JPH09279399A - Divided insoluble electrode for electroplating - Google Patents

Divided insoluble electrode for electroplating

Info

Publication number
JPH09279399A
JPH09279399A JP11539396A JP11539396A JPH09279399A JP H09279399 A JPH09279399 A JP H09279399A JP 11539396 A JP11539396 A JP 11539396A JP 11539396 A JP11539396 A JP 11539396A JP H09279399 A JPH09279399 A JP H09279399A
Authority
JP
Japan
Prior art keywords
electrode
electroplating
split type
type insoluble
electrode short
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP11539396A
Other languages
Japanese (ja)
Inventor
Hiroshi Wakiyama
宏 脇山
Nobuhiko Hasegawa
暢彦 長谷川
Keiji Kamio
圭司 神尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP11539396A priority Critical patent/JPH09279399A/en
Publication of JPH09279399A publication Critical patent/JPH09279399A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a divided insoluble electrode for electroplating with which the secure mounting of electrode short pieces to an electrode base body is possible without using screws, etc., and the mounting and dismounting of the electrode short pieces are easy. SOLUTION: This divided insoluble electrode 10 for electroplating is formed by mounting the plural electrode short pieces 12 to the electrode base body 11. Both sides of the electrode short pieces 12 are provided with slopes 14, 15. Air tubes 13 which are fixed at the base ends to the electrode base body 11 and pressure the slopes 14, 15 of the electrode short pieces 12 to the electrode base body 11 side and partly projected from the surfaces of the electrode short pieces 12 are disposed at the intermediate of the adjacent electrode short pieces 12.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、鋼帯の電気めっき
装置等に使用する電気めっき用分割型不溶性電極に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a split type insoluble electrode for electroplating used in a steel strip electroplating apparatus or the like.

【0002】[0002]

【従来の技術】例えば、特公平7−30690号公報に
記載の電気めっき用分割型不溶性電極が提案されてお
り、これと同一構造の電気めっき用分割型不溶性電極7
0を、図4、図5に示す。図に示すように、チタン製の
電極基体71の表面にチタン製の電極短片72を、チタ
ン製の小ネジ73を用いて固定していた。そして、電極
短片72の中間には電極短片72から約2mm程度突出
状態でインシュレータ74を配置し、通過する鋼帯のバ
タツキによって、電極短片72に当接するのを防止して
いた。なお、75は裏面側に配置された取付けネジであ
る。
2. Description of the Related Art For example, a split type insoluble electrode for electroplating disclosed in Japanese Patent Publication No. 7-30690 has been proposed, and a split type insoluble electrode for electroplating 7 having the same structure as that of the split type insoluble electrode 7 is proposed.
0 is shown in FIGS. As shown in the figure, the electrode short piece 72 made of titanium was fixed to the surface of the electrode base body 71 made of titanium using the machine screw 73 made of titanium. Then, the insulator 74 is arranged in the middle of the electrode short piece 72 so as to project from the electrode short piece 72 by about 2 mm to prevent the insulator 74 from coming into contact with the electrode short piece 72 due to the flapping of the passing steel strip. Reference numeral 75 is a mounting screw arranged on the back surface side.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、前記従
来の電気めっき用分割型不溶性電極70には以下のよう
な問題点があった。 電極短片72を取付ける小ネジ73が緩む場合があ
り、鋼帯の上部に配置されている電気めっき用分割型不
溶性電極70において小ネジ73が緩むと、小ネジ7
3、電極短片72やインシュレータ74が脱落する危険
性がある。 複数の電極短片72、インシュレータ74が電極基体
71に多くの小ネジ73を用いて取付けられているの
で、電極短片72、インシュレータ74の取付け及び交
換作業が極めて手間である。 本発明はかかる事情に鑑みてなされたもので、ネジ等を
使用することなく電極短片を電極基体に強固に取付ける
ことができ、しかも電極短片の取付け取り外しが容易な
電気めっき用分割型不溶性電極を提供することを目的と
する。
However, the conventional split type insoluble electrode 70 for electroplating has the following problems. The machine screw 73 for attaching the electrode short piece 72 may be loosened, and when the machine screw 73 is loosened in the split type insoluble electrode 70 for electroplating arranged on the upper part of the steel strip, the machine screw 7
3. There is a risk that the electrode short piece 72 and the insulator 74 may fall off. Since the plurality of electrode short pieces 72 and the insulator 74 are attached to the electrode base body 71 by using many small screws 73, the work of attaching and replacing the electrode short pieces 72 and the insulator 74 is extremely troublesome. The present invention has been made in view of the above circumstances, and a split type insoluble electrode for electroplating that can firmly attach an electrode short piece to an electrode base without using a screw or the like and that is easy to attach and detach the electrode short piece. The purpose is to provide.

