JPH09292426A - Surface electrometer - Google Patents

Surface electrometer

Info

Publication number
JPH09292426A
JPH09292426A JP10938096A JP10938096A JPH09292426A JP H09292426 A JPH09292426 A JP H09292426A JP 10938096 A JP10938096 A JP 10938096A JP 10938096 A JP10938096 A JP 10938096A JP H09292426 A JPH09292426 A JP H09292426A
Authority
JP
Japan
Prior art keywords
tuning fork
measuring
vibrator
electrode
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10938096A
Other languages
Japanese (ja)
Other versions
JP3673597B2 (en
Inventor
Shigeo Hatake
茂雄 畠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP10938096A priority Critical patent/JP3673597B2/en
Publication of JPH09292426A publication Critical patent/JPH09292426A/en
Application granted granted Critical
Publication of JP3673597B2 publication Critical patent/JP3673597B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To improve the measuring performance by enhancing the S/N ratio of a measuring signal in a chopper-type noncontact surface electrometer using a tuning-fork type vibrator. SOLUTION: Both tip parts 10c of fork parts 10b of a tuning-fork type vibrator 10 are bent, so that the tip parts approach each other and separate from a measuring electrode 1 receiving electric lines of force from an object to be measured, and chevron-shape is formed. Furthermore, the tip parts 10c are vibrated in the direction A by piezoelectric elements 4, and the amount of the electric lines of force 7 entering the measuring electrode 1 through the space between both tip parts 10C from the object to be measured is changed in time. Then, the minute AC current induced in the measuring electrode 1 is amplified and taken out by an amplifier element 3. The surface potential of the object to be measured 8 is calculated, based on this signal.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、物体の表面電位を
非接触で測定する表面電位計に関し、例えば複写機等の
電子写真装置において感光体の表面電位を検知するため
に使用される表面電位計に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface electrometer for measuring the surface potential of an object in a non-contact manner. For example, a surface potential used for detecting the surface potential of a photoconductor in an electrophotographic apparatus such as a copying machine. It is about the total.

【0002】[0002]

【従来の技術】電子写真装置の感光体などの表面電位を
非接触で測定する表面電位計としては、いわゆるチョッ
パー方式の電位計と容量変動方式の電位計が主に知られ
ている。
2. Description of the Related Art As a surface electrometer for measuring the surface potential of a photoconductor of an electrophotographic apparatus in a non-contact manner, a so-called chopper type electrometer and a capacitance variation type electrometer are mainly known.

【0003】チョッパー方式の電位計は、測定対象物と
測定電極の間に導電性の振動物体を配置し、この振動物
体による測定電極への電気力線の入射量を増減させて測
定対象物の電界強度を測定するものであり、また容量変
動方式の電位計は、測定電極自体を物理的に振動させ、
測定対象物体とこの測定電極の間の電界分布を変化させ
て電界強度を測定するものであり、両方式とも信号受信
処理に関しては同様の内容となっている。
In the chopper type electrometer, a conductive vibrating object is arranged between the object to be measured and the measuring electrode, and the amount of incidence of electric force lines on the measuring electrode by the vibrating object is increased or decreased to measure the object to be measured. The electric field strength is measured, and a capacitance variation type electrometer physically vibrates the measurement electrode itself,
The electric field intensity is measured by changing the electric field distribution between the object to be measured and this measurement electrode, and both systems have the same contents regarding the signal reception processing.

【0004】図2は従来のチョッパー方式の表面電位計
の概略構成を示す図である。同図において、1は測定対
象物8からの電気力線を受ける測定電極、2はその測定
対象物8から測定電極1へ入射する電気力線をA方向に
振動してチョッピングする音叉型振動子、3は測定電極
1に誘起される微小交流信号をインピーダンス変換して
増幅するための増幅素子、4は音叉型振動子2に振動を
与える圧電素子である。
FIG. 2 is a diagram showing a schematic configuration of a conventional chopper type surface electrometer. In the figure, 1 is a measuring electrode that receives an electric force line from the measuring object 8, and 2 is a tuning fork type vibrator that oscillates and chops the electric force line incident from the measuring object 8 to the measuring electrode 1 in the A direction. Reference numeral 3 is an amplifying element for impedance-converting and amplifying a minute AC signal induced in the measurement electrode 1, and 4 is a piezoelectric element for vibrating the tuning fork type vibrator 2.

