JPH09210613A - Touch signal probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a touch signal probe for improving accuracy and at the same time securing ease of assembly, stability for temperature change, and a long-term stability. SOLUTION: A piezoelectric element 4 for vibrating a vibrator 2 with a frequency which nearly matches the natural frequency of the vibrator 2 is arranged near the node of the natural frequency in axial direction of the vibrator 2 in nearly column shape, flange parts 7 with a pair of wall surfaces 7A which oppose each other at the axis of the vibrator 2 are provided near the node of the vibration of the vibrator 2, a mounting surface 6A which is in parallel with the axis of the vibrator 2 is formed between the flange parts 7, and the piezoelectric element 4 is pressed and fixed so that it contacts the mounting surface 6A between the wall surfaces 7A of the flange parts 7, thus positively fixing the piezoelectric element 4 to the vibrator 2 without using any adhesive or solder.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a touch signal probe used when measuring the shape of an object to be measured by a coordinate measuring machine or the like.

[0002]

BACKGROUND ART Height gauges (one-dimensional measuring machines), three-dimensional measuring machines, contour measuring machines, etc. are known as measuring machines for measuring the shape and dimensions of an object to be measured, and coordinate detection and position in that case. In order to perform the detection, a touch signal probe that detects a contact with an object to be measured is used in the measuring machine. The touch signal probe includes a vibrator having a contact portion at the tip and formed in a substantially columnar shape, and a piezoelectric element arranged in the vicinity of a node of natural vibration in the axial direction of the vibrator. There is a structure in which the vibrator is excited at a frequency substantially matching the natural frequency of the child.

A conventional example of a touch signal probe of this structure is shown in Japanese Patent Laid-Open No. 6-221806. In Japanese Unexamined Patent Publication No. 6-221806, a conventional touch signal probe has a piezoelectric element in a mounting portion formed in the vicinity of a pin of a vibrator in which a substantially central portion which is a vibration node of the vibrator is supported by a holder through a pin. Are fixed with adhesive or solder. The surface electrode of this piezoelectric element is divided into a vibration electrode for vibrating the vibrator and a detection electrode for taking out the vibration of the vibrator as an electric signal.

When a voltage having an appropriate frequency is applied to the vibrating electrode, the vibrator resonates and vibrates with the support portion including the mounting portion and the pin as a node and the contact portion as an antinode. When the contact portion of the mechanically resonant oscillator is brought into contact with the object to be measured, the vibration state changes. A touch signal is generated by extracting the state of this change as an electric signal by the detection signal and performing appropriate signal processing.

[0005]

In the conventional example disclosed in Japanese Patent Laid-Open No. 6-221806, the piezoelectric element is fixed to the mounting portion at the substantially central portion of the vibrator with an adhesive or solder. When an adhesive is used to fix the piezoelectric element, the Q value (a guideline indicating the sharpness of the resonance characteristic curve when the horizontal axis is the frequency and the vertical axis is the amplitude) decreases with the viscosity effect. However, there is a problem that the performance of the touch signal probe is deteriorated. In particular, when a polymer adhesive is used, it causes a change in characteristics due to temperature changes, and further, there is a problem in stability of characteristics due to deterioration or the like over a long period of time.

When fixing the piezoelectric element, when solder is used, the temperature at the time of fixing becomes high, which causes a defect of the piezoelectric element. In addition, in the case of both adhesive and solder, the setup of the touch signal probe assembly,
That is, it takes time to align the vibrator and the piezoelectric element with each other, and particularly when a polymer adhesive is used, it takes a long time to cure the adhesive. There is a point.

An object of the present invention is to provide a touch signal probe which can improve accuracy, and can achieve ease of assembly, stability against temperature change, and long-term stability.

