JPH09262822A - Wire saw device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To keep the tension of a wire for cutting at the extremely high value and with high accuracy, apply the slice cut processing without generating undulations even when a material to be processed is small, make the constitution of a tension adjusting mechanism of the wire simpler than the constitution heretofore available and carry out the maintenance easier than for conventional devices. SOLUTION: A tension generating mechanism D for providing the tension to a wire S hung on supporting rollers 6 is provided and tension generating mechanism D is provided with a first rotating shaft 51 and a second rotating shaft, and a clutch mechanism mounted on one rotating mechanism is provided in a device. The clutch mechanism is provided with a clutch plate 58 of a magnetic material and a pair of annular permanent magnet components 59 and 60 set rotatably across the clutch plate and the permanent magnetic components are guided into a plurality of poles in their peripheral direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw device suitable for use in slice cutting a block of ceramic or ferrite.

[0002]

2. Description of the Related Art Conventionally, as a device for performing precision slice cutting of a block of ceramic or ferrite, or a block of brittle material such as crystal, silicon, glass, etc.
There is used a wire saw device configured to perform cutting with a wire forming a wire blade and a polishing liquid. FIG. 22 shows a conventional example of this type of wire saw device. A wire saw device A of this example is provided with a vertically movable table 2 on which a workpiece 1 is placed and which is erected on the back side of the table 2. Control panel 5, three support rollers 6, 6 and 6 horizontally provided on the front side of the control panel 5, and a plurality of control rollers provided on the front side of the control panel behind these support rollers 6. Guide rollers 7, 8, 9, 10, 11, 12, 13, 14, 15, 1
6, a supply reel 17 and a supply roller 18 for supplying the wire wire S to these guide rollers, and a take-up roller 19 and a take-up reel 20 for collecting the used wire wire S from these guide rollers. It is mainly composed of. In addition, the central axis 2 is located at the center of the upper front of the control panel 5.
A seesaw shaft 22 that swings up and down with 1 as an axis is provided, and the guide rollers 11 and 8 attached to the end portion of the seesaw shaft 22 are configured to be able to swing up and down alternately. Among the plurality of guide rollers, guide rollers 7, 8 and 9 are arranged on the right side of the front surface of the control panel in order from the top, and the guide rollers 10, 1 are arranged on the left side of the front surface of the control panel in order from the bottom.
1 and 12 are arranged, guide rollers 13 and 15 are arranged left and right adjacent to the front surface of the control panel in a portion between the guide rollers 7 and 12, and the guide roller 14 is arranged below the guide roller 13 The guide rollers 16 are arranged below.

Further, in the wire saw device A, the wire wire S sent from the delivery reel 17 is sent to the guide roller 7 via the supply roller 18 and the guide rollers 15 and 16, and further the guide rollers 8 and 9 are provided. It is adapted to be fed into the support rollers 6, 6, 6 via the. Further, two of the support rollers 6, 6, 6 are horizontally supported apart from each other on the lower side, the remaining one is supported horizontally above the other two, and three support rollers 6 are provided. 22 are arranged in a triangular position as shown in FIG. 22, and the wire wire S is repeatedly wound around the three support rollers 6 so as to have an appropriate width.
Next, the wire wire S drawn out from the support rollers 6, 6, 6 is wound around the guide rollers 13, 14 via the guide rollers 10, 11, 12 and is further wound by the take-up reel 20 via the take-up roller 19. It is designed to be wound around.
Therefore, the delivery reel 17 and the supply roller 18 form a supply mechanism, and the winding roller 19 and the winding reel 20 form a winding mechanism. The guide rollers 7, 8, 9, 10,
11, 12, 13, 14, 15, 16 and each supporting roller 6
Grooves are formed on the peripheral surface of each to stably support the wire wire S. Further, in the wire saw device A, the lower side of the table 2 is covered with a cover member 3 so as to prevent scattering of the abrasive liquid during slice cutting, but the cover member 3 may be omitted. Absent. Inside the cover member 3, there is provided a recovery mechanism K for recovering the polishing liquid supplied to the workpiece 1 from a polishing liquid supply device (not shown).

In the wire saw device A having the above-described structure, the wire wire S sequentially fed from the supply roll 17 is wound onto the winding roll 20.
By sequentially moving the wire wire S so that the work piece 1 is supported, the table 2 supporting the workpiece 1 is sequentially lifted, and thus the wire wire S is wound between the lower support rolls 6 in multiple layers. Is pressed against the work piece 1 as shown in FIG.
At the same time, by supplying an abrasive liquid to the workpiece 1 from an abrasive liquid supply device (not shown), the workpiece 1 can be subjected to precision slice cutting.

[0005]

In the wire saw device A having the above-mentioned structure, in order to adjust the tension of the wire wire S wound around the support rolls 6, 6, 6, the guide roller 15 on the front stage side and the guide roller 15 on the rear stage side are arranged. Between the guide rollers 13, for example, 1.1
By generating a rotation difference of about 1.2: 1, applying a tension to the wire wire S by the rotation difference, and using this tension, the wire wire S wound around the support rolls 6, 6, 6 is strongly pulled. It enables slice cutting of the work piece 1. Here, conventionally, the tension generating mechanism of the wire wire S is
Since this is an important mechanism that greatly affects the slice cutting accuracy of the work piece 1, tension adjustment is performed using a gear mechanism having a special configuration as shown in FIG.

