JPH09304037A - Apparatus for measuring core shift amount between cylindrical objects - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow an apparatus to be reduced in a size and a cost and to allow a shift in cores between cylindrical objects to be measured rapidly. SOLUTION: A first set of a light source 1, a diffusion plate 2 and a CCD camera 3 and a second set of a light source 4, a diffusion plate 5 and a CCD camera 6 are set to 90 degrees with respect to objects to be measured A, B for picking up their images. The images are acquired from the CCD cameras 3, 6 by an image acquisition part 7 for measuring respective shift amounts from the images by a core shift amount measuring circuit 8. From measurement results, the maximum of the core shift and a direction are calculated by a maximum core shift amount/direction calculating circuit 9. Use of two sets of image pickup means allows a core shift amount to be obtained by single image acquisition without rotating the objects A, B.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the amount of misalignment between cylindrical objects which measures the amount and direction of misalignment when two cylindrical objects overlap each other.

[0002]

2. Description of the Related Art FIG. 3 shows the structure of a conventional apparatus for measuring the amount of misalignment between cylindrical objects. In FIG. 3, A, B
Is an object to be measured, 31 is an object rotating mechanism for rotating the objects to be measured A and B, 32 is a light source, 33 is a diffusion plate for diffusing light from the light source 32 and irradiating the objects to be measured A and B, 34 Is a CCD camera for receiving the transmitted light of the objects to be measured A and B, 35 is an image capturing section for capturing an image from the CCD camera 34,
A rotation synchronizing circuit 36 outputs a rotation synchronizing signal to the object rotating mechanism 31 to rotate the objects A and B to be measured, and at the same time, outputs a synchronizing signal for capturing an image to the image capturing section 35. . Reference numeral 37 denotes a maximum misalignment amount measuring circuit, which measures the maximum misalignment amount of the objects to be measured A and B from the image of the image capturing section 35.

The operation of the above configuration will be described below. The light from the light source 32 is applied to the objects to be measured A and B through the diffusion plate 33. CCD by this transmitted light
The objects to be measured A and B are imaged by the camera 34. Further, by the synchronizing signal from the rotation synchronizing circuit 36, the DUT rotating mechanism 31
Rotates the DUTs A and B, and at the same time, the image capturing section 35 captures an image by the synchronization signal from the rotation synchronization circuit 36. Then, images are captured a plurality of times while rotating the objects to be measured A and B, and the amount of misalignment of the objects to be measured A and B is measured from this image by the maximum misalignment amount measuring circuit 37. By obtaining the maximum amount from the measured value during one rotation of B, the maximum misalignment amount of the objects to be measured A and B can be obtained.

[0004]

However, in the above-described conventional apparatus for measuring the amount of misalignment between cylindrical objects, the object rotating mechanism 31 is required to rotate the objects A and B once. However, there is a problem that the apparatus becomes large and expensive, and at the same time, the measurement time becomes long.

The present invention solves such a conventional problem, and can measure the amount of misalignment of the object to be measured without using the mechanism for rotating the object to be measured. The cost can be reduced, and the amount of misalignment can be measured without rotating the object to be measured.
Therefore, it is an object of the present invention to provide an apparatus for measuring the amount of misalignment between cylindrical objects, which is capable of measuring the amount of misalignment in a short time.

[0006]

In order to achieve the above object, the present invention comprises two sets of image pickup means set with an angular difference of approximately 90 degrees with respect to an object to be measured which is an overlapping cylindrical object. An image approaching unit that captures images of each set of image pickup means, a misalignment amount measuring circuit that measures the amount of misalignment from each of the two images captured by this image capturing unit, and a maximum amount of misalignment from each amount of misalignment. And a maximum misalignment amount / direction calculation circuit for calculating the misalignment direction.

As a result, the maximum amount and direction of misalignment can be obtained by only once capturing the image of the object to be measured, the size and cost of the device can be reduced, and the measurement speed can be increased. An apparatus for measuring the amount of misalignment can be obtained.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION According to the first aspect of the present invention, two sets of objects to be measured set with an angular difference of approximately 90 degrees with respect to the objects to be measured which are overlapping cylindrical objects. Image pickup means, an image capturing section that captures an image from each set of image capturing means, a center shift amount measuring circuit that measures the shift amount from the image captured by the image capturing section, and each of the center shift amount measuring circuits that measure the shift amount. It is equipped with a center displacement amount / direction calculation circuit that calculates the maximum center displacement amount and direction from the center displacement amount, and the maximum center distance between cylindrical objects can be obtained by capturing an image once without rotating the DUT. It has an effect that the shift amount and direction can be obtained at high speed.

According to a second aspect of the present invention, in the first aspect, the image pickup means of each set illuminates the object to be measured with light, a diffusion plate for diffusing the light from the light source, and the light source. CCD for receiving the light that has been transmitted from the DUT through the diffusion plate and transmitted through the DUT to obtain an image of the DUT.
It is equipped with a camera.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. (Embodiment 1) FIG. 1 is a schematic configuration diagram showing an apparatus for measuring the amount of misalignment between cylindrical objects according to an embodiment of the present invention, and FIGS. 2A and 2B show an apparatus for measuring the amount of misalignment. It is a measurement operation explanatory drawing. In FIG. 1, 1 is a light source, 2 is a diffusing plate, and this diffusing plate 2 diffuses the light from the light source 1 and irradiates two DUTs A and B, which are two overlapping cylindrical objects. Reference numeral 3 denotes a CCD camera, which receives and images the transmitted light of the objects to be measured A and B illuminated by the light source 1. Reference numeral 4 is a light source, and 5 is a diffusion plate, which diffuses the light from the light source 4 and irradiates the DUTs A and B. 6 is a CCD camera,
The transmitted light of the objects to be measured A and B emitted by the light source 4 is received and imaged. The second (X direction) set of the light source 4, the diffusion plate 5, and the CCD camera 6 are first (Y) relative to the objects to be measured A and B.
(Direction) with respect to the light source 1, the diffuser plate 2, and the CCD camera 3 of the set (angle direction) at an angle of approximately 90 degrees.

