JPH09307230A - Printed wiring board and manufacture thereof - Google Patents
Printed wiring board and manufacture thereofInfo
- Publication number
- JPH09307230A JPH09307230A JP11810596A JP11810596A JPH09307230A JP H09307230 A JPH09307230 A JP H09307230A JP 11810596 A JP11810596 A JP 11810596A JP 11810596 A JP11810596 A JP 11810596A JP H09307230 A JPH09307230 A JP H09307230A
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- bumps
- wiring board
- bump
- supporting substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、プリント配線板及
びその製造方法に関するものであり、特に配線層間を貫
通型の導体配線部で接続する構成を持ち、かつ高密度な
配線及び実装が可能な信頼性の高いプリント配線板を提
供するものであり、その製造方法においては合理的に歩
留り良く製造しうる方法である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed wiring board and a method for manufacturing the same, and in particular, it has a structure in which wiring layers are connected by a penetrating conductor wiring portion and enables high-density wiring and mounting. A highly reliable printed wiring board is provided, and the manufacturing method thereof is a method which can be manufactured reasonably with a good yield.
【0002】[0002]
【従来の技術】2層もしくは多層プリント配線板におい
ては、両面導電パターン等の配線層間の電気的接続は、
次の様にして行っている。即ち2層プリント配線板で
は、両面銅張積層板の所定位置に孔明け加工を施し、孔
内も含め全面に無電解及び電解メッキ処理を行い、孔の
内壁面の金属層を厚くして、導通の信頼性を高めた配線
層間の電気的接続を行うものである。また、多層プリン
ト配線板の場合、基板両面に張られた銅箔を、それぞれ
パターニングした後、そのパターニング面上に、絶縁シ
ートを介して銅箔を積層・配置し、加熱加圧により一体
化した後、前述の2層プリント配線板と同様に、孔明け
加工及びメッキ処理による配線層間の電気的接続、表面
銅箔についてのパターニングを行い、多層プリント配線
板を得ている。前記プリント配線板の製造においては、
配線層間の電気的接続をメッキ法によらず行う手段とし
て、両面銅張積層板の所定位置に孔明けし、この孔内に
導電ペースト等を流し込み硬化させて、配線層間を電気
的に接続する方法も行われている。2. Description of the Related Art In a two-layer or multi-layer printed wiring board, electrical connection between wiring layers such as double-sided conductive patterns is required.
It is done as follows. That is, in a two-layer printed wiring board, perforation processing is performed at a predetermined position of a double-sided copper clad laminate, and electroless and electrolytic plating processes are performed on the entire surface including the inside of the hole to thicken the metal layer on the inner wall surface of the hole. The electrical connection is made between wiring layers with improved reliability of conduction. In the case of a multilayer printed wiring board, after patterning the copper foils stretched on both sides of the substrate, copper foils are laminated and arranged on the patterned surfaces via an insulating sheet and integrated by heating and pressing. After that, similarly to the above-mentioned two-layer printed wiring board, electrical connection between wiring layers by drilling and plating, and patterning of the surface copper foil are performed to obtain a multilayer printed wiring board. In manufacturing the printed wiring board,
As a means for electrically connecting the wiring layers without using a plating method, holes are formed at predetermined positions on the double-sided copper-clad laminate, and a conductive paste or the like is poured into the holes and cured to electrically connect the wiring layers. The method is also done.
