JPH09274706A - Magnetic head and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a MIG/TFC magnetic head chip, which is tolerant to external noise, is capable of easily fixing a lead wire to a bonding part, is sufficient in workability and is manufactured at low cost, and its manufacturing method. SOLUTION: A thin film part (thin film coil) is preliminarily formed in a spiral shape in a slider part constituted of a non-magnetic substrate 11, and is then bonded by using a bonding glass 23 so that two legs (MIG core legs 22) of a U letter-shaped magnetic core (MIG core 21) and two magnetic material buildup parts 16 are superposed each other and, thereafter, is cut out to a prescribed shape. In this way, the magnetic head (MIG/TFC hybrid magnetic head chip) is manufactured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head,
In particular, the present invention relates to a method of manufacturing a magnetic head (MIG / TFC hybrid magnetic head chip) in which a thin film coil is inserted so as to close the magnetic path of a U-shaped magnetic core made of single crystal ferrite.

[0002]

2. Description of the Related Art In recent years, as magnetic recording density has increased, HDD systems such as hard disk drives (HDD) used as external storage devices for computers and the like having a recording track width of 2 μm or less have been commercialized. There is. In order to bring out the performance of a hard disk having excellent magnetic characteristics, the magnetic head is required to have a certain fine dimension and high accuracy for realizing stable non-contact running. There are mainly two types of magnetic heads in conventional HDDs, one is a magnetic circuit made of magnetic ferrite, and a bulk head is wound around the magnetic circuit and a core is formed by a thin film forming technique. ) There is. less than,
A thin film head most commonly used as a magnetic head in an HDD will be briefly described.

FIG. 12 is a diagram showing a thin film head and a slider to which it is attached in a conventional hard disk drive.

As shown in FIG. 12, a thin film head 40 in a hard disk drive has a lower core 33 made of a magnetic material such as permalloy attached to a slider 38.
A coil 35 covered with an insulating layer 39 is arranged, and an upper core 31 made of a magnetic material such as permalloy similar to the lower core 33 is arranged on the coil 35.
The lower core 33 is configured to sandwich the coil 35 between the gap 32 and the upper / lower core connecting point 36 formed by interposing a non-magnetic material (not shown). The track width 34 is determined by the shape of the upper core 31, and the read / write from the gap 32 to the magnetic recording medium (not shown) is performed by the lead wire 37 of the coil 35.
It is designed to be performed through 45.

In the conventional (general) thin film head configured as described above, since an organic material is used for the insulating layer, the cores (the upper core 31 and the lower core 33) of the thin film magnetic head are made of NiFe capable of low temperature process. A plated core is used. However, the NiFe plated core is
Since s (saturation magnetic flux density) is as small as 0.9 Tesla, it is not possible to generate a very strong magnetic field. Therefore, H
When the thin film magnetic head is used for a magnetic recording medium having a c (coercive force) of 2000 Oe or more, there is a problem that the overwrite becomes insufficient.

Generally, the pole thickness of a thin film magnetic head is 4
6 (see FIG. 12) is as small as several μm, so that the false signal captured at the pole edge during data reading from the magnetic recording medium and the main signal captured at the gap cause interference (so-called contour effect), There is a problem that the waveform is distorted and the S / N ratio is lowered.

As a bulk type magnetic head which solves the problem of such a thin film magnetic head, MIG as shown in FIG. 13 in which ferrite is used for the core and a Fe-based microcrystalline film is arranged near the gap ( Metal-In-Gap) magnetic head (hereinafter also simply referred to as MIG head) has been proposed (IEEE TRANSACTION ON MAGNETICS, VOL 29,3888).
1993).

In FIG. 13, the gap 4 and the joint portion (pole edge) 48 of the magnetic film 3 attached to the core of the non-magnetic ferrite 2 on the side without the winding groove 6 are formed non-parallel. FIG. 7 is a diagram showing a conventional MIG magnetic head chip configured as described above.