The gear mechanism B shown in FIG. 24 is arranged on the back side of the control panel 5 shown in FIG.
A rotary shaft 25 for supporting the guide roller 15 and a rotary shaft 26 for supporting the guide roller 15 are attached to the gear box 27 so as to be spaced apart from each other in parallel with each other. An adjustment shaft 28 is supported in parallel, and a powder clutch device 30 for adjusting the number of rotations of the adjustment shaft 28 is attached outside the gear box 27. The rotating shafts 25 and 26 and the adjusting shaft 28 are rotatably supported via bearings 29 provided in the gear box, and the rotating shaft 25 in the gear box 27 has a gear 31 and the rotating shaft 26 has a gear. 32 are attached respectively, and the gears 31, 32 are meshed with the gear 33 or the gear 34 attached to the adjusting shaft 28. The adjusting shaft 28 has a double structure with a one-way clutch, and the powder clutch device 30 side has a double structure of an inner shaft 35 and an outer shaft 36, and the inner shaft 35 extends to the powder clutch device 30 side. It is connected to the locking plate 37 in the powder clutch device 30, and the external shaft 36 is connected to the powder clutch device 3.
The rotating member 3 in the powder clutch device 30 that extends to the 0 side
8, and the gear 33 is attached to the outer periphery of the outer shaft 36 in the gear box 27. Note that, in FIG. 24, the structure of a portion where the external shaft 36 is extended to the powder clutch device 30 side is illustrated in a simplified manner.

The powder clutch device 30 includes a disc-shaped clutch plate 37 made of an electromagnet, which is rotatably provided in the circumferential direction, and a rotating member 38, which is a hollow disc-shaped electromagnet and surrounds the clutch plate 37. Magnetic powder is filled between 37 and the rotating member 38, and the connection state between the clutch plate 37 and the rotating member 38 can be adjusted by the strength of these electromagnetic forces. That is, the electromagnetic force is increased to enhance the coupling state between the clutch plate 37 and the rotating member 38 by the magnetic powder, so that the rotational force of the clutch plate 37 is transmitted to the rotating member 38 efficiently, or the electromagnetic force is decreased to reduce the magnetic powder. By weakening the coupling state between the clutch plate 37 and the rotating member 3 due to, it is possible to switch whether to transmit only a part of the rotational force of the clutch plate 37 to the rotating member 38. Therefore, according to the powder clutch device 30, it is possible to adjust the rotational speed difference between the clutch plate 37 and the rotary member 38, and thus the rotational speed difference between the rotary shaft 26 and the rotary shaft 25 can be adjusted. Therefore, a difference in the number of rotations between the guide rollers 13 and 15 can be produced, and the difference in the number of rotations can be utilized to apply tension to the wire wire S as described above.

However, in the gear mechanism B having the above-mentioned structure, it is necessary to provide the rotary shafts 25 and 26 and the adjusting shaft 28, and to support each shaft by at least two bearings.
Since three shafts and six bearings are required to adjust the rotational speed difference between the rotary shafts 25 and 26, in order to interlock each shaft and rotate with high accuracy without deviation, There is a problem that positioning accuracy is required at an extremely high level. Further, since the mechanism inside the gearbox is complicated and difficult to disassemble, there is a problem that the work becomes extremely complicated when maintenance is required. That is, when it becomes necessary to perform maintenance of the gear mechanism B, there is a very complicated problem of removing the rotary shafts and gears or replacing parts. Further, when the powder clutch device 30 is used, when the rotation of the clutch plate 37 and the rotating member 38 is connected by the magnetic powder, the followability of the magnetic powder to the clutch operation is limited, so that the rotation resistance is reduced. There is a problem that unevenness is likely to occur, and there is a problem that tension unevenness is likely to occur on the wire wire S. If the tension of the wire wire S seems to be uneven, there is a problem that when the workpiece 1 becomes small, the cut portion of the workpiece 1 is likely to undulate and the machining accuracy is reduced.

The present invention has been made in view of the above circumstances, and it is possible to maintain the tension of the cutting wire wire of the wire saw device at an extremely high value with high accuracy, and even when the workpiece is small. It is an object of the present invention to provide a wire saw device that can perform slice cutting without generating undulations, has a simpler configuration of a wire wire tension adjusting mechanism, and is easier to maintain than a conventional device.

[0010]

In order to solve the above-mentioned problems, a table for holding a workpiece and a plurality of tables provided above the table so as to face the workpiece are provided. A supporting roller, a control panel installed upright on one side of the table, a plurality of guide rollers provided on the control panel, and a supply mechanism for supplying a wire wire to the guide roller of the control panel. And a winding mechanism for winding the wire wire wound around the plurality of support rollers via a guide roller of the control board via another guide roller of the control board. A wire saw device for slicing a workpiece by slicing a workpiece and a plurality of supporting rollers so as to be able to move closer to and away from each other and pressing a wire wire wound between the plurality of supporting rollers against the workpiece, Multiple plans on the board Among the inner rollers, a tension generating mechanism that provides a rotational speed difference is provided between one of the guide rollers on the upstream side of the support roller and one of the guide rollers on the downstream side of the support roller. A first rotating shaft connected to one of the guide rollers on the upstream side of the roller, a second rotating shaft connected to one of the guide rollers on the downstream side of the supporting roller, and these rotating shafts are parallel to each other. A support member that rotatably supports each other, a clutch mechanism attached to the one rotation shaft, and an output shaft of the clutch mechanism and the other rotation shaft in cooperation with the other rotation shaft. A clutch plate made of a magnetic material, wherein the clutch mechanism is attached to the one rotating shaft so as to be orthogonal to the rotating shaft, and Sandwiched from both sides And a pair of annular magnet members that are rotatably provided. The magnet member is divided into a plurality of poles in the circumferential direction, and the magnet member is applied to the clutch plate by changing the rotational position of the magnet member. The number of lines of magnetic force is adjusted to suppress the rotation of the clutch plate.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an example of a wire saw device according to the present invention. Since the basic configuration of the wire saw device C of this example is the same as the conventional wire saw device described above with reference to FIG. 22, the same parts are the same. And the detailed description thereof will be omitted. The wire saw device C of this example is different from the wire saw device A of the previous example in that the mechanism for applying tension to the wire line S is changed to the tension generating mechanism D having the configuration shown in FIGS. 2 and 3. The point is that an intermittent vertical mechanism E for adjusting the vertical position of S is provided, and an idler mechanism F for winding the wire S in a special state is added to the support rollers 6, 6, 6.

