JPH09213036A - Magnetic head and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely perform electrical connection between a slider and a suspension at their respective electrode-shaped parts by bonding and fixing the slider to a gimbal part of the suspension and connecting an electrode terminal of the slider with an electrode terminal of the gimbal part of the suspension via an electrically conductive foil. SOLUTION: Electrodes 13 on the suspension of a wiring incorporated type mounting the slider 4 are provided in a plane on the gimbal part 3a as a slider mounting area of the suspension 3. A recording element 14 on the slider 4 is arranged in a position at a right angle to a hard disk recording surface, and is arranged at a right angle to the electrodes 13 on the suspension 3. By using a lead 1 fixed in a prearranged position to be connected onto one of the electrodes 12 and 13 of the slider 4 and the suspension 3, the connecting process for the slider 4 on the suspension 3 is divided into two processes of the connection in one plane to simplify the work. The connecting position of the lead 1 is shortened between the electrodes 12 and 13 on the suspension 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head and a method of manufacturing the same, and more specifically, to a slider constituting a magnetic head of a hard disk type storage device used as an external storage device in workstations and mainframe computers. A magnetic head suitable for improving mechanical vibration characteristics and electric characteristics during operation, particularly regarding electric connection between electrodes, which is becoming more and more miniaturized due to improvement of an electrode connection structure of a suspension, and a magnetic head thereof. It relates to a manufacturing method.

[0002]

2. Description of the Related Art Connection between electrodes of a slider of a magnetic head and a wiring integrated type suspension is performed by connecting an A on the outer periphery of a copper wire.
The connection method by so-called wire bonding, which uses u-plated wires or Au wires, has been the main focus.

However, in this connection method, there is a restriction on the relative arrangement of the electrodes on the suspension and the electrodes on the slider and the dimensional pitch of each electrode, for example, as shown in FIG. It is becoming smaller in size in response to current high-speed transmission and high-density storage (head)
Difficulties have arisen with the connection of the (slider) assembly.

That is, FIG. 19A is a plan view showing a state where the electrode 12 of the slider 4 and the electrode 13 of the gimbal portion 3a of the wiring-integrated suspension are connected by wire bonding, and FIG. It is the side view. The ball bonding wire 6 is supplied from the ball bonding capillary 5 to connect the electrodes by a technique similar to the wire ball bonding in the process of assembling the semiconductor device. When the electrode shape is small and the pitch between the electrodes becomes narrow in correspondence with high density recording / reproduction, the capillary 5
As a result, this type of wire ball bonding technology makes connection difficult.

Since the recording system is shifting from the inductive system to the MR system (magnetoresistive read head), the number of electrodes is from two to four, and a plurality of magnetic recording elements are built in one slider. The number of electrodes is increasing and the number of electrodes is increasing, and it is becoming impossible with a connecting method using a wire together with a reduction in slider size.

In order to reduce the load on the connection using the wire, for example, as shown in FIG. 20, the electrode 12 on the slider 4 is arranged so that the electrode 12 on the slider 4 is arranged on the same plane as the electrode 13 on the suspension 3. Although an enlarged electrode structure has been proposed in which the position is moved to a surface different from the position of the recording element 14 by the thin film process, this method reduces the cost for manufacturing the slider by introducing the thin film process at the time of routing the wiring on the slider. It has increased significantly from the past. Further, even if the connection by the wire 6 is facilitated by changing the electrode arrangement, the mechanical characteristics during the operation of the hard disk device due to the rigidity of the wire itself have not been improved. Further, in the wiring using the wire 6, deterioration of electrical characteristics (impedance matching) during high-speed operation due to the wiring length is becoming a problem.

A technique related to a magnetic head using a wiring integrated suspension is disclosed in, for example, Japanese Patent Laid-Open No. Hei 7
-220258 gazette is mentioned.

[0008]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art. In the future, a change in recording density and recording method, and further improvement in mechanical vibration characteristics during operation will result in a small amount. With regard to (head)-(slider) connections in hard disk drives, which are becoming more and more multi-electroded, the electrical connection between the (head) and (slider) is surely mass-produced without burdening the electrode shape design of the slider and the suspension integrated with wiring. It is an object of the present invention to provide a magnetic head and a manufacturing method thereof that can be well performed.

[0009]

In the present invention, a tape carrier-like lead electrode is used as a connecting member between an electrode on a slider and an electrode on a wiring-integrated suspension to reduce impedance and match dielectric constant. Improves electrical characteristics during scale and high-speed operation. Further, it is possible to prevent mechanical vibration characteristics from being deteriorated by the connecting member and to reliably connect fine multi-electrodes with high positioning accuracy.

