JPH09218360A - Mechanical optical shutter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a spatial light modulation element without the leakage of light at the time of shielding light and to enable to realize the display of high contrast by providing a part in which plural light shielding plates are mutually superimposed in a plane almost perpendicular to the direction of light transmission. SOLUTION: By providing plural light shielding plates 101a, 101b on the aperture part 109 of a substrate and moving these light shielding plates 101a, 101b, transmission/non-transmission of light through the aperture part 109 of the substrate is controlled. A step is provided in the tip part of one light shielding plate 101b of two light shielding plates 101a, 101b and the tip of the other light shielding plate 101a is overlapped with the former in a part 110. The tip parts of the light shielding plates are not in contact with each other, moved smoothly and an incident light beam is completely interrupted even when the mechanical/optical shutter is closed. Consequently, e.g. when a projector display is composed by using the mechanical optical shutter, the image of high contrast is obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mechanical optical shutter such as a micromechanical shutter array or a microgalvano mirror array used in a projector display, and more particularly to a response time of state transition between a transparent state and a non-transparent state. The present invention relates to a mechanical optical shutter that has a high speed, a simple structure, and a small amount of light leakage when light is blocked. In addition, this mechanical optical shutter realizes a high-resolution, high-contrast projector display and the like that can display moving images.

[0002]

2. Description of the Related Art In recent years, a plurality of light-shielding plates are provided on an opening of a substrate as an optical modulating means used for optical storage / recording, optical logic operation, etc. / A mechanical optical shutter that controls non-transmission has been proposed. More specifically, the mechanical optical shutter is used for forming an image for optical information processing, image processing, image logical operation, forming a data pattern for optical computing, and the like.

An example of such a mechanical optical shutter is disclosed in Japanese Patent Laid-Open No. 4-230721. FIG.
1 is a plan view of a conventional mechanical optical shutter, and FIG. 22 is a partial (one-cell) sectional view thereof. The mechanical optical shutter of this conventional example is a flap type light shield plate 2 which is a moving electrode.
Cells having a structure including 101a and 2101b and a beam 2115 for connecting them to the substrate 2105 are formed in a matrix. Here, the light blocking plates 2101a and 210
1b is made of a material such as Al or poly-Si that hardly transmits light in the visible region.

Each cell has a column electrode 212 and a row electrode 211.
1 and the holding electrode 2113, and by applying an appropriate voltage to the row electrode 2111 and the holding electrode 2113, the light blocking plates 2101a and 2101b can take two stable positions (state A and state C). Shading plate 2101
a and 2101b are activated by returning the voltage at the row electrode 2111 to zero and at the same time applying a control voltage to the column electrode 2112. Matrix addressing is achieved by forming one holding electrode 2113 common to all the light shielding plates 2101a and 2101b arranged in a matrix and having such an electrode arrangement.

This will be described with reference to the time chart shown in FIG. At time A, a voltage is applied to the row electrode 2111 and the holding electrode 2113, an electrostatic attractive force mainly acts between the row electrode 2111 and the light blocking plates 2101a and 2101b, and as shown in the state A of FIG.
1a and 2101b are pulled in the horizontal direction with respect to the substrate 2105 to block the incident light 2201.

Next, at time B, the row electrode 2111 is at the ground potential, and the voltage is applied to the column electrode 2112 and the holding electrode 2113. Therefore, the light shielding plates 2101a and 2101b and the row electrode 2 are
The electrostatic attraction does not work between 111, and the shading plate 2101
a, 2101b and the column electrode 2112, an electrostatic attractive force is exerted. Therefore, as in the state B of FIG.
101b has an oblique posture.

Next, at time C, the column electrode 2112 becomes the ground potential and the voltage is applied to the row electrode 2111 and the holding electrode 2113, but the holding electrode 2113 and the light shielding plate 2101a,
Since the electrostatic attraction between 2101b works stronger than that of the row electrode 2111, the light blocking plates 2101a and 2101b are perpendicular to the substrate 2105 and the incident light 2201 is transmitted, as in the state C of FIG. It

Next, at time D, the column electrode 2112 and the holding electrode 2113 are set to the ground potential, and the voltage is applied to the row electrode 2111. However, between the light shielding plates 2101a and 2101b and the holding electrode 2113 and the column electrode 2112. The electrostatic attraction does not work. In addition, the shading plates 2101a and 2101b and the row electrode 2
Electrostatic attraction and twisting beam 2115 acting between 111
Of the light-shielding plates 2101a, 2101a, 21
01b returns to the original horizontal state like the state D of FIG. In this transition from the vertical state to the horizontal state, not only the spring force of the beam 2115 but also an electrostatic attractive force acts between the row electrode 2111 and the light blocking plates 2101a and 2101b, so that only the spring force of the beam 2115 acts. The speed at which the light blocking plates 2101a and 2101b rotate becomes faster than that of the above.

Further, at time E, the column electrode 2112 becomes the ground potential and the voltage is applied to the row electrode 2111 and the holding electrode 2113, but the row electrode 2111 and the light shielding plate 2101a,
Since the electrostatic attractive force between 2101b acts stronger than that of the holding electrode 2113, the light blocking plates 2101a and 2101b keep the horizontal state with respect to the substrate 2105 as in the state E of FIG. Be stable in the state of shutting off.

A display capable of full-color display can be realized by constructing such a mechanical light shutter in an array form and forming an image of light transmitted through the spatial light modulation element on the screen by a lens. That is, in FIG. 21, one pixel is formed by grouping three shutters having R, G, and B transmission filters. Full-color display is possible by changing the time that each shutter is open and in the transmissive state.

[0011]

However, in the above-mentioned conventional mechanical light shutter, there is a gap between the two light blocking plates 2101a and 2101b even when the light is blocked, and the incident light 2201 cannot be completely blocked. If a spatial light modulator having such a mechanical light shutter is used to construct, for example, a projector display, the light leaks from the gap, and the brightness of black display increases due to the leaked light. There was a problem that the image had a low contrast.

Further, in the above-mentioned conventional mechanical optical shutter, in order to enable moving image display at a video rate, the electrostatic attractive force is used not only in the transmission state but also in the non-transmission state. In order to obtain a response, the column electrode 2112, the row electrode 2111 and the holding electrode 2 are fixed electrodes.
Although the structure is provided with 113, since there are many fixed electrodes, there is no problem when arranging mechanical optical shutters at high density when obtaining a high-resolution display,
There was a problem that the structure became complicated.

The present invention has been made in view of the above conventional problems, and provides a spatial light modulator which does not leak light when light is shielded, and thereby a projector display or the like having a higher contrast can be realized. It is intended to provide a mechanical optical shutter.

Another object of the present invention is to provide a spatial light modulator which has a fast response time of state transition between a transparent state and a non-transparent state, has a simple structure, and has a small amount of leaked light. It is an object of the present invention to provide a mechanical optical shutter capable of displaying a moving image, having a high resolution, and having a higher contrast, such as a projector display.

[0015]

In order to solve the above-mentioned problems, the mechanical optical shutter according to claim 1 of the present invention comprises:
A mechanical optical shutter comprising a plurality of light-shielding plates on a substrate opening, and controlling the transmission / non-transmission of light passing through the substrate opening by moving the plurality of light-shielding plates,
The plurality of light shielding plates are provided with portions that overlap each other with respect to a surface that is substantially perpendicular to the light transmission direction.

A mechanical optical shutter according to a second aspect of the present invention includes a plurality of light shielding plates on the substrate opening, and by moving the plurality of light shielding plates, transmission / non-transmission of light passing through the substrate opening. In the mechanical optical shutter for controlling, the light shielding plate movement control mechanism that exerts a force between the light shielding plate and the fixed portion on the substrate when the light is transmitted, and exerts an attractive force on the light shielding plates when the light is not transmitted.

A mechanical optical shutter according to a third aspect is the mechanical optical shutter according to the second aspect.
The plurality of light shielding plates are provided with portions that overlap each other with respect to a surface that is substantially perpendicular to the light transmission direction.

A mechanical optical shutter according to a fourth aspect of the present invention is the mechanical optical shutter according to the second or third aspect, wherein the light shielding plate movement control mechanism is provided on the side wall of the light shielding plate and the substrate opening during the transmission. It exerts a force between it and the fixed part.

