JPH09241884A - Nickel-phosphorus alloy electroplating method - Google Patents

Nickel-phosphorus alloy electroplating method

Info

Publication number
JPH09241884A
JPH09241884A JP4475496A JP4475496A JPH09241884A JP H09241884 A JPH09241884 A JP H09241884A JP 4475496 A JP4475496 A JP 4475496A JP 4475496 A JP4475496 A JP 4475496A JP H09241884 A JPH09241884 A JP H09241884A
Authority
JP
Japan
Prior art keywords
plating
current density
vibration
content
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4475496A
Other languages
Japanese (ja)
Other versions
JP3938604B2 (en
Inventor
Katsuhide Oshima
勝英 大島
Tomoshi Yuasa
智志 湯浅
Akiko Suenaga
明子 末永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dipsol Chemicals Co Ltd
Original Assignee
Dipsol Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dipsol Chemicals Co Ltd filed Critical Dipsol Chemicals Co Ltd
Priority to JP04475496A priority Critical patent/JP3938604B2/en
Publication of JPH09241884A publication Critical patent/JPH09241884A/en
Application granted granted Critical
Publication of JP3938604B2 publication Critical patent/JP3938604B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To keep the content of P in Ni-P alloy plating constant in a wide current density range by regulating the current density in the cathode to a specified range and executing elecctrolysis while vibration is applied to a plating soln. SOLUTION: In Ni-P alloy electroplating, the cathode current density applied to the cathode is regulated to the range of 0.1 to 20A/dm<2> , preferably, to the range of 1 to 10A/dm<2> . Plating is executed while ultrasonic and/or low frequency vibration is applied to a plating soln. It is preferable that high frequency vibration of 27kHz frequency or low frequency vibration of 20 to 40Hz frequency is applied thereto. At the time of applying the vibration, the content of P in the Ni-P alloy plating is not influenced by the cathode current density, and the content of P in the Ni-P alloy plating is kept constant in a wide current density range. The vibration to be applied is controlled so as to regulate the vibrating width of the content of P in the Ni-P alloy plating to >=3wt.%. As the plating soln., a electroless Ni-P plating waste fluid is used, and the waste fluid is effectively utilized.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、種々の基体上にP
含量の振れ幅が少ないNi−P合金皮膜を電気めっきに
より形成する方法に関するものである。
FIELD OF THE INVENTION The present invention relates to P on various substrates.
The present invention relates to a method for forming a Ni-P alloy film having a small fluctuation in content by electroplating.

【従来の技術】従来、基材表面の性能として高耐食性や
高硬度が要求される場合には、化学Ni−Pまたは電気
Ni−P合金めっき皮膜が採用されており、皮膜の内部
応力を緩和させるために多糖類などの添加が有効である
ことが公知の技術として知られている。しかしながら、
電気Ni−P合金めっきのP含有量は、浴組成、浴温、
浴のpH等のめっき条件を一定にした場合でも陰極電流
密度により著しく変化してしまうといった問題がある。
一方、近年、亜リン酸塩を多量に含む化学Ni−Pめっ
きの廃液処理が問題化している。そこで、化学Ni−P
廃液の処理や再利用方法として、特公平5−83635
号公報、特開平7−126855号公報、特開平6−1
36549号公報、特開平5−247660号公報及び
特開平7−267616号公報に記載されているような
電気透析法、光触媒酸化法や亜リン酸塩の沈殿除去法等
が提案されているが、いずれもの場合も化学Ni−Pめ
っきの廃液を直接再利用する方法ではない。
2. Description of the Related Art Conventionally, when high corrosion resistance or high hardness is required as the performance of the surface of a substrate, a chemical Ni-P or electric Ni-P alloy plating film has been adopted to relax the internal stress of the film. It is known as a known technique that the addition of a polysaccharide or the like is effective for the purpose. However,
The P content of the electric Ni-P alloy plating is determined by the bath composition, bath temperature,
Even if the plating conditions such as the pH of the bath are kept constant, there is a problem in that it will change significantly depending on the cathode current density.
On the other hand, in recent years, waste liquid treatment of chemical Ni-P plating containing a large amount of phosphite has become a problem. Therefore, chemical Ni-P
As a method for treating and reusing waste liquid, Japanese Patent Publication No.
JP-A-7-126855, JP-A6-1
Although the electrodialysis method, the photocatalytic oxidation method, the precipitation removal method of phosphite, etc. as described in JP-A-36549, JP-A-5-247660 and JP-A-7-267616 are proposed, In any case, it is not a method of directly reusing the waste liquid of the chemical Ni-P plating.

