JPH09218220A - Probe unit - Google Patents

Probe unit

Info

Publication number
JPH09218220A
JPH09218220A JP8026936A JP2693696A JPH09218220A JP H09218220 A JPH09218220 A JP H09218220A JP 8026936 A JP8026936 A JP 8026936A JP 2693696 A JP2693696 A JP 2693696A JP H09218220 A JPH09218220 A JP H09218220A
Authority
JP
Japan
Prior art keywords
probe
mounting member
probes
mounting
alumite coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8026936A
Other languages
Japanese (ja)
Inventor
Katsuhiro Imazaki
勝弘 今▲崎▼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suncall Corp
Original Assignee
Suncall Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suncall Corp filed Critical Suncall Corp
Priority to JP8026936A priority Critical patent/JPH09218220A/en
Publication of JPH09218220A publication Critical patent/JPH09218220A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To prevent a shortcircuit of probes surely at low cost by using an alumite coating as an insulating material between the probes and a mounting memory. SOLUTION: A probe unit 1 is constituted of a plate-like mounting member 2 and a plurality of probes 3 generating and fixed to the mounting member 2. The mounting member 2 is formed of Al, having mounting holes 4 for mounting of the probes 3 penetrating at predetermined positions. The probe 3 consists of a pipe-shaped base body 6 and a contact element 7 which are both formed of Al. An alumite coating 9 is formed at a part of the mounting member 2 in touch with the probe 3, namely, all over an inner wall face of each mounting hole 4 by anodic oxidization or the like manner. The alumite coating 9 has superior insulating properties. Since the alumite coating 9 is interposed between the probe 3 and mounting hole 4, the probe 3 is electrically insulated from the mounting member 2, and the probes 3 are insulated from each other and prevented from being shortcircuited.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、プリント基板等に
取付けられた電子部品の導通検査等に用いるプローブユ
ニットに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe unit used for continuity inspection of electronic parts mounted on a printed circuit board or the like.

【0002】[0002]

【従来の技術】図2(a)(b)に示すように、プロー
ブユニット(21)は、板状の取付け部材(22)に、平行
配置した複数のプローブ(23)を貫通固定したもので、
プローブ(23)の先端部に設けられた接触子(27)をプ
リント基板等の被検査体に接触させ、各プローブ(23)
の上端に取付けたリード線(図示省略)に所定電圧を印
加して被検査体の導通検査を行なうものである。接触子
(27)の上端側は、(b)図に示すようにプローブ(2
3)の基体(26)の下端に設けられた収容部(25)にバ
ネ(28)を介して収納され、これにより接触子(27)は
プローブ(23)の軸方向に沿って弾性的に変位可能とさ
れている。
2. Description of the Related Art As shown in FIGS. 2 (a) and 2 (b), a probe unit (21) comprises a plate-like mounting member (22) having a plurality of parallelly arranged probes (23) fixed therethrough. ,
A contact (27) provided at the tip of the probe (23) is brought into contact with an object to be inspected such as a printed circuit board, and each probe (23)
A predetermined voltage is applied to a lead wire (not shown) attached to the upper end of the device to conduct a continuity test of the device under test. The upper end of the contact (27) is attached to the probe (2
It is housed via a spring (28) in a housing portion (25) provided at the lower end of the base body (26) of 3), whereby the contactor (27) elastically moves along the axial direction of the probe (23). It is supposed to be displaceable.

【0003】このプローブユニット(21)において、各
プローブ(23)は導電性の金属材料で形成される。一
方、取付け板(22)は、プローブ同士のショートによ
り、検査不能となったり、或いは、IC等の電子部品が
破壊される等の事態を防止するため、ベークライトやプ
ラスチック材等の絶縁材料で形成されている。
In this probe unit (21), each probe (23) is formed of a conductive metal material. On the other hand, the mounting plate (22) is formed of an insulating material such as bakelite or a plastic material in order to prevent a situation in which an inspection cannot be performed due to a short circuit between the probes or an electronic component such as an IC is destroyed. Has been done.

