JPH09253869A - Ultrasonic joining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably support a resonance unit on a holder part of a device body so as to efficiently transmit to the resonance unit while obstructing the transmission of ultrasonic vibration to the device body side. SOLUTION: Because diaphragms 11, 12 interposed in joints of a phone 5 of a resonance unit 4 and a booster 6 are deflected to the transmission direction of a vibration with the action of plural numbers of slits 11b, 12b, the transmission of ultrasonic vibration from the diaphragms 11, 12 to the holder part 2 of the device body is obstructed. Further, the device has the rigidity to the direction crossing by a right angle to the transmission direction of the ultrasonic, and the ultrasonic vibration generating in a trembler 3 is transmitted efficiently to the phone 5 via the diaphragms 11, 12 and the booster 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for joining ultrasonically vibrated portions of a plurality of works which are overlapped with each other, and more particularly to a structure for supporting a resonance unit in a holder portion of an apparatus body.

[0002]

2. Description of the Related Art For example, Japanese Patent Publication No. 54-23349 discloses an ultrasonic bonding apparatus for bonding overlapping parts of a plurality of works by ultrasonic vibration having a predetermined frequency.

[0003]

In the ultrasonic bonding apparatus, energy of ultrasonic vibration is efficiently transmitted to the resonance unit, and moreover, stable support of the resonance unit on the holder of the apparatus body is energy saving and short time. This is an important issue in accurately joining the workpieces.

Therefore, according to the present invention, the resonance unit is stably supported by the holder portion of the apparatus main body so that the ultrasonic vibration is efficiently transmitted to the resonance unit while blocking the transmission to the apparatus main body side, and the quality reliability is improved. It is an object of the present invention to provide an ultrasonic bonding device capable of improving the above.

[0005]

An ultrasonic bonding apparatus for bonding a plurality of workpieces to be bonded to each other by a resonance unit which resonates with ultrasonic vibration generated by a vibrator according to claim 1. A horn having a joining action part and a booster, and this resonance unit is supported by a holder part of the main body of the apparatus through a diaphragm interposed at a joint between the horn and the booster, while the diaphragm has a slit or a closed annular recess or It is characterized in that a vibration transmission blocking portion such as a long hole is formed, and the vibration transmission blocking portion is formed so as to block the transmission of ultrasonic vibration from the resonance unit to the holder portion via the diaphragm. According to the structure of the first aspect, the diaphragm provided at the joint between the horn and the booster of the resonator unit is provided with a plurality of slits, closed annular recesses, or vibration transmission blocking portions such as elongated holes. By bending in the vibration transmission direction,
It is possible to prevent the transmission of ultrasonic vibration from the diaphragm to the holder part, and it has rigidity in the direction orthogonal to the transmission direction of the vibration, and the ultrasonic vibration generated by the vibrator is passed through the diaphragm and booster to create the horn. Can be efficiently transmitted to. Further, a front outer cylinder, a rear outer cylinder coaxially coupled to the front outer cylinder, a diaphragm housed and attached in a housing recess formed in one end of the front outer cylinder, and a rear outer cylinder formed in one end. A support mechanism is configured with the diaphragm housed and mounted in the housing recess, a booster is built in the internal space of this support mechanism, and the vibrator is closely attached to one diaphragm of the support mechanism at one end of the booster. When the horn is connected to the other end of the booster closely and coaxially with the other diaphragm of the support mechanism, the diaphragm can be accurately positioned coaxially between the front outer cylinder and the rear outer cylinder. In addition, the support mechanism can be held by the holder portion of the apparatus body, and the resonance unit can be supported more stably.

[0006]

1 to 3 show a first embodiment. In this embodiment, as shown in FIG.
The resonance unit 4 to which the vibrator 3 is coupled is mounted on one side of the holder unit 2 which is assembled so as to be able to move up and down, and the metal material is placed on the work mounting unit 1a at the front of the apparatus body 1. A plurality of workpieces (not shown), which are overlapped with each other, are mounted, and the holder unit 2 is moved downward so that the joining action portion 5a and the workpiece mounting portion 1a at the tip of the resonance unit 4 can be used to A portion to be joined of a work (not shown) is pressurized and held in between, and ultrasonic vibration is generated in the vibrator 3 to cause non-melting joining between the overlapping surfaces of the work.