The means for achieving the object of the present invention will be described in more detail below. First, regarding the invention of a magnetic head, a slider incorporating a magnetic recording element is mounted on a gimbal portion of a suspension, an electrode terminal of the magnetic recording element disposed on the slider and an electrode terminal of a wiring portion disposed on the suspension. A magnetic head having a slider-suspension connection structure electrically connected to each other, wherein the suspension has a wiring part and an electrode to be connected to an electrode terminal of a magnetic recording element on a thin metal plate via an insulating layer. The suspension is integrally formed, and the slider is adhesively fixed to the gimbal portion of the suspension, and the electrode terminal of the slider and the electrode terminal of the gimbal portion of the suspension are electrically connected via the conductor foil. It is characterized in that it comprises a slider-suspension connection structure.

Further, regarding a typical invention of a method of manufacturing a magnetic head, a step of preparing a wiring integrated suspension made of a metal thin plate having electrodes and wiring portions formed by an insulating layer and a metal layer on the surface, and a suspension. Of adhering and fixing a slider having a built-in magnetic recording element on the gimbal portion of the device, and electrically connecting an electrode on the slider electrically connected to the magnetic recording element and an electrode on the gimbal portion of the suspension. And a step of electrically connecting an electrode on a slider and an electrode on a gimbal portion with a tape carrier lead electrode formed of a metal foil on an insulating tape. Then, the process is performed by ultrasonic bonding.

Next, the magnetic head of the present invention and its manufacturing method will be described in more detail with reference to the specific configuration example shown in FIG. This figure is an enlarged perspective view of a main part showing a state in which a slider is mounted on a gimbal portion of a suspension of a magnetic head and each electrode is electrically connected via a conductor foil.

The electrode 13 on the suspension 3 and the electrode 12 on the slider 4 are arranged on a surface that is just at a right angle due to the positional relationship between the magnetic recording element 14 and the recording surface as shown in the figure. A metal foil lead electrode 1 formed in a tape carrier shape is arranged and connected between predetermined electrodes so that the two are connected to each other in the shortest distance possible. This lead electrode 1 is formed by forming a metal foil lead of Cu or the like into a tape carrier shape on an insulating material such as a polyimide film in a shape that can be simultaneously aligned with electrodes on a plurality of sliders and suspensions. Make it possible to connect multiple points to multiple workpieces in the process. In addition, as the slider 4,
For example, a magnetic body (for example, a magnetic recording element such as MR) 14 and an electrode 12 are formed on an inorganic sintered body such as aluminum, titanium, or carbide by a known thin film process.

When the slider 4 and the suspension 3 are aligned and fixed to the gimbal portion 3a which is the slider mounting area in advance, the slider 4 and the gimbal portion 3a of the suspension are arranged.
When the slider is miniaturized due to the geometrical interference of
Since it becomes difficult to connect the slider and suspension,
In the present invention, the above-mentioned tape carrier lead 1 is previously connected to either one of the electrode 12 on the slider 4 or the electrode 13 on the gimbal portion 3a of the suspension 3 to cut off an unnecessary portion, and the other one is left. The lead 4 is connected to the lead end after the slider 4 and the suspension 3 are aligned and fixed to prevent geometrical interference between the lead connecting tool (ultrasonic bonding) and members such as the slider and the suspension. .

When the lead 1 is connected to the electrode 12 on the slider, the slider 4 is temporarily fixed on the jig with an adhesive, so that the connection can be easily made by using both ultrasonic waves and heat. And ensure. The position where the lead 1 is connected is set to be the shortest between the electrode 13 on the suspension and the electrode 12 on the slider, and the loop-shaped portion which is inevitable in wire bonding is eliminated, which causes a problem in connection by wire. Improves the mechanical vibration characteristics of the wire loop due to rigidity or resonance.

As the slider portion is further miniaturized, the cymbal portion 3a is integrated with the integrated wiring type suspension 3 accordingly.
When it cannot be formed on the upper side, a tape carrier-like lead whose main purpose is to electrically connect the slider 4 and the suspension 3 is devised in terms of shape to give a gimbal effect. Further, by forming the gimbal portion 3a 'of the tape carrier-like lead on which the slider 4 is mounted externally on the external suspension 3, the wiring from the slider 4 is enlarged and the position is changed at the tape carrier-like lead portion. Facilitates connection with the electrodes on the suspension.

In the connection of (slider)-(suspension) for the purpose of high-speed operation, tape carrier-like leads having two metal layers of front and back with a ground layer are used to further reduce impedance in transmission.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION As shown in FIG.
13 on the wiring-integrated suspension 3 on which the
Is planarly provided on the gimbal portion 3a which is the slider mounting area of the suspension 3. Since the magnetic recording element 14 on the slider 4 is arranged at a position perpendicular to the recording surface of the hard disk, it is arranged on a surface that is just perpendicular to the electrode 13 on the suspension 3.

Although it is difficult to perform conventional wire bonding on this right-angled surface, it is connected beforehand on a heat-resistant insulating tape such as polyimide, or on the electrodes 12 and 13 of either the slider 4 or the suspension 3. By using the lead 1 whose position is fixed, the step of connecting to the electrodes on the slider 4 and the suspension 3 can be divided into two steps of connecting in one plane, and the work can be simplified.

