JPH0923689A - Step-out automatic resetting apparatus of surface motor - Google Patents

Step-out automatic resetting apparatus of surface motor

Info

Publication number
JPH0923689A
JPH0923689A JP7191124A JP19112495A JPH0923689A JP H0923689 A JPH0923689 A JP H0923689A JP 7191124 A JP7191124 A JP 7191124A JP 19112495 A JP19112495 A JP 19112495A JP H0923689 A JPH0923689 A JP H0923689A
Authority
JP
Japan
Prior art keywords
moving
axis
parallel
moving part
linear actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7191124A
Other languages
Japanese (ja)
Inventor
Tatsuhiko Koba
龍彦 木場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP7191124A priority Critical patent/JPH0923689A/en
Publication of JPH0923689A publication Critical patent/JPH0923689A/en
Pending legal-status Critical Current

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  • Control Of Linear Motors (AREA)
  • Control Of Stepping Motors (AREA)

Abstract

PROBLEM TO BE SOLVED: To reset the angle between the projecting pole of a platen and a magnetic pole of moving section and pitch to the normal value by moving a correcting bar in parallel to the reference axis in the direction of the reference axis to pull the moving section. SOLUTION: A linear actuator 5 is operated with a signal of a step-out detecting apparatus to move a correction bar 6 in the direction of the reference axis by while keeping this bar parallel to the Y axis. The moving part 2 is pressed toward the correction bar 5 to move and collides with a stopper 3 parallel to the reference axis y. Simultaneously, an X axis limit switch 7 operates to stop the linear actuator 5. The moving part 2 becomes parallel to the reference axis y and therefore the step-out condition in the X axis direction can be eliminated. In regard to the direction of Y axis, the pitch of any projected pole and magnetic pole is almost in the normal condition. Therefore, when the command to move toward the origin O on the reference axis y is given to the moving part 2 and the moving part 2 reaches the origin O, the limit switch 8 operates to stop the moving part 2. Since the moving part is moved up to the origin O as explained above, the normal condition can surely be reset.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、パルスモータからなる
サーフェイスモータの移動部の脱調を自動的に復帰させ
る装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for automatically recovering step-out of a moving part of a surface motor which is a pulse motor.

【0002】[0002]

【従来の技術】従来、碁盤目状に凸極を備えた平板状の
プラテン部と、直交する座標軸の2軸方向(X軸、Y
軸)にパルスまたは正弦波電流指令に応じて移動磁界を
発生する碁盤目状の磁極を設け、前記プラテン部上を移
動し得る移動部とを備えたものが開示されている(例え
ば、実開昭56−120789号公報)。このようなパ
ルスモータからなるサーフェイスモータはオープンルー
プ制御であるため、性能以上の推力を指令したり他の物
体に衝突したりすると、移動部は直交する2軸に対して
傾斜し、プラテン部の凸極と移動部の磁極のピッチが狂
うため脱調し、身動きができない状態に陥る。その場
合、人手により移動部の位置を矯正し、脱調しない位置
に復帰させている。
2. Description of the Related Art Conventionally, a plate-like platen portion having convex poles in a grid pattern and two axis directions (X-axis, Y-axis) orthogonal to each other are used.
It is disclosed that a shaft is provided with a grid-like magnetic pole that generates a moving magnetic field in response to a pulse or sine wave current command, and a moving unit that can move on the platen unit (for example, actual opening). 56-120789). Since the surface motor composed of such a pulse motor is open loop control, when a thrust force exceeding the performance is commanded or when it collides with another object, the moving part tilts with respect to the two orthogonal axes, and the platen part of the platen part moves. Since the pitch of the convex pole and the magnetic pole of the moving part is out of order, the user loses synchronism and falls into a state where he cannot move. In that case, the position of the moving part is manually corrected to return to the position where step out occurs.