The mechanical optical shutter according to claim 5 is the mechanical optical shutter according to claim 3,
The plurality of light-shielding plates are flap-shaped light-shielding plates fixed to the substrate via a torsion bar, and the light-shielding plate movement control mechanism includes a light-shielding plate and a fixing portion of a side wall of the substrate opening. The light-shielding plate is tilted with respect to the substrate by a force exerted therebetween to control transmission / non-transmission of the light, and the spring constants of the torsion bars of the plurality of overlapping light-shielding plates are different from each other.

The mechanical optical shutter according to claim 6 is the mechanical optical shutter according to claim 3,
The plurality of light-shielding plates are flap-shaped light-shielding plates fixed to the substrate via a torsion bar, and the light-shielding plate movement control mechanism includes a light-shielding plate and a fixing portion of a side wall of the substrate opening. The light-shielding plate is tilted with respect to the substrate by a force acting between the substrates to control transmission / non-transmission of the light, and a force acting on the light-shielding plate and the fixing portion is generated for the plurality of overlapping light-shielding plates. The timing and the timing at which the force disappears are independent between the shading plates.

The mechanical optical shutter according to claim 7 is the mechanical optical shutter according to claim 5 or 6, wherein the light shielding plate movement control mechanism is:
An attractive force is exerted on the light shielding plates.

The mechanical optical shutter according to claim 8 is the mechanical optical shutter according to claim 2, 3, 4, 5, 6 or 7, wherein the light shielding plate movement control mechanism comprises:
The transmission / non-transmission of the light is controlled by using an electrostatic attractive force due to a potential difference between the light shielding plate and the fixing portion or between the light shielding plates.

A mechanical optical shutter according to a ninth aspect is the mechanical optical shutter according to the second, third, fourth, fifth, sixth, seventh or eighth aspect, in which the light shielding plate movement control mechanism is formed in the fixed portion. The transmission / non-transmission of the light is controlled by utilizing the magnetic force of the generated coil.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an outline of a mechanical light shutter of the present invention and an embodiment of a mechanical light shutter of the present invention will be described [Example 1] to [Example 7].
Will be described in detail with reference to the drawings.

[Outline of Mechanical Optical Shutter of the Present Invention]
In the mechanical light shutter according to claim 1 of the present invention, for example, as shown in FIG. 1, a plurality of light shielding plates 101a and 101b are provided on the substrate opening 109, and the plurality of light shielding plates 101 are provided.
By moving a and 101b, the substrate opening 109
In order to control transmission / non-transmission of light passing therethrough, a plurality of light shielding plates 101a and 101b are provided with overlapping portions 110 on surfaces substantially perpendicular to the light transmission direction. As a result, even in the non-transmissive state in which the mechanical light shutter is closed, there is no gap with respect to the incident light, so that the incident light does not leak and transmit, and there is no leak light when blocking the light. And a projector display with higher contrast can be realized.

In the mechanical optical shutter according to the second aspect, for example, as shown in FIG. 5, a plurality of light shielding plates 501a and 501b are provided on the substrate opening 509, and the plurality of light shielding plates 501a and 501b can be moved. The light-shielding plate movement control mechanism controls the transmission / non-transmission of light passing through the substrate opening 509.
A force is exerted between the a and 501b and the fixed portions 505a and 505b on the substrate, and an attractive force is exerted between the light shielding plates 501a and 501b during non-transmission.

As a result, when the transparent state is transited to the non-transmissive state, an attractive force is exerted between the light shielding plates 501a and 501b, so that the moving speed of the light shielding plates 501a and 501b is higher than that of the conventional example only by the returning force of the beam. Is faster, and
At the time of non-transmission, an attractive force acts between the light-shielding plates 501a and 501b, so that the gap between the light-shielding plates 501a and 501b is closed, leak light in the non-transmissive state can be eliminated, and the response speed is fast with a simple structure. Further, it is possible to provide a mechanical spatial light modulation element with little leaked light, and as a result, it is possible to realize a projector display which is capable of displaying moving images and has high resolution and high contrast.

According to a third aspect of the present invention, there is provided the mechanical light shutter according to the second aspect, wherein the plurality of light shielding plates are provided with overlapping portions with respect to a surface substantially perpendicular to the light transmission direction. Therefore, it is possible to eliminate leakage light in the non-transmissive state, and it is possible to realize a projector display with higher contrast.

Further, in the mechanical light shutter according to the fourth aspect, for example, as shown in FIG. 5, by the light shielding plate movement control mechanism, at the time of transmission, the light shielding plates 501a and 501b and the fixing portions 505a and 505b of the side walls of the substrate opening 509 are formed. It is desirable to exert force between and.

In the mechanical optical shutter according to the fifth aspect, as shown in FIG. 11, a plurality of light blocking plates 1101a,
1101b, substrate and torsion bars 1102a, 11
In the case of a flap-shaped shading plate fixed via 02b, the shading plate movement control mechanism causes the shading plate 1101a,
1101b and fixed portions 1105a, 1 on the side wall of the substrate opening
The light shielding plates 1101a, 1
Inclination of 101b with respect to the substrate controls transmission / non-transmission of light.

Here, a plurality of light-shielding plates 1101 which overlap each other
a and 1101b, for example, the torsion bar 11
By making the spring constant K1 of 02a smaller than the spring constant K2 of the torsion bar 1102b, the light shielding plates 1101a, 1
Light-shielding plate 1101 when malfunctioning such that the ends of 101b are caught by each other or when the non-transmissive state transits to the transmissive state
It is possible to provide a mechanical spatial light modulation element that can prevent the order of a and 1101b from changing, have no leakage light, and have high operation reliability, and realize a projector display with high contrast and reliability. it can.

In the mechanical optical shutter according to the sixth aspect, as shown in FIG. 13, a plurality of light blocking plates 1301a,
1301b, substrate 1306 and torsion bar 1302
In the case of a flap-shaped shading plate fixed via a and 1302b, the shading plate movement control mechanism includes a shading plate 1301.
a, 1301b and the fixed portion 1305 of the side wall of the substrate opening
The light blocking plate 1301 is generated by the force acting between a and 1305b.
The a and 1301b are inclined with respect to the substrate 1306 to control transmission / non-transmission of light.

Here, a plurality of light-shielding plates 1301 that overlap each other
a and 1301b, the light-shielding plates 1301a and 1301
The timing at which the force acting on 1b and the fixed portions 1305a and 1305b is generated and the timing at which the force disappears are independent between the light shielding plates. For example, when transitioning from the non-transmissive state to the transmissive state, the force acting on the shading plate 1301a and the fixing portion 1305a is generated earlier than the force acting on the shading plate 1301b and the fixing portion 1305b in time, and When transitioning to the non-transmissive state, the light blocking plate 1301b and the fixed portion 13
The force acting on 05b is applied to the shading plate 1301a and the fixing portion 1305.
It is generated earlier in time than the force acting on a.

Thus, when the transparent state changes to the non-transmissive state, the light shielding plates 1301a and 1301b malfunction such that the tips of the light shielding plates 1301a and 1301b are caught by each other, or the light shielding plates 1301a and 1301b change from the non-transmissive state to the transparent state.
It is possible to provide a mechanical spatial light modulator that can prevent the change of the order of the above, has no light leakage, and has high operation reliability, and realize a projector display with high contrast and reliability.

In the mechanical optical shutter according to the seventh aspect, for example, as shown in FIG. 13, the light shielding plate movement control mechanism exerts an attractive force on the light shielding plates 1301a and 1301b when the light is not transmitted. Accordingly, when the transparent state is transited to the non-transmissive state, the light blocking plates 1301a,
Since an attractive force acts between 01b, the shading plates 1301a, 1
The moving speed of 301b becomes fast, and attractive force acts between the light blocking plates 1301a and 1301b at the time of non-transmission, so that the gap between the light blocking plates 1301a and 1301b is closed, and leak light in the non-transmission state can be eliminated. It is possible to provide a mechanical spatial light modulator that has a high response speed, a high operation reliability, and a small amount of leaked light. As a result, a moving image can be displayed, a high-resolution, high-reliability projector with high contrast can be provided. A display can be realized.

Further, in the mechanical light shutter according to the eighth aspect, the light-shielding plate movement control mechanism uses the electrostatic attraction between the light-shielding plate and the fixed portion or the potential difference between the light-shielding plates to transmit / transmit the light. It is desirable to control opacity.

