JPH09309954A - Method for purifying polysilane compound - Google Patents
Method for purifying polysilane compoundInfo
- Publication number
- JPH09309954A JPH09309954A JP14866296A JP14866296A JPH09309954A JP H09309954 A JPH09309954 A JP H09309954A JP 14866296 A JP14866296 A JP 14866296A JP 14866296 A JP14866296 A JP 14866296A JP H09309954 A JPH09309954 A JP H09309954A
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- group
- polysilanes
- polysilane
- solvent
- org
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、ポリシラン類中に
存在する有機溶剤不溶性成分を短時間で簡単かつ満足に
除去してポリシラン類を効率良く精製することができる
ポリシラン類の精製方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for purifying polysilanes capable of efficiently purifying polysilanes by easily and satisfactorily removing organic solvent-insoluble components present in polysilanes in a short time.
【0002】[0002]
【従来の技術及び発明が解決しようとする課題】ポリシ
ラン類の最も一般的な合成法であるアルカリ金属等と多
価ハロシランとの反応により得られるポリシラン類は、
不純物として有機溶剤不溶成分を含む場合があり、更
に、長期間の保存中にも不溶化物が生成してくる場合が
ある。The polysilanes obtained by reacting a polyvalent halosilane with an alkali metal, which is the most general synthetic method of polysilanes, are
An organic solvent insoluble component may be contained as an impurity, and an insoluble product may be formed even during long-term storage.
【0003】従来、上記不溶成分を除去する方法として
は、ポリシラン溶液をメンブランフィルター等を用いて
濾過する方法が採用されていたが、この方法では、不溶
成分が反応溶剤で膨潤して目詰まりを起こすため、除去
が非常に困難であった。なおこの方法では、濾過助剤等
を併用すると除去効率が多少改善されるが、この場合も
依然として非常に長い濾過時間を必要とするため実用的
でないものであった。Hitherto, as a method of removing the insoluble component, a method of filtering a polysilane solution using a membrane filter or the like has been adopted, but in this method, the insoluble component is swollen by the reaction solvent to cause clogging. It was very difficult to remove as it happened. It should be noted that in this method, the removal efficiency is improved to some extent when a filter aid or the like is used in combination, but even in this case, a very long filtration time is still required, which is not practical.
【0004】また、室温下で濾紙と濾過助剤等とを併用
する方法も考えられるが、この方法を採用しても除去で
きない微細化した不溶物が含まれ、実際、この場合に得
られる微濁した溶液には濾紙を通過するものの、0.2
μmのメンブランフィルターを通過しない不溶物が含ま
れてしまう。このような微濁の溶液から作成されたポリ
シラン類の膜は、透明度が低く、表面平滑度に劣るなど
いくつかの問題点を有するものであった。A method of using a filter paper and a filter aid together at room temperature is also conceivable. However, even if this method is adopted, finely divided insoluble matter that cannot be removed is contained, and in fact, the fine particles obtained in this case are included. The cloudy solution passes through the filter paper, but 0.2
Insoluble matter that does not pass through the μm membrane filter will be included. A polysilane film formed from such a slightly turbid solution has some problems such as low transparency and poor surface smoothness.
【0005】従って、上記問題点がなく、より効率良い
ポリシラン類の精製方法の開発が望まれる。Therefore, it is desired to develop a more efficient method for purifying polysilanes without the above problems.
【0006】本発明は、上記事情に鑑みなされたもの
で、合成後のポリシラン類中、あるいは長期保存後のポ
リシラン類中に存在する有機溶剤不溶成分を有効に除去
し得てポリシラン類を効率良く精製することができるポ
リシラン類の精製方法を提供することを目的とする。The present invention has been made in view of the above circumstances, and it is possible to effectively remove the organic solvent-insoluble components present in the polysilanes after synthesis or in the polysilanes after long-term storage, and efficiently polysilanes are obtained. An object is to provide a method for purifying polysilanes that can be purified.
