JPH09222406A - Method and apparatus for detection of gas - Google Patents

Method and apparatus for detection of gas

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Publication number
JPH09222406A
JPH09222406A JP3023896A JP3023896A JPH09222406A JP H09222406 A JPH09222406 A JP H09222406A JP 3023896 A JP3023896 A JP 3023896A JP 3023896 A JP3023896 A JP 3023896A JP H09222406 A JPH09222406 A JP H09222406A
Authority
JP
Japan
Prior art keywords
gas
detection
gas detection
concentration
detection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3023896A
Other languages
Japanese (ja)
Other versions
JP3549322B2 (en
Inventor
Hirokazu Mihashi
弘和 三橋
Takeshi Sato
武司 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Cosmos Electric Co Ltd
Original Assignee
New Cosmos Electric Co Ltd
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Filing date
Publication date
Application filed by New Cosmos Electric Co Ltd filed Critical New Cosmos Electric Co Ltd
Priority to JP03023896A priority Critical patent/JP3549322B2/en
Publication of JPH09222406A publication Critical patent/JPH09222406A/en
Application granted granted Critical
Publication of JP3549322B2 publication Critical patent/JP3549322B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a technique by which the concentration of a gas at a prescribed value or higher can be measured quickly and accurately while an apparatus is being operated at small electric power. SOLUTION: In a gas detection method, the concentration of a gas, to be detected, at a prescribed concentration or higher is detected by using gas detection elements which are built in the inside. Out of hot wire-type semiconductor gas detection elements forming a gas detection part 4 which covers a noble metal wire coil 3 and which uses a metal oxide semiconductor as a metal material, a first gas detection element 1 which is operated at room temperature and which can detect the gas and a second gas detection element 2 which is operated at a high temperature and which can detect the concentration of the gas are used. When the first gas detection element 1 displays an output at a prescribed value (a) or higher on the basis of the detection of the gas to be detected, the concentration of the gas to be detected is measured by the second gas detection element 2.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、内部に組み込まれ
たガス検知素子を用いて所定濃度以上の被検知ガスの濃
度を測定する技術に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for measuring the concentration of a gas to be detected having a predetermined concentration or higher by using a gas detection element incorporated therein.

【0002】[0002]

【従来の技術】従来、雰囲気中のガスの濃度を測定する
には、高温作動でガス濃度測定可能なガス検知素子を組
み込んだガス検知装置を設けて、その出力を常時モニタ
ーして、その出力からガス濃度を測定する構成にしてあ
った。つまり、通常、ガス濃度測定可能な熱線型半導体
式ガス検知素子は、ガス選択性を得るとともに、そのガ
ス検知に基づき濃度情報の出力を得るためには、高温作
動せねばならないものであるため、例えば、前記ガス検
知素子を用いて、一酸化炭素濃度を監視する場合には前
記ガス検知素子を設けたガス検知装置を常時作動させて
おかねばならないという実情があった。尚、前記ガス検
知素子を高温作動させるには、通常、ガス検知素子に設
けてある貴金属線コイル等に通電する事によりジュール
熱を発生させ、そのガス検知素子を高温に維持させたま
ま作動させていた。
2. Description of the Related Art Conventionally, in order to measure the concentration of gas in an atmosphere, a gas detection device incorporating a gas detection element capable of measuring gas concentration at a high temperature operation is provided, and its output is constantly monitored and its output is measured. It was configured to measure the gas concentration. That is, in general, a hot-wire semiconductor gas detection element capable of measuring gas concentration has to operate at high temperature in order to obtain gas selectivity and to obtain an output of concentration information based on the gas detection. For example, when monitoring the carbon monoxide concentration using the gas detection element, there is a fact that the gas detection device provided with the gas detection element must be operated at all times. In order to operate the gas detection element at a high temperature, Joule heat is usually generated by energizing a noble metal wire coil or the like provided in the gas detection element, and the gas detection element is operated while being maintained at a high temperature. Was there.

【0003】[0003]

【発明が解決しようとする課題】ところが、上述した従
来の技術によれば、前記ガス検知装置を、常時高温作動
させておくと、前記ガス検知素子を高温に維持するため
の大きな電力を必要とし、コンセントから電力を供給す
る必要性が生じるため、小さな電力で作動出来るガス検
知装置が望まれていた。そこで、小電力でガス検知可能
なガス検知素子を用いてガス検知を行うことが考えられ
ているが、この様なガス検知素子は、ガスに対して出力
を得るまでの応答性が遅く、比較的低濃度のガスに対し
ては、安定した出力を得るのに15分程度の時間を要
し、迅速にガス検知を行う事が困難になるという欠点が
あった。
However, according to the above-mentioned conventional technique, if the gas detecting device is constantly operated at a high temperature, a large amount of electric power is required to maintain the gas detecting element at a high temperature. Since there is a need to supply power from an outlet, a gas detection device that can operate with a small amount of power has been desired. Therefore, it has been considered to detect gas using a gas detection element that can detect gas with low power, but such a gas detection element has a slow response until an output is obtained for gas, For a gas having a relatively low concentration, it takes about 15 minutes to obtain a stable output, which makes it difficult to detect the gas quickly.

【0004】そこで、本発明の目的は、上記欠点に鑑
み、小電力で作動させながらも所定量以上になったガス
濃度を迅速かつ的確に測定できるガス検知装置を提供す
ることにある。
In view of the above-mentioned drawbacks, an object of the present invention is to provide a gas detection device capable of quickly and accurately measuring the gas concentration exceeding a predetermined amount while operating with a small electric power.