Further, in the mechanical light shutter according to the ninth aspect, it is desirable that the light-shielding plate movement control mechanism controls the transmission / non-transmission of the light by utilizing the magnetic force of the coil formed in the fixed portion.

[Basic Example 1 Applied to the Embodiment] Here,
Before starting a detailed description of the embodiments of the present invention, a basic type of mechanical optical shutter to which the present invention is applied will be described in the following embodiments.

First, FIG. 19 shows a type in which a light shielding plate (moving electrode) moves in parallel to a substrate (hereinafter referred to as a parallel moving type).
FIG. 3 is an explanatory diagram of a mechanical optical shutter having the above configuration. That is, FIG. 19A is a plan view, FIG. 19B is a sectional view in a non-transmissive state with the shutter closed, and FIG. 19C is a sectional view in a transmissive state with the shutter open.

In FIG. 19, 1901a and 1901b
Is a light shielding plate, 1902a and 1902b are beam / wiring, 1
903a and 1903b are comb-teeth fixed electrodes, 1903a ',
Reference numeral 1903b ′ is a comb-tooth moving electrode, and 1904a and 1904b.
Is an anchor, 1905 is a substrate, 1907 is a power supply, 190
Reference numeral 9 is an opening of the substrate.

Two shading plates 190 are provided on the opening 1909.
1a and 1901b, and beam / wiring 1902a and 1
It is connected to the substrate 1905 via 902b. The light-shielding plates 1901a and 1901b have comb-teeth electrodes 1903a ′ and 1903b ′, which are movable electrodes, and comb-teeth fixed electrodes 1903a and 1903b facing the comb-teeth electrodes 1903a ′ and 1903b are provided on the substrate 1905.

When no voltage is applied between the comb-teeth electrodes, as shown in the state A of FIG.
When 901a and 1901b are close to each other, the mechanical light shutter is in a closed non-transmissive state, and the incident light is not transmitted. When a voltage is applied between the comb-teeth electrodes, an electrostatic attractive force acts between the comb-teeth electrodes, and as shown in state B of FIG.
The light shield plates 1901a and 1901b move to the comb-teeth fixed electrodes 1903a and 1903b, respectively, and the mechanical light shutter is brought into an open transmission state, so that incident light is transmitted. Further, when returning from the state B (transmissive state) to the state A (non-transmissive state), the comb-teeth fixed electrode 1903 is used.
a, the voltage applied to 1903b is set to the ground potential,
Light-shielding plates 1901a, 190 only by the returning force of the beam spring
Move 1b.

Also in this basic type example, as in the conventional example,
Two light-shielding plates 19 in the state of blocking light (state A)
There is a gap between 01a and 1901b, and when a projector display is configured with this mechanical light shutter, for example, there is a problem that an image with low contrast results.

[Basic Example 2 Applied to the Embodiment] Next, FIG. 20 shows a mechanical optical shutter having a structure of controlling light by the inclination of a light shielding plate (moving electrode) with respect to the substrate (hereinafter referred to as flap type). FIG. That is, FIG.
20A is a plan configuration diagram, and FIG. 20B is a cross-sectional view of a non-transmission state in which the shutter is closed and a transmission state in which the shutter is open.

In FIG. 20, 2001a and 2001b
Is a light shielding plate, 2002a and 2002b are beam / wiring, 2
003a and 2003b are electrode pads, 2004a and 20
04b is an insulating film, 2005a and 2005b are fixed electrodes,
Reference numeral 2007 is a substrate, 2009 is an opening of the substrate, and 2011 is a power source.

As shown in FIG. 20B, the fixed electrode 200
5a and 2005b as the ground potential, and the light shielding plate 2001
a, when no voltage is applied to 2001b (off),
The electrostatic attraction does not work between the light blocking plates 2001a and 2001b and the fixed electrodes 2005a and 2005b on the side walls of the opening 2009, and the light blocking plates 2001a and 2001b are not connected to the substrate 20.
The optical shutter is not tilted with respect to 05, and the mechanical optical shutter is closed and in a non-transmissive state (state A).

In addition, the electrode pads 2003a and 2003
b, that is, when a voltage is applied (on) to the light shielding plates 2001a and 2001b, the light shielding plates 2001a and 2001b and the fixed electrodes 2005a and 200 on the side walls of the opening 2009 are formed.
Electrostatic attraction works between the light shielding plates 101a and 10b.
1b is moved to a position inclined with respect to the substrate 105, and the mechanical optical shutter is in the open state (state B). Further, when returning from the state B (transmissive state) to the state A (non-transmissive state), the electrode pads 2003a,
The voltage applied to the 2003b is set to the ground potential (off), and the light shield plate 2001a,
2001b is moved to a non-tilted position.

Also in this basic type example, as in the conventional example,
Two light-shielding plates 20 in a state of blocking light (state A)
There is a gap between 01a and 2001b, and there is a problem that an image with low contrast is obtained when a projector display is configured with this mechanical optical shutter.

[Embodiment 1] FIG. 1A is a plan view of a mechanical optical shutter according to Embodiment 1 of the present invention.
(B) is a sectional view. The mechanical optical shutter of this embodiment is an embodiment in which the invention according to claim 1 or 8 is applied to a mechanical optical shutter provided with a flap type light shielding plate (moving electrode).

In FIG. 1A, 101a and 101b
Is a flap type shading plate which is a moving electrode, 102a, 10
2b is a beam / wiring, 103a and 103b are electrode pads, and in FIG. 1 (b), 105 is a substrate, 10
7 is a power source, and 109 is an opening of the substrate.

Next, the operation of the mechanical optical shutter of this embodiment will be described. As shown in FIG. 1B, when the substrate 105 is set to the ground potential and no voltage is applied to the light shielding plates 101a and 101b (off), the light shielding plates 101a and 101b.
The electrostatic attraction does not work between the substrate and the side wall of the opening 109 of the substrate, and the light shielding plates 101a and 101b are parallel to the substrate 105 shown in FIG. 1B, and the mechanical optical shutter is closed. It becomes a non-transparent state.

A voltage is applied to the electrode pads 103a and 103b, that is, the light shielding plates 101a and 101b (on).
Occasionally, the light blocking plates 101a and 101b and the substrate opening 10
An electrostatic attractive force acts between the side wall of 9 and the light shielding plate 101a,
101b moves to a position inclined with respect to the substrate 105, and the mechanical optical shutter is in a transmissive state in which it is open.

The mechanical light shutter of this embodiment is characterized in that one of the two light blocking plates 101a and 101b has a step at the tip thereof and the other light blocking plate 101b has a step.
That is, the tip of 01a and the portion 110 overlap. Since the tips of both 101a and 101b are not in contact with each other, the movement can be performed smoothly, and even when the mechanical optical shutter is in the non-transmissive state in which it is closed,
Since there is no gap with respect to the incident light, the incident light can be completely blocked without leaking and transmitting as in the conventional example and the above basic type example. For example, a projector display is configured using the mechanical light shutter. Even in this case, an image with high contrast can be obtained.

[Embodiment 2] Next, FIG. 2A is a plan configuration view of a mechanical optical shutter according to Embodiment 2 of the present invention, and FIG. 2B is a sectional view. The mechanical light shutter of this embodiment is an embodiment in which the invention according to claim 1 or 8 is applied to a mechanical light shutter provided with a parallel movement type light shielding plate (moving electrode).

In FIG. 2, 201a and 201b are light shielding plates, 202a and 202b are beam / wirings, and 203a and 2b.
Reference numeral 03b is a comb-teeth fixed electrode, 203a 'and 203b' are comb-teeth moving electrodes, 204a and 204b are anchors, 205 is a substrate, 207 is a power supply, and 209 is an opening of the substrate.

When a voltage is not applied between the comb-teeth electrodes, as shown in FIG.
When a and 201b come close to each other, the mechanical light shutter is in a closed non-transmissive state, and the incident light is not transmitted. When a voltage is applied between the comb-teeth electrodes, an electrostatic attractive force acts between the comb-teeth electrodes to move the two light shield plates 201a and 201b toward the comb-teeth fixed electrodes 203a and 203b, respectively. The mechanical light shutter is in an open transmission state, and the incident light is transmitted therethrough. When returning from the transmissive state to the non-transmissive state, the voltage applied to the comb-teeth fixed electrodes 203a and 203b is set to the ground potential, and the light shielding plates 201a and 201b are moved only by the returning force of the beam spring.

