JPH09283243A - Electric connector - Google Patents
Electric connectorInfo
- Publication number
- JPH09283243A JPH09283243A JP8117003A JP11700396A JPH09283243A JP H09283243 A JPH09283243 A JP H09283243A JP 8117003 A JP8117003 A JP 8117003A JP 11700396 A JP11700396 A JP 11700396A JP H09283243 A JPH09283243 A JP H09283243A
- Authority
- JP
- Japan
- Prior art keywords
- printed circuit
- circuit board
- insulating housing
- contact
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coupling Device And Connection With Printed Circuit (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、電気コネクタ、特
にプリント回路基板と他のプリント回路基板とを接続す
るためのスプリング接点を有する電気コネクタに関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrical connector, and more particularly to an electrical connector having spring contacts for connecting a printed circuit board to another printed circuit board.
【０００２】[0002]
【従来の技術】従来のスプリング接点を有する電気コネ
クタとしては、例えば図４に示すものが知られている
（特公平６−８５３４２号公報参照）。図４において、
電気コネクタ１００は、絶縁ハウジング１１０と、この
絶縁ハウジング１００に１列状に取付け固定された複数
のスプリング接点１２０とを具備している。絶縁ハウジ
ング１１０は、この絶縁ハウジング１１０の横断方向に
沿って列状に形成されたスプリング接点受容溝（図示せ
ず）、この受容溝に交差する取付ポスト取付穴（図示せ
ず）及びスプリング接点受容溝に連通する上面に開口し
たスロット１１１を有し、一方、スプリング接点１２０
は、絶縁ハウジング１１０のスプリング接点受容溝に受
容される接点パッド１２１、この接点パッド１２１に交
差する前記取付ポスト取付穴に取付け固定される取付ポ
スト１２２、接点パッド１２１に連通する前記スロット
１１１に受容されるスプリングアーム１２３及びこのス
プリングアーム１２３に設けられた絶縁ハウジング１１
０から上方に突出するＩＣチップ接触部１２４を有して
いる。そして、絶縁ハウジング１１０に接点スプリング
１２０を取付け固定した電気コネクタ１００は、絶縁ハ
ウジング１１０の下面に突設した取付ペグ１１２によ
り、基体１６０上に載置されたプリント回路基板１３０
に取り付けられ、一方、プラスチックホルダ１４１に固
定されたＩＣチップ１４０がパネル１５０と電気コネク
タ１００のＩＣチップ接触部１２４との間に差し込まれ
る。これにより、電気コネクタ１００にある接点スプリ
ング１２０の接点パッド１２１がプリント回路基板１３
０上の導電路に接触し、ＩＣチップ接触部１２４がＩＣ
チップ１４０の下面に弾性接触し、プリント回路基板１
３０上の導電路とＩＣチップ１４０とが導通するもので
あった。2. Description of the Related Art As a conventional electrical connector having a spring contact, for example, one shown in FIG. 4 is known (see Japanese Patent Publication No. 6-85342). In FIG.
The electrical connector 100 includes an insulating housing 110 and a plurality of spring contacts 120 mounted and fixed to the insulating housing 100 in a row. The insulating housing 110 includes a spring contact receiving groove (not shown) formed in a row along a transverse direction of the insulating housing 110, a mounting post mounting hole (not shown) intersecting the receiving groove, and a spring contact receiving portion. It has a slot 111 on the top that communicates with the groove, while the spring contact 120
Is received in the spring contact receiving groove of the insulating housing 110, in the mounting post 122 fixed to the mounting post mounting hole intersecting with the contact pad 121, and in the slot 111 communicating with the contact pad 121. Spring arm 123 and insulating housing 11 provided on the spring arm 123
It has an IC chip contact portion 124 protruding upward from 0. The electrical connector 100 having the contact spring 120 mounted and fixed to the insulating housing 110 is mounted on the base 160 by the mounting peg 112 projecting from the lower surface of the insulating housing 110.
On the other hand, the IC chip 140 fixed to the plastic holder 141 is inserted between the panel 150 and the IC chip contact portion 124 of the electric connector 100. As a result, the contact pads 121 of the contact springs 120 on the electric connector 100 are connected to the printed circuit board 13.