At the time of connecting the slider 4 and the lead electrode 1, by aligning and temporarily fixing the slider 4 on the jig plate, it becomes possible to securely fix the miniaturized slider 4. Further, by simultaneously aligning and fixing on one of the above-mentioned electrodes to which a plurality of leads 1 are connected in advance, multiple points can be connected in one step, which improves mass productivity.

If the slider and the suspension are aligned and fixed in advance before the electrical connection as in the prior art, the slider and the suspension may interfere with each other in shape, and the connection in the case of miniaturization becomes difficult. In that case, since the process relating to each connection can be divided, geometrical interference can be avoided as much as possible. Since it is very difficult to hold a fine wire at a predetermined position with the current connection method using a wire, the slider 4, the lead 1, the suspension 3
The connection in two steps such as the connection of the lead 1 and the lead 1 is impossible in mass production.

Deterioration of mechanical vibration characteristics due to rigidity or resonance of the wire loop portion, which is a problem in connection with a wire, in the case of connection by a tape carrier lead according to the present invention, the connection position of the lead 1 is set to the electrode on the suspension. 13 and the electrode 12 on the slider are the shortest,
Further, it is greatly improved by eliminating the loop shape.

When the slider portion is extremely miniaturized, a gimbal action is added to the tape carrier-like lead,
Separation from the suspension facilitates connection because the connecting portion of the slider, suspension, and hard disk main body can be expanded, and mechanical vibration characteristic design is also facilitated because the degree of freedom in material selection is improved. Further, when higher speed operation is required, a ground layer is provided on the back surface of the tape carrier lead to reduce electrical noise and impedance.

[0024]

An embodiment of the present invention will be described below with reference to the drawings. <Embodiment 1> FIG. 2 shows a connection structure of a slider 4 and a suspension 3 according to the method of the present invention. First, as shown in FIG. 2A, one end of the tape carrier lead 1 is connected to the electrode 12 of the slider 4 by ultrasonic bonding under heating, which will be described later. Then, as shown in FIG.
The slider 4 is positioned and adhesively fixed to the gimbal portion 3a which is the slider mounting region of the suspension 3, and the other end of the lead 1 is connected to the electrode 13 of the gimbal portion 3a by the same ultrasonic bonding.

The slider 4 is formed of an inorganic sintered body such as aluminum, titanium, or carbide, and the magnetic recording element 14 and the electrode 12 are formed on the end faces thereof by a thin film process. Also, the suspension 3
It is composed of a rigid thin plate such as stainless steel, an insulating layer such as a polyimide film is provided on the surface thereof, a thin metal foil such as Cu is formed, and wiring 15 is formed by a pattern forming process by etching.
And an electrode 13 are formed.

As shown in FIGS. 2 and 3, the portion of the tape carrier-like lead that serves as the lead 1 is the same as in the production of a tape carrier used for mounting an LSI chip, for example, in a semiconductor device manufacturing process. Forming a copper foil 2 having a thickness of 18 μm to 35 μm on the polyimide film 9 and forming the copper foil 2 into a predetermined shape by a well-known lithography technique so as to obtain a lead pattern having a required lead width, space and length. To form.

In a tape carrier for mounting an LSI chip, a square device hole portion is provided so as to surround the LSI chip, and leads called an inner lead for connecting the LSI chip tape carrier are arranged along the outer periphery of the hole. However, since only the inner lead is used in the slider-suspension electrical connection structure of the present invention, the slider-suspension electrical connection structure of the present invention may have a shape in which the lead is arranged in a long length as shown in FIG. .

That is, FIG. 3 shows a tape carrier lead electrode 1 having one end bonded to the slider electrode 12.
The figure shows the shape (composed of the copper foil pattern 2), and the lead electrode 1 is formed on the polyimide film 9 in a comb shape. The lead electrode 1 has a required length with one end thereof connected to the slider electrode 12 and is AA.
The line is cut.

The tape carrier-like lead electrode 1 is arranged such that a plurality of sliders 4 (or either one of the suspensions 3) are fixed by a jig 8 in a state as shown in FIG. If the arrangement is made in accordance with the electrode pitch of each work on the jig, it is possible to adjust not only a plurality of electrodes in one slider 4 (or suspension 3) but also a plurality of electrodes in one slider 4 by one alignment. It becomes possible to connect a plurality of workpieces within the operating range of the bonding apparatus 10 that uses ultrasonic heat together, and within a correctable lead-work alignment error range. It should be noted that FIG. 4 shows an example of connection using a single point bonding tool as the bonding device 10.

In order to stably and reliably connect the leads 1 using thermo-sonic waves together, the electrodes 12, 13 on the slider and suspension and the outermost surface of the tape carrier lead 1 are each plated with Au to a thickness of 0.6 μm. It is desirable to apply the above thickness. In this example, the electrodes 12, 13
Both the lead 1 and the lead 1 were plated with Au of 0.6 μm.