【0005】[0005]

【課題を解決するための手段】[Means for Solving the Problems]

〔構成1〕この目的を達成するための本発明のガス検知
方法の特徴手段は、内部に組み込まれたガス検知素子を
用いて所定濃度以上の被検知ガスの濃度を測定するの
に、貴金属線コイルを覆って金属酸化物半導体を主材と
してなるガス感応部を形成してある熱線型半導体式ガス
検知素子のうち、常温作動でガス検知可能な第一ガス検
知素子と、高温作動でガス濃度測定可能な第二ガス検知
素子とを用い、前記第一ガス検知素子が被検知ガスを検
知するに基づいて所定値以上の出力を示したときに、前
記第二ガス検知素子によりその被検知ガスの濃度を測定
することにある。
[Structure 1] The characteristic means of the gas detection method of the present invention for achieving this object is to measure the concentration of a gas to be detected at a predetermined concentration or more by using a gas detection element incorporated therein. Among the hot-wire semiconductor type gas detection elements that cover the coil and form the gas sensitive part consisting mainly of metal oxide semiconductor, the first gas detection element that can detect gas at normal temperature operation and the gas concentration at high temperature operation Using a measurable second gas detection element, when the first gas detection element shows an output of a predetermined value or more based on detecting the detection gas, the detection gas by the second gas detection element Is to measure the concentration of.

【0006】〔作用効果〕つまり、前記熱線型半導体式
ガス検知素子は、小径に形成することにより、高いガス
選択性を得られるガス検知素子であるから、通電して出
力を得る場合に少ない電力で、作動する事ができる。ま
た、雰囲気中に存在する一酸化炭素ガス濃度が低く、通
常一酸化炭素ガス濃度を測定する必要のない場合には、
常温でガス検知可能な第一ガス検知素子のみを作動させ
ればよいから、ガス検知しなければならない期間の大部
分は小電力で作動可能にできる。ところで、先の第一ガ
ス検知素子は、正確なガス濃度を測定するためには、安
定した出力が得られるまでの長時間を要するが、短時間
で大まかなガス濃度を把握することもできる。そこで、
前記第一ガス検知素子でガス濃度が高い、あるいは、危
険濃度に達するおそれがあると判断できる出力が得られ
た場合には、第二ガス検知素子を働かせると、正確なガ
ス濃度を測定することが出来、高温に維持したガス検知
素子でのガス濃度測定を、必要最小限度に抑えることが
出来、消費電力を少なく抑制することが出来た。
[Operation and Effect] That is, since the hot wire semiconductor type gas detection element is a gas detection element which can obtain high gas selectivity by being formed with a small diameter, a small electric power is required when an electric current is applied to obtain an output. It can work. Further, when the concentration of carbon monoxide gas existing in the atmosphere is low and it is not usually necessary to measure the concentration of carbon monoxide gas,
Since only the first gas detection element capable of detecting gas at room temperature needs to be operated, a small amount of electric power can be used for most of the period in which gas detection is required. By the way, the first gas detection element requires a long time until a stable output is obtained in order to accurately measure the gas concentration, but it is also possible to grasp a rough gas concentration in a short time. Therefore,
When the gas concentration is high in the first gas detection element, or when an output that can be determined to reach a dangerous concentration is obtained, the second gas detection element is activated to measure an accurate gas concentration. As a result, it was possible to suppress the gas concentration measurement with the gas detection element maintained at a high temperature to the necessary minimum, and to reduce the power consumption.