【0004】[0004]

【発明が解決しようとする課題】ところで、上記プロー
ブユニットによる導通検査中には、検査箇所で一定の接
触圧を得るべく、取付け部材をプリント基板側に強く押
し付けるようにしている。この場合、取付け部材には検
査の度に押圧力が負荷されるので、繰り返して検査した
場合には、繰り返し荷重により取付け部材に反りや変形
を生じ、さらには時効変化によって欠けや割れ等を生じ
るおそれがある。また、プローブは定期的に交換される
が、取付け部材にベークライト等の耐摩擦性に劣る材料
を使用している関係で、交換時にプローブを挿入・抜脱
する際に取付け部材のプローブ取付け用の孔が摩耗し易
く、そのために取付け部材の寿命も短くなる傾向にあ
る。
By the way, during the continuity inspection by the probe unit, the mounting member is strongly pressed against the printed circuit board side in order to obtain a constant contact pressure at the inspection location. In this case, since a pressing force is applied to the mounting member at each inspection, when repeatedly inspected, the mounting member warps or deforms due to repeated load, and further, chipping or cracking occurs due to aging change. There is a risk. Also, the probe is replaced regularly, but because the mounting member is made of a material with poor abrasion resistance such as Bakelite, when the probe is inserted and removed during replacement, The holes are prone to wear, which tends to shorten the life of the mounting member.

【0005】このような不具合を解消するものとして、
図3に示すように、取付け部材(22)をアルミ等の金属
材料で形成し、プローブ(23)に樹脂等の絶縁性素材で
成形した円筒状のスリーブ(29)を被嵌することによ
り、プローブ(23)と取付け部材(22)との間を絶縁す
る構造も考えられるが、これでは、新たな部品(スリー
ブ)を必要とし、組立工数も増大するためにコスト高と
なる。また、隣接するプローブ間に最低限スリーブの肉
厚の二倍以上の間隔を必要とするため、近年の回路の複
雑化・高密度化に伴う測定ピッチの狭小化に対応できな
くなるおそれがある。
[0005] In order to solve such a problem,
As shown in FIG. 3, the mounting member (22) is formed of a metal material such as aluminum, and the probe (23) is fitted with a cylindrical sleeve (29) formed of an insulating material such as resin, A structure that insulates between the probe (23) and the mounting member (22) is also conceivable, but this requires a new component (sleeve) and increases the number of assembling steps, resulting in high cost. Further, since a minimum interval of twice the wall thickness of the sleeve is required between adjacent probes, it may not be possible to cope with the narrowing of the measurement pitch due to the recent increase in circuit complexity and density.

【0006】そこで、本発明では、プローブ同士のショ
ートを確実に防止できると共に、取付け部材の寿命向上
を図ることができ、しかも低コストで回路の複雑化・高
密度化にも対応可能なプローブユニットを提供すること
を目的とする。
Therefore, according to the present invention, the probe unit can surely prevent short-circuiting between the probes, the life of the mounting member can be improved, and the cost is low, and the probe unit can cope with complicated and high-density circuits. The purpose is to provide.

【0007】[0007]

【課題を解決するための手段】上記目的を達成すべく、
本発明では、取付け部材と、取付け部材に固定された複
数のプローブとを具備するものにおいて、取付け部材及
びプローブのうち、何れか一方の部材をアルミニウム素
材で形成すると共に、このアルミニウム素材からなる部
材の少なくとも他方の部材との接触部にアルマイト被膜
を形成することとした。
In order to achieve the above object,
In the present invention, in a device including a mounting member and a plurality of probes fixed to the mounting member, one of the mounting member and the probe is made of an aluminum material, and the member made of the aluminum material. Of at least the other member, an alumite coating film is formed.

【0008】また、取付け部材と、取付け部材に固定さ
れた複数のプローブとを具備するものにおいて、取付け
部材及びプローブをアルミニウム素材で形成し、少なく
とも両者の接触部にアルマイト被膜を介在させることと
した。
Further, in a device including a mounting member and a plurality of probes fixed to the mounting member, the mounting member and the probe are made of an aluminum material, and an alumite coating is interposed at least at a contact portion between the both. .

