JPH09267329A - Epoxy resin composition tablet - Google Patents

Epoxy resin composition tablet

Info

Publication number
JPH09267329A
JPH09267329A JP10449496A JP10449496A JPH09267329A JP H09267329 A JPH09267329 A JP H09267329A JP 10449496 A JP10449496 A JP 10449496A JP 10449496 A JP10449496 A JP 10449496A JP H09267329 A JPH09267329 A JP H09267329A
Authority
JP
Japan
Prior art keywords
epoxy resin
resin composition
tablet
particle size
composition tablet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10449496A
Other languages
Japanese (ja)
Other versions
JP3573565B2 (en
Inventor
Takeshi Uchida
健 内田
Kazuhiro Sawai
和弘 澤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Chemical Corp filed Critical Toshiba Chemical Corp
Priority to JP10449496A priority Critical patent/JP3573565B2/en
Publication of JPH09267329A publication Critical patent/JPH09267329A/en
Application granted granted Critical
Publication of JP3573565B2 publication Critical patent/JP3573565B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide epoxy resin composition tablet excellent in moldability and reliability wherein a cavity is hardly generated in the inside or outside of a resin seal type semiconductor device. SOLUTION: This epoxy resin composition tablet has at least 90% packing ratio and is obtained by molding an epoxy resin composition powder. The tablet is that in which the maximum particle size of the powder is at most 2mm. The tablet comprises the epoxy resin composition containing a biphenyl type epoxy resin.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、成形性、信頼性に
優れたエポキシ樹脂組成物タブレットに関する。
TECHNICAL FIELD The present invention relates to an epoxy resin composition tablet having excellent moldability and reliability.

【0002】[0002]

【従来の技術】樹脂封止型半導体装置は、一般にダブレ
ット状の封止樹脂を、加熱した金型のポットに投入し、
素子およびフレームが予めセットされたキャビティ部に
移送注入するトランスファー成形法で封止して製造され
ている。
2. Description of the Related Art Generally, a resin-encapsulated semiconductor device is manufactured by charging a doublet-shaped encapsulating resin into a heated mold pot.
The element and the frame are manufactured by sealing by a transfer molding method in which the element and the frame are transferred and injected into a preset cavity portion.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、タブレ
ット状の封止樹脂は、通常粉砕した樹脂組成物を金型を
用いて圧縮製造されるため、必然的にある量の気体(空
気)成分を含んでいる。この気体成分は樹脂が溶融して
キャビティ部に流れ込むとき同時にキャビティ内に入り
込み、パッケージ内部或いは外部表面に発生する巣の原
因となる。このような内外部巣は、外観上問題であるば
かりでなく、耐湿信頼性や耐熱衝撃性などの半導体装置
の信頼性にも大きく影響する。
However, since the tablet-like sealing resin is usually manufactured by compression using a mold of a crushed resin composition, it necessarily contains a certain amount of gas (air) component. I'm out. When the resin melts and flows into the cavity, this gas component enters the cavity at the same time, and causes voids generated inside or outside the package. Such internal / external cavities are not only a problem in appearance, but also greatly affect the reliability of the semiconductor device such as humidity resistance and thermal shock resistance.

【0004】近年の半導体パッケージの大型化・薄型化
に伴い、この巣の問題は一層深刻になってきている。高
信頼性封止樹脂として最近多く検討されているビフェニ
ル型エポキシ樹脂を用いた封止樹脂において、特に巣が
発生しやすいという欠点があった。
With the recent increase in size and thickness of semiconductor packages, the problem of nests has become more serious. The encapsulating resin using a biphenyl-type epoxy resin, which has been recently studied as a highly reliable encapsulating resin, has a drawback that cavities are particularly likely to occur.

【0005】本発明は、上記の事情に鑑みてなされたも
ので、樹脂封止型半導体装置の内部或いは外部に巣が発
生しにくく、成形性、信頼性に優れたエポキシ樹脂組成
物タブレットを提供しようとするものである。
The present invention has been made in view of the above circumstances, and provides an epoxy resin composition tablet excellent in moldability and reliability, in which cavities are less likely to occur inside or outside a resin-sealed semiconductor device. Is what you are trying to do.