【0007】[0007]
【課題を解決するための手段及び発明の実施の形態】本
発明者は上記目的を達成するため鋭意検討を重ねた結
果、ポリシラン類を有機溶剤に溶解し、珪藻土及び必要
に応じて活性炭を添加して加熱処理を施した後、濾過を
行うことにより、合成後のポリシラン類中、あるいは長
期保存後のポリシラン類中に存在する有機溶剤不溶成
分、特に0.2μmのメンブランフィルターを通過しな
いような微細化した不溶成分までも短時間で簡単かつ満
足に除去可能であり、ポリシラン類を効率良く精製する
ことができること、それ故、本発明の精製方法により得
られるポリシラン類は、有機溶剤に対する不溶成分を含
まない優れた品質を有するため、透明度の高い膜を作成
することが可能であり、表面平滑性に優れた膜を与える
ものであることを知見し、本発明をなすに至った。Means for Solving the Problems and Modes for Carrying Out the Invention As a result of extensive studies conducted by the present inventor to achieve the above object, polysilanes were dissolved in an organic solvent, and diatomaceous earth and, if necessary, activated carbon were added. By applying a heat treatment to the polysilane and then filtering, the organic solvent insoluble component present in the polysilanes after synthesis or in the polysilanes after long-term storage, in particular, does not pass through a 0.2 μm membrane filter. Even finely divided insoluble components can be easily and satisfactorily removed in a short time, and polysilanes can be efficiently purified. Therefore, polysilanes obtained by the purification method of the present invention are insoluble components for organic solvents. It has been found that it is possible to form a highly transparent film because it has an excellent quality that does not contain, and it gives a film with excellent surface smoothness. , The present invention has been accomplished.
【0008】従って、本発明は、ポリシラン類を有機溶
剤に溶解し、珪藻土及び必要に応じて活性炭を添加して
加熱処理を施した後、濾過を行うことを特徴とするポリ
シラン類の精製方法を提供する。Therefore, the present invention provides a method for purifying polysilanes, which comprises dissolving polysilanes in an organic solvent, adding diatomaceous earth and, if necessary, activated carbon, performing heat treatment, and then filtering. provide.
【0009】以下、本発明につき更に詳細に説明する
と、本発明のポリシラン類の精製方法は、ポリシラン類
を有機溶剤に溶解し、珪藻土及び必要に応じて活性炭を
添加して加熱処理を施した後、濾過を行うことを特徴と
するものである。The present invention will be described in more detail below. In the method for purifying polysilanes of the present invention, the polysilanes are dissolved in an organic solvent, and diatomaceous earth and, if necessary, activated carbon are added, followed by heat treatment. It is characterized by performing filtration.
【0010】ここで、ポリシラン類としては、ポリシラ
ン類の最も一般的な合成法であるアルカリ金属等と多価
ハロシランとの反応により得られるものなどが使用され
るが、特に下記一般式(1)で示されるポリシラン類が
好適に使用される。As the polysilanes, those obtained by the reaction of polyvalent halosilane with an alkali metal or the like, which is the most general synthetic method of polysilanes, are used. In particular, the following general formula (1) is used. Polysilanes represented by are preferably used.
【0011】 〔(RaR’bSi)n(R’’cR’’’dSi)m〕 (1) (但し、式中R、R’はそれぞれ置換又は非置換のアル
キル基又はアリール基、R’’、R’’’はそれぞれ水
素原子、ハロゲン原子、置換もしくは非置換のアルコキ
シ基、アミノ基、アルキルアミノ基、アルキル基又はア
リール基であり、aは1又は2、bは0又は1、a+b
=1又は2、cは0、1又は2、dは0又は1、c+d
=0、1又は2、n≧0、m≧0、n+m>20であ
る。)[(R a R ′ b Si) n (R ″ c R ′ ″ d Si) m ] (1) (wherein R and R ′ are each a substituted or unsubstituted alkyl group or aryl The groups R ″ and R ″ ′ are each a hydrogen atom, a halogen atom, a substituted or unsubstituted alkoxy group, an amino group, an alkylamino group, an alkyl group or an aryl group, and a is 1 or 2 and b is 0. Or 1, a + b
= 1 or 2, c is 0, 1 or 2, d is 0 or 1, c + d
= 0, 1 or 2, n ≧ 0, m ≧ 0, n + m> 20. )
【0012】上記式(1)において、R、R’はそれぞ
れ置換又は非置換のアルキル基又はアリール基、好まし
くは炭素数1〜10のものであり、例えばメチル基、エ
チル基、ブチル基、プロピル基、ヘキシル基、ヘプチル
基、オクチル基、フェニル基、トリル基、フェニルエチ
ル基等が挙げられる。In the above formula (1), R and R'each represent a substituted or unsubstituted alkyl group or aryl group, preferably one having 1 to 10 carbon atoms, such as methyl group, ethyl group, butyl group, propyl group. Group, hexyl group, heptyl group, octyl group, phenyl group, tolyl group, phenylethyl group and the like.