【0003】[0003]

【発明が解決しようとする課題】ところが、上記従来技
術では、移動部が脱調した後、人手によって移動部の位
置を矯正しているため、危険であると共に、復帰した位
置が脱調しない位置になっているかを確認する必要があ
り、人手による多くの時間がかかるという問題があっ
た。本発明は、移動部が脱調状態になった場合、自動的
に正常な状態に復帰できるサーフェイスモータの脱調自
動復帰装置を提供することを目的とするものである。
However, in the above-mentioned prior art, since the position of the moving part is manually corrected after the moving part is out of step, it is dangerous and the restored position is not out of position. It is necessary to confirm whether or not it is, and there is a problem that it takes a lot of time manually. It is an object of the present invention to provide an automatic step-out restoring device for a surface motor, which can automatically return to a normal state when a moving part goes out of step.

【0004】[0004]

【課題を解決するための手段】上記課題を解決するた
め、本発明は、碁盤目状に凸極を備えた平板状のプラテ
ン部と、直交する座標軸の各軸方向にパルスまたは正弦
波電流指令に応じて移動磁界を発生する碁盤目状の磁極
を設け前記プラテン部上を移動し得る移動部とを備えた
サーフェイスモータの脱調自動復帰装置において、前記
直交する座標軸のうちいずれか一方の座標軸に平行に支
持された矯正バーと、前記一方の座標軸に平行な基準軸
に沿って設けたストッパと、前記矯正バーを前記基準軸
の方向に平行移動させ得るリニアアクチュエータとを備
え、前記移動部が脱調状態のとき、前記移動部を前記矯
正バーにより移動させるようにしたものである。
In order to solve the above problems, the present invention is directed to a flat platen platen having convex poles in a grid pattern and a pulse or sine wave current command in each axial direction of orthogonal coordinate axes. In a step-out automatic resetting device for a surface motor, which is provided with a grid-like magnetic pole that generates a moving magnetic field according to the above, and a moving part that can move on the platen part, one of the orthogonal coordinate axes. A linear bar that is supported in parallel with each other, a stopper that is provided along a reference axis that is parallel to the one coordinate axis, and a linear actuator that can translate the straightening bar in the direction of the reference axis. Is a step out state, the moving portion is moved by the correction bar.

【0005】[0005]

【作用】上記手段により、移動部が脱調状態になったと
き、矯正バーを基準軸に平行な矯正バーを基準軸の方向
に移動させて移動部を引き寄せるようにしてあるので、
矯正バーを移動させ、移動部を基準軸に沿ったストッパ
に押し当てることにより、プラテン部と移動部の脱調状
態から、プラテン部の碁盤目状の凸極と移動部の碁盤目
状の磁極との角度およびピッチが合致する正常な状態に
復帰させることができる。
With the above-mentioned means, when the moving portion is out of step, the straightening bar parallel to the reference axis is moved in the direction of the reference axis to draw the moving portion.
By moving the straightening bar and pressing the moving part against the stopper along the reference axis, the grid-shaped convex pole of the platen part and the grid-shaped magnetic pole of the moving part can be removed from the step-out state of the platen part and the moving part. It is possible to return to a normal state in which the angle and pitch with and match.

【0006】[0006]

