JPH09218020A - Three-dimensional shape measuring equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the size of a three-dimensional shape measuring equipment by providing a mirror for reflecting a sighting light from a light emitting means, and a mirror for reflecting the scattering (reflecting) light from an object to a light receiving means thereby utilizing the inner space of the measuring equipment efficiently. SOLUTION: Within a frame 62, a second mirror 35 is disposed on the upper rear side of a third mirror 34 and a fourth mirror 36 is disposed on the lower rear side of the mirror 34. A sighting light 37a emitted from a laser oscillator 37 is reflected on the mirror 35 toward an object 2 through the third mirror 34 and a first mirror 33. Scattering light 22 from the object 2 passes through an elongated window 61a, and mirrors 33, 34 and then it is reflected on the mirror 36 and focused on a line sensor (light receiving means) 38. Since the laser oscillator 37 and line sensor can be disposed toward the longitudinal direction of elongated mirrors 33, 34 because of the mirrors 35, 36, inner space of housing 6 can be utilized efficiently and the size can be reduced, while enhancing the workability of measuring work, without sacrifice of measuring performance.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional shape measuring apparatus for measuring the surface shape of an object to be measured.

[0002]

2. Description of the Related Art As a three-dimensional shape measuring device for measuring the surface shape of a three-dimensional object without touching it, one using a triangulation method is known. As shown in FIG. 7, this measuring device is arranged at a predetermined distance from the object to be measured A, and a CCD (charge coupled device) or PSD is directed toward the object to be measured A.
A light receiving portion B made up of (position sensitive devise) and a light emitting portion C made up of a laser oscillator and an LED are arranged in parallel. That is, the XYZ axes are set in advance in the measurement system, the distance D between the light emitting section B and the light receiving section C is made constant, and light having a small beam diameter is emitted from the light emitting section B to the surface of the object to be measured A. The light is irradiated and the irradiation position of the light is determined by the light receiving portion C.
To receive light. Then, the light emitting portion B and the light receiving portion C at that time
And the light emitting direction of the light emitting unit B and the light receiving direction of the light receiving unit A are measured, and three-dimensional coordinate data of the irradiation position is calculated based on the measured values. And the light emitting part A
The coordinate data of the object to be measured A is calculated each time the light emitting direction of the object is changed, and the object to be measured A is calculated by the coordinate data group.
It is intended to grasp the surface shape of.

[0003]

However, the conventional three-dimensional shape measuring apparatus has the following problems. First of all, if an attempt is made to reduce the size of the measuring device by incorporating the light emitting portion B and the light receiving portion C, the light emitting portion B and the light receiving portion C
The distance D between must be shortened. When that happens,
In the above coordinate data, the resolution is lowered and the measurement performance is lowered. In addition, it is very difficult to downsize the device in order to avoid the deterioration of the measurement performance. Secondly, the desired coordinate data cannot be obtained unless the measuring device is accurately arranged with respect to the set coordinate system. For example, when the measuring device is tilted in a certain axial direction, the coordinate data group is measured as if the object to be measured A was normally installed while being tilted in the axial direction. For this reason, it is necessary to accurately arrange the measuring device at the time of measurement, which makes the measurement work troublesome. Thirdly, the surface shape cannot be measured unless the distance between the measuring device and the object to be measured A is within a predetermined range. That is, unless the irradiation position of the light from the light emitting section B to the object to be measured A is within the collimable range of the light receiving section C, the coordinate data cannot be obtained and the surface shape of the object to be measured A cannot be measured at all. Therefore, when the distance between the measurement position and the object A to be measured is different, a plurality of measuring devices corresponding to the distances are required.

Therefore, the present invention has been made in order to solve the above problems, and it is possible to achieve size reduction while avoiding deterioration of measurement performance, excellent measurement workability, and coverage at different distances. An object of the present invention is to provide a three-dimensional shape measuring device capable of measuring a measurement object.