【0013】R’’、R’’’はそれぞれ水素原子、ハ
ロゲン原子、置換もしくは非置換のアルコキシ基、アミ
ノ基、アルキルアミノ基、アルキル基又はアリール基
で、好ましくは炭素数1〜10のものであり、例えば水
素原子、塩素原子、臭素原子、フッ素原子、メトキシ
基、エトキシ基、イソプロポキシ基、プロポキシ基、ブ
トキシ基、ジメチルアミノ基、ジエチルアミノ基、上記
したR、R’と同様のアルキル基、アリール基等が挙げ
られる。R ″ and R ′ ″ are each a hydrogen atom, a halogen atom, a substituted or unsubstituted alkoxy group, an amino group, an alkylamino group, an alkyl group or an aryl group, preferably having 1 to 10 carbon atoms. And, for example, a hydrogen atom, a chlorine atom, a bromine atom, a fluorine atom, a methoxy group, an ethoxy group, an isopropoxy group, a propoxy group, a butoxy group, a dimethylamino group, a diethylamino group, an alkyl group similar to R and R ′ described above. , Aryl groups and the like.
【0014】aは1又は2、bは0又は1、a+b=1
又は2、cは0、1又は2、dは0又は1、c+d=
0、1又は2、n≧0、m≧0、n+m>20である。A is 1 or 2, b is 0 or 1, and a + b = 1
Or 2, c is 0, 1 or 2, d is 0 or 1, c + d =
0, 1 or 2, n ≧ 0, m ≧ 0, and n + m> 20.
【0015】上記ポリシラン類を溶解する有機溶剤とし
ては、脂肪族炭化水素、芳香族炭化水素、エーテル類が
好適に用いられ、具体的にはトルエン、キシレン、テト
ラヒドロフラン等が挙げられる。なお、有機溶剤の使用
量は、ポリシラン溶液中のポリシラン類の濃度が1〜3
0重量%となる範囲が好適である。Aliphatic hydrocarbons, aromatic hydrocarbons and ethers are preferably used as the organic solvent for dissolving the polysilanes, and specific examples thereof include toluene, xylene and tetrahydrofuran. The amount of the organic solvent used is such that the polysilane concentration in the polysilane solution is 1 to 3
The range of 0% by weight is preferable.
【0016】次に、珪藻土としては、種々のものを使用
することができ、例えばセライト類〔ジョーンズ−マン
ビル スケールス社(Johns−Manville
Sales Corp.社)製のFilter−Ce
l,Celite 505,Standard Sup
er−Cel,Celite 512,Hyflo S
uper−Cel,Celite 501,Celit
e 503,Celite 535,Celite 5
45,Celite 560等〕、ダイカライト類〔グ
レフコ インコ ユーエスエー社(Grefco,In
co,U.S.A.社)製のSuperaid,UF,
Speedflow,Special Speedfl
ow,Speedplus,Speedex等)、ラジ
オライト類(昭和化学工業社製のRADIOLITE#
100,RADIOLITE#200,RADIOLI
TE#500,RADIOLITE#600,RADI
OLITE#700,RADIOLITE#900,R
ADIOLITE#1100,RADIOLITE#1
00)などが好適に使用できる。その平均粒径は、5〜
20μm程度である。Various kinds of diatomaceous earth can be used. For example, celites [Johns-Manville Scales (Johns-Manville) can be used.
Sales Corp. Company) Filter-Ce
l, Celite 505, Standard Sup
er-Cel, Celite 512, Hyflo S
upper-Cel, Celite 501, Celit
e 503, Celite 535, Celite 5
45, Celite 560, etc.], Dicalites [Grefco, In
co, U. S. A. Company, Superaid, UF,
Speedflow, Special Speedfl
ow, Speedplus, Speedex, etc.), radio lights (RADIOLITE # manufactured by Showa Chemical Industry Co., Ltd.)
100, Radiolite # 200, Radioli
TE # 500, RADIOLITE # 600, RADI
OLITE # 700, RADIOLITE # 900, R
ADIOLITE # 1100, RADIOLITE # 1
00) and the like can be preferably used. The average particle size is 5
It is about 20 μm.