【0003】[0003]
【発明が解決しようとする課題】上記の通り、配線層間
に電気的接続にメッキ法を利用するプリント配線板の製
造方法においては、銅張積層板に配線層間の電気的接続
用の孔明け加工、孔内壁を含めたメッキ工程等を必要と
し、プリント配線板の製造工程が複雑であるという欠点
がある。一方、配線層間の電気的な接続用の孔に、導電
性ペーストを印刷等により埋め込む方法も前記メッキ法
の場合と同様に孔明け工程が必要である。しかも孔内に
均一に導電ペースト等を流し込む事が孔径が小さな場合
は、特に難しく信頼性に問題があった。いずれの場合
も、前記孔明け工程を要することは、プリント配線板の
コストや歩留り等に反映し、低コスト化等への要望に対
応し得ない欠点がある。As described above, in a method of manufacturing a printed wiring board using a plating method for electrical connection between wiring layers, a copper clad laminate is punched for electrical connection between wiring layers. However, there is a drawback in that a plating process including the inner wall of the hole is required and the manufacturing process of the printed wiring board is complicated. On the other hand, a method of embedding a conductive paste in a hole for electrical connection between wiring layers by printing or the like also requires a hole forming step as in the case of the plating method. Moreover, it is particularly difficult to pour the conductive paste or the like into the holes even if the hole diameter is small, and there is a problem in reliability. In any case, the necessity of the perforating step is reflected in the cost, yield, etc. of the printed wiring board, and there is a drawback that the demand for cost reduction cannot be met.
【0004】また、前記の従来法によれば、プリント配
線板の表裏面に、配線層間接続用の導電体孔が設置され
ている為、その領域に配線の形成、部品の搭載が出来ず
配線密度の向上が制約されるとともに、部品の実装密度
向上も阻害される問題がある。電子機器の小型化、軽量
化に伴い従来法によるプリント配線板の高密度配線化、
高密度実装対応は、十分なものとは言えず、より有効な
プリント配線板とその製造方法が望まれている。本発明
はこれらの状況に対応するためになされたものであり、
簡便なプロセスで、より高密度な配線及び実装が可能な
信頼性のおけるプリント配線板であり、かつこれを歩留
り良く製造する方法である。Further, according to the above-mentioned conventional method, since conductor holes for connecting wiring layers are provided on the front and back surfaces of the printed wiring board, wiring cannot be formed and components cannot be mounted in that area. There is a problem that the improvement of the density is restricted and the improvement of the mounting density of components is also hindered. With the miniaturization and weight reduction of electronic devices, high density wiring of printed wiring boards by the conventional method,
It cannot be said that high-density mounting is sufficient, and a more effective printed wiring board and its manufacturing method are desired. The present invention has been made to address these situations,
It is a reliable printed wiring board capable of high-density wiring and mounting by a simple process, and is a method of manufacturing this with a high yield.
【0005】[0005]
【課題を解決するための手段】本発明は、所定位置に導
体バンプ群を形成した支持基体の主面に合成樹脂系シー
トを対接させて積層配置する工程と、前記積層体に合成
樹脂系シートを積層配置したものを1次加熱、加圧しバ
ンプ群先端を合成樹脂系シートの厚さ方向に貫通、露出
させる工程と、前記導体バンプ群先端の貫通、露出面に
導電性金属箔を積層配置する工程と、前記導電性金属箔
を積層配置した積層体を2次加圧して、前記導電性金属
箔面にバンプ群先端を塑性変形により接続し、貫通型導
体配線部分を形成する工程と、前記貫通型の導体配線部
を形成した積層体の導電性金属箔に、エッチング処理に
より、前記貫通型導体配線部に接続するパターンを形成
する工程を含むプリント配線板の製造方法において、前
記導体バンプを写真法にて形成することを特徴とするプ
リント配線板の製造方法である。また、本発明は、支持
基体上に形成された導体バンプ群において、導体バンプ
群を支持基体上に写真法にて形成することを特徴とする
支持基体上に形成された導体バンプ群である。また、本
発明は、支持基体上に形成された導体バンプ群におい
て、導体バンプ群を支持基体上に写真法にて形成するこ
とを特徴とする支持基体上に形成された導体バンプ群を
用いたプリント配線板である。According to the present invention, there is provided a step of placing a synthetic resin sheet on a main surface of a supporting substrate having a group of conductor bumps formed at predetermined positions so as to be in contact with each other, and laminating the synthetic resin sheet. Primary heating and pressurizing of the stacked sheets arranged to penetrate and expose the tip of the bump group in the thickness direction of the synthetic resin sheet, and a conductive metal foil is laminated on the penetrated and exposed surface of the tip of the conductor bump group. A step of arranging, and a step of secondarily pressing the laminated body in which the conductive metal foils are laminated and connecting the tip of the bump group to the surface of the conductive metal foil by plastic deformation to form a through conductor wiring portion. In the method for manufacturing a printed wiring board, including the step of forming a pattern for connecting to the through-type conductor wiring portion by etching on the conductive metal foil of the laminated body on which the through-type conductor wiring portion is formed, Copy the bump A method for manufacturing a printed wiring board, which comprises forming at law. Further, the present invention is a conductor bump group formed on a supporting substrate, wherein the conductor bump group is formed on the supporting substrate by a photographic method. Further, the present invention uses a conductor bump group formed on a supporting substrate, characterized in that the conductor bump group is formed on the supporting substrate by a photographic method. It is a printed wiring board.