[0005]

That is, the present invention provides a light emitting means for emitting aiming light for forming an irradiation spot on the surface of an object to be measured and a scattered light of the irradiation spot on the surface of the object to be measured. A light receiving means for receiving light and a long reflecting surface which reflects aiming light toward the object to be measured by the reflecting surface, and at a position separated from the reflecting position of the aiming light in the longitudinal direction of the reflecting surface. A first mirror that receives scattered light from the object to be measured and reflects it toward the light receiving means, and a aiming light emitted from the light emitting means that is arranged on the way of the light guiding path of the aiming light between the light emitting means and the first mirror. A second mirror for reflecting toward one mirror and a rotating means for rotating at least the first mirror about an axis substantially parallel to the longitudinal direction of the reflecting surface and rotating about an axis orthogonal to the longitudinal direction. And the aiming light irradiation path , Characterized in that a coordinate transformation means for calculating the coordinate data of the irradiation spot based on the distance between the light receiving direction and the light-emitting position of the scattered light and the light receiving position.

According to this invention, the aiming light emitted from the light emitting means is reflected by the second mirror and is radiated toward the object to be measured through the first mirror. Therefore, by providing the second mirror, the light emitting means can be arranged in the longitudinal direction of the elongated first mirror. Therefore, the internal space of the measuring device can be efficiently used.

Further, the present invention is characterized in that the above-mentioned first mirror and second mirror are dielectric multilayer mirrors that almost totally reflect aiming light and scattered light.

According to such an invention, attenuation of the aiming light and scattered light can be prevented by reflection at the first mirror or the second mirror, and stable measurement can be performed regardless of the surrounding conditions.

Further, the present invention has a long shape and is provided on the way of a light guiding path for aiming light between the second mirror and the first mirror and on the way of guiding scattered light between the first mirror and the light receiving means. A third mirror is provided which reflects the aiming light toward the first mirror and reflects the scattered light toward the light receiving means, and the third mirror and the light receiving element are provided on the way of the scattered light guiding path. And a fourth mirror for reflecting the scattered light toward the light receiving element, and the first mirror and the third mirror are arranged in parallel in the vicinity of the surface facing the object to be measured.

According to this invention, since the first mirror and the third mirror are arranged in the vicinity of the surface facing the object to be measured, the aiming light emitted from the inside of the device is reflected by the third mirror. The light is guided along the facing surface, is reflected by the first mirror, and is irradiated toward the object to be measured. Further, the scattered light emitted from the object to be measured is reflected by the first mirror, guided along the surface facing the object to be measured, and reflected by the third mirror toward the light receiving means. For this reason, a space for guiding the aiming light and the scattered light in the device can be secured in the vicinity of the facing surface of the object to be measured in the device, so that the space in the device can be effectively used. On the other hand, the scattered light guided from the third mirror is reflected by the fourth mirror, is guided in the longitudinal direction of the first mirror and the third mirror, and is incident through a predetermined optical system. Therefore, the light receiving unit including the optical system can be arranged along the longitudinal direction of the first mirror and the third mirror, and the space in the device can be effectively used.

Further, the present invention is characterized in that the above-mentioned third mirror and fourth mirror are dielectric multi-layer film mirrors that almost totally reflect aiming light and scattered light.

According to such an invention, attenuation of the aiming light and scattered light can be prevented by reflection at the third mirror or the fourth mirror, and stable measurement can be performed regardless of the surrounding conditions.

Further, the present invention has an inclination detector for detecting its own posture state, and the coordinate conversion means has a function of correcting coordinate data in accordance with a signal of its own posture state inputted from the inclination detector. Is characterized by.

According to this invention, it is not necessary to accurately set the posture of the measuring device at the time of measurement, and the shape of the object to be measured can be measured quickly.

The present invention is also characterized in that the above-mentioned fourth mirror is tiltable about an axis in a direction orthogonal to the longitudinal direction of the first mirror.