【0002】[0002]

【発明が解決しようとする課題】本発明は、P含量の振
れ幅が少ないNi−P合金電気めっき皮膜が効率よく得
られ、かつ化学Ni−Pめっきの廃液が有効利用できる
めっき方法を提供することを目的とする。
DISCLOSURE OF THE INVENTION The present invention provides a plating method in which a Ni-P alloy electroplating film having a small fluctuation of P content can be efficiently obtained and a waste liquid of chemical Ni-P plating can be effectively used. The purpose is to

【課題を解決するための手段】本発明は、陰極に負荷す
る陰極電流密度を特定の範囲とし、かつ振動を与えた状
態で電解すると上記課題を効率よく解決できるとの知見
に基づいてなされたのである。すなわち、本発明は、N
i−P合金電気めっき方法において、陰極に負荷する陰
極電流密度を0.1〜20A/dm2 の範囲とし、かつ振
動を与えた状態で電解することを特徴とするNi−P合
金電気めっき方法を提供する。
The present invention has been made based on the finding that the above-mentioned problems can be efficiently solved by setting the cathode current density applied to the cathode to a specific range and electrolyzing in a vibrating state. Of. That is, the present invention is
In the i-P alloy electroplating method, the cathode current density applied to the cathode is set in the range of 0.1 to 20 A / dm 2 , and the electrolysis is performed in a state where vibration is applied to the Ni-P alloy electroplating method. I will provide a.

【0003】[0003]

【発明の実施の形態】本発明のめっき方法は、例えば、
陰極電流密度が0.1〜20A/dm2 、好ましくは1〜
10A/dm2 の範囲において、めっき開始時から終了
時まで、ほぼ一定陰極電流密度で行うのがよいが、変化
させることもできる。Ni−P合金めっき液はNi供給
源としてNi塩、P供給源として亜リン酸または亜リン
酸塩を基本成分とし、pHが0.5〜2.0の水溶液である
のが好ましい。より好ましいpHは、1.0〜1.5であ
る。具体的にはP供給源としては、次亜リン酸、亜リン
酸またはそれらのナトリウム塩、カリウム塩、化学Ni
−Pめっきの廃液などが挙げられる。それらの使用量は
液全体として5〜100g/lが好ましく、より好まし
くは10〜60g/lである。
BEST MODE FOR CARRYING OUT THE INVENTION The plating method of the present invention includes, for example,
Cathode current density is 0.1 to 20 A / dm 2 , preferably 1 to
In the range of 10 A / dm 2 , it is preferable that the cathode current density is substantially constant from the start to the end of plating, but it can be changed. The Ni-P alloy plating solution is preferably an aqueous solution having a Ni salt as a Ni supply source, a phosphorous acid or a phosphite salt as a P supply source as basic components, and a pH of 0.5 to 2.0. A more preferable pH is 1.0 to 1.5. Specifically, as P source, hypophosphorous acid, phosphorous acid or their sodium salts, potassium salts, chemical Ni
-P plating waste liquid etc. are mentioned. The amount used of them is preferably 5 to 100 g / l as a whole, and more preferably 10 to 60 g / l.