As shown in FIG. 13A, the conventional MIG (Meta
The l-In-Gap) magnetic head chip has two cores, a core on the side having the winding groove 6 made of the magnetic ferrite 1 and a core on the side not having the winding groove 6 made of the non-magnetic ferrite 2. A magnetic film 3 is attached to each of the bonding surfaces, and a gap 4 formed by bonding with a bonding glass 7 with a non-magnetic material (not shown) interposed, and a winding groove 6 composed of the non-magnetic ferrite 2 It is configured such that the pole edge 48 of the magnetic film 3 on the side attached to the core on the non-existence side is formed non-parallel to each other. Further, the ABS surface (air-bearing surface) 5 of this MIG head facing the magnetic recording medium is shown in FIG.
As shown in (b), the HD in which the MIG head is used
D Notch surface 4 so as to have a predetermined recording track width 8
It is cut off diagonally at 4.

By configuring the MIG magnetic head chip as described above, since the above-mentioned pole edge 48 is not parallel to the magnetic gap 4, the false signal captured by the pole edge 48 and the gap signal 4 are captured. It is possible to prevent the problem that the waveform is distorted and the S / N ratio is lowered due to the interference (so-called contour effect) with the main signal.

Further, the magnetic film 3 used in this head is composed of the Fe-based microcrystalline film as described above, and the saturation magnetic flux density Bs of the magnetic film 3 is as large as 1.4 Tesla or more. Even a magnetic recording medium having a magnetic force Hc of about 3000 Oe can be sufficiently overwritten.
An example in which this MIG head is used for HDD read / write is shown below.

FIG. 14 is a diagram showing an example of processing a conventional MIG magnetic head chip for an HDD slider.

Generally, in HDDs, the conditions of wear resistance are severe, so that non-contact running between the head and the magnetic recording medium is an essential condition in the construction of the apparatus. As is well known, this condition is realized by a flying head integrated with the slider 38 shown in FIG. In the floating head, the air flow accompanying the traveling (rotation) of the medium causes the slider 38
The floating surface 41 and the magnetic recording medium are floated on the surface of the magnetic recording medium by the pressure (dynamic pressure) generated when being pushed into the wedge-shaped gap. This is a kind of bearing based on the same principle of fluid lubrication as sliding bearings using lubricating oil (pressure generation utilizing the viscosity of fluid), and is called dynamic pressure air bearing. This indicates that the mechanism of levitation force generation is fundamentally different from the flight of an aircraft based on Bernoulli's principle (pressure generation using inertia of fluid).

Further, since the gap that is essential for wear resistance in the hard disk, on the contrary, limits the recording density,
The gap should be as small as possible, 0.2 μ
A minute gap of about m has been realized.

In the thus constructed slider 38, the MIG magnetic head chip 42 is arranged on the side surface of the slider 38 as shown in FIG.
A facing the magnetic recording medium of the IG magnetic head chip 42
As shown in FIG. 14B, the BS (air-bearing surface) surface 5 is obliquely cut off by the notch surface 44 so as to have a predetermined recording track width of the HDD in which the MIG head is used. .

On the other hand, this conventional MIG head is
There is a problem that the inductance is larger than that of the thin film head, and the S / N ratio at high frequencies is reduced. Although it is known that the cross-sectional area of the core of the MIG magnetic head chip 42 can be reduced in order to reduce the inductance, the smaller the cross-sectional area, the lower the strength of the core and the step of applying the winding 43. There was a problem that the MIG magnetic head chip 42 was damaged.

Therefore, an enamel-coated copper winding (winding 4
Instead of 3), a thin film short core that magnetically couples the back gap of the bulk core and a thin film coil that surrounds this thin film short core are integrally formed (hereinafter referred to as the thin film portion), and then bonded to the back gap of the bulk core. Has been proposed (IEEE TRANSACTION ON
MAGNETICS, VOL 31,1669,1995).

FIG. 15 is a diagram showing a manufacturing process of such a thin film portion (thin film coil chip composed of a NiFe core and a Cu coil). Hereinafter, an example of a method for manufacturing the thin film portion (thin film coil chip including a NiFe core and a Cu coil) will be briefly described with reference to FIG.

