JPH09254139A - Method and device for controlling displacement of blade of slicing machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device for controlling displacement of a blade of a slicing machine which has a simple mechanism and can control the displacement of the blade. SOLUTION: Air current in a peripheral direction to be generated at a lower part of a blade 14 by the rotation of the blade 14 is guided by a tiltable fin 28 so as to make it flow to the bottom face of the blade 14. As a result, the blade 14 is pressed at its bottom face by wind pressure of the air current, and is displaced to the upper side. The displacement quantity is decided by the air quantity of the air current to be guided to the bottom face of the blade 14 by the fin 28. Accordingly, when the air quantity of the air current to be guided to the bottom face of the blade 14 is adjusted in accordance with the displacement of the blade 14 which is cutting, the displacement of the blade 14 can be corrected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a blade displacement control method and apparatus for a slicing machine, and more particularly to a blade displacement control method and apparatus for a slicing machine that cuts an ingot of silicon or the like, which is a material of a semiconductor element, into a wafer.

[0002]

2. Description of the Related Art With the recent increase in the size of wafers, the blades of slicing machines tend to have larger diameters. The problem here is that the blade is deformed during the cutting and the wafer is warped. Therefore, various measures have been reported for preventing the blade from warping during cutting. For example, there are a method of controlling the displacement of the blade by the magnetic force generated by the magnetic force generating means during cutting, and a method of controlling the displacement of the blade by the air pressure from the air pad.

[0003]

However, the above-mentioned method has the drawbacks that the apparatus becomes complicated and the price becomes high due to the installation of the magnetic force generating means and the air pad. The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a blade displacement control method and device for a slicing machine that can control blade displacement with a simple mechanism.

[0004]

In order to achieve the above-mentioned object, the present invention provides a blade displacement control method for a slicing machine in which an ingot is pressed against a rotating inner peripheral blade type blade and the ingot is cut into wafers. An inclinable fin is provided on the side of the blade, and a circumferential air flow generated on the side of the blade by rotating the blade is guided to flow toward the blade by the fin, The displacement of the blade is controlled by wind pressure.

In the present invention, attention is paid to the fact that when the blade is rotated, an air flow in the circumferential direction is generated along the rotation of the blade on the side of the blade. By controlling this air flow with fins, Control displacement. That is, the air flow generated on the side of the blade is guided by the tiltable fin so as to flow toward the blade, and the wind pressure presses the blade. Then, the inclination angle of the fin is adjusted according to the displacement of the blade during cutting, and the wind pressure on the blade is adjusted to control the displacement of the blade.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a blade displacement control method and apparatus for a slicing machine according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a configuration diagram of an embodiment of a slicing machine to which a blade displacement control method according to the present invention is applied.

As shown in the figure, a chuck body 12 is connected to the upper end of the spindle 10. A motor (not shown) is connected to the spindle 10, and the chuck body 12 is driven by this motor to rotate. A doughnut-shaped blade 14 is pulled up from the inner periphery of the upper end of the chuck body 12. The blade is pulled up with a predetermined tension by a well-known tensioning mechanism (not shown), and an inner peripheral blade 16 to which diamond abrasive grains are electrodeposited and fixed is formed on the inner peripheral portion thereof.

A work support 20 for supporting the ingot 18 is provided above the chuck body 12. The work support base 18 is moved in the cutting feed direction (XX direction in the drawing) by the cutting feed mechanism 22 and in the work indexing direction (ZZ direction in the drawing) by the work indexing mechanism 24.
Each is configured to be movable. Further, the cutting feed mechanism 22 and the work indexing mechanism 24 are both drive-controlled by the control device 26, and move the work support base 18 based on a command signal output from the control device 26.

Within the chuck body 12, there are provided fins 28 for controlling the circumferential air flow generated below the blade 14 during rotation. Fin 2
8 is an ingot 1 of the blade 14 as shown in FIG.
8 is installed on the upstream side of the cutting portion, and guides the circumferential air flow generated by the rotation of the blade 14 toward the lower surface of the blade 14.

FIG. 3 is a block diagram of the fin. Fin 2
A base end portion 8 is swingably supported by a base plate 30 installed in the chuck body 12 via a support shaft 31. A spring 32 connected to the base plate 30 is fixed to the back surface of the fin 28, and the fin 28 is biased upward by the spring 32.

