JPH09246782A - Feeding method and device for electronic part - Google Patents

Feeding method and device for electronic part

Info

Publication number
JPH09246782A
JPH09246782A JP8048963A JP4896396A JPH09246782A JP H09246782 A JPH09246782 A JP H09246782A JP 8048963 A JP8048963 A JP 8048963A JP 4896396 A JP4896396 A JP 4896396A JP H09246782 A JPH09246782 A JP H09246782A
Authority
JP
Japan
Prior art keywords
flexible film
electronic component
chip
support frame
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8048963A
Other languages
Japanese (ja)
Inventor
Yoshitsugu Hori
良嗣 堀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP8048963A priority Critical patent/JPH09246782A/en
Publication of JPH09246782A publication Critical patent/JPH09246782A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68354Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to support diced chips prior to mounting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/7565Means for transporting the components to be connected
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757Means for aligning
    • H01L2224/75743Suction holding means
    • H01L2224/75745Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Wire Bonding (AREA)

Abstract

PROBLEM TO BE SOLVED: To package an electronic part leaving intact directly on a circuit substrate by a method wherein an electronic part protruded downward from a supporting frame is held with the packaged surface thereof tuning downward to release the held electronic part from a flexible film to be transferred to the next step. SOLUTION: The opposite surface to the packaged surface of a chip part 5 is bonded onto a main surface coated with an adhesive so as to arrange a flexible film 12 with its peripheral part held by a supporting frame 18 with the main surface turning downward. Next, a pin body 14 is depressed to push down the chip part 5 together with the flexible film 12 to be held by a suction pallet 15 for lifting the pin body 14 and the flexible film 12 from the flexible film 12. Finally, the chip part 5 released from the flexible film 12 is packaged on a specific position on a circuit substrate 10 using a bonding tool 17.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品の供給方
法、および電子部品の供給装置に関し、より詳しくは、
電子部品の実装面を下面として電子部品を次工程へ供給
する電子部品の供給方法、および電子部品の供給装置に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for supplying electronic parts and a device for supplying electronic parts, and more specifically,
The present invention relates to an electronic component supply method for supplying an electronic component to the next step with a mounting surface of the electronic component as a lower surface, and an electronic component supply device.

【0002】[0002]

【従来の技術】従来、例えば通信機用の表面波フィルタ
や、半導体装置など、突起状の外部電極(以下、バンプ
電極とする)が実装面側に設けられた電子部品(以下、
チップ部品とする)を、回路基板上に実装するには、図
4、図5、および図6に示すような方法が用いられてい
た。
2. Description of the Related Art Conventionally, electronic parts (hereinafter, referred to as "bump electrodes") provided with protruding external electrodes (hereinafter referred to as "bump electrodes") on a mounting surface, such as a surface acoustic wave filter for a communication device and a semiconductor device
In order to mount the chip parts) on the circuit board, the methods shown in FIGS. 4, 5 and 6 have been used.

【0003】以下、図面に基づき説明する。A description will be given below with reference to the drawings.

【0004】まず、図4(a)に示すように、周縁部が
支持フレーム1に支持され、上面に粘着剤(図示せず)
が付与された可撓性フィルム2を用意する。この可撓性
フィルム2の上面には、バンプ電極3が基板4上に形成
された複数のチップ部品5が予め粘着され、載置されて
いる。
First, as shown in FIG. 4 (a), the peripheral edge portion is supported by the support frame 1, and an adhesive (not shown) is provided on the upper surface.
A flexible film 2 provided with is prepared. On the upper surface of the flexible film 2, a plurality of chip components 5 having bump electrodes 3 formed on a substrate 4 are adhered in advance and placed.

【0005】次に、図4(b)に示すように、可撓性フ
ィルム2の下側からピン体6を突き上げ、可撓性フィル
ム2とともにチップ部品5を押し上げる。このとき可撓
性フィルム2は引き伸ばされるので、押し上げられたチ
ップ部品5に対する可撓性フィルム2の粘着力は低下す
る。
Next, as shown in FIG. 4B, the pin body 6 is pushed up from the lower side of the flexible film 2 and the chip component 5 is pushed up together with the flexible film 2. At this time, since the flexible film 2 is stretched, the adhesive force of the flexible film 2 to the chip component 5 pushed up is reduced.

【0006】次に、図4(c)に示すように、ピン体6
により押し上げられたチップ部品5を吸着コレット7に
より吸引保持し、図4(d)に示すように、吸着コレッ
ト7を引き上げ、可撓性フィルム2からチップ部品5を
剥離する。その後、ピン体6を引き下げ、これに伴い可
撓性フィルム2が下降する。
Next, as shown in FIG. 4C, the pin body 6
The chip component 5 pushed up by is sucked and held by the suction collet 7, and the suction collet 7 is pulled up to separate the chip component 5 from the flexible film 2 as shown in FIG. Then, the pin body 6 is pulled down, and the flexible film 2 is lowered accordingly.

【0007】次に、吸着コレット2によりチップ部品5
を反転機構へ移送し、図5(a)に示すように、チップ
部品5を反転機構の吸着パレット8aに吸引保持させ
る。
Next, the suction collet 2 is used to make the chip component 5
Is transferred to the reversing mechanism, and as shown in FIG. 5A, the chip component 5 is suction-held on the suction pallet 8a of the reversing mechanism.