The heating temperature at the time of thermosonic bonding is set in consideration of the Curie point of the magnetic recording element (a temperature lower than the Curie point so as not to deteriorate the magnetic characteristics).
If the temperature of the ultrasonic wave and the pressure of the wedge tool are adjusted to a value commensurate with the contact area and the thickness of the Cu foil used as the material of the lead, the temperature is set to about 25 ° C, usually about 120 to 150 ° C.
It is possible to obtain the connection strength until lead breakage occurs in the tensile test. Jig 8 is used for heating when connecting leads.
Can be easily carried out by heating to a predetermined temperature. In this way, when the first-stage connection is made between one end of the lead 1 and the slider electrode 12, the connection can be continuously made to a plurality of sliders 4 by a series of operations. There are advantages.

Further, as shown in FIG. 5, the slider 4 is individually fixed to the fixing jig 11 and the tape carrier-like lead 1 is aligned therewith. Perform bonding work. After the connection between each slider electrode 12 and the lead 1 is completed, the lead 1 is cut while being fixed to the jig 11 while leaving a predetermined length on the slider side. Although not shown, a lead in the form of a tape carrier can be provided with an electrode for the purpose of an electrical test of the slider 4. In this case, one end of the lead 1 is connected to the slider electrode 12 and then the slider with lead is attached. As a tape state before being cut out, the tape can be fixed on a dedicated jig for inspection and selection by electric test of each slider.

FIG. 6 shows a perspective view of the slider 4a with leads thus obtained, in which the lead 1 is roughly molded so as to have the same height as the bonding surface of the slider 4 to the suspension 3. Stock.

When the slider 4 having a small size is securely fixed to the jig and the connection using the ultrasonic heat is performed, a plurality of sliders are arranged on the jig plate by a tape with an adhesive that can be attached and detached. By temporarily fixing and then fixing the jig plate,
Lead connection work can be performed reliably by using both ultrasonic waves and heat. When the jig plate and the tape with the thermosetting adhesive are used, the jig plate is removed after the lead connecting process is completed.

The slider with lead 4a manufactured as described above is positioned on the gimbal 3a of the suspension 3 as shown in FIG. 2B, and then fixed with, for example, a UV thermosetting adhesive, and the gimbal is fixed. The electrode 13 on 3a and the lead 1 are connected together by ultrasonic heat. In this way, the lead 1 can be reliably connected to the electrodes 12 and 13 having minute dimensions with high positioning accuracy. It should be noted that when fixing the slider with an adhesive in order to realize a highly reliable connection, especially when the electrode portion 1 on the suspension is used.
Care must be taken to avoid contamination of the adhesive with respect to 3.

FIG. 7 is an enlarged schematic view for explaining the effect of preventing geometrical interference at the time of lead connection in this embodiment, and is a supplementary explanation for the bonding step of FIG. 4 (b). FIG. 7A is a side view showing a state in which the other end of the lead 1 is connected to the electrode 13 on the suspension by the bonding tool 10, and FIG. 7B is a plan view thereof. As shown in the drawing, the workability is improved because interference with the bonding tool and jig due to the shapes of the slider 4 and the suspension 3 (3a) can be avoided. Further, the lead wiring length is reduced as compared with the conventional one by the amount that the loop shape is unnecessary, and the high speed operability can be improved. The impedance of the lead portion at the time of high-speed operation can be adjusted by setting the lead flatness and adding the carrier tape portion made of polyimide or the like to the lead.

Example 2 In this example, contrary to the case of Example 1, the first-stage connection is made between the lead 1 and the electrode 13 of the suspension 3, and then the second-stage connection is performed. It is performed between the lead 1 and the slider 12. This will be described below with reference to FIGS. 8 and 9.

In this case, unlike the case where the slider is connected, the upper limit of the heating temperature can be set to a high value within a range where the polyimide insulating layer of the suspension does not peel off. It is also possible to connect.

As shown in FIG. 8, the gimbal portion 3a, which becomes the slider mounting area of the suspension 3, leaves the free end of the lead 1 by a length required for connection with the slider electrode 12.
After connecting to the upper electrode 13, the tape carrier portion is cut at the rear portion of the connection to form a suspension with leads, and this lead portion is bent and formed to a position where connection with the electrode 12 on the slider can be performed. Note that the leads are connected together with ultrasonic heat as in the first embodiment. At this time, the length of the lead 1 is such that the air bearing surface 4b with respect to the magnetic recording medium (not shown).
Set so that there is no protrusion.

Then, as shown in FIG. 9, the slider 4 is positioned on the gimbal portion 3a which is a slider mounting area, and after adhesively fixing with a UV thermosetting adhesive, the slider 4 is fixed together with the suspension. The free end of the lead 1 is bonded to the corresponding electrode 12 on the slider by the connection device 10 that also uses thermosonic waves. Lead 1
And the electrode 13 of the suspension 3 are connected in advance, the positional design of the electrode 12 of the slider is restricted due to the geometrical interference between the suspension 3 and the gimbal portions 3b and 3c.