First, an alumina substrate 61 serving as a base of a thin film coil chip is prepared (a), and a thin film coil (a plurality of single lines) 62 is formed thereon by using copper (Cu) by a vapor deposition method or a sputtering method. After forming (b), the thin film coil (a plurality of single lines) 62 is electrically insulated by an insulating material 63 while leaving both ends (c), and Ni is formed so as to cover the insulating material 63.
The Fe core 64 is formed (d).

The NiFe core 64 is then covered with the insulating material 63.
(E), and a thin film coil (plurality of single lines) 67 on the insulating material 63, and both ends of the thin film coil (plurality of single lines) 67 are connected to both ends of the thin film coil (plurality of single lines) 62. The plurality of single lines form a winding winding around the NiFe core 64 (f), and the thin film coil (a plurality of single lines) 67.
And both ends thereof are electrically insulated with an insulating material 63 (g), N
Side poles 6 made of NiFe on both ends of the iFe core 64
5 is formed (h), and a bonding pad (Au pad (66)) is formed with gold (Au) to complete a thin film coil chip (i).

As shown in FIG. 16, the thin-film coil chip 54 manufactured as described above is attached to the back gap of the MIG head (bulk core) 53 previously formed on the slider 69, and the thin-film coil chip 54 and the joining member 68 thereof. To join.

As a result, it is possible to eliminate the manual coil winding process, which is essential in the manufacturing process of conventional monolithic and composite MIG heads, and is smaller in size and lower in inductance than conventional MIG and thin film heads. That is, a MIG / TFC (thin film coil) hybrid magnetic head chip can be realized.

FIG. 16 is a diagram showing an example of an HDD slider in which such a MIG / TFC (thin film coil) hybrid magnetic head is formed on the side surface of a slider made of a non-magnetic material. As shown in FIG. 16, this head is composed of a slider 69 body, a magnetic core (MIG head 53), and a thin film coil (TFC) chip 54. The U-shaped magnetic core (MIG head 53) made of single crystal ferrite is the slider 69.
Is pre-bonded to the side surface of the main body of the NiFe core 6 between the back gap 70 of the U-shaped magnetic core.
4 and a thin-film coil chip 54 composed of a Cu coil that wraps around (wraps around) a spiral system so as to close the magnetic path of the U-shaped magnetic core (MIG head 53) made of the single crystal ferrite. Inserted).

By the way, according to the method for manufacturing the MIG / TFC hybrid magnetic head chip, it is necessary to bond a minute core to the side surface of the slider made of a non-magnetic material, and to bond the minute film portion further thereon. Yes, there were the following problems.

(1) Since the coil is wound in a toroidal shape, it is easy to pick up external noise.

(2) The bonding portion of the lead wire needs to be taken out from the back surface of the substrate, and the bonding portion needs to be configured to protrude from the core surface. Considering workability, it is desired to make the bonding portion large, but if this bonding portion is made large, the protruding portion becomes large and protrudes from the rear portion of the slider, which makes it difficult to fix the lead wire.

(3) Multi-layer wiring is used, and the manufacturing cost is increased.

(4) It is necessary to accurately bond a thin film portion smaller than the core to a predetermined position of the core, which results in poor workability.

There was a problem such as the above.

[0030]

As described above, the conventional M
According to the IG / TFC magnetic head chip and the method for manufacturing the same, the coil is wound in a toroidal shape, so that external noise is easily picked up. Then, it is necessary to take out the bonding portion of the lead wire from the back surface of the substrate, which makes it difficult to fix the lead wire to the bonding portion. In addition, the wiring becomes multi-layer wiring, which increases the manufacturing cost. Further, the thin film portion (thin film coil) needs to be accurately joined to a predetermined position of the core, resulting in poor workability. There was such a problem (defect).

Therefore, the present invention has been made in view of the above problems.
An object of the present invention is to provide a MIG / TFC magnetic head chip that is resistant to external noise, can easily fix a lead wire to a bonding portion, has good workability, and can be manufactured at low cost, and a manufacturing method thereof.