The mechanical light shutter of this embodiment is characterized in that one of the two light blocking plates 201a and 201b has a step at the tip thereof and the other light blocking plate 201b has a step.
That is, it overlaps with the tip of 01a. Therefore, even when the mechanical light shutter is in the non-transmissive state in which it is closed, there is no gap for the incident light, so that the incident light is completely blocked without leaking and transmitting unlike the conventional example and the basic type example. It is possible to obtain a high-contrast image even when a projector display is configured using the mechanical optical shutter.

Next, referring to the explanatory view of FIG. 3, the first embodiment
A manufacturing process for making the structure of the mechanical optical shutter of the second embodiment will be described. Incidentally, FIG. 3 shows the first embodiment.
2 is a schematic view showing a manufacturing process of the mechanical optical shutter of FIG.

First, as shown in FIG. 3A, an oxide film (SiO ₂ ) 302, beam-cum-wirings 102a, 102b, Cr, made of polysilicon, are formed on a single crystal silicon substrate 105 by ordinary film formation, photolithography, and etching. First light shielding plates 101a made of Al or the like are formed. Also,
Si so as to straddle the first light shielding plate 101a and the oxide film 302.
A sacrificial layer 301 of O ₂ is formed. This sacrificial layer 301
Is for forming a step on the tip of the second light shielding plate 101b.

Next, as shown in FIG. 3B, the sacrificial layer 30
1 and the oxide film 302 so as to straddle the second light shielding plate 1
01b is formed. At this time, a step is formed at the tip of the second light shielding plate 101b, that is, the overlapping portion 110 of the two light shielding plates 101a and 101b.

Next, as shown in FIG. 3C, an opening 109 is provided by anisotropic etching from the back surface of the single crystal silicon substrate 105. At this time, since the etchant for anisotropic etching does not attack the oxide film 302, the beam / wirings 102a and 102b made of polysilicon are protected.

Further, as shown in FIG. 3D, the light shielding plate 10
Oxide film 302 and sacrificial layer 3 in the underlying portions of 1a and 101b
The SiO ₂ of 01 is removed by dilute hydrofluoric acid or the like. Since dilute hydrofluoric acid does not attack polysilicon, Cr, etc., these remain floating above the opening 109.

Although the mechanical optical shutter of the first embodiment is manufactured by the above method, the mechanical optical shutter of the second embodiment is also manufactured by the same manufacturing process.

Furthermore, regarding the mechanical optical shutters of the first and second embodiments, the mechanical light shutters shown in FIGS.
The same effect can be obtained not only by the structure of the four light-shielding plates but also by using four light-shielding plates as shown in FIG. 4, for example. Further, such a structure can be manufactured by the same method as the manufacturing process described above.

FIG. 4 shows a modification of the mechanical optical shutter of the first embodiment, which is composed of four light shielding plates 401a to 401d. In the figure, 402a to 402d are beam / wiring lines and 403a to 403d are. It is an electrode pad.

[Third Embodiment] FIG. 5A is a plan view of a mechanical optical shutter according to a third embodiment of the present invention.
(B) is a cross-sectional configuration diagram. The mechanical light shutter of this embodiment is an embodiment in which the invention according to claim 2, 4, 8 or 9 is applied to a mechanical light shutter provided with a flap type light shielding plate (moving electrode).

In FIG. 5A, 501a and 501b
Is a flap type shading plate which is a moving electrode, 502a, 50
Reference numeral 2b is a beam / wiring, 503a and 503b are electrode pads, and 504a and 504b in FIG. 5B.
Is an insulating film, 505a and 505b are fixed electrodes, 507 is a substrate, 509 is an opening of the substrate, and 511 to 514 are power supplies.

The mechanical optical shutter of the conventional example requires a large number of fixed electrodes in order to enable moving image display at video rate, and in order to obtain a high resolution display, the structure is complicated and high density arrangement is required. I had a problem with. Also in the above basic type example, when the transmission state is changed to the non-transmission state, the light shielding plate is moved only by the returning force of the spring of the beam, so that it takes time for the state transition, that is, the response speed is There is a problem that it is slow, and it is impossible to display video in video rate.

The mechanical optical shutter of the present embodiment has a simple structure and has a short response time, that is, a response time, in order to solve the above problem. That is, for the mechanical optical shutter having the same structure as the basic type example 2,
As the voltage is applied not only to the moving electrode but also to the fixed electrode on the side wall of the opening, the light-shielding plate is moved by the return force of the beam spring and the electrostatic attractive force during the transition from the transmissive state to the non-transmissive state. Is performed at high speed. Further, in the present embodiment, different power supply voltages are applied to the two light shielding plates, and electrostatic attraction is exerted between the light shielding plates even in the non-transmissive state to suppress light leakage due to the gap between the light shielding plates. .

Next, the operation of the mechanical optical shutter of this embodiment will be described with reference to FIGS. 6 and 7. Here, FIG. 6 is an explanatory view of the mechanical optical shutter, and FIG.
6B is a cross-sectional view of the transparent state with the shutter open, and FIG. 6B is a cross-sectional view of the non-transparent state with the shutter closed. Further, FIG. 7 shows power supplies 511 to 514 (voltages V1 to V1) for opening and closing the shutter.
It is a time chart of 4).

First, at time A in FIG. 7, the voltage V1 of the power source 511 and the voltage V4 of the power source 514 are turned off, and the voltage V2 of the power source 512 and the voltage V3 of the power source 513 are turned on. At this time, the mechanical optical shutter is shown in FIG.
, The fixed electrode 505a and the moving electrode 501a,
Also, there is a potential difference between the fixed electrode 505b and the moving electrode 501b, and there is no potential difference between the moving electrodes 501a and 501b. Therefore, the moving electrodes 501a, 50
The electrostatic attraction does not work between the 1b and the moving electrodes 501a,
501b is attracted to the fixed electrodes 505a and 505b by electrostatic attractive forces F2 and F3, respectively, and the mechanical optical shutter is in a transmissive state.

Next, at time B in FIG. 7, the voltages V3 and V4 are
Is an off voltage, and the voltages V1 and V2 are on voltages. At this time, as shown in FIG. 6B, the mechanical optical shutter has no potential difference between the fixed electrode 505a and the moving electrode 501a and between the fixed electrode 505b and the moving electrode 501b, and the moving electrodes 501a and 501b are not in contact with each other. There is a potential difference between them. Therefore, the electrostatic attractive force F4 acts only between the moving electrodes 501a and 501b, and the mechanical optical shutter is in a closed non-transmissive state.

Two effects are brought about by such an operation. That is, in the basic example 2, the electrostatic attraction does not work between the two light shields (moving electrodes), and the light shield is moved only by the returning force of the beam when transitioning from the transmission state to the non-transmission state. Although the light-shielding plate moved in a longer time than when the state transits to the transmissive state, in the present embodiment, not only the beam returning force but also the light-shielding plates 501a and 501b when transiting from the transmissive state to the non-transmissive state. Since electrostatic attraction works between them, the moving speed of the light shielding plates 501a and 501b becomes faster. In addition, even when the non-transmissive state is reached, the light blocking plate 501
Since electrostatic attraction works between a and 501b, the gap between the two light shielding plates 501a and 501b is closed, and the leak light in the non-transmissive state can be eliminated.

A power supply 51 for opening and closing the shutter
Switching of the on / off voltages of the voltages V1 to V4 in 1 to 514 is not limited to the one in the timing chart shown in FIG. 7, but the same operation and effect can be obtained even when all the on / off voltages in the figure are reversed. Obtainable.

[Embodiment 4] Next, FIG. 8 (a) is a plan configuration view of a mechanical optical shutter according to Embodiment 4 of the present invention, and FIG. 8 (b) is a sectional view of a transparent state with the shutter open. ，
FIG. 8C is a sectional view of the non-transmissive state in which the shutter is closed. The mechanical light shutter of this embodiment is an embodiment in which the invention according to claim 2, 8 or 9 is applied to a mechanical light shutter provided with a parallel movement type light shielding plate (moving electrode).

In FIG. 8A, reference numerals 801a and 801b are used.
Is a light shielding plate, 802a and 802b are beam / wiring, 803
a and 803b are comb-teeth fixed electrodes, and 803a 'and 803b'.
Is a comb tooth moving electrode, 804a and 804b are anchors, 80
Reference numeral 5 is a substrate, 809 is an opening of the substrate, and 811 to 814 are power sources.