0, the IC chip contact portion 124 contacts the conductive path on
The printed circuit board 1 is in elastic contact with the bottom surface of the chip 140.
The conductive path on 30 and the IC chip 140 are electrically connected.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、この従
来のスプリング接点を有する電気コネクタにあっては、
スプリング接点１２０が絶縁ハウジング１１０の横断方
向に１列状に配置されているので、プラスチックホルダ
１４１に固定されたＩＣチップ１４０の下面が絶縁ハウ
ジング１１０から上方に突出するスプリング接点１２０
のＩＣチップ接触部１２４に接触した際に、ＩＣチップ
１４０に曲り（反り）が生じるという問題点があった。However, in the conventional electric connector having the spring contact,
Since the spring contacts 120 are arranged in a row in the transverse direction of the insulating housing 110, the lower surface of the IC chip 140 fixed to the plastic holder 141 projects upward from the insulating housing 110.
There is a problem that the IC chip 140 is bent (warped) when it comes into contact with the IC chip contact portion 124.
【０００４】従って、本発明の目的は、プリント回路基
板が絶縁ハウジングから上方に突出するスプリング接点
の接触部に接触した際に、そのプリント回路基板に生じ
る曲り（反り）を少なくするプリント回路基板と他のプ
リント回路基板とを接続するためのスプリング接点を有
する電気コネクタを提供することにある。Therefore, an object of the present invention is to provide a printed circuit board which reduces bending (warpage) occurring in the printed circuit board when the printed circuit board comes into contact with a contact portion of a spring contact protruding upward from an insulating housing. An object of the present invention is to provide an electrical connector having spring contacts for connecting to another printed circuit board.
【０００５】[0005]
【課題を解決するための手段】本発明に係る電気コネク
タは、略矩形の四辺を有する絶縁ハウジングと、該絶縁
ハウジングの上面に形成された開口から上方に突出する
接触部を有すると共に前記絶縁ハウジングに取付固定さ
れる複数のスプリング接点とを具備し、該複数のスプリ
ング接点が、前記絶縁ハウジングの前記四辺に沿う列状
であって、その各列が前記四辺各辺の一方側に片寄り前
記絶縁ハウジングの中心に点対称となるように配置され
ていることを特徴とするものである。An electrical connector according to the present invention has an insulating housing having substantially rectangular four sides, a contact portion projecting upward from an opening formed in an upper surface of the insulating housing, and the insulating housing. A plurality of spring contacts attached and fixed to the insulating housing, the plurality of spring contacts being in a row along the four sides of the insulating housing, each row being offset to one side of each of the four sides. It is characterized in that it is arranged so as to be point-symmetrical to the center of the insulating housing.
【０００６】[0006]
【発明の実施の形態】本発明の実施の形態を図面を参照
して説明する。図１は本発明の電気コネクタの平面図、
図２は本発明の電気コネクタ、搭載用プリント回路基板
及び接触用プリント回路基板の関係を示す正面図、図３
は図２の３−３線に沿った断面図である。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of an electric connector of the present invention,
2 is a front view showing the relationship between the electrical connector of the present invention, the mounting printed circuit board, and the contact printed circuit board, FIG.
FIG. 3 is a sectional view taken along line 3-3 of FIG.
【０００７】これらの図において、電気コネクタ１は、
絶縁ハウジング１０と、該絶縁ハウジング１０に取付固
定される複数のスプリング接点２０とから構成されてい
る。In these figures, the electrical connector 1 is
It is composed of an insulating housing 10 and a plurality of spring contacts 20 mounted and fixed to the insulating housing 10.
