JPH09233859A - Manufacture of electrostatic actuator and element for electrostatic actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can be easily varied in size as requested for each occasion it is used, that is, a size-free electrostatic actuator. SOLUTION: This actuator consists mainly of a first member 1 with a plurality of driving electrodes 12 which are placed on an insulating base material 11 and are insulated from each other and which are arranged in a specified direction at specified intervals, a second member which is so located as to face the first member and which is constituted of an insulating thin plate with a positive and a negative electrode, and a driving means which lets the first and the second member move relatively with each other by switching the application voltage for the driving electrodes and thereby causing attraction/repulsion force between the first and the second member due to the working of static electricity. The driving electrodes 12 are located on the insulating base material 11 and are connected to the driving means through collecting wires 14a, 14b, 14c of a plurality of phases. The driving electrodes and the collecting wires of a plurality of phases are arranged linearly on the insulating base material.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an electrostatic actuator and an element for an electrostatic actuator, and more specifically, it is a so-called size-free device that can easily meet the required size for each scene in which it is used. The present invention relates to a method for manufacturing the electrostatic actuator and the electrostatic actuator element described above.

[0002]

2. Description of the Related Art FIG. 15 is a schematic explanatory view of an example of an electrostatic actuator, and FIG. 16 is an explanatory view showing an example of drive electrodes and assembly lines of a conventional electrostatic actuator.
FIG. 4A is an explanatory diagram showing an example of the assembly line of a conventional electrostatic actuator. The conventional technique will be described with reference to these drawings.

As shown in FIG. 15, the electrostatic actuator includes a plurality of drive electrodes (1) which are insulated from each other on an insulating support (11) and arranged in a predetermined direction and at predetermined intervals.
The first member (1) provided with 2), the second member (2) arranged to face the first member and having positive and negative charges applied to the insulating thin leaf body, and the voltage applied to the drive electrode are switched. As a result, it is mainly composed of a driving means (18) for causing a suction / repulsion force due to the action of static electricity between the first member and the second member to relatively move the both.

The plurality of drive electrodes (12) are connected to the drive means (18) through the mutually insulated multi-phase assembly lines (14a) to (14c), and the drive means (18) is switched. It is composed of an element (15), a high voltage power supply (16) and a switching circuit (17). The illustrated drive electrode (12) has a three-phase structure.

[0005]

By the way, in FIG. 15, the assembly lines (14a) to (14c) of a plurality of phases are schematically represented, but in reality, they are shown in FIGS.
It is arranged as shown in.

That is, first, FIG. 16 and FIG. 17 (a)
As shown in FIG. 3, the electric wires (14a) and (14b) are formed on the surface of the insulating support (11) in contact with the vertically protruding drive electrodes (12). The circular land provided at the tip of the drive electrode (12) shown in FIG. 16 has a function of connecting the drive electrode to a later-described assembly line (14c) by a through hole. It should be noted that the term land is generally used to mean a part of a conductor pattern used for connecting or attaching components.

Next, as shown in FIG. 17 (b), a collective wire (14c) is formed on the back surface of the insulating support (11) in correspondence with the above round, and the corresponding drive electrode (12) is formed. To connect. Note that FIG. 17A shows the drive electrode (12) formation surface side of the insulating support (11) shown in FIG.
FIG. 17B shows the back surface side. Such a wiring method is described in the above-mentioned JP-A-4-340372.

However, the conventional electrostatic actuator as described above has a problem in that it cannot easily meet the required size for each scene in which it is used. That is, for example,
The electrostatic actuator shown in FIG. 16 and FIG.
Although it can be used by cutting it at any position in the direction of arrow A of (a), cutting in the direction of arrow B is impossible because it results in dividing the assembly line. Therefore, the conventional electrostatic actuator has to be manufactured in accordance with the required size for each scene in which it is used, resulting in high cost and hindering the expansion of its application.

The present invention has been made in view of the above circumstances, and an object thereof is a so-called size-free electrostatic actuator and an electrostatic actuator which can easily meet a required size for each scene to be used. It is to provide a method of manufacturing an element. Another object of the present invention is to provide an electrostatic actuator and an electrostatic actuator element manufacturing method that are inexpensive to manufacture.