【0009】この場合、アルマイト被膜は、取付け部材
及びプローブのうちの何れか一方又は双方に形成すれば
よい。
In this case, the alumite coating may be formed on either one or both of the mounting member and the probe.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施形態を図1
(a)(b)に基づいて説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIG.
A description will be given based on (a) and (b).

【0011】図1に示すように、本発明にかかるプロー
ブユニット(1)は、板状の取付け部材(2)と、これ
に貫通固定した複数のプローブ(3)とで構成される。
As shown in FIG. 1, a probe unit (1) according to the present invention comprises a plate-shaped mounting member (2) and a plurality of probes (3) fixed through the plate-shaped mounting member.

【0012】取付け部材(2)はアルミニウム素材で形
成され、その所定位置にはプローブ(3)取付け用の取
付け孔(4)が貫通形成されている。
The mounting member (2) is made of an aluminum material, and a mounting hole (4) for mounting the probe (3) is formed at a predetermined position of the mounting member (2).

【0013】プローブ(3)は、パイプ状の基体(6)
と、この基体(6)よりも小径で且つ先端部が円錐状に
形成された接触子(7)とで構成される。この基体
(6)及び接触子(7)は、何れも導電性材料、例えば
アルミニウム素材で形成される。基体(6)の下部に
は、その全周にわたって内径側に縮径する係止部(6a)
が設けられている。基体(6)の内部空間のうち、係止
部(6a)よりも下方の空間(5)には、接触子(7)の
基部側がバネ(8)を介して摺動自在に収容され、バネ
(8)の上端側は係止部(6a)によって係止されてい
る。これにより、検査時には、バネ(8)の弾性力によ
って接触子(7)と被検査体との間に一定の接触圧が付
与される。
The probe (3) is a pipe-shaped substrate (6).
And a contactor (7) having a smaller diameter than the base body (6) and a conical tip. Both the base body (6) and the contactor (7) are made of a conductive material such as an aluminum material. At the lower part of the base body (6), a locking part (6a) that is reduced in diameter toward the inner diameter side over the entire circumference thereof.
Is provided. In the space (5) below the locking portion (6a) in the internal space of the base body (6), the base side of the contactor (7) is slidably accommodated via a spring (8). The upper end side of (8) is locked by the locking portion (6a). As a result, at the time of inspection, a constant contact pressure is applied between the contactor (7) and the object to be inspected by the elastic force of the spring (8).

【0014】取付け部材(2)のうちのプローブ(3)
と接触する部位、すなわち取付け孔(4)の内壁面の全
面には、陽極酸化処理等の公知手段によってアルマイト
被膜(9)が形成される(図面では、被膜の厚さを誇張
して描いている)。この時のアルマイト被膜(9)の厚
さは任意であるが、10〜200μm程度とするのが望
ましい。
The probe (3) of the mounting member (2)
An alumite coating (9) is formed by a known means such as anodic oxidation treatment on the portion contacting with, that is, the entire inner wall surface of the mounting hole (4) (the thickness of the coating is exaggerated in the drawing. Exist). The thickness of the alumite coating (9) at this time is arbitrary, but is preferably about 10 to 200 μm.

【0015】このようにして取付け孔(4)にアルマイ
ト被膜(9)を形成した後、各プローブ(3)を取付け
孔(4)に挿入して適当なはめあい公差で両者を固定す
れば、図1(a)に示すプローブユニット(1)が構成
される。この時には、基体(6)の下端部を取付け部材
(2)の下面に一致させ、接触子(7)を取付け部材
(2)の下方に突出させておく。このプローブユニット
(1)をプリント基板に接近させ、接触子(7)を基板
の配線パターン等に接触させた後、取付け部材(2)を
基板側に押圧しつつ各プローブ(3)に所定の検査信号
を送出して導通検査を行なう。
After the alumite coating (9) is formed in the mounting hole (4) in this manner, each probe (3) is inserted into the mounting hole (4) and fixed to each other with an appropriate fitting tolerance. The probe unit (1) shown in 1 (a) is constructed. At this time, the lower end of the base body (6) is aligned with the lower surface of the mounting member (2), and the contact (7) is projected below the mounting member (2). After bringing the probe unit (1) close to the printed circuit board and bringing the contactor (7) into contact with the wiring pattern of the circuit board, the mounting member (2) is pressed toward the circuit board and a predetermined amount is applied to each probe (3). A test signal is sent to conduct a continuity test.

