JPH09217897A - Sf6 storing and feeding device, and storing and feeding methods thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily fill liquefied SF6 uniformly into a group of siphon containers by providing a 2-port container joint at the upper part of each container of a group of liquefied SF6 containers and also connecting a gaseous phase pipe to the gas outlet port of each 2-port container joint and a liquid phase pipe to a liquid outlet port. SOLUTION: In a portable SF6 storing and feeding device formed with, for example, 10 containers 4 as a set, the containers 4 are connected collectively to a liquid phase pipe 9 through a siphon pipe 7, the liquid outlet port 19 of a 2-port container joint 18, and a branch pipe 10, and a liquid outlet collecting valve 11 is installed at the middle part of the liquid phase pipe 9. Also the containers 4 are connected collectively to a liquid phase pipe 8 through the gas outlet port 20 of the 2-port container joint 18, and a gas outlet collecting valve 12 is installed at the middle part of the gaseous phase pipe 8. These pipes 8 and 9 are set at a cross sectional area larger than the sum of that of the branch pipe 10 provided on containers A to E or F to J, and reduce a pressure loss in the pipes 8 and 9 which occurs by the branch of liquefied gas from the branch pipe 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an SF ₆ storage and supply device, a storage method and a supply method thereof, and more particularly to a portable SF ₆ storage and supply device in which SF _{6 is} enclosed in a power receiving and transforming facility, and a storage method and a supply method thereof.

[0002]

2. Description of the Related Art As a conventional SF ₆ storage and supply device, a portable SF ₆ storage and supply device shown in FIG. 13 in which gas extraction containers are collectively connected, and a siphon type liquid extraction device shown in FIG. 14 are shown. An SF ₆ portable storage and supply device in which containers (hereinafter referred to as siphon containers) are collectively connected can be considered.

In the gas take-out type portable SF ₆ storage and supply device shown in FIG. 13, the vaporized SF ₆ gas is decompressed by the pressure regulator 5 and supplied to the consumption equipment. Reference numeral 1 in FIG.
In the liquid take-out type portable SF ₆ storage and supply device shown by 5, the liquefied gas is gasified into SF ₆ by the vaporization evaporator 6 and vaporized, and then the pressure is reduced by the pressure regulator 5 to supply SF ₆ to the consumption facility. In the SF ₆ storage and supply device shown in FIG. 13, the liquefied SF ₆ in the container is evaporated and vaporized by heat exchange between the outer wall of the container and the atmosphere, and the gas phase SF ₆ is taken out. Further, when the outside air temperature is low and the heat exchange between the outer wall of the container 4 and the atmosphere is insufficient and sufficient vaporized gas of SF ₆ cannot be obtained, the container is immersed in the warm water tank 13 to promote evaporation and vaporization of liquefied SF _6. Is used.

In a conventional SF ₆ gas filling operation for a power receiving and transforming facility, a portable SF ₆ storage and supply device shown in FIGS. 15 and 16 (usually a 10-piece container or a 12-piece container is used) is used. The SF ₆ gas is taken out, the pressure is reduced by a pressure regulator installed separately, and SF ₆ is supplied to the consumption equipment.

When a large amount of SF ₆ vaporized gas is supplied, a liquefied SF ₆ storage / supply device 15 having a siphon type container group 14 and a separately installed SF ₆ vaporizer / evaporator 6 are connected as shown in FIG. It is desirable to use the liquefaction SF _{6 for} each container from the liquid collection valve 11 to the siphon container group.
Since it is particularly difficult to fill an equal amount of the above at the same time and the filling work is time-consuming, the gas extraction container is often inverted to take out SF _6, and the SF ₆ storage and supply device for taking out liquid by a siphon type container group has been mostly used until now. Not not.

SF ₆ , LP gas, carbon dioxide gas, etc., easily become a liquefied gas at room temperature, and two phases, a vaporized gas phase and a liquefied liquid phase, coexist in the container, and the pressure is determined by the vapor pressure. , Oxygen, nitrogen, etc., the gas filling amount cannot be controlled by the pressure of the filling gas. Therefore, the filling gas amount is individually measured for each filling container by a weighing machine, and the filling amount of the liquefied gas is managed and filled. Regarding the metering and filling method, for example, there are those described in JP-A-1-40798 and JP-A-6-249399.

Further, there is a method described in Japanese Patent Application Laid-Open No. 62-141396 as a method for controlling the difference in the filling mass value of the liquefied gas in the simultaneous filling of the liquefied gas into a plurality of containers. The method is a method in which the filling back pressure of each filling container is controlled by the back pressure of the inert gas previously filled in the container. This method uses the back pressure of the inert gas for each container, so if the container is tumbled and filled with liquefied gas, or if the container is filled vertically, use a siphon type container and use a siphon type container after filling. It is necessary to invert and release the inert gas.