【0006】[0006]
【発明の実施の形態】本発明において、導体バンプ群を
形成する支持基体とは、例えば、剥離性良好な合成樹脂
シートや導電性シート(箔)、導電性シートを張りつけ
た合成樹脂系シート等がある。この支持基体は、1枚の
シートでもパターン化されたものでも良く、特に限定し
ない。BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, the supporting substrate forming the conductor bump group is, for example, a synthetic resin sheet or a conductive sheet (foil) having good peelability, a synthetic resin sheet to which a conductive sheet is attached, or the like. There is. The support substrate may be a single sheet or a patterned one, and is not particularly limited.
【0007】本発明において、導体バンプ群はかかる支
持基体の一方の主面だけでは無く、両主面に形成したも
のでも良い。本発明において、導体バンプは、合成樹脂
系シートの樹脂分が可塑状態あるいはガラス転移温度以
上にある状態での加熱加圧、即ち1次加圧工程では合成
樹脂シート等を貫通しうる程度の硬さを持ち、2次加圧
工程では、先端部が塑性変形し対接する導電性金属箔と
接合状態が完成されるものである。In the present invention, the conductor bump group may be formed not only on one main surface of the supporting substrate but also on both main surfaces. In the present invention, the conductor bumps are hard enough to be penetrated through the synthetic resin sheet or the like in the heating and pressing in the state where the resin content of the synthetic resin sheet is in the plastic state or the glass transition temperature or more, that is, in the primary pressing step. In the second pressurizing step, the tip end is plastically deformed and the joined state with the conductive metal foil which is in contact is completed.
【0008】本発明において、導体バンプは、写真法に
て支持基体上に形成されるものである。即ち、バンプ形
成用組成物を、支持基体の導体バンプ形成を行う面(片
面あるいは両面)に、塗布し乾燥等によりタックの無い
状態とする。液状のバンプ形成用組成物を支持基体上に
塗布する方法は、特に限定するものではないが、例え
ば、ロールコーター、ディップコーター、カーテンコー
ター、スクリーン印刷等があげられる。またあらかじめ
バンプ形成用組成物を、通常エッチングレジスト等に用
いるドライフィルムの様にシート状にしておき、ラミネ
ートする方法もある。これらの様な方法で形成した支持
基体上のバンプ形成用組成物を導体バンプを形成する部
分にのみ紫外線等を照射することにより感光させる。次
に炭酸ソーダの様なアルカリ水溶液、あるいは塩素系等
の溶剤などにより、現像作業を行い、不要なバンプ形成
用組成物の未照射部分を除去する。その後必要に応じ、
加熱し熱硬化成分の硬化を行う場合もある。In the present invention, the conductor bump is formed on the supporting substrate by a photographic method. That is, the bump-forming composition is applied to the surface (one surface or both surfaces) of the supporting substrate on which the conductor bumps are formed, and the composition is dried to obtain a tack-free state. The method of applying the liquid bump-forming composition onto the supporting substrate is not particularly limited, and examples thereof include a roll coater, a dip coater, a curtain coater, and screen printing. There is also a method in which the bump-forming composition is formed into a sheet shape in advance like a dry film which is usually used for an etching resist or the like and is laminated. The composition for bump formation on the supporting substrate formed by such a method is exposed by irradiating ultraviolet rays or the like only to the portion where the conductive bump is formed. Next, development work is carried out with an alkaline aqueous solution such as sodium carbonate or a solvent such as chlorine to remove the unirradiated portion of the unnecessary bump-forming composition. Then, if necessary,
In some cases, heating is performed to cure the thermosetting component.