In the mechanical optical shutter of this embodiment, the voltage V1 of the power source 811 applied to the light blocking plate 801a (comb tooth moving electrode 803a '), the voltage V2 of the power source 812 applied to the fixed comb tooth electrode 803a, and the comb tooth Fixed electrode 803
voltage V3 of the power source 813 applied to b, the light shielding plate 801b
The voltage V4 of the power source 814 applied to the (comb-tooth moving electrode 803b ') is an on / off voltage at the timing shown in FIG.

First, at time A in FIG. 7, voltages V1 and V
4 is an off voltage, and voltages V2 and V3 are on voltages.
At this time, the mechanical optical shutter has a comb-tooth fixed electrode 803a and a comb-tooth moving electrode 803a ', as shown in FIG.
And the comb-teeth fixed electrode 803b and the comb-teeth moving electrode 803b '.
There is a potential difference between the light shielding plates 801a and 801
There is no potential difference between b. Therefore, the light blocking plate 801
a, 801b (comb-tooth moving electrodes 803a ', 803b')
Are attracted to the comb-teeth fixed electrodes 803a and 803b, respectively, by the electrostatic attractive force F5, and the mechanical optical shutter is in a transmissive state in which it is open.

Next, at time B in FIG. 7, voltages V3 and V4
Is an off voltage, and the voltages V1 and V2 are on voltages. At this time, the mechanical optical shutter has a comb-tooth fixed electrode 803a and a comb-tooth moving electrode 803a ', as shown in FIG.
And the comb-teeth fixed electrode 803b and the comb-teeth moving electrode 803b '.
There is no potential difference between the light shielding plates 801a and 801b.
There is a potential difference between the (comb-teeth moving electrodes 803a ', 803b'). Therefore, the electrostatic attractive force F6 acts only between the light shielding plates 801a and 801b, and the mechanical optical shutter is in a closed non-transmissive state.

As a result, the same effect as that of the third embodiment can be obtained. That is, in this embodiment, not only the returning force of the beam but also the light blocking plate 801 when the transition from the transmission state to the non-transmission state is performed.
Since electrostatic attraction works between a and 801b, basic model example 1
The moving speed of the light blocking plates 801a and 801b is faster than that of the above. Further, even when the non-transparent state is set, the light blocking plate 801
Since electrostatic attraction works between a and 801b, the gap between the two light shielding plates 801a and 801b is closed, and leak light in the non-transmissive state can be eliminated.

A power supply 81 for opening and closing the shutter
Switching of the on / off voltages of the voltages V1 to V4 in 1 to 814 is not limited to the one in the timing chart shown in FIG. 7, but the same operation and effect can be obtained even when all the on / off voltages in the figure are reversed. Obtainable.

Furthermore, regarding the mechanical optical shutters of the third and fourth embodiments, the mechanical light shutters shown in FIGS.
The same effect can be obtained not only by the structure of the four light-shielding plates but also by the structure of four light-shielding plates as shown in FIG. 9, for example.

FIG. 9 shows a modification of the mechanical optical shutter of the third embodiment, which is constituted by four light shielding plates 901a to 901d. In the figure, 902a to 902d are beam / wiring, and 903a to 903d are. It is an electrode pad

The power supply voltages V1 to V4 are applied as follows. That is, the light blocking plates (moving electrodes) 901a and 90
The voltage V1 is applied to 1d, the voltage V4 is applied to the light shielding plates (moving electrodes) 901b and 901c, and the voltage V2 is applied to the fixed electrode (not shown) facing the light shielding plates 901a and 901d to which the voltage V1 is applied. The voltage V3 is applied to the fixed electrodes (not shown) facing the light shielding plates 901b and 901c to which the voltage V4 is applied.

Further, the mechanical optical shutters of the third and fourth embodiments are not limited to those using electrostatic attraction, but may be constructed using magnetic force. That is,
For example, as a modification to the third embodiment, a thin film coil formed by photolithography, for example, is provided on the light shielding plate and the opening (corresponding to the location of the fixed electrode). A current is applied to this at the same timing as in the third embodiment, and the same operation is performed using the attractive force and repulsive force of the magnetic force.

[Fifth Embodiment] Next, a mechanical optical shutter according to a fifth embodiment of the present invention will be described. In the mechanical optical shutter having a structure having an overlapping portion with respect to the flap type light shielding plates 101a and 101b described in the first embodiment, a slight timing difference between the opening and closing of the light shielding plates 101a and 101b causes a shift in FIG. ), The top and bottom of the shading plates 101a and 101b are turned upside down, or, as shown in FIG. 10B, when the transmission state changes to the non-transmission state, the tips of the shading plates 101a and 101b are There is a problem that they do not operate normally because they get caught in each other.

The mechanical optical shutter of this embodiment provides a mechanical spatial light modulator that prevents malfunctions due to such a timing shift, has little leakage light due to the gap between the light shielding plates, and has high operation reliability. And this
The present invention realizes a projector display with higher contrast and higher reliability.

FIG. 11A is a plan view of a mechanical optical shutter according to the fifth embodiment of the present invention, and FIG. 11B is a sectional view. Incidentally, the mechanical optical shutter of this embodiment is
It is an embodiment in which the invention according to claim 5, 8 or 9 is applied to a mechanical optical shutter provided with a flap type light shielding plate (moving electrode).

In FIG. 11 (a), 1101a, 111
01b is a flap type light shielding plate which is a moving electrode, 1102
a and 1102b are beams and wirings, 1103a and 1103
b is an electrode pad, and in FIG.
105a and 1105b are fixed electrodes, 1107 is a power source, 1
109 is an opening of the substrate.

Here, when the voltage is applied between the fixed electrode and the movable electrode (light-shielding plate), the light-shielding plate having an overlapping portion on the side where the light-shielding plate moves by electrostatic attraction, that is, the lower side in the figure, is The light blocking plate 1101a and the opposite is the second light blocking plate 1101b. The spring constant K1 of the beam 1102a connected to the first light shield 1101a is smaller than the spring constant K2 of the beam 1102b connected to the second light shield 1101b.

Next, the operation of the mechanical optical shutter of this embodiment will be described with reference to FIG. Here, FIG.
12A is a time chart of the voltage applied to the power source 1107, and FIGS. 12B to 12E are cross-sectional views for explaining the transition of the shutter from the non-transmissive state → the transmissive state → the non-transmissive state.

Light-shielding plates 1101a and 110 which are movable electrodes
1b and the fixed electrodes 1105a and 1105b, when the voltage V is applied, the second light blocking plate 1101b and the fixed electrodes 1105
The electrostatic attractive force that acts between the first light-shielding plate 1101a and the fixed electrode 1105a has the same value. However, the spring constant K1 of the beam 1102a connected to the first shading plate 1101a is the second shading plate 11
Spring constant K of beam 1102b connected to 01b
Less than 2.

On the other hand, in order to put the mechanical optical shutter in a transmissive state, a voltage V is applied between the light shielding plates 1101a, 1101b and the fixed electrodes 1105a, 1105b. As shown in FIG. Has a certain rise time. In addition, the light blocking plates 1101a and 1101
Since the inclination angle of b is a point where the electrostatic attraction and the spring force of the beam are balanced, at time A in FIG. 12A, the spring constant of the beam is small as shown in FIG. 12B. The first light blocking plate 1101a starts to move first. Next, at time B in FIG. 12A, the second light blocking plate 1101b starts to move, and finally, as shown in FIG.
As shown in (c), the shutter is opened and the transmission state is set.

Next, there is a certain fall time even when the applied voltage falls. In this case, contrary to the rise, at time C in FIG.
As shown in Fig. 2, the second shading plate 1 having a large beam spring constant
101b first overcomes the electrostatic attraction and starts moving. Next, at time D in FIG. 12A, the first light blocking plate 1101a starts to move, and finally, as shown in FIG.
As shown in (e), the shutter is in a non-transmissive state.

Summarizing the above operation, when the mechanical optical shutter is opened, the first light shield 110 which is closer to the fixed electrode in the overlapping portion of the light shield in the non-transmissive state.
The movement starts from 1a first, and when closing, the second light blocking plate 1101b farther from the fixed electrode starts to move first.
By performing such an operation, the order of the light shielding plates 1101a and 1101b, as shown in FIG.