A wire 34 is connected to the tip of the fin 28, and the wire 34 is wound around a winding roller 38 via a guide roller 36. Take-up roller 38
Is connected to a rotating shaft of a motor 40 provided on the base plate 30 and capable of rotating in the forward and reverse directions.
By driving 0, the winding amount of the wire 34 is adjusted and the inclination angle of the fin 28 is adjusted.

The motor 40 is driven and controlled by a controller 26, which is similar to the cutting feed mechanism 22 and the work indexing mechanism 24. The controller 26 controls the blade sensor 42.
A command signal is output to the motor 40 in accordance with the amount of displacement of the blade 14 detected in. It should be noted that this blade sensor 42, as shown in FIGS.
Is installed below the cutting portion of the ingot 18 and detects the displacement of the blade 14 in a non-contact manner.

The blade displacement control method in the slicing machine constructed as described above is carried out as follows. When the chuck body 12 is rotationally driven and the blade 14 is rotated, the blade 14 is located below the blade 14.
A circumferential air flow is generated along with the rotation. The air flow is guided by the fins 28 toward the lower surface of the blade 14.

The guided air presses the lower surface of the blade 14, and as a result, the blade 14 is displaced upward. The amount of displacement of the blade 14 depends on the wind pressure on the lower surface of the blade 14, and the wind pressure depends on the inclination angle of the fin 28. That is, if the inclination angle of the fin 28 is increased, the wind pressure applied to the lower surface of the blade 14 also increases,
If the inclination angle of the fin 28 is reduced, the wind pressure is also reduced. Therefore, if the inclination angle of the fin 28 is adjusted,
The displacement of the blade 14 can be adjusted arbitrarily. Therefore, the fins 28 are drive-controlled as follows to correct the displacement of the blades 14 that occurs during cutting.

First, as shown in FIG. 4 (a), the fin 28 is tilted in advance by a predetermined angle, and a predetermined amount of air is sent to the lower surface of the blade 14 to displace the blade 14 upward by a predetermined amount. . The position of the blade 14 at this time is set as a cutting reference position, and the displacement of the blade 14 is corrected based on this cutting reference position. Next, when the displacement of the blade becomes stable, the zero point of the blade sensor 42 is set and the cutting of the ingot 18 is started.

During cutting, the blade sensor 42 constantly detects the amount of displacement of the blade 14, and the detected value is output to the control device 26. The control device 26 drives and controls the motor 40 based on the detection value information output by the blade sensor 42. For example, as shown by a broken line in FIG. 4B, when the blade 14 is displaced downward with respect to the cutting reference position, the control device 26 causes the motor 40 to rotate in the forward rotation direction, that is, the wire 34 feeding direction. Drive to fin 2
Gradually raise the inclination angle of 8. As the inclination angle of the fin 28 increases, the wind pressure that hits the lower surface of the blade 14 also increases, so the blade 14 is pressed upward. Therefore, the blade 14 displaced downward is gradually corrected to the cutting reference position. Then, when the displacement of the blade 14 detected by the blade sensor 42 becomes zero, the driving of the motor 42 is stopped. As a result, the displacement of the blade 14 displaced downward is corrected.

On the other hand, as shown by the broken line in FIG. 4 (c), when the blade 14 is displaced upward with respect to the cutting reference position, the control device 26 causes the motor 40 to rotate in the reverse direction, that is, to wind the wire 34. The fin 28 is driven in the picking direction, and the inclination angle of the fin 28 is gradually lowered. As the inclination angle of the fins 28 decreases, the air volume of the air guided to the lower surface of the blade 14 also decreases, so the pressure applied to the lower surface of the blade 14 also decreases. Therefore, the blade 1 displaced upwards
4 is also gradually corrected to the cutting reference position. Then, similarly to the above, the blade 14 detected by the blade sensor 42
When the displacement of 0 becomes zero, the drive of the motor 42 is stopped. As a result, the displacement of the blade 14 displaced upward is corrected.

By sequentially correcting the displacement of the blade 14 in the above procedure, stable cutting becomes possible.
The wafer can be cut with high accuracy. As described above, according to the blade control method for the slicing machine of the present embodiment, the displacement control of the blade 14 can be performed with an extremely simple mechanism. Further, since the generated air flow is at a high speed, a relatively high pressing force can be obtained, and a wide range of displacement adjustment can be performed.