【0016】アルマイト被膜(9)は、周知のように優
れた絶縁性を有する。従って、上述のように、プローブ
(3)と取付け孔(4)との間にアルマイト被膜(9)
を介在させれば、プローブ(3)と取付け部材(2)と
の間が電気的に絶縁され、これによってプローブ(3)
同士が絶縁されるので、プローブ(3)のショートを防
止することが可能となる。例えば、アルマイト被膜
(9)の膜厚を10μmした場合の耐電圧は200v以
上であり、導通検査時における印加電圧(50v程度)
に比べて十分に大きいので、良好な絶縁性を確保するこ
とができる。また、アルマイト被膜は、既にある処理装
置により簡単且つ安価に形成可能であるから、製造コス
トが著しく高騰することもない。
As is well known, the alumite coating (9) has excellent insulating properties. Therefore, as described above, the alumite coating (9) is provided between the probe (3) and the mounting hole (4).
Is interposed, the probe (3) and the mounting member (2) are electrically insulated from each other, whereby the probe (3)
Since they are insulated from each other, it is possible to prevent a short circuit of the probe (3). For example, when the film thickness of the alumite coating (9) is 10 μm, the withstand voltage is 200 v or higher, and the applied voltage (about 50 v) at the continuity test.
Since it is sufficiently larger than that of (1), good insulation can be secured. Further, since the alumite coating can be formed easily and inexpensively with the existing processing equipment, the manufacturing cost does not significantly increase.

【0017】また、アルマイト被膜(9)の膜厚は、図
3に示すスリーブ(29)に比べて各段に小さい。従っ
て、スリーブを用いる場合に比べてプローブ(3)の配
置ピッチをごく小さくすることができ、回路の複雑化・
高密度化にも容易に対応可能となる。
The film thickness of the alumite coating (9) is much smaller than that of the sleeve (29) shown in FIG. Therefore, the arrangement pitch of the probes (3) can be made extremely small as compared with the case of using the sleeve, and the circuit becomes complicated.
It is possible to easily deal with higher density.

【0018】さらには、アルマイト被膜(9)は優れた
耐摩耗性を有するので、プローブ(3)の交換作業を繰
り返し行なっても取付け孔(4)が摩耗することはな
い。また、取付け部材(2)がベークライト等に比べれ
ば剛性の高いアルミ製とされているので、取付け部材
(2)が変形したり、欠けや割れを生じるおそれもな
い。従って、取付け部材(2)の寿命を図2に示す従来
品に比べて著しく向上させることができる。
Furthermore, since the alumite coating (9) has excellent wear resistance, the attachment hole (4) will not be worn even if the replacement work of the probe (3) is repeated. Further, since the mounting member (2) is made of aluminum having higher rigidity than bakelite or the like, there is no possibility that the mounting member (2) will be deformed or chipped or cracked. Therefore, the life of the mounting member (2) can be remarkably improved as compared with the conventional product shown in FIG.

【0019】以上の構成では、取付け部材(2)をアル
ミニウム素材とし、取付け孔(4)の内壁面にアルマイ
ト被膜(9)を形成しているが、アルマイト被膜(9)
は少なくとも取付け部材(2)と各プローブ(3)との
接触部分に介在していれば足りる。従って、プローブ
(3)をアルミ製とし、その外周面に膜厚が2〜50μ
m程度のアルマイト被膜(9)を形成してもよい。ま
た、取付け部材(2)との接触部だけでなく、これより
も上方の外周面の全体にアルマイト被膜(9)を形成し
てもよく、これにより測定間隔を狭くし且つ全長を長く
したタイプのプローブ(3)であっても、上端部の変形
によるプローブ(3)同士のショートを確実に回避する
ことが可能となる。なお、このようにプローブ(3)を
アルミ製とした場合には、取付け部材(2)はアルミ製
とする必要はなく、一定の強度を有する他の金属材料で
形成しても構わない。
In the above construction, the mounting member (2) is made of aluminum and the alumite coating (9) is formed on the inner wall surface of the mounting hole (4).
Is sufficient if it is interposed at least in the contact portion between the mounting member (2) and each probe (3). Therefore, the probe (3) is made of aluminum and has a film thickness of 2 to 50 μm on its outer peripheral surface.
An alumite coating (9) of about m may be formed. Further, the alumite coating (9) may be formed not only on the contact portion with the mounting member (2) but also on the entire outer peripheral surface above it, thereby narrowing the measurement interval and lengthening the total length. Even with the probe (3), it is possible to reliably avoid a short circuit between the probes (3) due to deformation of the upper end portion. When the probe (3) is made of aluminum in this way, the mounting member (2) does not have to be made of aluminum, and may be made of another metal material having a certain strength.