Regarding the connection between the lead 1 and the slider electrode 12, when the slider 4 is fixed on the gimbal portion 3a regardless of the order of the first stage and the second stage, the air bearing surface 4a, the magnetic field As shown in FIG. 5, the slider 4 (or suspension) is fixed by mechanical pressing using four surfaces other than the surface on which the recording element 14 and the electrode 12 are formed.

<Third Embodiment> The third embodiment will be described below with reference to FIGS. Each of these examples is a tape carrier 9
The slider is mounted on the upper part, and one end of the lead 1 is connected to the slider electrode 12 in advance, and the other end of the lead is bonded to the electrode 13 of the suspension 3 as a connection terminal of the tape carrier.

As the size of the slider 4 becomes smaller and the number of connecting electrodes increases, it becomes difficult to connect the electrode 12 of the slider 4 and the lead 1 and the electrode 13 of the suspension 3 and the lead 1 due to geometrical interference. In this case, the tape carrier material 9 itself is formed so as to form a part 3a 'of the gimbal portion 3a, and the structure shown in FIG. It can also be expanded enough. The gimbal portion has a structure in which two axes (XY) that are orthogonal to each other, which are usually on one plane, are formed to allow yawing and rolling movements with respect to the load arm axis. Considering the workability of one of them, particularly the connection with the slider 4, the carrier tape material is used to support the yawing shaft to form the gimbal portion 3b '.

As shown in FIG. 10 (a), when the slider 4 has four electrodes 12, the gimbal portion to be the slider mounting portion 3a 'and the wiring portion 16 at the central portion thereof are made to correspond thereto. The tape carrier 9 having the support shaft 3b 'as shown in FIG. 9 can be formed. The tape carrier 9 is formed by punching with a dedicated die,
For forming the lead 1, etching by a lithographic technique is used as in the first embodiment.

As the tape material, a thick polyimide sheet having a thickness of about 175 μm may be used in order to obtain sufficient spring characteristics. A tape carrier based on a glass epoxy thin plate can also be used. When the required mechanical properties such as the spring constant and the damping rate cannot be obtained only by the base film, the reinforcing metal foil 17 is electrically independent from the wiring patterns (1, 16) as shown in FIG. It is also possible to utilize this effect by forming it on the surface of the gimbal portion 13b '. Further, as shown in FIG. 12, a separate stainless steel reinforcing plate 18 having a thickness of about 25 μm to 35 μm may be attached to the gimbal portion.

The electrode 12 of the slider 4 and the gimbal portion 13b
In connection with the lead 1 of No. 1, the lead 1 corresponding to the electrode shape on each slider is formed on the tape carrier, and these are connected by using both heat and ultrasonic waves. After adhering the slider 4 to the gimbal portion 13b 'on the tape carrier, the lead electrode 1 on the gimbal is bent and connected to the slider electrode 12.

A metal pattern 20 of the same material as the lead 1 is provided on the adhesive surface of the slider mounting portion 3a 'to enhance the adhesive effect of the adhesive, or punching is performed as shown in 19 of FIG. Drilling is done by.
In order to obtain the effect of an air spring on the magnetic disk side of the slider 4, that is, on the air bearing surface side for the slider during hard disk operation, when it is necessary to form a minute convex shape due to curing shrinkage of the adhesive, the slider of the gimbal part is The reinforcing member 22 is appropriately attached to the surface opposite to the bonded surface as shown in FIG. 16, or the gimbal portion is perforated as shown at 21 in FIG. 15 to adjust the protruding amount of the convex portion. .

In order to position the slider 4 at an appropriate position on the gimbal, a pattern of the same material as the lead electrode, which serves as a positioning mark, may be attached to the gimbal portion 3a 'at a position where electrical interference does not occur. good. In order to set the distance from the suspension support shaft to the recording element on the slider to a design value, adjustment can be performed when connecting the slider with gimbal and the suspension. For fixing the slider and the reinforcing plate for adjusting the convex amount of the air bearing surface, an epoxy-based UV heat curing type adhesive may be used.

As shown in FIGS. 10B and 12, the gimbal with wiring connected and fixed to the slider 4 thus created is cut out as a component by cutting unnecessary parts from the tape shape, and the suspension is formed. Align on 3 and connect the electrodes (13, 16) to each other. At this time, the support shaft 3b ', which is a tape material on the gimbal, is also bonded and fixed on the suspension 3 in parallel with the electrical connection. In the electrical connection between the suspension 3 and the slider with gimbal, if the element on the slider is not heated to 150 ° C. or higher, use the relatively high temperature thermocompression bonding of the plated metals on each electrode. You can also When Au plating is applied on both the gimbal and the suspension electrodes, the connection can be performed at a temperature of about 350 ° C. for several seconds with a load of about 100 g per each connecting portion.

<Embodiment 4> A description will be given below with reference to FIGS. In this example as well, the slider 4 is mounted on the tape carrier 9 in the same manner as in Example 3, and one end of the lead 1 is connected to the slider electrode 12 in advance to form a slider with the tape carrier 9 and the other end of the enlarged lead. Is bonded to the electrode 13 of the suspension 3 as a connection terminal of the tape carrier.