【0005】また、5は回路基板、6は圧電素子4への
駆動信号、測定電極1からの受信信号、及び電源を入出
力するための接続コネクタ、7は測定対象物8から測定
電極1へB方向に入射する電気力線、9は上記の回路基
板5を収納するシールドケースである。
Reference numeral 5 is a circuit board, 6 is a connector for inputting and outputting a drive signal to the piezoelectric element 4, a reception signal from the measuring electrode 1, and a power source, and 7 is a measuring object 8 to the measuring electrode 1. A line of electric force that is incident in the B direction, and 9 is a shield case that houses the circuit board 5 described above.

【0006】図3は上記回路基板5上に構成されたイン
ピーダンス変換回路の概略を示す図である。ここでは、
入力側の抵抗11を例えば100MΩとして増幅素子3
にFETを用いたソースフォロワ回路によりインピーダ
ンス変換を行っている。また、出力側の抵抗12,13
は、例えばそれぞれ100Ω、20KΩとしている。な
お、これらの抵抗等の部品は回路基板5上に印刷される
かあるいディスクリートチップ部品で半田付けされた構
成となっている。
FIG. 3 is a schematic view of an impedance conversion circuit formed on the circuit board 5. here,
The amplifying element 3 has a resistance 11 on the input side of 100 MΩ, for example.
Impedance conversion is performed by a source follower circuit using an FET. Also, the resistors 12 and 13 on the output side
Are, for example, 100Ω and 20 KΩ, respectively. It should be noted that these components such as resistors are printed on the circuit board 5 or soldered with discrete chip components.

【0007】また図4は上記構成の電位計の外形を示す
斜視図である。図示のように、回路基板5はシールドケ
ース9に収容されており、またケース側面にはコネクタ
6が配置され、前面には測定用の小窓(開口部)が設け
られている。
FIG. 4 is a perspective view showing the outer shape of the electrometer having the above structure. As shown, the circuit board 5 is housed in a shield case 9, a connector 6 is arranged on the side surface of the case, and a small window (opening) for measurement is provided on the front surface.

【0008】次に、上記構成の電位計の動作について説
明する。まず、外部から供給される圧電素子駆動信号に
より圧電素子4及び音叉型振動子2が共鳴状態となり、
機械振動が生じる。その結果測定対象物8からシールド
ケース9の測定窓を通過して測定電極1に入射する電気
力線の量がその音叉型振動子2の振動に合わせて増減す
る。これにより、測定電極1と図3に示す入力側の抵抗
10に微弱な交流誘導電流が発生し、これが電圧信号と
して増幅素子3であるFETのゲートに印加される。
Next, the operation of the electrometer having the above structure will be described. First, the piezoelectric element 4 and the tuning fork type vibrator 2 are brought into a resonance state by the piezoelectric element drive signal supplied from the outside,
Mechanical vibration occurs. As a result, the amount of electric force lines that pass through the measurement window of the shield case 9 and enter the measurement electrode 1 from the measurement object 8 increases or decreases in accordance with the vibration of the tuning fork vibrator 2. As a result, a weak AC induced current is generated in the measurement electrode 1 and the input-side resistor 10 shown in FIG. 3, and this is applied as a voltage signal to the gate of the FET that is the amplification element 3.

【0009】このとき、FET回路は上述のようにソー
スフォロワ回路となっているので、増幅度1のインピー
ダンス変換が行われ、FETのソースより電圧信号が出
力される。そして、この信号がコネクタ6を介して外部
の信号処理回路(図示せず)に転送され、その後の処理
が行われ、測定対象物8の表面電位が検出される。
At this time, since the FET circuit is a source follower circuit as described above, impedance conversion with an amplification factor of 1 is performed and a voltage signal is output from the source of the FET. Then, this signal is transferred to an external signal processing circuit (not shown) via the connector 6, and the subsequent processing is performed to detect the surface potential of the measuring object 8.