【0008】次に、図5(b)に示すように、チップ部
品5を吸引保持した吸着パレット8aを反転させ、別に
用意した吸着パレット8bにチップ部品5を吸引保持さ
せる。これにより、図5(c)に示すように、バンプ電
極3が形成されたチップ部品5の実装面5aを下面とし
て、チップ部品5が吸着パレット8bに吸引保持される
こととなる。
Next, as shown in FIG. 5B, the suction pallet 8a holding the chip component 5 by suction is inverted, and the chip pallet 5b is suctioned and held by a separately prepared suction pallet 8b. As a result, as shown in FIG. 5C, the chip component 5 is suction-held on the suction pallet 8b with the mounting surface 5a of the chip component 5 on which the bump electrodes 3 are formed as the lower surface.

【0009】次に、図6(a)に示すように、反転機構
の吸着パレット8bに吸引保持されたチップ部品5を、
ボンディングツール9により吸引保持し、回路基板10
上へ移送し、図6(b)に示すように、回路基板10上
の所定箇所へ実装する。回路基板10へのチップ部品5
の実装後、図6(c)に示すように、チップ部品5の吸
引を停止したボンディングツール9を引き上げる。
Next, as shown in FIG. 6A, the chip component 5 suction-held on the suction pallet 8b of the reversing mechanism is
The circuit board 10 is held by suction with the bonding tool 9.
It is transferred to the upper side and mounted on a predetermined position on the circuit board 10 as shown in FIG. Chip component 5 on circuit board 10
After mounting, as shown in FIG. 6C, the bonding tool 9 that has stopped sucking the chip component 5 is pulled up.

【0010】以上の工程を繰り返すことにより、可撓性
フィルム2の上面に粘着された複数のチップ部品5が全
て回路基板10上に実装されることとなる。
By repeating the above steps, the plurality of chip components 5 adhered to the upper surface of the flexible film 2 are all mounted on the circuit board 10.

【0011】また、図6に示すように、反転機構により
反転したチップ部品5をボンディングツール9で直接回
路基板10上へ実装する方法の他に、図7に示すよう
に、反転機構により反転したチップ部品5を吸着コレッ
ト7により、トレー11に設けられた収納部11aに一
旦整列させた後、ボンディングツール9で回路基板10
上へ実装する方法もある。
Further, as shown in FIG. 6, in addition to the method of directly mounting the chip component 5 inverted by the inversion mechanism on the circuit board 10 by the bonding tool 9, it is inverted by the inversion mechanism as shown in FIG. The chip components 5 are once aligned by the suction collet 7 in the storage portion 11a provided in the tray 11, and then the circuit board 10 is bonded by the bonding tool 9.
There is also a way to implement it above.

【0012】この場合には、チップ部品5は、図8に示
すようにトレー11の収納部11aにおいて、バンプ電
極3が形成された実装面5aを下面として整列されてい
る。
In this case, the chip components 5 are aligned in the storage portion 11a of the tray 11 with the mounting surface 5a on which the bump electrodes 3 are formed as the lower surface, as shown in FIG.

【0013】[0013]

【発明が解決しようとする課題】上記のように、従来の
方法においては、いずれの場合も、可撓性フィルムから
チップ部品を剥離した後に、個々のチップ部品の表裏を
反転させる工程が必要となるため、工程が煩雑化し、チ
ップ部品を効率良く回路基板へ実装することができなか
った。
As described above, in any of the conventional methods, a step of reversing the front and back of individual chip parts is required after peeling the chip parts from the flexible film. Therefore, the process is complicated and the chip component cannot be efficiently mounted on the circuit board.

【0014】また、可撓性フィルムから剥離された個々
のチップ部品の表裏を反転させる反転機構が必要となる
ため、装置が複雑化し、高価格となった。
Further, since a reversing mechanism for reversing the front and back of individual chip parts separated from the flexible film is required, the apparatus becomes complicated and the price becomes high.

【0015】よって、本発明の目的は、工程を簡略化で
き、電子部品を効率良く次工程へ供給できる電子部品の
供給方法を提供することにある。
Therefore, it is an object of the present invention to provide a method of supplying electronic parts, which can simplify the steps and efficiently supply the electronic parts to the next step.

【0016】また、本発明の目的は、簡単な構造で、安
価な、電子部品の供給装置を提供することにある。
Another object of the present invention is to provide an inexpensive electronic component supply apparatus having a simple structure.