【０００８】絶縁ハウジング１０は、略矩形の四辺を有
するハウジング本体１１有し、このハウジング本体１１
の下面には、複数のスプリング接点基部受容溝１２が形
成されている。複数のスプリング接点基部受容溝１２
は、ハウジング本体１１の四辺に沿う列状であって、そ
の各列が前記四辺各辺の一方側に片寄りハウジング本体
１１の中心に対して点対称となるように配置されてい
る。互いに隣接するスプリング接点基部受容溝１２のピ
ッチは約０．５ｍｍである。又、ハウジング本体１１に
は、スプリング接点基部受容溝１２から上方に延出する
取付ポスト取付穴１４及びスプリング部収容空間１３が
形成されている。ハウジング本体１１の上面には、スプ
リング部収容空間１３に連通する開口１５が形成され、
この開口１５は縦長の矩形断面を有し後述するスプリン
グ接点２０の接触部２５が自由に移動できるようになっ
ている。なお、互いに隣接する開口１５の配列は、千鳥
配列で構成されている。更に、ハウジング本体１１の左
右方向（図１において左右方向）及び前後方向（図１に
おいて上下方向）の中心部には接触用プリント回路基板
５０が当接する基台部１６が設けられ、この基台部１６
は周囲のハウジング本体１１の上面よりわずかに（約
０．１ｍｍ程度）突出したものとなっている。これによ
り、接触用プリント回路基板５０上のパターンの厚み及
び半田メッキ等の厚みにより生ずる基材下面とパターン
下面との段差が、接触用プリント回路基板５０が基台部
１６上に当接した際に吸収されることになる。この基台
部１６の中心には、接触用プリント回路基板５０を電気
コネクタ１に取り付けるための取付ビス用貫通孔１７が
形成され、ハウジング本体１１の上面には接触用プリン
ト回路基板５０を位置決めするための複数の位置決めボ
ス３０が突設されている。The insulating housing 10 has a housing body 11 having substantially rectangular four sides.
A plurality of spring contact base receiving grooves 12 are formed on the lower surface of the. Multiple spring contact base receiving grooves 12
Are arranged in rows along the four sides of the housing body 11, and each row is arranged so as to be offset to one side of each side of the four sides and point-symmetric with respect to the center of the housing body 11. The pitch of the spring contact base receiving grooves 12 adjacent to each other is about 0.5 mm. Further, the housing main body 11 is formed with a mounting post mounting hole 14 and a spring portion accommodating space 13 extending upward from the spring contact base receiving groove 12. An opening 15 communicating with the spring accommodating space 13 is formed on the upper surface of the housing body 11.
The opening 15 has a vertically long rectangular cross section so that a contact portion 25 of a spring contact 20 described later can freely move. The openings 15 adjacent to each other are arranged in a staggered arrangement. Further, a base 16 for contacting the contact printed circuit board 50 is provided at the center of the housing body 11 in the left-right direction (left-right direction in FIG. 1) and the front-back direction (up-down direction in FIG. 1). Part 16
Is slightly (about 0.1 mm) projected from the upper surface of the surrounding housing body 11. Thus, when the contact printed circuit board 50 comes into contact with the base portion 16, a step between the lower surface of the base material and the lower surface of the pattern caused by the thickness of the pattern on the contact printed circuit board 50 and the thickness of the solder plating or the like is caused. Will be absorbed by. A mounting screw through hole 17 for mounting the contact printed circuit board 50 to the electric connector 1 is formed in the center of the base portion 16, and the contact printed circuit board 50 is positioned on the upper surface of the housing body 11. A plurality of positioning bosses 30 for protruding are provided.
【０００９】一方、各々のスプリング接点２０は、絶縁
ハウジング１０の各々のスプリング接点基部受容溝１２
に受容される基部２１と、基部２１から絶縁ハウジング
１０の外方に延出するタイン部２２と、基部２１から上
方に延出し絶縁ハウジング１０の各々の取付ポスト取付
穴１４に取付固定される突起２６を有する取付ポスト２
３と、基部２１から上方に延出し絶縁ハウジング１０の
各々のスプリング部収容空間１３に収容される波形（Ｓ
字形）のスプリング部２４と、スプリング部２４から上
方に延出して絶縁ハウジング１０の各々の開口１５から
上方に突出する接触部２５とを具備し、金属シート
（板）を打ち抜くことによって製作される。スプリング
部２４は、Ｓ字形でなく他の形でもよい。On the other hand, each spring contact 20 has a respective spring contact base receiving groove 12 in the insulating housing 10.