In FIG. 11, the fixed electrodes 1105a, 11a
05b is set to the ground potential, and the moving electrodes 1101a and 1101
Although a voltage was applied to b, on the contrary, the moving electrode 110
1a and 1101b are grounded, and fixed electrodes 1105a and 11
Even if a voltage is applied to 05b, the same operation / effect can be obtained.

Further, the mechanical light shutter of the fifth embodiment is not limited to the structure of the two light-shielding plates as shown in FIG. The effect is obtained. That is, for example, in the configuration of the four light shielding plates 401a to 401d shown in FIG. 4, the farther the overlapping portion is from the fixed electrode, the larger the spring constant of the beams 402a to 402d connected to the light shielding plate is, Similar operations and effects can be obtained.

Further, the mechanical optical shutter of the fifth embodiment is not limited to the one using the electrostatic attractive force, but may be constructed using the magnetic force. That is, a thin film coil formed by, for example, photolithography is provided on the light shielding plate and the opening (corresponding to the location of the fixed electrode). A current is applied to this at the same timing as in Example 5, and the same operation is performed using the attractive force and repulsive force of the magnetic force.

[Sixth Embodiment] Next, FIG. 13A is a plan view of a mechanical optical shutter according to a sixth embodiment of the present invention, and FIG. 13B is a sectional view thereof. The mechanical optical shutter of this embodiment is a flap type light blocking plate (moving electrode).
A mechanical optical shutter comprising:
It is an example to which the invention according to is applied.

In FIG. 13A, 1301a, 131
01b is a flap type light shielding plate which is a moving electrode, 1302
a and 1302b are beams and wirings, 1303a and 1303
b is an electrode pad, and in FIG.
304a and 1304b are insulating films, 1305a and 1305
Reference numeral b is a fixed electrode, 1307 and 1308 are power supplies, and 1309 is an opening of the substrate.

Here, when the voltage is applied between the fixed electrode and the movable electrode (light-shielding plate), the light-shielding plate having an overlapping portion on the side where the light-shielding plate moves due to electrostatic attraction, that is, on the lower side in the figure, is It is a light blocking plate 1301a and the opposite is a second light blocking plate 1301b. In addition, the light blocking plates 1301a, 1301
Power supplies 1307 and 1308 having different on / off voltage switching timings are applied to 1b, respectively.
The spring constants of 2a and 1302b are equal.

Next, the operation of the mechanical optical shutter of this embodiment will be described with reference to FIG. Here, FIG.
12A and 12B are time charts of the applied voltages V1 and V2 of the power supplies 1307 and 1308, respectively. By applying such voltages, the shutter non-operation as shown in FIGS. The transition from the transparent state to the transparent state to the non-transparent state is performed.

First, at time A in FIG. 14, both voltages V
1, V2 is an off voltage, and two light shields 1301
a and 1301b are separated from the fixed electrodes 1305a and 1305b, and the mechanical optical shutter is in a closed non-transmissive state. Next, at time B when the voltage V1 first becomes the on-voltage, the first light-shielding plate 1301a starts to move first, so that the state becomes as shown in FIG. 12B, and at time C, the voltage V2 also becomes the on-voltage. , Second shading plate 130
1b also moves, and as shown in FIG. 12C, both of the light shielding plates 1301a and 1301b are fixed electrodes 1305 respectively.
The mechanical optical shutter is in an open and transmissive state.

Next, at time D in FIG. 14, the voltage V2 becomes an off voltage first, and as shown in FIG. 12D, only the second light shielding plate 1301b is separated from the fixed electrode 1305b by the returning force of the spring of the beam 1102b. . Next, at time E, the voltage V1 also becomes an off voltage, and the first light shield 130
1a is also separated from the fixed electrode 1305a, and finally FIG.
As shown in (e), the mechanical optical shutter is in a closed non-transmissive state.

Summarizing the above operation, when the mechanical optical shutter is opened, the first light shield 130 which is closer to the fixed electrode in the overlapping portion of the light shield in the non-transmissive state.
The movement starts from 1a first, and when closing, the second light blocking plate 1301b farther from the fixed electrode starts moving first.
By performing such an operation, it is possible to prevent the order of the light shielding plates 1301a and 1301b from being interchanged with each other and from being caught by each other as shown in FIG.

In FIG. 13, the fixed electrodes 1305a, 1305a, 13
05b is set to the ground potential, and the moving electrodes 1301a and 1301
Although the voltages V1 and V2 are applied to b, respectively, on the contrary, the same operation and effect can be obtained by grounding the movable electrodes 1301a and 1301b and applying the voltages V1 and V2 to the fixed electrodes 1305a and 1305b, respectively. be able to.

Further, the mechanical light shutter of the sixth embodiment is not limited to the structure of the two light shielding plates as shown in FIG. 13, and the same can be applied to the case where it is composed of four light shielding plates. The effect is obtained. That is, for example, in the configuration of the four light-shielding plates 401a to 401d shown in FIG. 4, as the overlapping portion is farther from the fixed electrode, the timing of switching the voltage applied to the light-shielding plate from the on voltage to the off voltage is set. If you speed it up, you can obtain the same behavior and effects.

Further, the mechanical optical shutter of the sixth embodiment is not limited to the one using the electrostatic attractive force, but may be constructed using the magnetic force. That is, a thin film coil formed by, for example, photolithography is provided on the light shielding plate and the opening (corresponding to the location of the fixed electrode). A current is applied to this at the same timing as in Example 6, and the same operation is performed using the attractive force and repulsive force of the magnetic force.

[Embodiment 7] Next, FIG. 15A is a plan view of a mechanical optical shutter according to Embodiment 7 of the present invention, and FIG. 15B is a sectional configuration diagram. The mechanical light shutter of this embodiment is an embodiment in which the invention according to claim 7, 8 or 9 is applied to a mechanical light shutter provided with a flap type light shielding plate (moving electrode).

In FIG. 15A, 1501a, 151
01b is a flap type light-shielding plate as a moving electrode, 1502
a and 1502b are beams and wirings, 1503a and 1503
b is an electrode pad, and in FIG.
504a and 1504b are insulating films, 1505a and 1505
Reference numeral b is a fixed electrode, 1511 to 1514 are power supplies, and 1509 is an opening of the substrate.

Here, when the voltage is applied between the fixed electrode and the movable electrode (light-shielding plate), the light-shielding plate having an overlapping portion on the side where the light-shielding plate moves by electrostatic attraction, that is, on the lower side in the figure, is the first The light blocking plate 1501a and the opposite is the second light blocking plate 1501b. Further, independent power sources 1511-1514 with different on / off voltage switching timings are applied to the first light shield plate 1501a, the first fixed electrode 1505a, the second light shield plate 1501b, and the second fixed electrode 1505b, respectively.

Next, the operation of the mechanical optical shutter of this embodiment will be described with reference to FIG. Here, in FIG.
12A to 12B are time charts of applied voltages V1 to V4 of the power supplies 1511-1514, respectively. By applying such a voltage, the shutter non-operation as shown in FIGS. The transition from the transparent state to the transparent state to the non-transparent state is performed.

First, at time A in FIG. 16, the power supply 1511
The voltage V1 of the power supply 1512 and the voltage V2 of the power supply 1512 as the off voltage, and the voltage V3 of the power supply 1513 and the voltage V of the power supply 1514
4 is an on voltage. At this time, the mechanical optical shutter
As shown in FIG. 15B, the first fixed electrode 1505a, the first moving electrode 1501a, and the second fixed electrode 1505.
The electrostatic attraction does not work between b and the second moving electrode 1501b. In addition, the first moving electrode 1501a and the second moving electrode 15
Since there is a potential difference between 01b, an electrostatic attractive force acts between the two, and they are attracted to each other, and the mechanical optical shutter is in a closed non-transmissive state.

Next, at time B in FIG. 16, the voltage V
Only 1 switches from off voltage to on voltage. Accordingly, the first moving electrode 1501a and the second moving electrode 1501
The electrostatic attraction does not work between b, and the electrostatic attraction works between the first fixed electrode 1505a and the first moving electrode 1501a. In other words, as shown in FIG. 12B, only the first moving electrode (first light shielding plate) 1501a has the first fixed electrode 1505.
attracted to a.

Next, at time C in FIG. 16, the voltage V
3 switches from the on voltage to the off voltage. As a result, the second fixed electrode 1505b and the second movable electrode 1501b
Electrostatic attraction works between the second moving electrode (second light shield plate) 1
501b is attracted to the second fixed electrode 1505b, and as shown in FIG.
1b is attracted to the fixed electrodes 1505a and 1505b, respectively, and the mechanical optical shutter is in an open transmissive state.