【0017】[0017]

【課題を解決するための手段】本発明の電子部品の供給
方法は、粘着剤を付与した主面に、電子部品の実装面に
対向する対向面を粘着させ、周縁部を支持フレームで支
持した可撓性フィルムを、粘着剤を付与した主面が下面
となるように配置する工程と、可撓性フィルムの上方に
位置するピン体を用いて、可撓性フィルムとともに電子
部品を支持フレームから下方に向けて突出させる工程
と、支持フレームから下方に向けて突出した電子部品
を、可撓性フィルムの下方に設けられた保持手段によ
り、電子部品の実装面が下面となるように保持する工程
と、保持手段により保持された電子部品を可撓性フィル
ムから剥離する工程と、保持手段により保持され、可撓
性フィルムから剥離された電子部品を次工程に移送する
工程とを備えることを特徴とするものである。
According to the method of supplying an electronic component of the present invention, a main surface provided with an adhesive is adhered to a facing surface which faces a mounting surface of the electronic component, and a peripheral portion is supported by a support frame. Using the step of arranging the flexible film so that the main surface to which the adhesive is applied is the lower surface and the pin body located above the flexible film, the electronic component is removed from the support frame together with the flexible film. A step of projecting downward, and a step of holding the electronic component projecting downward from the support frame so that the mounting surface of the electronic component is a lower surface by a holding unit provided below the flexible film. And a step of peeling the electronic component held by the holding means from the flexible film, and a step of transferring the electronic component held by the holding means and peeled from the flexible film to the next step. It is an.

【0018】また、本発明の電子部品の供給装置は、周
縁部が支持フレームに支持され、電子部品を粘着できる
ように、下面に粘着剤が付与された可撓性フィルムと、
前記可撓性フィルムの上方に配置され、可撓性フィルム
とともに電子部品を支持フレームから下方に向けて突出
させるピン体と、前記可撓性フィルムの下方に配置さ
れ、支持フレームから下方に向けて突出した電子部品を
保持する保持手段と、保持手段により保持された電子部
品を、次工程へ移送する移送手段とを備えることを特徴
とするものである。
Further, in the electronic component supplying apparatus of the present invention, the peripheral portion is supported by the support frame, and the flexible film is provided with the adhesive on the lower surface so that the electronic component can be adhered,
A pin body that is disposed above the flexible film and that causes the electronic component to project downward from the support frame together with the flexible film; and a pin body that is disposed below the flexible film and extends downward from the support frame. The present invention is characterized by including holding means for holding the protruding electronic component and transfer means for transferring the electronic component held by the holding means to the next step.

【0019】本発明の電子部品の供給方法、および電子
部品の供給装置によれば、電子部品は、実装面を下面と
した状態で可撓性フィルムから剥離されるので、電子部
品を可撓性フィルムから剥離した後に、個々の電子部品
の表裏を反転させる必要がなく、そのままの状態で直接
回路基板に実装することができる。
According to the method for supplying an electronic component and the apparatus for supplying an electronic component of the present invention, since the electronic component is peeled off from the flexible film with the mounting surface being the lower surface, the electronic component is made flexible. After peeling from the film, it is not necessary to reverse the front and back of each electronic component, and the electronic component can be directly mounted on the circuit board as it is.

【0020】また、可撓性フィルムから剥離された個々
の電子部品の表裏を反転させる必要がないので、電子部
品を可撓性フィルムから剥離した後に、電子部品を反転
機構へ移送する必要もなく、可撓性フィルムからの剥離
と同時に実装可能な状態となる。
Further, since it is not necessary to reverse the front and back of each electronic component peeled from the flexible film, it is not necessary to transfer the electronic component to the reversing mechanism after peeling the electronic component from the flexible film. At the same time as peeling from the flexible film, it becomes ready for mounting.

【0021】[0021]

【発明の実施の形態】以下、本発明に係る電子部品の供
給方法、および電子部品の供給装置の一実施例につき、
添付図面を参照して説明する。なお、従来と同一である
部分については、同一符号を付して説明を省略する。
BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of an electronic component supply method and an electronic component supply apparatus according to the present invention will be described below.
This will be described with reference to the accompanying drawings. It should be noted that the same parts as those of the related art are designated by the same reference numerals and the description thereof is omitted.

【0022】まず、本発明に係る電子部品の供給装置の
一実施例につき説明する。
First, an embodiment of the electronic component supply apparatus according to the present invention will be described.

【0023】図1は、本発明の一実施例である電子部品
の供給装置を示す概略説明図である。
FIG. 1 is a schematic explanatory view showing an electronic component supply apparatus according to an embodiment of the present invention.

【0024】この電子部品の供給装置は、可撓性フィル
ム12と、可撓性フィルム12に粘着されている電子部
品の位置を確認するための画像処理用のカメラ13と、
ピン体14と、電子部品を保持する保持手段である吸着
パレット15と、吸着パレット15を搬送するコンベア
16と、電子部品を次工程へ移送する移送手段であるボ
ンディングツール17とを備えている。
This electronic component supply device includes a flexible film 12, an image processing camera 13 for confirming the position of the electronic component adhered to the flexible film 12,
The pin body 14, a suction pallet 15 that is a holding unit that holds the electronic component, a conveyor 16 that conveys the suction pallet 15, and a bonding tool 17 that is a transfer unit that transports the electronic component to the next step.

【0025】可撓性フィルム12は、例えばポリエチレ
ンなどの可撓性を有する樹脂フィルムであり、透明で円
形状である。また、可撓性フィルム12の周縁部は、リ
ング状の支持フレーム18により支持されている。ま
た、可撓性フィルム12の下面側には粘着剤が塗布され
ており、ここに例えば通信機用の表面波フィルタや、半
導体装置など、突起状の外部電極(以下、バンプ電極3
とする)が実装面に設けられた電子部品(以下、チップ
部品5とする)を粘着させることが可能となっている。
The flexible film 12 is a resin film having flexibility such as polyethylene, and is transparent and circular. The peripheral edge of the flexible film 12 is supported by a ring-shaped support frame 18. Further, an adhesive is applied to the lower surface side of the flexible film 12, and a protruding external electrode (hereinafter referred to as the bump electrode 3) such as a surface wave filter for a communication device or a semiconductor device is applied thereto.
It is possible to adhere an electronic component (hereinafter referred to as a chip component 5) provided on the mounting surface.