[0008]

Comparing the difficulty of filling the gas extraction container and the liquefied SF ₆ of the siphon container, the portable SF ₆ storage and supply device indicated by reference numeral 15 in FIG. Since the liquefied SF ₆ is sprayed and filled from the top of the container, the liquefied SF ₆ quickly evaporates in the container at the beginning of filling, and the container is rapidly cooled by this latent heat of vaporization, and the vapor pressure in the container causes the liquefied gas to be filled at the beginning of filling. It has the characteristic of being lower than the original pressure of. Further, also in the flow-in filling method using no filling pump shown in FIGS. 17 and 18, the gas extraction container 4 is cooled by the latent heat of vaporization at the time of filling the liquefied gas and filled in the container 4 as compared with the parent tank 16. Since the vapor pressure quickly decreases, the parent tank 16 and the filling container 4
A pressure difference occurs between them, and the container 4 can be filled with the liquefied SF ₆ relatively smoothly.

On the other hand, in the siphon type container, as shown in FIG. 18, since the liquefied gas is filled from the bottom of the container 4 by the siphon pipe 7, cooling by evaporative evaporation of liquefied SF ₆ in the container 4 is applied to the gas extraction container. It is slower than filling.
As a result, especially in the case of pouring and filling shown in FIG. 18, the difference in vapor pressure between the parent tank 16 and the filling container 4 is small, so that there is a drawback that the siphon type container is difficult to fill as compared with the gas extraction container.

According to a general pouring and filling method, the gas take-out container 4 shown in FIG. 17 can easily fill about 50 kg per container having an internal volume of 46.7 l even in summer, whereas the siphon container shown in FIG. Therefore, in the summer when the pressure difference between the parent tank 16 and the filling container 4 is unlikely to occur, and in particular in the summer when a large difference pressure of the invasion heat of outside air into the container cannot be secured, it is necessary to fill about 80% or more of 40 kg against the target filling amount of 50 kg. Can be difficult. Therefore, in general, for storing / supplying the liquefied SF ₆ , reference numeral 15 in FIG. 13 shows the gas extraction type portable SF ₆ storage / supply device (10-piece container or 12-piece set). Container etc.) is used.

Meanwhile, when supplying liquefied SF ₆ supplies a liquefied SF ₆ in a state obtained by inverting the gas dispenser. As shown in FIG. 19, when it is attempted to simultaneously fill SF ₆ from the parent tank 16 into the portable SF ₆ storage / supply device 15 constituted by a plurality of container groups through the gas extraction / collection valve 12, injection from the single-port container valve 3 is performed. Due to the liquefied SF ₆ thus produced, the inside of the container is in a liquid-sealed state, and the pressure generated in the container cannot be transferred to another container. As a result, in the container that is in a liquid-sealed state due to the liquefied gas, a slight difference in the heat capacity of the container and the pressure loss of the pipe causes a difference in the filling amount of the liquefied SF _{6 in} each container. The vapor pressure becomes different for each. This difference in vapor pressure gradually increases as the filling amount increases, and affects the filling pressure of the parent tank 16 as a filling back pressure. As a result, a larger amount of liquefied gas is preferentially injected in the order in which the degree of cooling is higher (the vapor pressure is lower) in the container. For example, the container A in the container group shown in FIG. Although the container is filled in excess of the legally regulated filling amount, which is less than about 90% of the volume, the B container, which has a slow cooling of the container due to insufficient liquefied gas injection at the beginning of filling and lack of latent heat of vaporization, is a container. 50 in volume
%, The filling amount of the liquefied SF ₆ varies from container to container. That is, in the liquefied SF ₆ , nitrogen,
Unlike filling of compressed gas such as oxygen, liquefied equivalent amount for each container at the same time as the set valve 12 in the state shown in FIG. 19 because it is affected by the vapor pressure of the liquefied gas in the container immediately after filling SF ₆
Has the drawback of being difficult to fill. Therefore, in order to uniformly fill the liquefied SF ₆ into the container group, the gas filling amount of each container is fed back by the weighing machine 17 or the like, and the filling amount of the liquefied gas is calculated one by one for each container in the container group. It is unavoidable to measure and fill the liquefied gas by opening and closing the container valve 3 attached to each container.

Further, as described above, it is difficult to fill the liquefied gas in the siphon type container as compared with the gas taking-out container, and even in the liquefied SF ₆ storage and supply device by the group of siphon type containers, the gas taking-out container is used. As with the filling of groups, it was difficult to fill containers at the same time in equal amounts.

As described above, the liquefied SF ₆ storage / supply device for liquefied SF ₆ by the conventional gas extraction type and siphon type container group is used.
In the filling of F ₆ , it is not considered to suppress the variation of the back pressure of the filling for each container constituting the liquefied SF ₆ storage and supply device and to make the pressure equal, and it is possible to make the filling amount of the liquefied SF ₆ equal. It was difficult.

Further, in the case of supplying a large amount of SF ₆ vaporized gas, it is indispensable to supply SF ₆ gas by a combination of the liquefied SF ₆ supply and the vaporization evaporator ₆ from the portable SF ₆ storage and supply device shown in FIG. There, the SF ₆ storage and supply device having a siphon container group for the supply of liquefied SF _6, a prerequisite to the liquefied SF ₆ to the SF ₆ storage and supply devices can be easily filled. Conventionally, with less gas extraction amount in accordance with the supply amount of SF _6, SF _6, storage and supply devices having a gas dispenser group without using a vaporizer evaporator, also having a large supply amount of SF ₆ gas amount It was necessary to separately manufacture and store a storage and supply device having a siphon container group capable of supplying liquefied SF ₆ in accordance with the supply form.