【0009】この様な方法により形成される導体バンプ
からなる導体バンプ群は、写真法により行うことで、そ
の位置精度が極めて良好であり、また微小な径の導体バ
ンプ群の形成が容易であり、高密度配線板の形成には効
果的である。また前記の様に位置精度の確保が容易であ
るので、加工作業の板サイズを大きくすることも可能と
なり、作業能率の向上にも貢献するものである。The conductor bump group consisting of the conductor bumps formed by such a method has extremely good positional accuracy and is easy to form a conductor bump group having a minute diameter by using a photographic method. It is effective for forming a high-density wiring board. In addition, since it is easy to secure the positional accuracy as described above, it is possible to increase the plate size for the working work, which also contributes to the improvement of working efficiency.
【0010】本発明において、導体バンプは、銀、金、
銅、半田等の導電性粉末、これらの合金もしくは混合粉
末と、ポリイミド樹脂、フェノール樹脂、ポリエステル
樹脂等のバインダー成分とを混合調整した導電組成物或
いは導電性金属等で構成されるものである。In the present invention, the conductor bumps are silver, gold,
It is composed of a conductive composition such as copper, solder or the like, an alloy or a mixed powder thereof, and a binder composition such as a polyimide resin, a phenol resin or a polyester resin, or a conductive metal.
【0011】本発明において、導体バンプの構成成分の
樹脂成分は、写真法での感光、現像が可能な官能基を保
有するものを含有している。特に限定するものではない
が、例えばスチレン無水マレイン酸共重合物を一分子中
に少なくとも1個のヒドロキシル基及び少なくとも1個
の(メタ)アクロイル基を有する単量体でエステル化し
たハーフエステル化化合物とカルボキシル基を有する飽
和高分子から構成される樹脂組成物等が好ましい。本発
明において導電バンプの高さは、特に限定するものでは
無いが一般に0.1〜0.4mm程度である。In the present invention, the resin component as a constituent component of the conductor bump contains one having a functional group capable of being exposed to light and developed by a photographic method. Although not particularly limited, for example, a half-esterified compound obtained by esterifying a styrene-maleic anhydride copolymer with a monomer having at least one hydroxyl group and at least one (meth) acroyl group in one molecule. A resin composition or the like composed of a saturated polymer having a carboxyl group is preferable. In the present invention, the height of the conductive bump is not particularly limited, but is generally about 0.1 to 0.4 mm.
【0012】本発明において、前記導体バンプ群が貫通
され、貫通型の導体配線部を形成する合成樹脂シートと
は、例えば熱可塑性シートがあり厚さは0.05〜0.
8mmが一般的である。ここで、熱可塑性シートの例を
上げると、ポリカーボネート樹脂、熱可塑性ポリイミド
樹脂、ポリエーテルエーテルケトン樹脂等がある。Bス
テージの熱硬化性樹脂シートは、エポキシ樹脂、ポリイ
ミド樹脂、フェノール樹脂、ビスマレイミドトリアジン
樹脂等がある。これらの合成樹脂は単独でも絶縁性無機
物や有機系充填物を含有しても良く、更にガラスクロス
やマット、有機合成繊維布やマット、或いは紙等の補強
材と組合せてなるプリプレグ系シートであっても良い。In the present invention, the synthetic resin sheet that penetrates the conductor bump group and forms the through-type conductor wiring portion is, for example, a thermoplastic sheet and has a thickness of 0.05 to 0.
