safety during processing and in working environment.

【0005】上記長鎖アルキル基含有ポリマー系は、耐
熱温度が約60℃であるため、工程用として使用する場
合には高温度をかけることができないので生産性が悪
く、両面テープやラベル用として使う場合には製品の熱
経時(50℃)安定性に難があり、具体的には離型シー
ト又は離型フィルムと両面テープやラベルの剥離力の水
準が大きくなり実用に耐えなくなる、などの問題があ
る。
Since the long-chain alkyl group-containing polymer system has a heat resistant temperature of about 60 ° C., it cannot be applied with a high temperature when used for a process, so that the productivity is poor and it is used for a double-sided tape or a label. When it is used, the stability of the product over time (50 ° C) is difficult. Specifically, the release sheet or release film and the double-sided tape or label have a high level of peeling force, which makes them unusable. There's a problem.

【0006】上記シリコーンポリマー系離型剤は、重合
形式により付加重合型と縮合重合型に分類されるが、付
加重合型のものでは、シリコーンの低分子物がブリード
し、粘着剤層に移行し、粘着力の低下を起こすこと、及
び重合時に未反応であったモノマーのビニル基が静電気
を帯電したほこり等を吸着し、離型性が低下し展開力が
大きくなること、という問題があり、縮合重合型のもの
では、硬化時間が長いため、生産性が悪いという問題が
ある。また、いずれの型のものでも、シリコーンポリマ
ーの硬化に200℃以上の高温が必要なため、大掛かり
な硬化炉となり、スペースを大きくとるという問題があ
る。
The above silicone polymer type release agents are classified into addition polymerization type and condensation polymerization type according to the polymerization type. In addition polymerization type, low molecular weight silicone compounds bleed and migrate to the adhesive layer. There is a problem that the adhesive force is reduced, and the vinyl group of the unreacted monomer at the time of polymerization adsorbs electrostatically charged dust and the like, the releasability is reduced and the developing force is increased, The condensation polymerization type has a problem that productivity is poor because the curing time is long. Further, in any type, since a high temperature of 200 ° C. or higher is required for curing the silicone polymer, there is a problem that it becomes a large-scale curing furnace and takes up a large space.

【0007】また、離型処理の方法としては、基材シー
ト又はフィルムに、フッ素含有ガスを用いた低圧プラズ
マ処理をすることによって、フッ素化することも提案さ
れている(特開昭55−165925号公報参照)が、
この場合は、低圧を維持するための設備が複雑、かつ高
価なものとなるばかりでなく、離型シート又は離型フィ
ルムの連続生産には不向きであるという問題がある。
As a method of releasing treatment, it has been proposed to fluorinate a substrate sheet or film by low-pressure plasma treatment using a fluorine-containing gas (Japanese Patent Laid-Open No. 165925/1985). (See the official gazette),
In this case, there is a problem that not only the equipment for maintaining the low pressure becomes complicated and expensive, but also it is not suitable for continuous production of the release sheet or the release film.

【0008】[0008]

【発明が解決しようとする課題】本発明は、上記問題点
を解決するものであり、その目的は、生産性が高く、経
時的に剥離力が大きくならず、離型剤と基材シート又は
フィルムとの密着性に優れた、離型シート又は離型フィ
ルムの製造方法を提供することにある。
DISCLOSURE OF THE INVENTION The present invention is intended to solve the above problems, and its object is to achieve high productivity and prevent the release force from increasing over time, and to improve the release agent and the base sheet or It is an object of the present invention to provide a method for producing a release sheet or a release film having excellent adhesion to a film.

【0009】[0009]

【課題を解決するための手段】本発明は、基材シート又
はフィルムを、少なくとも一方の対向面に固体誘電体が
配設された対向する金属電極間に配置して、10体積%
以下のフッ素原子含有ガスと残部が不活性ガスからなる
混合ガスの大気圧近傍の圧力下で、該金属電極間に電圧
を印加することにより発生した放電プラズマで該基材シ
ート又はフィルムを処理することにより、水に対する接
触角を100度以上とすることを特徴とする離型シート
又は離型フィルムの製造方法である。
According to the present invention, a substrate sheet or film is disposed between opposing metal electrodes having a solid dielectric material disposed on at least one opposing surface, and the volume is 10% by volume.
The base sheet or film is treated with discharge plasma generated by applying a voltage between the metal electrodes under a pressure near the atmospheric pressure of a mixed gas containing the following fluorine atom-containing gas and the balance of an inert gas. Thus, the contact angle to water is 100 degrees or more, which is a method for producing a release sheet or release film.

【0010】上記基材シート又はフィルムの種類として
は、従来より離型シート又は離型フィルムに使用されて
いるものであれば、特に限定されない。例えば、クルパ
ック加工クラフト紙(晒し、未晒し共に使用可能)、一
般上質紙、グラシン紙等の紙ベース;ポリエチレン、ポ
リプロピレン、ポリエチレンテレフタレート等のフィル
ムベースが挙げられる。上記の紙ベースにおいては、表
面改質のためにクレー、タルク、炭酸カルシウム、ポリ
エチレン、ポリビニルアルコール、ポリプロピレン、紙
力剤、サイズ剤など使用されたものでもよい。
The type of the base sheet or film is not particularly limited as long as it has been conventionally used for a release sheet or a release film. For example, paper bases such as Clupak processed kraft paper (can be used both bleached and unbleached), general high-quality papers, glassine papers; film bases such as polyethylene, polypropylene, polyethylene terephthalate. In the above paper base, clay, talc, calcium carbonate, polyethylene, polyvinyl alcohol, polypropylene, paper strength agent, sizing agent, etc. may be used for surface modification.

