CN207362103U - The preparation facilities of high-purity octafluorocyclobutane - Google Patents
The preparation facilities of high-purity octafluorocyclobutane Download PDFInfo
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- CN207362103U CN207362103U CN201721376052.4U CN201721376052U CN207362103U CN 207362103 U CN207362103 U CN 207362103U CN 201721376052 U CN201721376052 U CN 201721376052U CN 207362103 U CN207362103 U CN 207362103U
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Abstract
The utility model discloses a kind of preparation facilities of high-purity octafluorocyclobutane, including raw material storage tanks, drier, pre- cool condenser, rectifying tower body, main condenser, reboiler, product holding vessel, on-line analysis equipment and electric-control system, raw material storage tanks are connected with drier, drier is connected with pre- cool condenser, pre- cool condenser is connected with rectifying tower body, rectifying tower body is connected with main condenser and reboiler respectively, main condenser is connected through the first valve with the liquid-phase reflux mouth of rectifying tower body, main condenser is connected through the second valve with product holding vessel, the gaseous phase outlet of reboiler is connected with the gas phase refluxing opening of rectifying tower body.You, recycles weight component while electron level octafluorocyclobutane is made.
Description
Technical field
It the utility model is related to octafluorocyclobutane purification field, and in particular to a kind of preparation dress of high-purity octafluorocyclobutane
Put.
Background technology
Electron level octafluorocyclobutane is used as etching or clean gas in the production technology such as semiconductor, so as to by CVD method,
The film or thick film that sputtering method or gas-phase deposition method obtain form circuit pattern, can also substitute the hybrid refrigeration of CFC-12
Agent, stablize nontoxic medicine aerosol propellant, food aerosol propellant, dielectric gas.
As the performance higher of electronics or electrical equipment, smaller, winding density higher trend, circuit pattern become
It is thinner, and high-precision circuit pattern is obtained, the purity requirement to octafluorocyclobutane is also higher and higher.
The content of the invention
The purpose of this utility model is to provide a kind of preparation for the high-purity octafluorocyclobutane for preparing electron level octafluorocyclobutane
Device.
To reach above-mentioned purpose, the technical solution adopted in the utility model is：A kind of preparation dress of high-purity octafluorocyclobutane
Put, including it is raw material storage tanks, drier, pre- cool condenser, rectifying tower body, main condenser, reboiler, product holding vessel, online
Analytical equipment and electric-control system,
The raw material storage tanks are connected with the gas phase entrance of the drier；
The gaseous phase outlet of the drier is connected with the gas phase entrance of the pre- cool condenser；
The liquid-phase outlet of the pre- cool condenser is connected with the liquid phase entrance of the rectifying tower body；
The gaseous phase outlet and liquid-phase outlet of the rectifying tower body respectively with the gas phase entrance of the main condenser and it is described again
Boil the liquid-phase outlet connection of device；
The liquid-phase outlet of the main condenser is connected through the first valve with the liquid-phase reflux mouth of the rectifying tower body, the master
The liquid-phase outlet of condenser is also connected through the second valve with the product holding vessel；
The gaseous phase outlet of the reboiler is connected with the gas phase refluxing opening of the rectifying tower body；
The on-line analysis equipment is arranged on the liquid-phase outlet outlet side of the main condenser and is arranged on described first, two valves
Input side；
The input terminal of the electric-control system and the on-line analysis device talk, the output terminal of the electric-control system with it is described
First, the communication of two valves.
In above-mentioned technical proposal, the main condenser is arranged at the top of the rectifying tower body, and the reboiler is arranged on the essence
Evaporate tower body bottom.
In above-mentioned technical proposal, the gaseous phase outlet and liquid-phase reflux mouth of the rectifying tower body are same port, the rectifying
The liquid-phase outlet and gas phase refluxing opening of tower body are same port.
In above-mentioned technical proposal, the filler in the rectifying tower body is wire mesh packing.
In above-mentioned technical proposal, liquid receipts are equipped with below the liquid phase entrance of the rectifying tower body and below liquid-phase reflux mouth
Storage, the lower section of the liquid header are equipped with liquid distribution trough.
In above-mentioned technical proposal, the liquid header is circumferentially laid with air admission hole in cone cylinder shape, its side wall is inverted.
