JPH09286605A - Ozonizer discharger - Google Patents

Abstract

PROBLEM TO BE SOLVED: To drop a gas temp. at an inside of a discharging space between an outside electrode and an inside electrode and to improve an ozone generating efficiency. SOLUTION: A cylindrical metallic electrode 6 is disposed in a closed vessel 14 and a cylindrical dielectric electrode 5 is disposed at the inside of the metallic electrode 6. High voltage is applied between the metallic electrode 6 and the dielectric electrode 5 from a high voltage electric source to form silent discharge at a discharging space (g) between the metallic electrode 6 and the dielectric electrode 5. Ozone is generated from a gaseous ozone starting material at this discharging space (g). A heat generated at the discharging space (g) is radiated to the outside of the dielectric electrode 5 by a heat conductive body 7 fitted in the dielectric electrode 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozonizer discharge device, and more particularly to an ozonizer discharge device capable of improving ozone generation efficiency by effective cooling.

[0002]

2. Description of the Related Art Generally, an ozonizer discharge device comprises a metal electrode and a dielectric electrode, or a pair of dielectric electrodes, and a spacer is inserted between the electrodes to form a minute discharge space. In the ozonizer discharge device, the ozone source gas is flown into the discharge space between the electrodes, and a high voltage is applied between the electrodes to generate silent discharge in the discharge space. Is generated.

By the way, in the ozonizer discharge device, the gas temperature in the discharge space rises due to the silent discharge. When the gas temperature in the discharge space rises, the ozone concentration / yield decreases, so the gas temperature in the discharge space is lowered by cooling the electrodes.

Next, a conventional ozonizer discharge device will be described with reference to FIG. FIG. 7 is a diagram showing an example of a conventional ozonizer discharge device. The ozonizer discharge device includes a cylindrical metal electrode 6 and a dielectric electrode 5 arranged inside the metal electrode 6, and a spacer for forming a discharge space between the dielectric electrode 5 and the metal electrode 6. 13 has been inserted. Further, the dielectric electrode 5 is the conductive film 4 attached to the inner surface.
have.

In FIG. 7, ozone source gas flows into the airtight container 14 from the gas inlet pipe 11, flows through the discharge space formed between the dielectric electrode 5 and the metal electrode 6, and flows out from the gas outlet pipe 12. . During this time, the dielectric electrode 5 and the metal electrode 6
Then, a high voltage of alternating current is applied from the power source 1 through the fuse 2 to the high voltage power supply terminal 3. In this case, silent discharge is formed in the discharge space and ozone is generated from the ozone source gas. The heat generated by the silent discharge is cooled by the cooling water flowing into the metal electrode 6 from the inlet 9 and flowing out from the outlet 10. As a result, the gas temperature rise in the discharge space is suppressed.

[0006]

By the way, the above-mentioned conventional ozonizer discharge device has the following problems to be solved. That is, in the ozonizer discharge device shown in FIG. 7, only the metal electrode 6 side is water-cooled, so that the temperature of the dielectric electrode 5 side facing the metal electrode 6 rises due to the silent discharge. As a result, the gas temperature in the discharge space rises and the ozone concentration / yield decreases.

The present invention has been made in view of the above points, and an object thereof is to provide an ozonizer discharge device capable of improving the ozone generation efficiency by effectively cooling.

[0008]

The present invention provides a sealed container having an ozone source gas inlet tube, an outer electrode disposed in the sealed container, and an outer electrode disposed inside the outer electrode. A cylindrical inner electrode that forms a discharge space in the inner electrode, a power source that applies a voltage between the outer electrode and the inner electrode, and a heat that is inserted into the cylindrical inner electrode and that guides the heat inside the inner electrode to the outside An ozonizer discharge device comprising: a conductor.

According to the present invention, a silent discharge is formed in the discharge space between the outer electrode and the inner electrode by applying a voltage between the outer electrode and the inner electrode. The ozone source gas flowing into the sealed container from the ozone source gas inlet pipe becomes ozone by silent discharge in the discharge space. The heat generated when the ozone source gas becomes ozone is radiated to the outside of the inner electrode by the heat conductor provided in the inner electrode. Therefore, the gas temperature in the discharge space can be lowered.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an embodiment of an ozonizer discharge device according to the present invention.

As shown in FIG. 1, the ozonizer discharge device includes a sealed container 14 having an inlet pipe 11 and an outlet pipe 12,
A cylindrical metal electrode (outer electrode) 6 arranged in the sealed container 14 and a cylindrical dielectric electrode (inner side) which is arranged inside the metal electrode 6 and forms a discharge space g between the metal electrode 6 and the metal electrode 6. Electrode) 5.

The metal electrode 6 forms an annular space between itself and the inner surface of the hermetically sealed container 14. This metal electrode 6
Cooling water 8 is introduced into the space between the inner surface of the sealed container 14 and the inlet 9
The cooling water 8 flows out from the outlet 10.