[0032]

According to another aspect of the present invention, there is provided a magnetic head, wherein a magnetic gap for recording / reproducing on / from a magnetic recording medium comprises a composite of ferrite and a magnetic thin film.
A magnetic head having a metal-in-gap head structure in which individual magnetic cores are bonded together via a magnetic gap, and a magnetic thin film and a thin-film coil are bonded to the back gap portion of the metal in-gap head structure. A magnetic thin film and a thin film coil that are bonded to the back gap portion are formed by a thin film process on a non-magnetic substrate that holds the magnetic core.

A magnetic head according to a second aspect of the present invention is the magnetic head according to the first aspect, wherein the magnetic thin film and the thin film coil are formed by forming a magnetic thin film on a non-magnetic substrate provided with a groove. It is characterized in that the film surface is flattened while leaving the magnetic film in the groove portion, and a thin film coil is formed on the film surface. A magnetic head according to a third aspect of the present invention is the magnetic head according to the first or second aspect, wherein the thin-film coil has a pair of spiral coil structures wound in opposite directions. .

A magnetic head according to a fourth aspect of the present invention is the magnetic head according to the third aspect, wherein a pair of magnetic members is raised from the groove surface inside the coil innermost circumference of each of the pair of spiral coils. Portions are formed, and the back gap portions of the two magnetic cores are joined to the pair of magnetic material raised portions, respectively.

A magnetic head according to a fifth aspect of the present invention is the magnetic head according to any one of the first to fourth aspects, wherein the non-magnetic substrate is a head such as a Winchester slider or a base plate for a VTR head. It is characterized in that it is configured as a part of a posture defining body.

According to the magnetic head (MIG / TFC hybrid magnetic head chip) according to the present invention described in claims 1 to 5, the back gap of the bulk core is magnetically coupled instead of the enamel-coated copper winding. Since the thin film short core and the thin film coil that spirally circulates the thin film short core are integrally formed, compared to the conventional MIG and thin film head, a small size and low inductance characteristic can be obtained, It is possible to obtain a low cost MIG / TFC hybrid magnetic recording head that is resistant to noise.

According to a sixth aspect of the present invention, there is provided a method of manufacturing a magnetic head, wherein a magnetic gap for recording / reproducing on / from a magnetic recording medium is two magnetic cores made of a composite of ferrite and a magnetic thin film via the magnetic gap. A method of manufacturing a magnetic head having a bonded metal in-gap head structure, wherein a magnetic thin film and a thin film coil are bonded to a back gap portion thereof, wherein a magnetic thin film and a thin film coil bonded to the back gap portion are It is characterized in that a magnetic head is obtained by forming it on a magnetic substrate by a thin film process and joining it to hold the back gap part of the magnetic core of the metal in-gap head structure.

A method of manufacturing a magnetic head according to a seventh aspect of the present invention is the method of manufacturing a magnetic head according to the sixth aspect, wherein the magnetic thin film and the thin film coil are magnetic on a non-magnetic substrate provided with a groove. It is manufactured by forming a thin film, flattening the film surface while leaving the magnetic film in the groove portion, and forming a thin film coil on this by a thin film process.

According to an eighth aspect of the present invention, there is provided a method of manufacturing a magnetic head according to the sixth or seventh aspect, wherein the thin-film coil has a pair of spiral coil structures wound in opposite directions. It is characterized in that it is formed by.

A method of manufacturing a magnetic head according to a ninth aspect of the present invention is the method of manufacturing a magnetic head according to the eighth aspect, wherein the groove portion surface is located inside a coil innermost circumference of each of the pair of spiral coils. Manufacture by forming a pair of magnetic body raised portions and joining the pair of magnetic body raised portions around which the pair of spiral coils respectively circulate so as to hold the back gap portions of the two magnetic cores, respectively. It is characterized by being done.

A method of manufacturing a magnetic head according to a tenth aspect of the present invention is the method of manufacturing a magnetic head according to any one of the sixth to ninth aspects, wherein the non-magnetic substrate is for a Winchester slider or a VTR head. It is characterized in that it is cut out so as to be a part of the head posture defining body such as the base plate.