【0006】[0006]

【課題を解決するための手段】本発明者らは、上記の目
的を達成しようと鋭意研究を重ねた結果、エポキシ樹脂
組成物の粉末の粒径を制御することによって巣の発生が
激減することを見いだし、本発明を完成したものであ
る。
Means for Solving the Problems As a result of intensive studies to achieve the above object, the present inventors have found that controlling the particle size of the powder of an epoxy resin composition drastically reduces the generation of cavities. The present invention has been completed and the present invention has been completed.

【0007】即ち、本発明は、粉末のエポキシ樹脂組成
物を予備成形して得られる充填率が90%以上のエポキシ
樹脂組成物タブレットであって、上記粉末の最大粒径が
2mm以下であることを特徴とするエポキシ樹脂組成物
タブレットである。
That is, the present invention is an epoxy resin composition tablet having a filling rate of 90% or more obtained by preforming a powdered epoxy resin composition, wherein the maximum particle size of the powder is
It is an epoxy resin composition tablet characterized by being 2 mm or less.

【0008】以下、本発明を詳細に説明する。Hereinafter, the present invention will be described in detail.

【0009】本発明に用いるエポキシ樹脂組成物は、タ
ブレットに使用できるものであればよく、エポキシ樹
脂、フェノール樹脂系硬化剤、硬化促進剤、充填剤、そ
の他を含むものである。次に、エポキシ樹脂組成物の各
成分について説明する。
The epoxy resin composition used in the present invention may be any one that can be used for tablets, and contains an epoxy resin, a phenol resin type curing agent, a curing accelerator, a filler and the like. Next, each component of the epoxy resin composition will be described.

【0010】エポキシ樹脂としては、1 分子中に 2個の
エポキシ基を有するものであればよく、特に限定するも
のではない。エポキシ樹脂の具体的なものとして、例え
ば、フェノールノボラック型エポキシ樹脂、クレゾール
ノボラック型エポキシ樹脂、ナフトールのノボラック型
エポキシ樹脂、ビスフェノールAのノボラック型エポキ
シ樹脂、ビスフェノールAのグリシジルエーテル、トリ
(ヒドロキシフェニル)アルカンのエポキシ樹脂、テト
ラ(ヒドロキシフェニル)アルカンのエポキシ樹脂、ビ
スヒドロキシビフェニル系エポキシ樹脂、各種臭素化エ
ポキシ樹脂等が挙げられ、これらは単独または 2種以上
混合して使用することができる。
The epoxy resin is not particularly limited as long as it has two epoxy groups in one molecule. Specific examples of the epoxy resin include, for example, phenol novolac type epoxy resin, cresol novolac type epoxy resin, naphthol novolac type epoxy resin, bisphenol A novolac type epoxy resin, bisphenol A glycidyl ether, and tri (hydroxyphenyl) alkane. Examples of the epoxy resin, tetra (hydroxyphenyl) alkane epoxy resin, bishydroxybiphenyl epoxy resin, various brominated epoxy resins, and the like can be used alone or in combination of two or more.

【0011】本発明において、より好ましくはエポキシ
樹脂の全部又は一部に化1の構造を有するビフェニル型
エポキシ樹脂を使用することである。このエポキシ樹脂
を使用した場合に内外部巣が発生しやすいからである。
In the present invention, it is more preferable to use a biphenyl type epoxy resin having the structure of Chemical formula 1 in all or part of the epoxy resin. This is because inner and outer cavities are likely to occur when this epoxy resin is used.