In above-mentioned technical proposal, the liquid distribution trough includes bottom plate, the barrel on the bottom plate and arranged on institute
State on the inside of barrel and through the water distributor of the bottom plate, the upper end of the water distributor is less than the upper end of the barrel, the water distribution
The bottom of the bottom plate is stretched out in the lower end of pipe, and the lower face of the water distributor is the slope towards the bottom plate center.
In above-mentioned technical proposal, the on-line analysis equipment is industrial chromatograph.
In above-mentioned technical proposal, the product holding vessel is additionally provided with emptying outlet, and the product holding vessel is additionally provided with liquid level
Meter.
In above-mentioned technical proposal, the outlet of the product holding vessel connects steel cylinder by cryogenic liquid pump.
Since above-mentioned technical proposal is used, the utility model has following advantages：
1）The preparation facilities of high-purity octafluorocyclobutane disclosed in the utility model, raw material are more than 99.9% octafluorocyclobutane
Liquid, air supply system is used as T bottles by 930L, and the gas after vaporizer vaporizes, enters drier after pressure reducing valve depressurizes, will
Most of moisture removes, and enter the lighter component such as rectifying column rectifying, N2, O2, CO2, CH4 by filter arranges from tower top main condenser
Go out, product is returned in liquid from tower top main condenser partly enters product holding vessel, and finished product steel cylinder is filled into through low temperature pressure differential method.Fill
After, carry out after finished product detection qualification can warehouse entry storage, the purity of product can reach 99.999%；
2）The preparation facilities of high-purity octafluorocyclobutane disclosed in the utility model, main condenser are arranged at the top of rectifying tower body,
Reboiler is arranged on rectifying tower body bottom, it is possible to achieve the liquid phase natural back flow of main condenser and the dead weight feed liquor of rectifying tower body；
3）The preparation facilities of high-purity octafluorocyclobutane disclosed in the utility model, liquid header are in be inverted cone cylinder shape, its
Side wall is circumferentially laid with air admission hole, it is possible to achieve the mixing of liquid and gas；
4）The preparation facilities of high-purity octafluorocyclobutane disclosed in the utility model, product holding vessel are additionally provided with emptying outlet,
The pressure in product holding vessel can be reduced, product holding vessel is additionally provided with liquid level gauge, can monitor the liquid of product holding vessel in time
Position.
Brief description of the drawings
Fig. 1 is the structure diagram of the preparation facilities of high-purity octafluorocyclobutane disclosed in the utility model.
Fig. 2 is the control block diagram of the utility model.
Fig. 3 is the main structure diagram of liquid header disclosed in the utility model.
Fig. 4 is the main structure diagram of liquid distribution trough disclosed in the utility model.
Wherein：1st, raw material storage tanks；2nd, drier；3rd, pre- cool condenser；4th, rectifying tower body；41st, liquid header；411
Air admission hole；42nd, liquid distribution trough；421st, bottom plate；422nd, barrel；423rd, gas distribution pipe；5th, main condenser；6th, reboiler；7th, product
Holding vessel；10th, on-line analysis equipment；11st, electric-control system；12nd, the first valve；13rd, the second valve.
Embodiment
The utility model is further described with reference to accompanying drawings and embodiments：
Embodiment one
Referring to Fig. 1 to Fig. 4, as shown in legend therein, a kind of preparation facilities of high-purity octafluorocyclobutane, including raw material store up
Deposit tank 1, drier 2, pre- cool condenser 3, rectifying tower body 4, main condenser 5, reboiler 6, product holding vessel 7, on-line analysis are set
Standby 10 and electric-control system 11,
Raw material storage tanks 1 are connected with the gas phase entrance of drier 2；
The gaseous phase outlet of drier 2 is connected with the gas phase entrance of pre- cool condenser 3；
The liquid-phase outlet of pre- cool condenser 3 is connected with the liquid phase entrance of rectifying tower body 4；
The gaseous phase outlet and liquid-phase outlet of rectifying tower body 4 respectively with the gas phase entrance of main condenser 5 and the liquid phase of reboiler 6
Outlet；
The liquid-phase outlet of main condenser 5 is connected through the first valve 12 with the liquid-phase reflux mouth of rectifying tower body 4, main condenser 5
Liquid-phase outlet also connected through the second valve 13 with product holding vessel 7；
The gaseous phase outlet of reboiler 6 is connected with the gas phase refluxing opening of rectifying tower body 4；
Above-mentioned on-line analysis equipment is arranged on the liquid-phase outlet outlet side of main condenser 5 and arranged on first, two valves 12,13
Input side；
The input terminal of above-mentioned electric-control system and above-mentioned on-line analysis device talk, the output terminal of above-mentioned electric-control system with it is above-mentioned
First, the communication of two valves.