21, a tine portion 22 extending from the base portion 21 to the outside of the insulating housing 10, and a protrusion extending upward from the base portion 21 to be fixedly attached to each mounting post mounting hole 14 of the insulating housing 10. Mounting post 2 having 26
3 and a waveform (S that extends upward from the base 21 and is housed in each spring part housing space 13 of the insulating housing 10 (S
And a contact portion 25 extending upward from the spring portion 24 and protruding upward from each opening 15 of the insulating housing 10 and manufactured by punching a metal sheet (plate). . The spring portion 24 may have another shape instead of the S shape.
【００１０】そして、複数のスプリング接点２０の各々
の基部２１を絶縁ハウジング１０のそれぞれのスプリン
グ接点基部受容溝１２内に挿入すると共に各々の取付ポ
スト２３を各々の取付ポスト取付穴１４に取付固定する
ことにより、電気コネクタ１が完成する。この際に、複
数のスプリング接点２０は絶縁ハウジング１０の四辺に
沿う列状であって、その各列が前記四辺各辺の一方側に
片寄り絶縁ハウジングの１０の中心に対して点対称とな
るように配置され、互いに隣接するスプリング接点２０
の接触部２５は千鳥配列で配列される。Then, each base 21 of the plurality of spring contacts 20 is inserted into each spring contact base receiving groove 12 of the insulating housing 10, and each mounting post 23 is mounted and fixed in each mounting post mounting hole 14. As a result, the electrical connector 1 is completed. At this time, the plurality of spring contacts 20 are arranged in rows along the four sides of the insulating housing 10, and each row is offset to one side of each side of the four sides and is point-symmetric with respect to the center of the insulating housing 10. Spring contacts 20 arranged adjacent to each other
The contact portions 25 of are arranged in a staggered arrangement.
【００１１】次に、図２及び図３に基づいて、上述の電
気コネクタ１を搭載用プリント回路基板４０上に搭載
し、接触用プリント回路基板５０と搭載用プリント回路
基板４０とを接続する方法について説明する。Next, referring to FIGS. 2 and 3, a method of mounting the above-mentioned electrical connector 1 on the mounting printed circuit board 40 and connecting the contact printed circuit board 50 and the mounting printed circuit board 40. Will be described.
【００１２】先ず、電気コネクタ１を搭載用プリント回
路基板４０上に搭載し、電気コネクタ１の接点パッド２
２を搭載用プリント回路基板４０上の導電路に半田接続
し、電気コネクタ１を搭載用プリント回路基板４０上に
取り付ける。次いで、接触用プリント回路基板５０に形
成された位置決め用貫通孔５１を電気コネクタ１の位置
決めボス３０に挿入して接触用プリント回路基板５０を
電気コネクタ１に対して位置決めし、取付ビス（図示せ
ず）を接触用プリント回路基板５０に形成された貫通孔
５２、電気コネクタ１の取付ビス用貫通孔１７及び搭載
用プリント回路基板４０に形成された貫通孔４１に挿通
して、搭載用プリント回路基板４０の下方からナット
（図示せず）で締め付ける。ナットは搭載用プリント回
路基板４０内にインサート成形されたものであってもよ
い。これにより、接触用プリント回路基板５０は電気コ
ネクタ１に固定され、接触用プリント回路基板５０の下
面は基台部１６上に当接すると共に接触用プリント回路
基板５０の下面に形成された導電路はスプリング接点２
０の接触部２５と弾性接触し、搭載用プリント回路基板
４０の導電路と導通することになる。この際に、スプリ
ング接点２０は絶縁ハウジング１０の四辺に沿う列状で
あって、その各列が絶縁ハウジング１０の四辺各辺の一
方側に片寄り絶縁ハウジング１０に対して点対称となる
ように配置されているので、接触用プリント回路基板５
０は電気コネクタ１のスプリング接点２０と縦横の四方
において接触することになり、スプリング接点を縦１列
又は横１列に配置した場合と比較して接触用プリント回
路基板５０の曲り（反り）は少ないものとすることがで
き、又、スプリング接点が配置されないスペースが少な
くスプリング接点を高密度に実装することができ、電気
コネクタ１をコンパクトかつ小型の形状で提供すること
ができる。更に、互いに隣接するスプリング接点２０の
接触部２５は千鳥配列で配列されているので、より一層
スプリング接点が配置されないスペースが少なくなり、
スプリング接点を絶縁ハウジングに対し高密度に実装で
きる。なお、電気コネクタ１の基台部１６が突出して形
成され、接触用プリント回路基板５０の基材面とパター
ン面との段差が接触用プリント回路基板５０が基台部１
６上に当接した際に吸収されるので、接触用プリント回
路基板５０の曲り（反り）はより一層少なくなる。First, the electrical connector 1 is mounted on the mounting printed circuit board 40, and the contact pads 2 of the electrical connector 1 are mounted.