In the tension generating mechanism D of this example, the first rotating shaft 51 shown in FIG. 2 connected to the guide roller 13 on the upper center side of the control panel 5 shown in FIG. The second rotating shaft 52 connected to the side guide roller 15 is rotatably supported by the plate-shaped supporting member 53 in parallel and separately from each other. The first rotary shaft 51 and the second rotary shaft 52 are rotatably supported by a support member 53 via a bearing 54 and a member 55, respectively. Next, a magnetic torque clutch mechanism G is provided on one end side of the second rotating shaft 52. This magnetic torque clutch mechanism G has a cylindrical case 57 as shown in FIG.
The center portion of the clutch plate 58 is configured by including a clutch plate 58 made of a disc-shaped ferromagnetic material provided in the center portion of the clutch plate and donut disk-shaped permanent magnet members 59 and 60 sandwiching the clutch plate 58 from both sides in the thickness direction. The one end of the second rotating shaft 52 is inserted into and fixed to the second rotating shaft 52. The one end of the rotating shaft 52 is rotatably supported by the bearings 61 and 62 to support the clutch plate 58.
Are rotatably supported inside the case 57. The case 57 includes a central case 57a and an end case 57b.
The permanent magnet member 59 is attached to one case and the permanent magnet member 60 is attached to the other case, and one case is rotated by a predetermined angle around their central axes with respect to the other case. By moving the permanent magnet members 59 and 60, the facing positions of the permanent magnet members 59 and 60 can be changed in a state of facing each other in parallel.

The permanent magnet member 59 includes four fan-shaped permanent magnet plates 59a, 59b, 59c, and 5 as shown in FIG.
9d are joined together, and the permanent magnet member 60 is formed by joining four fan-shaped permanent magnet plates 60a, 60b, 60c, 60d, which are adjacent to each other in the circumferential direction in each of the permanent magnet members 59, 60. Permanent magnet board 59a ..., 60a
The polarities of ... are different. Therefore, by changing the facing positions of the permanent magnet members 59, 60, the number of lines of magnetic force of the permanent magnet plates 59a, 60a, ... Applied to the clutch plate 58 can be changed as shown in FIG. 5 or 6. Thus, the rotation resistance of the clutch plate 58 during rotation can be adjusted.

Next, a timing pulley 65 integrated with the case 57 is attached to the support plate 53 side of the case 57, a timing belt (rotation transmitting member) 66 is wound around the timing pulley 65, and the timing is The belt 66 is wound around a timing pulley 67 attached to one end of the first rotating shaft 51, and the rotational force of the first rotating shaft 51 is transmitted to the timing pulley 65 so that the case 57 can be rotationally driven. ing. Therefore, from the above configuration, the clutch plate 5 can be adjusted by adjusting the rotation angles of the central case 57a and the end case 57b.
It is possible to change the number of magnetic lines of force applied to 8 to increase or decrease the resistance of the clutch plate 58 during rotation, whereby the rotation speed of the first rotation shaft 51 and the rotation speed of the second rotation shaft 52 are increased. The rotation speed difference can be generated.

Next, FIG. 7 shows the entire structure of the intermittent vertical moving mechanism E provided in the wire saw device C of this example. The intermittent vertical moving mechanism E of this example is a table 2 for holding a workpiece. Support 70 provided in the lower part of the support base 70, an operation rod 71 extending from the rear side of the support base 70 to the side of the support base 70, and a push-down provided above the tip end side of the operation rod 71. The main components are a device 72 and a lifting device 73 for constantly pulling the table 2 upward. More specifically, the table 2 is provided with a support jig 75 on the upper surface as shown in FIG. 8, and is configured so that the workpiece 1 can be gripped by the support jig 75 and supports the lower side of the table 2. The platform 70 is extended to the back side of the operation panel 5 via a connection block 76 provided on the lower side of the operation panel 5, and the operation rod 71 is connected to the back side of the connection block 76. It is supported movably up and down along a guide rail (not shown) provided on the back side of the operation panel 5. In addition, the support jig 75 is provided with support pieces 7 on both ends of a substrate 78 fixed on the table 2.
It has an inverted U-shape with 9, 79, and one support piece 79
The workpiece 1 is held between the support pieces 79, 79 by the screw shaft 80 screwed into the screw hole formed in.

The pulling device 73 includes the connecting block 7
6, a pulling wire 81 connected to the back side of the connecting block 76, a support roller 82 provided above the back side of the connection block 76 and wound with the pulling wire 81, and a pulling wire provided on the side of the support roller 82. A support roller 83 around which 81 is wound, and a heavy weight member 85 provided below the support roller 83 for pulling the pulling wire 81 are mainly configured, and a force is applied to the table 2 so that the table 2 is always pulled upward. Is being acted upon.

The push-down device 72 includes the operating rod 71.
A push-down block 90 installed above the tip side of the push-down block, a position adjusting device 91 provided above the base end of the push-down block 90, and a push-down device 92 such as an air cylinder attached to the tip end of the push-down block 90. It is configured as the subject.

The push-down block 90 has a block-shaped base portion 95, an upper support piece 96 integrally formed with the base portion 95 on the upper side surface of the block portion 95, and a lower portion of the base portion 95 that extends horizontally. A lower support piece 98 is provided as a main body, which is provided so as to be vertically rotatable via a rotary pin 97. More specifically, a recess is provided in the bottom of the base 95, and the base end of the rod-shaped lower support piece 98 is inserted into the recess to penetrate the base 95 and the base end of the lower support 98. The rotating pin 97 is provided, and the lower support piece 98 is supported rotatably around the rotating pin 97. In addition, a push-down device 92 such as an air cylinder is attached to the tip of the support piece 96 with the piston rod 99 facing downward. By extending the piston rod 99 of the push-down device 92, the turning pin 97 is used as a fulcrum. The lower support piece 98 can be turned downward. Further, a rod-shaped pressing member 100 is provided between the tip portion of the lower support piece 98 and the mounting portion of the rotating pin 97, and the lower support piece 98 is provided.
When the table is swung downward, the operating member 71 is pushed down by the pressing member 100 to lower the table 2 by a predetermined distance.