According to such an invention, by changing the inclination angle of the fourth mirror according to the distance from the measuring device to the object to be measured, it becomes possible to measure the object to be measured at different distances.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings. In each of the drawings, the same elements are denoted by the same reference numerals, and description thereof is omitted.

(Embodiment 1) FIG. 1 is a schematic diagram of a three-dimensional shape measuring apparatus 1. In FIG. 1, a three-dimensional shape measuring apparatus 1 is an apparatus that measures the surface shape of an object to be measured 2 that is a measurement target, and includes, for example, a drive unit 3, a control unit 4, and a coordinate conversion unit 5. . The drive unit 3 and the control unit 4 are arranged inside a box-shaped casing 6, and the coordinate conversion unit 5 is arranged outside the casing 6. The housing 6 is a case member arranged to face the DUT 2, and a front window 61 facing the DUT 2 is provided with a long window 61a extending in the vertical direction. A frame 62 for installing the members of the drive unit 3 is arranged in the housing 6. Horizontal pins 62a, 62a are provided on the upper sides of both sides of the frame 62 so as to project from the casing 6
It is inserted in the inner surface of each. In addition, a vertical feed mechanism 31 is provided on the rear portion of the frame body 62 (on the side opposite to the front surface 61).
2 is designed so that the horizontal pins 62a and 62a are raised to the center.

For example, this vertical feed mechanism 31 is shown in FIG.
As described above, the screw shaft 31b is provided at the rear position of the frame body 62 in the vertical direction, and the screw shaft 31b is a shaft member having a spiral groove engraved on its peripheral surface. It is supported by the nut 31c and the lower support 31d. Screw shaft 31b and upper nut 31
The c has a structure in which a plurality of balls are arranged in the bearing portion along the groove of the screw shaft 31b and screwed by a ball screw structure, and the upper nut 31c moves up and down by the rotation of the screw shaft 31b. There is. On the other hand, the screw shaft 31b and the lower support 31d are
The lower support 31d is joined by a structure that supports the screw shaft 31b in a state where the idle rotation of 1b is allowed. The upper nut 31c is pivotally attached to the frame body 62 by a horizontal pin parallel to the horizontal pin 62a described above, and is rotatable about the horizontal shaft. On the other hand, the lower support 3
1d has horizontal pins 31a, 31a protruding parallel to the above-described horizontal pin 62a on its side portion, and is axially attached to the housing 6 via the horizontal pin 31a.

A pulley 31e is attached to the screw shaft 31b, and a rotational force is applied via the pulley 31e. For example, screw shaft 31
A motor 32 having a drive shaft parallel to the screw shaft 31b is arranged adjacent to b, and when the motor 32 is driven, rotational force is applied to the pulley 31e via the belt 32a. As described above, the vertical feed mechanism 31 drives the motor 32 to drive the screw shaft 31b.
Is rotated, and the rotation causes the upper nut 31c to move up or down with respect to the screw shaft 31b to raise or lower the frame 62 around the horizontal pin 62a.
The vertical feed mechanism 31 raises and lowers the frame body 62, so that the first mirror 33 attached to the frame body 62.
It forms a part of the rotating means for changing the direction of the arrow relative to the horizontal axis. The vertical feed mechanism 31 is not limited to the above-described one, and may have another structure as long as it raises the frame 62.

As shown in FIG. 1, on the front surface 61 side in the frame body 62, the first mirror 33 and the third mirror 34 are arranged along the front surface 61 in the longitudinal direction of the long window 61a, that is, in the vertical direction. It is set up. The first mirror 33 and the third mirror 34 have elongated reflecting surfaces, and the reflecting surfaces allow the laser beam 37a, which is the aiming light guided from the rear side of the frame body 62, to pass through the long window 61a. To be ejected from
It is a member for guiding the light incident from the long window 61a to the rear side of the frame 62. The first mirror 33 has a long window 61.
It is arranged behind a and reflects light to the long window 61a,
The light from 1a can be received. The first mirror 33 is rotatable about a vertical axis passing through the central portion thereof. For example, the first mirror 33
Is provided with vertical pins 33a, 33a projecting upward and downward on its upper and lower end surfaces, and is rotatable around these vertical pins 33a.
A pulley 33b is attached to the motor 33d, and a rotational force is applied from a motor 33d via a belt 33c. That is, by controlling the rotation of the motor 33d, the direction of the first mirror 33 can be arbitrarily changed. The motor 33d forms part of a rotating unit that changes the orientation of the first mirror 33 with respect to the vertical axis.