【0010】ここで、上記増幅素子3を有したインピー
ダンス変換回路の出力信号の大きさは測定対象物8の表
面電位の大きさに比例するので、いかにS/N比の高い
この初段の増幅信号を後処理回路に転送できるかが、表
面電位計としての基本性能を決定することとなる。
Since the magnitude of the output signal of the impedance conversion circuit having the amplifying element 3 is proportional to the magnitude of the surface potential of the object 8 to be measured, the amplified signal of this first stage having a high S / N ratio is obtained. Can be transferred to the post-processing circuit, which determines the basic performance of the surface electrometer.

【0011】[0011]

【発明が解決しようとする課題】ところで近年、装置の
小型化への要求が高まる中、例えば複写機に搭載される
表面電位計においても、設置スペースの関係上一層の小
型化、薄型化が求められている。従来ではそのような小
型化、薄型化への要求に対し、測定電極の小型化(高さ
方向)、振動子の小型化、また振動子の振動方向を測定
対象物に対して横方向にするといった手段で対応してい
た。さらに、測定電極の小型化に伴うS/N比の劣化を
補うため、測定電極を測定対象物にできるだけ近付ける
ように配置していた。
By the way, in recent years, with the increasing demand for downsizing of the apparatus, for example, even in a surface electrometer mounted on a copying machine, further downsizing and thinning are required due to the installation space. Has been. In the past, in response to such demands for downsizing and thinning, downsizing of the measurement electrode (in the height direction), downsizing of the vibrator, and the vibration direction of the vibrator are lateral to the object to be measured. I was dealing with such means. Further, in order to compensate for the deterioration of the S / N ratio due to the miniaturization of the measurement electrode, the measurement electrode is arranged as close as possible to the measurement object.

【0012】しかしながら、上記のような従来の表面電
位計にあっては、図5に示すように、測定電極の小型化
に伴ってその検出表面積が小さくなり、測定対象物から
シールドケースの測定窓を通って入射する総電気力線に
対して直接音叉型振動子に飛込んでしまう電気力線の比
率が大きくなっていた。
However, in the conventional surface electrometer as described above, as shown in FIG. 5, the detection surface area becomes smaller as the measuring electrode becomes smaller, and the measuring window of the shield case from the object to be measured is reduced. The ratio of the lines of electric force that jumped directly into the tuning-fork vibrator was larger than the total lines of electric force that entered through.

【0013】さらに、音叉型振動子と測定電極の測定面
との距離が縮まり、両者間の結合容量が大きくなること
によって、一旦測定電極に誘起された微小交流信号が音
叉から逃げてしまっていた。なおここで、音叉型振動子
も測定電極の位置方向と同様に測定対象物方向に位置さ
せるという案もあるが、それによってシールドケースか
ら音叉型振動子の先端が飛出してしまい、表面電位計の
小型化要求には対応できない。
Further, the distance between the tuning fork type vibrator and the measurement surface of the measurement electrode is shortened, and the coupling capacitance between the two is increased, so that the minute AC signal once induced in the measurement electrode escapes from the tuning fork. . Here, there is a plan to position the tuning fork vibrator in the direction of the measurement object as well as the position of the measurement electrode, but this causes the tip of the tuning fork vibrator to fly out of the shield case, causing We cannot meet the demand for miniaturization.

【0014】また、音叉型振動子の先端部にごみ等の絶
縁物(不純物)が付着していると、その影響で音叉型振
動子の先端部の電位が本来はGNDでなければならない
ところ、ある電位に帯電してしまい、これが測定電極に
ノイズ分として混入していた。
Further, when an insulator (impurity) such as dust is attached to the tip of the tuning fork type vibrator, the potential of the tip of the tuning fork type vibrator should be GND by its influence. It was charged to a certain potential, and this was mixed in the measurement electrode as noise.

【0015】このため、結果的にS/Nの信号分(S)
が小さくなってしまい、もしくはノイズ分(N)が大き
くなってしまい、表面電位計としての基本的性能が悪化
する傾向にあるという問題点があった。
Therefore, as a result, the S / N signal component (S)
Has become small, or the noise component (N) has become large, and there has been a problem that the basic performance of the surface electrometer tends to deteriorate.