【0017】上記珪藻土の添加量は、ポリシラン溶液1
00部(重量部、以下同様)に対して1〜30部、特に
5〜10部が好ましく、添加量が1部に満たないと目的
とする効果が得られない場合があり、30部超えると回
収率の低下を招く場合がある。The addition amount of the above diatomaceous earth is the polysilane solution 1
1 to 30 parts, especially 5 to 10 parts are preferable with respect to 00 parts (parts by weight, the same applies below), and if the addition amount is less than 1 part, the desired effect may not be obtained, and if it exceeds 30 parts. The recovery rate may be reduced.
【0018】活性炭の添加は必須ではないが、活性炭を
添加する場合、活性炭の添加量はポリシラン溶液100
部に対して1〜10部、特に2〜5部が好ましい。The addition of activated carbon is not essential, but when activated carbon is added, the amount of activated carbon added is 100% by weight of the polysilane solution.
1 to 10 parts, especially 2 to 5 parts is preferable with respect to parts.
【0019】ポリシラン溶液に上記珪藻土を添加後の加
熱処理条件は、40〜150℃、特に60〜100℃で
0.5〜2時間、特に0.5〜1時間加熱しながら撹拌
することが好ましい。加熱処理温度が40℃より低い
と、微細不溶物の除去効率が低く、150℃より高いと
ポリシランの分解や酸化が起こる場合がある。The heat treatment condition after adding the diatomaceous earth to the polysilane solution is preferably 40 to 150 ° C., particularly 60 to 100 ° C., and 0.5 to 2 hours, especially 0.5 to 1 hour while stirring. . If the heat treatment temperature is lower than 40 ° C, the removal efficiency of fine insoluble matter is low, and if it is higher than 150 ° C, decomposition or oxidation of polysilane may occur.
【0020】加熱処理後は、室温に冷却後、濾紙等の濾
材で必要に応じて吸引或いは加圧して濾過し、溶媒を除
去することにより、精製したポリシラン類を得ることが
できる。この場合、濾材の目の粗さは1〜10μm、よ
り好ましくは3〜5μmとすることが好適である。After the heat treatment, after cooling to room temperature, a filter material such as a filter paper may be suctioned or pressurized to be filtered if necessary, and the solvent may be removed to obtain a purified polysilane. In this case, the roughness of the filter medium is preferably 1 to 10 μm, more preferably 3 to 5 μm.
【0021】[0021]
【発明の効果】本発明のポリシラン類の精製方法によれ
ば、合成後のポリシラン類中、あるいは長期保存後のポ
リシラン類中に存在する有機溶剤不溶成分、特に微細化
した不溶成分までも短時間で簡単かつ満足に除去するこ
とができ、透明度が高く表面平滑度に優れた膜を与える
高品質の精製ポリシラン類を工業的に有利に得ることが
できる。EFFECTS OF THE INVENTION According to the method for purifying polysilanes of the present invention, even organic solvent insoluble components, particularly finely divided insoluble components, present in the synthesized polysilanes or in the polysilanes after long-term storage are in a short time. Thus, it is possible to industrially advantageously obtain high-quality purified polysilanes that can be removed easily and satisfactorily, and that give a film having high transparency and excellent surface smoothness.
【0022】[0022]
【実施例】以下、実施例及び比較例を示して本発明を具
体的に説明するが、本発明は下記実施例に制限されるも
のではない。なお、各例においてMeはメチル基、Ph
はフェニル基であり、Mnは数平均分子量、Mwは重量
平均分子量を示すものである。EXAMPLES The present invention will be described in detail below with reference to examples and comparative examples, but the present invention is not limited to the following examples. In each example, Me is a methyl group, Ph
Is a phenyl group, Mn is a number average molecular weight, and Mw is a weight average molecular weight.
【0023】〔実施例1〕トルエン溶媒還流中、ナトリ
ウムとメチルフェニルジクロロシランを反応させること
により得られたポリシラン類の(MePhSi)n(M
n23,000、Mw97,000)10gをトルエン
190gに溶解した。このポリシラン溶液の外観は微青
白色であり、微細な不溶成分を含んでいた。Example 1 Polysilanes (MePhSi) n (M) obtained by reacting sodium with methylphenyldichlorosilane in a toluene solvent under reflux.
n23,000, Mw 97,000) 10 g was dissolved in 190 g toluene. The appearance of this polysilane solution was slightly bluish white and contained fine insoluble components.