In a method of manufacturing a magnetic head according to an eleventh aspect of the present invention, a core bar having a shape in which a plurality of metal-in-gap structures are repeated is formed, and the magnetic thin film and the magnetic coil each having a plurality of repeated patterns are formed.
By forming a non-magnetic substrate formed by a thin film process, arranging the back gap portion of the core bar so as to correspond to the magnetic thin film on the non-magnetic substrate, and then cutting it into a predetermined shape to obtain a desired shape. It is characterized in that a plurality of magnetic heads having

According to a twelfth aspect of the present invention, there is provided a method of manufacturing a magnetic head, wherein a magnetic thin film is formed on a non-magnetic substrate provided with a groove portion, the magnetic film in the groove portion is left and the film surface is flattened. Forming a thin film coil on the innermost circumference of the thin film coil, the magnetic material is raised from the groove portion surface, the magnetic material raised portion is formed so that the thin film coil circulates around it, the magnetic gap is ferrite. At least one of the back gap portions of the magnetic core in the metal-in-gap head in which two magnetic cores made of a composite of magnetic thin films are joined via the magnetic gap is joined so that the upper portion of the magnetic material raised portion holds the back gap portion. After that, the magnetic head having a desired shape is obtained by cutting it into a predetermined shape.

According to a thirteenth aspect of the present invention, there is provided a method of manufacturing a magnetic head, wherein a magnetic thin film is formed on a non-magnetic substrate having a groove, and the magnetic film in the groove is left to flatten the film surface. A pair of spiral coil structure thin film coils wound in opposite directions to each other are formed, and a magnetic material is raised from the groove surface to the inner side of the innermost circumference of the pair of spiral coils, and the pair of spiral coils is wound around the magnetic material. Of the magnetic core in a metal-in-gap head in which a magnetic material raised portion is formed so as to circulate, and two magnetic cores each having a magnetic gap composed of a composite of ferrite and a magnetic thin film are joined via the magnetic gap. By joining the gap part so that the upper part of the magnetic material rising part is held, and then cutting it into a predetermined shape, the magnetic material having the desired shape is formed. Characterized in that to obtain a head.

Here, according to the method of manufacturing a magnetic head (MIG / TFC hybrid magnetic head chip) according to the present invention described in claims 6 to 13, the back gap of the bulk core is magnetically replaced by the back gap of the bulk core instead of the enamel-coated copper winding. By integrally forming the thin-film short core and the thin-film coil, which are to be mechanically coupled, it is possible to eliminate the manual coil winding process that is indispensable in the manufacturing process of the conventional monolithic and composite MIG heads. In comparison with, it is possible to obtain a MIG / TFC hybrid magnetic recording head that is small in size, has low inductance, has good workability in the manufacturing process, and is low in cost.

[0046]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. According to the present invention, a thin film portion (thin film coil) is formed in advance on a slider portion, and a U-shaped magnetic core made of the single crystal ferrite is bonded to a predetermined position to form a magnetic head (MIG / TFC hybrid magnetic head chip). To provide a method of manufacturing.

1 to 10 show the magnetic head (M
FIG. 6 is a diagram for explaining an example of a method of manufacturing an (IG / TFC hybrid magnetic head chip). First, a method of manufacturing the thin film portion (thin film coil) of the present invention will be described.

As shown in FIG. 1, a nonmagnetic substrate 11 having a thermal expansion coefficient substantially equal to that of ferrite such as CaTiO ₃ is prepared, and a groove 71 having a depth of about 10 to 50 μm is formed in the substrate 11. Then, the magnetic film 12 is formed on the entire surface of the non-magnetic substrate 11 on the side where the groove 71 is provided, as shown in FIG.
At this time, magnetic anisotropy is given to the magnetic film 12 in the direction indicated by the hard axis 13.

Next, as shown in FIG. 3, the magnetic film 12 other than the groove 71 is removed by a method such as lapping or polishing, and the surface of the non-magnetic substrate 11 and the magnetic film 1 are removed.
The surfaces 2 should be almost the same. The magnetic film 12 serves as a magnetic short bar when the MIG / TFC hybrid magnetic head is completed.