【実施例】以下、本発明を図に示す実施例について説明
する。図1は本発明の第1の実施例を示す斜視図であ
る。図において、1は碁盤目状に凸極11を備えた平板
状のプラテン部、2は直交するX,Y2方向にパルスま
たは正弦波電流指令に応じて移動磁界を発生する碁盤目
状の磁極21(X方向磁極21X,Y方向磁極21Y)
を備えてプラテン部1上を移動し得る移動部である。な
お、正常状態では図2(a),(b)に示すように、プ
ラテン部1の凸極11と移動部2の磁極21のピッチ
は、完全に合致した部分と、1/2ピッチずれた部分
と、1/4ピッチ+側および−側にずれた部分ができて
いる。3はプラテン部1の一方の端部に設定した基準点
0 ,Y0 を通り、Y軸に平行な基準軸xに沿って設け
たストッパ、4は基準点X0 ,Y0 を通り、X軸に平行
な基準軸yに沿って設けたガイド、5はガイド4に平行
な方向に移動し得るリニアアクチュエータで、モータ5
1によって回転駆動されるネジ52と、ネジ52と噛み
合い、ねじ52の長手方向に移動し得るナット部53と
を備えている。6はY軸に平行に配置され、一方端はガ
イド4によって摺動し得るように案内され、他方端はリ
ニアアクチュエータ5のナット部53に固定された矯正
バーで、通常は、基準軸yからX軸方向に離れた位置に
置かれている。7は矯正バー6に係合し得るX軸リミッ
トスイッチで、矯正バー6によって押されて移動部2が
基準軸yに達したときに動作して、リニアアクチュエー
タ5を停止させるようにしてある。8はY軸リミットス
イッチで、移動部2が基準軸y上で基準点X0 ,Y0
反対側の端部にある原点Oに達した時に動作し、移動部
2が停止する停止指令を出すようにしてある。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. FIG. 1 is a perspective view showing a first embodiment of the present invention. In the figure, 1 is a plate-shaped platen portion provided with convex poles 11 in a grid pattern, 2 is a grid-like magnetic pole 21 for generating a moving magnetic field in accordance with a pulse or sine wave current command in orthogonal X and Y2 directions. (X-direction magnetic pole 21X, Y-direction magnetic pole 21Y)
Is a moving unit that can move on the platen unit 1. In the normal state, as shown in FIGS. 2A and 2B, the pitch between the convex poles 11 of the platen portion 1 and the magnetic poles 21 of the moving portion 2 is shifted by ½ pitch from the completely matched portion. And a part deviated to the ¼ pitch + side and − side. 3 is a stopper provided along a reference axis x parallel to the Y axis, passing through the reference points X 0 and Y 0 set at one end of the platen portion 1, 4 is a reference point X 0 and Y 0 , A guide 5 provided along a reference axis y parallel to the X axis is a linear actuator that can move in a direction parallel to the guide 4, and a motor 5
1 includes a screw 52 that is driven to rotate, and a nut portion 53 that meshes with the screw 52 and is movable in the longitudinal direction of the screw 52. 6 is arranged parallel to the Y axis, one end is slidably guided by the guide 4, and the other end is a straightening bar fixed to the nut portion 53 of the linear actuator 5, usually from the reference axis y. It is placed at a position separated in the X-axis direction. Reference numeral 7 denotes an X-axis limit switch that can be engaged with the straightening bar 6, and operates when the moving portion 2 reaches the reference axis y when pushed by the straightening bar 6 to stop the linear actuator 5. Reference numeral 8 denotes a Y-axis limit switch, which operates when the moving unit 2 reaches an origin O on the end opposite to the reference points X 0 and Y 0 on the reference axis y, and issues a stop command to stop the moving unit 2. I'm trying to put it out.