In this embodiment, as shown in FIGS. 1 and 2, the vibrator 3 generates longitudinal ultrasonic vibration having a predetermined frequency by the electric energy received from the ultrasonic generator (not shown). It is an electroacoustic converter or an electric vibration converter, which is formed by a piezoelectric element, a magnetostrictive element, or the like, which converts electric energy into mechanical energy, and which has a screw hole 3a at the center of its output end. .

In the resonance unit 4, a booster 6 incorporated in a support mechanism 7 is coaxially coupled to one side of a horn 5, and the support mechanism 7 is attached to the holder portion 2.
It is assembled to the apparatus body 1.

The horn 5 is made of titanium or the like having good acoustic characteristics of a half wavelength length from the maximum vibration amplitude point f3 to the maximum vibration amplitude point f5 which resonates with the ultrasonic vibration transmitted from the vibrator 3. It is made of various alloys and has a rod shape. The horn 5 has a joining action portion 5a at the front end portion which is one of the maximum vibration amplitude points f5, and has a matching projection 5b and a screw hole 5c which are coaxial with each other at the center of the rear end portion which is the other maximum vibration amplitude point f3. I have it. The protrusion amount of the alignment protrusion 5b in the axial direction is smaller than the thickness of the front diaphragm 11 described later.

The booster 6 is made of titanium, aluminum, hardened iron or the like having a half wavelength length from the maximum vibration amplitude point f1 to the maximum vibration amplitude point f3 which resonates with the ultrasonic vibration transmitted from the vibrator 3. It is formed in a rod shape with any of the above materials. The booster 6 has a screw hole 6a at the center of the front end which is one of the maximum vibration amplitude points f3, and a matching projection 6b and a screw hole 6c which are coaxial with each other at the center of the rear end which is the other maximum vibration amplitude point f1. Be prepared for. The protrusion amount of the alignment protrusion 6b in the axial direction is set to be smaller than the thickness of the rear diaphragm 12 described later.

The support mechanism 7 includes a front outer cylinder 8, a rear outer cylinder 9, a nut 10, a front diaphragm 11, a rear diaphragm 12, a front cap 13, and a rear cap 14. The front outer cylinder 8 and the rear outer cylinder 9 are coaxially connected to each other by screw fitting, so that the booster 6 is coaxially arranged in the inside thereof without contact.

In this embodiment, a female screw portion 8a is formed stepwise on the rear half of the inner peripheral surface of the front outer cylinder 8 so as to have a large inner diameter, and the front diaphragm 11 is housed so that the front diaphragm 11 does not rattle. The housing recess 8b is formed concentrically. The accommodation recess 8b has an inner diameter and a depth substantially the same as the outer diameter and thickness of the front diaphragm 11. A plurality of screw holes 8c are formed at equal intervals in the circumferential direction on the closed annular end surface serving as the bottom surface of the accommodation recess 8b.

On the rear outer cylinder 9, a male screw portion 9a to be screwed into the female screw portion 8a of the front outer cylinder 8 is formed stepwise so as to have a small outer diameter on the front half side of the outer peripheral surface. A nut 10 having an outer diameter smaller than that of the rear outer cylinder 9 is attached to the male screw portion 9a. On the rear end surface of the rear outer cylinder 9, there is concentrically formed an accommodating recess 9b in which the rear diaphragm 12 is accommodated so as not to rattle. Accommodation recess 9
The inner diameter and depth of b are formed to have substantially the same dimensions as the outer diameter and thickness of the rear diaphragm 12. A plurality of screw holes 9c are formed at equal intervals in the circumferential direction on the closed annular end surface as the bottom surface of the accommodation recess 9b.

The front diaphragm 11 has a matching hole 11a concentrically in the center thereof. The alignment hole 11a has a diameter substantially the same as the outer diameter of the alignment protrusion 5b of the horn 5 so that the alignment protrusion 5b of the horn 5 can be inserted without rattling. Around the alignment hole 11a, the front diaphragm 11 is formed with a plurality of slits 11b, which are vibration transmission blocking portions, in a circumferentially equally spaced arrangement. The slits 11b are radially cut from the outer peripheral edge of the front diaphragm 11 toward the center. Each slit 11b
Through-holes 11d are formed in the diaphragm piece 11c in the space between the outer peripheral side and the circumferentially bisected position on the same circumference as the screw holes 8c of the front outer cylinder 8.