[0010]

As a result of various studies to achieve the above-mentioned object, the present invention provides an electrostatic actuator employing a novel assembly line arrangement structure provided for the first time by a specific manufacturing method. We have found that the above objects can be easily achieved. The present invention has been completed based on such knowledge, and the gist of each invention is as follows.

That is, the first gist of the present invention is to provide a first member provided with a plurality of drive electrodes which are insulated from each other on an insulating support and arranged in a predetermined direction and at predetermined intervals,
The second member, which is disposed so as to face the member and has positive and negative charges applied to the insulating thin leaf body, and the voltage applied to the drive electrode is switched to attract the electrostatic attraction between the first member and the second member. An electrostatic actuator mainly composed of a driving means for generating a repulsive force to relatively move the both, wherein the plurality of driving electrodes are
The plurality of drive electrodes and the plurality of phase assembly lines are arranged on the insulative support and connected to the driving means through the plurality of phase assembly lines that are insulated from each other. The present invention resides in an electrostatic actuator characterized by being linearly arranged above.

A second gist of the present invention is a step of forming a plurality of linear drive electrodes on an insulating support in one direction and at predetermined intervals, and a plurality of phases of a plurality of linear drive electrodes to be described later on the plurality of linear drive electrodes. Except for the connection points (land formation points) with each linear assembly line, the process of applying the insulating paste to the surface of multiple linear drive electrodes to form rounds, the entire surface of the land formation area except the land is insulated. Of applying a conductive paste to form an insulating film, and forming a plurality of linear aggregate lines of a plurality of phases at predetermined intervals in a direction intersecting the plurality of linear drive electrodes and at a position on each land. Of connecting the linear drive electrode and each linear assembly line of a plurality of phases,
The above-described insulating film forming step is an optional step that is adopted as necessary, and resides in a method for manufacturing an electrostatic actuator element.

A third aspect of the present invention is a step of forming a plurality of linear drive electrodes on the insulating support in one direction and at predetermined intervals, and insulating protection on the drive electrode formation surface of the insulating support. The process of laminating the film, the land holes penetrating the insulative support are insulated and protected corresponding to the connection points (land formation points) with the linear assembly lines of the multiple phases described later on the plurality of linear drive electrodes. Step of forming from the film side, each linear assembly line of a plurality of phases at a predetermined interval at a corresponding position on each land on the side of the insulating support where the drive electrode is not formed in the direction intersecting with the linear drive electrode And a step of connecting a plurality of linear drive electrodes to each of the linear aggregate lines of a plurality of phases by forming the above to form an electrostatic actuator element.

A fourth aspect of the present invention is a step of forming a plurality of linear drive electrodes on the insulating support in one direction and at predetermined intervals, and insulating protection on the drive electrode formation surface of the insulating support. The process of laminating the film, the insulating support of the land holes penetrating the insulating support corresponding to the connection points (land formation points) with the linear assembly lines of the multiple phases described below on the plurality of linear drive electrodes Forming from the body side, a plurality of linear drive electrodes and a plurality of linear drive electrodes are formed by forming respective linear assembly lines of a plurality of phases at predetermined intervals in a direction intersecting with the linear drive electrodes and at corresponding positions on each land. And a step of connecting each linear assembly line of the phases to each other.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. 1 to 4 are explanatory views of an example of a method for manufacturing an element for an electrostatic actuator according to the present invention, and FIG.
1 to 4 are explanatory views of an example of the electrostatic actuator element according to the present invention obtained by the manufacturing method, FIG. 6 is a sectional explanatory view of the electrostatic actuator element shown in FIG. 5, and FIGS. 10 is an explanatory view of another example of the method for manufacturing the electrostatic actuator element according to the present invention, and FIG. 11 shows the electrostatic actuator element according to the present invention obtained by the manufacturing method shown in FIGS. FIG. 12 is an explanatory sectional view of an example, FIG. 12 is an explanatory view of a gravure coater preferably used in the method for manufacturing an element for an electrostatic actuator according to the present invention, and FIG. 13 is an explanatory view of a surface of a plate cylinder of the gravure coater. FIG. 4 is an explanatory view of a part of the insulating support in the manufacturing process of the electrostatic actuator element according to the present invention.

First, for convenience of description, an outline of the electrostatic actuator according to the first aspect of the present invention will be described. The basic structure other than the arrangement structure of the assembly line of the electrostatic actuator according to the present invention is the same as that of the conventional electrostatic actuator described in JP-A-4-340372.