【0004】[0004]

【課題を解決するための手段】前記目的に沿う請求項1
記載の電気めっき用分割型不溶性電極は、複数の電極短
片が電極基体に取付けられた電気めっき用分割型不溶性
電極であって、前記電極短片の両側に傾斜面を設けると
共に、隣り合う前記電極短片の中間に、基端部が前記電
極基体に固定され、膨張時には、前記電極短片の傾斜面
を電極基体側に押圧し、しかも前記電極短片の表面から
その一部が突出するエアチューブを設けている。請求項
2記載の電気めっき用分割型不溶性電極は、請求項1記
載の電気めっき用分割型不溶性電極において、前記エア
チューブは、基端部に取付けフランジを備えると共に、
前記傾斜面を押圧する部分の断面は逆台形状となってい
る。また、請求項3記載の電気めっき用分割型不溶性電
極は、請求項1記載の電気めっき用分割型不溶性電極に
おいて、前記エアチューブは、内部の空気が大気圧とな
っても逆台形状を保持可能なゴム材質からなっている。
According to the present invention, there is provided a semiconductor device comprising:
The split-type insoluble electrode for electroplating described is a split-type insoluble electrode for electroplating in which a plurality of electrode short pieces are attached to an electrode substrate, and the adjacent electrode short pieces are provided with inclined surfaces on both sides of the electrode short pieces. An air tube is provided in the middle of which the base end portion is fixed to the electrode base body, and when inflated, the inclined surface of the electrode short piece is pressed toward the electrode base body side, and a part of which protrudes from the surface of the electrode short piece. There is. The split type insoluble electrode for electroplating according to claim 2 is the split type insoluble electrode for electroplating according to claim 1, wherein the air tube is provided with a mounting flange at a base end portion,
The section of the portion that presses the inclined surface has an inverted trapezoidal shape. The split-type insoluble electrode for electroplating according to claim 3 is the split-type insoluble electrode for electroplating according to claim 1, wherein the air tube maintains an inverted trapezoidal shape even when the internal air becomes atmospheric pressure. Made of possible rubber material.

【0005】請求項1〜3記載の電気めっき用分割型不
溶性電極においては、エアチューブを膨張させると、電
極短片の傾斜面が押圧されて電極短片が電極基体に固定
される。そして、エアチューブが膨らむので、電極短片
の表面から突出し、インシュレータの役割を果たすこと
になる。電極短片を取り外す場合には、エアチューブの
空気を抜くと縮んで自由に電極短片を外すことができ
る。
In the split type insoluble electrode for electroplating according to claims 1 to 3, when the air tube is expanded, the inclined surface of the electrode short piece is pressed to fix the electrode short piece to the electrode base. Then, since the air tube swells, it protrudes from the surface of the electrode short piece and plays a role of an insulator. When the short electrode piece is removed, the short air electrode can be compressed to remove the short electrode piece.

【0006】[0006]

【発明の実施の形態】続いて、添付した図面を参照しつ
つ、本発明を具体化した実施の形態につき説明し、本発
明の理解に供する。ここに、図1は本発明の一実施の形
態に係る電気めっき用分割型不溶性電極の説明図、図2
は同動作説明図、図3は他の実施の形態に係る電気めっ
き用分割型不溶性電極の部分断面図である。
BEST MODE FOR CARRYING OUT THE INVENTION Next, referring to the attached drawings, an embodiment in which the present invention is embodied will be described to provide an understanding of the present invention. Here, FIG. 1 is an explanatory view of a split type insoluble electrode for electroplating according to an embodiment of the present invention, and FIG.
3 is an explanatory view of the same operation, and FIG. 3 is a partial sectional view of a split type insoluble electrode for electroplating according to another embodiment.