【0007】いま、移動部2が何らかの原因で異常な力
を受け、図2(c),(d)に示すようにX,Y軸方向
に対して傾き、脱調状態となった場合、、図示しない脱
調検出装置からの信号を得て、リニアアクチュエータ5
を動作させ、矯正バー6をY軸に平行な状態を維持しな
がら基準軸yの方向に移動させる。そうすると、移動部
2は矯正バー6に押し付けられて移動し、基準軸yに平
行なストッパ3に当たると共に、X軸リミットスイッチ
7が動作してリニアアクチュエータ5が停止する。この
状態で、図3に示すように、移動部2は基準軸yに平行
になるので、X,Y軸方向に対して傾きがなくなり、X
軸方向の脱調状態はなくなる。なお、Y軸方向について
は、いずれかの凸極と磁極のピッチが完全に合致した部
分か、1/2ピッチずれた部分か、1/4ピッチ+側お
よび−側にずれた部分かのいずれかの状態で正常な状態
に近くなっているので、移動部2に基準軸y上の原点O
の方向に移動する指令を与えると、原点Oまで移動す
る。移動部2が原点Oに達すると、リミットスイッチ8
が動作して、移動部2を停止させる。このように、移動
部が脱調状態になったとき、平行移動する矯正バー6に
より移動部2を基準軸yまで押し付けられ、さらに原点
Oまで移動されるので、確実に脱調状態から正常状態に
復帰させることができる。
Now, when the moving part 2 receives an abnormal force for some reason and tilts with respect to the X and Y axis directions as shown in FIGS. The linear actuator 5 receives a signal from a step-out detection device (not shown).
Is operated to move the straightening bar 6 in the direction of the reference axis y while maintaining the state parallel to the Y axis. Then, the moving unit 2 is pressed against the straightening bar 6 to move, hits the stopper 3 parallel to the reference axis y, and the X-axis limit switch 7 operates to stop the linear actuator 5. In this state, as shown in FIG. 3, since the moving unit 2 is parallel to the reference axis y, there is no tilt in the X and Y axis directions, and
The step-out state in the axial direction disappears. Regarding the Y-axis direction, it is either a portion where the pitches of the convex poles and the magnetic poles are completely matched, a portion where the pitch is shifted by ½ pitch, or a portion where the pitch is shifted to the + side and − side by the ¼ pitch. In this state, since it is close to the normal state, the origin O on the reference axis y
When a command to move in the direction of is given, it moves to the origin O. When the moving unit 2 reaches the origin O, the limit switch 8
Operates to stop the moving unit 2. In this way, when the moving part is in the step-out state, the moving part 2 is pressed to the reference axis y by the straightening bar 6 that moves in parallel, and further moved to the origin O, so that the step-out condition is surely changed from the normal state. Can be returned to.