【0026】画像処理用のカメラ13は、可撓性フィル
ム12の上方に配置され、透明な可撓性フィルム12を
通して、その下面に粘着されるチップ部品5の位置を検
知することができる。
The image processing camera 13 is arranged above the flexible film 12 and can detect the position of the chip component 5 adhered to the lower surface thereof through the transparent flexible film 12.

【0027】ピン体14は、可撓性フィルム12に対し
て上方に位置するとともに、上下動可能に配置され、画
像処理用のカメラ13による検知結果に基づき、可撓性
フィルム12の上から、可撓性フィルム12とともにチ
ップ部品5を押し下げることができる。また、ピン体1
4はチップ部品5を押し下げた後、上昇し元の位置へ戻
ることができる。また、ピン体14は水平方向へも移動
可能であり、画像処理用のカメラ13による検知結果に
基づき、可撓性フィルム12の下面に粘着された複数の
チップ部品5を、一つずつ順々に押し下げることが可能
である。
The pin body 14 is located above the flexible film 12 and is arranged so as to be movable up and down. Based on the detection result of the camera 13 for image processing, the pin body 14 is The chip component 5 can be pushed down together with the flexible film 12. Also, the pin body 1
After pushing down the chip component 5, the chip 4 can move up and return to its original position. Further, the pin body 14 is also movable in the horizontal direction, and based on the detection result by the camera 13 for image processing, the plurality of chip components 5 adhered to the lower surface of the flexible film 12 are sequentially arranged one by one. It is possible to push down.

【0028】吸着パレット15は、可撓性フィルム12
の下方に配置され、ピン体14により押し下げられたチ
ップ部品5を吸着保持できるように、吸引手段15aを
備えている。この吸引手段15aの吸引力は、可撓性フ
ィルム12に粘着されたチップ部品5がピン体14に押
し下げられ、可撓性フィルム12の粘着力が低下した際
に、可撓性フィルム12からチップ部品5を剥離できる
程度に設定されている。また、吸着パレット15は、コ
ンベア16上に載置されている。
The suction pallet 15 is made of flexible film 12.
The suction means 15a is provided below the base plate so that the chip component 5 pushed down by the pin body 14 can be sucked and held. The suction force of the suction means 15a is applied to the chip from the flexible film 12 when the chip component 5 adhered to the flexible film 12 is pushed down by the pin body 14 and the adhesion force of the flexible film 12 is reduced. It is set so that the component 5 can be peeled off. The adsorption pallet 15 is placed on the conveyor 16.

【0029】コンベア16は、チップ部品5を吸着保持
した吸着パレット15を、ボンディングツール17下に
搬送するためのもので、コンベア16の始端側16aが
可撓性フィルム12の下方に配置され、コンベア16の
終端側16bがボンディングツール17の下方に配置さ
れている。
The conveyor 16 is for conveying the suction pallet 15 which holds the chip components 5 by suction to below the bonding tool 17, and the starting end side 16a of the conveyor 16 is arranged below the flexible film 12, The terminal side 16 b of 16 is arranged below the bonding tool 17.

【0030】ボンディングツール17は、吸着パレット
15に吸着されたチップ部品5を吸着し、回路基板10
上の所定箇所に実装するためのもので、チップ部品5を
保持し吸着パレット15が搬送されてくるコンベア16
の終端側16bと、チップ部品5を実装する回路基板1
0との間を水平方向に移動可能である。
The bonding tool 17 adsorbs the chip component 5 adsorbed on the adsorption pallet 15 to the circuit board 10.
A conveyor 16 for mounting the chip component 5 and carrying the suction pallet 15 for mounting at a predetermined position on the upper side.
Circuit board 1 on which the terminal side 16b of the chip and the chip component 5 are mounted
It can move horizontally between 0 and 0.

【0031】また、ボンディングツール17は、吸着パ
レット15に吸着されたチップ部品5を吸着し、引き上
げるため、コンベア16の終端側16bにおいて上下動
可能であるとともに、回路基板10にチップ部品5を実
装するために、回路基板10上において上下動可能であ
る。
Further, since the bonding tool 17 sucks the chip component 5 sucked by the suction pallet 15 and pulls it up, it can move up and down on the terminal side 16b of the conveyor 16 and mount the chip component 5 on the circuit board 10. In order to do so, it can move up and down on the circuit board 10.

【0032】次に、本発明に係る電子部品の供給方法の
一実施例につき説明する。
Next, one embodiment of the method for supplying electronic parts according to the present invention will be described.

【0033】まず、図2(a)に示すように、粘着剤を
付与した主面に、チップ部品5の実装面に対向する対向
面を粘着させ、周縁部を支持フレーム18で支持した可
撓性フィルム12を、粘着剤を付与した主面が下面とな
るように配置する。
First, as shown in FIG. 2 (a), the main surface to which the adhesive is applied is adhered to the opposite surface facing the mounting surface of the chip component 5, and the peripheral portion is supported by the support frame 18 to make it flexible. The elastic film 12 is arranged so that the main surface to which the adhesive is applied is the lower surface.