Next, a motor 102 supported by a support board 101 is provided above the base 95, and a screw shaft 103 is connected to the rotary shaft of the motor 102, and the screw shaft 103 is also provided. Is directed downwards and the support plate 10
1 is screwed into a screw hole formed in the base portion 95 in the vertical direction, and the base portion 95 can be moved up and down by the rotation of the screw shaft 103. Reference numeral 105 in FIG. 7 denotes a micrometer for positioning the vertical position of the operating rod, which is provided below the tip of the operating rod 71. The central axis 106 of the micrometer 105 is moved up and down to operate. The vertical position of the rod 71 can be precisely measured.

According to the structure of the intermittent pulling mechanism E as described above, the table 2 can be always pulled upward by the pulling device 73, and the table 2 can be lifted up.
In this state, the lower support piece 9
8 is swung downward and the operating member 71 is pushed by the pressing member 100.
By lowering the table 2, the table 2 can be lowered by a minute distance.

Next, at the center of the front surface of the control panel 5 shown in FIG. 1, an idler mechanism F for controlling the wire wire S for winding the supporting rollers 6, 6, 6 into a special winding state.
Is provided. As shown in FIG. 9, the idler mechanism F includes a position adjustment block 110 provided at the center of the front surface of the control panel 5 so as to be able to move forward or backward, and angle adjustment blocks provided on the left and right front surfaces of the position adjustment block 110. 111, 112, an idle roller 115 attached to a support shaft 113 provided on the front surface of the angle adjustment block 111, and an idle roller 11 attached to a support shaft 116 provided on the front surface of the angle adjustment block 112.
And 7 are provided. The front surface of the angle adjustment block 111 is inclined slightly downward and the front surface of the angle adjustment block 112 is inclined slightly upward, the idle roller 115 is slightly inclined downward, and the idle roller 117 is slightly inclined. It is tilted upward. A peripheral groove 115 for winding the wire S around the center of the peripheral surface of the idle rollers 115 and 117.
a, 117a are formed.

Next, the wire wire S wound around the guide roller 9 of the control panel 5 and pulled out is first supported by the support rollers 6, 6.
After being wound so as to surround the three support rollers 6 along the circumferential groove 6a on the rear end portion 6b side (control panel 5 side) of 6, and after being wound about half on the support rollers 6, 6, 6. The peripheral groove 11 of the idle roller 115 is pulled out from the upper support roller 6.
5a and the circumferential groove 17a of the idle roller 117 are wound in this order, and then wound around the support rollers 6, 6, 6 from the center side of the support rollers 6, 6, 6 toward the front end side. That is, the wire wire S is wound around the support rollers 6, 6, 6 so as to have two front and rear winding portions 6A, 6B that are separated from each other. In addition, these winding parts 6
The widths A and 6B are made substantially equal to each other, and are made substantially equal to the length of the workpiece 1 described later.

Next, the workpiece 1 to be slice-cut by the wire saw device A of this example will be described in detail below. FIG. 10 shows the entire structure of the work piece 1. The work piece 1 of this example is a block for manufacturing the magnetic head H having the structure shown in FIG. The magnetic head H having the structure shown in FIG. 12 includes a protrusion 1 of plate-shaped magnetic core halves 120 and 121 made of ferrite or ceramics.
Welding layers 122, 122 made of glass or the like between 20a, 121a
The magnetic gap G is sandwiched between the two sides. The magnetic head H of this example has a thickness of, for example, about 0.1 to 0.2 mm. In order to manufacture the magnetic head H having this structure, usually, two block bars made of ceramic or ferrite are grooved, and a magnetic film or a gap film is formed on the grooved part as needed, and the gap is formed. Both block bars are joined together with a welding material such as glass through the film. Here, the workpiece 1 shown in FIG.
Is the two block bars 12 integrated by the welding material.
6 and 127, and two block bars 126 and 12
A glass welding layer 129 is provided in a bonding hole 128 formed by abutting a plurality of groove portions formed in 7 to bond two block bars 126 and 127, and the block bars 126 and 127 are regularly arranged in the length direction. A magnetic gap G is formed between the large number of protrusions 126a, 127a formed on the. Therefore, the magnetic head H shown in FIG. 12 is obtained by slicing the workpiece 1 along the cutting line 130 shown in FIG. 11 which is orthogonal to the longitudinal direction of the workpiece 1 of this example.
Can be obtained simultaneously.

The wire saw device A having the above-described structure is used to manufacture a large number of magnetic heads H shown in FIG. 12 at a time by slicing from the workpiece 1 shown in FIG. In addition, in order to perform slice cutting of the workpiece 1 having the above structure with the wire saw device A, a plate-shaped workpiece 1
Using the fixing jig 135 shown in FIG. 3, a plurality of workpieces 1 are fixed to the fixing jig 135 in an aligned state with an adhesive or the like,
The fixing jig 135 is fixed to the supporting jig 75 shown in FIG. 8, and the wire wire S is pressed against the workpieces 1 ... In addition, on the upper surface of the plate-shaped jig 135 shown in FIG.
Although not shown in FIG. 13, a plurality of protrusions 136 and 137 as shown by the chain double-dashed line in FIG. 11 are formed, and the workpiece 1 is installed along these protrusions 136 and 137.
By fixing the workpiece 1 to the protrusions 136 and 137 with an adhesive, it is possible to use it for slice cutting.