Subsequently, after the insulating film 12 is formed on the same surface of the non-magnetic substrate 11 and the magnetic film 12, a pair of spiral coils (thin film coils 14) opposite to each other as shown in FIG. Is formed on the surface of the insulating film 12, and the coil insulating film 73 is formed on the surface of the spiral coil (thin film coil 14). As a method of forming the thin film coil 14, a known thin film coil forming method such as a vapor deposition method or a sputtering method (or a plating method or an etching method) may be used. The pattern (shape) of the spiral coil is as shown in FIG.
The pattern (shape) shown in (b) or a pattern (shape) similar to these may be used. Further, the bonding pad portions 15 formed at both ends of the spiral coil (thin film coil 14) may be arranged at the positions shown in FIG. 4, for example, depending on the application.

Next, as shown in FIG. 6, a magnetic material raising portion 16 in which a magnetic material is raised inside the coil innermost circumference of the pair of spiral coils (thin film coil 14) formed as shown in FIG. To form. As a method of forming (raising) the magnetic material heap portion 16, a known method, such as a method by selective plating of NiFe (permalloy), or a method of selectively applying magnetic powder such as soft ferrite hardened with a binder, is used. And a method of patterning the sputtered magnetic film. In addition, the magnetic material raising portion 16
The rising height of the spiral coil (thin film coil 1
4) and the coil insulating film 73.

Further, as shown in FIG. 7 (a sectional view taken along the line AA 'in FIG. 6), the surface of the insulating film 17 is coated with a non-magnetic insulating film 18, and the magnetic material raising portion 16 and the bonding pad are formed. The surface of the nonmagnetic insulating film 18 is flattened by using a method such as lapping until the portion 15 appears on the surface of the nonmagnetic insulating film 18.

Next, a well-known MIG core 21 separately prepared
Using a method such as glass bonding, as shown in FIG.
The two magnetic swelling portions 16 are aligned so as to overlap the two legs of the MIG core 21 (legs 22 of the MIG core, back gap), and both are joined by the joining glass 23.

Then, for example, by cutting (cutting) along the cutting line 51 shown in FIG.
As shown in FIG. 9B, the magnetic head (M
An HDD slider having an IG / TFC hybrid magnetic head chip) formed on its side surface is manufactured. Also,
The magnetic head (MIG / TFC hybrid magnetic head chip) according to the present invention may be cut out into a magnetic tape recording / reproducing head as shown in FIG. 10 to be used as a magnetic tape recording / reproducing head. Of course, it may be cut out and used in the form of a magnetic head for magnetic recording application products.

By the method described above, the MIG / T
By manufacturing the FC hybrid magnetic head chip, the coil is spirally wound, so it is resistant to external noise, the lead wire can be easily fixed to the bonding part, workability is good, and the cost is low. Obtainable.

Next, a manufacturing method for simultaneously manufacturing a plurality of magnetic heads (MIG / TFC hybrid magnetic head chips) according to the present invention will be described. FIG.
FIG. 1 is a diagram for explaining a method of simultaneously manufacturing a plurality of magnetic heads (MIG / TFC hybrid magnetic head chips) according to the present invention.

As shown in FIG. 11, first, a plurality of MIGs are
Head repeater (hereinafter referred to as MIG core bar 26)
Prepare Further, a non-magnetic substrate 11 is prepared in which composites (coil / short bar aggregate 27) such as the thin-film coil 14, the magnetic material raising portion 16, and the short bar 25 are arranged vertically and horizontally at a constant pitch. Then, as described above, the two magnetic material raised portions 16 are simultaneously joined so that the two legs of the MIG core (the legs 22 of the MIG core and the back gap) overlap each other, and then cut into a predetermined shape. For example, a plurality of (for example) HDD sliders having the magnetic head (MIG / TFC hybrid magnetic head chip) according to the present invention formed on the side surface thereof can be obtained at the same time.

[0058]

As described above, according to the method of manufacturing the magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention, the back gap of the bulk core is magnetically coupled instead of the enamel-coated copper winding. By integrally forming the thin film short core and the thin film coil that spirally surrounds the thin film short core, it is possible to eliminate the manual coil winding process that is essential in the manufacturing process of conventional monolithic and composite MIG heads. Compared to MIG and thin film heads, it has a small size and low inductance, and
A MIG / TFC hybrid magnetic recording head that is resistant to external noise, has good workability in the manufacturing process, and is low in cost can be obtained.