The rear diaphragm 12 has a matching hole 1 at the center.
It has 2a concentrically. The alignment hole 12a has a diameter substantially the same as the outer diameter of the alignment protrusion 6b of the booster 6 so that the alignment protrusion 6b of the booster 6 can be inserted without rattling. Around the alignment hole 12a, the rear diaphragm 12 is formed with a plurality of slits 12b, which are vibration transmission blocking portions, in a circumferentially equally spaced arrangement. The slits 12b are radially cut from the outer peripheral edge of the rear diaphragm 12 toward the center. The diaphragm piece 12c between the slits 12b has a through hole 12d at the outer peripheral edge side in a circumferentially bisected position at a screw hole 9 of the rear outer cylinder 9.
It is formed on the same circumference as c.

The front cap 13 is formed in a closed ring shape having an outer diameter substantially the same as that of the front diaphragm 11 and an inner diameter substantially the same as that of the front outer cylinder 8, and the plurality of through holes 1
3a is provided at a position corresponding to the screw hole 8c of the front outer cylinder 8.

The rear cap 14 is formed in a closed ring shape having an outer diameter substantially the same as the rear diaphragm 12 and an inner diameter substantially the same as the rear outer cylinder 9, and a plurality of through holes 14a are formed in the rear outer cylinder 9 with screw holes. It is provided at a position corresponding to 9c.

In the case of this embodiment, the slit 11 is formed in the front diaphragm 11 and the rear diaphragm 12.
Since each of the diaphragm pieces 11c and 12c and the through holes 11d and 12d is six because six b and 12b are formed, the screw hole 8 between the front outer cylinder 8 and the rear outer cylinder 9 is formed.
c, 9c, front cap 13 and rear cap 14
The through holes 13a and 14a are formed in the number of 12 which is twice the number of the slits 11b and 12b.

The vibrator 3 and the resonance unit 4 of this embodiment
The support mechanism 7 is assembled as follows. First, the booster 6 is mounted inside the support mechanism 7. That is, the front diaphragm 11 is housed in the housing concave portion 8b of the front outer cylinder 8, and the front diaphragm 11 is housed in the front diaphragm 11.
And one screw 15 for each diaphragm piece 11c is fastened from the through hole 13a of the front cap 13 to the screw hole 8c of the front outer cylinder 8 through the through hole 11d of the front diaphragm 11. Further, the rear diaphragm 12 is housed in the housing recess 9b of the rear outer cylinder 9, the rear cap 14 is overlaid on the rear diaphragm 12, and one screw 16 is attached to each diaphragm piece 12c from the through hole 14a of the rear cap 14. Screw hole 9c of rear outer cylinder 9 through through hole 12d of rear diaphragm 12
The nut 10 is attached to the male screw portion 9a of the rear outer cylinder 9 as far as it will go. Then, after inserting the booster 6 into the inside of the rear outer cylinder 9 through the opening of the male screw portion 9a of the rear outer cylinder 9 and inserting the alignment projection 6b of the booster 6 into the alignment hole 12a of the rear diaphragm 12, the rear outer cylinder The female screw portion 8a of the front outer cylinder 8 is attached to the male screw portion 9a of 9 and the front end face of the booster 6 is brought into contact with the rear end face of the front diaphragm 11 to form the outer surface of the nut 10 (not shown). Nut 1 with the tightening tool inserted in the tool hole
0 is rotated in the fastening direction to move it forward to the front outer cylinder 8 side, and the nut 10 together with the front outer cylinder 8 is attached to the rear outer cylinder 9
Fasten with a double nut.

Next, the vibrator 3 and the horn 5 are coaxially assembled with the headless bolts 17 and 18 in front of and behind the support mechanism 7 having the booster 6 built therein. In this case, either the vibrator 3 or the horn 5 may be assembled to the support mechanism 7 first.
One headless bolt 17 is fastened to the screw hole 5c of the horn 5, and the headless bolt 17 protruding from the horn 5 is fastened from the matching hole 11a of the front diaphragm 11 to the screw hole 6a on the front end side of the booster 6. Further, another headless bolt 18 is fastened to the screw hole 3a of the vibrator 3, and the headless bolt 18 protruding from the vibrator 3 is attached to the rear diaphragm 1.
2 from the matching hole 12a to the screw hole 6c on the rear end side of the booster 6
To conclude. In this state, the horn 5 is
Is held so as not to rotate, and the vibrator 3 is rotated in the fastening direction by a tightening tool (not shown) inserted in a tool hole (not shown) formed on the outer peripheral surface of the vibrator 3, so that the vibrator 3, The horn 5, booster 6, front diaphragm 11, and rear diaphragm 12 are firmly fastened.