【0008】図4は第2の実施例を示す斜視図で、プラ
テン部1の上に2個の移動部2、2’を設けた場合の実
施例で、2個のX軸リミットスイッチ7、7’および2
個のY軸リミットスイッチ8、8’を設けたものであ
る。この場合、一方のX軸リミットスイッチ7はX軸の
基準点X0 ,Y0 から移動部2のX軸方向長さだけ離れ
た位置に設け、他方のX軸リミットスイッチ7’はX軸
リミットスイッチ7からさらに、移動部2のX軸方向の
長さだけX軸方向に離して設けてある。また、Y軸リミ
ットスイッチ8は移動部2が原点Oに達した位置に設
け、Y軸リミットスイッチ8’は移動部2が基準点X
0 ,Y0 に達した位置に設けてある。一つのプラテン部
1の上に移動部を2個設けると、2個の移動部2のいず
れか一方または両方が脱調状態になったとき、矯正バー
6を基準軸yの方向に平行移動すると、図3に示すよう
に、先に矯正バーに当たったいずれか一方の移動部が他
の移動部を押し付けて、2個の移動部2がX軸方向に重
なることがある。このとき、リニアアクチュエータ5を
動作して矯正バー6を移動させて2個とも基準軸yの方
向に押し付ける。矯正バー6によってX軸リミットスイ
ッチ7’が動作すると、移動部2、2’にそれぞれY軸
方向の互いに反対方向に移動する指令を与える。このと
き、移動部2、2’がX軸方向に重なっていると、二つ
の移動部2、2’のうち、少なくともストッパ3に当た
っている移動部2はX,Y方向に対して傾きがなくな
り、X軸方向の脱調状態はなくなっているので、原点O
に向かって移動し、Y軸リミットスイッチ8を動作させ
て停止する。この状態で移動部2’の脱調状態がなくな
っていれば、Y軸の第2原点O’の方向に正常な状態で
移動する。移動部2’がまだ脱調状態になっていれば、
移動部2が原点Oの方向に移動して、移動部2と2’は
Y軸方向に離れているので、リニアアクチュエータ5に
よって矯正バー6を再び基準軸yの方向に移動させるこ
とができ、移動部2’をストッパ3に押し当てる。移動
部2’はX,Y方向に対して傾きがなくなり、X軸方向
の脱調状態はなくなっているので、基準点X0 ,Y0
向かって移動し、Y軸リミットスイッチ8’を動作させ
て停止する。この状態で二つの移動部2、2’は脱調状
態から正常状態に復帰した状態となる。
FIG. 4 is a perspective view showing a second embodiment, which is an embodiment in which two moving parts 2, 2'are provided on the platen part 1, and two X-axis limit switches 7, 7'and 2
The Y-axis limit switches 8 and 8'are provided. In this case, one X-axis limit switch 7 is provided at a position separated from the reference points X 0 and Y 0 of the X-axis by the length of the moving section 2 in the X-axis direction, and the other X-axis limit switch 7 ′ is the X-axis limit switch. Further, it is provided apart from the switch 7 in the X-axis direction by the length of the moving section 2 in the X-axis direction. Further, the Y-axis limit switch 8 is provided at a position where the moving section 2 reaches the origin O, and the Y-axis limit switch 8'is set by the moving section 2 at the reference point X.
It is provided at the position where 0 and Y 0 are reached. When two moving parts are provided on one platen part 1, when one or both of the two moving parts 2 are out of step, the straightening bar 6 is moved in parallel in the direction of the reference axis y. As shown in FIG. 3, one of the moving parts that hits the straightening bar first may press the other moving part, and the two moving parts 2 may overlap in the X-axis direction. At this time, the linear actuator 5 is operated to move the correction bar 6 and press both of them in the direction of the reference axis y. When the X-axis limit switch 7'is operated by the correction bar 6, the moving units 2 and 2'are instructed to move in opposite directions in the Y-axis direction. At this time, if the moving parts 2 and 2 ′ overlap in the X-axis direction, at least the moving part 2 of the two moving parts 2 and 2 ′ that is in contact with the stopper 3 is not tilted in the X and Y directions. Since the step-out condition in the X-axis direction has disappeared, the origin O
And moves the Y-axis limit switch 8 to stop. In this state, if the step-out state of the moving unit 2'is eliminated, the moving unit 2'moves in the normal state in the direction of the second origin O'of the Y axis. If the moving part 2'is still out of step,
Since the moving unit 2 moves in the direction of the origin O and the moving units 2 and 2'are separated from each other in the Y-axis direction, the straightening bar 6 can be moved again in the direction of the reference axis y by the linear actuator 5. The moving part 2 ′ is pressed against the stopper 3. Since the moving part 2 ′ is not tilted with respect to the X and Y directions and the step-out state in the X axis direction is gone, the moving part 2 ′ moves toward the reference points X 0 and Y 0 and operates the Y axis limit switch 8 ′. Let me stop. In this state, the two moving parts 2 and 2'return to the normal state from the step-out state.