[Brief description of drawings]

FIG. 1 is a diagram (1/10) for explaining an example of a method of manufacturing a magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 2 is a diagram (2/10) for explaining an example of a method of manufacturing a magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 3 is a diagram (3/10) for explaining the example of the method for manufacturing the magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 4 is a diagram (4/10) for explaining the example of the method of manufacturing the magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 5 is a diagram (5/10) for explaining an example of a method of manufacturing the magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 6 is a diagram (6/10) for explaining the example of the method for manufacturing the magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 7 is a diagram (7/10) for explaining an example of a method of manufacturing a magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 8 is a diagram (8/10) for explaining an example of a method of manufacturing a magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 9 is a diagram (9/10) for explaining the example of the method for manufacturing the magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 10 is a diagram (10/10) for explaining an example of a method of manufacturing the magnetic head (MIG / TFC hybrid magnetic head chip) of the present invention.

FIG. 11 is a diagram for explaining a method of simultaneously manufacturing a plurality of magnetic heads (MIG / TFC hybrid magnetic head chips) according to the present invention.

FIG. 12 is a diagram showing a thin film head and a slider to which it is attached in a conventional hard disk drive.

FIG. 13 is a view showing a conventional structure in which a gap and a joint portion (pole edge) of a magnetic film attached to a core on a side of a non-magnetic ferrite that does not have a winding groove are formed in a non-parallel manner. It is a figure which shows a MIG magnetic head chip.

FIG. 14 is a diagram showing an example of processing a conventional MIG magnetic head chip for an HDD slider.

FIG. 15 is a diagram showing a manufacturing process of a thin film portion (a thin film coil chip including a NiFe core and a Cu coil).

FIG. 16 is a view showing an H formed by forming a MIG / TFC (thin film coil) hybrid magnetic head on the side surface of a non-magnetic slider.
It is a figure showing an example of a DD slider.

[Explanation of symbols]

 11 ... Non-magnetic substrate 12 ... Magnetic film 15 ... Bonding pad part 16 ... Magnetic material heap part 17 ... Insulating film 18 ... Non-magnetic insulating film 19 ... Magnetic gap 20 ... Bonding glass 21 ... MIG core 22 ... MIG core foot 23 ... Bonding glass 25 ... Short bar 51 ... Notch line

[Procedure amendment]

[Submission date] April 8, 1996

[Procedure amendment 1]

[Document name to be amended] Drawing

[Correction target item name] All figures

[Correction method] Change

[Correction contents]

FIG.

[Fig. 2]

[Figure 3]

FIG. 4

FIG. 6

FIG. 7

[Figure 5]

[Figure 8]

[Figure 9]

FIG. 10

FIG. 11

FIG.

FIG.

FIG. 16

FIG. 13

FIG. 14

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroyuki Ito 33, Shinisogo-cho, Isogo-ku, Yokohama-shi, Kanagawa Toshiba Corporation

Claims (13)