In order to perform the slice cutting of the work piece 1, first, the jig 135 shown in FIG. 13 to which a large number of work pieces 1 are fixed is set on the substrate 78 of the support jig 75 shown in FIG. , The screw shaft 80 is rotated to support the jig 135 to the supporting jig 75.
The substrate 78 is pressed and fixed. In this state, the orientations of the respective workpieces 1 and the orientations of the wire lines S wound around the support rollers 6, 6, 6 are orthogonal to each other as shown in FIG. Objects 1, 1 and support roll 6
The positional relationship between and the wire line S is as shown in FIG. Next, the wire S is fed to the feed roll 1 as shown in FIG.
7 and guide rollers 18, 15, 16, 7,
8 and 9 are wound several times in order so that each has a predetermined width, and then the guide roller 9 and the support rolls 6, 6, 6 are wound.
As shown in FIG. 9, it is wound about half the number of times as shown in FIG. 9, and then it is wound again around the remaining half of the support rolls 6, 6, 6 through the idle rollers 115, 117 as shown in FIG. Rollers 10, 11, 12, 13, 1
The wire wire S is continuously wound at a predetermined speed in such a manner that it is wound a required number of times in the order of 4, and is wound by the winding roll 20 via the guide roller 19.

During the continuous movement of the wire wire S, the tension generating mechanism D is operated to apply the tension to the wire wire S. In the tension generating mechanism D of the wire wire S, the rotation angle of the central case 57a and the end case 57b of the case 57 shown in FIG. Since the number can be changed as shown in FIG. 5 or FIG. 6, it is possible to cause a difference in the number of rotations between the first rotating shaft 51 and the second rotating shaft 52. In this rotation speed difference, (the rotation speed of the first rotating shaft 51):
By setting the range of (the number of rotations of the second rotating shaft 52) = 1: 1.1 to 1.2, the supporting roller 6, Since the speed of the wire wire S wound up from 6, 6 can be made necessary and sufficiently high, as a result, tension can be generated in the wire wire S.

Further, the rotation of the clutch plate 58 is suppressed by the lines of magnetic force by adjusting the number of lines of magnetic force that traverse the clutch plate 58 by changing the facing positions of the permanent magnet members 59 and 60, so that the rotating shaft 51 on one side and the rotating shaft on the other side are suppressed. If a rotational speed difference is to be generated between the clutch plate 58 and 52, the rotational speed of the clutch plate 58 can be precisely adjusted by finely adjusting the facing positions of the permanent magnet members 59 and 60. It is possible to precisely fine-tune the value, and suppress the occurrence of undulations on the work piece 1 when precisely cutting a fine magnetic head with a thickness of a fraction of 1 mm from the work piece 1 by slice cutting. It is possible to accurately perform slice cutting. It is preferable that the seesaw shaft 22 be appropriately swung during the movement of the wire line S so as to move the wire line S as smoothly as possible.

Since the wire wire S to which the tension is applied is wound around the support rolls 6, 6, 6 a plurality of times,
By gradually raising the table 2 at a constant speed, the wound wire wire S can be pressed against the workpieces 1. Here, at the same time when the wire line S is moved, a polishing liquid is supplied to the wire line S and the workpiece 1 from a polishing liquid supply device (not shown). To raise the table 2,
By rotating the screw shaft 103 of the intermittent vertical movement mechanism E shown in FIG.
Since the push-down member 100 that has been pressing can be gradually raised, the table 2 can be gradually raised at a constant speed by utilizing the pulling force of the heavy pulling member 85 via the pulling wire 81. When the table 2 rises and a large number of workpieces 1 on the jig 135 come into contact with the wire lines S wound between the support rolls 6, 6, 6, the wire lines S simultaneously predetermine the large number of workpieces 1. Slice cutting at intervals of.

At this time, the wire wire S wound around the support rolls 6, 6, 6 is wound around the two winding portions 6A, 6B having the same length as the workpiece 1 as shown in FIG. Since it is wound, almost all of the wire wire S wound around the support rolls 6, 6, 6 can be used for slice cutting. That is, it is possible to eliminate as much as possible the wire lines S wound around the support rolls 6, 6 and 6 that do not come into contact with the workpiece 1. As described above, since it is possible to perform the slice cutting while pressing the workpieces 1 ... Evenly on almost all of the wire wires S wound around the support rolls 6, 6, 6, the cutting accuracy of the workpieces 1 by the wire wires S can be improved. Can be improved. The reason for this is that if the wire rolls S are wound around the entire length of the support rolls 6, 6, 6, the wire rolls S that contact the workpiece 1 and the wire traces S that do not contact the workpiece 1 are supported by the support rolls 6, 6. 6,
6, the load balance with respect to the wire wire S is lost, and the wire wire S having an increased tension and the wire wire S having a decreased tension are present on the support rolls 6, 6, 6 and therefore the cutting accuracy is improved. Will be reduced.

Further, by reducing the number of wire wires S wound around the supporting rolls 6, 6, 6 as much as possible, the load on the supporting portions of the supporting rolls 6, 6, 6 can be reduced, and the slice cutting precision can be improved. Contribute to the improvement of. That is, the supporting rolls 6, 6, 6 having a length capable of being wound 130 times
When the wire wire S is wound around the entire length, the number of times of winding is 130 times, and when the winding force is 2 kg per one winding, the force of 260 kg acts on the support rollers 6, 6, 6. . On the other hand, as shown in FIG. 9, when the wire wire S is wound only on the portion corresponding to the length of the work piece 1 in accordance with the shape of the work piece 1, 1
The number of windings is about 00, and the force applied to the supporting rolls 6, 6, 6 at that time is 200 kg. As a result, the pressure load on the support shafts of the rolls 6, 6, 6 is reduced, and the bending and warpage of the support shafts are reduced.
Since the gap difference between the wire lines S wound around the support rolls 6, 6, 6 is reduced, the processing accuracy of the slice cutting process is improved.

Next, the tension generating mechanism D, which applies a tension to the wire wire S, has two rotating shafts 51, 5 on the supporting member 53.
2 are only supported by one bearing portion each, which is less than the three required by the conventional gear mechanism B shown in FIG. 24, so that rotation that requires accurate positioning is performed. Since the number of shafts and the number of shaft supporting portions are reduced, the positioning work of the rotary shaft can be facilitated and the positioning accuracy can be improved. Further, basically, since the two rotary shafts each of which is supported by the support member 53 at one place are supported, the work of removing the rotary shafts 51 and 52 can be performed more easily than the conventional structure. Therefore, maintenance work involving disassembly work can be performed more easily than before. From the above, it is possible to improve the positional deviation accuracy and the eccentricity accuracy during rotation of the first rotary shaft 51 and the second rotary shaft 52, and thereby also stabilize the value of the tension applied to the wire wire S. Therefore, it is possible to improve the processing accuracy during the slice cutting of the work piece 1. That is, the work piece 1 can be sliced and cut with less twist than the conventional device.