【0007】〔構成2〕また、本発明のガス検知装置の
特徴構成は、内部に組み込まれたガス検知素子を用いて
所定濃度以上の被検知ガスの濃度を測定するガス検知装
置において、貴金属線コイルを覆って金属酸化物半導体
を主材としてなるガス感応部を形成してある熱線型半導
体式ガス検知素子のうち、常温作動でガス検知可能な第
一ガス検知素子と、高温作動でガス濃度測定可能な第二
ガス検知素子とを設け、前記第一ガス検知素子による被
検知ガスの検知と、前記第二ガス検知素子による被検知
ガスの検知とを択一的に作動切替可能にする切替機構を
設け、前記第一ガス検知素子の被検知ガスの検知に基づ
く出力が所定値以上になったときに、前記第一ガス検知
素子による被検知ガスの検知を前記第二ガス検知素子に
よる被検知ガスの検知に切り替え、前記第二ガス検知素
子の被検知ガス検知に基づく出力が所定値未満であった
ときに、前記第二ガス検知素子による被検知ガスの検知
を前記第一ガス検知素子による被検知ガスの検知に切り
替えるべく前記切替機構を切り替え操作する制御機構を
設けたことにあり、好ましくは、前記第一ガス検知素子
が、酸化スズ半導体にパラジウム、白金、金の少なくと
も一種の金属を0.05mol%以上5mol%以下添
加して形成してあるガス感応部を有するものであればよ
く、前記第二ガス検知素子が、酸化スズ半導体に鉛、ラ
ンタン、パラジウムを添加して形成してあるガス感応部
を有するもの、あるいは、酸化スズ半導体にパラジウ
ム、白金、金の少なくとも一種の金属を0.045mo
l%以下添加して形成してあるガス感応部を有するもの
であればさらに好ましい。 〔作用効果〕つまり、先のガス検知方法を行うに当たっ
て、前記第一、第二ガス検知素子を使い分けることが出
来、小電力でガス検知操作を行うことの出来るガス検知
装置を提供する事が出来る。その結果、ガス検知装置全
体としての消費電力量を極めて少なく設定できるので、
例えば、乾電池などでの作動も可能になるなど、ガス検
知装置の小型化、電源からの配線の不要化などを実現で
き、前記ガス検知装置に携帯性を付与したり、コンセン
ト等の位置による設置位置の制約等を排除することが出
来るなどガス検知装置の利用性を大きく向上させる事が
出来る。
[Structure 2] Further, a characteristic structure of the gas detecting device of the present invention is that a noble metal wire is used in a gas detecting device for measuring a concentration of a gas to be detected which is equal to or higher than a predetermined concentration by using a gas detecting element incorporated therein. Among the hot-wire semiconductor type gas detection elements that cover the coil and form the gas sensitive part consisting mainly of metal oxide semiconductor, the first gas detection element that can detect gas at normal temperature operation and the gas concentration at high temperature operation A switch that is provided with a measurable second gas detection element, and is capable of selectively switching the operation between detection of the detection gas by the first gas detection element and detection of the detection gas by the second gas detection element. A mechanism is provided, and when the output based on the detection of the gas to be detected by the first gas detection element exceeds a predetermined value, the detection of the gas to be detected by the first gas detection element is detected by the second gas detection element. Of detection gas When the output based on the detected gas detection of the second gas detection element is less than a predetermined value, the detection of the detected gas by the second gas detection element is detected by the first gas detection element. There is provided a control mechanism for switching the switching mechanism to switch to gas detection. Preferably, the first gas detection element has a tin oxide semiconductor containing at least one metal selected from palladium, platinum and gold. Any gas having a gas sensitive portion formed by adding at least 05 mol% but not more than 5 mol% may be used, and the second gas detecting element is a gas formed by adding lead, lanthanum and palladium to a tin oxide semiconductor. 0.045mo at least one metal of palladium, platinum and gold is added to a tin oxide semiconductor or a tin oxide semiconductor.
It is more preferable if it has a gas sensitive portion formed by adding 1% or less. [Effects] That is, in performing the above gas detection method, the first and second gas detection elements can be selectively used, and a gas detection device capable of performing gas detection operation with low power can be provided. . As a result, the power consumption of the gas detector as a whole can be set to an extremely low level,
For example, the gas detector can be made smaller, and the wiring from the power source can be eliminated by allowing it to operate with dry batteries, etc., and the gas detector can be ported or installed depending on the location of the outlet, etc. It is possible to greatly improve the usability of the gas detection device by eliminating the restrictions on the position.

【0008】尚、このように、常時ガス濃度をモニター
しておくべき技術としては、一例として一酸化炭素ガス
検知が挙げられるが、一酸化炭素ガス検知用のガス検知
素子としては、前記第一ガス検知素子としては、酸化ス
ズ半導体にパラジウム、白金、金の少なくとも一種の金
属を0.05mol%以上5mol%以下添加して形成
してあるガス感応部を有するものであればよく、このよ
うなガス検知素子は、常温で高い一酸化炭素ガス選択性
を有するので、室温での作動によっても一酸化炭素ガス
のみを効率よく検知し、大まかなガス濃度といえども、
他のガスの影響を受けないという意味では正確なガス検
知が可能となる。また、前記第二ガス検知素子が、酸化
スズ半導体に鉛、ランタン、パラジウムを添加して形成
してあるガス感応部を有するもの、あるいは、酸化スズ
半導体にパラジウム、白金、金の少なくとも一種の金属
を0.045mol%以下添加して形成してあるガス感
応部を有するものであれば、高い一酸化炭素ガス選択性
を有し、高温での一酸化炭素ガス検知を素早く正確に行
える。
Incidentally, as a technique for constantly monitoring the gas concentration in this way, carbon monoxide gas detection can be cited as an example. As a gas detection element for carbon monoxide gas detection, the first The gas detecting element may be any one having a gas sensitive portion formed by adding at least one metal of palladium, platinum and gold to a tin oxide semiconductor in an amount of 0.05 mol% or more and 5 mol% or less. Since the gas detection element has a high carbon monoxide gas selectivity at room temperature, it can efficiently detect only carbon monoxide gas even at room temperature operation, and even if it is a rough gas concentration,
Accurate gas detection is possible in the sense that it is not affected by other gases. The second gas sensing element has a gas sensitive portion formed by adding lead, lanthanum, or palladium to a tin oxide semiconductor, or at least one metal of palladium, platinum, and gold to a tin oxide semiconductor. If it has a gas sensitive part formed by adding 0.045 mol% or less, it has a high carbon monoxide gas selectivity and can detect carbon monoxide gas at high temperature quickly and accurately.