【0004】Ni塩としては、硫酸ニッケル、塩化ニッ
ケル、スルファミン酸ニッケル、炭酸ニッケル等が挙げ
られる。それらの使用量は液全体として100〜450
g/lが好ましい。更にその他の添加剤としてホウ酸、
リン酸、硫酸、塩酸、アンモニア水などを加えてもよ
い。本発明ではめっき液として、無電解Ni−Pめっき
廃液を用いることができる。このような廃液としては、
例えば、Ni1〜20g/l、亜リン酸ナトリウム30
〜1000g/l、次亜リン酸ナトリウム5〜100g
/l、有機酸等10〜100g/l及び残部が水である
ものがあげられる。めっき液温度は40〜90℃が好ま
しく、より好ましくは50〜70℃の範囲において一定
に保つほうがよい。本発明では、振動を与えた状態で電
解することを特徴とし、具体的には、超音波及び/又は
低周波振動をめっき液に与えながらめっきを行うのがよ
い。振動は、めっき開始時から終了時にかけて継続的に
与えるのが好ましいが、断続的に与えてもよい。このよ
うな超音波及び/又は低周波振動をめっき液に与えるた
めの装置としては、一般に市販されているものでよく、
例えば、株式会社三社電機製作所製Clean Rex S シリ−
ズや日本テクノ株式会社製α撹拌機などが挙げられる。
これらを用いて、周波数27kHz などの超音波や20〜
40Hzなどの低周波振動を与えるのがよい。
Examples of the Ni salt include nickel sulfate, nickel chloride, nickel sulfamate, nickel carbonate and the like. The usage amount of them is 100 to 450 as a whole.
g / l is preferred. Furthermore, boric acid as another additive,
Phosphoric acid, sulfuric acid, hydrochloric acid, aqueous ammonia, etc. may be added. In the present invention, an electroless Ni-P plating waste liquid can be used as the plating liquid. As such waste liquid,
For example, Ni 1 to 20 g / l, sodium phosphite 30
~ 1000g / l, sodium hypophosphite 5-100g
/ L, 10 to 100 g / l of an organic acid or the like, and the balance being water. The plating solution temperature is preferably 40 to 90 ° C, and more preferably kept constant in the range of 50 to 70 ° C. The present invention is characterized in that electrolysis is performed in a state where vibration is applied. Specifically, it is preferable to perform plating while applying ultrasonic waves and / or low frequency vibration to the plating solution. The vibration is preferably applied continuously from the start to the end of plating, but may be applied intermittently. As a device for applying such ultrasonic waves and / or low frequency vibrations to the plating solution, a commercially available one may be used,
For example, Clean Rex S series manufactured by Sansha Electric Co., Ltd.
And an agitator manufactured by Nippon Techno Co., Ltd.
By using these, ultrasonic waves with a frequency of 27 kHz, etc.
It is good to give a low frequency vibration such as 40 Hz.

【0005】本発明では、特に、陰極電流密度が変化し
た場合のNi−P合金めっき皮膜中のPの含有率の振れ
幅が3.0重量%以内となるように超音波及び/又は低周
波振動をめっき液に与えるのが好ましく、より好ましく
はPの含有率の振れ幅が2.0重量%以内となるようにす
るのがよい。本発明では、Ni−P合金めっき皮膜を形
成できる基体としては、種々のものがあげられ、具体的
には、鉄、銅またはそれらの合金などがあげられる。本
発明では、この基体を陰極とし、Niまたは白金などの
不溶性電導物質を陽極として、Ni含量が80〜99.9
重量%、P含量が0.1〜20重量%のNi−P合金めっ
き皮膜を形成することができる。尚、基体は、本発明の
電気めっきを行う前に、公知のアルカリ脱脂や酸活性の
前処理などを施すのが好ましい。又、本発明の方法によ
り形成するNi−P合金めっき皮膜の厚みは任意とする
ことができるが、5〜20μとするのが好ましく、より
好ましくは10〜15μである。
In the present invention, ultrasonic waves and / or low frequency waves are used so that the fluctuation range of the P content in the Ni-P alloy plating film is within 3.0% by weight when the cathode current density changes. It is preferable to apply vibration to the plating solution, and it is more preferable that the fluctuation range of the P content is within 2.0% by weight. In the present invention, various substrates can be used as the substrate on which the Ni—P alloy plating film can be formed, and specific examples include iron, copper or alloys thereof. In the present invention, this substrate is used as a cathode, an insoluble conductive material such as Ni or platinum is used as an anode, and the Ni content is 80 to 99.9.
It is possible to form a Ni-P alloy plating film having a weight% and a P content of 0.1 to 20% by weight. The substrate is preferably subjected to known alkali degreasing and acid-activity pretreatment before the electroplating of the present invention. The thickness of the Ni-P alloy plating film formed by the method of the present invention can be arbitrary, but it is preferably 5 to 20 µ, and more preferably 10 to 15 µ.

【0006】[0006]

【発明の効果】本発明によれば、めっき処理時にめっき
液に超音波振動または低周波振動を与えることにより、
電気Ni−P合金めっきにおいてP含有量に陰極電流密
度が影響ぼすのを防止でき、広い電流密度範囲で一定の
P含有量のNi−P合金めっきが得られる。これと同時
に電気Ni−P合金めっきのP供給源として化学Ni−
Pめっきの廃液が使用できるため、化学Ni−Pめっき
廃液の処分も可能となる。次ぎに実施例により本発明を
説明する。
According to the present invention, by applying ultrasonic vibration or low frequency vibration to the plating solution during the plating treatment,
In the electric Ni-P alloy plating, it is possible to prevent the P content from being affected by the cathode current density, and it is possible to obtain a Ni-P alloy plating having a constant P content in a wide current density range. At the same time, chemical Ni- is used as a P source for electric Ni-P alloy plating.
Since the P plating waste liquid can be used, it is possible to dispose of the chemical Ni-P plating waste liquid. Next, the present invention will be described by way of examples.