【0011】上記フッ素原子含有ガスとしては、例え
ば、テトラフロロメタン(CF4 )、ヘキサフロロエタ
ン(C2 6 )、ヘキサフロロプロピレン(C3 6
等のフッ化炭素;モノクロロトリフロロメタン(CCl
3)等のハロゲン化フッ化炭素;ヘキサフロロサルファ
イド(SF6 )などが挙げられ、安全であり、かつプラ
ズマ中でフッ化水素等の有害ガスを発生しないCF4
2 6 、C3 6 等が特に好ましい。フッ素原子含有
ガスは、単独で使用されてもよいし、併用されてもよ
い。
Examples of the fluorine atom-containing gas include tetrafluoromethane (CF 4 ), hexafluoroethane (C 2 F 6 ), hexafluoropropylene (C 3 F 6 ).
Fluorocarbons such as monochlorotrifluoromethane (CCl
Halogenated fluorocarbons such as F 3 ); hexafluorosulfide (SF 6 ) and the like, which are safe and do not generate harmful gas such as hydrogen fluoride in plasma, CF 4 ,
C 2 F 6 , C 3 F 6 and the like are particularly preferable. The fluorine atom-containing gas may be used alone or in combination.

【0012】上記の不活性ガスとしては、ヘリウム、ア
ルゴン、ネオン、キセノン等の希ガスや窒素ガスが単独
又は混合して使用されるが、ヘリウムが準安定状態で寿
命が長く、フッ素原子含有ガスを励起するのに有利なた
め好ましい。不活性ガスとしてヘリウム以外のガスを使
用する場合は、安定な放電プラズマを発生させるため
に、アセトンやメタノール等の有機物蒸気、メタン、エ
タン等の炭化水素ガスを2体積%以下の割合で混合する
のが好ましい。
As the above-mentioned inert gas, a rare gas such as helium, argon, neon, xenon, etc. or a nitrogen gas is used alone or in combination, but helium is a metastable state and has a long life, and a fluorine atom-containing gas. Is preferable because it is advantageous for exciting When a gas other than helium is used as the inert gas, in order to generate stable discharge plasma, organic vapor such as acetone and methanol, and hydrocarbon gas such as methane and ethane are mixed at a ratio of 2% by volume or less. Is preferred.

【0013】フッ素原子含有ガスと不活性ガスとの混合
割合は、使用するガスの種類によって変わるが、フッ素
原子含有ガスの相対濃度が低くなるとフッ素化の程度が
不十分となり、得られた離型シート又は離型フィルムの
水に対する接触角が100度未満となり易く、高くなる
とアーク放電が発生し易くなり、更に高くなると、高い
電圧を印加しても放電プラズマを発生しなくなるので、
フッ素原子含有ガス濃度は10体積%以下に限定され、
好ましくは0.1〜10体積%である。
The mixing ratio of the fluorine atom-containing gas and the inert gas varies depending on the type of gas used, but when the relative concentration of the fluorine atom-containing gas becomes low, the degree of fluorination becomes insufficient, and the obtained mold release The contact angle of the sheet or the release film to water is easily less than 100 degrees, and when it becomes higher, arc discharge easily occurs, and when it becomes higher, discharge plasma does not occur even when a high voltage is applied,
The concentration of fluorine atom-containing gas is limited to 10% by volume or less,
It is preferably 0.1 to 10% by volume.

【0014】上記のフッ素原子含有ガスと不活性ガスか
らなる混合ガスの圧力は、大気圧近傍に限定されるが、
具体的には、100〜800Torrの圧力であり、圧
力調整が容易で装置が簡便で済むため、700〜780
Torrが好ましい。
The pressure of the above mixed gas consisting of the fluorine atom-containing gas and the inert gas is limited to near atmospheric pressure,
Specifically, the pressure is 100 to 800 Torr, and the pressure adjustment is easy and the device is simple. Therefore, the pressure is 700 to 780.
Torr is preferred.

【0015】本発明で得られる離型シート又は離型フィ
ルムは、その処理面の水に対する接触角が100度以上
とされる。水に対する接触角が100度未満になると離
型性が不十分となる。
The release sheet or release film obtained in the present invention has a treated surface having a contact angle with water of 100 degrees or more. When the contact angle with water is less than 100 degrees, the releasability becomes insufficient.

