JPH09320849A - Laminated spiral inductor and its inductance-adjusting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable adjusting the inductance of the laminated spiral inductor. SOLUTION: This laminated spiral inductor 5 is provided with a lower dielectric layer 6, having a spiral pattern layer 7 on its upper surface and a lower ground layer 8 on its underside, an upper dielectric layer 9 laminated on the upper surface of the lower dielectric layer 6, and an upper ground layer 10, formed on the upper surface of the upper dielectric layer 9 and having an opening 11 in the corresponding region to the spiral pattern layer 7. By doing so, performing inductance adjustment can be easily made, by removing the upper ground layer 10 in the periphery of the opening 11, in accordance with the difference in the inductance value from a desired one.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated spiral inductor having a spiral conductor pattern sandwiched between dielectric layers.

[0002]

2. Description of the Related Art In recent years, there has been a strong demand for miniaturization and weight reduction of semiconductor devices and electronic parts used in mobile communication terminals such as analog or digital mobile phones and wireless phones. Among such electronic components, one of chip-type inductors used as an inductance element is a laminated spiral inductor.

The structure of this laminated spiral inductor is as follows.
For example, as shown in an exploded perspective view in FIG. 9, a spiral layer (spiral strip line) 2 is formed on a dielectric layer 1, and another dielectric layer 3 is stacked on the spiral layer 2 and the dielectric layer 1 is formed. A so-called one-side open / one-side short-circuit laminated structure in which the ground layer 4 is formed on the lower side is common.

[0004]

In the laminated spiral inductor having the above-mentioned structure, the ground layer is not formed on the outer side (upper surface) of the dielectric layer 3 above the spiral layer 2 and the magnetic field is not increased. Is configured to be completely open so that magnetic field coupling between the line patterns of the spiral layer 2 is not disturbed, so that the magnetic flux passing through the spiral layer 2 is not disturbed by the ground layer and the inductance increases. . However, due to the fine laminated structure, due to slight misalignment of each layer during lamination in manufacturing, the inductance in the actually manufactured laminated spiral inductor will be a value that is significantly different from the design specification value required. There was a problem that it would end up.

Further, in the case of the laminated spiral inductor whose inductance is different from the design specification value as described above, it is not possible to adjust the value by adjusting the inductance and improve the non-defective rate in manufacturing. There was also the problem that it was difficult.

The present invention has been completed as a result of intensive research conducted by the present inventor in view of the above circumstances, and its purpose is to:
An object of the present invention is to provide a laminated spiral inductor in which the inductance can be easily adjusted, and the inductance value can be easily optimized even when the inductance value is deviated due to a deviation during lamination in manufacturing.

Another object of the present invention is to easily adjust the inductance of a laminated spiral inductor, and to easily adjust the inductance value even if a deviation occurs due to a deviation at the time of lamination in manufacturing. An object of the present invention is to provide a method of adjusting the inductance of a laminated spiral inductor that can be used.

[0008]

A laminated spiral inductor according to claim 1 of the present invention comprises a lower dielectric layer having a spiral pattern layer formed on an upper surface thereof and a lower ground layer formed on a lower surface thereof, and a lower portion thereof. An upper dielectric layer laminated on an upper surface of the dielectric layer, and an upper ground layer formed on the upper surface of the upper dielectric layer and having an opening in a region corresponding to the spiral pattern layer. It is what

Further, a laminated spiral inductor according to a second aspect of the present invention is characterized in that, in the laminated spiral inductor according to the first aspect, an inductance adjusting electrode layer is arranged in an internal region of the opening. To do.

Further, an inductance adjusting method for a laminated spiral inductor according to the present invention is an inductance adjusting method for a laminated spiral inductor having each of the above-mentioned constitutions, wherein the inductance adjusting electrode layer or the opening is provided in an inner region of the opening. It is characterized in that a part of the upper ground layer located around the opening of the section is removed.

According to the laminated spiral inductor of the present invention, an opening is provided in the region of the upper ground layer corresponding to the spiral pattern layer so as to be in a magnetically open state, so that the spiral pattern layer passes through. A large inductance can be obtained without hindering the flow of the magnetic flux. Further, even when the inductance adjusting electrode layer is arranged in the inner region of the opening, a sufficient open portion can be secured, so that the flow of magnetic flux is not disturbed and a large inductance can be similarly obtained.