【0007】[0007]

【実施例】【Example】

実施例1 SPCC−SD鋼板に下記の浴組成(pH:0.6、浴
温:70℃)のめっき液を使用し、0.1、1、5、1
0、20A/dm2 の各陰極電流密度で10μmのめっ
きを施した。この際、めっきの開始から終了までの間、
三社電機製作所製Clean Rex 300を使用し、周波数2
7kHz の条件で超音波振動を与えた。めっき浴組成 硫酸ニッケル:300 g/l 塩化ニッケル: 80 g/l 亜リン酸 : 30 g/l 85% −リン酸: 40ml/l 水 残部
Example 1 SPCC-SD steel sheets were plated with a plating solution having the following bath composition (pH: 0.6, bath temperature: 70 ° C.) to give 0.1, 1, 5, 1
Plating of 10 μm was performed at each cathode current density of 0 and 20 A / dm 2 . At this time, from the start of plating to the end
Using Sanja Denki Seisakusho Clean Rex 300, frequency 2
Ultrasonic vibration was applied under the condition of 7 kHz. Plating bath composition Nickel sulfate: 300 g / l Nickel chloride: 80 g / l Phosphorous acid: 30 g / l 85% -Phosphoric acid: 40 ml / l Water balance

【0008】実施例2 下記の浴組成(pH:1.3、浴温:65℃)のめっき液
を使用した以外は実施例1と同様にしてめっきを行っ
た。めっき浴組成 硫酸ニッケル:260 g/l 塩化ニッケル: 60 g/l 亜リン酸 : 30 g/l 水 残部
Example 2 Plating was performed in the same manner as in Example 1 except that a plating solution having the following bath composition (pH: 1.3, bath temperature: 65 ° C.) was used. Plating bath composition Nickel sulfate: 260 g / l Nickel chloride: 60 g / l Phosphorous acid: 30 g / l Water balance

【0009】実施例3 下記の浴組成(pH:1.3、浴温:65℃)のめっき液
を使用した以外は実施例1と同様にしてめっきを行っ
た。めっき浴組成 硫酸ニッケル:260 g/l 塩化ニッケル: 60 g/l *化学Ni-P廃液:200ml/l (亜リン酸として約30g/l) 89% −硫酸 : 50ml/l 水 残部 *ディップソ−ル(株)製NP−1717 7タ−ン使
用後の下記浴組成のものである。 Ni :5.4 g/l Na2HPO3 ・5H2O:260 g/l pH :5.1
Example 3 Plating was performed in the same manner as in Example 1 except that a plating solution having the following bath composition (pH: 1.3, bath temperature: 65 ° C.) was used. Plating bath composition Nickel sulfate: 260 g / l Nickel chloride: 60 g / l * Chemical Ni-P waste liquid: 200 ml / l (approx. 30 g / l as phosphorous acid) 89% -Sulfuric acid: 50 ml / l Water balance * Dip-so The following bath composition is used after using NP-17177 7-Turn Co., Ltd. Ni: 5.4 g / l Na 2 HPO 3 · 5H 2 O: 260 g / l pH: 5.1

【0010】実施例4 下記の浴組成(pH:1.0、浴温:70℃)のめっき液
を使用した以外は実施例1と同様にしてめっきを行っ
た。めっき浴組成スルファミン 酸ニッケル:300 g/l 亜リン酸 : 40 g/l スルファミン酸 : 20 g/l 水 残部 比較例1〜4 比較例1〜4は、超音波振動を与えない以外はそれぞれ
上記実施例1〜4と同様にしてめっきを行った。上記実
施例及び比較例において形成された皮膜中のP含有量を
蛍光X線分析装置(日本電子株式会社 JSX−60
1)により測定した。測定結果を表−1に示す。
Example 4 Plating was performed in the same manner as in Example 1 except that a plating solution having the following bath composition (pH: 1.0, bath temperature: 70 ° C.) was used. Plating bath composition Nickel sulfamate: 300 g / l Phosphorous acid: 40 g / l Sulfamic acid: 20 g / l Water balance Comparative Examples 1 to 4 Comparative Examples 1 to 4 are the same as above except that ultrasonic vibration is not applied. Plating was performed in the same manner as in Examples 1 to 4. The P content in the films formed in the above Examples and Comparative Examples was measured by a fluorescent X-ray analyzer (JSX-60, JEOL Ltd.).
It was measured according to 1). Table 1 shows the measurement results.