【0016】以下に、本発明におけるプラズマ処理工程
について図面によって説明する。図1は、本発明に使用
されるプラズマ処理装置の一例を示す説明図である。こ
の装置は、電源部1、処理容器2、上部金属電極4、下
部金属電極5から構成されている。電源部1は、kHz
台の周波数の電源が印加可能とされるが、耐熱性の低い
基材シート又はフィルムにプラズマ処理するには、基材
への影響が少ない10〜30kHzの周波数が好まし
い。
The plasma processing step in the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory diagram showing an example of a plasma processing apparatus used in the present invention. This apparatus comprises a power supply unit 1, a processing container 2, an upper metal electrode 4, and a lower metal electrode 5. The power supply unit 1 has a kHz
Although a power source having a frequency of a table can be applied, a frequency of 10 to 30 kHz is preferable for plasma treatment of a base sheet or film having low heat resistance, which has a small influence on the base.

【0017】放電プラズマの発生は、電極への電圧印加
によって行うが、電界強度が低くなると、プラズマ密度
が小さくなるので処理時間がかかり、高くなると、誘電
体が高温になりアーク放電に移行する挙動を示すので、
電界強度が5〜40kV/cm程度になるように電圧印
加するのが好ましい。
The discharge plasma is generated by applying a voltage to the electrodes. When the electric field strength is low, the plasma density is low, so that it takes a long time to process the plasma. , So
It is preferable to apply a voltage so that the electric field strength is about 5 to 40 kV / cm.

【0018】処理容器2は、上面2aと底面2bがステ
ンレス製、側面2cがポリメチルメタクリレート製であ
り、上面2aと上部電極4との間に絶縁体2dが配設さ
れている。処理容器2の材質は、これに限らず、全てが
プラスチック製、ガラス製でも構わないし、電極と絶縁
がとれているならば、ステンレスやアルミニウム等の金
属製でも構わない。
The processing container 2 has a top surface 2a and a bottom surface 2b made of stainless steel, a side surface 2c made of polymethylmethacrylate, and an insulator 2d disposed between the top surface 2a and the upper electrode 4. The material of the processing container 2 is not limited to this, and all may be made of plastic or glass, or may be made of metal such as stainless steel or aluminum as long as it is insulated from the electrodes.

【0019】処理容器2は、基材シート又はフィルムを
連続してプラズマ処理できるように、基材シート又はフ
ィルムの処理容器2への入口部と出口部となるための、
スリット12、12がその両側面にあけられている。ま
た、上記のスリット12、12は、必要に応じて処理容
器2を密閉できるように開閉可能とされている。
The processing container 2 serves as an inlet and an outlet of the substrate sheet or film to the processing container 2 so that the substrate sheet or film can be continuously plasma-processed.
Slits 12 and 12 are formed on both side surfaces thereof. Further, the slits 12 and 12 can be opened and closed so that the processing container 2 can be hermetically sealed if necessary.

【0020】処理容器2内に一対の対向する平行平板型
の上部金属電極4と下部金属電極5が配設されている。
なお、電極配置構造としては、平行平板型以外にも、同
軸円筒型、円筒対向平板型、球対向平板型、双曲面対向
平板型でも、また、複数の細線と平板からなるものでも
構わない。電極の材質は、金属であれば、特に限定され
ず、例えば、ステンレス、真鍮等の多成分系の金属で
も、銅、アルミニウム等の純金属でも良い。放電プラズ
マによる表面処理部3は、対向する上部金属電極4と下
部金属電極5の間の空間である。
A pair of opposed parallel plate type upper and lower metal electrodes 4 and 5 are arranged in the processing container 2.
In addition to the parallel plate type, the electrode arrangement structure may be a coaxial cylinder type, a cylinder facing flat plate type, a sphere facing flat plate type, a hyperboloid facing flat plate type, or a plurality of thin wires and flat plates. The material of the electrode is not particularly limited as long as it is a metal, and may be, for example, a multi-component metal such as stainless steel or brass, or a pure metal such as copper or aluminum. The surface treatment part 3 by discharge plasma is a space between the upper metal electrode 4 and the lower metal electrode 5 which face each other.

【0021】本発明においては、金属電極の少なくとも
一方の対向面に固体誘電体が配設される。具体的には、
上部金属電極4と下部金属電極5の少なくとも一方の対
向面に固体誘電体6が配設される。図1の装置において
は、下部金属電極5の上に固体誘電体6が配設されてい
る。固体誘電体6は、相対する電極の対向面の全面に配
設される必要がある。一部でも、対向面が露出している
とプラズマ処理時にアーク放電が生じる。固体誘電体6
は、図1に示すように、必ずしも下部金属電極5の上に
配設される必要はなく、上部金属電極4側に配設されて
も構わないし、両電極に配設されても構わない。
In the present invention, the solid dielectric is provided on at least one opposing surface of the metal electrode. In particular,
A solid dielectric 6 is provided on at least one opposing surface of the upper metal electrode 4 and the lower metal electrode 5. In the device of FIG. 1, the solid dielectric 6 is disposed on the lower metal electrode 5. The solid dielectric 6 needs to be disposed on the entire surface of the facing surface of the opposing electrodes. Even if a part of the facing surface is exposed, arc discharge occurs during plasma processing. Solid dielectric 6
1 does not necessarily have to be provided on the lower metal electrode 5 as shown in FIG. 1, and may be provided on the upper metal electrode 4 side or both electrodes.