As in Example 1, the gimbal portion 3
Also in the case of using the wiring integrated type suspension in which a is integrally formed on the suspension 3, the tape carrier-shaped lead electrode portion is left in the carrier tape portion as in the case of the third embodiment, and the shape as shown in FIG. 17 is obtained. By using it as the expanded wiring portion, it becomes possible to connect the slider and the suspension, which are further miniaturized and have multiple electrodes, in the future.

As shown in FIG. 17A, first, the slider 4 is adhered onto the slider mounting area 23 of the tape carrier 9 whose back side of the surface to be adhered has the enlarged wiring portion. After that, as shown in FIG. 17B, the lead portion is bent to form a lead electrode 1, which is electrically connected to the electrode 12 of the slider at a temperature below the Curie point. The tape carrier portion should be as close as possible to the slider dimension if the wiring spacing and layout are such that workability can be improved when connecting to the gimbal. It is sufficient that the enlarged wiring portion formed by the tape carrier has a size of about 3 × 3 mm.

Also in this case, as described in FIGS. 11 and 12 of the third embodiment, the metal parts 17 and 18 of the same material as the lead electrodes are left on the carrier tape, or punching is performed as shown in FIG. Holes can be drilled to improve the adhesive strength between the slider and the tape. Lead electrode 1
Is a portion that is exposed from the carrier tape 9 through the enlarged wiring portion 24 and has a sufficient distance and dimensions for connection.

On the other hand, as shown in FIG. 18, an electrode 16 is provided on the gimbal of the wiring-integrated suspension 3 at a position corresponding to the electrode 24 of the carrier tape portion for electrical connection. In this case, the slider-side electrode position on the carrier tape can be formed on the same plane as the suspension-side electrode on the gimbal, so that the selection range of the connection method is widened. If the slider is not heated above the Curie point, it is possible to make a connection by thermocompression bonding.

In this connection structure, as shown in FIG. 18A, the lead 1 of the tape carrier portion 23 is connected to the slider-side electrode 12, and then the other enlarged electrode 24 is connected to the enlarged electrode 24 of FIG.
As shown in FIG. 8 (b), it is connected to the electrode 13 on the suspension side and the back surface of the tape carrier portion 23 is adhered to the gimbal portion 3a.

When the data input / output speed of the hard disk drive is improved, a ground layer is provided at a position corresponding to the wiring surface of the expanded wiring layer and the back surface with the insulating layer interposed therebetween, so that noise and impedance in the subsequent operation are reduced. It is possible to reduce the amount.

[0057]

As described above in detail, according to the present invention, the intended purpose can be achieved. That is, according to the inventions of claims 1 to 6, it is possible to significantly change the connection process between the slider electrode and the suspension electrode by the existing bonding wire using insulation coating wire or Au wire and using heat and ultrasonic waves. , In the case of the wire with insulation coating, the wire diameter and the fixing method are restricted, and in the case of the Au wire, the geometrical interference between the adjacent electrodes due to the diameter of the ball formed on the first bond side and the outer diameter of the capillary. It becomes possible to easily and highly accurately connect a plurality of electrodes with a center-to-pad distance of 0.15 mm or less, which was impossible due to restrictions.

Since the position of the lead is first fixed to the carrier tape and then fixed to the slider and then fixed by this connection itself, it is possible to divide the connecting process of the slider and the suspension. The workability is improved because the interference with the bonding tool and jig due to the shape of is avoided.

The length of the lead wiring is reduced by the fact that the loop shape is unnecessary, and the high speed operability can be improved. The impedance of the lead portion at the time of high-speed operation can be adjusted by setting the lead flatness and adding the carrier tape portion made of polyimide or the like to the lead. Furthermore, noise can be reduced by using a double-sided wiring tape having a ground layer on the back side of the wiring surface.

If a test wiring for the purpose of testing the magnetic recording element on the slider is provided on the tape carrier, it is possible to make an electrical pass / fail judgment before connecting the slider to the suspension. Become.

Further, when the slider and the lead are connected, the slider can be securely fixed on a dedicated jig plate, so that even a slider whose size is reduced to, for example, about 1 mm square can be surely fixed and used in combination with ultrasonic heat. Can be connected.

By using the method of claims 7 to 11, it is possible to reduce the burden on the design of the gimbal portion on the integrated wiring type suspension, and it is easy to connect the lead and the suspension by the enlarged wiring on the gimbal. It becomes possible to make a connection. If a carrier tape with leads such as polyimide tape is used as the material for the gimbal support, the vibration damping characteristics during operation will be improved, and it will be easier to design the entire vibration characteristics by combining it with a reinforcing plate. become.

When there are no dimensional restrictions regarding the gimbal and the suspension, the gimbal is formed in the wiring-integrated suspension, and the lead wiring portion in the form of a tape carrier is attached to the electrode of the gimbal on the suspension. By adopting a structure in which the wiring from the slider electrode enlarged in step 1 is electrically connected and further adhered, the electrical characteristics and the like can be improved and the connection process can be simplified.