Raw material is more than 99.9% octafluorocyclobutane liquid, and the feed vaporization in raw material storage tanks 1 is gas, through pressure reducing valve
Enter drier 2 after decompression, most of moisture is removed, into lighter components such as 4 rectifying of rectifying column, N2, O2, CO2, CH4 from tower
Top main condenser 5 is discharged, and product is returned from tower top main condenser 5 partly enters product holding vessel 7 in liquid, filled through low temperature pressure differential method
To finished product steel cylinder.After filling, carry out after finished product detection qualification can warehouse entry storage, the purity of product can reach 99.999%,
Wherein, the condensation temperature of pre- cool condenser 3 and main condenser 5 is -20 °, and the condensation temperature of recycling condenser 8 is -40 °.
The liquid component that on-line analysis equipment 10 is used to discharge the liquid-phase outlet of main condenser 5 is analyzed, and is such as purified
Qualification, then be sent into product holding vessel 7, such as purifies unqualified, then continues to be back in rectifying tower body 4 and continue rectifying.
In a kind of embodiment, main condenser 5 is arranged on the top of rectifying tower body 4, and reboiler 6 is arranged on 4 bottom of rectifying tower body.
In a kind of embodiment, the gaseous phase outlet and liquid-phase reflux mouth of rectifying tower body 4 are same port, rectifying tower body 4
Liquid-phase outlet and gas phase refluxing opening are same port.
In a kind of embodiment, the filler in rectifying tower body 4 is wire mesh packing.
In a kind of embodiment, liquid collection is equipped with below the liquid phase entrance of rectifying tower body 4 and below liquid-phase reflux mouth
Device 41, the lower section of liquid header 41 are equipped with liquid distribution trough 42.Liquid header 41 collects the feed liquor and liquid phase of liquid phase entrance
Refluxing opening returns liquid, then passes in liquid distribution trough 42, is sprayed.
In a kind of embodiment, liquid header 41 is circumferentially laid with air admission hole in cone cylinder shape, its side wall is inverted
411。
In a kind of embodiment, liquid distribution trough 42 includes bottom plate 421, the barrel 422 on bottom plate 421 and is arranged on
The inner side of barrel 422 simultaneously passes through the water distributor 423 of bottom plate 421, and the upper end of water distributor 423 is less than the upper end of barrel 422, water distributor
The bottom of bottom plate 421 is stretched out in 423 lower end, and the lower face of water distributor 423 is the slope towards 421 center of bottom plate.
Liquid distribution trough 42 collects the liquid got off of liquid header 41, when liquid higher than the top of water distributor 423 when
Wait, rectifying column lower part will be flowed out to as raining from all water distributors 423.
In a kind of embodiment, above-mentioned on-line analysis equipment 10 is industrial chromatograph.
In a kind of embodiment, product holding vessel 7 is additionally provided with emptying outlet, and product holding vessel 7 is additionally provided with liquid level gauge.