That is, the electrostatic actuator according to the present invention, as shown in FIG. 15, has an insulating support (11).
A first member (1) having a plurality of drive electrodes (12) which are insulated from each other and arranged in a predetermined direction and at predetermined intervals.
A second member (2) disposed opposite to the first member and having positive and negative charges applied to the insulating thin leaf body, and the first member and the second member by switching the voltage applied to the drive electrode. It is mainly composed of a driving means (18) for generating a suction / repulsive force due to the action of static electricity between them to move the both relatively. The electrostatic actuator according to the present invention is suitable for various applications in that both the first member (1) and the second member (2) are transparent. 4-34
No. 0372, etc.

Examples of the insulating support (11) constituting the first member (1) include polycarbonate, polyethylene terephthalate, polybutylene terephthalate,
Transparent plastic films such as polyether sulfone and polyarylate, transparent glass and transparent ceramics are used.

Usually, the drive electrode (12) has a three-phase structure, and an insulating protective film (13) is provided on the surface thereof.
The transparent drive electrode (12) and the insulating protective film (13) will be described later.

The same material as that of the insulating support (11) of the first member (1) is used as the insulating thin leaf member constituting the second member (2). As a means for imparting positive and negative charges to the insulating thin leaf body, an antistatic agent having a weak antistatic effect is applied to the surface of the insulating thin leaf body so that the surface resistivity is usually 10 ¹¹ to 10 ¹⁵ Ω / □. There may be mentioned a method of providing a resistor layer within the range. Alternatively, a method of providing a strip electrode having a two-phase structure or a three-phase structure on the surface of the insulating thin leaf corresponding to the drive electrode (12) of the first member (1) can be used. In this case, an insulating protective film is usually provided on the surface of the strip electrode.

The greatest feature of the electrostatic actuator according to the present invention is that the plurality of drive electrodes and the assembly lines of the plurality of phases are linearly arranged on the insulating support.
Moreover, in a preferred embodiment of the present invention, a plurality of drive electrodes and a plurality of phase assembly lines are arranged in a direction intersecting with each other, and in a further preferred embodiment, a plurality of drive electrodes and a plurality of phase assembly lines. Are arranged on the same plane of the insulating support. The electrostatic actuator according to the present invention can be easily configured by using the first member obtained by the method for manufacturing an electrostatic actuator element according to the present invention described below.

According to a second aspect of the present invention, there is provided a method of manufacturing an element for an electrostatic actuator, which comprises a step of forming a plurality of linear drive electrodes in one direction on an insulating support at predetermined intervals.
A round is formed by applying an insulating paste to the surfaces of the plurality of linear drive electrodes, except for the connection points (land formation points) on the plurality of linear drive electrodes, which are to be connected to the respective linear assembly lines of a plurality of phases described later. A step of forming an insulating film by applying an insulating paste to the entire surface of the land forming region excluding the lands,
A plurality of linear drive electrodes and a plurality of linear drive electrodes are formed at predetermined intervals at positions on the lands that intersect with the plurality of linear drive electrodes. Connecting to a wire.

The above-mentioned electrode forming step can be basically carried out by adopting a conventionally known method. FIG. 1 shows a plurality of linear drive electrodes (12) insulated from each other on an insulating support (11) and arranged in a predetermined direction and at predetermined intervals.
1 shows a first member (1) provided with.

As shown in FIG. 12, it is preferable that the above electrode forming step is continuously performed by gravure printing.
That is, an insulating support (11) made of a plastic film is unwound from an unwinder (not shown),
It is provided with a concave electrode pattern (20a) as shown in FIG. 13 and is supplied between a rotating plate cylinder (20) and an impression cylinder (21) arranged above the plate cylinder (20), and the lower part of the plate cylinder (21) is supplied. It is dipped in the conductive ink (23) housed in the ink tank (22) to remove the conductive ink in the non-line drawing portion of the plate surface from the doctor (24).
The printing is carried out by scraping off with the press cylinder (21) and pressing the insulating support (11) against the plate cylinder (20) with the impression cylinder (21).