【0007】図1に示すように、本発明の一実施の形態
に係る電気めっき用分割型不溶性電極10は、チタン製
の電極基体11と、電極基体11上に配置されている電
極短片12と、これを取付けるエアチューブ13とを有
している。以下、これらについて詳しく説明する。
As shown in FIG. 1, a split type insoluble electrode 10 for electroplating according to an embodiment of the present invention comprises an electrode base 11 made of titanium, and an electrode short piece 12 arranged on the electrode base 11. , And an air tube 13 to which this is attached. These will be described in detail below.

【0008】電極短片12は従来と同様チタン製の板か
らなって、両側には傾斜角度θが10〜45度の傾斜面
14、15が設けられて表面側、即ち放電面側が狭くな
っている。電極短片12の裏面側には電極基体11との
電気的接触を円滑にする突出電極部16が設けられてい
る。電極基体11の表面側には、電極短片12が一定の
隙間を有して嵌入する電極装着部17を有し、更に各電
極短片12の突出電極部16が嵌入して当接する嵌入溝
18を備えている。ここで、前記嵌入溝18の深さより
突出電極部16の高さが高くなって、電極短片12が電
気的に確実に電極基体11に接触するようになってい
る。
The electrode short piece 12 is made of a titanium plate as in the conventional case, and inclined surfaces 14 and 15 having an inclination angle θ of 10 to 45 degrees are provided on both sides to narrow the surface side, that is, the discharge surface side. . On the back surface side of the electrode short piece 12, a protruding electrode portion 16 that facilitates electrical contact with the electrode base body 11 is provided. On the surface side of the electrode base body 11, there is provided an electrode mounting portion 17 into which the electrode short piece 12 is fitted with a certain gap, and a fitting groove 18 into which the protruding electrode portion 16 of each electrode short piece 12 is fitted and abutted. I have it. Here, the height of the protruding electrode portion 16 is higher than the depth of the fitting groove 18, so that the short electrode piece 12 electrically and reliably contacts the electrode base body 11.

【0009】前記エアチューブ13は、図2(A)、
(B)に示すように基端側に取付けフランジ19を備え
ると共に、電極基体11側にも取付けフランジ19が嵌
入する蟻溝20を備えている。この取付けフランジ19
に連接される押圧部21は逆台形状で内部は空洞22と
なっていると共に、空洞22に高圧空気を充填するため
の図示しない空気送入口が設けられている。前記エアチ
ューブ13の断面大きさは、エアチューブ13に圧縮空
気を入れて膨張させた場合に、電極短片12の表面から
2〜5mm突出するようになっている。また、内部の空
気を抜いても押圧部21が逆台形状を保つように、材料
が人造又は天然のゴム又は柔軟性を有するプラスチック
からなっている。
The air tube 13 is shown in FIG.
As shown in (B), a mounting flange 19 is provided on the base end side, and a dovetail groove 20 into which the mounting flange 19 is fitted is also provided on the electrode base 11 side. This mounting flange 19
The pressing portion 21 connected to is an inverted trapezoid and has a cavity 22 inside, and an air inlet (not shown) for filling the cavity 22 with high pressure air is provided. The cross-sectional size of the air tube 13 is such that, when compressed air is put into the air tube 13 to expand it, it projects from the surface of the electrode short piece 12 by 2 to 5 mm. Further, the material is made of artificial or natural rubber or flexible plastic so that the pressing portion 21 maintains the inverted trapezoidal shape even when the air inside is evacuated.

【0010】従って、この電気めっき用分割型不溶性電
極10においては、電極短片12を取付ける場合には、
エアチューブ13の空気を抜いて、電極短片12を電極
基体11に取付けた後、エアチューブ13に空気を充填
する。空気を充填するエアチューブ13の押圧部21が
電極短片12の傾斜面14、15を押圧するので、電極
短片12が外れることがない。なお、電極短片12の位
置決めは突出電極部16と嵌入溝18で行うことにな
る。エアチューブ13に空気を充填すると、図2(A)
に示すように上方に数mm膨らむので、これがインシュ
レータとして作用することになり、鋼帯と電極短片12
との直接の接触を防止する。
Therefore, in the split type insoluble electrode 10 for electroplating, when the electrode short piece 12 is attached,
The air in the air tube 13 is evacuated, the electrode short piece 12 is attached to the electrode base 11, and then the air tube 13 is filled with air. Since the pressing portion 21 of the air tube 13 that is filled with air presses the inclined surfaces 14 and 15 of the electrode short piece 12, the electrode short piece 12 does not come off. The positioning of the short electrode piece 12 is performed by the protruding electrode portion 16 and the fitting groove 18. When the air tube 13 is filled with air, as shown in FIG.
As shown in Fig. 3, it swells upward by several mm, which means that it acts as an insulator.
Prevents direct contact with.