[Brief description of drawings]

FIG. 1 is an enlarged view of a main part of a magnetic head showing a typical connection state between a slider electrode and a suspension electrode of the present invention.

FIG. 2 is an enlarged view of a main part of a magnetic head showing an electrode connection structure of a slider and a suspension according to an embodiment of the present invention.

FIG. 3 is a schematic diagram illustrating the shape of a tape carrier lead electrode.

FIG. 4 is a perspective view illustrating a connection method (collective connection) of tape carrier lead electrodes to a plurality of sliders using the same jig.

FIG. 5 is a perspective view for explaining a fixing method using another jig when the slider and the tape carrier lead electrode are connected.

FIG. 6 is a perspective view showing the outer shape of the slider with leads and the lead molding state.

FIG. 7 is an enlarged schematic diagram for explaining the effect of preventing geometric interference when the present invention is used. (A) Side view (prevention of interference between bonding tool and slider) (b) Plan view (prevention of interference between lead electrodes)

FIG. 8 is a process drawing in the case of connecting a suspension and a tape carrier lead electrode according to another embodiment of the present invention.

FIG. 9 is a process diagram of similarly connecting the suspension with leads and the slider.

FIG. 10 is a manufacturing process drawing of a slider with a gimbal using a part of a tape carrier as a gimbal according to still another embodiment of the present invention.

FIG. 11 is a plan view showing a structural example in which the rigidity of the gimbal is changed by a metal pattern when a part of the tape carrier is used as a gimbal.

FIG. 12 is a perspective view showing a structural example in which the rigidity of the gimbal is changed by an external reinforcing member when a part of the tape carrier is used as a gimbal.

FIG. 13 is a plan view showing a structural example of improving the adhesiveness of the slider by forming a hole in the gimbal portion when a part of the tape carrier is used as a gimbal.

FIG. 14 is a plan view showing a structural example in which the adhesiveness of the slider is improved by leaving a metal pattern on the gimbal portion.

FIG. 15 is a plan view showing a structural example of adjusting the slider warp amount by similarly making a hole in the gimbal portion.

FIG. 16 is a plan view showing a structural example of mounting a metal plate on the gimbal portion and adjusting the slider warp amount.

FIG. 17 is an assembly process diagram of a slider with a wiring tape in which a tape carrier portion is left and a slider is mounted thereon to form an enlarged wiring portion.

FIG. 18 is a process diagram in which a slider with a wiring tape is similarly mounted on a gimbal portion of a suspension and connected to an electrode on the suspension via an enlarged wiring portion.

FIG. 19 is an enlarged schematic view showing a state of geometrical interference when a slider electrode and a wiring-integrated suspension electrode are connected by a wire bonding method in a conventional magnetic head.

FIG. 20 is a perspective view showing another example of the conventional connection structure of the slider in which the electrode positions are changed.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Lead, 2 ... Copper foil for lead electrodes (electrodes for electrical test), 3 ... Wiring integrated suspension, 3a ... Slider mounting portion, 3a '... Slider mounting portion formed with tape carrier left, 3b, 3b '3c ... Gimbal part, 4 ... Slider, 4a ... Leader slider, 4b ... Air bearing surface, 5 ... Ball bonding capillary, 6 ... Ball bonding wire, 7 ... Wiring on slider, 8 ... For fixing plural sliders Jig, 9 ... Carrier tape such as polyimide, 10 ... Tool for ultrasonic bonding, 11 ... Jig for fixing slider when (slider)-(lead) connection, 12 ... Electrode on slider, 13 ... On suspension Electrodes, 14 ... Magnetic recording element, 15 ... Suspension wiring, 16 ... Gimbal upper electrode, 17 ... Gimbal reinforcing metal pattern 18 ... Metal part for strengthening gimbal reinforcement, 19 ... (Gimbal)-(slider) punching part for strengthening adhesion, 20 ... (Gimbal)-(slider) metal pattern for strengthening adhesion, 21 ... (Slider) Perforated part for adjusting warp amount, 22 ... (Slider) Metal plate for adjusting warp amount, 23 ... Expanded wiring part (polyimide or the like) from slider, 24 ... Electrodes on expanded wiring part.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Naotake Ebinuma 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Inside the Hitachi, Ltd. Institute of Industrial Science (72) Inventor Shuichi Sugawara 2880, Kozu, Odawara-shi, Kanagawa Stock Association Hitachi Storage Systems Division (72) Inventor Osamu Naruzawa 2880 Kozu, Odawara City, Kanagawa Stock Company Hitachi Storage Systems Division

Claims (11)

