JPH09246353A - Conveying fork - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the replacing frequency of a conveying fork by providing a groove provided on the surface of the fork for mounting a wafer, a roller having a recess on the mounting outer periphery to rotate the groove, and a ring pad mounted at the recess of the roller, thereby holding the frictional force of the pad of the fork for a long time. SOLUTION: A rectangular groove 2 is provided on a wafer mounting surface 8 for mounting a wafer 7 of a conveying for 1, and rollers 4 each having a recess 5 on the outer periphery is mounted in the groove 2 so as to rotate a pin 3. A ring pad 6 is formed of a material having large frictional coefficient, and engaged with the recess 5 of the roller 4. A plurality of the rollers 4 are radially disposed on the surface 8. The pad 6 is brought into contact with the wafer 7 in the case of mounting the wafer 7 on the surface 8 of the fork 1, and rotated each slightly integrally with the roller 4. Thus, the pad 6 is always brought into contact with the wafer 7 at the new part to make it possible to hold the frictional force for a long period.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer fork for mounting and transferring a wafer.

[0002]

2. Description of the Related Art Conventionally, a conveying fork is as shown in FIGS. In the figure, 9 is a carrying fork, and a hole 11 is provided in a wafer mounting surface 10 of the carrying fork 9, and a pad 12 is bonded and fixed to the hole 11 with an adhesive. The pad 12 is made of a material such as silicon rubber having a large friction coefficient so as to prevent the mounted wafer 13 from slipping.

[0003]

However, in the prior art, when the work of placing the wafer 13 on the pad 12 on the wafer placing surface 10 and carrying it is continued for a long time, the pad 12 is contaminated by the wafer 13 and is rubbed. The power is decreasing. Therefore, there is a problem that the wafer 13 placed on the pad 12 slides during the transportation, and the positioning accuracy of the wafer 13 deteriorates. In order to prevent this, conventionally, the transfer fork 9 attached to the arm of the wafer transfer robot (not shown) is frequently replaced. However, the replacement work of the transfer fork 9 involves storing the wafer transfer robot. Open the door of the wafer transfer chamber and manually remove the transfer fork 9 from the arm of the wafer transfer robot.
This is a troublesome work of mounting, takes a long working time, and is a cause of lowering the operation rate of the wafer transfer robot. Therefore, it is an object of the present invention to maintain the frictional force of the pad of the transfer fork for a long time and reduce the frequency of replacement of the transfer fork in the wafer transfer robot.

[0004]

In order to solve the above problems, the present invention relates to a transfer fork for mounting and transferring a wafer, and a groove provided on a surface of the transfer fork on which the wafer is mounted, A roller having a recess on the outer periphery for mounting so as to be rotatable in this groove and a ring pad mounted on the recess of the roller are provided.

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. 1 is a plan view of the transfer fork, and FIG. 2 is FIG.
FIG. 3 is a cross-sectional view taken along line AA of FIG. In the figure, reference numeral 1 denotes a transfer fork, and at least three rectangular grooves 2 are provided on a wafer mounting surface 8 on which the wafer 7 of the transfer fork 1 is mounted, and in this groove 2, a roller 4 having a concave portion 5 on the outer circumference is provided. Is rotatably mounted by a pin 3. A ring pad 6 made of a material such as silicon rubber having a large friction coefficient is fitted into the recess 5 of the roller 4. The plurality of rollers 4 are radially arranged on the wafer mounting surface 8. In such a configuration, the ring pad 6 is mounted on the wafer mounting surface 8 of the transfer fork 1 to the wafer 7
When it is mounted, it comes into contact with the wafer 7 and rotates very little together with the roller 4. Therefore, the ring pad 6
Is always in contact with the wafer 7 at a new part,
The frictional force can be maintained for a long time. Therefore, the wafer 7 on the ring pad 6 does not slip, and the wafer transfer robot can transfer the wafer 7 to the set position.
Further, since the rollers 4 are radially arranged on the wafer mounting surface 8, after the wafer 7 is mounted, the respective rollers 4 are mounted.
Can prevent the rotation of the other rollers 4, so that the displacement of the wafer 7 due to the rotation of the rollers 4 does not occur.

[0006]

As described above, the present invention has the following effects. (1) It is possible to always maintain the frictional force of the ring pad of the transfer fork even in a long-time operation, and improve the positioning accuracy of the wafer during wafer transfer. (2) It is possible to improve the operating rate of the wafer transfer robot by reducing the frequency of replacement of the transfer fork in the wafer transfer robot.

[Brief description of drawings]

FIG. 1 is a plan view of a transport fork showing an embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a plan view of a conventional transfer fork.

FIG. 4 is a sectional view taken along line BB of FIG. 3;

[Explanation of symbols]

1 transfer fork, 2 groove, 3 pin, 4 roller, 5 recess, 6 ring pad, 7 wafer,
8 Wafer mounting surface

Claims (1)

[Claims] 1. A transfer fork for mounting and transferring a wafer, comprising: a groove provided on a surface of the transfer fork on which the wafer is mounted; and a roller having a recess on an outer periphery for mounting so as to rotate in the groove. A transport fork provided with a ring pad attached to the recess of the roller.