By this fastening, as shown in FIG. 1, a gap 19 is formed between the matching projection 5b of the horn 5 and the front end surface of the booster 6, and the matching projection 5b of the horn 5 is attached to the front diaphragm 11. Inscribed in the matching hole 11a,
The front end face and the rear end face of the front diaphragm 11 around the alignment hole 11a are individually brought into close contact with the rear end face outside the alignment protrusion 5b of the horn 5 and the front end face of the booster 6. Further, a gap 20 is formed between the matching projection 6b of the booster 6 and the output end surface of the vibrator 3, and the matching projection 6b of the booster 6 is internally fitted into the matching hole 12a of the rear diaphragm 12, Alignment protrusions 6b of the booster 6 on the front end face and the rear end face of the rear diaphragm 12 around the alignment hole 12a.
The rear end face on the outer side and the output end face of the vibrator 3 individually come into close contact with each other.

Moreover, the oscillator 3, the horn 5, and the booster 6
Are screw holes 3a, 5c, 6a, 6c and headless bolts 17,
It is coupled with 18 exactly coaxially. Also, the matching projection 5b of the horn 5 and the matching hole 1 of the front diaphragm 11
1a, coaxial fitting between the front diaphragm 11 and the accommodation recess 8b of the front outer cylinder 8, alignment projection 6b of the booster 6 and alignment hole 12a of the rear diaphragm 12.
Coaxial fitting with, rear diaphragm 12 and rear outer cylinder 9
The horn 5 and the booster 6 are accurately coaxially positioned and coupled to the support mechanism 7 by the coaxial fitting with the housing recess 9b.

According to the structure of this embodiment, as shown in FIG. 1, in the resonator unit 4, the horn 5 is attached to the front end of the booster 6 so as to close the one end opening of the front outer cylinder 8. An internal space that is closely connected to the head 11 and is coaxially coupled by the headless bolt 17 and the screw holes 6a and 5c, and that is formed by the front outer casing 8 and the rear outer casing 9 coaxially coupled thereto. A booster 6 is built into the rear end of the booster 6, and a vibrator 3 is attached to the rear diaphragm 12 attached to the rear end of the booster 6 so as to close one end opening of the rear outer cylinder 9, and the headless bolt 18 and the screw hole 3a,
6c and coaxially. That is, the front diaphragm 11 and the rear diaphragm 12 located at the portions of the maximum vibration amplitudes f3 and f1 of the resonance unit 4 are bent in the vibration transmission direction of the resonance unit 4 by the plurality of slits 11b and 12b.
It is possible to prevent the transmission of ultrasonic vibrations from the front outer cylinder 8 to the front outer cylinder 8, and to prevent the transmission of ultrasonic vibrations from the rear diaphragm 12 to the rear outer cylinder 9. Regarding the prevention of transmission of this ultrasonic vibration, the applicant of the present invention grips the front outer cylinder 8 and the rear outer cylinder 9 with his / her hand to generate ultrasonic vibration of 40 kHz in the vibrator 3, and does not feel the vibration at all in the hand. That was confirmed. Further, the front diaphragm 11 and the rear diaphragm 12 have rigidity in the direction orthogonal to the vibration transmission direction, and the ultrasonic vibration generated in the vibrator 3 is passed through the rear diaphragm 12, the booster 6, and the front diaphragm 11. Can be efficiently and properly transmitted to the horn 5.

In particular, the front diaphragm 11 and the rear diaphragm 12 are made of metal disks and have matching holes 11a, 1a.
2a, slits 11b and 12b, through holes 11d and 12d
The shape is simple and the cost can be reduced.