Next, when the cutting process is continued, there may be a case where the abrasive liquid is not sufficiently supplied to the contact portion between the workpiece 1 and the wire line S. FIG. 14 shows a wire line S
Shows a state in which the workpiece 1 is being cut. In this state, although the wire wire S is tensioned, it is pressed against the workpiece 1, so the wire wire S is slightly upward. While being bent, the workpiece 1 is brought into contact with the workpiece 1 and the processing is advanced in this state. When the abrasive liquid is supplied from the periphery of the workpiece 1, the abrasive liquid easily penetrates to the entrance side of the cutting groove 1a of the workpiece 1, but easily enters the bottom portion 1b side of the cutting groove 1a. Intrusion may not occur, and in some cases, the cutting may proceed without the abrasive liquid being supplied to the bottom portion 1b of the cutting groove 1a, and in some cases, the wire S may be broken.

In order to solve such a problem, the operation of pulling the wire wire S away from the bottom portion 1b of the cutting groove 1a of the workpiece 1 is performed every predetermined time as the slice cutting process progresses. In order to perform this operation, the intermittent vertical movement mechanism E shown in FIG. 7 is operated. When the piston rod 99 of the pressing device 90 of the intermittent up / down mechanism E is extended to lower the lower support piece 98 and the pressing member 100 lowers the table 2 by a minute distance, the wire line S shown in FIG. 14 is shown in FIG. Since it is possible to raise and separate from the bottom portion 1b of the cutting groove 1a as described above, the abrasive liquid can be supplied to the bottom portion 1b of the cutting groove 1a from the gap 140 formed in this separated portion. Since the polishing liquid can be supplied to the bottom portion 1b in an instant, the intermittent vertical movement mechanism E is operated to lower the table 2 at a predetermined interval for a short time. By operating in this manner, it is possible to prevent the wire wire S from being broken due to the supply of the polishing liquid being impossible. As the cutting progresses, processing scraps, processing sludge and the like are generated on the wire wire S in the cutting groove 1a of the workpiece 1 and try to be deposited. When pulling up S and lifting them up with the wire line S,
Since the abrasive liquid that has been sprayed on the workpiece 1 and is flowing on the surface of the workpiece 1 rinses away these, the processing waste and the processing sludge can be easily removed from the cutting groove 1a.

Continuing the slice cutting process as described above,
The workpiece 1 is cut by the wire wire S, and when the wire wire S reaches the fixing jig 135 that supports the workpiece 1, the slice cutting process is finished. Fixing jig 1 after processing is completed
35 is removed from the supporting jig 75, and the fixing jig 135 and the workpiece 1 are dipped in a solution for dissolving the adhesive to dissolve the adhesive, so that a large number of magnetic heads H shown in FIG. Can be obtained at the same time.

[0035]

【Example】

[Example 1] A situation in which the amount of waviness was generated when a ferrite rod-shaped workpiece was sliced using the wire saw device configured as shown in Fig. 1 was tested. The support roll is made of ultra-high molecular polyethylene and has an outer diameter of 60 mm and a length of 5
The one having 0 mm and the number of circumferential grooves of 130 was used. As the wire wire, a piano wire having a diameter of 0.134 mm was used, and the wire wire was wound around a supporting roll by 50 turns around two winding portions over a length of 15 mm. The polishing liquid used was # 6000.
Abrasive grains were dispersed in oil, and cutting oil was added to this and supplied from above the workpiece. In this device, a conventional gear device B shown in FIG. 24 is used to apply tension to a wire wire to cut 40 workpieces, and a tension generating mechanism D shown in FIG. 2 is used to cut the wire wire. FIG. 16 shows the result of obtaining the tension fluctuation value when 40 workpieces were cut by applying tension to the workpiece. In order to generate tension on the wire, the rotation speed difference between the rotation shafts 25 and 26 of the gear device B shown in FIG. 24 is set to 1.2: 1.
The rotational speed difference between the rotating shafts 51 and 52 shown in (1) is set to 1.2: 1.

The tension fluctuation value is measured by using a tension meter to measure the resistance value when the rotating shaft 25 of the gear device B is fixed and the rotating shaft 26 is rotated, and the rotating shaft 51 shown in FIG.
The resistance value when the rotating shaft 52 was rotated with the shaft fixed was measured with a tension meter. As shown in FIG. 16, when the conventional gear device was used, a large tension fluctuation (about 800 g) occurred before and after processing, whereas when the tension generating mechanism D was used, before and after processing. It was found that there was no large change in tension (change of about 100 g). That is, in the device using the conventional gear mechanism, the tension decreases as the machining progresses, so it is not possible to apply a stable tension from the beginning to the end of the machining, while using the tension generating mechanism D according to the present invention It is clear that slice cutting can be performed while applying almost constant tension from the beginning to the end.

[Embodiment 2] Next, in the case where the magnetic head H having the shape shown in FIG. 17 is obtained from the rod-shaped workpiece 1 by slice cutting, the relationship between the waviness and the tension of the wire wire, Measure the relation between grain size, the relation between undulation and the viscosity of abrasive grains, the relation between undulation and load (pressing load by wire wire), the relation between undulation and wire wire feed speed, and the relation between undulation and the number of wire reciprocations, The results are shown in FIGS. 18 (A) to (F). FIG. 18 (A)-
From the results shown in (F), it was found that the wire line tension and the size of the abrasive grains have a large effect on the waviness. However, the abrasive grain size is a parameter that cannot be freely selected when manufacturing a magnetic head, and there is a limitation that an abrasive grain of a substantially fixed size must be used according to the material of the magnetic head to be cut. Therefore, it was revealed that slice cutting using the tension generating mechanism D used in Example 1 is extremely important for manufacturing a magnetic head with less undulation and high dimensional accuracy.