【0022】固体誘電体6としては、例えば、ポリテト
ラフルオロエチレン(PTFE)やポリエチレンテレフ
タレート(PET)等のプラスチック;シリカ、アルミ
ナ、酸化チタン、酸化ジルコニウム等の金属酸化物単体
又はそれらの金属の化合物が挙げられる。固体誘電体6
の形状は、シート状でも、フィルム状でも構わない。固
体誘電体6の厚みについては、厚みが薄くなると、高電
圧印加時に絶縁破壊が起こってアーク放電が生じやすく
なり、厚くなると、放電プラズマを発生するのに高電圧
を要するので、0.05〜4mmの厚みが好ましい。
Examples of the solid dielectric 6 include plastics such as polytetrafluoroethylene (PTFE) and polyethylene terephthalate (PET); simple metal oxides such as silica, alumina, titanium oxide and zirconium oxide, or compounds of these metals. Is mentioned. Solid dielectric 6
The shape of may be sheet-like or film-like. Regarding the thickness of the solid dielectric 6, if the thickness is thin, dielectric breakdown occurs at the time of applying a high voltage, and arc discharge easily occurs, and if it is thick, a high voltage is required to generate discharge plasma. A thickness of 4 mm is preferred.

【0023】図1の装置において、フッ素原子含有ガス
は、ガス導入管8を経て多孔構造の上部金属電極4か
ら、また不活性ガスは、ガス導入管9から、表面処理部
3に供給される。なお、図1においては、上部金属電極
4は、フッ素原子含有ガスを均一に供給するために、そ
の内部がガスの通路とされた、多孔性の電極とされてい
る。このように上部金属電極4がガス導入口と電極を兼
ね、且つ多孔構造からなると、フッ素原子含有ガスを表
面処理部3に均一に供給し、均一な処理を行うために好
ましい。しかし、例えば、フッ素原子含有ガスを高速で
吹き付けるなどにより、表面処理部3に均一に供給する
ことが可能であれば、必ずしも多孔構造とする必要はな
い。
In the apparatus of FIG. 1, the fluorine atom-containing gas is supplied to the surface treatment section 3 from the porous upper metal electrode 4 via the gas introduction pipe 8 and the inert gas is supplied from the gas introduction pipe 9 to the surface treatment unit 3. . Note that, in FIG. 1, the upper metal electrode 4 is a porous electrode having a gas passage inside thereof in order to uniformly supply the fluorine atom-containing gas. Thus, it is preferable that the upper metal electrode 4 also serves as a gas inlet and an electrode and has a porous structure in order to uniformly supply the fluorine atom-containing gas to the surface treatment part 3 and perform uniform treatment. However, if the fluorine atom-containing gas can be uniformly supplied to the surface-treated portion 3 by, for example, spraying a fluorine atom-containing gas at a high speed, the porous structure is not necessarily required.

【0024】また、不活性ガスは、フッ素原子含有ガス
と混合してガス導入管8を通り、上部金属電極4から導
入しても構わないが、均一性よくプラズマ処理するため
には、フッ素原子含有ガスを上部金属電極4から導入
し、不活性ガスをガス導入管9から導入するのが好まし
い。また、ガス導入管9の処理容器2内の先端部は、図
1に示したように、多数の穴の開いたリング状とし、そ
の穴からガスが処理容器2内に供給される方が、均一に
処理され易いので好ましい。
The inert gas may be mixed with the fluorine atom-containing gas and introduced from the upper metal electrode 4 through the gas introduction pipe 8. However, in order to perform the plasma treatment with good uniformity, the fluorine atom may be introduced. It is preferable to introduce the contained gas from the upper metal electrode 4 and the inert gas from the gas introduction pipe 9. Further, as shown in FIG. 1, the distal end portion of the gas introducing pipe 9 inside the processing container 2 has a ring shape with a large number of holes, and gas is supplied into the processing container 2 through the holes. It is preferable because it can be uniformly treated.

【0025】また、フッ素原子含有ガス及び不活性ガス
は、図示しないが、マスフローコントローラーで流量制
御されて供給されるのが好ましい。
Although not shown, the fluorine atom-containing gas and the inert gas are preferably supplied while the flow rate is controlled by a mass flow controller.