Further, the front outer cylinder 8, the rear outer cylinder 9, the nut 10, the front diaphragm 11, the rear diaphragm 12, the front cap 13, the rear cap 14
By holding the supporting mechanism 7 composed of the above so as to be held by the holder portion 2 of the apparatus main body 1, the resonance unit 4 can be stably supported.

The lengths of the booster 6 and the horn 5 are determined by the material and the wavelength. For example, when the booster 6 is made of aluminum, titanium, and iron, the length of the booster 6 is different depending on the acoustic characteristics such that aluminum>titanium> iron even at the same resonance frequency, but in this embodiment, the support mechanism is used. The length of 7 can be adjusted so as to be accurately aligned with various boosters 6 by the screw fitting of the female screw portion 8a and the male screw portion 9a of the front outer cylinder 8 and the rear outer cylinder 9.

The length of the horn 5 is determined according to the length of the booster 6 used so that the joining action portion 5a becomes the maximum vibration amplitude point. The horn 5 and the booster 6 are integral multiples of 1/2 wavelength. Is generally the length of. Therefore, for example, when the booster 6 is replaced with one having a wavelength of ½ wavelength, although not shown in the drawing, the relief outer portion having substantially the same inner diameter and outer diameter as the front outer casing 8 and the rear outer casing 9 is provided. A tube can be used. In the relief outer cylinder, a male screw portion formed in a step on the front half of the outer peripheral surface is screwed into a female screw portion 8a of the front outer cylinder 8, and a female screw portion formed in a step on the rear half of the inner peripheral surface is formed in the rear. The length of the support mechanism 7 can be increased by thread-fitting into the male screw portion 9a of the outer cylinder 9. In this case, the nut 10 mounted on the male screw portion 9a of the rear outer cylinder 9 is fastened with the relief outer cylinder so that the rear outer cylinder 9 is double-nut-hanged, and the nut mounted on the male screw portion of the relief outer cylinder is attached to the front. If the outer cylinder 8 and the relief outer cylinder are fastened so as to be hooked with a double nut, the same operational effect as that of the above-described embodiment is obtained.

Further, in the above embodiment, as shown in FIG. 1, when the vibration amplitude A1 at the maximum vibration amplitude point f1 is "1", the vibration amplitude point A2 at the maximum vibration amplitude point f3 is 1.
25 times, the vibration amplitude point A3 at the maximum vibration amplitude point f5 is 1.
The slit 11 formed between the front diaphragm 11 and the rear diaphragm 12 is changed by changing the mass set by the shapes of the booster 6 and the horn 5 so that it becomes 875 times.
Although the case where six b and 12b are formed has been illustrated and described,
When the vibration amplitude of the vibration amplitude point A2 is 1.5 times and the vibration amplitude of the vibration amplitude point A3 is 2 times, for example, the number of slits 11b and 12b of the front diaphragm 11 and the rear diaphragm 12 is 12 times. The number of slits 11b of the front diaphragm 11 is 12 or
If the number of slits 12b of the rear diaphragm 12 is 6, the transmission of ultrasonic vibrations to the front outer cylinder 8 and the rear outer cylinder 9 can be properly prevented according to the vibration magnification. That is, the front diaphragm 11 and the rear diaphragm 1
The number of slits 11b and 12b of 2 is determined by looking at the sound and shake depending on the acoustic characteristics of the horn 5 and the booster 6 due to the mass.
Determine the state with little or no abnormal noise and shake, and decide whether to increase the number to the same number or to increase it to a different number.

FIG. 4 shows a diaphragm 21 as a second embodiment. The diaphragm 21 has an outer diameter substantially the same as the inner diameter of the accommodation recess 8b of the front outer cylinder 8 or the accommodation recess 9b of the rear outer cylinder 9, and has a matching hole 21a formed in the center thereof. The aligning hole 21a is inserted into the aligning protrusion 5b of the horn 5 or the aligning protrusion 6b of the booster 6 without rattling.
It has a diameter substantially the same as the outer diameter of b. Around the matching hole 21a, a closed annular recess 21b, which is a vibration transmission blocking portion, is formed concentrically on one end surface of the diaphragm 21. The depth of the closed annular recess 21b is set to about 1/2 of the plate thickness of the diaphragm 21. Outside the closed annular recess 21b, a plurality of through holes 21c are formed in the diaphragm 21 at positions corresponding to the screw holes 8c of the front outer cylinder 8 or the screw holes 9c of the rear outer cylinder 9.

