JPH09236153A - Pneumatic active mount device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To bring a cutoff valve into a state to be always operable in preparation for emergency. SOLUTION: A pneumatic active mount device comprises a pneumatic active mount 1 to perform pneumatic vibration resistant or vibration damping operation; lines 4-7 through which a pneumatic pressure is fed to the pneumatic active mount; and stop means 12, 13, and 19 to stop operation of the pneumatic active mount by a cutoff valve 9 located in the line. The pneumatic active mount device is provided with inspection means 11, 12, 15, 16, and 20 to inspect operation of the cutoff valve at a given timing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pneumatic active mount device used for mounting an exposure apparatus or the like.

[0002]

2. Description of the Related Art Conventionally, as a pneumatic active mount device provided with a pneumatic active mount for performing vibration isolation or vibration suppression by pneumatic pressure, a shutoff valve is provided in a pipe line for supplying pneumatic pressure to the pneumatic active mount. It is known that the valve is closed when an abnormality occurs so that the operation of the mounting device is stopped urgently.

[0003]

This emergency stop function operates only when an abnormality occurs, and does not operate the shutoff valve in a normal operating state. Therefore, if the shut-off valve is defective or the function of driving the valve is defective, the emergency stop function cannot be guaranteed.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a pneumatic active mount device so that a shut-off valve can always operate in case of emergency.

[0005]

In order to achieve this object, according to the present invention, a pneumatic active mount for performing vibration isolation or damping by pneumatic pressure and a pipe for supplying pneumatic pressure to the pneumatic active mount. And a shutoff valve provided in the conduit for shutting off the pneumatic pressure supply to stop the operation of the pneumatic active mount. It is characterized by comprising an inspection means for inspecting at the timing of. The inspecting means can be composed of, for example, means for driving the shutoff valve and means for detecting the open / closed state of the shutoff valve. Further, a selection unit for selecting a method for determining the inspection timing by the inspection unit may be provided.

According to this, the operation of the shutoff valve in an emergency is assured by performing the inspection by the inspection means in normal times.

[0007]

1 is a block diagram showing the configuration of a pneumatic active mount device according to an embodiment of the present invention. In the figure, 1 is a pneumatic circuit of a pneumatic active mount that provides vibration isolation and damping functions by pneumatic pressure.
Is a mount controller for controlling the pneumatic circuit 1, 3 is an intake / exhaust port for providing pneumatic pressure to the pneumatic circuit 1, 4 is a primary intake passage for supplying high-pressure air to the pneumatic circuit 1, 5 Is a primary exhaust passage for exhausting exhaust air from the pneumatic circuit 1 to the intake / exhaust port 3, 8 is a manifold, 9 is a solenoid valve for blocking intake / exhaust from the pneumatic circuit 1, and 10 is a solenoid valve 9. Solenoid 11 is a valve state sensor for detecting whether the solenoid valve 9 is open or closed, 19 is a state output of the valve state sensor 11, 7 is a secondary intake passage connected to the pneumatic circuit 1, and 6 is an empty valve. A secondary exhaust passage to which the exhaust from the pressure circuit 1 is connected, 12 is a stop output 14 output by a stop control unit 13 for emergency stop of the pneumatic active mount, and an inspection control unit for performing control for inspection. 5, a solenoid valve driver for driving the solenoid 10 in response to the inspection output 17 of 5, an inspection selection unit 16 for selecting a method of determining the output timing of the inspection output 17 by the inspection control unit 15, and a selection 18 for the inspection selection unit 16. A timing command output to the inspection control unit 15 according to the determined output timing determination method,
Reference numeral 20 is a display for displaying the state of the solenoid valve 9.

First, the operation at the time of emergency stop in the above configuration will be described. In normal operation, the solenoid 10 of the solenoid valve 9 is active and the pipeline is open, the primary intake passage 4 is connected to the secondary intake passage 7, the primary exhaust passage 5 is connected to the secondary exhaust passage 6, and the pipeline is opened. The pneumatic active mount has been formed, and pneumatic pressure is provided to the pneumatic circuit 1, and the pneumatic active mount is in an operating state by the mount control unit 2. Here, when the stop control unit 13 outputs the stop output 14 for emergency stop, the solenoid driver 12 deactivates the solenoid 10 and closes the pipeline. At this point, the inflow and outflow of air to the pneumatic circuit 1 is stopped, and the operation of the pneumatic active mount is stopped. In this way, the solenoid valve 9 functions as a shutoff valve for emergency stop.

Here, it is a feature of the present invention to check the operation of the solenoid valve 9, and the checking operation is performed as follows. First, the inspection selection means 16 selects a method for determining inspection timing. Options include time designation, interval designation, external device synchronization, and manual. When the method of determining the inspection timing is selected, the inspection selection means 16 outputs the timing command 18 to the inspection control unit 15,
Based on this command, the inspection control unit 15 turns on the inspection output 17. Upon receiving this ON output, the solenoid driver 12 stops driving the solenoid 10 and closes the solenoid valve 9. During this time, the valve state sensor 11 outputs the state output 19 to the inspection control unit 15 to notify the state of the solenoid valve 9. At this time, if the solenoid valve 9 is normal, the output 19 of the valve state sensor 11 indicates the closed state. After checking the output 19 of the valve state sensor 11 in this manner, the inspection control unit 15 determines the solenoid valve 9 based on the output 19.
The state of is displayed on the display 20. After that, the inspection control unit 1
5 turns off the inspection output 17. Then, based on this, the solenoid driver 12 drives the solenoid 10 of the solenoid valve 9 to open each pipeline. This returns to normal operation.

[0010]

As described above, according to the present invention,
If the shut-off valve for emergency stop fails,
If there is a failure in the function that drives the valve, this can be known in advance. Therefore, the emergency stop operation in an emergency can be guaranteed.

[Brief description of drawings]

FIG. 1 is a block diagram showing a pneumatic active mount device according to an embodiment of the present invention.

[Explanation of symbols]

1: Pneumatic circuit of pneumatic active mount, 2: Mount control part, 3: Intake / exhaust port, 4: Primary intake path, 5: Primary exhaust path, 6: Secondary exhaust path, 7: Secondary intake path, 8 : Manifold, 9: Solenoid valve, 10: Solenoid, 1
1: Valve state sensor, 12: Solenoid valve driver, 13: Stop control part, 15: Inspection control part, 16: Inspection selection means, 20: Display.

Claims (3)

[Claims] 1. A pneumatic active mount for performing vibration isolation or vibration suppression by pneumatic pressure, a pipe for supplying pneumatic pressure to the pneumatic active mount, and a shutoff valve provided in the pipe for the pneumatic active mount. In a pneumatic active mount device having a stop means for interrupting the supply of pressure to stop the operation of the pneumatic active mount, an inspection means for inspecting the operation of the shutoff valve at a predetermined timing is provided. Pneumatic active mount device. 2. The pneumatic active mount device according to claim 1, further comprising a selection unit for selecting a method of determining the inspection timing by the inspection unit. 3. The pneumatic active mount device according to claim 1, wherein the inspection unit includes a unit that drives the shutoff valve and a unit that detects an open / closed state of the shutoff valve.