[Claims] 1. A slider having a magnetic recording element built therein is mounted on a gimbal portion of a suspension, and an electrode terminal of the magnetic recording element disposed on the slider and an electrode terminal of a wiring portion disposed on the suspension are electrically connected. Slider connected to
A magnetic head having a suspension connection structure, wherein the suspension comprises a wiring integrated suspension in which a wiring portion and an electrode to be connected to an electrode terminal of a magnetic recording element are formed on a thin metal plate via an insulating layer. Is
The slider is bonded and fixed to the gimbal portion of the suspension, and the electrode terminal of the slider and the electrode terminal of the gimbal portion of the suspension are electrically connected via a conductor foil to form a slider-suspension connection structure. Magnetic head. 2. A step of preparing a wiring integrated suspension comprising a metal thin plate having an electrode and a wiring portion formed of an insulating layer and a metal layer on the surface, and a slider having a magnetic recording element built in on the gimbal portion of the suspension. A method of manufacturing a magnetic head, comprising a step of adhesively fixing and a step of electrically connecting an electrode on a slider electrically connected to a magnetic recording element and an electrode on a gimbal portion of a suspension. A magnetic head comprising the step of electrically connecting the upper electrode and the electrode on the gimbal portion by ultrasonic bonding using a tape carrier lead electrode formed of a metal foil on an insulating tape. Manufacturing method. 3. The method of manufacturing a magnetic head according to claim 2, wherein one end of the tape carrier lead is electrically connected to an electrode on the slider at a predetermined position, and then the connecting portion on the slider to the gimbal portion. A step of forming a slider with a lead by cutting the other end, which is an unnecessary portion of the lead, leaving a predetermined length necessary for connecting to the upper electrode, and a step of mounting the slider with the lead on the gimbal portion of the wiring-integrated suspension. A method of manufacturing a magnetic head, comprising the steps of: aligning and adhering to each other and adhering and fixing; 4. The method of manufacturing a magnetic head according to claim 2, wherein the slider piece is temporarily fixed on a predetermined jig with a thermosetting adhesive, and the tape carrier-like lead is attached to the electrode on the slider. A method of manufacturing a magnetic head, comprising the step of electrically connecting one ends to manufacture a slider with leads. 5. The method of manufacturing a magnetic head according to claim 2 or 3, wherein a tape carrier-like lead electrode formed on the insulating tape by a metal layer and electrically connected to the slider has another end for inspection. The method for manufacturing a magnetic head, wherein the electrode is provided, and an inspection step for measuring the electrical characteristics between the lead and the magnetic recording element on the slider is provided with one end of the lead connected to the slider electrode. 6. The method of manufacturing a magnetic head according to claim 2, wherein one end of the tape carrier lead is electrically connected to an electrode on the gimbal portion of the wiring-integrated suspension at a predetermined position, and then the gimbal portion. A step of forming a gimbal portion with a lead by cutting the other end, which is an unnecessary portion of the lead, leaving a predetermined length necessary for connecting to the electrode of the slider from the upper connection portion, and then forming a gimbal portion with a lead on the gimbal portion with a lead. A method of manufacturing a magnetic head comprising: a step of aligning a slider and adhering and fixing the slider; and a step of connecting the other end of a lead derived from a gimbal portion of the suspension to an electrode on the slider. 7. A slider with a tape carrier material gimbal is formed by connecting a tape carrier-like wiring portion formed by using a tape carrier material located on the outer periphery of the slider as a gimbal portion to an electrode on a slider having a magnetic recording element built-in. A magnetic head including a forming step, a step of fixing the gimbal portion on a wiring integrated suspension, and a step of electrically connecting an electrode derived from a tape carrier material cymbal to an electrode on the suspension. Manufacturing method. 8. A gimbal portion is formed by attaching a reinforcing material, which is electrically independent of the connection between the slider and the suspension, to the tape carrier material on the outer peripheral portion of the slider, on the electrode on the slider containing the magnetic recording element. There are steps of connecting the tape carrier-like leads, fixing the gimbal portion of the tape carrier-like leads on the wiring-integrated suspension, and further electrically connecting the tape carrier-like leads and the electrodes on the suspension. Of manufacturing magnetic head. 9. A step of connecting a tape carrier-like lead formed by forming a lead material as a gimbal portion electrically independent from the connection between the slider and the suspension at an outer peripheral portion of the slider to an electrode on the slider having a built-in magnetic recording element. And a step of fixing a cymbal portion as a structure on a wiring-integrated suspension, and a step of electrically connecting leads and electrodes on the suspension. 10. A wiring member having a wiring portion and a lead electrode formed in a tape carrier shape with an insulating material and a metal foil is electrically connected to an electrode of a slider having a magnetic recording element and is fixed to the slider. Forming a slider with a wiring part, fixing the slider to the gimbal part on the wiring integrated suspension via this wiring member, and setting the electrode on the wiring member at a predetermined position on the gimbaled suspension on the wiring integrated suspension. And a step of electrically connecting to the electrode of the magnetic head. 11. A method of manufacturing a magnetic head according to claim 10, wherein the wiring member formed in a tape carrier shape has:
A method of manufacturing a magnetic head, comprising a step of forming a ground layer and an electrically insulating layer of a gimbal portion on the suspension integrated with the ground layer and the wiring layer on the back surface of the wiring layer via the insulating layer.