【0009】[0009]

【発明の実施の形態】以下に本発明の実施の形態を図面
に基づいて説明する。図1に示すように、本発明のガス
検知装置には、第一、第二ガス検知素子1、2を組み込
んである。前記第一ガス検知素子1として、約20μm
径の太さの貴金属線コイル(白金線コイル)3を覆って
酸化スズ半導体を0.5mm径に設けてガス感応部4を
形成し、前記ガス感応部4にパラジウムを0.05〜5
mol%添加してある、常温作動型で一酸化炭素ガス選
択性の熱線型半導体式ガス検知素子を用い、同様に、前
記第二ガス検知素子2として、白金線コイル3を覆って
酸化スズ半導体を主材としてなるガス感応部4を形成
し、前記ガス感応部4にパラジウムを0.005〜0.
05mol%、及び、ランタン0.5〜5mol%、及
び、鉛0.05〜0.5mol%を添加してある高温作
動型で一酸化炭素ガス選択性の熱線型半導体式ガス検知
素子を用い(図2参照)、ガス検知自在に構成してあ
る。前記第一、第二ガス検知素子1、2は、図1に示す
ように、ブリッジ回路等を組み込んでそれぞれの素子に
基づく出力を検知する検出回路部5に接続し、さらに、
前記第一、第二ガス検知素子1、2のいずれが前記検出
回路部5に接続された状態になっているかを切り替える
切替機構として回路切替部6を設け、電源からの電力供
給及び前記回路切替部6の切り替え動作を、前記第一、
第二ガス検知素子1、2からの出力に基づいて切り替え
制御する切替制御部7を設けてあり、前記検出回路部5
で検知された出力に基づき、所定値を越えるガス濃度を
検出した場合に警報音を発生する警報装置8を接続して
全体としてガス検知装置に構成してある。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the gas detection device of the present invention incorporates first and second gas detection elements 1 and 2. As the first gas detection element 1, about 20 μm
A noble metal wire coil (platinum wire coil) 3 having a large diameter is covered with a tin oxide semiconductor having a diameter of 0.5 mm to form a gas sensitive portion 4. Palladium is added to the gas sensitive portion 4 in an amount of 0.05 to 5
Using a hot wire type semiconductor gas detection element having a normal temperature operation type and carbon monoxide gas selectivity to which mol% is added, similarly, as the second gas detection element 2, a platinum oxide coil 3 is covered with a tin oxide semiconductor. Of the gas sensitive portion 4 is formed using as a main material, and palladium is added to the gas sensitive portion 4 in an amount of 0.005 to 0.
A high temperature actuation type carbon monoxide gas-selective hot-wire semiconductor type gas sensing element to which 0.5 mol% and 0.5 to 5 mol% of lanthanum and 0.05 to 0.5 mol% of lead were added ( (Refer to FIG. 2), the gas can be freely detected. As shown in FIG. 1, the first and second gas detection elements 1 and 2 are connected to a detection circuit section 5 that incorporates a bridge circuit or the like and detects an output based on each element,
A circuit switching unit 6 is provided as a switching mechanism for switching which of the first and second gas detection elements 1 and 2 is connected to the detection circuit unit 5, and a power supply from a power source and the circuit switching are provided. The switching operation of the unit 6 is
A switching control unit 7 that controls switching based on outputs from the second gas detection elements 1 and 2 is provided, and the detection circuit unit 5 is provided.
On the basis of the output detected in (1), an alarm device 8 for generating an alarm sound when a gas concentration exceeding a predetermined value is detected is connected to form a gas detection device as a whole.

【0010】前記第一ガス検知素子1は、通常時に、常
温で一酸化炭素ガスの吸着により、その第一ガス検知素
子1の抵抗値が一酸化炭素ガス濃度に対応して変化する
ものとなっている。そのため、10秒あたり1ミリ秒通
電する動作を繰り返すことによって、前記第一ガス検知
素子が発熱するのを防止しつつ、前記第一ガス検知素子
1の抵抗値の変化に基づく出力を得ると、その第一ガス
検知素子1に接触している一酸化炭素ガス濃度を測定す
ることが出来る。また、このような第一ガス検知素子1
は、450℃程度の高温にさらすパージ動作を1時間〜
数時間あたり数秒の割合で行うことにより、長期的に安
定した動作を行える。
In the first gas detecting element 1, the resistance value of the first gas detecting element 1 changes corresponding to the carbon monoxide gas concentration due to adsorption of carbon monoxide gas at normal temperature. ing. Therefore, by repeating the operation of energizing for 1 millisecond for 10 seconds, it is possible to prevent the first gas sensing element from generating heat and obtain an output based on a change in the resistance value of the first gas sensing element 1, The concentration of carbon monoxide gas in contact with the first gas detection element 1 can be measured. In addition, such a first gas detection element 1
For 1 hour to perform the purging operation by exposing it to a high temperature of about 450 ° C.
By performing the operation at a rate of several seconds per several hours, stable operation can be performed for a long period of time.

【0011】前記第二ガス検知素子2は、先の第一ガス
検知素子1で測定した一酸化炭素ガス濃度情報が、例え
ば、50ppmの一酸化炭素ガスの飽和出力の60%以
上に達するときに通電を開始すると、前記第二ガス検知
素子2が前記白金線コイル3のジュール熱により、所定
温度に制御され、かつ、一酸化炭素ガスの吸着により、
その第二ガス検知素子2の抵抗値が一酸化炭素ガス濃度
に対応して変化するものとなっている。そのため、例え
ば通電開始から所定時間後の出力値を得れば、その出力
から一酸化炭素ガス濃度を素早く正確に測定できる。
When the carbon monoxide gas concentration information measured by the first gas detection element 1 reaches, for example, 60% or more of the saturated output of carbon monoxide gas of 50 ppm, When the energization is started, the second gas detection element 2 is controlled to a predetermined temperature by the Joule heat of the platinum wire coil 3, and the carbon monoxide gas is adsorbed,
The resistance value of the second gas detection element 2 changes according to the carbon monoxide gas concentration. Therefore, for example, if the output value after a predetermined time has passed from the start of energization, the carbon monoxide gas concentration can be quickly and accurately measured from the output.