On the other hand, the third mirror 34 is fixed to the frame body 62, and is arranged with its reflection surface facing obliquely rearward of the housing 6. Thus, the first mirror 33 and the third mirror 34 are arranged in parallel along the front surface 61 side of the housing 6, so that the laser beam 37a is guided from the rear side of the housing 6 and the long window 61a. The internal space for guiding the light incident from the rearward side may be narrow, and the internal space of the housing 6 can be effectively used.

In the frame body 62, the second mirror 35 is arranged on the upper rear side of the third mirror 34, and the fourth mirror 36 is arranged on the lower rear side. Second mirror 35
Is a reflection plate for reflecting and guiding the laser beam 37a guided from below to the third mirror 34 side, and is attached obliquely downward toward the front surface 61 of the housing 6. Below the second mirror 35, a laser oscillator 37 which is a light emitting means of the laser beam 37a is arranged. In addition, the second mirror 35 and the laser oscillator 3
A beam expander 37b is provided between the beam expander 37 and the light source 7. The laser oscillator 37 and the beam expander 37b are provided with the second mirror 35,
It is possible to arrange the first mirror 33 and the third mirror 34 along the longitudinal direction.

Further, as shown in FIG. 1, in the frame 62, a fourth mirror 36 is arranged behind the lower part of the third mirror 34. The fourth mirror 36 is arranged such that the light reflecting surface is inclined upward toward the front surface 61 side of the housing 6, is incident from the long window 61a, and is guided by the first mirror 33 and the third mirror 34. Line sensor 38
It has the function of reflecting to the side. The line sensor 38
Is disposed above and behind the fourth mirror 36, and an imaging lens 38a is provided between the fourth mirror 36 and the line sensor 38.
Are arranged. The line sensor 38 is a light receiving means, is provided with a plurality of photosensitive portions (pixels) arranged in a line, and is an image pickup element which converts light received by these photosensitive portions into an electrical signal, For example, a CCD line sensor or the like is used. The image forming lens 38 a is a lens for focusing the light reflected and guided by the fourth mirror 36 and forming an image on the line sensor 38. By disposing the fourth mirror 36 described above, the light guided from the third mirror 34 to the rear side of the housing 6 is reflected upward, so that the first mirror 33 or the third mirror It is possible to arrange the line sensor 38 at the rear position of the mirror 34.

As described above, as shown in FIG. 2 or 3, the first mirror, the third mirror 34, the light emitting means such as the laser oscillator 37 and the light receiving means such as the imaging lens 38a are aligned in the longitudinal direction. As a result, the internal space of the housing 6 can be efficiently used, and the size of the housing 6 can be reduced.

Further, as shown in FIG. 1, an inclination sensor 39 is arranged in the housing 6. This tilt sensor 39
A sensor for detecting the posture state of the housing 6 with respect to the horizontal plane, for example, a sensor using a strain gauge is used. When the width direction of the housing 6 is the X axis, the height direction is the Y axis, and the depth direction is the Z axis, the tilt sensor 39 can measure the tilt angle of each of the X axis, the Y axis, and the Z axis.