[Embodiment 3] Next, an experiment was conducted to verify the effect of the intermittent vertical moving mechanism E when the workpiece 1 was sliced. The work piece consists of a single crystal ferrite bar, the fixing jig consists of a polycrystalline ferrite block, and both are bonded and integrated with a high-hardness instant adhesive. When slicing from the surface of the fixing jig to the surface of the fixing jig, the intermittent vertical movement mechanism E is operated under the condition (0.2 ATF) of lowering the workpiece for a moment by 0.2 mm and then returning it. When the intermittent vertical movement mechanism E is operated under the condition of the operation (0.4 ATF) of temporarily lowering the work piece by 0.4 mm at a 1 minute interval and then returning it (0.4 ATF), the intermittent vertical movement mechanism E is used. FIG. 19 shows the result of obtaining the relationship between the cutting position and the processing time in the case where the cutting was not performed.

Workpieces made of single crystal ferrite are used when the intermittent vertical movement mechanism E is operated under the conditions of 0.2 ATF or 0.4 ATF to perform slice cutting, and when the slice cutting is performed without being operated. There is almost no difference until the cutting of itself is completed (portions P to Q of FIG. 19), but the slice cutting process exceeds the adhesive portion (portion R of FIG. 19) and the work piece and the fixing jig are cut. When both of them reach the slice cutting portion (T portion in FIG. 19), a difference occurs between them, and the intermittent vertical movement mechanism E
It was revealed that more cutting was possible when activating. Therefore, it has been clarified that the slice cutting process can be performed at a higher cutting speed by operating the intermittent vertical movement mechanism E.

[Embodiment 4] By providing the idler mechanism according to the present invention to form two spaced wire wire winding portions on the support roll, and consequently reducing the number of wire wire windings around the support roller. Tested for effect. The same supporting roller used in Example 1 was wound 130 times over the entire length, and the winding portion having a width of 15 mm had 5 pieces.
A total of 100 windings, 0 times each, was prepared, and the shaft eccentricity W (see FIG. 20), the roller expansion / contraction amount Z, and the heat generation state during processing were measured when the support rollers having the respective numbers of windings were used. . The results are listed in Table 1 below.

[0041]

[Table 1]

As is clear from the results shown in Table 1, 1
A roller shaft eccentricity of 1 is obtained by using a support roller of 100 turns rather than a support roller of 30 turns.
It can be reduced to about ⅓, and the amount of roller expansion and contraction is ⅙
It has been found that the heat can be reduced to about 1/7 and the heat generated by processing can be significantly reduced. The reason why the characteristics can be greatly improved in this way is that the number of windings of the wire wire around the support roller is reduced to reduce the winding pressure applied to the support roller, and that when cutting the work piece, the cutting is performed. It seems to be a synergistic effect of being able to eliminate wire wires that do not contribute to. Also, if the number of windings increases and the shaft of the support roller seems to bend, it is expected that the rotation resistance will increase, which will generate heat, resulting in an increase in processing heat. It seems to be effective to reduce the number.

[Embodiment 5] The cut surface roughness of the magnetic head obtained from the workpiece by slice cutting by using the support roller of 100 turns in the above-mentioned Embodiment 4 and the above-mentioned Embodiment 4 for comparison. The cutting surface roughness of the magnetic head obtained by using the 130-roll support roller used in Example 1 was measured, and the variation in the surface roughness was obtained for each lot. The results are shown in FIG. In the bar graph of FIG. 21, one bar shows the dispersion of 10 samples. As is clear from the results shown in FIG. 21, by adopting a configuration using a support roller having a small number of windings, the variation in the surface roughness of the cutting surface is in the range of 1 to 5 μm from the conventional range of 5 to 13 μm. It became clear that it can be done very little. This is because if there are wires that come into contact with the work piece and those that do not come into contact with the work piece, there will be looseness between the wire wires that come into contact with the work piece and those that do not. It is considered that this is caused by the fact that the contact state of the wire wire with respect to the work piece becomes partially different, which causes the unevenness of the cut surface to become large. If the variation in surface roughness is in the range of 5 to 13 μm, the surface accuracy required for the magnetic head is insufficient. Therefore, it is necessary to further perform lapping to finish the cut surface before sending to the next step. However, if the variation is accurate to 1 to 5 μm, it can be sent to the next step without performing such lapping, so that the lapping can be omitted.

[0044]

As described above, according to the present invention, the rotary shaft of the guide roller on the side for supplying the wire wire wound around the support roller to the support roller and the rotary shaft for the guide roller on the side of withdrawing from the support roller are provided. The rotary member is pivotally supported by the support member, one of the rotary shafts is provided with a clutch mechanism, and both rotary shafts are linked by the rotation transmitting member via the clutch mechanism, and the clutch mechanism is made of a magnetic material attached to one rotary shaft. The clutch plate is sandwiched between annular permanent magnet members, the permanent magnet member is divided into a plurality of poles around the circumference, and the number of magnetic lines of force across the clutch plate is adjusted by changing the facing position of the permanent magnet member. Since the rotation can be suppressed by magnetic force lines and a difference in the number of rotations can be generated between the one rotation shaft and the other rotation shaft, it is possible to generate tension in the wire wire supplied to the support roller. Can.

Further, if the rotational speed of the clutch plate is suppressed by changing the facing position of the annular permanent magnet members, the clutch plate can be finely adjusted by adjusting the facing position of the annular permanent magnet member. Since the number of revolutions can be accurately adjusted, it is possible to precisely fine-tune the tension to be generated to the desired value, and when slicing a small workpiece accurately, the undulation can be suppressed, while the generation of undulation is accurate. Can be cut into slices. Further, the number of rotating shafts supported by the supporting member may be two, and since the number of rotating shafts is smaller than that of the conventional three-shaft structure, the number of shaft supporting portions is small and the structure is simplified
It is possible to provide a wire saw device in which positioning of the rotary shaft can be accurately performed and disassembling and maintenance thereof are easy.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an example of a wire saw device according to the present invention.