A first object of the present invention is to provide an SF ₆ storage and supply device and a storage method thereof which can easily and evenly fill the siphon container group with the liquefied SF ₆ amount.

A second object of the present invention is to provide an SF ₆ storage and supply device, a storage method and a supply method thereof, which has a function that combines the characteristics of the conventional gas extraction container group and the characteristics of the siphon type container group. is there.

A third object of the present invention is to easily liquefy a container group by operating the liquid collecting valve and the gas collecting valve without using an inert gas and without inclining and filling the container. An object of the present invention is to provide a portable SF ₆ storage and supply device that can be filled with SF ₆ in an equal amount and a storage method thereof.

[0018]

In order to achieve the above object, a portable SF ₆ storage and supply device of the present invention comprises a liquefied SF ₆ container group composed of a plurality of containers and an upper portion of each container. Attached two-port container joint, gas-phase pipe connected to the gas outlet of the two-port container joint, gas-extracting collecting valve provided in the gas-phase pipe, and liquid outlet of the two-port container joint And a liquid take-out collecting valve provided in the liquid phase pipe.

Further, by opening and closing the flow path by the liquid collecting valve and the gas collecting valve, the liquefied SF ₆ is charged into each container and the liquefied SF ₆ is supplied to the container group. Liquefied SF ₆ is taken out from the take-out collecting valve and vaporized SF ₆ is taken out from the gas taking-out collecting valve. Further, the gas-phase pipe and the liquid-phase pipe are formed in an annular shape. Further, the gas outlets are scattered and filled. Further, the liquid outlet is connected to a siphon tube extending toward the bottom of the container.

Further, the portable SF ₆ storage method is a liquefied SF ₆ container group composed of a plurality of containers, a two-port container joint attached to an upper part of each of the containers, and a gas of the two-port container joint. A gas-phase pipe connected to the outlet, a gas-collecting collecting valve provided on the gas-phase pipe, a liquid-phase pipe connected to the liquid outlet of the two-port container joint, and a liquid-phase pipe A portable SF ₆ storage and supply device provided with a liquid collecting and collecting valve and a parent tank are connected to each other, and after evacuating each container, liquefied SF ₆ is collected from the mother tank SF ₆ is filled in each of the containers via

Further, the liquid outlet is connected to a siphon tube extending toward the bottom of the container, and the liquefied SF ₆ is injected to the tip of the siphon tube. Further, each container is filled with SF ₆ through the liquid collecting valve and the liquid phase pipe, and vaporized SF ₆ is taken out from the gas outlet.

[0022] Further, portable SF ₆ supply method, connecting via a plurality gas extraction set valve the friendly transportable SF ₆ storage and supply devices SF _6, which is stored by being a SF ₆ storage method according to claim 6 In addition, it is characterized in that a vaporization evaporator is further connected and supplied.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the portable SF ₆ storage and supply device of the present invention will be described with reference to FIGS. 1 to 8. FIG.
Plan view showing an example of a 10 pcs container portable SF ₆ storage and supply device in the present embodiment, FIG. 2, transportable embodiment SF ₆
FIG. 3 is a system diagram of a storage / supply device, FIG. 3 is a system diagram of a two-port container joint and gas-phase / liquid-phase piping connection of this embodiment, and FIG.
FIG. 5 is a plan view of the mouth container joint, FIG. 5 is a cross-sectional view of the two-neck container joint viewed from the direction AA in FIG. 4, and FIG.
Sectional view of the two-port container joint viewed from the direction B, FIG. 7 is a front view of the two-port container joint with a flow path opening / closing valve, and FIG. 8 is a pouring into a portable SF ₆ storage and supply device (10-piece container example). It is a filling system diagram.

As shown in FIGS. 1, 2 and 3, in the portable SF ₆ storage and supply device of this embodiment, each container 4 includes a siphon pipe 7, a liquid outlet 19 of a two-port container joint, and a branch pipe. A liquid take-out collecting valve 11 is attached to an intermediate portion of the liquid-phase pipe 9 through which the liquid-phase pipe 9 is collectively connected. Further, each container 4 is collectively connected to the gas phase pipe 8 via the gas outlet 20 and the branch pipe 10 of the two-port container joint at the top, and the gas outlet collecting valve 12 is attached to the middle portion of the gas phase pipe. Has been.

As shown in FIGS. 4 to 7, the two-port container joint for connecting the container group constituting the portable SF ₆ storage and supply device has a structure that can be screwed and attached to the top of the container. It has a liquid outlet 19 for a two-port container joint and a gas outlet 20 for a two-port container joint. As shown in FIG. 3, the liquid outlet 19 of the two-port container joint is connected to the siphon pipe 7 extending to the bottom of the container, so that liquefied SF ₆ can be filled and supplied from the bottom of the container. There is. The end of the gas outlet 20 of the two-necked container joint is located at the top of the container, and when the liquefied SF ₆ is filled, the liquefied SF ₆ can be dispersed from the top of the container into the container.
Therefore, the sprayed liquefied SF ₆ promotes evaporation and vaporization, and the inside of the container can be cooled.