On the other hand, as shown in FIG. 1, a plurality of printed circuit boards 51 are installed in the housing 6 to form a control unit 4 for controlling the operation of the drive unit 3. As shown in FIG. 4, the control unit 4 is composed of an electronic circuit, supplies a power supply voltage to the laser oscillator 37 of the drive unit 3 and outputs operation signals to the line sensor 38, the motor 32, and the motor 33d, respectively. 38, the function of inputting each detection signal from the tilt sensor 39. For example, an operation signal from the control unit 4 to the motor 32 drives the motor 32 to drive the frame 6
2 is a pulse signal for rotating the motor 33d by about 20 °, and the operation signal from the control unit 4 to the motor 33d is a pulse signal for rotating the motor 33d by about 10 ° by dividing the rotation shaft of the motor 33d into 128 or 256. Such an operation signal is sent to the motor 3
2. By inputting to the motor 33d, the first mirror 3
While the 3 rotates back and forth by about 10 °, the frame body 62 is elevated about 20 °. Therefore, as shown in FIG. 5, the laser beam 37a emitted from the laser oscillator 37 is horizontally scanned along the X axis toward the DUT 2 in a predetermined range and vertically scanned along the Y axis. Becomes

A coordinate conversion section 5 connected to the housing 6 by a cable or the like is installed outside the housing 6. The coordinate conversion unit 5 has a function of outputting the operation signals of the motors 32 and 33d to the control unit 4 and calculating three-dimensional coordinate data that is point cloud data on the surface of the DUT 2. For example, a general personal computer is used.
The three-dimensional coordinate data is stored in the motors 32, 3 according to the operation signal.
The calculation can be performed by driving 3d to scan the laser beam 37a on the DUT 2 and inputting a data signal of the incident angle of the scattered light 22 of the irradiation spot 21 at each scanning position from the control unit 4. In addition to the incident angle data signal, the tilt signal indicating the posture state of the housing 6 with respect to the horizontal plane is input to the coordinate conversion unit 5 from the tilt sensor 39, and the posture state of the housing 6 that emits the laser beam 37a with respect to the horizontal plane. Even if it is tilted, the three-dimensional coordinate data is corrected based on the tilt signal for the X axis and the Y axis, respectively. For this reason, when measuring the surface shape of the DUT 2, it is possible to save the trouble of finely setting the posture of the housing 6, and to speed up the measurement work.

Next, the operation of the three-dimensional shape measuring apparatus 1 will be described.

First, as shown in FIG. 1, a long window 6 is formed on the DUT 2.
The housing 6 is set with 1 facing. At this time, the laser beam 37a emitted from the housing 6 may be set so as to be irradiated onto the DUT 2 without setting the tilted state of the housing 6 in detail. In that state,
The device 1 is turned on to energize the control unit 4 and the coordinate conversion unit 5 to operate each member of the drive unit 3. That is, a laser beam 37a, which is aiming light, is emitted from the laser oscillator 37, is focused by the beam expander 37b, is sequentially reflected by the second mirror 35, the third mirror 34, and the first mirror 33, and is measured from the long window 61a. It is emitted toward the object 2. Simultaneously with the emission of the laser beam 37a, the motor 32 and the motor 33 are transmitted from the coordinate conversion unit 5 via the control unit 4.
The motor 32 and the motor 33d are driven by outputting the operation signals to the respective d. This motor 33d
Drive the first mirror 33 to reciprocate about the vertical axis, and by driving the motor 32, the first mirror 33 gradually moves downward with the frame 62 about the horizontal axis.
Therefore, the laser beam 37a is, as shown in FIG.
The object 2 is scanned in a predetermined range in the horizontal direction and the vertical direction.