【0011】図3には他の実施の形態に係る電気めっき
用分割型不溶性電極を示すが、図に示すように、電極短
片12の片側は硬質プラスチック又はセラミックス等か
らなるインシュレータ23によって支持され、他方を前
記したエアチューブ13によって支持されている。前記
インシュレータ23は基端側にフランジ24を有すると
共に電極短片12に接する部分は逆台形状になってい
る。従って、電極短片12を取り外す場合には、エアチ
ューブ13の空気を抜けばある程度自由となるので、電
極短片12を取り外すことができ、電極短片12を挿入
する場合も同様な逆の手順で行うことができる。
FIG. 3 shows a split type insoluble electrode for electroplating according to another embodiment. As shown in the figure, one side of the electrode short piece 12 is supported by an insulator 23 made of hard plastic, ceramics or the like. The other is supported by the air tube 13 described above. The insulator 23 has a flange 24 on the base end side, and a portion contacting the electrode short piece 12 has an inverted trapezoidal shape. Therefore, when removing the electrode short piece 12, it is possible to remove the air from the air tube 13 to some extent, so that the electrode short piece 12 can be removed. When inserting the electrode short piece 12, the same reverse procedure should be performed. You can

【0012】[0012]

【発明の効果】請求項1〜3記載の電気めっき用分割型
不溶性電極は以上の説明からも明らかなように、電極短
片をエアチューブによって固定しているので、電極短片
の取付け、取り外し作業が大幅に軽減される。また、従
来の電気めっき用分割型不溶性電極のように、ネジの緩
み、ネジの締結忘れ等によって発生するめっき装置の故
障を防止できる。そして、エアチューブは電極短片の固
定とインシュレータとの両方の役割を果たすので、従来
の電気めっき用分割型不溶性電極より部品点数が少なく
なるという利点を有する。特に、請求項2記載の電気め
っき用分割型不溶性電極はエアチューブの固定が取付け
フランジを介して行われているので、エアチューブの脱
落を防止できると共に、エアチューブの押圧部が逆台形
状となっているので、効率的に電極短片の傾斜面を押圧
できる。
As is apparent from the above description, the split type insoluble electrode for electroplating according to claims 1 to 3 has the electrode short piece fixed by the air tube. Significantly reduced. Further, like the conventional split type insoluble electrode for electroplating, it is possible to prevent a failure of the plating apparatus caused by loosening of screws, forgetting to fasten screws, or the like. Further, since the air tube plays both a role of fixing the electrode short piece and an insulator, there is an advantage that the number of parts is smaller than that of the conventional split type insoluble electrode for electroplating. Particularly, in the split type insoluble electrode for electroplating according to claim 2, since the air tube is fixed through the mounting flange, the air tube can be prevented from falling off, and the pressing portion of the air tube has an inverted trapezoidal shape. Therefore, the inclined surface of the electrode short piece can be efficiently pressed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施の形態に係る電気めっき用分割
型不溶性電極の説明図である。
FIG. 1 is an explanatory diagram of a split type insoluble electrode for electroplating according to an embodiment of the present invention.

【図2】同動作説明図である。FIG. 2 is an explanatory diagram of the same operation.

【図3】他の実施の形態に係る電気めっき用分割型不溶
性電極の部分断面図である。
FIG. 3 is a partial cross-sectional view of a split type insoluble electrode for electroplating according to another embodiment.

【図4】従来例に係る電気めっき用分割型不溶性電極の
平面図である。
FIG. 4 is a plan view of a split type insoluble electrode for electroplating according to a conventional example.

【図5】同部分断面図である。FIG. 5 is a partial sectional view of the same.