8 mm is common. Here, examples of the thermoplastic sheet include polycarbonate resin, thermoplastic polyimide resin, and polyether ether ketone resin. The B-stage thermosetting resin sheet includes epoxy resin, polyimide resin, phenol resin, bismaleimide triazine resin and the like. These synthetic resins may be used alone or may contain an insulating inorganic material or an organic filler, and are a prepreg-based sheet formed by combining with a reinforcing material such as glass cloth, mat, organic synthetic fiber cloth or mat, or paper. May be.
【0013】本発明において支持基体上に形成された導
体バンプ群の形状は特に限定するものではない。In the present invention, the shape of the conductor bump group formed on the supporting substrate is not particularly limited.
【0014】本発明において、1次加圧工程は、加熱可
能な金属、耐熱性樹脂、セラミック等のローラと、加圧
したとき弾性的に変形するローラ、例えば、ブタジエ
ン、ネオプレン等のゴム製、ポリテトラフルオロエチレ
ン樹脂製等のローラ間を通す方法が好ましい。In the present invention, in the primary pressing step, a roller of heatable metal, heat resistant resin, ceramic or the like, and a roller which elastically deforms when pressed, for example, rubber of butadiene or neoprene, A method of passing between rollers made of polytetrafluoroethylene resin or the like is preferable.
【0015】本発明において、1次加圧工程において合
成樹脂系シート側(導体バンプ群を形成した支持基体と
は反対側)に被押圧体を配置すると導体バンプ群の先端
がより容易にかつ確実に合成樹脂系シートを貫通させる
ことが可能となる。その材質は特に限定されるものでは
ないが例えば、シリコン系フィルム等がある。In the present invention, when the pressed body is arranged on the synthetic resin sheet side (the side opposite to the supporting substrate on which the conductor bump group is formed) in the primary pressurizing step, the tip of the conductor bump group can be more easily and securely formed. It is possible to penetrate the synthetic resin sheet. The material is not particularly limited, but for example, a silicon film or the like is used.
【0016】本発明において、2次加圧工程は、油圧形
式の多段真空プレスやオートクレーブ型新空プレスを用
いるのが一般的である。In the present invention, it is general to use a hydraulic type multi-stage vacuum press or an autoclave type fresh air press in the secondary pressurizing step.
【0017】本発明のプリント配線板の製造方法によれ
ば、支持基体上への導体バンプの形成は、写真法により
優れた位置精度を確保しつつ行い、配線層間を電気的に
接続する層間の導体配線部は、いわゆる積層一体化する
工程での1次加圧により、まず導体バンプ先端が、層間
絶縁層を成す合成樹脂系シートの所定位置を、高精度か
つ確実に貫通し、2次加圧において、前記合成樹脂系シ
ートの可塑化等と導電性金属箔面への導体バンプ先端部
の圧接による塑性変形が容易に発生し確実な積層積層一
体化と信頼性の高い配線層間の電気的接続が達成され
る。即ち、プロセスの簡便化を図り、ファインな配線層
間を任意な位置に高精度に、かつ信頼性の高い電気的接
続を形成することができ、高密度プリント配線板の製造
が低コストで可能となる。また前記配線層間の電気的接
続に当たり、接続孔の形成が不要であり、その分高密度
配線高密度実装が可能となる。According to the method of manufacturing a printed wiring board of the present invention, the conductive bumps are formed on the supporting substrate while ensuring excellent positional accuracy by the photographic method, and the wiring bumps are electrically connected to each other. In the conductor wiring portion, the tip of the conductor bump firstly and accurately penetrates a predetermined position of the synthetic resin sheet forming the interlayer insulating layer with high accuracy by the primary pressure in the so-called laminated integration process, and the secondary addition is performed. Under pressure, plastic deformation easily occurs due to plasticization of the synthetic resin sheet and pressure contact of the tip of the conductor bump to the surface of the conductive metal foil, and reliable lamination integration and reliable electrical connection between wiring layers The connection is achieved. That is, by simplifying the process, it is possible to form a highly accurate and reliable electrical connection between fine wiring layers at any position, and it is possible to manufacture a high-density printed wiring board at low cost. Become. Further, it is not necessary to form a connection hole for electrical connection between the wiring layers, and accordingly, high-density wiring and high-density mounting can be realized.