[0008]

Therefore, according to the present invention, a vibrator is provided with a flange portion having a pair of wall surfaces, and a piezoelectric element is press-fitted and fixed between these wall surfaces to achieve the above object. . Specifically, the touch signal probe of the present invention is provided with a vibrator formed in a substantially columnar shape having a contact portion for contacting an object to be measured at the tip, and arranged in the vicinity of a node of the natural vibration in the axial direction of the vibrator. A touch signal probe having a piezoelectric element that vibrates the vibrator at a frequency substantially matching the natural frequency, and a flange portion having a pair of wall surfaces facing each other It is provided in the vicinity of a node, a mounting surface parallel to the axis of the vibrator is formed between the flange portions, and the piezoelectric element is press-fitted and fixed so as to come into contact with the mounting surface between the wall surfaces of the flange portion. And

In the present invention, since the piezoelectric element is fixed to the vibrator in a press-fitted state without using an adhesive or solder, the Q value does not decrease due to the viscosity effect of the adhesive, and the touch signal probe is highly sensitive and highly accurate. It can be Moreover, since there is no change in the characteristics of the adhesive due to temperature change, stability can be secured for a long period of time. Further, since the assembly can be performed quickly and easily, the manufacturing cost can be reduced.

Here, the pair of wall surfaces are formed at an acute angle with respect to the mounting surface, and the piezoelectric element is
It may be a structure in which both sides thereof are formed in a wedge shape so as to correspond to the wall surface. In this structure, since the piezoelectric element is attached to the flange portion, the piezoelectric element is inserted into the wall surface of the flange portion, and since a force acts in the direction in which the piezoelectric element is close to the mounting surface, the piezoelectric element and the mounting surface are closely fixed, The piezoelectric element can be securely attached to the vibrator.

The pair of wall surfaces are formed so that the distance between them becomes narrower in the direction parallel to the mounting surface.
The piezoelectric element may have a structure in which both sides thereof are formed so as to correspond to the wall surface. With this structure, the piezoelectric element can be easily pressed in by pushing the piezoelectric element along the mounting surface in a direction in which the distance between the wall surfaces is narrowed.

Further, the mounting surface may have a structure in which a groove for guiding a lead wire connected to the piezoelectric element is formed. With this structure, the lead wire can be directly drawn from the back surface of the piezoelectric element by utilizing this groove, and the problem due to poor contact is eliminated. Further, the flange portion may have a structure detachably attached to the vibrator. In this structure, the piezoelectric element is arranged between the one flange portion and the other flange portion fixed to the vibrator, and the other flange portion is pressed against the one flange portion side in this state, thereby It can be easily press-fitted and fixed to the flange.

[0013]

Embodiments of the present invention will be described below in detail with reference to the drawings. Here, in each of the embodiments, the same components are designated by the same reference numerals, and the description will be omitted or simplified. 1 to 3 show a first embodiment of the present invention.

Referring to FIG. 1 showing the overall structure, a touch signal probe 10 according to the first embodiment has a stylus holder 1, a vibrator 2 attached to the stylus holder 1 and formed in a substantially columnar shape, and the vibrator. 2 and a piezoelectric element 4 which is provided in the vicinity of the node of the natural vibration in the axial direction through the mounting portion 3 and is formed into a planar rectangular plate shape. The stylus holder 1 is not shown in the drawings. It is attached to a moving shaft such as, and detects the contact with the object to be measured while the moving shaft moves, and measures the shape and the like by reading the coordinates at the time of contact.

The stylus holder 1 is formed in a hollow cylindrical shape, and a pair of engaging pins 5 (only one of which is shown in FIG. 1) for supporting the mounting portion 3 of the vibrator 2 is provided at the inner lower end thereof. There is. The vibrator 2 has a spherical contact portion 2A at its lower end that comes into contact with the object to be measured, and a balancer 2B at the upper end that has the same weight as the contact portion 2A. Since this balancer 2B is provided with the contact portion 2A at the lower end of the vibrator 2, the balance is balanced so that the node of vibration at the time of resonance does not deviate from the center of the vibrator 2, and the touch signal probe 10 is used.
Is to prevent the rotation moment of the support point from being received when the entire body moves in a direction intersecting the vibration direction of the vibrator 2 and receives acceleration. Therefore, the balancer 2B may be the same sphere as the contact portion 2A.