Next, at time D in FIG. 16, the voltage V
3 switches from off voltage to on voltage. As a result, the second fixed electrode 1505b and the second movable electrode 1501b
The electrostatic attractive force between them does not work, and as shown in FIG. 12D, only the second moving electrode (second light shielding plate) 1501b is in the second position.
It moves away from the fixed electrode 1505b.

Further, at time E in FIG. 16, the voltage V
Since 1 also switches from the off voltage to the on voltage, the electrostatic attractive force does not work between the first fixed electrode 1505a and the first moving electrode 1501a, and the electrostatic force between the first moving electrode 1501a and the second moving electrode 1501b is reduced. Gravity works. Therefore, as shown in FIG. 12 (e), the first moving electrode (first light shielding plate) 1301a is also separated from the first fixed electrode 1305a, and finally the return force of the spring and the electrostatic attractive force of the second moving electrode cause the concerned movement. The mechanical optical shutter is in a closed non-transmissive state.

Summarizing the above operation, when the mechanical optical shutter is opened, the first light shield plate 150 closer to the fixed electrode is located in the overlapping portion of the light shield plate in the non-transmissive state.
Start moving from 1a first. Further, when closing, the second light blocking plate 1501b farther from the fixed electrode starts to move first, and the first light blocking plate 1501a closer to the fixed electrode further has a spring return force and an electrostatic attractive force between the second light blocking plate 1501b. To move to the non-transparent state.

By carrying out such an operation, the order of the light shielding plates 1501a and 1501b as shown in FIG. In addition, the light blocking plates 1501a and 1501
Since b is attracted to the electrostatic attraction and moves to the position of the non-transmissive state, the moving speed of the light shielding plate is made faster than the state transition only by the return force of the spring as in the conventional example or the basic example 2. be able to.

A power supply 15 for opening and closing the shutter
On / off of the voltages V1 to V4 at 11 to 1514
The voltage switching is not limited to the timing chart shown in FIG. 16, but the same operation and effect can be obtained even when all the on / off voltages in the figure are reversed.

Further, the mechanical optical shutter of the seventh embodiment is not limited to the one using the electrostatic attractive force, but may be constructed using the magnetic force. That is, a thin film coil formed by, for example, photolithography is provided on the light shielding plate and the opening (corresponding to the location of the fixed electrode). A current is applied to this at the same timing as in Example 7, and the same operation is performed using the attractive force and repulsive force of the magnetic force.

Further, the mechanical light shutter of the seventh embodiment is not limited to the structure of the two light shielding plates as shown in FIG. 15, but is constituted by four light shielding plates as shown in FIG. 17, for example. The same effect can be obtained in the case.

FIG. 17 shows a modification of the mechanical optical shutter of the seventh embodiment, in which four light shielding plates 1701a to 1701a to 1701a are provided.
1d, 1702a to 1702 in the figure.
2d is a beam and wiring, and 1703a to 1703d are electrode pads.

The power supply voltages V1 to V6 are applied as follows. That is, a voltage V1 is applied to the shading plate 1701a, a voltage V3 is applied to the shading plates 1701b and 1701c, and a voltage V5 is applied to the shading plate 1701d, respectively, and a fixed electrode facing the shading plate 1701a to which the voltage V1 is applied (see FIG. The light shield plate 1 to which the voltage V2 and the voltage V3 are applied (not shown)
Fixed electrodes (not shown) facing 701b and 1701c
1701 to which a voltage V4 and a voltage V5 are applied
A voltage V6 is applied to each fixed electrode (not shown) facing d.

FIG. 18 shows a timing chart of the voltages V1 to V6. In addition, switching of the on / off voltage is as shown in FIG.
Similar operations and effects can be obtained not only in the timing chart shown in FIG. 8 but also when all the on / off voltages in the figure are reversed.

[0126]

As described above, according to the first aspect of the present invention,
According to the mechanical light shutter described, since the plurality of light shielding plates are provided with the portions that are substantially perpendicular to the light transmission direction and overlap each other, even in the non-transmissive state in which the mechanical light shutter is closed. , It is possible to provide a spatial light modulator that has no gap for incident light, does not leak and transmit incident light, and does not leak light when light is blocked, and realizes a projector display with higher contrast. be able to.

According to the mechanical light shutter of the second aspect, the light-shielding plate movement control mechanism exerts a force between the light-shielding plate and the fixed portion on the substrate during transmission, and exerts an attractive force between the light-shielding plates during non-transmission. Therefore, when transitioning from the transmissive state to the non-transmissive state, an attractive force acts between the light shielding plates, so that the moving speed of the light shielding plate increases, and because an attractive force acts between the light shielding plates when not transmitting, By closing the gap between the light-shielding plates, it is possible to eliminate the leaked light in the non-transmissive state, and it is possible to provide a mechanical spatial light modulator with a simple structure that has a fast response speed and little leaked light. It is possible to display, and it is possible to realize a projector display with high resolution and high contrast.

Further, according to the mechanical light shutter of the third aspect, since the plurality of light shielding plates are provided with the portions which are substantially perpendicular to the light transmission direction and overlap each other, the non-transmission state is achieved. Leakage light can be eliminated, and a projector display with higher contrast can be realized.

According to the mechanical light shutter of the fourth aspect, the light-shielding plate movement control mechanism exerts a force between the light-shielding plate and the fixed portion of the side wall of the substrate opening during transmission. It is possible to provide a mechanical spatial light modulator having a simple structure, a high response speed, and a small amount of leaked light. As a result, a projector display capable of displaying moving images and having high resolution and high contrast can be realized.

Further, according to the mechanical light shutter of the fifth aspect, when the plurality of light shielding plates are flap-shaped light shielding plates fixed to the substrate via the torsion bar, the light shielding plate movement control mechanism allows When a light blocking plate is tilted with respect to the substrate by a force acting between the light blocking plate and a fixed portion of the side wall of the substrate opening, transmission / non-transmission of light is controlled, a plurality of overlapping light blocking plates are twisted. Since the spring constants of the bars are made different from each other, malfunctions such as the tips of the shading plates being caught by each other at the time of transition from the transmissive state to the non-transmissive state, and of the shading plates at the time of transition from the non-transmissive state to the transmissive state are performed. It is possible to provide a mechanical spatial light modulator that can prevent the order from being changed, has no leak light, and has high operation reliability, and has a high contrast and a highly reliable project. It is possible to realize a display.

According to the mechanical light shutter of the sixth aspect, when the plurality of light shielding plates are flap-shaped light shielding plates fixed to the substrate via the torsion bar, the light shielding plate movement control mechanism is When a light blocking plate is tilted with respect to the substrate by a force acting between the light blocking plate and a fixed portion of the side wall of the substrate opening to control the transmission / non-transmission of light, Since the timing at which the force acting on the shading plate and the fixed portion is generated and the timing at which the force disappears are independent between the shading plates, a malfunction in which the tips of the shading plates are caught on each other during the transition from the transmissive state to the non-transmissive state Also, it is possible to provide a mechanical spatial light modulator that can prevent the order of the light shields from changing from the non-transmissive state to the transmissive state, have no leakage light, and have high operation reliability. , It is possible to realize a high contrast and reliable projector display.

According to the mechanical optical shutter of the seventh aspect, the light-shielding plate movement control mechanism exerts an attractive force on the light-shielding plates during non-transmission. ， Because the attractive force acts between the shading plates, the moving speed of the shading plate becomes faster, and when non-transmissive,
Since the attractive force acts between the light shielding plates, the gap between the light shielding plates is closed, and the light leakage in the non-transmissive state can be eliminated, the response speed is fast, the operation reliability is high, and the mechanical leakage is small. It is possible to provide a special spatial light modulator, and as a result, it is possible to realize a projector display capable of displaying moving images, having high resolution, high reliability, and high contrast.

Further, according to the mechanical light shutter of the eighth aspect, in the light shield movement control mechanism, the electrostatic attraction between the light shield and the fixed portion or the potential difference between the light shields is used to generate light. Since the transmission / non-transmission is controlled, it is possible to provide a mechanical spatial light modulator with a simple structure that has a fast response speed and a small amount of leaked light. As a result, a moving image can be displayed and a high resolution contrast can be achieved. A high projector display can be realized.