Further, in the portable SF ₆ storage and supply device shown in FIG. 2, the gas-phase pipe 8 and the liquid-phase pipe 9 are composed of containers (A) to (E).
Alternatively, the gas-phase pipe 8 and the liquid-phase pipe 9 have a cross-sectional area larger than the sum of the cross-sectional areas of the branch pipe 10 of (F) to (J), and are generated by branching of the liquefied gas from the branch pipe 10. The pressure loss of is reduced. Therefore, the liquid-phase pipe 9 and the gas-phase pipe 8 are not only connected for extracting gas between the containers, but also the containers 4 generated between the containers when the liquefied SF ₆ is filled and supplied.
It has a structure that effectively reduces variations in back pressure between.

A method of pouring and filling a portable SF ₆ storage and supply device will be described with reference to FIG. 8 by taking the 10-piece container shown in FIG. 2 as an example. In the system diagram shown in Figure 8, connecting the liquid extraction set valve 11 and the gas extraction collection valve 12 of the portable SF ₆ storage and supply devices shown in the parent tank 16 and 2 of SF _6. Similarly, the other gas collection valve 12 is connected to a vacuum pump 22 for exhausting air and impure gas in the container group. In the portable SF ₆ storage and supply device shown in FIG. 2, a vacuum pump 22 is provided via a gas phase pipe 8 and a gas collection valve 12.
At the time of exhausting at SF ₆ parent tank 16, liquid collection valve 1
1, SF ₆ gas can be injected into the container 4 group through the liquid phase pipe 9. The injected SF ₆ forms a gas cleaning flow from the bottom of the container 4 to the top of the container in the container, so that the structure can effectively clean the impure gas and the like in the container. In pouring the filling of the liquefied SF ₆ to portable SF ₆ storage and supply devices indicated by the reference numeral 15 in FIG. 8 from SF ₆ parent tank 16 shown in FIG. 8, the pressure of the liquefied SF ₆ in SF ₆ parent tank 16 and the atmospheric temperature Because they are in equilibrium,
Liquefied SF _{6 in} the container 4 group of the portable SF ₆ storage and supply device 15
In order to refill the container, it is necessary to lower the container temperature of the container 4 group or lower the pressure in the container of the container 4 group. In the portable SF ₆ storage and supply device indicated by reference numeral 15 in FIG. 8, liquefied SF ₆ can be sprayed and filled from the top of the container via the gas extraction and collection valve 12, and the evaporation and vaporization of the liquefied SF ₆ is promoted in the container. Therefore, it has a function of promptly lowering the container temperature.

When it is difficult to transfer and refill liquefied SF ₆ due to an equalized pressure between the SF ₆ parent tank 16 and the container 4 group during the filling of the container 4 group from the liquid take-out collecting valve 11. However, when the vaporized SF ₆ is exhausted from the gas extraction collecting valve 12 while the liquefied SF _{6 is being} filled, the cooling operation inside the container is SF ₆
It has a structure that can be done during filling. By this exhaust operation, the temperature inside the container can be lowered and the filling speed can be accelerated without being affected by the outside air temperature even in the summer when the heat invasion into the container 4 group is large.

As described above, in the portable SF ₆ storage and supply device of this embodiment, only by opening / closing the flow path of the liquid take-out collecting valve 11, the liquid take-out and collection can be performed by the pressure equalizing action of the containers 4 of the gas phase pipe 8. containers from joint 11 (a) ~ (J) can evenly fill amount of the liquefied SF ₆ during the liquefaction SF ₆ filled similarly in a container (a) ~ (J) can be uniformly quantity extraction feed.

Further, when the liquefied SF ₆ is filled up between the bottom of the container 4 and the end of the siphon pipe 7 only by opening / closing the flow path of the gas extraction / collection valve 12, the container 4 group from the liquid phase pipe 9 is filled. Due to the pressure equalizing action, it is possible to spray and fill an equal amount of liquefied SF ₆ from the gas outlet 20 of the two-neck container joint between the containers (A) to (J). Similarly, the vaporized SF ₆ can be taken out and supplied from the vapor phase portion of the liquefied gas filled in the containers (A) to (J) by opening / closing the flow path of only the gas take-out collecting valve 12.

Therefore, in the portable SF ₆ storage and supply device of this embodiment, the liquefied SF ₆ can be arbitrarily liquefied by only opening and closing the flow path of the liquid collecting valve 11 or the gas collecting valve 12 shown in FIG.
The vaporized SF ₆ can be filled and taken out and supplied.