【0026】図1のプラズマ処理装置を用いて、基材シ
ート又はフィルムをプラズマ処理する際の操作手順は、
特に限定されないが、例えば、以下の手順である。処理
容器2内の空気を排気した後、次いで、フッ素原子含有
ガス及び不活性ガスをマスフローコントローラーで流量
制御し、上記の所定の濃度の混合ガスとして、表面処理
部3に供給し、表面処理部3の混合ガスの圧力を100
〜800Torrとする。次いで、スリット12、12
をあけて基材シート又はフィルム7を一方のスリット1
2から処理容器2内に入れ、他方のスリット12から処
理容器2外に出し、引取ロール(図示せず)などを使用
して、基材シート又はフィルム7が処理容器2内を連続
して、通過できるようにする。この際、基材シート又は
フィルム7のプラズマ処理したい面を表面処理部3に対
向するようにして、基材シート又はフィルム7を固体誘
電体6に接触させる。また、基材シート又はフィルム7
の両面をプラズマ処理したい場合は、基材シート又はフ
ィルム7を固体誘電体6に接触させずに、表面処理部3
内に浮かせるように配置すればよい。次いで、金属電極
間に電圧を印加し、放電プラズマを発生させて、該プラ
ズマを基材シート又はフィルム7のプラズマ処理したい
面に接触させる。そして、基材シート又はフィルム7を
必要な時間だけプラズマが接触するようなライン速度
で、処理容器2内を通過せしめてプラズマ処理する。
The procedure for plasma-treating a substrate sheet or film using the plasma treatment apparatus shown in FIG.
Although not particularly limited, for example, the following procedure is performed. After evacuating the air in the processing container 2, the flow rate of the fluorine atom-containing gas and the inert gas is then controlled by the mass flow controller, and the mixed gas having the above-mentioned predetermined concentration is supplied to the surface treatment unit 3, and the surface treatment unit 3 The pressure of the mixed gas of 3 is 100
~ 800 Torr Then, the slits 12, 12
Open the base sheet or film 7 and one slit 1
2 into the processing container 2 and the other slit 12 to the outside of the processing container 2 and a substrate sheet or film 7 continuously in the processing container 2 using a take-up roll (not shown). Allow to pass. At this time, the base sheet or film 7 is brought into contact with the solid dielectric 6 with the surface of the base sheet or film 7 to be subjected to plasma treatment facing the surface treatment section 3. Also, the base sheet or film 7
If it is desired to perform plasma treatment on both sides of the surface treatment section 3 without contacting the base sheet or film 7 with the solid dielectric 6,
It should be placed so that it floats inside. Then, a voltage is applied between the metal electrodes to generate discharge plasma, and the plasma is brought into contact with the surface of the substrate sheet or film 7 to be subjected to plasma treatment. Then, the base material sheet or film 7 is passed through the inside of the processing container 2 at a line speed at which the plasma is brought into contact with the base material sheet or film 7 for a necessary time, and plasma processing is performed.

【0027】また、上部金属電極4と下部金属電極5の
間の距離は、供給されるフッ素原子含有ガスのガス流
量、印加電圧の大きさ、固体誘電体の材質及び厚み、並
びに、基材シート又はフィルムの厚みなどによって、適
宜決定されるが、距離が小さくなると未使用のフッ素原
子含有ガスが多くなり非能率的であり、大きくなると、
電極空間のガスの均一性が損なわれ易くなるので、1〜
20mmが好ましい。
The distance between the upper metal electrode 4 and the lower metal electrode 5 depends on the gas flow rate of the supplied fluorine atom-containing gas, the magnitude of the applied voltage, the material and thickness of the solid dielectric material, and the base sheet. Or, depending on the thickness of the film, etc., it is appropriately determined, but when the distance becomes small, the amount of unused fluorine atom-containing gas becomes inefficient, and when it becomes large,
Since the uniformity of gas in the electrode space tends to be impaired,
20 mm is preferable.

【0028】また、過剰のフッ素原子含有ガス及び不活
性ガスは、処理容器2のガス出口10から排出する。ま
た、処理容器2内にフッ素原子含有ガス及び不活性ガス
を導入する際に、処理容器2内に残存する空気を、上述
のように、予め、排気口11から排気するようにするの
が好ましい。
Excess fluorine atom-containing gas and inert gas are discharged from the gas outlet 10 of the processing container 2. Further, when the fluorine atom-containing gas and the inert gas are introduced into the processing container 2, it is preferable that the air remaining in the processing container 2 be exhausted from the exhaust port 11 in advance as described above. .

【0029】また、上記の操作手順においては、プラズ
マ処理に先立って、処理容器2内の空気を排気した後、
所定の濃度の混合ガスを表面処理部3に供給したが、処
理容器2内の空気を排気せずに、所定の濃度の混合ガス
を表面処理部3にある時間供給しながら、ガス出口10
又は排気口11から処理容器2内のガスを排気させるこ
とにより、ガス交換をした後プラズマ処理してもよい。
Further, in the above operation procedure, after the air in the processing container 2 is exhausted before the plasma processing,
Although the mixed gas having a predetermined concentration was supplied to the surface treatment section 3, the gas outlet 10 was supplied while the mixed gas having a predetermined concentration was supplied to the surface treatment section 3 for a certain time without exhausting the air in the processing container 2.
Alternatively, the gas in the processing container 2 may be exhausted from the exhaust port 11 to exchange the gas, and then the plasma processing may be performed.

【0030】[0030]

【作用】本発明の離型シート又は離型フィルムは、プラ
ズマ処理により基材シート又はフィルムの表面にフッ素
原子が分布し、基材シート又はフィルムの表面エネルギ
ーが小さくなり、基材シート又はフィルムの表面に粘着
剤、キャストコート品又は工業製品等が濡れにくくな
り、基材シート又はフィルム表面は剥離性を有するよう
になるため、両面テープ、ラベル、キャストコート品又
は工業製品等の剥離が軽くなる。
In the release sheet or release film of the present invention, the fluorine atom is distributed on the surface of the base sheet or film by the plasma treatment, and the surface energy of the base sheet or film is reduced. Adhesives, cast-coated products, industrial products, etc. are less likely to get wet on the surface, and the surface of the base sheet or film becomes releasable, so peeling of double-sided tapes, labels, cast-coated products, industrial products, etc. becomes lighter. .