【0009】図5は本発明の第3の実施例を示す斜視図
で、第1および第2の実施例でリニアアクチュエータ5
に用いたモータとネジの代わりに、リニアアクチュエー
タ5’をX軸方向に移動するリニアパルスモータによっ
て構成し、矯正バー6を移動させるようにしたものであ
る。この場合、リニアアクチュエータ5’の固定子はサ
ーフェイスモータのプラテン部1の端部を使用し、電源
も共用できるので、構造が簡単となる。なお、リニアア
クチュエータ5’の電源は、サーフェイスモータの脱調
が生じた時、サーフェイスモータの入力配線(A相、B
相)をリニアアクチュエータの入力配線に切り替えるよ
うにしておけばよい。図6は本発明の第4の実施例を示
す斜視図で、第3の実施例と同様に、リニアアクチュエ
ータ5’をリニアパルスモータによって構成し、矯正バ
ー6の中央部をリニアアクチュエータ5’によって支持
させるようにしたものである。この場合、プラテン部お
よび電源を共用できると共に、矯正バー6を案内するガ
イドも必要としないので、構造が更に簡単になる。な
お、上記実施例では、矯正バーをY軸に平行に維持して
X軸方向に移動するようにした例について説明したが、
矯正バーをX軸に平行に維持してY軸方向に移動するよ
うにしてもよい。
FIG. 5 is a perspective view showing a third embodiment of the present invention. In the first and second embodiments, the linear actuator 5 is used.
Instead of the motor and the screw used in the above, the linear actuator 5'is configured by a linear pulse motor that moves in the X-axis direction, and the correction bar 6 is moved. In this case, the stator of the linear actuator 5'uses the end of the platen portion 1 of the surface motor, and the power source can be shared, so that the structure is simplified. The power supply for the linear actuator 5'is used to connect the input wiring (A phase, B phase) of the surface motor when the step out of the surface motor occurs.
Phase) should be switched to the input wiring of the linear actuator. FIG. 6 is a perspective view showing a fourth embodiment of the present invention. Like the third embodiment, the linear actuator 5'is constituted by a linear pulse motor, and the central portion of the straightening bar 6 is constituted by the linear actuator 5 '. It is designed to be supported. In this case, since the platen portion and the power source can be shared and a guide for guiding the straightening bar 6 is not required, the structure is further simplified. In addition, in the above embodiment, the example in which the straightening bar is maintained parallel to the Y axis and moved in the X axis direction has been described.
The straightening bar may be kept parallel to the X axis and moved in the Y axis direction.

【0010】[0010]

【発明の効果】以上述べたように、本発明によれば、移
動部が脱調状態になったとき、基準軸に平行な矯正バー
を基準軸の方向に移動させて移動部を引き寄せ、基準軸
に沿ったストッパに押し当てて正常な状態に復帰させる
ので、人手によらず、移動部を自動的にかつ正確に正常
な状態に復帰させることができる効果がある。
As described above, according to the present invention, when the moving portion is out of step, the straightening bar parallel to the reference axis is moved in the direction of the reference axis to draw the moving portion to the reference position. Since it is pressed against the stopper along the axis to restore the normal state, there is an effect that the moving portion can be automatically and accurately restored to the normal state without manual labor.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の第1の実施例を示す斜視図である。FIG. 1 is a perspective view showing a first embodiment of the present invention.

【図2】 本発明の第1の実施例のプラテン部の凸極と
移動部の磁極部との関係を示す説明図である。
FIG. 2 is an explanatory diagram showing the relationship between the convex poles of the platen portion and the magnetic pole portions of the moving portion according to the first embodiment of the present invention.

【図3】 本発明の第1の実施例の動作中の状態を示す
斜視図である。
FIG. 3 is a perspective view showing a state during operation of the first embodiment of the present invention.

【図4】 本発明の第2の実施例の動作中の状態を示す
斜視図である。
FIG. 4 is a perspective view showing a state during operation of the second embodiment of the present invention.

【図5】 本発明の第3の実施例を示す斜視図である。FIG. 5 is a perspective view showing a third embodiment of the present invention.

【図6】 本発明の第4の実施例を示す斜視図である。FIG. 6 is a perspective view showing a fourth embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 プラテン部、11 凸極、2、2’ 移動部、21
磁極、3 ストッパ、4 ガイド、5 リニアアクチ
ュエータ、51 モータ、52 ネジ、53ナット部、
6 矯正バー、7、7’ X軸リミットスイッチ、8、
8’ Y軸リミットスイッチ、
1 platen part, 11 convex poles, 2 and 2'moving part, 21
Magnetic poles, 3 stoppers, 4 guides, 5 linear actuators, 51 motors, 52 screws, 53 nuts,
6 Straightening bar, 7, 7'X-axis limit switch, 8,
8'Y-axis limit switch,