This will be described in more detail in comparison with the conventional device. First, a conventional filling method of a portable SF ₆ storage and supply device will be described with reference to FIG. SF ₆
Liquefied SF ₆ indicated by reference numeral 1 is taken from the parent tank 16 from the gas collection valve 12 through the vapor phase pipe 8 and the one-port container valve is fully opened to fill each container. At this time, liquefied SF
₆ is injected from the top of the container, but the difference in the latent heat of vaporization due to the variation in the initial injection amount of liquefied SF ₆ is continued as the container back pressure until the end of filling. As a result, the liquefied SF ₆ could not be put into each container evenly, and the containers (A) to (J)
In between, as shown in Table 1 as filling method (a), container 1
With respect to the target filling amount of 50 kg, it was found that the variation of the filling amount was 42% at maximum.

[0033]

[Table 1]

Next, the effect of filling a uniform amount per container when using the portable SF ₆ storage and supply device of this embodiment is liquefied SF ₆
This will be described with reference to FIG. In order to measure the filling amount of SF ₆ in the container 4 in the test, as shown in FIG.
A two-port container joint with a passage opening / closing valve shown in FIG. 7 with a modified SF ₆ passage opening / closing valve was used. The flow passage opening / closing valve shown in FIG. 5 is used by fully opening the flow passage opening / closing handle 23 during use, and is used by closing the flow passage opening / closing handle 23 only at the time of measurement for confirmation test of SF ₆ filling amount. There is. Figure 7
The flow path of the two-port container joint of the flow-path on-off valve shown in (5) is fully opened, and the function and the test result are the same as those of the two-port container joint shown in FIG.

First, the valves 11 and 12 of the system diagram shown in FIG.
After closing 24, 25, 26, 27, the vacuum exhaust valve 2
4. The liquid collection valve 11 is opened, and the impure gas in the container 4 group is exhausted by the vacuum pump 22. Then the vacuum exhaust valve 2
4. Close the liquid collection valve 11. After opening the liquid take-out valves 25 and 26 of the parent tank, the gas take-out collecting valve 12 is opened to make the container groups (A) to (J) from the top of the containers to the liquid surface of the tip of the siphon pipe 7 liquefied SF. Inject ₆ . After closing the parent tank liquid take-out valve 26, the liquid take-out collection valve 11 was immediately used to measure the target filling amount with the weighing machine 17, and the liquefied SF ₆ was injected into the container 4 group.

As a result of this test, the liquefied SF ₆ filled from the liquid phase pipe 9 through the siphon pipe 7 has the variation in the back pressure between the containers 4 improved by the gas phase pipe 8 and the simultaneous filling in Table 1 is performed. As shown in (b), the error was within 9% at maximum with respect to the target filling amount of 50 kg per container between the containers (A) to (J).

Next, two portable SF ₆ storage and supply devices shown in FIG. 2 were used, the gas take-out collecting valve 12 was connected, and the liquid take-out collecting valve 11 was connected to the vaporization evaporator 6 to obtain 80 m ³
SF _{6 of} / Hr was supplied. As a result of this test, in both of the two portable liquefied SF ₆ storage and supply devices 15, the liquefied SF ₆ in the container 4 was uniformly supplied and consumed. By connecting a plurality of portable SF ₆ storage and supply devices by this supply method,
It was possible to stably and continuously supply SF ₆ gas of 40 m ³ / Hr or more per portable SF ₆ storage and supply device without being influenced by the outside temperature.

Another embodiment of the portable SF ₆ storage and supply device of the present invention will be described with reference to FIGS. 9 to 12. FIG. 8 is a plan view of the portable SF ₆ storage and supply device (example of 10-piece container) of this embodiment, FIG. 10 is a system diagram of the portable SF ₆ storage and supply device of this embodiment, and FIG. portable SF ₆ flow diagram poured into storage and supply device of the embodiment, FIG. 12 is a system diagram of a large-capacity gas supply method according portable SF ₆ gas storage and supply devices and the vaporization evaporator of the present embodiment.

As shown in FIG. 9, the portable SF of this embodiment
_{In the 6-} storage supply device, the gas-phase pipe 8 and the liquid-phase pipe 9 connected from the two-port container joint 18 through the branch pipe 10 each have an annular pipe structure without a pipe end. Further, the liquid take-out collecting valve 11 and the gas take-out collecting valve 12 are divided into intermediate positions of the annular pipe, and one of them is attached in total for a total of two. In the straight line piping shown in FIG. 2, the outlet of the liquid collection valve 11 is branched left and right into containers (A) to (E) and containers (F) to (J). In this straight line, liquefied SF
_{Since the 6} branches are not evenly distributed to the left and right, the filling amount may vary from side to side. Gas phase piping 8 shown in FIG.
In the annular pipe of the liquid phase pipe 9, since the flow rate variation of the liquefied SF ₆ branched to the left and right is complemented by the annularization,
A more uniform amount of SF ₆ can be filled in each container 4.

[0040] The pouring filling method to the portable SF ₆ storage and supply device of the present embodiment is as shown in FIG. 11, poured into portable SF ₆ storage and supply apparatus shown in FIG. 2 described in FIG. 8 The same as the filling method, but using the portable SF ₆ storage and supply device, the filling effect of the average amount per container is liquefied SF.
_This will be described with reference to FIG. 11, which is a filling system diagram of No. ₆ .