During such scanning, as shown in FIG. 1, the irradiation spot 21 is formed on the DUT 2 by irradiation with the laser beam 37a, and the scattered light 22 of the irradiation spot 21 has a long window 61a. It is incident on the inside of the housing 6 through. Then, the scattered light 22 is sequentially reflected by the first mirror 33, the third mirror 34, and the fourth mirror 36, and is received by the line sensor 38 through the imaging lens 38a. In this line sensor 38, scattered light 22
The light receiving position of is output as an electrical signal. This signal is a signal corresponding to the incident angle of the scattered light 22 on the housing 6, and is input to the coordinate conversion unit 5 via the control unit 4. In the coordinate conversion unit 5, distance data from the housing 6 to the irradiation spot 21 is calculated by triangulation based on the incident angle of the scattered light 22 and the distance between the emission position of the laser beam 37a and the incident position of the scattered light 22. It will be converted as three-dimensional coordinate data.

When the scanning of the laser beam 37a is completed, the three-dimensional coordinate data at each scanning position in the scanning range is obtained. On the other hand, the coordinate conversion unit 5 receives the inclination data of the housing 6 from the inclination sensor 39 via the control unit 4. Then, it is possible to obtain three-dimensional coordinate data in which the tilted state of the housing 6 is corrected based on this tilted data. For this reason, when measuring the surface shape of the DUT 2, it is possible to save the trouble of finely setting the posture of the housing 6, and to speed up the measurement work.

By thus obtaining the three-dimensional coordinate data on the surface of the object to be measured 2, the surface shape of the object to be measured 2 can be grasped. For example, if the coordinate conversion unit 5 is connected to the monitor 7 and the surface shape is displayed based on the three-dimensional coordinate data, the surface shape of the DUT 2 can be easily grasped visually.

Further, such a three-dimensional shape measuring apparatus 1
Can be applied to many things by software processing of three-dimensional coordinate data. For example, it can be used for various purposes such as parts selection, material selection, assembly position detection, object size measurement, three-dimensional character detection, human body measurement, and three-dimensional FAX.

(Embodiment 2) In the three-dimensional shape measuring apparatus 1 described above, the first mirror 33, the second mirror 35, the third mirror 34, and the fourth mirror 36 cause the laser beam 37a and the scattered light 22 to be almost totally reflected. It is desirable to use a dielectric multilayer mirror. That is, in the three-dimensional shape measuring apparatus 1, the laser beam 37 emitted from the laser oscillator 37 which is the light emitting means is received by the line sensor 38 which is the light receiving means as the scattered light 22 by a large number of mirrors. Since it is reflected, it is necessary to avoid the loss of light intensity at each reflection. Therefore, the first mirror 33, the second mirror 35, and the third mirror 3
4. If a dielectric multi-layered film mirror is used as the fourth mirror 36 and the reflection characteristic is such that at least the wavelength components of the laser beam 37a and the scattered light 22 are totally reflected, the measurement can be reliably performed even in a poor measurement environment.

(Third Embodiment) In the three-dimensional shape measuring apparatus 1 described above, the setting of the tilt angle of the fourth mirror 36 may be changeable. That is, by making the fourth mirror 36 tiltable about an axis (horizontal axis) orthogonal to the longitudinal direction of the first mirror 33, as shown in FIG. 6, from the housing 6 to the DUT 2. Even if the distance is very different,
By changing the tilt angle of the fourth mirror 36 according to the distance so that the scattered light 22 is reflected by the line sensor 38, it is possible to measure the surface shape of the DUTs 2 at different distances. Become.

[0037]

As described above, according to the present invention, the following effects can be obtained.

That is, since the second mirror for reflecting the aiming light from the light emitting means is provided, it is possible to arrange the light emitting means in the longitudinal direction of the elongated first mirror. Further, by providing the fourth mirror that reflects the scattered light of the irradiation spot on the DUT to the light receiving means,
It is possible to arrange the light receiving means in the longitudinal direction of the elongated first mirror. Therefore, the internal space of the measuring device can be efficiently used, and the measuring device can be downsized.

Further, since each mirror for reflecting the aiming light or the scattered light is a dielectric multi-layer film mirror, light loss at the time of reflection of each mirror can be prevented. Therefore, stable measurement is possible regardless of the surroundings of the measuring device.