【0020】また、取付け部材(2)とプローブ(3)
の双方をアルミ製とし、双方にアルマイト被膜(9)を
形成してもよい。
The mounting member (2) and the probe (3)
Both may be made of aluminum and the alumite coating (9) may be formed on both.

【0021】本発明は、プローブ(3)や取付け部材
(2)の形状や構造、プローブ(3)の線経や配置位
置、配置本数等を問わず、あらゆる構造のプローブユニ
ット(1)に適用可能である。また、アルマイト被膜
(9)の形成箇所も、取付け部材(2)と各プローブ
(3)の接触部が含まれている限り任意であり、他の部
分(例えば接触子の表面等)に形成しても構わない。
The present invention is applicable to a probe unit (1) of any structure, regardless of the shape and structure of the probe (3) or the mounting member (2), the line and position of the probe (3), the number of arranged wires and the like. It is possible. Further, the location where the alumite coating (9) is formed is also arbitrary as long as it includes the contact portion between the mounting member (2) and each probe (3), and is formed on another portion (for example, the surface of the contactor). It doesn't matter.

【0022】[0022]

【発明の効果】このように、本発明によれば、プローブ
と取付け部材との間の絶縁材料として、アルマイト被膜
を使用しているので、低コストで確実にプローブ同士の
ショートを防止することができる。また、絶縁素材とし
て樹脂等からなるスリーブを用いる場合に比べると、プ
ローブの配置ピッチをより小さくすることができ、回路
の複雑化・高密度化にも容易に対応可能となる。さらに
は、アルマイト被膜の耐摩耗性により、プローブの交換
作業を繰り返し行なっても取付け孔が摩耗することはな
く、また、取付け部材の素材として変形や欠け、割れ等
の生じにくい金属材料を使用することができるので、取
付け部材の寿命を従来品に比べて著しく向上させること
ができる。
As described above, according to the present invention, since the alumite coating is used as the insulating material between the probe and the mounting member, it is possible to reliably prevent short-circuiting between the probes at low cost. it can. Further, as compared with the case where a sleeve made of resin or the like is used as the insulating material, the arrangement pitch of the probes can be made smaller, and it becomes possible to easily cope with the complexity and high density of the circuit. Furthermore, due to the wear resistance of the alumite coating, the mounting hole will not be worn even after repeated probe replacement work, and a metal material that is unlikely to be deformed, chipped, or cracked is used as the material for the mounting member. Therefore, the life of the mounting member can be remarkably improved as compared with the conventional product.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)図は本発明にかかるプローブユニットの
縦断面図であり、(b)図はプローブの先端部近傍の拡
大断面図である。
FIG. 1 (a) is a vertical cross-sectional view of a probe unit according to the present invention, and FIG. 1 (b) is an enlarged cross-sectional view in the vicinity of the tip of a probe.

【図2】(a)図は、従来のプローブユニットの縦断面
図であり、(b)図はプローブの先端部近傍の拡大断面
図である。
FIG. 2 (a) is a vertical cross-sectional view of a conventional probe unit, and FIG. 2 (b) is an enlarged cross-sectional view near the tip portion of the probe.

【図3】従来のプローブユニットの改良例を示す縦断面
図である。
FIG. 3 is a vertical sectional view showing an improved example of a conventional probe unit.