Reference numeral 7 denotes an image capturing unit, which is a first set of Cs.
The images of the objects to be measured A and B captured by the CD camera 3 and the second set of CCD cameras 6 are captured. Reference numeral 8 denotes a misalignment amount measuring circuit, which includes the first set of CCD cameras 3 and the second set of CCs.
The amounts of misalignment of the two images from the D camera 6 are measured. Reference numeral 9 denotes a maximum misalignment amount / direction calculating circuit, which calculates the maximum misalignment amount / direction from the misalignment amount measured by the misalignment amount measuring circuit 8.

The operation of the above configuration will be described below. Light is emitted from the first set of light sources 1 to the objects A and B to be measured through the diffusion plate 2, and the CCD camera 3 set on the opposite side of the light sources 1 and the diffusion plate 2 with respect to the objects A and B to be measured. The transmitted light is received and the objects A and B to be measured are imaged. On the other hand, the light sources 4 of the second set irradiate the DUTs 5 through the diffuser plate 5 with light, and the CCD camera 6 is set on the opposite side of the light source 4 and the diffusing plate 5 with respect to the DUTs A and B. Receives the transmitted light and images the objects to be measured A and B.

The light source 4, the diffuser plate 5, and the CCD camera 6 of the second set are set at an angle of 90 degrees with respect to the light source 1, the diffuser plate 2, and the CCD camera 3 of the first set. CC of set
The images captured by the D camera 3 and the second set of CCD cameras 6 are captured by the image capturing unit 7, and the misalignment amount measuring circuit 8 measures the misalignment amount from each image.

As shown in FIG. 2 (a), the first set of CCs
The position of the center point A1 of the object to be measured A and the center point B1 of the object to be measured B in the Y direction is obtained from the image from the D camera 3 and the misalignment amount Y
Is measured, the X-direction positions of the center point A1 of the object to be measured A and the center point B1 of the object to be measured B are obtained from the images from the second set of CCD cameras 6, and the misalignment amount X is measured. Maximum misalignment
The direction calculation circuit 9 calculates the maximum misalignment amount 11 from the misalignment amount X and the misalignment amount Y measured by the misalignment amount measurement circuit 8 according to the following equation.

[0015]

[Equation 1]

The misalignment direction 12 is calculated by the following equation.

[0017]

[Equation 2]

As described above, according to the above embodiment, 90
First set of light source 1, diffuser plate 2, C set in degrees
The CD camera 3, the light source 4 of the second set, the diffusion plate 5, and the CCD camera 6 capture images of the objects A and B to be measured, and the misalignment amount measuring circuit 8 decenters the misalignment amount X from the image captured by the image capturing unit 7. By measuring the amount of misalignment Y and the maximum amount of misalignment / direction calculation circuit 9 and calculating the maximum amount of misalignment 11 and the misalignment direction 12, the amount of misalignment between the cylindrical objects can be obtained. Further, since the image can be captured once and measured, the measurement can be performed at high speed by capturing and measuring the image during movement without stopping the objects to be measured A and B.

[0019]

As described above, according to the present invention, it is possible to obtain almost 9 objects with respect to an object to be measured which is an overlapping cylindrical object.
Since the object to be measured is imaged by the two sets of imaging means set at an angle of 0 degree, the amount of misalignment X and the amount of misalignment Y are measured from each image, and the maximum amount of misalignment and the direction of misalignment are obtained. The measurement can be performed without rotating the DUT, the conventional DUT rotation mechanism and the synchronizing signal circuit are not required, and the size and cost of the device can be reduced. Moreover, since the image is captured only once, high-speed measurement is possible.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing a misalignment amount measuring device between cylindrical objects according to an embodiment of the present invention.

FIG. 2A is an operation explanatory diagram for measuring the misalignment amount by the concentricity deviation amount measuring device, and FIG. 2B is an operation explanatory diagram for obtaining the maximum misalignment amount and the misalignment amount direction by the concentricity deviation amount measuring device.

FIG. 3 is a schematic configuration diagram showing a conventional misalignment amount measuring device between cylindrical objects.

[Explanation of symbols]

 1 light source 2 diffuser plate 3 CCD camera 4 light source 5 diffuser plate 6 CCD camera 7 image capturing part 8 misalignment amount measurement circuit 9 misalignment maximum amount / direction calculation circuit A measured object B measured object

Claims (2)

[Claims] 1. A pair of image pickup means for measuring the object to be measured, which are set at an angle difference of approximately 90 degrees with respect to the object to be measured, which are overlapping cylindrical objects, and an image for capturing an image from the image pickup means of each set. Capture unit, core misalignment amount measurement circuit that measures the amount of misalignment from the image captured by this image capture unit, and core that calculates the maximum misalignment amount and direction from each center misalignment amount measured by this misalignment amount measurement circuit An apparatus for measuring the amount of misalignment between cylindrical objects provided with a misalignment amount / direction calculation circuit. 2. A light source for irradiating the object to be measured with light, and a diffusing plate for diffusing the light from the light source.
The core between the cylindrical objects according to claim 1, further comprising: a CCD camera for receiving light emitted from the light source through the diffusion plate and transmitted through the object to be measured, and obtaining an image of the object to be measured. Deviation amount measuring device.