As a method for forming the concave electrode pattern (20a) on the plate surface of the plate cylinder (20), a helio-crisiograph method in which a diamond needle is vibrated to form a cell,
Electron beam engraving method that evaporates the surface of plate cylinder with electron beam to form cells, exposure / development using positive film
An etching method for forming cells by an etching process or the like is adopted.

When transparency is required, the conductive ink (23) is prepared by dispersing fine particles of a transparent conductive substance in a solution of a transparent binder resin. A sand mill, a roll mill, a ball mill, a homogenizer or the like is used as the dispersing means. The viscosity of the conductive ink (23) is 5
The range of 0 to 1000 sps is preferable.

Examples of the binder resin include phenoxy resin, vinyl chloride-vinyl acetate copolymer, polyester resin, polyurethane resin, cellulose, polysulfone resin, polyvinyl butyral resin, acrylic butadiene styrene copolymer, acrylic styrene copolymer, Examples include polycarbonate resins, examples of the solvent include methyl ethyl ketone, tetrahydrofuran, cyclohexanone, toluene, and the like. Examples of the conductive substance include tin oxide, indium-tin oxide (ITO),
Examples include silver and gold. If the conductive ink (23) does not need to be transparent, carbon black may be used as the conductive material.

The method of supplying the conductive ink is shown in FIG.
As shown in, a part of the plate cylinder (20) is partially covered with the conductive ink (2
In addition to the method of immersing in 3), a method of immersing a part of the applying roller placed in contact with the lower part of the plate cylinder in the conductive ink can be adopted. After the gravure printing is completed, the solvent in the conductive ink is evaporated by blowing heated air onto the printing surface to solidify the conductive ink. The first member (1) shown in FIG. 1 has a plurality of linear drive electrodes (12) continuously formed in the longitudinal direction (MD direction) of an insulating support (11) made of a plastic film, and then the longitudinal direction. It is obtained by cutting it into a predetermined length.

In the round forming process, as shown in FIG. 2, after the electrode forming process is completed, a plurality of linear drive electrodes (1
2) A plurality of linear drive electrodes (1) except for the connection points (land formation points) with the above-mentioned linear aggregated lines of a plurality of phases, which will be described later.
2) by applying an insulating paste (3) on it. The symbol (4) in FIG. 2 represents a circular round. The insulating paste (3) corresponds to the insulating protective film (13) shown in FIG. 15 described above, and various transparent resins such as thermosetting type and UV curing type are used as the insulating material. The insulating paste (3) is applied by screen printing,
It can be easily performed by using offset printing, pad printing, etc. The insulating paste (3) has a dry thickness of about 5 to 20 μm.

Prior to the application of the above-mentioned insulating paste (3), a plurality of linear drive electrodes (1
Round (4) may be printed on top of 2) with transparent conductive ink. Printing is performed in a staggered manner as shown in FIG. As the printing method, the same method as described above can be adopted. The land printing as described above is performed subsequent to the electrode forming step by the gravure printing. However, in order to facilitate the alignment in the land printing, in the electrode forming step, the alignment mark (25 ) Is preferably gravure printed.

In the insulating film forming process, as shown in FIG. 3, after the round forming process is completed, the land forming region (5) is formed.
The insulating paste is applied to the entire surface except the land (4). Reference numeral (5) in FIG. 3 represents the insulating paste together with the land forming region. The insulating paste (5) has a dry thickness of 20 μm or more (for example, about 20 to 100 μm). The insulating film formation process
This is performed in order to further enhance the insulating property of the land (4) that connects the plurality of linear drive electrodes (12) and the linear assembly lines of a plurality of phases described below. Since this can be achieved by increasing the coating thickness and the insulating property of the conductive paste (3), it is an optional step adopted as necessary. As the insulating substance of the insulating paste, various transparent resins such as thermosetting type and UV curing type are used.

In the connecting step, as shown in FIG. 4, after the insulating film forming step is completed, a predetermined direction is formed in a direction intersecting with the plurality of linear drive electrodes (12) and on each land (4). Each linear assembly line (14a), (14) of a plurality of phases at intervals
b) and (14c) are formed by connecting a plurality of linear drive electrodes and a plurality of linear assembly lines. It is preferable that the above-mentioned linear gathering line is formed by a printing means such as screen printing using silver ink as the transparent conductive ink. At this time, in order to facilitate the above connection, a conductive material (silver ink) may be filled in the holes of each land (4) shown in FIG. 3 if necessary.