【0018】[0018]
【実施例】以下、図を引用して実施例を説明する。0.
018mmの電解銅箔を、支持基体1として使用し、ポ
リイミドをバインダーとしスチレンマレイン酸共重合物
をヒドロキシル基及びアクロイル基を有する化合物でエ
ステル化したものとカルボキシル基を有する化合物等の
感光性樹脂成分とする銀ペーストを、ロールコーターに
より前記銅箔の粗化面に塗布したバンプ形成用組成物の
層11とし、タックの無い状態まで乾燥させた(図
1)。バンプ形成部のみ光が透過する様に形成したフィ
ルム(バンプ形成時露光用フィルム)12を、タックフ
リーとなった銀ペースト上に配置し(図2)、露光作業
を行い、炭酸ソーダで現像し不要な銀ペーストを除去
し、基体上に導体バンプ2を形成し、その後加熱硬化し
た(図3)。EXAMPLES Examples will be described below with reference to the drawings. 0.
A photosensitive resin component such as a compound obtained by esterifying a styrene-maleic acid copolymer with polyimide as a binder using a compound having a hydroxyl group and an acroyl group and a compound having a carboxyl group, using an electrolytic copper foil of 018 mm as the supporting substrate 1. The silver paste was used as a layer 11 of the bump-forming composition applied to the roughened surface of the copper foil with a roll coater and dried to a tack-free state (FIG. 1). A film (exposure film for forming bumps) 12 formed so that only the bump forming portion transmits light is placed on the tack-free silver paste (Fig. 2), exposed, and developed with sodium carbonate. Unnecessary silver paste was removed, conductor bumps 2 were formed on the substrate, and then heat-cured (FIG. 3).
【0019】ここで形成した導体バンプ2の径は、0.
3mm(15)、0.2mm(14)、0.1mm(1
3)の3種類であるが、いずれもなんら問題無く形成が
可能であった(図7)。The diameter of the conductor bump 2 formed here is 0.
3 mm (15), 0.2 mm (14), 0.1 mm (1
There are three types, 3), but all could be formed without any problem (FIG. 7).
【0020】一方、厚さが0.15mmのポリエーテル
イミド樹脂シートを合成樹脂系シート3として用意し、
前記形成した導体バンプに対向させ250℃に加熱した
金属性ローラと柔軟性ゴムローラとで構成するローラを
通し、1次加圧し、導体バンプを貫通せしめた(図
4)。次に導体バンプの貫通した面に0.018mm電
解銅箔(導電性金属箔)4を配置し、あて板5を配置し
(図5)、油圧型プレスで270℃、50kg/cm2 で6
0min間2次加圧した。これにより貫通した導体配線
部6を持つ両面銅張型のプリント配線板用積層板を得た
(図6)。これらも表面にエッチング法により導体回路
を形成し2層プリント配線板を得た。これについて通常
プリント配線板の検査で行う電気検査を適用実施した
が、電気的接続に全く問題無く、また288℃、60秒
の半田耐熱性試験においても信頼性に全く問題なかっ
た。On the other hand, a polyetherimide resin sheet having a thickness of 0.15 mm is prepared as the synthetic resin sheet 3,
The conductor bump was passed through a roller composed of a metal roller and a flexible rubber roller heated to 250 ° C. so as to face the formed conductor bump, and the conductor bump was penetrated (FIG. 4). Next, a 0.018 mm electrolytic copper foil (conductive metal foil) 4 is placed on the surface through which the conductor bumps penetrate, a contact plate 5 is placed (Fig. 5), and a hydraulic die press is used at 270 ° C and 50 kg / cm 2 for 6 times.