In the test, in order to measure the filling amount of SF ₆ in the container 4, with the passage opening / closing valve shown in FIG. 7 with the SF ₆ passage opening / closing valve modified from the two-neck container joint of FIG. A two-necked container joint was used. Again, the flow channel opening and closing valve of Figure 5, in use is used by the channel opening and closing handle 23 is fully opened, SF ₆
Since the flow path opening / closing handle 23 is closed and used only at the time of measurement for the confirmation test of the filling amount, the flow path of the 2-port container joint with the flow path opening / closing valve in FIG. 7 is fully opened. The function and the test result are the same as those of the two-neck container joint of FIG.

First, the valves 25 and 1 shown in the system diagram of FIG.
After completely closing Nos. 2 and 11, the vacuum exhaust valve 24, the vacuum pump and the gas collection valve 12 connected to the vacuum pump were opened, and the impure gas in the container 4 group was exhausted by the vacuum pump 22. Then, the vacuum exhaust valve 24 is closed. Next, after opening the liquid withdrawing valve 25 of the parent tank, the gas withdrawing collecting valve 12 connected to the parent tank is opened to open the container groups (A) to
In (J), liquefied SF ₆ is injected from the top of the container to the liquid surface at the tip of the siphon tube 7. After closing the gas take-out collecting valve 12 connected to the parent tank, the liquid take-out collecting valve 11 is immediately used to measure the target filling value with the weighing meter 17, and the liquefaction S
F ₆ was injected into 4 groups of containers. The liquefied SF ₆ filled from the liquid-phase pipe 9 through the siphon pipe 7 has a ring-shaped gas-phase pipe 8 to reduce the variation in the back pressure between the containers 4 and the containers (A) to (J). As shown in the simultaneous filling (C) in Table 1, the maximum amount is 6 for each 50 kg target filling amount.
I was able to make an error within%.

Next, in order to check the stability of supply, FIG.
As shown in Fig. 9, the gas take-out collecting valve 12 is connected by using the two portable SF ₆ storage and supplying devices shown in Fig. 9, and the liquid take-out collecting valve 11 is connected to the vaporization evaporator 6 to obtain an Sm of 80 m ³ / Hr.
F ₆ supply was made. The results of the test, two portable SF ₆
In both the storage and supply device 15, the liquefied SF ₆ in the container 4 was uniformly supplied and consumed. By connecting a plurality of portable SF ₆ storage / supply devices by this supply method, a stable continuous supply of 40 m ³ / Hr or more SF ₆ gas per portable SF ₆ storage / supply device is not affected by the outside temperature. You can

Next, the portable SF ₆ gas storage and supply device (1
A case of supplying a large volume of gas by a vaporization evaporator (example of 0 set container) will be described with reference to FIG.

In the case of supplying a large amount of SF ₆ , the container 4 which constitutes the portable SF ₆ storage facility shown by reference numeral 15 in FIG.
It is desirable to supply a reasonable and uniform amount of liquefied SF ₆ to the vaporization evaporator every time. Further, in order not to disturb the impurities and the like mixed in the container 4 and settled at the bottom of the container, it is desirable to control the supply amount of each container 4 to 10 m ³ / Hr or less.

In the SF ₆ supply equipment shown in FIG.
Two portable SF ₆ storage and supply devices 15 shown at 15
The liquid collecting valve 11 is connected to the vaporization evaporator 6.
Also, by connecting the gas extraction set valve 12 of the two portable liquefied SF ₆ storage and supply devices 15 in connection pipe, all containers of the two portable liquefied SF ₆ storage and supply device 15 4
The internal pressure of the group can be made uniform. As a result, the pushing pressure of the liquefied SF ₆ to the siphon tube in each container 4 becomes constant,
The liquefaction supply amount for each container in the portable liquefaction SF ₆ storage and supply device 15 can also be controlled to a constant value only by adjusting the total amount of the liquefaction SF ₆ supply amount from the liquefaction collecting valve 11. Therefore, only by adjusting the supply amount of vaporized SF ₆ by the pressure regulator attached to the end of the equipment, the liquefaction S of each container 4 can be adjusted.
The structure is such that the supply amount of F ₆ can also be controlled.

In the embodiment shown in FIG. 12, the vaporization evaporator 6 and the portable SF ₆ storage and supply device are connected to two units, but the vaporization evaporator 6 and the portable liquefied SF ₆ storage and supply device 1 are connected.
By increasing the number of valves connected to 5, more than one portable SF ₆ storage and supply device can be used.

This will be described with reference to FIG. 11 for a method of filling a container group with a liquefied SF ₆ of a uniform amount using a portable SF ₆ storage and supply device.