【0012】[0012]

【化1】 Embedded image

【0013】エポキシ樹脂の硬化剤としては、分子中に
フェノール性水酸基を有するものであればいかなるもの
でもよく、フェノールあるいはアルキルフェノール類と
ヒドロキシベンズアルデヒドとの縮合によって得られる
ものを使用することができる。例えば、トリス(ヒドロ
キシフェニル)メタン、トリス(ヒドロキシメチルフェ
ニル)メタン、トリス(ヒドロキシフェニル)プロパ
ン、トリス(ヒドロキシフェニル)メチルメタン、各種
ノボラックタイプのフェノール樹脂、フェノールアラル
キル樹脂、テルペンフェノール樹脂、ジシクロペンタジ
エンフェノール樹脂、ナフトール樹脂等が挙げられ、こ
れらは単独又は 2種以上混合して使用することができ
る。これらの樹脂は半導体装置の信頼性を確保するた
め、樹脂中に含まれる遊離のフェノール類の濃度が 1%
以下であることが望ましい。
Any epoxy resin curing agent may be used as long as it has a phenolic hydroxyl group in the molecule, and those obtained by condensation of phenol or alkylphenols with hydroxybenzaldehyde can be used. For example, tris (hydroxyphenyl) methane, tris (hydroxymethylphenyl) methane, tris (hydroxyphenyl) propane, tris (hydroxyphenyl) methylmethane, various novolac type phenol resins, phenol aralkyl resins, terpene phenol resins, dicyclopentadiene. Examples thereof include phenol resins and naphthol resins, which can be used alone or in combination of two or more kinds. To ensure the reliability of semiconductor devices, these resins contain 1% of free phenols in the resin.
It is desirable that:

【0014】エポキシ樹脂とフェノール樹脂硬化剤の配
合割合は、硬化剤であるフェノール樹脂のフェノール性
水酸基数とエポキシ樹脂のエポキシ基数の比(フェノー
ル性水酸基数/エポキシ基数)が 0.1〜 2.5の範囲にな
るように配合することが望ましい。この比が 0.1未満で
は硬化反応が十分に起こりにくく、また、 2.5を超える
と硬化物の特性、特に耐湿性が劣り好ましくない。
The mixing ratio of the epoxy resin and the phenol resin curing agent is such that the ratio of the number of phenolic hydroxyl groups of the phenol resin as a curing agent to the number of epoxy groups of the epoxy resin (number of phenolic hydroxyl groups / number of epoxy groups) is in the range of 0.1 to 2.5. It is desirable to mix them as follows. If this ratio is less than 0.1, the curing reaction is difficult to occur sufficiently, and if it exceeds 2.5, the properties of the cured product, especially the moisture resistance, are poor, and this is not preferred.

【0015】硬化促進剤としては、樹脂の硬化反応を促
進させるもので、通常の封止材料の硬化促進剤として使
用できるものは、広く使用することができる。硬化促進
剤として具体的なものは、2-メチルイミダゾール、2-ヘ
プタデシルイミダゾール等のイミダゾール類、ジアザビ
シクロウンデセン等のジアザビシクロアルケン類やその
塩類、トリフェニルホスフィン等の有機ホスフィン類、
その他有機金属化合物等が挙げられる。
As the curing accelerator, those which accelerate the curing reaction of the resin and those which can be used as the ordinary curing accelerator for the sealing material can be widely used. Specific examples of the curing accelerator include 2-methylimidazole, imidazoles such as 2-heptadecylimidazole, diazabicycloalkenes such as diazabicycloundecene and salts thereof, organic phosphines such as triphenylphosphine,
Other examples include organic metal compounds.

【0016】無機充填剤としては、一般に封止材料とし
て使用されるものであれば、特に制限されるものではな
く、広く使用することができる。具体的な無機充填剤と
して、例えば、溶融シリカ、結晶性シリカ、アルミナ、
窒化ケイ素、窒化アルミニウム等が挙げられ、これらは
単独又は 2種以上混合して使用することができる。
The inorganic filler is not particularly limited as long as it is generally used as a sealing material, and can be widely used. As a specific inorganic filler, for example, fused silica, crystalline silica, alumina,
Examples thereof include silicon nitride and aluminum nitride, which can be used alone or in combination of two or more.