【0034】チップ部品5は、基板4と、基板4の実装
面側に形成されたバンプ電極3とからなり、実装面側が
下面となっている。
The chip component 5 is composed of the substrate 4 and the bump electrodes 3 formed on the mounting surface side of the substrate 4, and the mounting surface side is the lower surface.

【0035】なお、図2(a)においては、図面を簡略
化するため、チップ部品5は、横一列に5個としたが、
通常は可撓性フィルム12に粘着されるチップ部品の個
数はこれよりも多く、例えば縦20列、横20列位のマ
トリクス状とされる。
In FIG. 2 (a), the number of chip parts 5 is five in a row for the sake of simplicity.
Usually, the number of chip components adhered to the flexible film 12 is larger than this, and for example, it is formed in a matrix of 20 columns vertically and 20 columns horizontally.

【0036】また、このような可撓性フィルム12は、
例えば以下のようにして得ることができる。
Further, such a flexible film 12 is
For example, it can be obtained as follows.

【0037】まず、一方の主面に複数のバンプ電極3が
形成された円形状のマザー基板(図示せず)を用意し、
このマザー基板を複数のバンプ電極3が形成された一方
の主面を下面として、シリコンゴム(図示せず)上に載
置する。
First, a circular mother substrate (not shown) having a plurality of bump electrodes 3 formed on one main surface is prepared.
This mother substrate is placed on silicon rubber (not shown) with one main surface on which the plurality of bump electrodes 3 are formed as the lower surface.

【0038】次に、マザー基板の周囲を囲むように、シ
リコンゴム上に、マザー基板の径寸法よりも大きな内径
寸法を有するリング状の支持フレーム18を載置する。
このとき、マザー基板と支持フレーム18とでは厚さが
異なるが、シリコンゴムには、マザー基板が載置される
部分と支持フレーム18を載置する部分とで断差が形成
されているので、バンプ電極3が形成されていないマザ
ー基板の上面と、支持フレーム18の上面との高さが略
同一となる。
Next, a ring-shaped support frame 18 having an inner diameter larger than the diameter of the mother substrate is placed on the silicon rubber so as to surround the mother substrate.
At this time, the mother substrate and the support frame 18 have different thicknesses, but since the silicon rubber has a gap between the portion on which the mother substrate is placed and the portion on which the support frame 18 is placed, The upper surface of the mother substrate on which the bump electrodes 3 are not formed and the upper surface of the support frame 18 have substantially the same height.

【0039】次に、支持フレーム18の内径より大き
く、支持フレーム18の外径より小さい径寸法を有する
円形状の可撓性フィルム12を用意し、粘着剤を付与し
た面を下面として、粘着剤を付与した面をマザー基板の
上面および支持フレーム18の上面に粘着させる。
Next, a circular flexible film 12 having a diameter larger than the inner diameter of the support frame 18 and smaller than the outer diameter of the support frame 18 is prepared, and the surface provided with the adhesive is used as the lower surface. The surface provided with is adhered to the upper surface of the mother substrate and the upper surface of the support frame 18.

【0040】次に、可撓性フィルム12を反転させ、マ
ザー基板のバンプ電極3が形成された面を上面としてス
テージ(図示せず)に載置して、レジンブレードやダイ
ヤモンドブレードを用いてマザー基板を所定形状にダイ
シングする。これにより、可撓性フィルム12上に、マ
トリクス状に整列した複数のチップ部品5が得られ、ダ
イシング後マザー基板を反転させることで、図2(a)
に示す可撓性フィルム12が得られる。
Next, the flexible film 12 is turned upside down and placed on a stage (not shown) with the surface of the mother substrate on which the bump electrodes 3 are formed as the upper surface, and the mother blade is mounted using a resin blade or a diamond blade. The substrate is diced into a predetermined shape. As a result, a plurality of chip components 5 arranged in a matrix are obtained on the flexible film 12, and the mother substrate is inverted after dicing, so that FIG.
The flexible film 12 shown in is obtained.

【0041】次に、図2(b)に示すように、画像処理
用カメラ(図示せず)からの検知結果に基づき、可撓性
フィルム12の上側からピン体14を押し下げ、可撓性
フィルム12とともにチップ部品5を押し下げる。この
とき可撓性フィルム12は引き伸ばされるので、押し下
げられたチップ部品5に対する可撓性フィルム12の粘
着力は低下する。
Next, as shown in FIG. 2B, the pin body 14 is pushed down from the upper side of the flexible film 12 based on the detection result from the image processing camera (not shown), and the flexible film 12 is pushed down. The chip component 5 is pushed down together with 12. At this time, since the flexible film 12 is stretched, the adhesive force of the flexible film 12 to the pressed down chip component 5 is reduced.