In the connecting process illustrated in FIG. 4, a plurality of linear assembly lines (14a), (14b) and (14c) are formed in a direction orthogonal to the plurality of linear drive electrodes (12). However, as long as the object of the present invention is not impaired in size-free, a plurality of linear drive electrodes (12) and a plurality of linear assembly lines (14a), (14b), (1)
The crossing direction of 4c) can be arbitrarily selected.

The electrostatic actuator element according to the present invention manufactured through the above steps has a structure as shown in FIGS. That is, a plurality of drive electrodes (12)
Are multi-phase assembly lines (14a), (14b), (1 arranged on an insulating support (11) and insulated from each other.
4c) is connected to the drive means (18) shown in FIG. 15, and the drive electrodes (12) and the assembly lines (14a), (14b), (14c) of the phases are insulated from each other. A plurality of drive electrodes (12) and a plurality of aggregated lines (14a) of a plurality of phases, which are linearly arranged on the flexible support (11),
(14b) and (14c) are arranged on the same plane of the insulating support (11).

A method of manufacturing an element for an electrostatic actuator according to a third aspect of the present invention is a step of forming a plurality of linear drive electrodes on an insulating support in one direction at predetermined intervals.
Corresponding to the step of laminating the insulating protective film on the drive electrode formation surface of the insulating support, and the connection points (land formation points) with the linear aggregate lines of a plurality of phases on a plurality of linear drive electrodes, which will be described later. Step of forming a land hole penetrating the insulating support from the insulating protective film side, corresponding position on each land in the direction intersecting with the linear drive electrode and on the drive electrode non-forming surface side of the insulating support And connecting the plurality of linear drive electrodes to the plurality of linear drive lines by forming the plurality of linear drive lines at a predetermined interval.

FIG. 7 is the same as FIG. 1, is obtained in the above electrode forming step, and is insulated from each other on the insulating support (11) and arranged in a predetermined direction and at a predetermined interval. 1 shows a first member (1) with a plurality of linear drive electrodes (12).

In the above-mentioned insulating protective film laminating step, as shown in FIG. 8, for example polyester coated with an adhesive (not shown) on the linear drive electrode (12) forming surface of the insulating support (11). Transparent insulating protective film such as film (13)
Is carried out by laminating. The insulating protective film (13) is equivalent to the insulating paste (3) in the land forming step (FIG. 2) in the manufacturing method of the present invention according to the second aspect.

In the land hole forming step, as shown in FIG. 9, for example, by means of an NC drill, a laser or the like, a plurality of linear driving lines (12) on a plurality of linear driving electrodes (12), which will be described later, are formed. This is performed by forming a land hole (40) penetrating the insulating support (11) from the side of the insulating protective film (13) corresponding to the connection point (land forming point) with.
For convenience in this case, a transparent round may be printed on the plurality of linear drive electrodes (12) prior to the above insulating protective film laminating step, if necessary. In addition,
FIG. 9 is a back view of the insulating support (11) shown in FIG.

As shown in FIG. 10, the above-mentioned connecting step is performed on each land on the side of the drive electrode non-forming surface of the insulating support (11) in the direction intersecting with the linear drive electrode (12). A plurality of straight line assembly lines (14
a), (14b), and (14c) are formed to connect a plurality of linear drive electrodes to each linear assembly line of a plurality of phases. At this time, in order to facilitate the above connection, if necessary, each land hole (40) shown in FIG.
The inside may be filled with a conductive material. In addition, a plurality of linear drive electrodes (12) and a plurality of linear assembly lines (14a) of each phase,
The crossing direction of (14b) and (14c) can be arbitrarily selected as described above.

The element for an electrostatic actuator according to the present invention manufactured through the above steps has a structure as shown in FIG. That is, the plurality of drive electrodes (12) and the plurality of assembly lines (14a), (14b), (14)
c) is linearly arranged on the insulating support 11, but unlike the above-described element shown in FIG. 6, a plurality of linear drive electrodes 12 and a plurality of linear assembly lines of each phase ( 14
a), (14b), and (14c) are arranged on different planes (both sides) of the insulating support (11). The reference numeral (13a) in FIG. 11 indicates the insulating protective film (1
The adhesive applied to 3) is shown.