【0017】本発明に用いるエポキシ樹脂組成物は、上
述したエポキシ樹脂、硬化剤、硬化促進剤、無機充填剤
等を含むが、本発明の目的に反しない範囲において、他
の成分、例えば、三酸化アンチモンなどの難燃助剤、天
然ワックス、合成ワックス類、直鎖脂肪酸やその金属
塩、酸アミド類、エステル類、バラフィン類等の離型
剤、カーボンブラック、二酸化チタンなどの顔料、シリ
コーンオイル、シリコーンゴム、各種プラスチック粉
末、各種エンジニアリングプラスチック粉末、ABS樹
脂やMBS樹脂の粉末等の低応力化剤等を適宜添加配合
することができる。
The epoxy resin composition used in the present invention contains the above-mentioned epoxy resin, curing agent, curing accelerator, inorganic filler and the like. Flame retardant aids such as antimony oxide, natural waxes, synthetic waxes, linear fatty acids and metal salts thereof, mold release agents such as acid amides, esters and baffins, pigments such as carbon black and titanium dioxide, silicone oils. , Silicone rubber, various plastic powders, various engineering plastic powders, ABS resin and MBS resin powders, and other stress-reducing agents can be added as appropriate.

【0018】上述した各成分を配合し、例えばヘンシェ
ルミキサー等のミキサーによって十分混合し、さらに熱
ロールによる溶融処理または 2軸の押出機等による溶融
混合処理を行った後、冷却粉砕してエポキシ樹脂組成物
を製造することができる。粉砕した粉末の最大粒径は 2
mm以下であることが望ましい。より好ましくは最大粒
径が 2mm以下であって、最大粒径 1mm以下の粒子が
全体の60重量%以下であることである。最大粒径が 2m
mを超えると、タブレット内に残存する空気が原因とな
って、半導体パッケージに巣が発生し好ましくない。粒
径の小さい粒子を多く使用することによって、タブレッ
ト内に残存する空気のかたまりが小さく分断され、キャ
ビティに入っていったとしても、成形時の圧力でつぶれ
てしまうものと思われる。この場合にタブレットの充填
率は90%以上、好ましくは95%以上であることが望まし
い。充填率が90%未満では、例えば減圧しても巣に対し
て十分な効果を上げることができず好ましくない。
Epoxy resin is prepared by blending the above-mentioned components, thoroughly mixing them with a mixer such as a Henschel mixer, melt-processing with a hot roll or melt-mixing with a biaxial extruder, and then cooling and pulverizing. The composition can be manufactured. Maximum particle size of crushed powder is 2
mm or less. More preferably, the maximum particle size is 2 mm or less, and particles having a maximum particle size of 1 mm or less account for 60% by weight or less of the whole particles. Maximum particle size is 2m
If it exceeds m, the air remaining in the tablet is a cause, and a nest is generated in the semiconductor package, which is not preferable. It is considered that by using a large number of particles having a small particle size, the lump of air remaining in the tablet is divided into small pieces, and even if they enter the cavity, they are crushed by the pressure during molding. In this case, the filling rate of the tablet is 90% or more, preferably 95% or more. If the filling rate is less than 90%, for example, even if the pressure is reduced, it is not possible to obtain a sufficient effect on the cavities, which is not preferable.

【0019】[0019]

【発明の実施形態】以下、本発明を実施例によって具体
的に説明するが、本発明はこれらの実施例によって限定
されるものではない。以下の実施例および比較例におい
て「部」とは「重量部」を意味する。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be specifically described with reference to Examples, but the present invention is not limited to these Examples. In the following Examples and Comparative Examples, “parts” means “parts by weight”.

【0020】実施例1 ビフェニル型エポキシ樹脂(エポキシ当量 193) 4.9
部、ビスフェノールA型臭素化エポキシ樹脂(エポキシ
当量 460) 2.0部、フェノールノボラック樹脂(フェノ
ール水酸基当量 104) 3.1部、トリフェニルホスフィン
0.15 部、カルナバワックス 0.3部、球状溶融シリカ
(平均粒径20μm)87.0部、カーボンブラック 0.3部、
三酸化アンチモン 2.0部、およびエポキシシランカップ
リング剤 0.4部を、ヘンシェルミキサー中で各成分を配
合混合して60〜130 ℃の加熱ロールで混練し、冷却した
後粉砕してエポキシ樹脂組成物を調製した。
Example 1 Biphenyl type epoxy resin (epoxy equivalent 193) 4.9
Parts, bisphenol A type brominated epoxy resin (epoxy equivalent 460) 2.0 parts, phenol novolac resin (phenol hydroxyl equivalent 104) 3.1 parts, triphenylphosphine
0.15 parts, carnauba wax 0.3 parts, spherical fused silica (average particle size 20 μm) 87.0 parts, carbon black 0.3 parts,
2.0 parts of antimony trioxide and 0.4 parts of epoxy silane coupling agent are mixed and mixed in a Henschel mixer, kneaded with a heating roll at 60 to 130 ° C, cooled and pulverized to prepare an epoxy resin composition. did.