2 is soldered to the conductive path on the mounting printed circuit board 40, and the electrical connector 1 is mounted on the mounting printed circuit board 40. Next, the positioning through hole 51 formed in the contact printed circuit board 50 is inserted into the positioning boss 30 of the electric connector 1 to position the contact printed circuit board 50 with respect to the electric connector 1, and a mounting screw (not shown). No.) is inserted into the through hole 52 formed in the printed circuit board for contact 50, the through hole 17 for mounting screw of the electric connector 1 and the through hole 41 formed in the printed circuit board for mounting 40, and the printed circuit for mounting is inserted. Tighten with a nut (not shown) from below the substrate 40. The nut may be insert-molded in the mounting printed circuit board 40. As a result, the contact printed circuit board 50 is fixed to the electrical connector 1, the lower surface of the contact printed circuit board 50 abuts on the base portion 16, and the conductive path formed on the lower surface of the contact printed circuit board 50 is Spring contact 2
It comes into elastic contact with the contact portion 25 of 0 and becomes conductive with the conductive path of the mounting printed circuit board 40. At this time, the spring contacts 20 are arranged in rows along the four sides of the insulating housing 10, and each row is offset to one side of each side of the insulating housing 10 so as to be point-symmetric with respect to the insulating housing 10. Since it is arranged, the printed circuit board for contact 5
0 is in contact with the spring contacts 20 of the electrical connector 1 in all four directions, and the bending (warping) of the contact printed circuit board 50 is smaller than that in the case where the spring contacts are arranged in one vertical row or one horizontal row. The number of the spring contacts can be reduced, and the space where the spring contacts are not disposed can be reduced, so that the spring contacts can be mounted at high density, and the electrical connector 1 can be provided in a compact and small shape. Further, since the contact portions 25 of the spring contacts 20 adjacent to each other are arranged in a staggered arrangement, the space where the spring contacts are not arranged is further reduced,
The spring contacts can be mounted densely on the insulating housing. The base portion 16 of the electrical connector 1 is formed so as to project, and the step between the base material surface and the pattern surface of the contact printed circuit board 50 is formed by the contact printed circuit board 50.
Since the contact printed circuit board 50 is absorbed when the printed circuit board 50 is contacted with the upper surface 6, the bending (warpage) of the contact printed circuit board 50 is further reduced.
【００１３】[0013]
【発明の効果】請求項１に係る発明によれば、複数のス
プリング接点が、絶縁ハウジングの四辺に沿う列状であ
って、その各列が前記四辺各辺の一方側に片寄り絶縁ハ
ウジングの中心に対して点対称となるように配置されて
いるので、接触用プリント回路基板が絶縁ハウジングか
ら上方に突出する接触部に接触した際に、接触用プリン
ト回路基板はスプリング接点の接触部と縦横の四方にお
いて接触することになり、スプリング接点を縦１列又は
横１列に配置した場合と比較して接触プリント回路基板
の曲り（反り）を少ないものとすることができると共に
スプリング接点が配置されない絶縁ハウジングのスペー
スが少なくスプリング接点を高密度に実装することがで
き、電気コネクタをコンパクトかつ小型の形状で提供す
ることができる。According to the first aspect of the present invention, the plurality of spring contacts are arranged in rows along the four sides of the insulating housing, and each row is offset to one side of each of the four sides of the insulating housing. Since the contact printed circuit board is arranged so as to be point-symmetric with respect to the center, when the contact printed circuit board comes into contact with the contact portion protruding upward from the insulating housing, the contact printed circuit board is aligned with the contact portion of the spring contact vertically and horizontally. The contact printed circuit board can be less bent (warped) as compared with the case where the spring contacts are arranged in one row or one row, and the spring contacts are not arranged. The space of the insulating housing is small and the spring contacts can be mounted at a high density, and the electric connector can be provided in a compact and small shape.