Further, according to the mechanical light shutter of the ninth aspect, in the light shielding plate movement control mechanism, the transmission / non-transmission of the light is controlled by utilizing the magnetic force of the coil formed in the fixed portion. Therefore, it is possible to provide a mechanical spatial light modulator having a simple structure, a fast response speed, and a small amount of leaked light. As a result, a moving image can be displayed, and a projector display with high resolution and higher contrast can be realized.

[Brief description of drawings]

1A is a plan view of a mechanical optical shutter according to a first embodiment of the present invention, and FIG. 1B is a sectional view thereof.

2A is a plan configuration diagram of a mechanical optical shutter according to a second embodiment of the present invention, and FIG. 2B is a sectional view.

FIG. 3 is an explanatory diagram of a manufacturing process of the mechanical optical shutter of the first embodiment.

FIG. 4 is a plan configuration diagram of a mechanical optical shutter according to a modification of the first embodiment.

5A is a plan view of a mechanical optical shutter according to a third embodiment of the present invention, and FIG. 5B is a sectional configuration diagram.

6 is an explanatory view of a mechanical optical shutter, and FIG.
6A is a cross-sectional view of the transparent state with the shutter open, and FIG. 6B is a cross-sectional view of the non-transparent state with the shutter closed.

FIG. 7 is a time chart of the power supply voltage when opening and closing the mechanical optical shutter of the third embodiment.

8A is a plan configuration diagram of a mechanical optical shutter according to a fourth embodiment of the present invention, FIG. 8B is a cross-sectional view of a transparent state in which the shutter is open, and FIG. It is sectional drawing of the non-transmission state which closed the shutter.

FIG. 9 is a plan configuration diagram of a mechanical optical shutter according to a modification of the third embodiment.

FIG. 10 is an explanatory diagram of a problem of the mechanical optical shutter of the first embodiment.

11A is a plan view of a mechanical optical shutter according to a fifth embodiment of the present invention, and FIG. 11B is a sectional view thereof.

12A is a time chart of applied voltage of a power source, and FIGS. 12B to 12E are non-transmission states of shutters.
It is sectional drawing explaining the transition of a transparent state-> a non-transparent state.

13A is a plan view of a mechanical optical shutter according to a sixth embodiment of the present invention, and FIG. 13B is a sectional view thereof.

FIG. 14 is a time chart of the applied voltage of the power supply according to the sixth embodiment.

FIG. 15 (a) is a plan view of a mechanical optical shutter according to a seventh embodiment of the present invention, and FIG. 15 (b) is a cross-sectional configuration diagram.

16 is a time chart of the applied voltage of the power supply of Example 7. FIG.

FIG. 17 is a plan configuration diagram of a mechanical optical shutter according to a modification of the seventh embodiment.

FIG. 18 is a voltage timing chart of a modified example of the seventh embodiment.

19A and 19B are explanatory views of a parallel movement type mechanical optical shutter. FIG. 19A is a plan configuration view, FIG. 19B is a cross-sectional view in a non-transmissive state in which the shutter is closed, and FIG. FIG. 6 is a cross-sectional view of a transparent state in which a shutter is open.

20A and 20B are explanatory views of a flap-type mechanical optical shutter, FIG. 20A is a plan configuration diagram, and FIG. 20B is a cross-sectional view of a non-transmission state in which the shutter is closed and a transmission state in which the shutter is open. .

FIG. 21 is a plan view of a conventional mechanical optical shutter.

FIG. 22 is a partial (one cell) sectional view of a conventional mechanical optical shutter.

FIG. 23 is a time chart explaining the operation of a conventional mechanical optical shutter.

[Explanation of symbols]

101a, 101b, 501a, 501b Moving electrodes (flap type light shielding plate) 102a, 102b, 502a, 502b Beam / wiring 103a, 103b, 503a, 503b Electrode pad 105, 205, 507, 805 Substrate 107, 207, 511-514 , 811-814 Power source 109, 209, 509, 809 Substrate opening 201a, 201b, 801a, 801b Light-shielding plate 202a, 202b, 802a, 802b Beam / wiring 203a, 203b, 803a, 803b Comb-tooth fixed electrode 203a ', 203b ', 803a', 803b 'Comb-tooth moving electrodes 204a, 204b, 804a, 804b Anchor 301 Sacrificial layer 302 Oxide film 401a-401d, 901a-901d Light-shielding plate 402a-402d, 902a-902d Beam Wirings 403a to 403d, 903a to 903d Electrode pads 504a, 504b Insulating films 505a, 505b Fixed electrodes 1101a, 1101b, 1301a, 1301b Moving electrodes (light shielding plates) 1102a, 1102b, 1302a, 1302b Beams and wirings 1103a, 1103b, 1303a Electrode pads 1105a, 1105b, 1305a, 1305b Fixed electrodes 1107, 1307, 1308, 1511-1514
Power source 1109, 1309, 1509 Substrate opening 1304a, 1304b, 1504a, 1504b Insulating film 1501a, 1501b, 1701a to 1701d Moving electrode (light shielding plate) 1502a, 1502b, 1702a to 1702d Beam / wiring 1503a, 1503b, 1703a to 1703d Electrode Pads 1901a, 1901b, 2001a, 2001b Light-shielding plates 1902a, 1902b, 2002a, 2002b Beam / wiring 1903a, 1903b Comb-tooth fixed electrodes 1903a ', 1903b' Comb-tooth moving electrodes 1904a, 1904b Anchors 1905, 2007 Substrate 1907, 2011 Power supply 1909, 2009 substrate openings 2003a, 2003b electrode pads 2004a, 2004b insulating films 2005a, 2005b fixed electrodes very

Claims (9)

[Claims] 1. A mechanical optical shutter having a plurality of light-shielding plates on a substrate opening, and controlling the transmission / non-transmission of light passing through the substrate opening by moving the plurality of light-shielding plates. 2. The mechanical light shutter according to claim 1, wherein the light-shielding plate has overlapping portions on a surface substantially perpendicular to the light transmission direction. 2. A mechanical optical shutter having a plurality of light-shielding plates on a substrate opening and controlling the transmission / non-transmission of light passing through the substrate opening by moving the plurality of light-shielding plates. A mechanical light shutter comprising: a light-shielding plate movement control mechanism that sometimes exerts a force between the light-shielding plate and a fixed portion on the substrate, and exerts an attractive force between the light-shielding plates when the light is not transmitted. 3. The mechanical optical shutter according to claim 2, wherein the plurality of light shielding plates have portions that overlap each other with respect to a surface substantially perpendicular to the light transmission direction. 4. The mechanical device according to claim 2, wherein the light-shielding plate movement control mechanism exerts a force between the light-shielding plate and a fixed portion of a side wall of the substrate opening during the transmission. Optical shutter. 5. The plurality of light blocking plates are flap-shaped light blocking plates fixed to the substrate via a torsion bar, and the light blocking plate movement control mechanism includes side walls of the light blocking plate and the substrate opening. The light blocking plate is tilted with respect to the substrate by the force acting between the light blocking plate and the fixed portion, and the transmission / non-transmission of the light is controlled, and the spring constants of the torsion bars of the plurality of overlapping light blocking plates are different from each other. The mechanical optical shutter according to claim 3, wherein 6. The plurality of light blocking plates are flap-shaped light blocking plates fixed to the substrate via a torsion bar, and the light blocking plate movement control mechanism includes side walls of the light blocking plate and the substrate opening. The light blocking plate is tilted with respect to the substrate by a force acting between the light blocking plate and the fixed part to control transmission / non-transmission of the light. The mechanical optical shutter according to claim 3, wherein the timing at which the working force is generated and the timing at which the force disappears are independent between the light shielding plates. 7. The mechanical optical shutter according to claim 5, wherein the light shielding plate movement control mechanism exerts an attractive force on the light shielding plates when the light is not transmitted. 8. The light-shielding plate movement control mechanism controls transmission / non-transmission of the light by using electrostatic attraction between the light-shielding plate and the fixed portion or by a potential difference between the light-shielding plates. 7. The method according to claim 2, 3, 4, 5, 6 or 7.
Mechanical optical shutter described. 9. The light shielding plate movement control mechanism controls transmission / non-transmission of the light by utilizing a magnetic force of a coil formed in the fixed portion.
The mechanical optical shutter described in 5, 6, 7 or 8.