【0012】前記切替制御部7は、前記第二ガス検知素
子2の抵抗値の変化に基づく出力値が、所定値に満たな
い場合に、前記検出回路部5を、前記第一ガス検知素子
1に対して間欠的に電力供給自在な状態にするととも
に、前記第一ガス検知素子1の抵抗値の変化に基づく出
力値が、所定値に達したときに、前記検出回路部5を、
前記第二ガス検知素子2に対して電力供給してその第二
ガス検知素子2を設定温度に維持可能な状態にするよう
に、前記回路切替部6を切替制御するとともに、前記電
力供給を制御する切替制御機構として働く構成にしてあ
る。
When the output value based on the change in the resistance value of the second gas detection element 2 is less than a predetermined value, the switching control section 7 controls the detection circuit section 5 to change the detection circuit section 5 to the first gas detection element 1. In contrast to the above, the power supply is intermittently controlled, and when the output value based on the change in the resistance value of the first gas detection element 1 reaches a predetermined value, the detection circuit unit 5 is
The circuit switching unit 6 is switch-controlled and the power supply is controlled so that power is supplied to the second gas detection element 2 and the second gas detection element 2 can be maintained at a set temperature. The switch control mechanism is configured to operate.

【0013】[0013]

【実施例】以下に本発明の実施例を図面に基づいて説明
する。
Embodiments of the present invention will be described below with reference to the drawings.

【0014】〔ガス検知素子〕所定濃度の塩化スズの水
溶液に、所定割合で塩化アンチモンを添加して調整して
おく。この水溶液にアンモニア水を滴下して水酸化スズ
の沈殿物を得る。前記沈殿物を水洗、乾燥後、650℃
で2時間焼成して、酸化スズを得る。前記酸化スズを粉
砕して微粉末にし、水で練って酸化スズのペーストを得
る。
[Gas Sensing Element] An antimony chloride is added in a predetermined ratio to an aqueous solution of tin chloride having a predetermined concentration for adjustment. Aqueous ammonia is added dropwise to this aqueous solution to obtain a tin hydroxide precipitate. After washing the precipitate with water and drying, 650 ° C
And baked for 2 hours to obtain tin oxide. The tin oxide is pulverized into a fine powder and kneaded with water to obtain a tin oxide paste.

【0015】前記酸化スズのペーストを前記白金コイル
3の周囲を覆うように塗布し、乾燥後600℃で1時間
焼成して、前記白金コイルを覆ってガス感応部4を設け
る。次に、塩化パラジウム水溶液を調整しておき、前記
塩化パラジウム水溶液を、前記酸化スズに対するパラジ
ウム量が、0.05〜5mol%になるように前記ガス
感応部4に含浸させ、これを乾燥後、600℃で1時間
加熱して第一ガス検知素子を得る。
The tin oxide paste is applied so as to cover the periphery of the platinum coil 3, dried and fired at 600 ° C. for 1 hour to cover the platinum coil and provide the gas sensitive portion 4. Next, an aqueous palladium chloride solution is prepared in advance, and the aqueous palladium chloride solution is impregnated into the gas sensitive part 4 so that the amount of palladium with respect to the tin oxide is 0.05 to 5 mol%, and after this is dried, It heats at 600 degreeC for 1 hour, and a 1st gas detection element is obtained.

【0016】この第一ガス検知素子1は、図3に示すよ
うに、常温で、水素ガスに対して高い一酸化炭素ガス選
択性を有する事が分かり、さらに、この第一ガス検知素
子1のガス応答性を調べると、図4に示すようになり、
50ppmの一酸化炭素ガスであっても約15分で正確
な出力を得る事ができるものの、約3分で飽和出力の約
60%以上の出力値を得ることが出来るため、短時間で
常温での一酸化炭素ガスの大まかな濃度を把握するのに
役立つことが分かる。
As shown in FIG. 3, the first gas detecting element 1 was found to have a high carbon monoxide gas selectivity with respect to hydrogen gas at room temperature. When the gas responsiveness is examined, it becomes as shown in FIG.
An accurate output can be obtained in about 15 minutes even with carbon monoxide gas of 50 ppm, but an output value of about 60% or more of the saturated output can be obtained in about 3 minutes, so that it can be obtained at room temperature in a short time. It can be seen that it is useful for grasping the rough concentration of carbon monoxide gas.