[Claims] 1. A metal-in-gap head structure in which a magnetic gap for recording / reproducing on / from a magnetic recording medium is formed by joining two magnetic cores made of a composite of ferrite and a magnetic thin film via the magnetic gap, and its back is provided. In a magnetic head configured to bond a magnetic thin film and a thin film coil to a gap part, a magnetic thin film and a thin film bonded to the back gap part on a non-magnetic substrate holding the magnetic core of the metal-in-gap head structure. A magnetic head characterized in that the coil is formed by a thin film process. 2. The magnetic thin film and the thin film coil are formed by forming a magnetic thin film on a non-magnetic substrate provided with a groove portion, flattening the film surface while leaving the magnetic film in the groove portion, and forming the thin film coil on this. The magnetic head according to claim 1, wherein the magnetic head is formed and formed. 3. The magnetic head according to claim 1, wherein the thin-film coil has a pair of spiral coil structures wound in opposite directions. 4. A pair of magnetic material raised portions is formed inside the coil innermost circumference of each of the pair of spiral coils from the groove surface, and the two magnetic material raised portions are formed in the pair of magnetic material raised portions. The magnetic head according to claim 3, wherein the back gap portions of the core are joined to each other. 5. The non-magnetic substrate is formed as a part of a head posture defining body such as a Winchester slider or a base plate for a VTR head. 1. The magnetic head according to 1. 6. A metal-in-gap head structure in which a magnetic gap for recording / reproducing on / from a magnetic recording medium is formed by joining two magnetic cores composed of a composite of ferrite and a magnetic thin film via the magnetic gap, and its back is provided. In a method of manufacturing a magnetic head in which a magnetic thin film and a thin film coil are bonded to a gap part, a magnetic thin film and a thin film coil bonded to the back gap part are formed on a non-magnetic substrate by a thin film process, and A method of manufacturing a magnetic head, wherein a magnetic head is obtained by bonding the magnetic core of the metal-in-gap head structure so as to hold a back gap portion of the magnetic core. 7. The magnetic thin film and the thin film coil are formed by forming a magnetic thin film on a non-magnetic substrate provided with a groove, flattening the film surface while leaving the magnetic film in the groove, and forming the thin film coil on the flat surface. 7. The method of manufacturing a magnetic head according to claim 6, wherein the magnetic head is manufactured by a thin film process. 8. The method of manufacturing a magnetic head according to claim 6, wherein the thin film coil is formed of a pair of spiral coil structures wound in opposite directions. 9. A pair of magnetic body raising portions formed by forming a pair of magnetic body raising portions from the groove surface inside the innermost circumference of each of the pair of spiral coils, and wherein the pair of magnetic body raising portions respectively circulate. 9. The method of manufacturing a magnetic head according to claim 8, wherein the magnetic head is manufactured by joining the two magnetic cores so as to hold the back gap portions of the two magnetic cores. 10. The non-magnetic substrate is cut out so as to be a part of a head posture defining body such as a Winchester slider or a base plate for a VTR head. 2. A method of manufacturing a magnetic head according to item 1. 11. A core bar having a shape in which a plurality of metal-in-gap structures are repeated is formed, and the magnetic thin film and the magnetic coil each having a plurality of repeated patterns are formed.
By forming a non-magnetic substrate formed by a thin film process, arranging the back gap portion of the core bar so as to correspond to the magnetic thin film on the non-magnetic substrate, and then cutting it into a predetermined shape to obtain a desired shape. A method of manufacturing a magnetic head, characterized in that a plurality of magnetic heads having the above are simultaneously obtained. 12. A magnetic thin film is formed on a non-magnetic substrate provided with a groove portion, the film surface is flattened by leaving the magnetic film in the groove portion, and a thin film coil is formed on the film surface. A magnetic material is raised inside the circumference from the groove surface, a magnetic material raised portion is formed so that the thin-film coil circulates around the magnetic material, and two magnetic cores each having a magnetic gap composed of a composite of ferrite and a magnetic thin film are provided. At least one of the back gap portions of the magnetic core in the metal in-gap head joined through the magnetic gap is joined so that the upper portion of the magnetic material raised portion is held, and then cut out into a predetermined shape to obtain a desired shape. A method of manufacturing a magnetic head, characterized in that a magnetic head having a shape is obtained. 13. A pair of spiral coil structures in which a magnetic thin film is formed on a non-magnetic substrate having a groove, the film surface is flattened leaving the magnetic film in the groove, and the films are wound in opposite directions on the film surface. Forming a thin film coil, the magnetic body is respectively raised from the groove surface to the inner side of the innermost periphery of the pair of spiral coils, the magnetic body raised portion is formed so that the pair of spiral coils orbit around it. In a metal-in-gap head in which two magnetic cores having a magnetic gap composed of a composite of ferrite and a magnetic thin film are joined via the magnetic gap, the two back gap portions of the magnetic core are held by the upper part of the magnetic material heap portion. A method of manufacturing a magnetic head, characterized in that a magnetic head having a desired shape is obtained by bonding to, and then cutting out into a predetermined shape.