【0031】また、プラズマ処理により基材シート又は
フィルムの表面にフッ素原子が強力に結合するため、基
材シート又はフィルムの表面から粘着剤、キャストコー
ト品又は工業製品等表面へのフッ素原子の移行がなく、
本発明で得られる離型シート又は離型フィルムの剥離力
が経時変化しない。
Further, since the fluorine atoms are strongly bonded to the surface of the substrate sheet or film by the plasma treatment, the migration of fluorine atoms from the surface of the substrate sheet or film to the surface of the adhesive, cast coat product or industrial product. Without
The release force of the release sheet or release film obtained in the present invention does not change with time.

【0032】また、本発明の粘着テープは、100〜8
00Torrの大気圧近傍の圧力下でのプラズマ処理に
よって製造されるから、処理装置として低圧を維持する
ための装置は必要なく、また、従来の離型処理装置と異
なり、溶剤型の剥離剤を塗工した後、溶剤を揮発、乾燥
するための乾燥炉は不要で、また、処理装置以外の硬化
炉等も必要なく、設備もコンパクトであり、製造が簡単
であり、生産性も高い。
Further, the adhesive tape of the present invention is 100 to 8
Since it is manufactured by plasma treatment under a pressure of about 00 Torr near atmospheric pressure, there is no need for a device for maintaining a low pressure as a processing device, and unlike a conventional mold release processing device, a solvent type release agent is applied. After the work, a drying furnace for volatilizing and drying the solvent is not necessary, and a curing furnace other than the processing device is not necessary. The equipment is compact, the manufacturing is easy, and the productivity is high.

【0033】[0033]

【実施例】以下、この発明の実施例を説明する。 (実施例1)図1に示したプラズマ処理装置〔処理容器
2は、500mm×500mm×500mmの立方体で
ある。上部および下部金属電極は300mm×300m
mのステンレス鋼(SUS304)よりなる。上部金属
電極4の下部金属電極5への対向面には、1mmφの穴
が1cm間隔で開いている。電極間距離は5mmであ
り、下部金属電極5上に固体誘電体6として厚み1mm
の350mm×350mmのポリテトラフルオロエチレ
ンが配設されている。〕を使用した。まず、テトラフロ
ロメタンを流量100sccmでガス導入管8から、ヘ
リウムガスを流量9900sccmでガス導入管9から
処理容器2内に導入し、760Torrの大気圧と等圧
で15分間ガス置換した。
Embodiments of the present invention will be described below. (Embodiment 1) The plasma processing apparatus shown in FIG. 1 [The processing container 2 is a cube of 500 mm × 500 mm × 500 mm. The upper and lower metal electrodes are 300 mm x 300 m
m of stainless steel (SUS304). On the surface of the upper metal electrode 4 facing the lower metal electrode 5, 1 mmφ holes are opened at 1 cm intervals. The distance between the electrodes is 5 mm, and the thickness of the solid dielectric 6 on the lower metal electrode 5 is 1 mm.
350 mm × 350 mm of polytetrafluoroethylene is provided. 〕It was used. First, tetrafluoromethane was introduced into the processing container 2 from the gas introduction pipe 8 at a flow rate of 100 sccm and helium gas at a flow rate of 9900 sccm into the processing container 2, and the gas was replaced with the atmospheric pressure of 760 Torr for 15 minutes.

【0034】スリット12、12をあけ、坪量95g/
2 のグラシン紙(新王子製紙社製、3G−95−11
1−124、幅300mm)7を、処理容器2内を通過
せしめるように配置せしめると共に、表面処理部3に対
向するように配置し、その片面を固体誘電体6の上に接
触させた。
The slits 12, 12 are opened, and the basis weight is 95 g /
m 2 glassine paper (manufactured by Shin Oji Paper Co., Ltd., 3G-95-11
1-124, width 300 mm) 7 was arranged so as to pass through the inside of the processing container 2, and was arranged so as to face the surface treatment portion 3, and one surface thereof was brought into contact with the solid dielectric material 6.

【0035】次いで、テトラフロロメタンの流量を10
sccm、ヘリウムガス流量を990sccmに変えた
後、電極間に周波数15kHz、6.2kVの電圧を印
加し、上記グラシン紙7を走行スピード10m/分で移
動させながらプラズマ処理し離型シートを得た。
Next, the flow rate of tetrafluoromethane was set to 10
After changing the sccm and helium gas flow rates to 990 sccm, a voltage of 15 kHz and a voltage of 6.2 kV was applied between the electrodes, and the glassine paper 7 was plasma-treated while moving at a running speed of 10 m / min to obtain a release sheet. .