【0042】次に、図2(c)に示すように、ピン体1
4により押し下げられたチップ部品5を吸着パレット1
5により吸引保持し、図2(d)に示すように、ピン体
14を引き上げ、可撓性フィルム12を上昇させ、可撓
性フィルム12からチップ部品5を剥離する。このと
き、吸着パレット15の吸引力は、ピン体14により押
し下げられることで低下している可撓性フィルム12の
粘着力よりも、大きく設定されている。
Next, as shown in FIG. 2C, the pin body 1
Adsorption pallet 1 for chip parts 5 pushed down by 4
2 is suctioned and held, and as shown in FIG. 2D, the pin body 14 is pulled up, the flexible film 12 is raised, and the chip component 5 is peeled from the flexible film 12. At this time, the suction force of the suction pallet 15 is set to be larger than the adhesive force of the flexible film 12 which is reduced by being pushed down by the pin body 14.

【0043】次に、図1に示したコンベア16により吸
着パレット15を搬送し、図3(a)に示すように、ボ
ンディングツール17を吸着パレット15上に移動させ
る。
Next, the suction pallet 15 is conveyed by the conveyor 16 shown in FIG. 1, and the bonding tool 17 is moved onto the suction pallet 15 as shown in FIG.

【0044】次に、図3(b)に示すように、反転機構
の吸着パレット15に吸引保持されチップ部品5を、ボ
ンディングツール17により吸引保持し、回路基板上1
0へ移送する。このとき、ボンディングツール17の吸
引力は、吸着パレット15の吸引力よりも大きく設定さ
れている。
Next, as shown in FIG. 3B, the chip component 5 suction-held on the suction pallet 15 of the reversing mechanism is suction-held by the bonding tool 17, and the circuit board 1
Transfer to 0. At this time, the suction force of the bonding tool 17 is set to be larger than the suction force of the suction pallet 15.

【0045】次に、図3(c)に示すように、ボンディ
ングツール17により、チップ部品5を回路基板10上
の所定箇所へ実装する。回路基板10へのチップ部品2
0の実装後、図3(d)に示すように、チップ部品5の
吸引を停止したボンディングツール17を引き上げる。
Next, as shown in FIG. 3C, the chip component 5 is mounted on the circuit board 10 at a predetermined position by the bonding tool 17. Chip component 2 on circuit board 10
After mounting 0, as shown in FIG. 3D, the bonding tool 17 having stopped sucking the chip component 5 is pulled up.

【0046】以上の工程を繰り返すことにより、可撓性
フィルム12の上面に粘着された複数のチップ部品5が
全て回路基板10上に実装されることとなる。
By repeating the above steps, the plurality of chip components 5 adhered to the upper surface of the flexible film 12 are all mounted on the circuit board 10.

【0047】以上の通り、本発明の電子部品の供給方
法、および電子部品の供給装置について、一実施例に基
づき説明したが、本発明は上記実施例に限定されるもの
ではなく、この発明の要旨の範囲内で種々の変更が可能
である。
As described above, the electronic component supply method and the electronic component supply apparatus of the present invention have been described based on one embodiment, but the present invention is not limited to the above embodiment, and the present invention is not limited thereto. Various modifications are possible within the scope of the gist.

【0048】例えば、上記実施例においては、可撓性フ
ィルムから剥離したチップ部品を、吸着パレットで保持
した後、チップ部品を直接ボンディングツールで回路基
板へ実装することとしたが、本発明はこれに限定される
ものではなく、吸着コレットを用いて図7に示すトレー
11の収納部11aに一旦整列させた後、ボンディング
ツールで回路基板へ実装しても良い。このとき、チップ
部品5は、図8に示すように、バンプ電極3が形成され
た実装面5aを下面として、トレー11の収納部11a
に収納されることとなる。
For example, in the above embodiment, the chip component separated from the flexible film is held on the suction pallet, and then the chip component is directly mounted on the circuit board with the bonding tool. However, the present invention is not limited to this, and it may be arranged once in the storage portion 11a of the tray 11 shown in FIG. 7 using a suction collet and then mounted on a circuit board with a bonding tool. At this time, in the chip component 5, as shown in FIG.
It will be stored in.

【0049】また、上記実施例においては、保持手段に
吸着パレットを用い、吸着パレットの吸着力により、チ
ップ部品を可撓性フィルムから剥離することとしたが、
本発明はこれに限定されるものではなく、例えば吸着パ
レットにかえて、複数の爪でチップ部品を挟持するよう
な機械的な保持手段を用いても良いし、吸引力による保
持手段と機械的な保持手段とを併用しても良い。
In the above embodiment, the suction pallet is used as the holding means, and the chip component is peeled from the flexible film by the suction force of the suction pallet.
The present invention is not limited to this. For example, instead of the suction pallet, a mechanical holding means for holding the chip component with a plurality of claws may be used, or a holding means by suction force and a mechanical holding means may be used. You may use together with a suitable holding means.

【0050】また、上記実施例においては、移送手段で
あるボンディングツールや吸着コレットは、吸引力によ
り、チップ部品を吸着パレットから吸着することとした
が、本発明はこれに限定されるものではなく、複数の爪
でチップ部品を挟持するような機械的な移送手段を用い
ても良いし、吸引力による移送手段と機械的な移送手段
とを併用しても良い。
Further, in the above embodiment, the bonding tool or the suction collet, which is the transfer means, sucks the chip component from the suction pallet by the suction force, but the present invention is not limited to this. A mechanical transfer means such as holding a chip component by a plurality of claws may be used, or a transfer means by suction force and a mechanical transfer means may be used together.