In the equipment of the system shown in FIG. 11, the portable liquefied SF ₆ storage and supply device 15 is filled with the liquefied SF ₆ by pouring it from the SF ₆ parent tank 16. First, the valves 25, 12, 11, and 24 shown in FIG. 11 are fully closed. Next, the gas extraction collective valve 12 and the vacuum exhaust valve 24 connected to the vacuum pump 22 are opened and the vacuum pump 22 transports the liquefied SF ₆ gas.
After exhausting the impure gas in the storage supply device 15, the gas extraction collecting valve 12 connected to the vacuum pump is closed. SF
_The parent tank liquid withdrawing valve 25 and the gas withdrawing collecting valve 12 connected to the _6th parent tank 16 are opened, and liquefied SF ₆ is spray-filled from the top of the container to the container 4 group via the gas phase pipe 8. At this point of time when the liquefied SF ₆ is spray-filled through the gas phase pipe 8,
Within the range of 50 to 150 mm above the bottom of the container 4, the liquid phase pipe 9 having a siphon pipe adjusted to a constant height for each container 4 equalizes the back pressure filled in the container.

The results liquefied SF ₆ from the container top part is uniformly spread, each container by evaporation latent heat of the liquefied SF ₆ is cooled uniformly, injection of equivalent amount of the liquefied SF ₆ into the container 4 groups has facilitated It was When the liquefied SF ₆ was filled up to the level of the siphon tube 7 at the bottom of the container, the gas extraction collecting valve 12 connected to the SF ₆ parent tank 16 was immediately closed, and then SF ₆
The liquid take-out collecting valve 11 connected to the parent tank 16 is opened and the container 4 group is liquefied by the liquid phase pipe 9 and the siphon pipe SF ₆
Was injected. At this point, the vaporized SF ₆ indicated by reference numeral 2 in the vapor phase portion in the container has a uniform back pressure of the liquefied SF ₆ between the containers because the group of containers 4 are connected by the vapor phase pipe 8. , Each container can be filled with an equal amount of liquefied SF ₆ .

In this test, in order to measure the amount of SF ₆ in the container after the test, the portion of the two-port container joint in FIG. 5 was replaced with the two-port container joint with the flow path opening / closing valve shown in FIG. Only the flow path was closed. During the test, the flow path of the 2-port container joint with the flow channel opening / closing valve was fully opened, and the functional and test results were the same as when using the 2-port container joint in Fig. 5. In this filling method, simultaneous filling of Table 1 was performed. As shown in (C), with respect to the target liquefied gas filling amount of 50 kg per container, the maximum error is within 6%, and each container 4
Both could be filled within the legally limited filling amount of 51.3 kg. As described above, the liquefied SF ₆ can be filled only by controlling the total filling amount by the weighing machine 17, without individually managing the filling amount in the container in the portable SF ₆ storage and supply device for each container by opening and closing the container valve. .

[0052]

As described above, according to the present invention,
Extraction of liquefied gas Even when it becomes difficult to transfer liquefied SF ₆ due to pressure equalization between the parent tank and container group during filling from the collecting valve to the container group, gas extraction during liquefied SF ₆ filling By discharging the vaporized SF ₆ from the collecting valve, the cooling operation inside the container can be performed during the filling of SF ₆ , so the temperature inside the container can be lowered without being affected by the outside air temperature even in the summer when the heat invasion into the container group is large. The filling speed can be accelerated.

Further, by opening / closing the flow path of the liquid take-out collecting valve, an equal amount of liquefied SF ₆ can be filled between the liquid take-out collecting valve and the containers by the pressure equalizing action of the group of containers of the vapor phase pipes. An equal amount of the liquefied SF ₆ charged can be taken out and supplied.

Further, in the liquefied SF ₆ filled from the liquid phase pipe through the siphon pipe, the variation of the filling back pressure between the containers is improved by the gas phase pipe, and the target filling amount of each container between the containers is reduced. The error can be within 9% or 6% at maximum.

[0055] Also, by connecting a plurality portable SF ₆ storage and supply devices, portable SF ₆ storage and supply devices one per S
Stable and continuous supply of F ₆ gas is possible without being affected by the outside temperature.

In addition, the liquefied SF _{6 is} stored only in the portable SF ₆ storage and supply device by controlling the total filling amount by a weighing meter, without individually controlling the filling amount in each container by opening and closing the container valve.
Can be filled.

[Brief description of drawings]

FIG. 1 is a plan view (example of 10-piece container) of a portable SF ₆ storage and supply device according to an embodiment of the present invention.

FIG. 2 is a system diagram of a portable SF ₆ storage and supply device (example of 10-piece container) of the present embodiment.

FIG. 3 is a system diagram of a two-port container joint and gas-phase / liquid-phase piping connection of the present embodiment.

FIG. 4 is a plan view of the two-port container joint according to the present embodiment.

5 is a cross-sectional view of the two-port container joint seen from the direction of arrow AA in FIG.

6 is a cross-sectional view of the two-port container joint viewed from the direction of arrows BB in FIG.

FIG. 7 is a front view of a two-port container joint with a flow path opening / closing valve.

FIG. 8 is a system diagram of pouring and filling into a portable SF ₆ storage and supply device (an example of a set of 10 containers).

FIG. 9 is a plan view of a portable SF ₆ storage and supply device (an example of 10-piece container) according to another embodiment of the present invention.

FIG. 10 is a system diagram of a portable SF ₆ storage and supply device of this embodiment.

FIG. 11 is a flow system diagram of the portable SF ₆ storage and supply device of the present embodiment.