The detailed structure of the mounting portion 3 is shown in FIGS. 2 shows a state before the piezoelectric element 4 is attached to the attachment portion 3, and FIG. 3 shows a state after the piezoelectric element 4 is attached to the attachment portion 3. In these figures, the mounting portion 3 is provided with a conductive prismatic portion 6 provided at a substantially central portion of the vibrator 2, and at both axial ends of the prismatic portion 6 substantially orthogonal to the axis of the vibrator 2 and at the same time. And a flange portion 7 having a pair of wall surfaces 7A facing each other.

The flange portions 7 are provided at two places with the axis of the vibrator 2 interposed therebetween, and mounting surfaces 6A parallel to the axis of the vibrator 2 are formed on the prism portion 6 between the flange portions 7. . Here, when an axis parallel to the axis of the vibrator 2 is an X axis, an axis orthogonal to the X axis is a Y axis, and an axis orthogonal to a plane including the X axis and the Y axis is a Z axis, the mounting surface 6A is X. The wall surface 7A is formed in a plane including the axis and the Z axis, and the wall surface 7A is formed in a plane including the Y axis and the Z axis.

The two piezoelectric elements 4 are connected to the axis (X
(A shaft) and are opposed to each other by press-fitting between the wall surfaces 7A of the flange portion 7.
A, and the entire back surface is in contact with the mounting surface 6A. The piezoelectric element 4 is formed such that its dimension in the X-axis direction is slightly larger than the dimension between the opposing wall surfaces 7A. Therefore, in order to press fit the piezoelectric element 4 into the flange 7, the piezoelectric element 4 is cooled to reduce its dimension, and the flange portion 7 is heated to increase the dimension between the wall surfaces 7A. When the temperature returns to room temperature, the piezoelectric element 4 is fixed to the flange portion 7 in a press-fitted state.

The piezoelectric element 4 is polarized in the thickness direction, and its surface is provided with a vibrating electrode 4A for vibrating the vibrator 2 at a frequency substantially matching the natural frequency of the vibrator 2. It has a general structure having a detection electrode 4B for taking out the vibration of the vibrator 2 as an electric signal and a back surface thereof having a common electrode. A drive circuit and a detection circuit (not shown) are connected to the vibration electrode 4A and the detection electrode 4B. These circuits are the same as those used in conventional touch signal probes.

The back surface of the piezoelectric element 4 forming the common electrode is connected to a lead wire (not shown). Here, since the back surface of the piezoelectric element 4 is in contact with the mounting surface 6A, the lead wire is connected to the mounting portion 3. In the case where the back surface of the piezoelectric element 4 and the mounting surface 6A are not sufficiently in contact with each other, a flexible substance such as a conductive paint may be provided on the mounting surface 6A.

Therefore, in the first embodiment, a flange portion 7 having a pair of wall surfaces 7A facing each other with respect to the axis of the vibrator 2 is provided in the vicinity of the vibration node of the vibrator 2, and between the flange portions 7. Form the mounting surface 6A parallel to the axis of the vibrator 2,
Since the piezoelectric element 4 is press-fitted and fixed between the wall surfaces 7A of the flange portion 7 so as to contact the mounting surface 6A, the piezoelectric element 4 can be securely fixed to the vibrator 2 without using an adhesive or solder.

Therefore, the Q value does not decrease due to the viscosity effect of the adhesive, and the touch signal probe 10 can be made highly sensitive and highly accurate. Moreover, since there is no change in the characteristics of the adhesive due to temperature changes, the stability of the touch signal probe 10 can be ensured for a long period of time. Further, since no adhesive or the like is used, the touch signal probe 10 can be assembled quickly and easily, and the manufacturing cost can be reduced.

Further, in the first embodiment, the piezoelectric element 4 has its rear surface and both side surfaces in contact with the mounting surface 6A and the wall surface 7A. Even if an impact force is erroneously applied to the touch signal probe 10, the piezoelectric element 4 does not shift. Also, the first
In the embodiment, since the pair of wall surfaces 7A facing each other are formed parallel to the plane including the Y axis and the Z axis, the flange portion 7 can be easily formed.