【0051】また、上記実施例においては、可撓性フィ
ルムの下面に粘着された複数のチップ部品を、可撓性フ
ィルムから一つずつ順々に剥離するために、ピン体を可
撓性フィルムに対して、水平方向に移動させることとし
たが、本発明はこれに限定されるものではなく、可撓性
フィルムをピン体に対し、水平方向に移動させても良
い。
Further, in the above embodiment, in order to sequentially peel the plurality of chip components adhered to the lower surface of the flexible film one by one from the flexible film, the pin body is formed into the flexible film. However, the present invention is not limited to this, but the flexible film may be moved in the horizontal direction with respect to the pin body.

【0052】また、上記実施例においては、チップ部品
を支持フレームから下方へ向けて突出させるに際して、
可撓性フィルムを固定し、ピン体を押し下げることとし
たが、本発明はこれに限定されるものではなく、例えば
ピン体を固定し、可撓性フィルムを押し上げても良い。
また、ピン体を押し下げて、かつ可撓性フィルムを押し
上げても良い。
Further, in the above embodiment, when the chip component is projected downward from the support frame,
Although the flexible film is fixed and the pin body is pushed down, the present invention is not limited to this, and for example, the pin body may be fixed and the flexible film may be pushed up.
Alternatively, the pin body may be pushed down and the flexible film may be pushed up.

【0053】また、上記実施例においては、チップ部品
を可撓性フィルムから剥離するに際して、チップ部品を
保持した吸着パレットを固定し、可撓性フィルムを上昇
させることとしたが、本発明はこれに限定されるもので
はなく、例えば可撓性フィルムを固定し、チップ部品を
保持した吸着パレットを引き下げても良い。また、チッ
プ部品を保持した吸着パレットを引き下げ、かつ可撓性
フィルムを引き上げても良い。
In the above embodiment, when the chip component is peeled from the flexible film, the suction pallet holding the chip component is fixed and the flexible film is raised. However, the suction pallet holding the chip component may be pulled down. Alternatively, the suction pallet holding the chip components may be pulled down and the flexible film may be pulled up.

【0054】また、上記実施例においては、ピン体とし
て、その全体が、微小な径寸法を有するピン形状のもの
を用いたが、本発明はこれに限定されるものではなく、
可撓性フィルムからチップ部品を剥離できるよう、可撓
性フィルムに接触する部分がピン形状であればよい。
Further, in the above-mentioned embodiment, as the pin body, a pin-shaped body having a fine diameter is used as a whole, but the present invention is not limited to this.
The portion contacting the flexible film may have a pin shape so that the chip component can be separated from the flexible film.

【0055】その他、可撓性フィルムへの支持フレーム
や基板の粘着方法、基板のダイシング方法、可撓性フィ
ルムや保持手段の形状や材質が変更可能であることは勿
論である。
In addition, it goes without saying that the method of adhering the support frame and the substrate to the flexible film, the method of dicing the substrate, and the shape and material of the flexible film and the holding means can be changed.

【0056】[0056]

【発明の効果】以上のように、本発明の電子部品の供給
方法、および電子部品の供給装置によれば、電子部品
は、実装面を下面とした状態で可撓性フィルムから剥離
されるので、電子部品を可撓性フィルムから剥離した後
に、電子部品の表裏を反転させる必要がなく、そのまま
の状態で直接回路基板に実装することができる。
As described above, according to the electronic component supply method and the electronic component supply apparatus of the present invention, the electronic component is peeled off from the flexible film with the mounting surface facing down. After peeling the electronic component from the flexible film, it is not necessary to reverse the front and back of the electronic component, and the electronic component can be directly mounted on the circuit board as it is.

【0057】また、電子部品の表裏を反転させる必要が
ないので、電子部品を可撓性フィルムから剥離した後
に、電子部品を反転機構へ移送する必要もなく、可撓性
フィルムからの剥離と同時に実装可能な状態となる。
Since it is not necessary to reverse the front and back of the electronic component, it is not necessary to transfer the electronic component to the reversing mechanism after peeling the electronic component from the flexible film. It is ready for mounting.

【0058】したがって、工程を簡略化でき、電子部品
を効率良く次工程へ供給できるとともに、簡単な構造
で、安価な、電子部品の供給装置を得ることができる。
Therefore, the process can be simplified, the electronic component can be efficiently supplied to the next process, and an inexpensive electronic component supply device having a simple structure can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例である電子部品の供給装置を
示す概略側面図である。
FIG. 1 is a schematic side view showing an electronic component supply device according to an embodiment of the present invention.

【図2】本発明の一実施例である電子部品の供給方法を
示す工程説明図である。
FIG. 2 is a process explanatory view showing a method of supplying an electronic component which is an embodiment of the present invention.

【図3】本発明の一実施例である電子部品の供給方法を
示す工程説明図である。
FIG. 3 is a process explanatory view showing a method of supplying an electronic component which is an embodiment of the present invention.

【図4】従来の電子部品の供給方法を示す工程説明図で
ある。
FIG. 4 is a process explanatory view showing a conventional electronic component supply method.