A method of manufacturing an electrostatic actuator element according to a fourth aspect of the present invention is a step of forming a plurality of linear drive electrodes on an insulating support in one direction at predetermined intervals.
Corresponding to the step of laminating the insulating protective film on the drive electrode formation surface of the insulating support, and the connection points (land formation points) with the linear aggregate lines of a plurality of phases on a plurality of linear drive electrodes, which will be described later. A step of forming a land hole penetrating the insulating support from the insulating support side; a plurality of linear assembly lines of a plurality of phases at a predetermined interval in a direction intersecting with the linear drive electrode and at a corresponding position on each land Forming a plurality of linear drive electrodes and connecting the plurality of linear drive lines with each other.

The manufacturing method according to the fourth aspect of the present invention is basically the same as the manufacturing method according to the third aspect of the present invention, but the forming direction of the land holes is different. That is, in the manufacturing method according to the fourth aspect of the present invention, the land hole is formed from the side of the insulating support (the side on which the drive electrode is not formed). Therefore, the above insulating protective film laminating step, for example,
Any step such as after the land hole forming step or after the connecting step can be selected. When the land hole forming step is performed after the insulating protective film laminating step, the land holes do not necessarily need to penetrate the insulating protective film.

The electrostatic actuator element obtained by each of the manufacturing methods of the present invention has a plurality of linear assembly lines (14).
The surface shown in FIG. 15 on the surface on the side of (a), (14b), (14c)
Laminate the same insulating protective film (13) as shown in
It is used as the first member (1) of the aforementioned electrostatic actuator. As the insulating protective film (13), for example, a transparent plastic film or the like is used, and the lamination can be performed with an adhesive. As shown in FIG. 15, the first member (1) and the second member (2) are arranged so as to be in contact with each other to form an electrostatic actuator. The first member (1) is the stator, and the second member (2) is the second member. The member (2) functions as a mover.

Then, in the electrostatic actuator element of the present invention, the plurality of drive electrodes (12) and the assembly lines (14a), (14b), (14c) of the plurality of phases are formed on the insulating support (11). Since it is preferably arranged linearly in the orthogonal direction, it can be cut to an arbitrary length in both the vertical and horizontal directions for use. In addition,
The cut end surface is covered with an insulating tape or an insulating paste in order to prevent contact between the electrode and / or the assembly line and the air.

[0045]

The electrostatic actuator of the present invention adopts a novel assembly line arrangement structure as the first member (stator), so that it can be cut according to the required size for each scene to be used. I can. Therefore, the electrostatic actuator of the present invention can be manufactured at low cost and is expected to be used for various purposes.

[Brief description of drawings]

FIG. 1 is an explanatory view of an example of a method for manufacturing an element for an electrostatic actuator according to the present invention.

FIG. 2 is an explanatory view of an example of a method of manufacturing an electrostatic actuator element according to the present invention.

FIG. 3 is an explanatory view of an example of a method for manufacturing an electrostatic actuator element according to the present invention.

FIG. 4 is an explanatory view of an example of a method for manufacturing an element for an electrostatic actuator according to the present invention.

FIG. 5 is an explanatory view of an example of the electrostatic actuator element according to the present invention obtained by the manufacturing method shown in FIGS.

6 is an explanatory cross-sectional view of the electrostatic actuator element shown in FIG.

FIG. 7 is an explanatory view of another example of a method for manufacturing an electrostatic actuator element according to the present invention.

FIG. 8 is an explanatory view of another example of a method for manufacturing an electrostatic actuator element according to the present invention.

FIG. 9 is an explanatory view of another example of a method for manufacturing an element for an electrostatic actuator according to the present invention.

FIG. 10 is an explanatory view of another example of a method for manufacturing an electrostatic actuator element according to the present invention.

11 is a cross-sectional explanatory view of an example of the electrostatic actuator element according to the present invention obtained by the manufacturing method shown in FIGS.

FIG. 12 is an explanatory view of a gravure coater preferably used in the method for manufacturing an electrostatic actuator element according to the present invention.

FIG. 13 is a surface explanatory diagram of a plate cylinder of a gravure coater.

FIG. 14 is an explanatory view of a part of the insulating support in the manufacturing process of the electrostatic actuator element according to the present invention.

FIG. 15 is a schematic explanatory view of an example of an electrostatic actuator.