【符号の説明】[Explanation of symbols]

10 電気めっき用分割型不溶性電極 11 電極基体 12 電極短片 13 エアチュ
ーブ 14 傾斜面 15 傾斜面 16 突出電極部 17 電極装着
部 18 嵌入溝 19 取付けフ
ランジ 20 蟻溝 21 押圧部 22 空洞 23 インシュ
レータ 24 フランジ
10 split type insoluble electrode for electroplating 11 electrode substrate 12 electrode short piece 13 air tube 14 inclined surface 15 inclined surface 16 protruding electrode portion 17 electrode mounting portion 18 fitting groove 19 mounting flange 20 dovetail groove 21 cavity 23 insulator 24 flange

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数の電極短片が電極基体に取付けられ
た電気めっき用分割型不溶性電極であって、 前記電極短片の両側に傾斜面を設けると共に、隣り合う
前記電極短片の中間に、基端部が前記電極基体に固定さ
れ、膨張時には、前記電極短片の傾斜面を電極基体側に
押圧し、しかも前記電極短片の表面からその一部が突出
するエアチューブを設けたことを特徴とする電気めっき
用分割型不溶性電極。
1. A split type insoluble electrode for electroplating, wherein a plurality of electrode short pieces are attached to an electrode substrate, wherein inclined surfaces are provided on both sides of the electrode short pieces, and a base end is provided between the adjacent electrode short pieces. The portion is fixed to the electrode base body, and when expanded, the inclined surface of the electrode short piece is pressed toward the electrode base body side, and an air tube is provided, a part of which protrudes from the surface of the electrode short piece. Split type insoluble electrode for plating.
【請求項2】 前記エアチューブは、基端部に取付けフ
ランジを備えると共に、前記傾斜面を押圧する部分の断
面は逆台形状となっている請求項1記載の電気めっき用
分割型不溶性電極。
2. The split type insoluble electrode for electroplating according to claim 1, wherein the air tube has a mounting flange at a base end, and a cross section of a portion pressing the inclined surface has an inverted trapezoidal shape.
【請求項3】 前記エアチューブは、内部の空気が大気
圧となっても逆台形状を保持可能なゴム材質からなる請
求項2記載の電気めっき用分割型不溶性電極。
3. The split type insoluble electrode for electroplating according to claim 2, wherein the air tube is made of a rubber material capable of maintaining an inverted trapezoidal shape even when the internal air has an atmospheric pressure.
JP11539396A 1996-04-11 1996-04-11 Divided insoluble electrode for electroplating Withdrawn JPH09279399A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11539396A JPH09279399A (en) 1996-04-11 1996-04-11 Divided insoluble electrode for electroplating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11539396A JPH09279399A (en) 1996-04-11 1996-04-11 Divided insoluble electrode for electroplating

Publications (1)

Publication Number Publication Date
JPH09279399A true JPH09279399A (en) 1997-10-28

Family

ID=14661450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11539396A Withdrawn JPH09279399A (en) 1996-04-11 1996-04-11 Divided insoluble electrode for electroplating

Country Status (1)

Country Link
JP (1) JPH09279399A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180121397A (en) * 2017-04-28 2018-11-07 가부시키가이샤 오사카소다 Electrode structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180121397A (en) * 2017-04-28 2018-11-07 가부시키가이샤 오사카소다 Electrode structure

Similar Documents

Publication Publication Date Title
US5447615A (en) Plating device for wafer
EP1412561B1 (en) Workpiece wet processing
JP4689958B2 (en) Electrolyzer for electrochemical production of chlorine
WO2001088954A3 (en) Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing
JPH09279399A (en) Divided insoluble electrode for electroplating
JP3627400B2 (en) Electrode anode plate straightening device
JP2004354836A (en) Method of cutting off glass substrate and device therefor
JP3096467B2 (en) Electrostatic chuck electrode device
JPH10144777A (en) Vacuum suction device
JPH085473Y2 (en) Fixing device for printed materials
JPH0345250Y2 (en)
CN220733370U (en) Piezoelectric ceramic tile for sensor
CN1211051A (en) Variable capacitor
KR0136549Y1 (en) Lp-cvd wafer boat
JPH06260159A (en) Battery holder
KR100459646B1 (en) Separable shield ring
KR200308148Y1 (en) A voltage applicating device for a plasma display panel aging system
JP2007220578A (en) Electrode structure of plasma treatment device
KR20050064336A (en) Method for improve life time of polyimide-type electrostatic chuck in semiconductor manufacturing apparatus
JP2006286815A (en) Apparatus for sucking to fix substrate
JP2522187Y2 (en) IC socket
JPH0696806A (en) Plate terminal
JP2005069702A (en) Probe card
JPH087966A (en) Electric contact structure
JP2004061290A (en) Evaluation apparatus for semiconductor device

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20030701