Next, a second embodiment of the present invention will be described with reference to FIGS. In the second embodiment, the shapes of the wall surface and the piezoelectric element are different from those of the first embodiment,
Other configurations are the same as those of the first embodiment. FIG. 4 shows the second
The essential parts of the embodiment of are shown. In FIG. 4, the touch signal probe 20 according to the second embodiment includes a stylus holder 1 (not shown in FIG. 4), the vibrator 2 attached to the stylus holder 1, and the vibrator 2. Two piezoelectric elements 24 provided in the vicinity of the node of the natural vibration in the axial direction via the mounting portion 23 and formed in a planar rectangular plate shape.
It is comprised including.

The mounting portion 23 is provided with the prism portion 6 provided in the substantially central portion of the vibrator 2, and a pair of axially opposite ends of the prism portion 6 which are substantially orthogonal to the axis of the vibrator 2 and face each other. And a flange portion 27 having a wall surface 27A. The flange portions 27 are provided at two places with the shaft of the vibrator 2 interposed therebetween, and the mounting surfaces 6A are formed on the prismatic portions 6 between the flange portions 27, respectively.

Here, the pair of wall surfaces 27A are each formed at an acute angle with respect to the mounting surface 6A. That is, wall surface 2
7A is formed such that its tip is inclined inward by an angle α with respect to a plane including the Y axis and the Z axis. Two piezoelectric elements 2
4 are press-fitted and fixed between the wall surfaces 27A of the flange portion 27 in a state of facing each other with the axis (X axis) of the vibrator 2 interposed therebetween. It is in contact with 6A. Both sides of the piezoelectric element 24 are formed in a wedge shape so as to correspond to the wall surface 27A. The piezoelectric element 24 has the same structure as the piezoelectric element 4 except that the shapes of both sides of the piezoelectric element 24 are different from those of the piezoelectric element 4.

In addition to the effects of the first embodiment, the second embodiment of this configuration can achieve the following effects. That is, in the touch signal probe 10 according to the first embodiment, the wall surface 7A of the flange portion 7 and both side portions of the piezoelectric element 4 may be processed into an ideal shape.
As shown in FIG. 3, when the wall surface 7A is uneven due to a processing error, the fitting state between the both end surfaces of the piezoelectric element 4 and the wall surface 7A is not uniform, and a large force is applied only to a part of the piezoelectric element 4. Will affect. Therefore, when it is excessive, the piezoelectric element 4 is bent and deformed, resulting in damage.

On the other hand, in the second embodiment,
The pair of wall surfaces 27A are formed at an acute angle with respect to the mounting surface 6A, and the piezoelectric element 27 has wall portions 2 on both sides thereof.
Since it is formed in a wedge shape so as to correspond to 7A, the piezoelectric element 24 is attached to the flange portion 27.
Is inserted into the wall surface 27A of the flange portion 27,
Since the piezoelectric element 24 is pressed against the mounting surface 6A, the piezoelectric element 24 can be adhered and fixed to the mounting surface 6A, and the piezoelectric element 27 can be securely mounted on the vibrator 2.

Next, a third embodiment of the present invention will be described with reference to FIGS. 6 to 8. The third embodiment is different from the first embodiment in the shapes of the wall surface and the piezoelectric element,
Other configurations are the same as those of the first embodiment. FIG. 6 shows the third
The essential parts of the embodiment of are shown. 6, the touch signal probe 30 according to the third embodiment includes the stylus holder 1 (not shown in FIG. 6), the vibrator 2 attached to the stylus holder 1, and the axis of the vibrator 2. Two piezoelectric elements 34, which are provided in the vicinity of the node of the natural vibration in the direction and have a plate shape and are provided via the mounting portion 33, are configured.