If the diaphragm 21 of this embodiment is used as either or both of the front diaphragm and the rear diaphragm when the magnification of the vibration amplitude in the booster 6 is small, the slits can be omitted and the cost can be reduced. it can. That is, it is necessary to process the slits into equal parts so as to cut the gear teeth,
Since the closed annular recess 21b can be formed by lathe processing, the closed annular recess 21b can be processed at a lower cost than the slit.

FIG. 5 shows a third embodiment, in which a matching hole 22a formed in the center of the diaphragm 22 on the front side or the rear side is formed on the output end surface of the vibrator 3 arranged on both sides of the diaphragm 22. The matching projections 3b and the matching projections 6b formed on the rear end surface of the booster 6 are fitted together without rattling, or the matching projections 6d formed on the front end surface of the booster 6 and the rear end surface of the horn 5 are formed. Matching protrusion 5b
Positioning performance can be further improved by fitting them so as not to rattle.

6 to 7 show a fourth embodiment. In this embodiment, as shown in FIG. 7, a holder unit 32 that is assembled to a device main body 31 so as to be able to move up and down has a resonance unit 33 to which a vibrator 3 is coupled attached to both supports.
A work mounting portion 31a that forms a lower part of a work space 34 that is open to the front and left and right at the front of the apparatus main body 31, and a joining action portion 36a at the center of the resonance unit 33. Is held under pressure, and the ultrasonic vibration generated in the vibrator 3 causes non-melt bonding between the overlapping surfaces of the works 35.

In the case of this embodiment, as shown in FIG.
The resonance unit 33 includes a front outer cylinder 8, a rear outer cylinder 9,
Nut 10, front diaphragm 11, rear diaphragm 12, front cap 13, rear cap 1
The booster 6 built in the support mechanism 7 composed of 4 is coaxially connected to both sides of the horn 36 by the screw hole 6a and the headless bolt 17, and both support mechanisms 7 are attached to the holder portion 32. By being attached, it is assembled to the apparatus main body 31. The horn 36 has a length of one wavelength from the maximum vibration amplitude point f13 to the maximum vibration amplitude point f17 which resonates with the ultrasonic vibration transmitted from the vibrator 3, for example, and is bonded to the central maximum vibration amplitude point f15. The portion 36a is provided. One of the boosters 6 has a maximum vibration amplitude point f11 to a maximum vibration amplitude point f1 that resonates with the ultrasonic vibration transmitted from the vibrator 3.
3, the vibrator 3 is coaxially coupled with the screw holes 3a and 6c and the headless bolt 18 with the rear diaphragm 12 of the support mechanism 7 interposed. . The other booster 6 has a length of ½ wavelength from the maximum vibration amplitude point f17 to the maximum vibration amplitude point f19 that resonates with the ultrasonic vibration transmitted from the vibrator 3. The support mechanism 7 having the other booster 6 built therein is arranged symmetrically with the support mechanism 7 having the one booster 6 built therein,
The other booster 6 is coupled to the horn 36 with the front diaphragm 11 of the support mechanism 7 interposed.

According to this embodiment, both support mechanisms 7
When the booster 6 incorporated in the horn 36 is coaxially coupled to the horn 36 so as to be bilaterally symmetric, and the oscillator 3 is coupled to one booster 6 and ultrasonic vibration is generated in the oscillator 3, each support mechanism 7 The slits 11b and 12b (see FIG. 2) of the front diaphragm 11 and the rear diaphragm 12 of FIG. 2 prevent the transmission of ultrasonic vibrations from the front diaphragm 11 and the rear diaphragm 12 to the front outer cylinder 8 and the rear outer cylinder 9, and The sound wave vibration can be efficiently and properly transmitted to the horn 36, and the work 35 can be appropriately joined without the resonance unit 33 supporting both ends and bending.