In a kind of embodiment, the outlet of product holding vessel 7 connects steel cylinder by cryogenic liquid pump.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (10)
1. a kind of preparation facilities of high-purity octafluorocyclobutane, it is characterised in that including raw material storage tanks（1）, drier（2）, it is pre-
Cool condenser（3）, rectifying tower body（4）, main condenser（5）, reboiler（6）, product holding vessel（7）, on-line analysis equipment（10）
And electric-control system（11）,
The raw material storage tanks（1）With the drier（2）Gas phase entrance connection；
The drier（2）Gaseous phase outlet and the pre- cool condenser（3）Gas phase entrance connection；
The pre- cool condenser（3）Liquid-phase outlet and the rectifying tower body（4）Liquid phase entrance connection；
The rectifying tower body（4）Gaseous phase outlet and liquid-phase outlet respectively with the main condenser（5）Gas phase entrance and described
Reboiler（6）Liquid-phase outlet connection；
The main condenser（5）Liquid-phase outlet through the first valve（12）With the rectifying tower body（4）Liquid-phase reflux mouth connection,
The main condenser（5）Liquid-phase outlet also through the second valve（13）With the product holding vessel（7）Connection；
The reboiler（6）Gaseous phase outlet and the rectifying tower body（4）Gas phase refluxing opening connection；
The on-line analysis equipment（10）Arranged on the main condenser（5）Liquid-phase outlet outlet side and arranged on described first, two
Valve（12,13）Input side；
The electric-control system（11）Input terminal and the on-line analysis equipment（10）Communication, the electric-control system（11）Output
End and described first, two valves（12,13）Communication.
2. the preparation facilities of high-purity octafluorocyclobutane according to claim 1, it is characterised in that the main condenser（5）
Arranged on the rectifying tower body（4）Top, the reboiler（6）Arranged on the rectifying tower body（4）Bottom.
3. the preparation facilities of high-purity octafluorocyclobutane according to claim 1, it is characterised in that the rectifying tower body（4）
Gaseous phase outlet and liquid-phase reflux mouth be same port, the rectifying tower body（4）Liquid-phase outlet and gas phase refluxing opening to be same
Port.
4. the preparation facilities of high-purity octafluorocyclobutane according to claim 1, it is characterised in that the rectifying tower body（4）
In filler be wire mesh packing.
5. the preparation facilities of high-purity octafluorocyclobutane according to claim 1, it is characterised in that the rectifying tower body（4）
Liquid phase entrance below and liquid-phase reflux mouth below be equipped with liquid header（41）, the liquid header（41）Lower section set
There is liquid distribution trough（42）.
6. the preparation facilities of high-purity octafluorocyclobutane according to claim 5, it is characterised in that the liquid header
（41）In cone cylinder shape is inverted, its side wall is circumferentially laid with air admission hole（411）.
7. the preparation facilities of high-purity octafluorocyclobutane according to claim 5, it is characterised in that the liquid distribution trough
（42）Including bottom plate（421）, arranged on the bottom plate（421）On barrel（422）And arranged on the barrel（422）Simultaneously wear inner side
Cross the bottom plate（421）Water distributor（423）, the water distributor（423）Upper end be less than the barrel（422）Upper end, institute
State water distributor（423）Lower end stretch out the bottom plate（421）Bottom, the water distributor（423）Lower face be towards described in
Bottom plate（421）The slope at center.
8. the preparation facilities of high-purity octafluorocyclobutane according to claim 1, it is characterised in that the on-line analysis equipment
（10）For industrial chromatograph.
9. the preparation facilities of high-purity octafluorocyclobutane according to claim 1, it is characterised in that the product holding vessel
（7）It is additionally provided with emptying outlet, the product holding vessel（7）It is additionally provided with liquid level gauge.
10. the preparation facilities of high-purity octafluorocyclobutane according to claim 1, it is characterised in that the product holding vessel
（7）Outlet steel cylinder is connected by cryogenic liquid pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721376052.4U CN207362103U (en) | 2017-10-24 | 2017-10-24 | The preparation facilities of high-purity octafluorocyclobutane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721376052.4U CN207362103U (en) | 2017-10-24 | 2017-10-24 | The preparation facilities of high-purity octafluorocyclobutane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207362103U true CN207362103U (en) | 2018-05-15 |
Family
ID=62421204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721376052.4U Active CN207362103U (en) | 2017-10-24 | 2017-10-24 | The preparation facilities of high-purity octafluorocyclobutane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207362103U (en) |
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2017
- 2017-10-24 CN CN201721376052.4U patent/CN207362103U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 215152 Anmin Road, Panyang Industrial Park, Huangdai Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee after: Jinhong Gas Co.,Ltd. Address before: 215152 No. 6 Anmin Road, Panyang Industrial Park, Huangdi Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee before: SUZHOU JINHONG GAS Co.,Ltd. |