【0017】また、同様に、前記酸化スズのペーストを
前記白金線コイル3の周囲を覆うように塗布し、乾燥後
600℃で1時間焼成して、前記白金線コイル3を覆っ
てガス感応部4を設けるとともに、パラジウム塩水溶
液、及び、ランタン塩水溶液、及び、鉛塩水溶液を調整
しておき、前記ガス感応部4に対して、前記酸化スズに
対するパラジウム量が、0.005〜0.05mol
%、ランタン量が、0.5〜5mol%、鉛量が、0.
05〜0.5mol%になるように前記各水溶液を含浸
させ、これを乾燥後、600℃で1時間加熱して第二ガ
ス検知素子2を得る。この第二ガス検知素子2は、図5
に示すように、200℃〜250℃の高温で、水素ガス
や炭化水素ガスに対して極めて高い一酸化炭素ガス選択
性を有する事が分かり、一酸化炭素ガスの正確な濃度を
測定するのに役立つ事が分かる。
Similarly, the tin oxide paste is applied so as to cover the periphery of the platinum wire coil 3, dried and then baked at 600 ° C. for 1 hour to cover the platinum wire coil 3 and cover the gas sensitive portion. 4, the palladium salt aqueous solution, the lanthanum salt aqueous solution, and the lead salt aqueous solution are adjusted so that the amount of palladium with respect to the tin oxide is 0.005 to 0.05 mol with respect to the gas sensitive section 4.
%, The amount of lanthanum is 0.5 to 5 mol%, and the amount of lead is 0.
Each of the aqueous solutions is impregnated so as to have a concentration of 05 to 0.5 mol%, dried and then heated at 600 ° C. for 1 hour to obtain the second gas detection element 2. This second gas detection element 2 is shown in FIG.
As shown in, it has been found that it has an extremely high carbon monoxide gas selectivity with respect to hydrogen gas and hydrocarbon gas at a high temperature of 200 ° C to 250 ° C. I find it useful.

【0018】〔ガス検知実験例〕先の第一、第二ガス検
知素子1、2を、前記ガス検知装置に組み込み、500
ppmの一酸化炭素ガス漏洩を検知させる実験を行った
ところ、図6に示すようになった。前記ガス検知装置
は、切替制御部7によって以下のように切替制御され
る。通常時に、常温で一酸化炭素ガスを検知して、通電
によって、前記500ppmの一酸化炭素ガスの濃度に
対して出力を得る。この一酸化炭素ガスの検知は、10
秒あたり1ミリ秒通電する動作を繰り返す。このとき、
前記第一ガス検知素子1は、発熱せず、常温に維持され
るとともに、消費電力も高温作動時の1万分の1程度と
出来た。前記第一ガス検知素子1の抵抗値の変化に基づ
く出力を得て、その第一ガス検知素子1に接触している
雰囲気中の一酸化炭素ガス濃度を測定し、前記第一ガス
検知素子1で測定した一酸化炭素ガス濃度情報が、50
ppmの一酸化炭素ガスの飽和出力の60%以上(一次
検知ラインa)に達すると、前記回路切替部を切替え
て、前記第二ガス検知素子2に通電を開始して、前記第
二ガス検知素子2を250℃に制御する。こうして、通
電開始から所定時間後に前記第二ガス検知素子2の出力
値を得れば、その出力から一酸化炭素ガス濃度を正確に
知ることが出来、しかも、一酸化炭素ガス供給からほぼ
1分30秒程度の短時間でここで得られたガス濃度が所
定濃度(警報ラインb)を超えていると判断して、警報
装置の警報音を鳴らすことができた。
[Example of gas detection experiment] The first and second gas detection elements 1 and 2 are incorporated into the gas detection device, and
When an experiment was conducted to detect ppm carbon monoxide gas leakage, the results are shown in FIG. The switching of the gas detection device is controlled by the switching control unit 7 as follows. Normally, carbon monoxide gas is detected at room temperature, and an output is obtained for the concentration of the carbon monoxide gas of 500 ppm by energization. The detection of this carbon monoxide gas is 10
The operation of energizing for 1 millisecond per second is repeated. At this time,
The first gas detection element 1 did not generate heat, was maintained at room temperature, and consumed power at about 1 / 10,000 of the high temperature operation. An output based on a change in the resistance value of the first gas detection element 1 is obtained, the carbon monoxide gas concentration in the atmosphere in contact with the first gas detection element 1 is measured, and the first gas detection element 1 The carbon monoxide gas concentration information measured in
When it reaches 60% or more of the saturated output of carbon monoxide gas (primary detection line a), the circuit switching unit is switched to start energizing the second gas detection element 2 to detect the second gas. The element 2 is controlled at 250 ° C. In this way, if the output value of the second gas detection element 2 is obtained after a predetermined time from the start of energization, the carbon monoxide gas concentration can be accurately known from the output, and more than one minute after the carbon monoxide gas supply. In a short time of about 30 seconds, it was judged that the gas concentration obtained here exceeded the predetermined concentration (alarm line b), and the alarm sound of the alarm device could be sounded.

【0019】尚、このような、ガス検知方法を行う場合
に、特に低濃度の一酸化炭素ガス、例えば50ppmを
5分以内に検知する必要があるときには、前記第一ガス
検知素子1の被検知ガスに基づく所定値aを、50pp
mのガス中での飽和出力の60%の出力値に設定してお
けば、3分程度で第二ガス検知素子2が作動開始し、4
〜5分程度で正確な濃度を知ることができ、一酸化炭素
の警報器等への適用の上で好都合である。
When performing such a gas detection method, especially when it is necessary to detect a low concentration carbon monoxide gas, for example, 50 ppm within 5 minutes, the first gas detection element 1 to be detected. Predetermined value a based on gas is 50 pp
If the output value of 60% of the saturated output in the gas of m is set, the second gas detection element 2 starts operating in about 3 minutes, and
The accurate concentration can be known in about 5 minutes, which is convenient for application to carbon monoxide alarms and the like.