【0036】(実施例2)基材シート又はフィルム7と
して、グラシン紙の代わりに、厚さ25μmのポリエチ
レンテレフタレートフィルム(東レ社製、ルミラー♯2
5)を使用したことの他は、実施例1と同様にして離型
フィルムを得た。
Example 2 As a base sheet or film 7, instead of glassine paper, a polyethylene terephthalate film having a thickness of 25 μm (Lumirror # 2, manufactured by Toray Industries, Inc.) was used.
A release film was obtained in the same manner as in Example 1 except that 5) was used.

【0037】(比較例1)坪量95g/m2 のグラシン
紙(新王子製紙社製、3G−95−111−124、幅
300mm)を未処理のまま離型シートとした。
Comparative Example 1 Glassine paper (manufactured by Shin Oji Paper Co., Ltd., 3G-95-111-124, width 300 mm) having a basis weight of 95 g / m 2 was used as a release sheet without treatment.

【0038】(比較例2)厚さ25μmのポリエチレン
テレフタレートフィルム(東レ社製、ルミラー♯25)
を未処理のまま離型フィルムとした。
(Comparative Example 2) 25 μm thick polyethylene terephthalate film (Toray Industries, Inc., Lumirror # 25)
Was used as a release film without treatment.

【0039】(比較例3)坪量95g/m2 のグラシン
紙(新王子製紙社製、3G−95−111−124、幅
300mm)の片面に、無溶剤型シリコーン(信越化学
工業社製、KNS−3100)を1.0g/m2 塗工
し、硬化させ離型シートを得た。
(Comparative Example 3) A solventless silicone (manufactured by Shin-Etsu Chemical Co., Ltd., on one side of glassine paper (manufactured by Shin Oji Paper Co., Ltd., 3G-95-111-124, width 300 mm) having a basis weight of 95 g / m 2 KNS-3100) was applied at 1.0 g / m 2 and cured to obtain a release sheet.

【0040】(比較例4)厚さ25μmのポリエチレン
テレフタレートフィルム(東レ社製、ルミラー♯25)
の片面に、無溶剤型シリコーン(信越化学工業社製、K
NS−3100)を0.7g/m2 塗工し、硬化させ離
型フィルムを得た。
(Comparative Example 4) Polyethylene terephthalate film having a thickness of 25 μm (Lumirror # 25, manufactured by Toray Industries, Inc.)
Solvent-free silicone (made by Shin-Etsu Chemical Co., Ltd., K
NS-3100) was applied at 0.7 g / m 2 and cured to obtain a release film.

【0041】(比較例5)実施例1におけるガス置換に
おいてテトラフロロメタンの流量を1500sccm、
ヘリウムガスの流量を8500sccmに変えたこと、
及び、プラズマ処理において、テトラフロロメタンの流
量を150sccm、ヘリウムガスの流量を850sc
cmに変えたことの他は、実施例1と同様にして離型シ
ートを得た。
(Comparative Example 5) In gas replacement in Example 1, the flow rate of tetrafluoromethane was 1500 sccm,
Changing the flow rate of helium gas to 8500 sccm,
In the plasma treatment, the flow rate of tetrafluoromethane is 150 sccm and the flow rate of helium gas is 850 sc.
A release sheet was obtained in the same manner as in Example 1 except that the release sheet was changed to cm.

【0042】(比較例6)実施例2におけるガス置換に
おいてテトラフロロメタンの流量を1500sccm、
ヘリウムガスの流量を8500sccmに変えたこと、
及び、プラズマ処理において、テトラフロロメタンの流
量を150sccm、ヘリウムガスの流量を850sc
cmに変えたことの他は、実施例2と同様にして離型フ
ィルムを得た。
(Comparative Example 6) In gas replacement in Example 2, the flow rate of tetrafluoromethane was 1500 sccm,
Changing the flow rate of helium gas to 8500 sccm,
In the plasma treatment, the flow rate of tetrafluoromethane is 150 sccm and the flow rate of helium gas is 850 sc.
A release film was obtained in the same manner as in Example 2 except that the release film was changed to cm.