【0021】次いで、この粉砕されたエポキシ樹脂組成
物を、最大粒径 2mmとなるよう粒径調整を行った後、
圧縮プレスで充填密度95%の直径30mmの円柱状のダブ
レットを成形し、エポキシ樹脂組成物タブレットを製造
した。
Next, the particle size of the crushed epoxy resin composition is adjusted to a maximum particle size of 2 mm,
A cylindrical doublet having a packing density of 95% and a diameter of 30 mm was molded by a compression press to manufacture an epoxy resin composition tablet.

【0022】実施例2 実施例1のエポキシ樹脂組成物における粒径の替わり
に、粒径 2mmを60%と粒径 1mmを40%を用いた以外
はすべて実施例1と同様に処理してエポキシ樹脂組成物
タブレットを製造した。
Example 2 Epoxy was treated in the same manner as in Example 1 except that 60% of particle size 2 mm and 40% of particle size 1 mm were used instead of the particle size in the epoxy resin composition of Example 1. A resin composition tablet was produced.

【0023】実施例3 実施例1のエポキシ樹脂組成物における粒径の替わり
に、粒径 2mmを40%と粒径 1mmを60%を用いた以外
はすべて実施例1と同様に処理してエポキシ樹脂組成物
タブレットを製造した。
Example 3 Epoxy was treated in the same manner as in Example 1 except that 40% of particle size was 40% and 1 mm of particle size was 60% instead of the particle size in the epoxy resin composition of Example 1. A resin composition tablet was produced.

【0024】実施例4 実施例1のエポキシ樹脂組成物における粒径の替わり
に、粒径 1mmを 100%用いた以外はすべて実施例1と
同様に処理してエポキシ樹脂組成物タブレットを製造し
た。
Example 4 An epoxy resin composition tablet was produced in the same manner as in Example 1 except that 100% of particle size 1 mm was used instead of the particle size in the epoxy resin composition of Example 1.

【0025】比較例1 実施例1のエポキシ樹脂組成物における粒径の替わり
に、粒径 3mmを超えるものを 100%用いた以外はすべ
て実施例1と同様に処理してエポキシ樹脂組成物タブレ
ットを製造した。
Comparative Example 1 An epoxy resin composition tablet was prepared in the same manner as in Example 1, except that 100% of the epoxy resin composition having a particle size of 3 mm was used instead of the particle size of the epoxy resin composition of Example 1. Manufactured.

【0026】比較例2 実施例1のエポキシ樹脂組成物における粒径の替わり
に、粒径 3mmのものを100%用いた以外はすべて実施
例1と同様に処理してエポキシ樹脂組成物タブレットを
製造した。
Comparative Example 2 An epoxy resin composition tablet was prepared by the same procedure as in Example 1 except that 100% of the epoxy resin composition having a particle diameter of 3 mm was used instead of the particle diameter of the epoxy resin composition of Example 1. did.

【0027】比較例3 実施例1のエポキシ樹脂組成物における粒径の替わり
に、粒径 3mmを60%と粒径 1mmを40%を用いた以外
はすべて実施例1と同様に処理してエポキシ樹脂組成物
タブレットを製造した。
Comparative Example 3 Epoxy was treated in the same manner as in Example 1 except that 60% of particle size 3 mm and 40% of particle size 1 mm were used instead of the particle size in the epoxy resin composition of Example 1. A resin composition tablet was produced.

