JPH09308297A - Positioning device of plane pulse motor - Google Patents

Positioning device of plane pulse motor

Info

Publication number
JPH09308297A
JPH09308297A JP14803396A JP14803396A JPH09308297A JP H09308297 A JPH09308297 A JP H09308297A JP 14803396 A JP14803396 A JP 14803396A JP 14803396 A JP14803396 A JP 14803396A JP H09308297 A JPH09308297 A JP H09308297A
Authority
JP
Japan
Prior art keywords
signal
pulse motor
positioning
positioning device
moving member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14803396A
Other languages
Japanese (ja)
Inventor
Yoshikazu Koba
佳和 木葉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP14803396A priority Critical patent/JPH09308297A/en
Publication of JPH09308297A publication Critical patent/JPH09308297A/en
Pending legal-status Critical Current

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  • Control Of Position Or Direction (AREA)
  • Control Of Stepping Motors (AREA)

Abstract

PROBLEM TO BE SOLVED: To quickly shift to the next work so as to enhance availability factor by equipping this positioning device with two acceleration sensors in each axial direction mounted in a moving member, and a signal generator which transmits to a host controller the signal that the positioning is completed. SOLUTION: This is a biaxial positioning device which supplies a plane pulse motor consisting of a moving member 1 a and stator 2 with a current and positions the moving member 1 within a plane. Acceleration sensors 31 and 32 fixed to the moving member 1 detect the acceleration in X axis and Y axis, respectively. When this oscillatory acceleration is detected, a computing element operates the amplitude of the oscillation of the moving member 1, and a comparator compares the signal of the computing element with a tolerable amplitude set value. A signal generator transmits a host controller the signal that the positioning is completed, on receiving the signal from comparator. Hereby, the host controller can shift quickly to the next work, and the availability factor of a plane pulse motor can be improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は,自動製図機やIC
の組み付け装置などに使用されている平面パルスモータ
の位置決め装置に関するものである。
[0001] The present invention relates to an automatic drafting machine and an IC.
The present invention relates to a positioning device for a flat pulse motor used in the assembling device and the like.

【0002】[0002]

【従来の技術】パルスモ−タは固定子にパルス状の電流
を流すと、指令のステップに応じて回転子をステップ状
に回すことができるため、オープンループで位置決め制
御することができる。また、回転子の回転位置を検出し
てフィードバック制御をすれば脱調することなく精密な
回転位置制御ができることも広く公知である。これらは
リニヤパルスモ−タや平面パルスモ−タにもあてはまる
ことである。オープンループ制御すると構造がシンプル
となるため広く使われているが、外乱によって脱調する
と正しい位置制御をすることができなくなるだけでな
く、復帰させる手間を要するという欠点を有している。
位置を検出してフィードバック制御するとそのような問
題は無くなるが、2つの変位センサを設けることが必要
であり、その1つの実施例が特開平5−38123に開
示されている。この方法によると2つの変位センサの占
有空間が大きくなるため、特開平5−153764や特
開平5−268792のように磁気センサや微小変位セ
ンサを用いて他の物理量を検出し、演算して変位に換算
する方法も開発されている。
2. Description of the Related Art In a pulse motor, when a pulsed current is passed through a stator, the rotor can be rotated stepwise in response to a command step, so that positioning control can be performed in an open loop. Further, it is widely known that precise rotation position control can be performed without step out by detecting the rotation position of the rotor and performing feedback control. These are also applicable to linear pulse motors and plane pulse motors. The open-loop control is widely used because it has a simple structure, but it has the drawback that if the step-out is caused by a disturbance, it will not be possible to perform the correct position control, and it will take time and effort to restore it.
If the position is detected and the feedback control is performed, such a problem disappears, but it is necessary to provide two displacement sensors, and one example thereof is disclosed in Japanese Patent Laid-Open Publication No. 5-38123. According to this method, since the space occupied by the two displacement sensors becomes large, other magnetic quantities are detected by using a magnetic sensor or a minute displacement sensor as in Japanese Patent Laid-Open No. 5-153768 and Japanese Patent Laid-Open No. 5-268792, and the calculated displacement is calculated. The method of converting into is also developed.