Further, by removing a part of the upper ground layer located around the opening of the opening or a part of the inductance adjusting electrode layer arranged in the inner region of the opening,
The amount of magnetic flux that passes through the spiral pattern layer can be adjusted by increasing the area of the opening or the area of the opening of the opening, so that the inductance can be easily adjusted and the inductance value It becomes easy to optimize the fluctuation.

Further, by providing a ground layer on each of the lower part and the upper part of the spiral pattern layer, noise from the current flowing through the circuit when mounted on the circuit board enters the spiral pattern layer. It becomes a laminated spiral inductor that can effectively prevent the winding and keep stable characteristics during use.

Furthermore, since the upper dielectric layer is laminated between the spiral pattern layer and the upper ground layer having the opening, the spiral pattern layer is exposed in the opening. In addition, dust or the like does not adhere to the spiral pattern layer to change the characteristics.

Further, according to the inductance adjusting method of the laminated spiral inductor of the present invention, in the laminated spiral inductor according to claim 1 or 2, a part of the upper ground layer located around the opening or a part of the upper ground layer is provided. By removing a part of the electrode layer for inductance adjustment arranged in the internal area of the opening according to the magnitude of the variation of the inductance value, the area of the opening or the area of the opening of the opening is expanded to form a spiral. The amount of magnetic flux passing through the striped pattern layer can be adjusted, and the inductance can be adjusted and the variation in the inductance value due to the deviation in the stacking can be easily adjusted. Then, it becomes possible to improve the non-defective rate in manufacturing.

As described above, according to the present invention, it is possible to provide a laminated spiral inductor having stable electric characteristics and capable of easily adjusting the inductance, and a method for adjusting the inductance thereof.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below with reference to the drawings. Note that the following is merely an example of the present invention, and the present invention is not limited thereto, and various modifications and improvements may be made without departing from the scope of the present invention.

FIG. 1 is a perspective view showing an example of an embodiment of a laminated spiral inductor of the present invention, FIG. 2 is an exploded perspective view thereof, and FIG. 3 is a sectional view taken along the line AA ′ of FIG. Figure 1
In the laminated spiral inductor 5 shown in FIG. 3, 6
Is a lower dielectric layer, 7 is a spiral pattern layer formed on the upper surface thereof, 8 is a lower ground layer formed on the lower surface of the lower dielectric layer 6, 9 is an upper dielectric layer, and 10 is an upper dielectric layer. It is an upper ground layer formed on the upper surface of the body layer. The spiral pattern layer 7 may have a circular shape or a geometrical shape other than the rectangular shape shown in the drawing, and the lower dielectric layer 6 and the upper dielectric layer 9 are each a single layer. Alternatively, a plurality of layers may be laminated.

Reference numeral 11 denotes an opening provided in the upper ground layer 10, which is formed in a region corresponding to the spiral pattern layer 7. Since the upper ground layer 10 is provided with the opening 11 corresponding to the spiral pattern layer 7 in this manner, the upper part of the spiral pattern layer 7 is magnetically opened, and thus the spiral pattern layer 7 is opened. Layer 7
A large inductance can be obtained because the flow of the magnetic flux passing through is not obstructed. Further, by removing a part of the upper ground layer 10 located around the opening of the opening 11, it is possible to adjust the inductance value by adjusting the flow of the magnetic flux passing through the spiral pattern layer 7. Become.

Next, FIG. 4 is a plan view of the laminated spiral inductor 5. The shape, position, size, etc. of the opening 11 can be set appropriately according to the shape of the spiral pattern layer 7. Good. For example, 1) the center of the opening 11 is formed substantially at the center of the spiral pattern layer 7, and 2) the center of the spiral pattern layer 7 and the center of the opening 11 are offset so that Formed so as to partially overlap with each other, a) make the area of the opening 11 large enough to cover the entire surface of the spiral pattern layer 7, and b) make the area of the opening 11 one of the spiral pattern layers 7. The size may be set so as to cover a part, i) one opening 11 is provided, ii) the opening 11 is divided into several areas, iii) a plurality of openings 11 is provided, and the like. , These 1) ・ 2) and a) ・
The combination of b) and i) / ii) / iii) may be appropriately combined.

By arranging the inductance adjusting electrode layer in the inner region of the opening 11, the inductance value can be adjusted more easily and precisely. Examples of such embodiments are shown in FIGS.
Is shown in a plan view.

FIG. 5 shows the opening 12 provided in the upper ground layer 10.
In this example, a plurality of island-shaped independent inductance adjusting electrode layers 13 (four in the figure) are provided in the inner region of the above.
The shape, number, position, size, etc. of such an island-shaped inductance adjusting electrode layer 13 are such that the shape and size of the spiral pattern layer do not interfere with the flow of magnetic flux passing through the spiral pattern layer. -It may be set appropriately according to the position and the like.