【0016】本発明は、上記のような問題点に着目して
なされたもので、測定信号のS/N比が高く、基本的性
能が向上した非接触式の表面電位計を提供することを目
的としている。
The present invention has been made in view of the above problems, and provides a non-contact type surface electrometer having a high S / N ratio of a measurement signal and improved basic performance. Has an aim.

【0017】[0017]

【課題を解決するための手段】本発明に係る表面電位計
は、測定対象物からの電気力線を受ける測定電極と、そ
の測定電極に入る電気力線の量を時間的に変化させる音
叉型振動子を備え、該音叉型振動子は、固定部と反対側
のフォーク部の両先端部分が互いに近付くように且つ前
記測定電極から離れるように形成し、該フォーク部の両
先端部分の間を通る電気力線を受けて前記測定電極に誘
起される微小信号から前記測定対象物の表面電位を測定
するように構成したものである。
SUMMARY OF THE INVENTION A surface electrometer according to the present invention is a tuning fork type which has a measuring electrode for receiving a line of electric force from an object to be measured and a time-varying amount of the line of electric force entering the measuring electrode. The tuning fork type vibrator is formed such that both tip portions of the fork portion on the side opposite to the fixed portion are close to each other and apart from the measurement electrode, and the fork portion between both tip portions of the fork portion is provided. It is configured to measure the surface potential of the object to be measured from a minute signal induced in the measurement electrode upon receiving a line of electric force passing therethrough.

【0018】また上記の電位計において、音叉型振動子
のフォーク部の両先端部分はハの字型の形状になるよう
にしたものであり、さらに、測定電極に誘起された微小
信号を電圧信号にインピーダンス変換する変換素子を有
するようにしたものである。
Further, in the above electrometer, both end portions of the fork portion of the tuning fork type vibrator are formed in a V shape, and the minute signal induced in the measuring electrode is further converted into a voltage signal. It has a conversion element for impedance conversion.

【0019】[0019]

【発明の実施の形態】図1は本発明に係る非接触式の表
面電位計の概略構成図であり、図2と同一符号は同一構
成部分を示している。
1 is a schematic configuration diagram of a non-contact type surface electrometer according to the present invention, and the same reference numerals as those in FIG. 2 indicate the same components.

【0020】図1において、1は表面電位を測定すべき
感光体などの測定対象物8の電界を受け、その電気力線
7が入射する測定電極、10はその測定対象物8から測
定電極1へ入射する電気力線7をチョッピングして測定
電極1に入る電気力線7の量を時間的に変化させるチョ
ッパー部の音叉型振動子で、固定部10aと反対側のフ
ォーク部10bの両先端部分10cが互いに近付くよう
に且つ上記測定電極1から離れるように折り曲げられて
ハの字型の形状になるように形成されている。
In FIG. 1, reference numeral 1 denotes a measuring electrode which receives an electric field of a measuring object 8 such as a photoconductor whose surface potential is to be measured, and a line of electric force 7 is incident on the measuring electrode 10. A tuning fork type vibrator of a chopper part for chopping the electric force lines 7 incident on the measuring electrode 1 and temporally changing the amount of the electric force lines 7 entering the measuring electrode 1. Both ends of the fork part 10b opposite to the fixed part 10a. The portions 10c are bent so that they come close to each other and away from the measurement electrode 1, and are formed in a V-shape.

【0021】また、3は上記測定電極1に誘起される微
小交流信号を電圧信号にインピーダンス変換して増幅す
るための増幅素子(変換素子)、4は音叉型振動子2に
振動を与える圧電素子、5は上記インピーダンス変換回
路などが構成された回路基板、6は圧電素子4への駆動
信号、測定電極1からの受信信号、及び電源を入出力す
るための接続コネクタ、9は上記の回路基板5を収容し
たシールドケースである。
Further, 3 is an amplifying element (conversion element) for impedance-converting and amplifying a minute AC signal induced in the measuring electrode 1 into a voltage signal, and 4 is a piezoelectric element for vibrating the tuning fork type vibrator 2. Reference numeral 5 is a circuit board on which the impedance conversion circuit and the like are configured, 6 is a connection connector for inputting and outputting a drive signal to the piezoelectric element 4, a reception signal from the measurement electrode 1, and a power source, and 9 is the circuit board described above. 5 is a shield case that accommodates 5.