【0003】[0003]

【発明が解決しようとする課題】ところが、従来の方法
にはそれぞれ次のような問題点があった。オープンルー
プ制御すると、外乱によっては脱調してしまうという大
きな欠点を持つほか、ステップ毎の位置決めにダンピン
グがきかずゆるやかな減衰振動が生じるので、どの時点
で位置決めが完了したのか判断することが出来なかっ
た。このため、必要以上に長い時間をかけて位置決めが
完了したと判断して次のワークに移行していたため、装
置全体の稼働率を高くすることができないという欠点が
あった。位置検出をする特開平5−38123に開示さ
れた方法は、長い変位センサを2個、直交方向に設ける
ため、センサの占有空間が大きくなるほか、構造が複雑
で、高い加工精度が必要となり、工数が多くなって、機
械共振も生じやすいなどの不具合点を持っている。ま
た、特開平5−153764や特開平5−268792
に開示された方法では、検出信号から変位を換算してお
り、演算器と予め収集しておくデータが必要である。こ
のため、工数がかかるだけでなく、精度の高い変位信号
を得難いという欠点があった。本発明はこれらの課題に
鑑みてなされたものであり、オープンループ制御で位置
決めする平面パルスモータの位置決め装置において、位
置決めが完了したことを検出して速やかに次のワークに
移行できるようにし、稼働率を向上しようとするもので
ある。
However, each of the conventional methods has the following problems. Open loop control has the major drawback of stepping out depending on the disturbance, and because damping is not effective in positioning at each step and gentle damping vibration occurs, it is not possible to determine at what point the positioning is completed. It was For this reason, since it has been determined that the positioning has been completed over an unnecessarily long time and the process is moved to the next work, there is a drawback that the operating rate of the entire apparatus cannot be increased. The method disclosed in Japanese Patent Laid-Open No. 5-38123 for position detection has two long displacement sensors provided in the orthogonal direction, so that the space occupied by the sensors becomes large, the structure is complicated, and high processing accuracy is required. There is a problem that the number of man-hours increases and mechanical resonance easily occurs. In addition, Japanese Patent Laid-Open Nos. 5-153764 and 5-268792
In the method disclosed in (1), the displacement is converted from the detection signal, and the data collected in advance with the arithmetic unit is required. For this reason, there is a drawback that not only the number of steps is required, but also it is difficult to obtain a highly accurate displacement signal. The present invention has been made in view of these problems, and in a planar pulse motor positioning device for positioning by open loop control, it is possible to detect the completion of positioning and quickly move to the next work, It is intended to improve the rate.

【0004】[0004]

【課題を解決するための手段】この問題を解決するた
め,移動子と固定子からなる平面パルスモータに電流を
供給し、移動子を平面内で位置決め制御する2軸位置決
め装置において、移動子に設けた各軸方向の2つの加速
度センサと、該2つの加速度センサの信号を受けて移動
子の振動の振幅を演算する演算器と、該演算器の信号を
許容振幅設定値と比較する比較器と、該比較器の信号を
受けて上位コントローラへ位置決めが完了したことを伝
える信号を送る信号発生器とを備えるようにしたのであ
る。
In order to solve this problem, in a two-axis positioning device that supplies a current to a plane pulse motor composed of a mover and a stator to control the positioning of the mover in a plane, Two acceleration sensors provided in each axial direction, a calculator that receives the signals of the two acceleration sensors and calculates the amplitude of the vibration of the mover, and a comparator that compares the signal of the calculator with the allowable amplitude set value. And a signal generator that receives a signal from the comparator and sends a signal to the upper controller that the positioning has been completed.

【0005】[0005]

【発明の実施の形態】本発明の実施の形態を図に基づい
て説明する。図1は本発明を適用した平面パルスモータ
の平面図、図2は本発明の位置決め装置の信号の流れを
示すブロック図である。図1において、1は固定子2と
一定のエアギャップを介してX軸方向とY軸方向に移動
可能な移動子であり、図示しない支持機構により支持さ
れている。31、32は移動子1に固定された加速度セ
ンサであり、それぞれX軸、Y軸の加速度を検出する。
固定子2の表面にはマトリクス状に多数の突極が設けら
れている。移動子1は歯を有する継鉄に励磁コイルを巻
回した電機子1対を備えており、エアギャップを介して
固定子2に対面している。移動子の励磁コイルは駆動装
置9に接続されており、該駆動装置9が電流を供給する
と移動子1は電流に応じて平面内移動する。このよう
に、平面パルスモータの励磁コイルは回転形のパルスモ
ータとは違って移動子1に巻回されている。図2におい
て、5は加速度センサ31、32の信号ax ,ay を受
けて振動振幅に対応する信号lx ,ly を演算する演算
器、6は演算器5の信号lx ,lyを受けて予め設定さ
れた許容振幅設定値と比較する比較器、7は比較器6の
信号を受けて上位コントローラ8に信号を送る信号発生
器である。そして、演算器5と、比較器6、信号発生器
7とで位置決め装置4を成している。上位コントローラ
8が平面パルスモータの駆動装置9に指令を与えると、
移動子1に電流が供給されて、移動子1が平面内を移動
する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described with reference to the drawings. 1 is a plan view of a planar pulse motor to which the present invention is applied, and FIG. 2 is a block diagram showing a signal flow of a positioning device of the present invention. In FIG. 1, reference numeral 1 denotes a moving element that can move in the X-axis direction and the Y-axis direction via a fixed air gap with the stator 2, and is supported by a support mechanism (not shown). Reference numerals 31 and 32 denote acceleration sensors fixed to the mover 1, and detect accelerations on the X axis and the Y axis, respectively.
A large number of salient poles are provided in a matrix on the surface of the stator 2. The mover 1 includes a pair of armatures in which an exciting coil is wound around a yoke having teeth, and faces the stator 2 via an air gap. The exciting coil of the mover is connected to the drive unit 9. When the drive unit 9 supplies a current, the mover 1 moves in a plane according to the current. As described above, the exciting coil of the plane pulse motor is wound around the moving element 1 unlike the rotary pulse motor. 2, 5 is the signal a x of the acceleration sensors 31 and 32, signal l x, calculator for calculating a l y corresponding to the vibration amplitude undergoing a y, 6 signals l x of the arithmetic unit 5, l y The comparator 7 receives the signal from the comparator 6 and compares it with a preset allowable amplitude setting value. The signal generator 7 sends a signal to the host controller 8 to receive the signal. The computing unit 5, the comparator 6, and the signal generator 7 form the positioning device 4. When the host controller 8 gives a command to the driving device 9 of the plane pulse motor,
Electric current is supplied to the moving element 1 and the moving element 1 moves in the plane.