【図１】本発明の電気コネクタの平面図である。FIG. 1 is a plan view of an electric connector of the present invention.
【図２】本発明の電気コネクタ、搭載用プリント回路基
板及び接触用プリント回路基板の関係を示す正面図であ
る。FIG. 2 is a front view showing the relationship between the electrical connector, the mounting printed circuit board, and the contact printed circuit board of the present invention.
【図３】図２の３−３線に沿った断面図である。FIG. 3 is a sectional view taken along line 3-3 in FIG. 2;
【図４】従来の電気コネクタを示し、（Ａ）は電気コネ
クタの平面図、（Ｂ）はプリント回路基板に取り付けら
れると共にＩＣチップを読み取るように配置された電気
コネクタの部分断面図である。FIG. 4 shows a conventional electrical connector, (A) is a plan view of the electrical connector, and (B) is a partial cross-sectional view of the electrical connector mounted on a printed circuit board and arranged to read an IC chip.
【符号の説明】 １ 電気コネクタ １０ 絶縁ハウジング ２０ スプリング接点 ２５ 接触部 ４０ 搭載用プリント回路基板 ５０ 接触用プリント回路基板[Explanation of reference numerals] 1 electrical connector 10 insulating housing 20 spring contact 25 contact portion 40 printed circuit board for mounting 50 printed circuit board for contact
Claims (1)
と、該絶縁ハウジングの上面に形成した開口から上方に
突出する接触部を有すると共に前記絶縁ハウジングに取
付固定される複数のスプリング接点とを具備し、 該複数のスプリング接点が、前記絶縁ハウジングの前記
四辺に沿う列状であって、その各列が前記四辺各辺の一
方側に片寄り前記絶縁ハウジングの中心に点対称となる
ように配置されていることを特徴とする電気コネクタ。1. An insulating housing having substantially rectangular four sides, and a plurality of spring contacts having a contact portion protruding upward from an opening formed in an upper surface of the insulating housing and being fixedly attached to the insulating housing. The plurality of spring contacts are arranged in rows along the four sides of the insulating housing, and each row is arranged so as to be offset to one side of each of the four sides and point-symmetrical to the center of the insulating housing. An electrical connector characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11700396A JP3701738B2 (en) | 1996-04-15 | 1996-04-15 | Electrical connector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11700396A JP3701738B2 (en) | 1996-04-15 | 1996-04-15 | Electrical connector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09283243A true JPH09283243A (en) | 1997-10-31 |
| JP3701738B2 JP3701738B2 (en) | 2005-10-05 |
Family
ID=14701064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11700396A Expired - Fee Related JP3701738B2 (en) | 1996-04-15 | 1996-04-15 | Electrical connector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3701738B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007333680A (en) * | 2006-06-19 | 2007-12-27 | Tokyo Electron Ltd | Probe card |
| JP2008224677A (en) * | 2008-04-21 | 2008-09-25 | Tokyo Electron Ltd | Probe card |
-
1996
- 1996-04-15 JP JP11700396A patent/JP3701738B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007333680A (en) * | 2006-06-19 | 2007-12-27 | Tokyo Electron Ltd | Probe card |
| JP4522975B2 (en) * | 2006-06-19 | 2010-08-11 | 東京エレクトロン株式会社 | Probe card |
| JP2008224677A (en) * | 2008-04-21 | 2008-09-25 | Tokyo Electron Ltd | Probe card |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3701738B2 (en) | 2005-10-05 |
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