【符号の説明】[Explanation of symbols]

1 プローブユニット 2 取付け部材 3 プローブ 9 アルマイト被膜 1 probe unit 2 mounting member 3 probe 9 alumite coating

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 取付け部材と、取付け部材に固定された
複数のプローブとを具備するものにおいて、取付け部材
及びプローブのうち、何れか一方の部材をアルミニウム
素材で形成すると共に、このアルミニウム素材からなる
部材の少なくとも他方の部材との接触部にアルマイト被
膜を形成したことを特徴とするプローブユニット。
1. A device comprising a mounting member and a plurality of probes fixed to the mounting member, wherein one of the mounting member and the probe is made of an aluminum material and is made of this aluminum material. A probe unit, wherein an alumite coating is formed on at least a contact portion of the member with the other member.
【請求項2】 取付け部材と、取付け部材に固定された
複数のプローブとを具備するものにおいて、取付け部材
及びプローブをアルミニウム素材で形成し、少なくとも
両者の接触部にアルマイト被膜を介在させたことを特徴
とするプローブユニット。
2. A mounting member comprising a mounting member and a plurality of probes fixed to the mounting member, wherein the mounting member and the probe are made of an aluminum material, and an alumite coating is interposed at least in a contact portion between the both. Characteristic probe unit.
【請求項3】 アルマイト被膜を、取付け部材及びプロ
ーブのうちの何れか一方又は双方に形成したことを特徴
とする請求項2記載のプローブユニット。
3. The probe unit according to claim 2, wherein an alumite coating is formed on one or both of the attachment member and the probe.
JP8026936A 1996-02-14 1996-02-14 Probe unit Pending JPH09218220A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8026936A JPH09218220A (en) 1996-02-14 1996-02-14 Probe unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8026936A JPH09218220A (en) 1996-02-14 1996-02-14 Probe unit

Publications (1)

Publication Number Publication Date
JPH09218220A true JPH09218220A (en) 1997-08-19

Family

ID=12207045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8026936A Pending JPH09218220A (en) 1996-02-14 1996-02-14 Probe unit

Country Status (1)

Country Link
JP (1) JPH09218220A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4880120B2 (en) * 1998-07-10 2012-02-22 日本発條株式会社 Conductive contact
JP2014517310A (en) * 2011-06-06 2014-07-17 インターコネクト・デバイシーズ・インコーポレイテッド Insulated metal socket
KR20220052448A (en) * 2020-10-21 2022-04-28 주식회사 오킨스전자 Test socket

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4880120B2 (en) * 1998-07-10 2012-02-22 日本発條株式会社 Conductive contact
JP2014517310A (en) * 2011-06-06 2014-07-17 インターコネクト・デバイシーズ・インコーポレイテッド Insulated metal socket
KR20220052448A (en) * 2020-10-21 2022-04-28 주식회사 오킨스전자 Test socket

Similar Documents

Publication Publication Date Title
JP4880120B2 (en) Conductive contact
US5952843A (en) Variable contact pressure probe
JP3634074B2 (en) Conductive contact
JP2532331B2 (en) Conductive contact
CN110678759B (en) Electrical connection device
KR20040013010A (en) Conductive contact
US20030016037A1 (en) Conductive coil contact member
KR20050073511A (en) Probe card
WO1999004274A1 (en) Conductive contact
US20220413010A1 (en) Contactor with angled depressible probes in shifted bores
JP2019090760A (en) Probe head
US20080036484A1 (en) Test probe and manufacturing method thereof
KR20080015828A (en) Wafer inspecting sheet-like probe and application thereof
JPH09218220A (en) Probe unit
KR100606225B1 (en) Probe card
KR100473430B1 (en) Vertical type probe card
JP2007109414A (en) Socket for integrated circuit
KR20180121387A (en) Probe, method of manufacturing the probe and method of testing continuity using the probe
US6429672B2 (en) Contamination-tolerant electrical test probe
JP2002055118A (en) Prober
JP2021189064A (en) Probe needle and probe unit
JPH11108954A (en) Contact probe
KR20230082598A (en) contact probe
CN116990557A (en) Contact probe
KR100473891B1 (en) Method for manufacturing vertical type probe card

Legal Events

Date Code Title Description
A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20001010