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 碁盤目状に凸極を備えた平板状のプラテ
ン部と、直交する座標軸の各軸方向にパルスまたは正弦
波電流指令に応じて移動磁界を発生する碁盤目状の磁極
を設け前記プラテン部上を移動し得る移動部とを備えた
サーフェイスモータの脱調自動復帰装置において、前記
直交する座標軸のうちいずれか一方の座標軸に平行に支
持された矯正バーと、前記一方の座標軸に平行な基準軸
に沿って設けたストッパと、前記矯正バーを前記基準軸
の方向に平行移動させ得るリニアアクチュエータとを備
え、前記移動部が脱調状態のとき、前記移動部を前記矯
正バーにより移動させるようにしたことを特徴とするサ
ーフェイスモータの脱調自動復帰装置。
1. A plate-shaped platen portion having convex poles in a grid pattern, and a grid-shaped magnetic pole for generating a moving magnetic field in each axial direction of orthogonal coordinate axes in response to a pulse or sine wave current command. In a step-out automatic resetting device for a surface motor having a moving part capable of moving on the platen part, a straightening bar supported in parallel to any one of the orthogonal coordinate axes and the one coordinate axis. A stopper provided along parallel reference axes and a linear actuator capable of moving the straightening bar in parallel to the direction of the reference axis, and when the moving portion is out of step, the moving portion is moved by the straightening bar. An automatic step-out recovery device for a surface motor, which is characterized by being moved.
【請求項2】 前記リニアアクチュエータが、前記一方
の座標軸に直交する座標軸に沿って設けたネジと、前記
ネジを駆動するモータと、前記ネジに噛み合うナット部
からなる請求項1記載のサーフェイスモータの脱調自動
復帰装置。
2. The surface motor according to claim 1, wherein the linear actuator includes a screw provided along a coordinate axis orthogonal to the one coordinate axis, a motor that drives the screw, and a nut portion that meshes with the screw. Step-out automatic recovery device.
【請求項3】 前記リニアアクチュエータが、前記プラ
テン部上を移動し得るリニアステップモータからなる請
求項1記載のサーフェイスモータの脱調自動復帰装置。
3. The step-out automatic reset device for a surface motor according to claim 1, wherein the linear actuator comprises a linear step motor capable of moving on the platen portion.
JP7191124A 1995-07-03 1995-07-03 Step-out automatic resetting apparatus of surface motor Pending JPH0923689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7191124A JPH0923689A (en) 1995-07-03 1995-07-03 Step-out automatic resetting apparatus of surface motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7191124A JPH0923689A (en) 1995-07-03 1995-07-03 Step-out automatic resetting apparatus of surface motor

Publications (1)

Publication Number Publication Date
JPH0923689A true JPH0923689A (en) 1997-01-21

Family

ID=16269273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7191124A Pending JPH0923689A (en) 1995-07-03 1995-07-03 Step-out automatic resetting apparatus of surface motor

Country Status (1)

Country Link
JP (1) JPH0923689A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6998738B2 (en) 2002-10-18 2006-02-14 Ushio Denki Kabushiki Kaisha Plain surface stage apparatus
JP2008145140A (en) * 2006-12-06 2008-06-26 Ushio Inc Magnetic flux sensor, and plane stage equipped with same
US8552609B2 (en) 2009-08-06 2013-10-08 Panasonic Corporation Synchronous motor and system for driving synchronous motor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6998738B2 (en) 2002-10-18 2006-02-14 Ushio Denki Kabushiki Kaisha Plain surface stage apparatus
JP2008145140A (en) * 2006-12-06 2008-06-26 Ushio Inc Magnetic flux sensor, and plane stage equipped with same
US8552609B2 (en) 2009-08-06 2013-10-08 Panasonic Corporation Synchronous motor and system for driving synchronous motor

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