【0011】[0011]

【表1】 表−1:P含有量測定結果(単位:重量パ−
セント) 陰 極 実 施 例 比 較 例電流密度 1 2 3 4 1 2 3 4 0.1A/dm2 12.8 12.6 11.8 12.1 12.3 12.2 11.4 11.4 1A/dm2 12.7 12.5 11.8 12.1 12.3 12.1 11.2 11.4 5A/dm2 12.3 12.0 11.2 11.6 11.2 11.3 10.1 10.7 10A/dm2 11.8 11.6 10.7 11.0 8.5 9.1 8.5 8.220A/dm2 11.2 11.0 10.3 10.6 6.2 6.4 5.8 6.0 振れ幅 1.6 1.6 1.5 1.5 6.1 5.8 5.4 5.4 表−1の結果から明らかなように 本発明によるめっき
法より得られた電気Ni−P合金めっきのP含有量は一
定であることがわかる。
[Table 1] Table 1: P content measurement result (unit: weight per unit)
Cent) Negative pole Example Comparison Comparative current density 1 2 3 4 1 2 3 4 0.1A / dm 2 12.8 12.6 11.8 12.1 12.3 12.2 11.4 11.4 1A / dm 2 12.7 12.5 11.8 12.1 12.3 12.1 11.2 11.4 5A / dm 2 12.3 12.0 11.2 11.6 11.2 11.3 10.1 10.7 10A / dm 2 11.8 11.6 10.7 11.0 8.5 9.1 8.5 8.2 20A / dm 2 11.2 11.0 10.3 10.6 6.2 6.4 5.8 6.0 Swing range 1.6 1.6 1.5 1.5 6.1 5.8 5.4 5.4 It can be seen that the P content of the electric Ni-P alloy plating obtained by the plating method according to the invention is constant.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 Ni−P合金電気めっき方法において、
陰極に負荷する陰極電流密度を0.1〜20A/dm2
範囲とし、かつ振動を与えた状態で電解することを特徴
とするNi−P合金電気めっき方法。
1. A Ni-P alloy electroplating method, comprising:
A Ni-P alloy electroplating method, characterized in that the cathode current density applied to the cathode is set in the range of 0.1 to 20 A / dm 2 and the electrolysis is performed under vibration.
【請求項2】 振動を超音波及び/又は低周波で与える
請求項1記載の電気めっき方法。
2. The electroplating method according to claim 1, wherein the vibration is applied by ultrasonic waves and / or low frequencies.
【請求項3】 陰極電流密度の振れにより形成されるN
i−P合金めっき皮膜中のPの含有率の振れ幅が3.0重
量%以内である請求項1記載の電気めっき方法。
3. N formed by fluctuation of cathode current density
The electroplating method according to claim 1, wherein the fluctuation range of the P content in the i-P alloy plating film is within 3.0% by weight.
【請求項4】 めっき液として無電解Ni−Pめっき廃
液を用いる請求項1記載の電気めっき方法。
4. The electroplating method according to claim 1, wherein an electroless Ni-P plating waste liquid is used as the plating liquid.
JP04475496A 1996-03-01 1996-03-01 Ni-P alloy electroplating method Expired - Lifetime JP3938604B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04475496A JP3938604B2 (en) 1996-03-01 1996-03-01 Ni-P alloy electroplating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04475496A JP3938604B2 (en) 1996-03-01 1996-03-01 Ni-P alloy electroplating method

Publications (2)

Publication Number Publication Date
JPH09241884A true JPH09241884A (en) 1997-09-16
JP3938604B2 JP3938604B2 (en) 2007-06-27

Family

ID=12700231

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Country Status (1)

Country Link
JP (1) JP3938604B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008542180A (en) * 2005-05-31 2008-11-27 エレメント シックス (プロダクション)(プロプライエタリィ) リミテッド Method for coating diamond seed crystals
JP2010232439A (en) * 2009-03-27 2010-10-14 Kyocera Corp Wiring board, method of manufacturing the same, and electronic device using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008542180A (en) * 2005-05-31 2008-11-27 エレメント シックス (プロダクション)(プロプライエタリィ) リミテッド Method for coating diamond seed crystals
JP2010232439A (en) * 2009-03-27 2010-10-14 Kyocera Corp Wiring board, method of manufacturing the same, and electronic device using the same

Also Published As

Publication number Publication date
JP3938604B2 (en) 2007-06-27

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