Secondary pressure was applied for 0 min. As a result, a double-sided copper clad laminate for a printed wiring board having a conductor wiring portion 6 penetrating was obtained (FIG. 6). A conductor circuit was formed on the surface of these also by an etching method to obtain a two-layer printed wiring board. An electrical inspection, which is usually performed by inspecting a printed wiring board, was applied to this, but there was no problem in electrical connection, and there was no problem in reliability in a solder heat resistance test at 288 ° C. for 60 seconds.
【0021】[0021]
【発明の効果】本発明によれば、プリント配線板の製造
工程の簡略化を行いつつ、接続信頼性が高く、高密度な
2層プリント配線板ないし多層プリント配線板及びその
製造方法を提供出来る。特に工程の長い多層プリント配
線板においては、大きな工程簡略化となり生産性の向上
に効果が大きい。そして従来工法での孔明けメッキ工程
が不要となり、製造工程で発生する不良が低減出来る。
また本発明のプリント配線板は層間接続孔が無いので、
配線密度の格段な向上を図り得るし、部品実装密度の向
上も期待出来る。According to the present invention, it is possible to provide a two-layer printed wiring board or a multilayer printed wiring board having a high connection reliability and high density, and a manufacturing method thereof, while simplifying the manufacturing process of the printed wiring board. . Particularly in the case of a multilayer printed wiring board having a long process, the process is greatly simplified and the productivity is greatly improved. Further, the hole-drilling plating step in the conventional method is not necessary, and defects occurring in the manufacturing process can be reduced.
Further, since the printed wiring board of the present invention has no interlayer connection hole,
The wiring density can be significantly improved, and the component mounting density can also be expected to be improved.
【図1】支持基体にバンプ形成用組成物を塗布、乾燥し
タックの無い状態とした段階の断面図FIG. 1 is a cross-sectional view of a stage in which a bump-forming composition is applied to a supporting substrate and dried to make it tack-free.
【図2】支持基体にバンプ形成用組成物を塗布、乾燥し
タックの無い状態とした段階のものに、バンプ形成部の
み光が透過する様に形成したフィルムをバンプ形成用組
成物を塗布側に配置した段階の断面図FIG. 2 is a view showing a state where a bump forming composition is applied to a supporting substrate, dried and tack-free, and a film formed so that light is transmitted only through a bump forming portion is applied with the bump forming composition. Sectional view of the stage
【図3】支持基体に導体バンプ群を形成した段階を示す
断面図FIG. 3 is a sectional view showing a stage in which a conductor bump group is formed on a support base.
【図4】合成樹脂系シートを、図3で形成した導体バン
プ群を形成した支持基体に導体バンプ群側に対向させ金
属性と柔軟性のものから構成するローラを通し、1次加
圧した段階を示す断面図4] A synthetic resin sheet is passed through a roller made of a metallic and flexible material so as to face the conductor bump group side of the supporting substrate having the conductor bump group formed in FIG. Sectional view showing steps
【図5】図4で形成した合成樹脂系シートと導体バンプ
群を持つ支持基体を1次加圧したもののバンプが貫通し
た面に導電性金属箔を配置し、あて板を配置し2次加圧
を行う段階の断面図5 is a plan view of the synthetic resin sheet formed in FIG. 4 and a support substrate having a conductor bump group, which is first pressed, and a conductive metal foil is arranged on a surface through which the bumps penetrate, a contact plate is arranged, and a secondary application is performed. Cross section of the stage of applying pressure
【図6】図4の段階のものを2次加圧し形成した貫通し
た導体配線部を持つ積層板の断面図FIG. 6 is a cross-sectional view of a laminated plate having a through conductor wiring portion formed by secondarily pressing the one in the stage of FIG. 4;
【図7】支持基体上に形成された径の異なるバンプを示
す断面図FIG. 7 is a cross-sectional view showing bumps having different diameters formed on a support base.