Further, by providing the inclination detector for detecting the posture state of the measuring device, when measuring the shape of the object to be measured,
It is not necessary to set the installation posture of the measuring device in detail and accurately. Therefore, the measurement work can be performed quickly.

Further, since the fourth mirror can be tilted about the axis in the direction orthogonal to the longitudinal direction of the first mirror, the objects to be measured at different distances from the measuring device can be respectively measured. .

[Brief description of drawings]

FIG. 1 is a schematic diagram of a three-dimensional shape measuring apparatus.

FIG. 2 is a sectional view of a housing in the three-dimensional shape measuring apparatus.

FIG. 3 is a sectional view taken along line III-III in FIG. 2;

FIG. 4 is a block diagram of a three-dimensional shape measuring apparatus.

FIG. 5 is an explanatory diagram of measurement by the three-dimensional shape measuring apparatus.

FIG. 6 is an explanatory diagram of a three-dimensional shape measuring device according to a third embodiment.

FIG. 7 is an explanatory diagram of a conventional technique.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Three-dimensional shape measuring device, 2 ... Object, 21 ... Irradiation spot, 22 ... Scattered light, 3 ... Driving part, 33 ... First mirror, 34 ... Third mirror, 35 ... Second mirror, 36 ... Four mirrors, 37 ... Laser oscillator (light emitting means), 37a ... Laser beam (aiming light), 5 ... Coordinate conversion unit, 6 ... Housing, 6
2 ... frame,

Claims (6)

[Claims] 1. A light emitting means for emitting aiming light for forming an irradiation spot on the surface of the object to be measured; a light receiving means for receiving scattered light of the irradiation spot on the surface of the object to be measured; A reflecting surface, and reflects the aiming light toward the object to be measured by the reflecting surface, and the object to be measured at a position separated from the reflecting position of the aiming light in the longitudinal direction of the reflecting surface. A first mirror that receives the scattered light from the light-receiving means and reflects the scattered light to the light-receiving means side, and is disposed on the way of the light guide path of the aiming light between the light-emitting means and the first mirror, and emitted from the light-emitting means. A second mirror that reflects the aiming light toward the first mirror; and an axis that rotates at least the first mirror about an axis substantially parallel to the longitudinal direction of the reflecting surface and that is orthogonal to the longitudinal direction. Is rotated around Rotating means, and coordinate conversion means for calculating coordinate data of the irradiation spot, based on the irradiation direction of the aiming light to the object to be measured, the light receiving direction of the scattered light, and the distance between the light emitting position and the light receiving position. A three-dimensional shape measuring device equipped with. 2. The three-dimensional shape measurement according to claim 1, wherein the first mirror and the second mirror are dielectric multilayer mirrors that substantially totally reflect the aiming light and the scattered light. apparatus. 3. A light guide of the scattered light, which has a long shape and is on the way of the light guide path of the aiming light between the second mirror and the first mirror and between the first mirror and the light receiving means. A third mirror, which is disposed on the path, reflects the aiming light toward the first mirror and reflects the scattered light toward the light receiving means, and between the third mirror and the light receiving element. A fourth mirror that is disposed on the way of the light guide path of the scattered light and reflects the scattered light toward the light receiving element, and the first mirror and the second mirror near a surface facing the object to be measured. The three-dimensional shape measuring apparatus according to claim 1, wherein the third mirrors are arranged in parallel. 4. The three-dimensional shape measurement according to claim 3, wherein the third mirror and the fourth mirror are dielectric multilayer film mirrors that substantially totally reflect the aiming light and the scattered light. apparatus. 5. A tilt detector for detecting its own posture state is provided, and the coordinate conversion means has a function of correcting the coordinate data in accordance with a signal of its own posture state input from the tilt detector. The three-dimensional shape measuring device according to claim 1, wherein 6. The three-dimensional structure according to claim 3, wherein the fourth mirror is tiltable about an axis in a direction orthogonal to the longitudinal direction of the first mirror. Shape measuring device.