FIG. 12 is a system diagram of a large-capacity gas supply method using a portable SF ₆ gas storage / supply device and a vaporization evaporator of this embodiment.

FIG. 13 is a system diagram of a gas take-out portable SF ₆ storage and supply device (an example of a four-piece container) and an SF ₆ supply method.

FIG. 14 is a system diagram of a liquid takeout portable SF ₆ storage and supply device (an example of a four-piece container) and an SF ₆ supply method.

FIG. 15 is a plan view of a conventional portable SF ₆ storage and supply device (an example of a 10-piece container).

FIG. 16 is a system diagram of a conventional portable SF ₆ storage and supply device (example of 10-piece container).

FIG. 17 is a liquefied SF ₆ filling system diagram of the gas extraction SF ₆ container (an example of a two-piece container).

FIG. 18 is a liquefied SF ₆ filling system diagram of a siphon type SF ₆ container (an example of a two-piece container).

FIG. 19 is a system diagram of simultaneous SF ₆ filling from a parent tank to a plurality of container groups (an example of a set of 10 containers).

[Explanation of symbols]

1 ... Liquefied SF ₆ , 2 ... Vaporization SF ₆ , 3 ... 1-port container valve, 4
... Vessel, 5 ... Pressure regulator, 6 ... Evaporative evaporator, 7 ... Siphon tube, 8 ... Gas phase piping, 9 ... Liquid phase piping, 10 ... Branch tube, 11
... liquid take-out collecting valve, 12 ... gas take-out collecting valve, 13 ... hot water tank, 14 ... container group, 15 ... portable liquefied SF ₆ storage and supply device, 16 ... SF ₆ parent tank, 17 ... filling amount measuring scale, 18 ... 2-port container joint, 19 ... Liquid outlet of 2-port container joint, 20 ... Gas outlet of 2-port container joint, 21 ... Storage stand, 22 ... Vacuum pump, 23 ... Flow path opening / closing handle, 2
4 ... Vacuum exhaust valve, 25, 26 ... Parent tank liquid extraction valve, 2
7 ... Gas recovery valve.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Osamu Higuchi 1-1-1 Kokubuncho, Hitachi City, Ibaraki Prefecture Kokubun Plant, Hitachi, Ltd. (72) Inventor Fukuo Fujiwara 1-1, Kokubuncho, Hitachi City, Ibaraki Prefecture No. 1 Inside the Kokubun Plant of Hitachi, Ltd. (72) Inventor Shinji Watanabe 3-17-1 Kokubuncho, Hitachi City, Ibaraki Hitachi Oxygen Co., Ltd.

Claims (9)

[Claims] 1. A liquefied SF ₆ composed of a plurality of vessels.
Container group, two-port container joint attached to each upper part of the container, gas-phase pipe connected to a gas outlet of the two-port container joint, and gas-collecting collecting valve provided in the gas-phase pipe A portable SF ₆ storage and supply device comprising: a liquid phase pipe connected to the liquid discharge port of the two-port container joint; and a liquid discharge collecting valve provided in the liquid phase pipe. 2. A liquefied SF for each container by opening and closing a flow path by the liquid collecting valve and the gas collecting valve.
₆ and filling of the liquid taken out liquefied SF ₆ than the set valve, the gas extraction set valve taking a vaporized SF ₆ from claims portable SF ₆ according to 1 in the supply of liquefied SF ₆ filled in the container group Storage and supply device. 3. The portable SF ₆ storage and supply device according to claim 1, wherein the vapor phase pipe and the liquid phase pipe are formed in an annular shape. 4. The portable SF ₆ storage and supply device according to claim 1, wherein the gas outlets are scattered and filled. 5. The portable SF ₆ storage and supply device according to claim 1, wherein the liquid outlet is connected to a siphon pipe extending toward the bottom of the container. _{6. A} liquefied SF ₆ composed of a plurality of vessels.
Container group, two-port container joint attached to each upper part of the container, gas-phase pipe connected to a gas outlet of the two-port container joint, and gas-collecting collecting valve provided in the gas-phase pipe And a liquid SF pipe connected to the liquid outlet of the two-port container joint, and a portable SF ₆ storage and supply device provided with a liquid outlet collecting valve provided in the liquid pipe, and the parent tank are connected to each other. ,
After evacuating each of the containers, liquefying S from the parent tank
The F ₆ the liquid extraction set valve, portable SF ₆ storage method characterized by filling the SF ₆ to the respective container through the liquid phase pipe. 7. The method according to claim 6, wherein the liquid outlet is connected to a siphon pipe extending toward the bottom of the container, and the liquefied SF ₆ is injected up to the tip of the siphon pipe. Portable SF ₆ storage method. 8. The portable SF according to claim ₆ , wherein SF ₆ is filled in each of the containers through the liquid take-out collecting valve and the liquid phase pipe, and vaporized SF ₆ is taken out from the gas take-out port.
₆ Storage method. 9. linked via a plurality gas extraction set valve the friendly transportable SF ₆ storage and supply devices SF _6, stored by SF ₆ storage method according to claim 6, further connects the vaporizer evaporator Portable SF characterized by being supplied as
₆ Supply method.