【0028】実施例1〜4および比較例1〜3で製造し
たエポキシ樹脂組成物タブレットを用いて、180 ℃に加
熱した金型内にトランスファー注入し、15mm角のダミ
ーチップを搭載したボディサイズ32mm角(厚さ 3.5m
m)のQFPを成形した。これらのパッケージについて
外観巣および内部巣を観察したので、その結果を表1に
示した。本発明はいずれも巣の発生が少なく、本発明の
効果を確認することができた。
Using the epoxy resin composition tablets prepared in Examples 1 to 4 and Comparative Examples 1 to 3, transfer injection was performed into a mold heated to 180 ° C., and a body size of 32 mm equipped with a 15 mm square dummy chip was mounted. Corner (thickness 3.5m
m) QFP was molded. The appearance nests and inner nests of these packages were observed, and the results are shown in Table 1. In all of the present invention, the generation of nests was small, and the effect of the present invention could be confirmed.

【0029】[0029]

【表1】 *1 :1 パッケージ(PKG)当たりの巣の数を測定した。 *2 :少しずつ研磨してφ 0.3以上の 1パッケージ(PKG)当たりの巣の数を 測定した。[Table 1] * 1: The number of nests per 1 package (PKG) was measured. * 2: Polished little by little and measured the number of cavities per package (PKG) of φ 0.3 or more.

【0030】[0030]

【発明の効果】以上の説明および表1から明らかなよう
に、本発明のエポキシ樹脂タブレットは、半導体装置の
樹脂封止において内部或いは外部に巣が発生しにくく、
成形性、信頼性に優れたものである。
As is clear from the above description and Table 1, the epoxy resin tablet of the present invention is less likely to have cavities inside or outside during resin encapsulation of a semiconductor device,
It has excellent moldability and reliability.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 粉末のエポキシ樹脂組成物を予備成形し
て得られる充填率が90%以上のエポキシ樹脂組成物タブ
レットであって、上記粉末の最大粒径が 2mm以下であ
ることを特徴とするエポキシ樹脂組成物タブレット。
1. An epoxy resin composition tablet having a filling rate of 90% or more obtained by preforming a powdered epoxy resin composition, wherein the maximum particle size of the powder is 2 mm or less. Epoxy resin composition tablet.
【請求項2】 エポキシ樹脂組成物がビフェニル型エポ
キシ樹脂を含むエポキシ樹脂組成物である請求項1記載
のエポキシ樹脂組成物タブレット。
2. The epoxy resin composition tablet according to claim 1, wherein the epoxy resin composition is an epoxy resin composition containing a biphenyl type epoxy resin.
JP10449496A 1996-04-02 1996-04-02 Epoxy resin composition tablet Expired - Lifetime JP3573565B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10449496A JP3573565B2 (en) 1996-04-02 1996-04-02 Epoxy resin composition tablet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10449496A JP3573565B2 (en) 1996-04-02 1996-04-02 Epoxy resin composition tablet

Publications (2)

Publication Number Publication Date
JPH09267329A true JPH09267329A (en) 1997-10-14
JP3573565B2 JP3573565B2 (en) 2004-10-06

Family

ID=14382093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10449496A Expired - Lifetime JP3573565B2 (en) 1996-04-02 1996-04-02 Epoxy resin composition tablet

Country Status (1)

Country Link
JP (1) JP3573565B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111349315A (en) * 2018-12-20 2020-06-30 三星Sdi株式会社 Bladed epoxy resin composition and semiconductor device encapsulated using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111349315A (en) * 2018-12-20 2020-06-30 三星Sdi株式会社 Bladed epoxy resin composition and semiconductor device encapsulated using the same
CN111349315B (en) * 2018-12-20 2023-04-11 三星Sdi株式会社 Bladed epoxy resin composition and semiconductor device encapsulated using the same
US11655363B2 (en) 2018-12-20 2023-05-23 Samsung Sdi Co., Ltd. Tableted epoxy resin composition for encapsulation of semiconductor device and semiconductor device encapsulated using the same

Also Published As

Publication number Publication date
JP3573565B2 (en) 2004-10-06

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