Further, as shown in FIG. 1, the dielectric electrode 5 has a conductive film 4 attached to its inner surface, and a discharge space g is formed between the dielectric electrode 5 and the metal electrode 6. In order to do so, the spacer 13 is interposed.

The metal electrode 6 is grounded, while the conductive film 4 of the dielectric electrode 5 is connected to the high voltage power supply 1 via the high voltage power supply terminal 3 and the fuse 2. The high voltage power supply 1 is grounded.

A heat conductor 7 formed by winding a thin plate is inserted in the dielectric electrode 5. In this case, the high-voltage power supply terminal 3 is arranged on the open end 5a side of the dielectric electrode 5, while the heat conductor 7 is arranged on the closed end 5b side of the dielectric electrode 5.

Next, the operation of this embodiment having the above structure will be described. First, the ozone source gas is the inlet pipe 1
1 flows into the sealed container 14 and passes through the discharge space g between the dielectric electrode 5 and the metal electrode 6. During this time, a high voltage is applied between the conductive film 4 of the dielectric electrode 5 and the metal electrode 6 via the fuse 2 and the high voltage power supply terminal 3 by the high voltage power supply 1. In this case, silent discharge is formed in the discharge space g between the dielectric electrode 5 and the metal electrode 6, and ozone is generated from the ozone source gas.

When ozone is generated from the ozone source gas,
Although heat is generated, the metal electrode 6 is cooled by the cooling water 8. The heat inside the dielectric electrode 5 is dissipated to the outside of the dielectric electrode 5 by the heat conductor 7 having high heat conduction. In this way, since the metal electrode 6 and the dielectric electrode 5 are cooled, respectively, the gas temperature in the discharge space g between the metal electrode 6 and the dielectric electrode 5 can be lowered, and thus the ozone concentration can be reduced. And the ozone yield can be improved.

In the embodiment shown in FIG. 1, the ozonizer discharge device is composed of the single-tube metal electrode 6 and the single-tube dielectric electrode 5, but the present invention is not limited to this. You may comprise from the metal electrode 6 and the multi-tube dielectric electrode 5.

Next, a modification of the ozonizer discharge device will be described with reference to FIG. The modification shown in FIG. 2 is one in which the ozone source gas inlet pipe 11 is extended into the sealed container 14 and the inlet pipe 11 is inserted into the dielectric electrode 5. Others are substantially the same as the embodiment shown in FIG. Is.

In FIG. 2, the same parts as those of the embodiment shown in FIG. 1 are designated by the same reference numerals and detailed description thereof will be omitted.
That is, as shown in FIG. 2, the inlet tube 11 provided in the hermetically sealed container 14 has the dielectric electrode 5 inside the hermetically sealed container 14.
Has been inserted inside. In this case, the inlet pipe 11 extends from the open end 5a of the dielectric electrode 5 along the inside of the heat conductor 7 arranged in the dielectric electrode 5, and the tip 11a of the inlet pipe 11 is the closed end of the dielectric electrode 5. It has reached near 5b.

In FIG. 2, from the inlet pipe 11 to the sealed container 1
The ozone source gas flowing into 4 is sent to the closed end 5b of the dielectric electrode 5, and then moves along the inner surface of the dielectric electrode 5 to the open end 5a while cooling the inner surface. Since the inner surface of the dielectric electrode 5 is cooled by the ozone source gas in this way, the gas in the discharge space g between the metal electrode 6 and the dielectric electrode 5 can be cooled more reliably.

Next, a further modified example of the ozonizer discharge device will be described with reference to FIG. In the modification shown in FIG. 3, the high-voltage power supply terminal 3 is arranged on the closed end 5b side of the dielectric electrode 5, and the heat conductor 7 is arranged on the open end 5a side, and the others are shown in FIG. It is substantially the same as the embodiment. In FIG. 3, the same parts as those of the embodiment shown in FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted.

In FIG. 3, the heat conductor 7 is replaced by the dielectric electrode 5
By arranging it on the side of the opening end 5a, the heat in the dielectric electrode 5 can be radiated more reliably from the opening end 5a to the outside.

Next, a further modification of the ozonizer discharge device will be described with reference to FIG. In the modification shown in FIG. 4, the inlet tube 11 is extended along the inside of the heat conductor 7 in the dielectric electrode 5, and the high voltage power supply terminal 3 is connected to the closed end 5 of the dielectric electrode 5.
It is arranged on the b side, and is otherwise substantially the same as the embodiment shown in FIG.

