JPH09266147A5 - - Google Patents

Info

Publication number
JPH09266147A5
JPH09266147A5 JP1996073776A JP7377696A JPH09266147A5 JP H09266147 A5 JPH09266147 A5 JP H09266147A5 JP 1996073776 A JP1996073776 A JP 1996073776A JP 7377696 A JP7377696 A JP 7377696A JP H09266147 A5 JPH09266147 A5 JP H09266147A5
Authority
JP
Japan
Prior art keywords
removal filter
air conditioning
impurity removal
conditioning device
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996073776A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09266147A (ja
JP3633086B2 (ja
Filing date
Publication date
Priority claimed from JP07377696A external-priority patent/JP3633086B2/ja
Priority to JP07377696A priority Critical patent/JP3633086B2/ja
Application filed filed Critical
Priority to KR1019970012127A priority patent/KR100542414B1/ko
Publication of JPH09266147A publication Critical patent/JPH09266147A/ja
Priority to US09/266,873 priority patent/US6535270B1/en
Priority to US10/237,133 priority patent/US20030035087A1/en
Publication of JPH09266147A5 publication Critical patent/JPH09266147A5/ja
Priority to US11/071,106 priority patent/US20050185156A1/en
Publication of JP3633086B2 publication Critical patent/JP3633086B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP07377696A 1996-03-27 1996-03-28 空調装置及びそれを備えた露光装置 Expired - Lifetime JP3633086B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP07377696A JP3633086B2 (ja) 1996-03-28 1996-03-28 空調装置及びそれを備えた露光装置
KR1019970012127A KR100542414B1 (ko) 1996-03-27 1997-03-27 노광장치및공조장치
US09/266,873 US6535270B1 (en) 1996-03-27 1999-03-12 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US10/237,133 US20030035087A1 (en) 1996-03-27 2002-09-09 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US11/071,106 US20050185156A1 (en) 1996-03-27 2005-03-04 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07377696A JP3633086B2 (ja) 1996-03-28 1996-03-28 空調装置及びそれを備えた露光装置

Publications (3)

Publication Number Publication Date
JPH09266147A JPH09266147A (ja) 1997-10-07
JPH09266147A5 true JPH09266147A5 (cg-RX-API-DMAC10.html) 2004-07-29
JP3633086B2 JP3633086B2 (ja) 2005-03-30

Family

ID=13527954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07377696A Expired - Lifetime JP3633086B2 (ja) 1996-03-27 1996-03-28 空調装置及びそれを備えた露光装置

Country Status (1)

Country Link
JP (1) JP3633086B2 (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6313953B1 (en) * 1999-01-15 2001-11-06 Donaldson Company, Inc. Gas chemical filtering for optimal light transmittance; and methods
KR100462672B1 (ko) * 2002-01-23 2004-12-20 주식회사 케이피씨 반도체 제조용 공정가스의 정제장치
KR100710227B1 (ko) * 2005-05-20 2007-04-20 엘지전자 주식회사 조명겸용 환기 시스템 및 그 제어방법과 조명겸용 환기덕트

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