【0022】なお、上記増幅素子3を有したインピーダ
ンス変換回路は、図3と同様であるので説明は省略す
る。また、全体をシールドケース9で覆った外観形状
は、音叉型振動子10のハの字型の先端部分10cを除
いて図4と同様であり、前面には測定窓が設けられてい
る。
The impedance conversion circuit having the amplification element 3 is the same as that shown in FIG. The external shape of the entire shield case 9 is the same as that of FIG. 4 except for the C-shaped tip portion 10c of the tuning fork vibrator 10, and a measurement window is provided on the front surface.

【0023】上記構成の表面電位計において、音叉型振
動子10のハの字型の形状の両先端部分10cは、音叉
の中心線に沿って測定対象物8よりB方向に入射する電
気力線7の量を時間的に変化させるように、測定対象物
8から見て水平方向(A方向)に物理的に振動する。そ
して、この音叉型振動子10の先端部分10cと近接し
た位置に相対向して、且つ上記電気力線7の入射方向
(B方向)とは反対側の音叉型振動子10の固定部10
a側に測定電極1が設けられており、上記フォーク部1
0bの両先端部分10cの間を通る電気力線7を吸収し
て該測定電極1に誘起される微小交流信号から測定対象
物8の表面電位が測定される。
In the surface electrometer having the above-mentioned structure, both tip ends 10c of the tuning fork type vibrator 10 having the V-shape are electric lines of force incident in the direction B from the measuring object 8 along the center line of the tuning fork. Physically vibrates in the horizontal direction (direction A) when viewed from the measuring object 8 so that the amount of 7 changes with time. Then, the fixed portion 10 of the tuning fork vibrator 10 facing the position close to the tip portion 10c of the tuning fork vibrator 10 and opposite to the incident direction (B direction) of the electric force line 7 is located.
The measurement electrode 1 is provided on the a side, and the fork portion 1 is provided.
The surface potential of the measuring object 8 is measured from the minute AC signal induced in the measuring electrode 1 by absorbing the electric force line 7 passing between both tip portions 10c of 0b.

【0024】ここで本実施例では、音叉型振動子10の
先端形状をハの字型に形成しているので、音叉型振動子
10の振動振幅量はほぼ従来と同様のままで、測定対象
物8から音叉型振動子10に逃げ込む(飛び込む)電気
力線7の量が激減する。また、音叉型振動子10の先端
と測定電極1間の距離を離して結合容量を小さくしてい
るので、測定電極1に誘起された微小交流信号が音叉型
振動子10から逃げる量が激減する。
Here, in this embodiment, since the tip shape of the tuning fork type vibrator 10 is formed in a V shape, the amount of vibration amplitude of the tuning fork type vibrator 10 is almost the same as the conventional one, and the measurement target is The amount of the lines of electric force 7 that escapes (jumps) from the object 8 into the tuning fork type vibrator 10 is drastically reduced. Further, since the distance between the tip of the tuning fork vibrator 10 and the measurement electrode 1 is increased to reduce the coupling capacitance, the amount of the minute AC signal induced in the measurement electrode 1 escaping from the tuning fork vibrator 10 is drastically reduced. .

【0025】さらに、音叉型振動子10の先端部が絶縁
物等の付着によりある電位に帯電した場合でも、音叉型
振動子10と測定電極1の距離が離れているので、測定
電極1に混入するノイズ分も減少する。
Further, even when the tip of the tuning fork type vibrator 10 is charged to a certain potential due to adhesion of an insulator or the like, the tuning fork type vibrator 10 and the measuring electrode 1 are distant from each other, so that they are mixed in the measuring electrode 1. The amount of noise generated is also reduced.

【0026】よって、S/N比における信号分(S)を
大きく、ノイズ分(N)を小さくすることができ、表面
電位計としての基本的性能を大幅に向上することが可能
となる。
Therefore, the signal component (S) in the S / N ratio can be increased and the noise component (N) can be reduced, and the basic performance of the surface electrometer can be significantly improved.