In FIG. 4, the same parts as those of the embodiment shown in FIG. 1 are designated by the same reference numerals and detailed description thereof will be omitted. That is, as shown in FIG.
It extends inward and extends along the inside of the heat conductor 7 in the dielectric electrode 5, and its tip 11a has a closed end 5 of the dielectric electrode 5.
It has reached near b. The high-voltage power supply terminal 3 is arranged on the closed end 5b side of the dielectric electrode 5, and the heat conductor 7
Are arranged on the side of the open end 5a of the dielectric electrode 5.

Next, a further modification of the ozonizer discharge device will be described with reference to FIG. In the modification shown in FIG. 6, the heat conductor 7 arranged in the dielectric electrode 5 is made of a conductive material, the high-voltage power supply terminal is removed, and the inlet pipe 1
1 is extended along the inside of the heat conductor 7, and other parts are substantially the same as the embodiment shown in FIG.

In FIG. 6, the same parts as those of the embodiment shown in FIG. 1 are designated by the same reference numerals and detailed description thereof will be omitted.

As shown in FIG. 6, the heat conductor 7 is closely contacted within the dielectric electrode 5, and the heat conductor 7 is in contact with the conductive film 4 of the dielectric electrode 5. The heat conductor 7 is connected to the high-voltage power supply 1 via the fuse 2. The inlet pipe 11 extends from the open end 5a of the dielectric electrode 5 along the inside of the heat conductor 7, and its tip 11a reaches the closed end 5b of the dielectric electrode 5.

Next, a further modification of the ozonizer discharge device will be described with reference to FIG. The modification shown in FIG. 5 is the same as the embodiment shown in FIG. 1 except that the heat conductor 7 is made of a conductive material and the high voltage power supply terminal is removed.

In FIG. 5, the same parts as those of the embodiment shown in FIG. 1 are designated by the same reference numerals and detailed description thereof will be omitted.

As shown in FIG. 5, the heat conductor 7 is closely contacted in the dielectric electrode 5, and the heat conductor 7 is in contact with the conductive film 4 of the dielectric electrode 5. The heat conductor 7 is connected to the high-voltage power supply 1 via the fuse 2. In FIG. 5, the heat conductor 7 can be used as a high voltage power supply terminal.

In each of the above embodiments, an example of forming a silent discharge between the outer metal electrode 6 and the inner dielectric electrode 5 has been described, but the dielectric electrodes are arranged on the outer and inner sides, Silent discharge may be formed between the outer dielectric electrode and the inner dielectric electrode.

Further, the heat conductor 7 is not limited to one made of a conductive substance, but may be made of an insulating substance.

[0034]

As described above, according to the present invention, the gas temperature in the discharge space between the outer electrode and the inner electrode can be lowered, and therefore the ozone generation efficiency in the discharge space is improved. Can be made.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of an ozonizer discharge device according to the present invention.

FIG. 2 is a diagram showing a modification of the ozonizer discharge device according to the present invention.

FIG. 3 is a diagram showing another modification of the ozonizer discharge device according to the present invention.

FIG. 4 is a diagram showing another modification of the ozonizer discharge device according to the present invention.

FIG. 5 is a diagram showing another modification of the ozonizer discharge device according to the present invention.

FIG. 6 is a diagram showing another modification of the ozonizer discharge device according to the present invention.

FIG. 7 is a diagram showing a conventional ozonizer discharge device.

[Explanation of symbols]

 1 High-voltage power supply 2 Fuse 3 High-voltage power supply terminal 4 Conductive film 5 Dielectric electrode 6 Metal electrode 7 Thermal conductor 8 Cooling water 9 Inlet 10 Outlet 11 Inlet pipe 12 Outlet pipe 13 Spacer 14 Airtight container

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Akira Ishii 2-1 Ukishima-cho, Kawasaki-ku, Kawasaki-shi, Kanagawa Prefecture Inside the Toshiba Hamakawasaki Plant (72) Inventor Kouji Kanamaru 1 Toshiba-cho, Fuchu-shi, Tokyo Address: Toshiba Corporation Fuchu Plant (72) Inventor Yuji Okita 2-24-1, Harumi-cho, Fuchu-shi, Tokyo Toshiba FA System Engineering Co., Ltd.

Claims (3)

[Claims] 1. A sealed container having an ozone source gas inlet tube, an outer electrode disposed in the sealed container, and a cylindrical shape disposed inside the outer electrode and forming a discharge space between the outer electrode and the outer electrode. Inner electrode, a power supply for applying a voltage between the outer electrode and the inner electrode, and a heat conductor that is inserted into the cylindrical inner electrode and that guides the heat inside the inner electrode to the outside of the inner electrode. A unique ozonizer discharge device. 2. The ozonizer discharge device according to claim 1, wherein the ozone source gas inlet tube is inserted in the inner electrode. 3. The ozonizer discharge device according to claim 1, wherein the heat conductor is made of a conductive material, and the inner electrode is connected to a power source through the heat conductor.