【0043】評価 実施例1及び2、比較例1〜6で得られた離型シート又
は離型フィルムについて、接触角剥離力熱経時剥
離力を、以下のようにして調べ、結果を表1に示した。 接触角 離型シート又は離型フィルムのプラズマ処理面又は離型
剤処理面に直径2mmの水滴を2mmの間隔で滴下し、
協和界面化学社製の接触角測定装置(商品名CA−D)
を用いて測定した。 剥離力 離型シート又は離型フィルムをステンレス板(厚み1m
m)で支持し、離型シート又は離型フィルムのプラズマ
処理面又は離型剤処理面に日東ポリエステルテープ♯3
1B(日東電工社製)を貼り付け、JIS Z 023
7(粘着テープ・粘着シート試験方法)の粘着力試験に
準拠して、180度ひきはがし粘着力を測定した。 熱経時剥離力 離型シート又は離型フィルムをステンレス板(厚み1m
m)で支持し、離型シート又は離型フィルムのプラズマ
処理面又は離型剤処理面に日東ポリエステルテープ♯3
1B(日東電工社製)を貼り付けた状態で、50℃の雰
囲気下に1カ月放置した後、JIS Z 0237(粘
着テープ・粘着シート試験方法)の粘着力試験に準拠し
て、180度ひきはがし粘着力を測定した。
Evaluation of the release sheets or release films obtained in Evaluation Examples 1 and 2 and Comparative Examples 1 to 6, the contact angle peeling force and the heat-time peeling force were examined as follows, and the results are shown in Table 1. Indicated. Contact angle A water drop having a diameter of 2 mm is dropped at an interval of 2 mm on the plasma-treated surface or the release agent-treated surface of the release sheet or release film,
Contact angle measuring device (trade name CA-D) manufactured by Kyowa Interface Science Co., Ltd.
It measured using. Peeling force Release sheet or release film is made of stainless steel plate (thickness 1m
Nitto polyester tape # 3 on the plasma-treated surface or the release agent-treated surface of the release sheet or release film.
1B (manufactured by Nitto Denko Corporation) is attached, and JIS Z 023
According to the adhesive strength test of 7 (Adhesive tape / adhesive sheet test method), the 180-degree peeling-off adhesive strength was measured. Peeling force with heat with time Release sheet or release film is made of stainless steel plate (thickness 1m
Nitto polyester tape # 3 on the plasma-treated surface or the release agent-treated surface of the release sheet or release film.
1B (manufactured by Nitto Denko Corporation) is left in an atmosphere of 50 ° C. for 1 month, and then pulled by 180 degrees based on the adhesive strength test of JIS Z 0237 (adhesive tape / adhesive sheet test method) The peeling adhesion was measured.

【0044】[0044]

【表1】 [Table 1]

【0045】[0045]

【発明の効果】本発明の離型シート又は離型フィルムの
製造方法の構成は上述の通りであり、生産性が高く、経
時的に剥離力が大きくならず、離型剤と基材シート又は
フィルムとの密着性に優れた、離型シート又は離型フィ
ルムの製造方法を提供する。
The constitution of the method for producing a release sheet or release film of the present invention is as described above, and the productivity is high and the peeling force does not increase with time, and the release agent and the base sheet or Provided is a method for producing a release sheet or a release film having excellent adhesion to a film.

【図面の簡単な説明】[Brief description of drawings]

【図1】プラズマ処理装置の一例を示す説明図。FIG. 1 is an explanatory diagram showing an example of a plasma processing apparatus.

【符号の説明】[Explanation of symbols]

1 電源部 2 処理容器 3 表面処理部 4 上部金属電極 5 下部金属電極 6 固体誘電体 7 基材シート又はフィルム 8 ガス導入管 9 ガス導入管 10 ガス出口 11 排気口 12 スリット 1 Power Supply Section 2 Processing Container 3 Surface Treatment Section 4 Upper Metal Electrode 5 Lower Metal Electrode 6 Solid Dielectric 7 Base Material Sheet or Film 8 Gas Introducing Tube 9 Gas Introducing Tube 10 Gas Outlet 11 Exhaust 12 Slit

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 基材シート又はフィルムを、少なくとも
一方の対向面に固体誘電体が配設された対向する金属電
極間に配置して、10体積%以下のフッ素原子含有ガス
と残部が不活性ガスからなる混合ガスの大気圧近傍の圧
力下で、該金属電極間に電圧を印加することにより発生
した放電プラズマで該基材シート又はフィルムを処理す
ることにより、水に対する接触角を100度以上とする
ことを特徴とする離型シート又は離型フィルムの製造方
法。
1. A substrate sheet or film is disposed between opposing metal electrodes having a solid dielectric disposed on at least one opposing surface, and 10% by volume or less of a fluorine atom-containing gas and the balance are inert. The contact angle to water is 100 degrees or more by treating the base sheet or film with discharge plasma generated by applying a voltage between the metal electrodes under a pressure near the atmospheric pressure of a mixed gas of gases. The method for producing a release sheet or release film, comprising:
JP15596695A 1995-06-22 1995-06-22 Method for producing release sheet or release film Expired - Fee Related JP3465999B2 (en)

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JPH093219A true JPH093219A (en) 1997-01-07
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006305924A (en) * 2005-04-28 2006-11-09 Nippon Synthetic Chem Ind Co Ltd:The Method of manufacturing polyvinylalcohol-based film and the polyvinylalcohol-based film
CN115254792A (en) * 2022-07-26 2022-11-01 江苏富乐华功率半导体研究院有限公司 Method for cleaning PET film belt for electronic ceramic slurry casting

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4908918B2 (en) * 2006-05-17 2012-04-04 株式会社神戸製鋼所 Water-repellent thin film and method for producing water-repellent thin film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006305924A (en) * 2005-04-28 2006-11-09 Nippon Synthetic Chem Ind Co Ltd:The Method of manufacturing polyvinylalcohol-based film and the polyvinylalcohol-based film
CN115254792A (en) * 2022-07-26 2022-11-01 江苏富乐华功率半导体研究院有限公司 Method for cleaning PET film belt for electronic ceramic slurry casting
CN115254792B (en) * 2022-07-26 2023-05-30 江苏富乐华功率半导体研究院有限公司 PET film belt cleaning method for electronic ceramic slurry tape casting

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