FIG. 16 is an explanatory diagram showing an example of drive electrodes and assembly lines of a conventional electrostatic actuator.

FIG. 17 is an explanatory view showing an example of the assembly line of the conventional electrostatic actuator.

[Explanation of symbols]

 1: 1st member 11: Insulating support 12: Drive electrode 13: Insulating protective film 13a: Adhesive 14a: Assembly line 14b: Assembly line 14c: Assembly line 15: Switching element 16: High voltage power supply 17: Switching circuit 18 : Driving means 2: Second member 3: Insulating paste 4: Round 40: Land hole 5: Land forming area (insulating paste) 20: Plate cylinder 20a: Electrode pattern 21: Impression drum 22: Ink tank 23: Conductivity Ink 24: Doctor 25: Alignment mark

Front page continued (72) Inventor Tsuneo Kimura 1060 Narita, Odawara, Kanagawa Kasei Optonix Co., Ltd.Odawara factory (72) Inventor Rei Sakai 1060, Narita, Odawara, Kanagawa Kasei Optonix Co., Ltd. Odawara factory

Claims (6)

[Claims] 1. A first member having a plurality of drive electrodes which are insulated from each other on an insulating support and arranged in a predetermined direction and at a predetermined interval, and an insulating thin leaf which is arranged so as to face the first member. By switching the voltage applied to the drive electrode and the second member that gives positive and negative charges to the body, the first member and the second member
An electrostatic actuator mainly composed of a driving means for relatively moving both of the above members by generating attraction / repulsion force due to the action of static electricity between the member and the plurality of driving electrodes. Connected to the driving means through the respective assembly lines of the plurality of phases arranged on the conductive support and insulated from each other, and the plurality of drive electrodes and the assembly lines of the plurality of phases are provided on the insulating support. The electrostatic actuator is characterized in that the electrostatic actuators are arranged in a straight line. 2. The electrostatic actuator according to claim 1, wherein the plurality of drive electrodes and the assembly lines of the plurality of phases are arranged in directions intersecting with each other. 3. The electrostatic actuator according to claim 1, wherein the plurality of drive electrodes and the assembly lines of the plurality of phases are arranged on the same plane of the insulating support. 4. A step of forming a plurality of linear drive electrodes on an insulative support in one direction and at predetermined intervals, with a plurality of linear aggregate lines of a plurality of phases to be described later on the plurality of linear drive electrodes. Except for connection points (land formation points), a step of applying insulating paste to the surfaces of a plurality of linear drive electrodes to form rounds, and applying insulating paste to the entire surface of the land formation area excluding lands for insulation. A step of forming a film, forming a plurality of linear assembly lines of a plurality of phases at predetermined intervals in a direction intersecting with the plurality of linear drive electrodes and forming a plurality of linear drive electrodes and a plurality of linear drive electrodes; And a step of connecting each linear assembly line of the phase, and the insulating film forming step is an optional step adopted if necessary. Production method. 5. A step of forming a plurality of linear drive electrodes in one direction on an insulating support at predetermined intervals, a step of laminating an insulating protective film on a drive electrode formation surface of the insulating support, A step of forming a land hole penetrating the insulating support from the insulating protective film side corresponding to a connection point (land forming point) with each linear assembly line of a plurality of phases on the linear drive electrode of A plurality of straight line assembly lines of a plurality of phases are formed at predetermined intervals at corresponding positions on each land on the drive electrode non-forming surface side of the insulating support in a direction intersecting with the straight drive electrodes. A method of manufacturing an element for an electrostatic actuator, comprising the step of connecting a linear drive electrode and each linear assembly line of a plurality of phases. 6. A step of forming a plurality of linear drive electrodes in one direction on an insulating support at predetermined intervals, a step of laminating an insulating protective film on a drive electrode formation surface of the insulating support, Forming a land hole penetrating the insulating support from the side of the insulating support corresponding to a connection point (land formation point) with each linear assembly line of a plurality of phases on the linear drive electrode of A plurality of linear drive electrodes and a plurality of linear drive lines of a plurality of phases by forming a plurality of linear drive lines of a plurality of phases at a predetermined interval at a corresponding position on each land in a direction intersecting with the linear drive electrodes. And a step of connecting to the electrostatic actuator element.