The mounting portion 33 includes the prismatic portion 6 provided at a substantially central portion of the vibrator 2 and a flange portion 37 having a pair of wall surfaces 37A opposed to each other at both axial ends of the prismatic portion 6. It is equipped with. Flange 37
Are provided in two places with the axis of the vibrator 2 interposed therebetween, and the mounting surfaces 6A are formed on the prismatic portion 6 between the flange portions 37, respectively.

Here, the pair of wall surfaces 37A are formed such that the distance between them becomes narrower in the direction parallel to the mounting surface 6A (inclined inward by an angle β with respect to the Z axis), and the mounting surface 6A is also formed. Is formed at a right angle to. The two piezoelectric elements 34 are press-fitted and fixed between the wall surfaces 37A of the flange portion 37 in a state of being opposed to each other with the axis (X axis) of the vibrator 2 interposed therebetween, and the entire surfaces on both sides contact the wall surface 37A,
The entire back surface is in contact with the mounting surface 6A. Piezoelectric element 3
4 is formed into a flat trapezoid so that both sides thereof correspond to the wall surface 37A. The piezoelectric element 34 has the same structure as the piezoelectric element 4 except for the shapes of both sides of the piezoelectric element 34.

In the third embodiment, when press-fitting the piezoelectric element 34 between the flange portions 37, as shown in FIG. 7A, the piezoelectric element 34 is attached to the wall surface 37 along the mounting surface 6A.
Extrude in the direction that the distance between A becomes narrower. Piezoelectric element 34
When is fully extruded, as shown in FIG. 7 (B),
The piezoelectric element 34 is press-fitted and fixed between the flange portions 37.

In addition to the effects of the first embodiment, the third embodiment of this structure can exert the following effects. That is, in the third embodiment, the pair of wall surfaces 37A are formed such that the distance between them becomes narrower in the direction parallel to the mounting surface 6A, and the piezoelectric element 34 is arranged so that both sides thereof correspond to the wall surface 37A. Since it was formed into a flat trapezoid,
The piezoelectric element 34 can be attached to the flange portion 37 by extruding the piezoelectric element 34 along the attachment surface 6A in a direction in which the distance between the wall surfaces 37A becomes narrower. The piezoelectric element 34 used in the first embodiment is used. Since the cooling work etc. is unnecessary, the press-fitting work of the piezoelectric element 34 becomes easy. In the third embodiment, as shown in FIG. 8, the angles of the pair of wall surfaces 37A with respect to the Z axis may not be the same. Even in this case, both sides of the piezoelectric element 37 need to have a shape corresponding to the wall surface 37A.

Next, a fourth embodiment of the present invention will be described with reference to FIG. The fourth embodiment is different from the first embodiment in the shape of the prismatic portion, and the other configurations are the same as those in the first embodiment. FIG. 9 shows the main part of the fourth embodiment. In FIG. 9, the touch signal probe 40 according to the fourth embodiment includes a stylus holder 1 (not shown in FIG. 9), the vibrator 2 attached to the stylus holder 1, and the vibrator 2. Two piezoelectric elements 4 are provided in the vicinity of the node of the natural vibration in the axial direction via the mounting portion 43.

The mounting portion 43 includes the prismatic portion 46 provided in the substantially central portion of the vibrator 2 and the flange portion 7 having a pair of wall surfaces 7A facing each other at both axial ends of the prismatic portion 46. It is equipped with. Between the flange portions 7, the mounting surface 46A is formed continuously with the wall surface 7A, and a groove 46B is formed in the mounting surface 46A. The groove 46B is for guiding a lead wire (not shown) connected to the piezoelectric element 4.

In the fourth embodiment having this structure, in addition to the effect of the first embodiment, a groove 46B for guiding a lead wire (not shown) connected to the piezoelectric element 4 is formed in the mounting surface 46A. Since it is formed, it becomes possible to directly draw a lead wire from the back surface of the piezoelectric element 4 by using this groove 46B.
Problems due to poor contact disappear.