FIG. 6 shows the opening 14 provided in the upper ground layer 10.
An example in which a step-like inductance adjusting electrode layer 15 continuous with the upper ground layer 10 is provided in the inner region of the above. The figure shows an example in which the stepwise inductance adjusting electrode layers 15 are provided at the four corners of the opening portion 14.
It can also be considered that 14 is provided so that its periphery is stepped. The shape, number, position, size, etc. of the stepwise inductance adjusting electrode layer 15 are not particularly limited, and the spiral pattern layer is formed so as not to disturb the flow of the magnetic flux passing through the spiral pattern layer. It may be optimized according to the shape, size, position, etc.

FIG. 7 shows the opening 16 provided in the upper ground layer 10.
An example in which a mesh-shaped inductance adjusting electrode layer 17 that is continuous with the upper ground layer 10 is provided in the inner region of FIG. Although the drawing shows an example in which two mesh-shaped inductance adjusting electrode layers 17 are provided in each of the vertical and horizontal directions, this example can also be regarded as dividing the internal region of the opening 16 into a plurality of grids. It is a thing. This mesh-shaped inductance adjusting electrode layer 17 also has a shape, number, position, arrangement,
The size and the like may be appropriately set according to the shape, size, position, etc. of the spiral pattern layer so as not to impede the flow of magnetic flux passing through the spiral pattern layer.

FIG. 8 shows an opening 18 provided in the upper ground layer 10.
In this example, a plurality of independent rectangular ring-shaped (two in the figure) electrode layers 19 and 19 'for adjusting the inductance are provided in the inner region of FIG. The figure shows an example in which two large and small rectangular ring-shaped inductance-adjusting electrode layers 19 and 19 'are provided. In this example, the internal area of the opening 18 is divided into a plurality of rectangular ring shapes. It can also be seen as done. The inductance adjusting electrode layers 19 and 19 'may have a circular shape, a triangular shape, a hexagonal shape or other various shapes, and the number, position, arrangement, size, etc. of the magnetic flux flow through the spiral pattern layer. It may be appropriately set according to the shape, size, position, etc. of the spiral pattern layer so as not to hinder the above.

For each of the above examples, each of the inductance adjusting electrode layers 13, 15, 17 as shown in FIGS.
・ Part of 19 ・ 19 'or opening 11 in FIGS. 4 to 8
-By removing a part of the upper ground layer 10 around the openings of 12, 14, 16, and 18, the inductance value of the laminated spiral inductor can be adjusted easily and precisely. Such removal may be performed, for example, by a method such as laser trimming or mechanical removal using sandblast or a router, and the setting of the removed portion and its area has a correlation between the removed portion and the amount of change in inductance. You can set by.

For the lower dielectric layer 6 and the upper dielectric layer 9, for example, barium titanate ceramics or alumina oxide ceramics are used. The size and thickness of these dielectric layers 6 and 9 are determined by the required inductance size and Q value.

The spiral pattern layer 7 may have a rectangular shape, a circular shape, or other geometrical shapes as described above, and its shape, position, size, thickness, pattern width,
The pattern interval and the like are determined by the required inductance.

Lower ground layer 8 and upper ground layer 10
Is made of copper or silver, and its area is equal to or larger than the spiral region of the spiral pattern layer 7. Also, the openings 11, 12, 14, 16
The 18 may be provided in various shapes, sizes and positions as described above.

In addition, the inductance adjusting electrode layers 13 and 15
・ 17 ・ 19 ・ 19 'is the upper ground layer with various shapes, numbers, positions, arrangements, sizes, and thicknesses as described above.
The same material as 10 may be used.

Then, the spiral pattern layer 7, the lower ground layer 8 and the upper ground layer 9 and the openings described above.
11/12/14/16/18, Inductance adjustment electrode layer 13 /
15.17.19.19 'is formed by printing a paste of silver or copper on a ceramic green sheet to be the lower dielectric layer 6 or the upper dielectric layer 9, and each layer of these ceramic green sheets is formed. A desired laminated spiral inductor is obtained by laminating by thermocompression bonding or by adhering and laminating with a contact liquid and firing the laminated body.

Further, the laminated spiral inductor of the present invention may have a dielectric layer further laminated outside the lower ground layer 6 or the upper ground layer 10 in addition to the above-mentioned structure. With such a configuration,
This enables self-alignment during mounting.