【0027】従来では、装置の小型化に対応すべく測定
電極を小型化しているので、測定電極の検出表面積が小
さくなり、測定対象物から表面電位計の測定窓から入射
される総電気力線に対して、音叉型振動子に直接飛び込
んで当る電気力線の比率が大きくなっていた。
Conventionally, since the measuring electrode is downsized in order to correspond to the downsizing of the device, the detection surface area of the measuring electrode is small, and the total electric force line incident from the measuring object through the measuring window of the surface electrometer. On the other hand, the ratio of the lines of electric force that directly jump into the tuning fork type vibrator and hit is large.

【0028】さらに、音叉型振動子と測定電極の測定面
の距離が縮まり、両者間の結合容量が大きくなることに
よって、一旦測定電極に誘起された微小交流信号が音叉
型振動子に逃げてしまっていた。
Further, the distance between the tuning fork type vibrator and the measuring surface of the measuring electrode is shortened, and the coupling capacitance between the two is increased, so that the minute AC signal once induced in the measuring electrode escapes to the tuning fork type vibrator. Was there.

【0029】また、音叉型振動子の先端にごみ等の絶縁
物(不純物)が付着していると、その影響で音叉型振動
子先端部の電位が本来はGNDでなければならないとこ
ろ、ある電位に帯電してしまい、測定電極にノイズ分と
して混入していた。
Further, if an insulator (impurity) such as dust is attached to the tip of the tuning fork type vibrator, the potential of the tip of the tuning fork type vibrator should originally be GND due to the influence, and a certain potential. It was electrified and was mixed in the measurement electrode as noise.

【0030】よって、結果的にS/N比の信号分(S)
が小さくなってしまい、もしくはノイズ分(N)が大き
くなってしまい、表面電気計の基本的性能は悪化する傾
向にあった。
Therefore, as a result, the signal component (S) of the S / N ratio is obtained.
Becomes smaller, or the noise component (N) becomes larger, and the basic performance of the surface electrometer tends to deteriorate.

【0031】しかし本実施例では、上述のように音叉型
振動子10の先端部をハの字型の形状にしているので、
音叉型振動子10の開口部を広くすることができ、測定
対象物8から音叉型振動子10に逃げ込む電気力線7の
量を激減させることができ、また音叉型振動子10と測
定電極面の距離を離しているので、両者間の結合容量を
小さくすることができ、測定電極1に誘起された微小交
流信号の音叉型振動子10に逃げ込む量を激減させるこ
とができる。
However, in the present embodiment, since the tip of the tuning fork type vibrator 10 is formed in a V shape as described above,
The opening of the tuning fork vibrator 10 can be widened, the amount of electric force lines 7 escaping from the measurement object 8 to the tuning fork vibrator 10 can be drastically reduced, and the tuning fork vibrator 10 and the measurement electrode surface can be reduced. Since the distance is separated from each other, the coupling capacitance between the two can be reduced, and the amount of the minute AC signal induced in the measurement electrode 1 escaping into the tuning fork vibrator 10 can be drastically reduced.

【0032】よって測定信号のS/N比を高めることが
でき、表面電位計としての基本的性能を向上させること
ができる。
Therefore, the S / N ratio of the measurement signal can be increased, and the basic performance of the surface electrometer can be improved.

【0033】[0033]

【発明の効果】以上説明したように、本発明によれば、
音叉型振動子の両先端部分を互いに近付くように且つ測
定電極から離れるように形成したため、測定対象物から
音叉型振動子に飛び込んで当たる電気力線の量が減少す
るとともに、音叉型振動子と測定電極の間の結合容量が
小さくなり、また測定電極に混入するノイズ分も減少
し、測定信号のS/N比が高くなり、基本的性が向上す
るという効果がある。
As described above, according to the present invention,
Since both tips of the tuning fork vibrator are formed so as to come close to each other and away from the measurement electrode, the amount of electric force line that jumps into the tuning fork vibrator from the object to be measured and hits the tuning fork vibrator is reduced. The coupling capacitance between the measurement electrodes is reduced, the amount of noise mixed in the measurement electrodes is reduced, the S / N ratio of the measurement signal is increased, and the basicity is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明に係る表面電位計の概略構成図FIG. 1 is a schematic configuration diagram of a surface electrometer according to the present invention.