FIG. 2 is a sectional view showing a tension generating mechanism provided in the wire saw device shown in FIG.

3 is a cross-sectional view showing an example of a magnetic torque clutch mechanism incorporated in the tension generating mechanism shown in FIG.

FIG. 4 is a perspective view of a permanent magnet member provided in the magnetic torque clutch mechanism shown in FIG.

5 is an explanatory diagram showing an example of directions of magnetic force lines generated from the permanent magnet member shown in FIG.

6 is an explanatory diagram showing an example of directions of magnetic force lines generated from the permanent magnet member shown in FIG.

7 is a configuration diagram showing an example of an intermittent vertical movement mechanism provided in the wire saw device shown in FIG.

FIG. 8 is a perspective view of a table portion provided in the wire saw device provided in FIG. 1.

9 is a side view showing a support roller and an idler mechanism provided in the wire saw device provided in FIG. 1. FIG.

10 is a perspective view showing an example of a work piece that is slice-cut by the wire saw device shown in FIG. 1. FIG.

11 is a perspective view showing a state where the workpiece shown in FIG. 10 is fixed to a fixing jig.

12 is a plan view showing an example of a magnetic head obtained from the workpiece shown in FIG.

FIG. 13 is an explanatory diagram showing a relative positional relationship among a workpiece, a fixing jig, and a wire line.

FIG. 14 is a perspective view showing a state in which a wire wire is slice-cut on a workpiece.

FIG. 15 is a perspective view showing a state where the wire wire is lifted in a state where the workpiece is sliced and cut.

FIG. 16 is a diagram showing the results of measuring the tension fluctuation state before and after processing in the conventional apparatus and the apparatus of the present invention.

FIG. 17 (A) is a side view of a magnetic head slice-cut from a workpiece, and FIG. 17 (B) is a diagram showing the amount of waviness of the magnetic head.

FIG. 18 (A) is a diagram showing the relationship between the amount of undulation and wire wire tension, FIG. 18 (B) is a diagram showing the relationship between the amount of undulation and the abrasive grain size of the abrasive liquid, and FIG. 18 (C) is the undulation. FIG. 18 (D) is a diagram showing the relationship between the amount and the viscosity of the abrasive grain of the polishing liquid, FIG. 18 (D) is a diagram showing the relationship between the waviness amount and the load (the pressing force of the wire wire against the workpiece), and FIG. 18 (E) is the waviness amount. FIG. 18F is a diagram showing the relationship between the wire wire feed speed and FIG. 18F is a diagram showing the relationship between the amount of undulation and the rotational speed of the drive.

FIG. 19 is a diagram showing a relationship between a cutting position and a descent time when a workpiece is sliced using the apparatus according to the present invention and the conventional apparatus.

FIG. 20 is a diagram for explaining a bending amount and a stretching amount of a support roller.

FIG. 21 is obtained when a workpiece is slice-cut by using a device that winds a wire wire over the entire length of a supporting roller and a device that forms two winding parts on the supporting roller to reduce the number of windings. It is a figure which shows the distribution of the surface roughness of the cut surface of the magnetic head.

FIG. 22 is a configuration diagram showing an example of a conventional wire saw device.

FIG. 23 is a view showing a state in which a workpiece is sliced and cut by a conventional wire saw device.

FIG. 24 is a cross-sectional view showing a gear device used in a conventional wire saw device.

[Explanation of symbols]

C wire saw device, D tension generation mechanism, E intermittent vertical movement mechanism, F idler mechanism, G magnetic torque clutch mechanism, S wire wire, 1 workpiece, 2 table, 5 control plate, 6 support roller, 7, 8, 9 Guide roller, 10, 11, 12 Guide roller, 13, 14, 15, 16 Guide roller, 17 Supply roll, 20 Winding roll, 51 First rotating shaft, 52 Second rotating shaft, 53 Support member, 57 Case , 58 clutch plate, 59, 60 permanent magnet member, 66 timing belt (rotation transmitting member), 70 support base.

Claims (1)

[Claims] 1. A table for holding a workpiece, a plurality of support rollers provided above the table so as to face the workpiece, a control panel erected on one side of the table, and A plurality of guide rollers provided on the control panel, a supply mechanism for supplying a wire wire to the guide rollers of the control panel, and a wire wound around the plurality of support rollers via the guide rollers of the control panel. A winding mechanism for winding the wire through another guide roller of the control panel, and the work and the plurality of support rollers are configured to be movable toward and away from each other and between the plurality of support rollers. A wire saw device for slicing a workpiece by pressing a wire wire wound on a workpiece to a workpiece, wherein a guide roller on a front side of a support roller among a plurality of guide rollers provided on the control panel. One and support roller A tension generating mechanism for providing a rotational speed difference to one of the guide rollers on the rear stage side is provided, and the tension generating mechanism is connected to one of the guide rollers on the front stage side of the support roller. A second rotation shaft connected to one of the guide rollers on the rear side of the support roller, a support member for rotatably supporting these rotation shafts in parallel with each other, and attached to the one rotation shaft. And a rotation transmission member that cooperates with the output shaft of the clutch mechanism and the other rotation shaft to rotate the other rotation shaft in synchronization with the output shaft. A clutch plate made of a magnetic material attached to the one rotating shaft so as to be orthogonal to the rotating shaft,
The clutch plate is sandwiched from both sides in the thickness direction and is provided with a pair of annular permanent magnet members provided rotatably, and the permanent magnet member is divided into a plurality of poles in the circumferential direction, A wire saw device, characterized in that the rotation of the clutch plate can be suppressed by adjusting the number of magnetic lines of force exerted on the clutch plate by changing the rotational position of the permanent magnet member.