Further, it goes without saying that the laminated spiral inductor of the present invention can be used as a single laminated spiral inductor, but a filter having an inductance by using the laminated spiral inductor of the present invention or the structure thereof in the inductance portion of the filter, For example, it can be applied to a band elimination filter, or can be applied to an inductance part in a matching circuit between circuits by using the laminated spiral inductor of the present invention or its structure in the inductance part in the matching circuit.

[0034]

As described above, according to the laminated spiral inductor of the present invention, the opening is provided in the region of the upper ground layer corresponding to the spiral pattern layer to make it magnetically open, A large inductance can be obtained without blocking the flow of magnetic flux passing through the spiral pattern layer, and the inductance can be adjusted easily by removing a part of the upper ground layer located around the opening. Can be done to
It has been possible to provide a laminated spiral inductor that can easily optimize the variation of the inductance value due to the deviation during lamination.

In the laminated spiral inductor according to the second aspect of the present invention, the inductance adjusting electrode layer is arranged in the internal region of the opening provided in the region of the upper ground layer corresponding to the spiral pattern layer. Therefore, the inductance can be easily adjusted by removing a part of the upper ground layer located around the opening or a part of the inductance adjusting electrode layer arranged in the inner area of the opening. Thus, it is possible to provide a laminated spiral inductor that can more easily optimize the variation of the inductance value due to the deviation during lamination.

Further, since the ground layers are provided on the lower and upper portions of the spiral pattern layer respectively, noise from the current flowing through the circuit intrudes into the spiral pattern layer when mounted on a circuit board. The upper dielectric layer is laminated between the spiral pattern layer and the upper ground layer having the opening so that dust or the like is not generated on the spiral pattern layer. It was possible to provide a laminated spiral inductor capable of maintaining stable characteristics during use without being attached and changing in characteristics.

Further, according to the inductance adjusting method of the laminated spiral inductor of the present invention, in the laminated spiral inductor according to claim 1 or 2, a part of the upper ground layer located around the opening or a part of the upper ground layer is provided. By removing a part of the electrode layer for inductance adjustment arranged in the internal area of the opening according to the magnitude of the variation of the inductance value, the area of the opening or the area of the opening of the opening is expanded to form a spiral. It was possible to provide an inductance adjusting method capable of adjusting the amount of magnetic flux passing through a striped pattern layer and easily adjusting the inductance and optimizing the variation of the inductance value due to the deviation at the time of stacking.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of an embodiment of a laminated spiral inductor of the present invention.

FIG. 2 is an exploded perspective view showing an example of an embodiment of a laminated spiral inductor of the present invention.

3 is a cross-sectional view taken along the line A-A ′ of FIG.

FIG. 4 is a plan view showing an example of an embodiment of the laminated spiral inductor of the present invention.

FIG. 5 is a plan view showing another example of the embodiment of the laminated spiral inductor of the present invention.

FIG. 6 is a plan view showing another example of the embodiment of the laminated spiral inductor of the present invention.

FIG. 7 is a plan view showing another example of the embodiment of the laminated spiral inductor of the present invention.

FIG. 8 is a plan view showing another example of the embodiment of the laminated spiral inductor of the present invention.

FIG. 9 is an exploded perspective view showing a conventional laminated spiral inductor.

[Explanation of symbols]

5: Multilayer spiral inductor 6: Lower dielectric layer 7: Spiral pattern Layer 8: lower ground layer 9: upper dielectric layer 10: upper ground layer 11, 12, 14, 16, 18, ... Openings 13, 15, 17, 19, 19 '... Inductance adjusting electrode layer

Claims (3)

[Claims] 1. A lower dielectric layer having a spiral pattern layer formed on an upper surface thereof and a lower ground layer formed on a lower surface thereof, an upper dielectric layer laminated on an upper surface of the lower dielectric layer, and an upper dielectric layer. A multilayer spiral inductor, comprising: an upper ground layer formed on the upper surface of a body layer and having an opening in a region corresponding to the spiral pattern layer. 2. An inductance adjusting electrode layer is arranged in an inner region of the opening.
The described laminated spiral inductor. 3. A method for adjusting the inductance of a laminated spiral inductor according to claim 1 or 2, wherein
A method for adjusting the inductance of a laminated spiral inductor, comprising: removing a part of an inductance adjusting electrode layer arranged in an inner region of the opening or an upper ground layer located around the opening of the opening.