【0020】また、50〜100ppm程度の低濃度の
一酸化炭素ガスであっても5分以内に警報音を鳴らす事
が出来、十分実用に耐えることがわかり、携帯用のガス
警報器に用いることが出来た。
Further, even if the carbon monoxide gas has a low concentration of about 50 to 100 ppm, the alarm sound can be emitted within 5 minutes, and it has been found that it can withstand practical use. Was completed.

【0021】〔別実施形態〕以下に別実施形態を説明す
る。前記第一ガス検知素子1として、前記パラジウム、
白金、金の少なくとも一種の貴金属の添加量を種々変更
した第一ガス検知素子1を比較検討したところ図7のよ
うになった。尚、前記各貴金属の添加量における感度比
は、前記第一ガス検知素子1の100ppmの一酸化炭
素ガスに対する感度が最も高くなった各貴金属の添加量
を、感度=1としてそれに対する割合(感度比)で示し
てある。図7より、前記各金属の添加量は、0.5mo
l%以上1mol%以下が特に好ましいことがわかる。
また、前記第二ガス検知素子2としては、酸化スズ半導
体にパラジウム、白金、金の少なくとも一種の貴金属を
0.045mol%以下添加して形成してあるガス感応
部を有するものとしてあってもよく、例えば、図8に示
すように、酸化スズ半導体に白金を0.003mol%
添加してある第二ガス検知素子2を用いれば、100p
pmの一酸化炭素ガスに対して、1000ppmの水素
ガスに対する出力に相当する程度の出力が得られている
ことが分かり、一酸化炭素ガスを選択的に検知するのに
有用であることが分かる。また、これら白金、金、パラ
ジウムは一種のみを用いてもよいし、複数種を混合して
用いてもよい。
[Another Embodiment] Another embodiment will be described below. As the first gas detection element 1, the palladium,
A comparative examination of the first gas detection element 1 in which the amount of at least one precious metal selected from platinum and gold was changed was as shown in FIG. The sensitivity ratio in the added amount of each noble metal is the ratio (sensitivity) to the added amount of each noble metal in which the sensitivity of the first gas detection element 1 to the carbon monoxide gas of 100 ppm is the highest. Ratio). From FIG. 7, the addition amount of each metal is 0.5 mo.
It can be seen that 1% or more and 1 mol% or less is particularly preferable.
Further, the second gas detection element 2 may have a gas sensitive portion formed by adding at least one noble metal of palladium, platinum and gold to a tin oxide semiconductor in an amount of 0.045 mol% or less. For example, as shown in FIG. 8, 0.003 mol% platinum is added to a tin oxide semiconductor.
If the added second gas sensing element 2 is used, 100p
It was found that an output equivalent to an output for 1000 ppm hydrogen gas was obtained with respect to pm carbon monoxide gas, and it was found to be useful for selectively detecting carbon monoxide gas. Further, these platinum, gold and palladium may be used alone or in combination of two or more.

【0022】尚、特許請求の範囲の項に、図面との対照
を便利にするために符号を記すが、該記入により本発明
は添付図面の構成に限定されるものではない。
In the claims, reference numerals are provided for convenience of comparison with the drawings, but the present invention is not limited to the configuration shown in the attached drawings.

【図面の簡単な説明】[Brief description of drawings]

【図1】ガス検知装置の概略図FIG. 1 is a schematic diagram of a gas detection device.

【図2】ガス検知素子の一部破断斜視図FIG. 2 is a partially cutaway perspective view of a gas detection element.

【図3】第一ガス検知素子の温度依存ガス検知特性図FIG. 3 is a temperature-dependent gas detection characteristic diagram of the first gas detection element.

【図4】第一ガス検知素子の応答特性図FIG. 4 is a response characteristic diagram of the first gas detection element.

【図5】第二ガス検知素子の温度依存ガス検知特性図FIG. 5 is a temperature-dependent gas detection characteristic diagram of the second gas detection element.

【図6】ガス検知実験例におけるガス検知装置の作動制
御を示す図
FIG. 6 is a diagram showing operation control of a gas detection device in a gas detection experiment example.

【図7】別実施形態における第一ガス検知素子の貴金属
添加量依存ガス検知特性図
FIG. 7 is a noble metal addition amount-dependent gas detection characteristic diagram of the first gas detection element in another embodiment.

【図8】別実施形態における第二ガス検知素子の濃度依
存ガス検知特性図
FIG. 8 is a concentration-dependent gas detection characteristic diagram of a second gas detection element according to another embodiment.

【符号の説明】[Explanation of symbols]

1 第一ガス検知素子 2 第二ガス検知素子 3 貴金属線コイル 4 ガス感応部 6 切替機構 7 制御機構 1 1st gas detection element 2 2nd gas detection element 3 Noble metal wire coil 4 Gas sensitive part 6 Switching mechanism 7 Control mechanism