【0024】次に、このポリシラン溶液にセライト(C
elite 545 Johns−Manville
Sales Corp.社製)を10g添加し、80℃
に加熱しながら30分間撹拌を行った。室温に冷却後、
濾紙(直径70mm、保留粒子径4μm)を用いた吸引
濾過により、瞬時に無色透明な(MePhSi)nのト
ルエン溶液が得られ、溶媒を除去したところ、9.5g
の(MePhSi)nが回収された。Next, Celite (C
elite 545 Johns-Manville
Sales Corp. (Made by the company) is added, and 80 degreeC
Stirring was carried out for 30 minutes while heating. After cooling to room temperature,
By suction filtration using a filter paper (diameter 70 mm, retained particle diameter 4 μm), a colorless and transparent (MePhSi) n toluene solution was obtained instantaneously, and when the solvent was removed, 9.5 g
Of (MePhSi) n were recovered.
【0025】〔実施例2〕実施例1と同様に合成され、
長期保存されていた(MePhSi)n(Mn19,0
00、Mw82,000)10gをトルエン190gに
溶解した。このポリシラン溶液の外観は多少黄色がかっ
た微青白色であり、微細な不溶成分を含んでいた。Example 2 was synthesized in the same manner as in Example 1,
(MePhSi) n (Mn 19,0
00, Mw 82,000) was dissolved in 190 g of toluene. The appearance of this polysilane solution was slightly yellowish, slightly blue-white, and contained fine insoluble components.
【0026】次に、このポリシラン溶液にセライト(C
elite 545)を10g添加し、80℃に加熱し
ながら60分間撹拌を行った。室温に冷却後、濾紙(直
径70mm、保留粒子径4μm)を用いた吸引濾過によ
り、数分後に無色透明な(MePhSi)nのトルエン
溶液が得られ、溶媒を除去したところ、8.7gの(M
ePhSi)nが回収された。Next, Celite (C
10 g of elite 545) was added, and the mixture was stirred for 60 minutes while heating at 80 ° C. After cooling to room temperature, a colorless and transparent (MePhSi) n toluene solution was obtained after a few minutes by suction filtration using a filter paper (diameter 70 mm, retained particle size 4 μm), and when the solvent was removed, 8.7 g of ( M
ePhSi) n was recovered.
【0027】〔実施例3〕実施例2に活性炭5gを添加
した以外は実施例2と同様な操作を行ったところ、数分
後に無色透明な(MePhSi)nのトルエン溶液が得
られ、更に、溶媒を除去したところ、8.5gの(Me
PhSi)nが回収された。[Example 3] The same operation as in Example 2 was carried out except that 5 g of activated carbon was added to Example 2, and after a few minutes, a colorless and transparent (MePhSi) n toluene solution was obtained. When the solvent was removed, 8.5 g of (Me
PhSi) n was recovered.
【0028】〔比較例1,2〕80℃での加熱処理を行
わない以外は実施例1,2と同様に行った。濾紙(直径
70mm、保留粒子径4μm)を用いた吸引濾過によ
り、それぞれ外観が微青白色の(MePhSi)nのト
ルエン溶液が得られた。[Comparative Examples 1 and 2] Comparative Examples 1 and 2 were carried out in the same manner as Examples 1 and 2 except that the heat treatment was not carried out at 80 ° C. By suction filtration using a filter paper (diameter 70 mm, retained particle diameter 4 μm), a toluene solution of (MePhSi) n having a pale bluish white appearance was obtained.
【0029】上記実施例、比較例で精製されたポリシラ
ン類について、下記方法で精製度を評価した。結果を表
1に示す。精製度評価方法 :上記実施例、比較例で得られたポリシ
ラン類の5%トルエン溶液100mlに対して、0.2
μmのメンブランフィルター(直径47mm)を用いた
加圧濾過試験を行い、濾過性を基準とした不溶成分の除
去の程度を比較した。The degree of purification of the polysilanes purified in the above Examples and Comparative Examples was evaluated by the following method. The results are shown in Table 1. Purification degree evaluation method : 0.2 with respect to 100 ml of a 5% toluene solution of the polysilanes obtained in the above Examples and Comparative Examples.
A pressure filtration test was carried out using a membrane filter (diameter 47 mm) of μm to compare the degree of removal of insoluble components based on the filterability.