【図2】 従来例を示す概略構成図FIG. 2 is a schematic configuration diagram showing a conventional example.

【図3】 インピーダンス変換回路の一例を示す回路図FIG. 3 is a circuit diagram showing an example of an impedance conversion circuit.

【図4】 表面電位計の外観形状を示す斜視図FIG. 4 is a perspective view showing the external shape of a surface electrometer.

【図5】 測定部を拡大して示す構成図FIG. 5 is an enlarged configuration diagram showing a measurement unit.

【符号の説明】[Explanation of symbols]

1 測定電極 3 増幅素子(変換素子) 4 圧電素子 5 回路基板 7 電気力線 8 測定対象物 10 音叉型振動子 10a 固定部 10b フォーク部 10c 先端部分 1 Measuring Electrode 3 Amplifying Element (Converting Element) 4 Piezoelectric Element 5 Circuit Board 7 Electric Force Line 8 Object to be Measured 10 Tuning Fork Vibrator 10a Fixing Part 10b Fork Part 10c Tip Part

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 測定対象物からの電気力線を受ける測定
電極と、その測定電極に入る電気力線の量を時間的に変
化させる音叉型振動子を備え、該音叉型振動子は、固定
部と反対側のフォーク部の両先端部分が互いに近付くよ
うに且つ前記測定電極から離れるように形成し、該フォ
ーク部の両先端部分の間を通る電気力線を受けて前記測
定電極に誘起される微小信号から前記測定対象物の表面
電位を測定することを特徴とする表面電位計。
1. A measuring electrode for receiving a line of electric force from an object to be measured, and a tuning fork type vibrator for temporally changing the amount of the line of electric force entering the measuring electrode. The tuning fork type vibrator is fixed. Formed so that both tip portions of the fork portion on the opposite side of the fork portion are close to each other and apart from the measurement electrode, and are induced in the measurement electrode by receiving an electric force line passing between both tip portions of the fork portion. A surface electrometer, which measures the surface potential of the measurement object from a very small signal.
【請求項2】 音叉型振動子のフォーク部の両先端部分
はハの字型の形状になるようにしたことを特徴とする請
求項1記載の表面電位計。
2. The surface electrometer according to claim 1, wherein both end portions of the fork portion of the tuning fork type vibrator are formed in a V shape.
【請求項3】 測定電極に誘起された微小信号を電圧信
号にインピーダンス変換する変換素子を有するようにし
たことを特徴とする請求項1または2記載の表面電位
計。
3. The surface electrometer according to claim 1, further comprising a conversion element for impedance-converting a minute signal induced in the measurement electrode into a voltage signal.
JP10938096A 1996-04-30 1996-04-30 Surface electrometer Expired - Fee Related JP3673597B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10938096A JP3673597B2 (en) 1996-04-30 1996-04-30 Surface electrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10938096A JP3673597B2 (en) 1996-04-30 1996-04-30 Surface electrometer

Publications (2)

Publication Number Publication Date
JPH09292426A true JPH09292426A (en) 1997-11-11
JP3673597B2 JP3673597B2 (en) 2005-07-20

Family

ID=14508784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10938096A Expired - Fee Related JP3673597B2 (en) 1996-04-30 1996-04-30 Surface electrometer

Country Status (1)

Country Link
JP (1) JP3673597B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000147035A (en) * 1998-11-10 2000-05-26 Xerox Corp Electrostatic voltmeter and method for increasing output signal
JP2003090852A (en) * 2001-09-19 2003-03-28 Tdk Corp Probe and surface potential detection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000147035A (en) * 1998-11-10 2000-05-26 Xerox Corp Electrostatic voltmeter and method for increasing output signal
JP2003090852A (en) * 2001-09-19 2003-03-28 Tdk Corp Probe and surface potential detection device

Also Published As

Publication number Publication date
JP3673597B2 (en) 2005-07-20

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