In this embodiment, one fin 2 is used.
Although displacement control was performed with No. 8, the number of fins to be installed is not limited, and for example, as shown in FIG. 5, the fins are installed on both sides of the cutting portion of the ingot 18, that is, on the upstream side and the downstream side of the cutting portion, respectively. Then, these two fins 28A, 28
The displacement may be controlled by simultaneously controlling B.
As a result, more delicate displacement control becomes possible.

Further, as shown in the figure, the blade sensors 42 for detecting the displacement of the blade 14 may be installed not only below the cutting portion but also on both sides of the cutting portion. As a result, the displacement state of the blade 14 can be grasped with higher accuracy, and displacement control with higher accuracy becomes possible.
Further, the mechanism for inclining the fin 28 is not limited to that shown in the present embodiment, and may be configured to incline the fin 28 by a link mechanism as shown in FIG. 6, for example. That is, one end of the link 44 is swingably supported on the back surface of the fin 28, and the other end is swingably supported by a slider 46 that slides on the base plate 30,
By sliding the slider 46 with the cylinder 48, the fin 28 is inclined at an arbitrary angle. Further, as shown in FIG. 7, a motor 50 may be connected to a support shaft 31 of the fin 28, and the fin 28 may be tilted by the motor 50.

Further, in this embodiment, the displacement control of the blade 14 is performed only by the fin 28, but the displacement control may be performed by using the fin 28 and the air pad together. That is, since only the fins 28 can generate only a force that displaces the blade 14 upward, an air pad is installed above the blade 14 in order to displace the blade 14 downward. To do. When the blade 14 is displaced downward,
It is controlled by the wind pressure generated by the fins 28, and when it is displaced upward, it is controlled by the air pressure from the air pad.

In this embodiment, the case where the blade 14 is installed horizontally has been described, but the blade 1
Even when 4 is installed at an angle or vertically, it can be appropriately used.

[0023]

As described above, according to the present invention,
The displacement of the blade can be controlled with a simple mechanism.
Further, since the airflow generated by the rotation of the blade is used, it is not necessary to separately provide an air source or the like. Furthermore, since a relatively high wind pressure can be obtained from the airflow, blade displacement control can be performed in response to a wide range of blade displacement.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of a slicing machine to which a blade displacement control method according to the present invention is applied.

FIG. 2 is an explanatory diagram illustrating the installation status of fins.

[Fig. 3] Fin configuration diagram

4A to 4C are explanatory views for explaining the action of the fins.

FIG. 5 is an explanatory diagram of another embodiment.

FIG. 6 is an explanatory diagram of another embodiment.

FIG. 7 is an explanatory diagram of another embodiment.

[Explanation of symbols]

 12 ... Chuck body 14 ... Blade 16 ... Inner peripheral blade 18 ... Ingot 26 ... Control device 28 ... Fin 42 ... Blade sensor

Claims (4)

[Claims] 1. A blade displacement control method for a slicing machine, wherein an ingot is pressed against a rotating inner peripheral blade, and the ingot is cut into wafers, in which tiltable fins are provided on the sides of the blade, A slicing machine characterized in that a circumferential air flow generated laterally of the blade by rotating is guided by the fins so as to flow toward the blade, and the displacement of the blade is controlled by the wind pressure thereof. Blade displacement control method. 2. The fin is tilted at a predetermined angle, a predetermined wind pressure is applied to the blade in advance to displace the blade by a predetermined amount, and cutting is started with the position displaced by the predetermined amount as a reference position of the blade. The displacement of the blade is controlled by adjusting the inclination angle of the fin to reduce or pressurize the wind pressure applied to the blade according to the displacement of the blade during cutting. Blade displacement control method for slicing machine. 3. A blade displacement control device for a slicing machine, which presses an ingot against a rotating inner blade type blade to cut the ingot into wafers, the blade displacement control device being provided on a side of the blade and rotating the blade. The circumferential air flow generated on the side of the blade is composed of an inclinable fin that guides the air to flow toward the blade, and an angle adjusting unit that adjusts the inclination angle of the fin. A blade displacement control device for a slicing machine. 4. A blade displacement control device of a slicing machine for pressing an ingot against a rotating inner blade type blade to cut the ingot into wafers, the device being provided on a side of the blade and rotating the blade. The circumferential air flow generated on the side of the blade by tilting fins for guiding the airflow toward the blade, angle adjusting means for adjusting the tilt angle of the fin, and displacement of the blade A blade displacement control device for a slicing machine, comprising: a displacement detection unit that detects the displacement detection unit; and a control device that controls the angle adjustment unit based on a detection value of the displacement detection unit.