【0030】表1の結果より、本発明方法によれば、ポ
リシラン類中に存在する不溶成分を効率良く除去できる
ことが確認された。From the results shown in Table 1, it was confirmed that according to the method of the present invention, insoluble components present in polysilanes can be efficiently removed.
【0031】[0031]
【表1】 [Table 1]
Claims (2)
土及び必要に応じて活性炭を添加して加熱処理を施した
後、濾過を行うことを特徴とするポリシラン類の精製方
法。1. A method for purifying polysilanes, which comprises dissolving polysilanes in an organic solvent, adding diatomaceous earth and, if necessary, activated carbon, performing heat treatment, and then filtering.
れるポリシラン類である請求項1記載の精製方法。 〔(RaR’bSi)n(R’’cR’’’dSi)m〕 (1) (但し、式中R、R’はそれぞれ置換又は非置換のアル
キル基又はアリール基、R’’、R’’’はそれぞれ水
素原子、ハロゲン原子、置換もしくは非置換のアルコキ
シ基、アミノ基、アルキルアミノ基、アルキル基又はア
リール基であり、aは1又は2、bは0又は1、a+b
=1又は2、cは0、1又は2、dは0又は1、c+d
=0、1又は2、n≧0、m≧0、n+m>20であ
る。)2. The purification method according to claim 1, wherein the polysilane is a polysilane represented by the following general formula (1). [(R a R ′ b Si) n (R ″ c R ′ ″ d Si) m ] (1) (wherein R and R ′ are each a substituted or unsubstituted alkyl group or aryl group, R '' And R '''are each a hydrogen atom, a halogen atom, a substituted or unsubstituted alkoxy group, an amino group, an alkylamino group, an alkyl group or an aryl group, a is 1 or 2, b is 0 or 1, a + b
= 1 or 2, c is 0, 1 or 2, d is 0 or 1, c + d
= 0, 1 or 2, n ≧ 0, m ≧ 0, n + m> 20. )
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1652872A1 (en) * | 2004-10-28 | 2006-05-03 | Wacker Chemie AG | Process for the production of branched or crosslinked organopolysilanes |
JP2007077197A (en) * | 2005-09-12 | 2007-03-29 | Osaka Gas Co Ltd | Method for purifying polysilane |
WO2009142161A1 (en) * | 2008-05-20 | 2009-11-26 | 日本曹達株式会社 | Process for production of polysilane compound |
JP2011162792A (en) * | 2011-04-18 | 2011-08-25 | Osaka Gas Co Ltd | Purifying method of polysilane |
JP2011208057A (en) * | 2010-03-30 | 2011-10-20 | Osaka Gas Co Ltd | Method for purifying polysilane |
JP2012518611A (en) * | 2009-02-23 | 2012-08-16 | ワッカー ケミー アクチエンゲゼルシャフト | Method for producing and stabilizing oligoaminosilane |
-
1996
- 1996-05-20 JP JP14866296A patent/JP3353609B2/en not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1652872A1 (en) * | 2004-10-28 | 2006-05-03 | Wacker Chemie AG | Process for the production of branched or crosslinked organopolysilanes |
US7153990B2 (en) | 2004-10-28 | 2006-12-26 | Wacker Chemie Ag | Process for preparing crosslinked and branched organopolysilanes |
JP2007077197A (en) * | 2005-09-12 | 2007-03-29 | Osaka Gas Co Ltd | Method for purifying polysilane |
WO2009142161A1 (en) * | 2008-05-20 | 2009-11-26 | 日本曹達株式会社 | Process for production of polysilane compound |
JP5286577B2 (en) * | 2008-05-20 | 2013-09-11 | 日本曹達株式会社 | Method for producing polysilane compound |
US8829139B2 (en) | 2008-05-20 | 2014-09-09 | Nippon Soda Co., Ltd. | Process for production of polysilane compound |
JP2012518611A (en) * | 2009-02-23 | 2012-08-16 | ワッカー ケミー アクチエンゲゼルシャフト | Method for producing and stabilizing oligoaminosilane |
JP2011208057A (en) * | 2010-03-30 | 2011-10-20 | Osaka Gas Co Ltd | Method for purifying polysilane |
JP2011162792A (en) * | 2011-04-18 | 2011-08-25 | Osaka Gas Co Ltd | Purifying method of polysilane |
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JP3353609B2 (en) | 2002-12-03 |
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