【0006】ここで、演算器5の演算内容などについて
説明する。今、移動子1の加速度をa(m/s2 )と
し、進み角をφ(deg)とすると、一般に、パルスモ
ータに関する次の式が成り立つ。 M・a=(Kt ・I)×Sinφ±F(x) (1) ここで、Mは移動子1の自重と負荷重量の和(kg)、
(Kt ・I)はモータの推力定数と固定子電流で決まる
値(N)、F(x)は移動子の摩擦力(N)であろ。こ
こで、さらに、平面パルスモータのピッチをtp (m)
とおくと、移動子1の振動振幅lは次のように求められ
る。 l=(φ/360)×tp =(tp /360)×Sin-1((M・a±F(x))/(Kt ・l)) (2) この式を図1のX軸方向とY軸方向に対応させると次の
式が得られる。 lx =(tp /360)× Sin-1(M・ax ±F(x))/(Kt ・l)) ly =(tp /360)× Sin-1(M・ay ±F(x))/(Kt ・l)) (3) 移動子1の加速度ax ,ay は、加速度センサ31、3
2の信号ax ,ay に対応している。演算器6は(3)
式の演算をするよう構成されており、加速度信号ax
y をうけて演算し、振動振幅に対応する信号lx ,l
y を出力する。
[0006] Here, the calculation contents of the calculator 5 will be described. Now, assuming that the acceleration of the moving element 1 is a (m / s 2 ) and the lead angle is φ (deg), the following equation relating to the pulse motor is generally established. M · a = (K t · I) × Sin φ ± F (x) (1) where M is the sum of the own weight of the moving element 1 and the load weight (kg),
( Kt · I) is a value (N) determined by the thrust constant of the motor and the stator current, and F (x) is the frictional force (N) of the mover. Here, further, the pitch of the plane pulse motor is set to t p (m)
In other words, the vibration amplitude l of the moving element 1 is obtained as follows. l = (φ / 360) × t p = (t p / 360) × Sin −1 ((M · a ± F (x)) / (K t · l)) (2) This formula is represented by X in FIG. When the axial direction and the Y-axis direction are made to correspond to each other, the following equation is obtained. l x = (t p / 360) × Sin −1 (M · a x ± F (x)) / (K t · l)) l y = (t p / 360) × Sin −1 (M · a y ± F (x)) / (K t · l)) (3) The accelerations a x and a y of the moving element 1 are measured by the acceleration sensors 31 and 3, respectively.
It corresponds to two signals a x and a y . The computing unit 6 is (3)
The acceleration signal a x ,
The signal a x , l corresponding to the vibration amplitude is calculated by receiving a y.
Output y .