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 内部に組み込まれたガス検知素子を用い
て所定濃度以上の被検知ガスの濃度を測定するガス検知
方法であって、 貴金属線コイル(3)を覆って金属酸化物半導体を主材
としてなるガス感応部(4)を形成してある熱線型半導
体式ガス検知素子のうち、常温作動でガス検知可能な第
一ガス検知素子(1)と、高温作動でガス濃度測定可能
な第二ガス検知素子(2)とを用い、前記第一ガス検知
素子(1)が被検知ガスを検知するに基づいて所定値
(a)以上の出力を示したときに、前記第二ガス検知素
子(2)によりその被検知ガスの濃度を測定するガス検
知方法。
1. A gas detection method for measuring a concentration of a gas to be detected, which is equal to or higher than a predetermined concentration, by using a gas detection element incorporated therein, wherein a noble metal wire coil (3) is mainly covered with a metal oxide semiconductor. Of the hot-wire semiconductor type gas sensing element in which the gas sensitive part (4) as a material is formed, the first gas sensing element (1) capable of detecting gas at normal temperature operation and the first gas sensing element capable of measuring gas concentration at high temperature operation. The second gas detecting element (2) is used, and when the first gas detecting element (1) shows an output of a predetermined value (a) or more based on the detection of the gas to be detected, the second gas detecting element (2). A gas detection method for measuring the concentration of the gas to be detected according to (2).
【請求項2】 内部に組み込まれたガス検知素子を用い
て所定濃度以上の被検知ガスの濃度を測定するガス検知
装置であって、 貴金属線コイル(3)を覆って金属酸化物半導体を主材
としてなるガス感応部(4)を形成してある熱線型半導
体式ガス検知素子のうち、常温作動でガス検知可能な第
一ガス検知素子(1)と、高温作動でガス濃度測定可能
な第二ガス検知素子(2)とを設け、前記第一ガス検知
素子(1)による被検知ガスの検知と、前記第二ガス検
知素子(2)による被検知ガスの検知とを択一的に作動
切替可能にする切替機構(6)を設け、前記第一ガス検
知素子(1)の被検知ガスの検知に基づく出力が所定値
(a)以上になったときに、前記第一ガス検知素子
(1)による被検知ガスの検知を前記第二ガス検知素子
(2)による被検知ガスの検知に切り替え、前記第二ガ
ス検知素子(2)の被検知ガス検知に基づく出力が所定
値(b)未満であったときに、前記第二ガス検知素子
(2)による被検知ガスの検知を前記第一ガス検知素子
(1)による被検知ガスの検知に切り替えるべく前記切
替機構(6)を切り替え操作する制御機構(7)を設け
たガス検知装置。
2. A gas detection device for measuring the concentration of a gas to be detected, which is equal to or higher than a predetermined concentration, by using a gas detection element incorporated therein, the gas detection device covering a precious metal wire coil (3) and mainly comprising a metal oxide semiconductor. Of the hot-wire semiconductor type gas sensing element in which the gas sensitive part (4) as a material is formed, the first gas sensing element (1) capable of detecting gas at normal temperature operation and the first gas sensing element capable of measuring gas concentration at high temperature operation. A two gas detection element (2) is provided, and the detection of the detection gas by the first gas detection element (1) and the detection of the detection gas by the second gas detection element (2) are selectively operated. A switching mechanism (6) for enabling switching is provided, and when the output based on the detection of the gas to be detected by the first gas detection element (1) becomes a predetermined value (a) or more, the first gas detection element ( The detection of the gas to be detected by 1) is performed by the second gas detection element (2). When the output based on the detected gas detection of the second gas detection element (2) is less than a predetermined value (b), the detection of the detected gas by the second gas detection element (2) is performed. A gas detection device provided with a control mechanism (7) for switching and operating the switching mechanism (6) to switch detection of detection gas to detection of gas to be detected by the first gas detection element (1).
【請求項3】 前記第一ガス検知素子(1)が、酸化ス
ズ半導体にパラジウム、白金、金の少なくとも一種の金
属を0.05mol%以上5mol%以下添加して形成
してあるガス感応部(4)を有するものである請求項2
記載のガス検知装置。
3. The gas sensitive part (1), wherein the first gas sensing element (1) is formed by adding at least one metal of palladium, platinum and gold to a tin oxide semiconductor in an amount of 0.05 mol% or more and 5 mol% or less. 4) which has 4).
The gas detection device according to any one of the preceding claims.
【請求項4】 前記第二ガス検知素子(2)が、酸化ス
ズ半導体に鉛、ランタン、パラジウムを添加して形成し
てあるガス感応部(4)を有する一酸化炭素ガス検知素
子である請求項2〜3に記載のガス検知装置。
4. The carbon monoxide gas detection element, wherein the second gas detection element (2) has a gas sensitive portion (4) formed by adding lead, lanthanum and palladium to a tin oxide semiconductor. Item 2. A gas detection device according to items 2 to 3.
【請求項5】 前記第二ガス検知素子(2)が、酸化ス
ズ半導体にパラジウム、白金、金の少なくとも一種の金
属を0.045mol%以下添加して形成してあるガス
感応部(4)を有するものである請求項2〜3記載のガ
ス検知装置。
5. The second gas sensing element (2) has a gas sensitive portion (4) formed by adding 0.045 mol% or less of at least one metal of palladium, platinum and gold to a tin oxide semiconductor. The gas detection device according to claim 2, which has the gas detection device.
JP03023896A 1996-02-19 1996-02-19 Gas detection method and gas detection device Expired - Fee Related JP3549322B2 (en)

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JPH09222406A true JPH09222406A (en) 1997-08-26
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010054213A (en) * 2008-08-26 2010-03-11 Fuji Electric Systems Co Ltd Gas detecting method and device of thin film gas sensor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010054213A (en) * 2008-08-26 2010-03-11 Fuji Electric Systems Co Ltd Gas detecting method and device of thin film gas sensor

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