FIG. 8 shows a fifth embodiment, which is characterized by a structure for supporting the resonance unit 40 on both sides. That is, the support mechanism 41 having the functions of both the support mechanism 7 and the holder 32 in the second embodiment is provided. This support mechanism 41 is a device main body 31 (see FIG. 7) to which the holder part 32 is assembled.
Base 4 attached to the lifting drive end 42 of the
4 and diaphragm portions 45 and 46 that are bent downward from both sides of the base portion 44. Each of the diaphragm portions 45 and 46 includes matching holes 45a and 46a and a plurality of vertically elongated holes 45b which are vibration transmission blocking portions around the matching holes 45a and 46a.
46b so as to be radial around the matching holes 45a and 46a. In the case of this embodiment, a horn 47 having a length of one wavelength is arranged inside each diaphragm portion 45, 46, and each diaphragm portion 45, 46 is arranged.
Boosters 48 and 49 are arranged outside the horn 47, and these horns 47 and boosters 48 and 49 are respectively connected to the boosters 48 and 49.
Of the screw holes 48a formed at the centers of the end faces on the opposite side of
49a and screw hole 4 formed at the center of both ends of horn 47
7a, 47b and headless bolts 50, 51 are coaxially coupled to each other, so that the screw holes 48 of the boosters 48, 49 are connected.
a, 49a A matching projection 48 provided coaxially around the projections
b and 49b are matching holes 45 of the diaphragm portions 45 and 46.
While being externally fitted to the a and 46a, the end faces around the matching protrusions 48b and 49b of the boosters 48 and 49 and both end faces of the horn 47 are in close contact with the diaphragm portions 45 and 46, and the boosters 48 and 49 are aligned. Gaps 52 and 53 are formed between the protrusions 48b and 49b and the horn 47.

According to this embodiment, both sides of the resonance unit 40 are supported by the support mechanism 41 having a simple structure in which the diaphragm portions 45 and 46 are bent and formed at both ends of the base portion 44, and the plurality of elongated holes 45b and 46b respectively support each diaphragm. It is possible to prevent the transmission of ultrasonic vibrations from the portions 45 and 46 to the base portion 44 and the lifting drive end 42 of the apparatus body 31.

FIG. 9 shows a sixth embodiment, in which diaphragms 54 and 55 corresponding to the diaphragm parts 45 and 46 of the support mechanism 41 are formed separately and each diaphragm part 5 is formed.
By attaching 4, 55 to the elevation drive end 42 of the apparatus main body 31 from the side with screws 56, 57, the attachment of the support mechanism 41 to the elevation drive end 42 can be facilitated. In these fifth to sixth embodiments, the output end of the vibrator 3 is regarded as the starting point of vibration, and boosters 48 and 49 of the same shape are provided on both sides of the joining action portion 47c, and the joining action portion 47c is provided.
Since the left and right mass balance centering on c is balanced,
Good balance of vibration.

[Brief description of drawings]

FIG. 1 is a sectional view showing a first embodiment.

FIG. 2 is an exploded perspective view showing the same embodiment.

FIG. 3 is a perspective view showing the ultrasonic bonding apparatus of the same embodiment.

FIG. 4 is a perspective view showing a diaphragm according to a second embodiment.

FIG. 5 is a cross-sectional view showing a combined state of the third embodiment.

FIG. 6 is a sectional view showing a fourth embodiment.

FIG. 7 is a perspective view showing the ultrasonic bonding apparatus of the same embodiment.

FIG. 8 is a sectional view showing a fifth embodiment.

FIG. 9 is a sectional view showing a sixth embodiment.

[Explanation of symbols]

1,31 Device body, 2,32 Holder part, 3 Transducer 4,33,40 Resonant unit, 5 Horn, 6,4
8,49 Booster 7,41 Support mechanism, 8 Front outer cylinder, 9 Rear outer cylinder 11 Front diaphragm, 12 Rear diaphragm 21,22,54,55 Diaphragm, 45,46
Diaphragm part.

Claims (1)

[Claims] 1. An ultrasonic joining apparatus for joining a plurality of workpieces to be joined, which are superposed on each other, by a resonance unit that resonates with ultrasonic vibration generated by a vibrator, the resonance unit having a joining action portion. The resonance unit is composed of a horn and a booster, and the resonance unit is supported by the holder part of the main body of the device through a diaphragm interposed at the joint between the horn and the booster, while the diaphragm vibrates due to a slit, a closed annular recess or an elongated hole. An ultrasonic joining device, wherein a transmission blocking portion is formed, and the vibration transmission blocking portion is formed so as to block the transmission of ultrasonic vibration from the resonance unit to the holder portion via the diaphragm.