【0007】以上の構成において、上位コントローラ8
が移動・停止指令を与えると、平面パルスモータの駆動
装置9が電流を供給して移動子1を所定の位置に移動
し、停止させる。この時、固定子2と移動子1の突極間
の磁気吸引力による保持力で移動子1がゆるやかな減衰
振動を伴って保持される。この振動加速度が2つの加速
度センサ31、32で検出されると、信号ax ,ay
得られ、(3)式の演算を行う演算器5によって振動振
幅に対応する信号lx ,ly に変換される。この信号l
x ,ly はゆるやかに減衰振動する信号であるので、次
第に振幅が小さくなっていき、それぞれが予め設定した
許容振幅設定値lm より小さくなると比較器7が出力信
号をHiにする。そして、この信号を受けた信号発生器
7が上位コントローラ8の入力インターフェースに適合
した信号を生成し、移動子1の位置決めが完了したこと
を伝える。これ以降、この信号を受けた上位コントロー
ラは次のワークに移行することができる。
In the above configuration, the host controller 8
Gives a movement / stop command, the driving device 9 of the plane pulse motor supplies a current to move the mover 1 to a predetermined position and stop it. At this time, the moving element 1 is held with a gentle damping vibration by the holding force of the magnetic attraction between the stator 2 and the salient poles of the moving element 1. When this vibration acceleration is detected by the two acceleration sensors 31 and 32, the signals a x and a y are obtained, and the signal l x and l y corresponding to the vibration amplitude is obtained by the calculator 5 that performs the calculation of equation (3). Is converted to. This signal l
x, because l y is a signal that gradually damped vibration gradually amplitude gradually decreases, each comparator 7 and is smaller than the allowable amplitude setting value l m previously set the output signal to Hi. Then, the signal generator 7 receiving this signal generates a signal adapted to the input interface of the host controller 8, and notifies that the positioning of the mover 1 has been completed. After this, the host controller receiving this signal can shift to the next work.

【0008】[0008]

【発明の効果】以上のように、本発明によると、移動子
の加速度から求めた振動振幅が許容値以下になった時に
位置決めが完了したことを伝える信号を発生するので、
上位コントローラが次のワークに速やかに、且つ確実に
移行でき、オープンループ形の平面パルスモータの稼働
率を向上することができて、システムとしての信頼性が
向上するなどの効果がある。
As described above, according to the present invention, when the vibration amplitude obtained from the acceleration of the mover becomes equal to or less than the allowable value, the signal for informing that the positioning is completed is generated.
The host controller can promptly and surely move to the next work, the operating rate of the open loop type flat pulse motor can be improved, and the system reliability is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本願発明の位置決め装置を適用した平面パル
スモータの平面図である。
FIG. 1 is a plan view of a flat pulse motor to which a positioning device of the present invention is applied.

【図2】 本願発明の位置決め装置のブロック図であ
る。
FIG. 2 is a block diagram of a positioning device of the present invention.

【符号の説明】[Explanation of symbols]

1 移動子 2 固定子 31 X軸加速度センサ 32 Y軸加速度センサ 4 位置決め装置 5 演算器 6 比較器 7 信号発生器 8 上位コントローラ 9 駆動装置 1 Moving Element 2 Stator 31 X-Axis Acceleration Sensor 32 Y-Axis Acceleration Sensor 4 Positioning Device 5 Computing Unit 6 Comparator 7 Signal Generator 8 Upper Controller 9 Drive Device

Claims (1)

【特許請求の範囲】[Claims] 移動子と固定子からなる平面パルスモータにパルス状の
電流を供給し、移動子を平面内で移動させて位置決め制
御する平面パルスモータの位置決め装置において、移動
子に設けた各軸方向の2つの加速度センサと、該2つの
加速度センサの信号を受けて移動子の振動の振幅を演算
する演算器と、該演算器の信号を許容振幅設定値と比較
する比較器と、該比較器の信号を受けて上位コントロー
ラへ位置決めが完了したことを伝える信号を送る信号発
生器とを備えたことを特徴とする平面パルスモータの位
置決め装置。
A planar pulse motor positioning device that supplies a pulsed electric current to a planar pulse motor composed of a mover and a stator to move the mover in a plane to perform positioning control. An acceleration sensor, an arithmetic unit that receives the signals of the two acceleration sensors and calculates the amplitude of the vibration of the mover, a comparator that compares the signal of the arithmetic unit with an allowable amplitude setting value, and a signal of the comparator. A positioning device for a planar pulse motor, comprising: a signal generator that receives the signal and sends a signal to the host controller that the positioning has been completed.
JP14803396A 1996-05-17 1996-05-17 Positioning device of plane pulse motor Pending JPH09308297A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14803396A JPH09308297A (en) 1996-05-17 1996-05-17 Positioning device of plane pulse motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14803396A JPH09308297A (en) 1996-05-17 1996-05-17 Positioning device of plane pulse motor

Publications (1)

Publication Number Publication Date
JPH09308297A true JPH09308297A (en) 1997-11-28

Family

ID=15443620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14803396A Pending JPH09308297A (en) 1996-05-17 1996-05-17 Positioning device of plane pulse motor

Country Status (1)

Country Link
JP (1) JPH09308297A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7657356B2 (en) 2004-11-30 2010-02-02 Fanuc, Ltd. Controller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7657356B2 (en) 2004-11-30 2010-02-02 Fanuc, Ltd. Controller

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