1 支持基体 2 導体バンプ 3 合成樹脂系シート 4 導電性金属箔 5 あて板 6 貫通した導体配線部 11 バンプ形成用組成物(写真法に適用出来るもの) 12 バンプ形成時露光用フィルム 13 導体バンプ(直径0.1mm) 14 〃 (〃 0.2mm) 15 〃 (〃 0.3mm) 1 Support Substrate 2 Conductor Bump 3 Synthetic Resin Sheet 4 Conductive Metal Foil 5 Touch Plate 6 Penetrating Conductor Wiring Part 11 Bump Forming Composition (Applicable to Photographic Method) 12 Bump Forming Exposure Film 13 Conductor Bump ( Diameter 0.1mm) 14〃 (〃 0.2mm) 15〃 (〃 0.3mm)
Claims (3)
基体の主面に合成樹脂系シートを対接させて積層配置す
る工程と、前記積層体に合成樹脂系シートを積層配置し
たものを1次加熱、加圧しバンプ群先端を合成樹脂系シ
ートの厚さ方向に貫通、露出させる工程と、前記導体バ
ンプ群先端の貫通、露出面に導電性金属箔を積層配置す
る工程と、前記導電性金属箔を積層配置した積層体を2
次加圧して、前記導電性金属箔面にバンプ群先端を塑性
変形により接続し、貫通型導体配線部分を形成する工程
と、前記貫通型の導体配線部を形成した積層体の導電性
金属箔に、エッチング処理により、前記貫通型導体配線
部に接続するパターンを形成する工程を含むプリント配
線板の製造方法において、前記導体バンプを写真法にて
形成することを特徴とするプリント配線板の製造方法。1. A step of laminating and placing a synthetic resin sheet on a main surface of a supporting substrate on which a group of conductor bumps are formed at predetermined positions, and a step of laminating a synthetic resin sheet on the laminated body. Next, heating and pressurizing to penetrate and expose the tip of the bump group in the thickness direction of the synthetic resin sheet; piercing the tip of the conductor bump group and placing a conductive metal foil on the exposed surface; 2 layers of laminated metal foil
Next, a step of applying pressure to connect the tip of the bump group to the surface of the conductive metal foil by plastic deformation to form a through-type conductor wiring portion; and a conductive metal foil of a laminated body on which the through-type conductor wiring portion is formed. In a method of manufacturing a printed wiring board, which comprises a step of forming a pattern for connecting to the through-type conductor wiring portion by etching, a method of manufacturing the printed wiring board, wherein the conductor bump is formed by a photographic method. Method.
おいて、導体バンプ群を支持基体上に写真法にて形成す
ることを特徴とする支持基体上に形成された導体バンプ
群。2. A conductor bump group formed on a supporting substrate, wherein the conductor bump group is formed on the supporting substrate by a photographic method.
おいて、導体バンプ群を支持基体上に写真法にて形成す
ることを特徴とする支持基体上に形成された導体バンプ
群を用いたプリント配線板。3. A conductor bump group formed on a supporting substrate, wherein the conductor bump group is formed on the supporting substrate by a photographic method. Printing using the conductor bump group formed on the supporting substrate. Wiring board.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11810596A JPH09307230A (en) | 1996-05-13 | 1996-05-13 | Printed wiring board and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11810596A JPH09307230A (en) | 1996-05-13 | 1996-05-13 | Printed wiring board and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09307230A true JPH09307230A (en) | 1997-11-28 |
Family
ID=14728147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11810596A Pending JPH09307230A (en) | 1996-05-13 | 1996-05-13 | Printed wiring board and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09307230A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103129076A (en) * | 2011-11-21 | 2013-06-05 | 株式会社名机制作所 | Laminating method and laminating apparatus |
-
1996
- 1996-05-13 JP JP11810596A patent/JPH09307230A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103129076A (en) * | 2011-11-21 | 2013-06-05 | 株式会社名机制作所 | Laminating method and laminating apparatus |
US9005384B2 (en) | 2011-11-21 | 2015-04-14 | Kabushiki Kaisha Meiki Seisakusho | Method for forming laminate and laminating device |
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