【図5】従来の電子部品の供給方法を示す工程説明図で
ある。
FIG. 5 is a process explanatory view showing a conventional electronic component supply method.

【図6】従来の電子部品の供給方法を示す工程説明図で
ある。
FIG. 6 is a process explanatory view showing a conventional electronic component supply method.

【図7】電子部品を次工程に供給する際に用いるトレー
を示す斜視図である。
FIG. 7 is a perspective view showing a tray used when supplying an electronic component to the next step.

【図8】電子部品を次工程に供給する際に用いるトレー
に電子部品が収納された状態を示す断面図である。
FIG. 8 is a cross-sectional view showing a state in which electronic components are stored in a tray used when the electronic components are supplied to the next step.

【符号の説明】[Explanation of symbols]

5 チップ部品(電子部品) 12 可撓性フィルム 14 ピン体 15 吸着パレット(保持手段) 17 ボンディングツール(移送手段) 18 支持フレーム 5 Chip Parts (Electronic Parts) 12 Flexible Film 14 Pin Body 15 Adsorption Pallet (Holding Means) 17 Bonding Tool (Transfer Means) 18 Support Frame

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 粘着剤を付与した主面に、電子部品の実
装面に対向する対向面を粘着させ、周縁部を支持フレー
ムで支持した可撓性フィルムを、粘着剤を付与した主面
が下面となるように配置する工程と、 可撓性フィルムの上方に位置するピン体を用いて、可撓
性フィルムとともに電子部品を支持フレームから下方に
向けて突出させる工程と、 支持フレームから下方に向けて突出した電子部品を、可
撓性フィルムの下方に設けられた保持手段により、電子
部品の実装面が下面となるように保持する工程と、 保持手段により保持された電子部品を可撓性フィルムか
ら剥離する工程と、 保持手段により保持され、可撓性フィルムから剥離され
た電子部品を次工程に移送する工程とを備えることを特
徴とする電子部品の供給方法。
1. A flexible film having a main surface to which an adhesive is applied is adhered to an opposing surface facing a mounting surface of an electronic component, and a peripheral portion of the flexible film is supported by a support frame. The step of arranging so as to be the lower surface, the step of projecting the electronic parts together with the flexible film downward from the support frame by using the pin body located above the flexible film, and the step of projecting downward from the support frame The step of holding the electronic component projecting toward it by the holding means provided below the flexible film so that the mounting surface of the electronic component is the lower surface, and the electronic component held by the holding means is flexible. A method of supplying an electronic component, comprising: a step of peeling from the film; and a step of transferring the electronic component held by a holding means and peeled from the flexible film to the next step.
【請求項2】 周縁部が支持フレームに支持され、電子
部品を粘着できるように、下面に粘着剤が付与された可
撓性フィルムと、 前記可撓性フィルムの上方に配置され、可撓性フィルム
とともに電子部品を支持フレームから下方に向けて突出
させるピン体と、 前記可撓性フィルムの下方に配置され、支持フレームか
ら下方に向けて突出した電子部品を保持する保持手段
と、 保持手段により保持された電子部品を、次工程へ移送す
る移送手段とを備えることを特徴とする電子部品の供給
装置。
2. A flexible film having a peripheral portion supported by a support frame and having an adhesive on its lower surface so that electronic components can be adhered, and a flexible film disposed above the flexible film. A pin body for projecting the electronic component downward from the support frame together with the film, a holding unit arranged below the flexible film for holding the electronic component projecting downward from the support frame, and a holding unit. An electronic component supply device, comprising: a transfer unit that transfers the held electronic component to the next step.
JP8048963A 1996-03-06 1996-03-06 Feeding method and device for electronic part Pending JPH09246782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8048963A JPH09246782A (en) 1996-03-06 1996-03-06 Feeding method and device for electronic part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8048963A JPH09246782A (en) 1996-03-06 1996-03-06 Feeding method and device for electronic part

Publications (1)

Publication Number Publication Date
JPH09246782A true JPH09246782A (en) 1997-09-19

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JP8048963A Pending JPH09246782A (en) 1996-03-06 1996-03-06 Feeding method and device for electronic part

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6561743B1 (en) * 1999-11-09 2003-05-13 Nec Machinery Corporation Pellet picking method and pellet picking apparatus
JP2008004945A (en) * 2006-06-23 2008-01-10 Sigo Co Ltd Method for bonding semiconductor chip
JP2008010869A (en) * 2006-06-23 2008-01-17 Sigo Co Ltd Semiconductor chip flip assembly, and semiconductor chip bonding device utilizing the same
JP2016092078A (en) * 2014-10-30 2016-05-23 株式会社東芝 Semiconductor chip bonding method and semiconductor chip bonding device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6561743B1 (en) * 1999-11-09 2003-05-13 Nec Machinery Corporation Pellet picking method and pellet picking apparatus
JP2008004945A (en) * 2006-06-23 2008-01-10 Sigo Co Ltd Method for bonding semiconductor chip
JP2008010869A (en) * 2006-06-23 2008-01-17 Sigo Co Ltd Semiconductor chip flip assembly, and semiconductor chip bonding device utilizing the same
JP2016092078A (en) * 2014-10-30 2016-05-23 株式会社東芝 Semiconductor chip bonding method and semiconductor chip bonding device

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