Next, a fifth embodiment of the present invention will be described with reference to FIG.
It will be described based on. The structure of the flange portion of the fifth embodiment is different from that of the first embodiment, and other configurations are the same as those of the first embodiment. FIG. 10 shows the main part of the fifth embodiment. 10, the touch signal probe 50 according to the fifth embodiment includes a stylus holder 1 (not shown in FIG. 10), the vibrator 2 attached to the stylus holder 1, and the vibrator 2. The piezoelectric element 4 is provided with two piezoelectric elements 4 provided via a mounting portion 53 in the vicinity of a node of natural vibration in the axial direction.

The mounting portion 53 is provided with the prism portion 6 provided at the substantially central portion of the vibrator 2, and a pair of axially opposite ends of the prism portion 6 that are substantially orthogonal to the axis of the vibrator 2 and face each other. Ring-shaped flange portion 5 having a wall surface 57A of
7B and 57C. Of these, one flange portion 57B is fixed to the prismatic portion 6, and the other flange portion 57C is detachably attached to the vibrator 2.

That is, the vibrator 2 is provided with the male screw portion 2D, and the female screw portion 57D of the flange portion 57C is screwed into the male screw portion 2D. In the fifth embodiment, both flange portions 57B and 57C may be detachably attached to the vibrator 2. Flange part 5
When 7C is attached to the vibrator 2, the wall surface 57A of each of the flange portions 57B and 57C is perpendicular to the attachment surface 6A.

In addition to the effects of the first embodiment, the fifth embodiment of this structure has a structure in which the flange portion 57C is detachably attached to the vibrator 2, and therefore is fixed to the vibrator 2. By disposing the piezoelectric element 4 between the one flange portion 57B and the other flange portion 57C, and pressing the other flange portion 57C toward the one flange portion 57B side in this state, the flange portion 57 of the piezoelectric element 4 is formed.
It can be easily press-fitted and fixed to B and 57C.

The present invention is not limited to the above-described embodiment, but includes the following modified examples as long as the object of the present invention can be achieved. For example, in the above-described embodiment, the surfaces of the piezoelectric elements 4, 24, and 34 of the vibrator 2 and the excitation electrode 4A that vibrate the vibrator 2 at a frequency substantially matching the natural frequency of the vibrator 2. Although the structure has the detection electrode 4B for extracting the vibration as an electric signal, in the present invention, a detection means other than the piezoelectric element may be used for detecting the vibration means.

Furthermore, in each of the above-described embodiments, the case where the present invention is applied to a coordinate measuring machine has been described, but in the present invention,
Not limited to this, it is also possible to apply to a two-dimensional measuring machine, a contour measuring machine, and the like. Further, a structure in which the second embodiment and the third embodiment are combined may be used. That is, the piezoelectric element may have a trapezoidal plane shape, both sides thereof may be formed in a wedge shape, and the wall surface may be formed according to the shape of the piezoelectric element.

[0043]

As described above, according to the present invention, a vibrator having a contact portion that comes into contact with the object to be measured is formed in a substantially columnar shape, and the vibrator is provided near the node of the natural vibration in the axial direction of the vibrator. A piezoelectric element that excites the vibrator at a frequency substantially matching the natural frequency of is arranged, and a flange having a pair of wall surfaces facing each other on the axis of the vibrator is provided near the vibration node of the vibrator. Form a mounting surface parallel to the oscillator axis between the flanges,
Since the piezoelectric element is press-fitted and fixed between the wall surfaces of the flange portion so as to come into contact with the mounting surface, the piezoelectric element can be securely fixed to the vibrator without using an adhesive or solder. Therefore, the Q value does not decrease due to the viscous effect of the adhesive, the touch signal probe can be made highly sensitive and highly accurate, and the characteristics of the adhesive do not change due to temperature changes. The stability of the touch signal probe can be secured, and the touch signal probe can be assembled quickly and easily.

[Brief description of drawings]

FIG. 1 is a perspective view showing an entire touch signal probe according to a first embodiment of the present invention.

FIG. 2 is a perspective view of a main part of the touch signal probe showing a state before a piezoelectric element is attached.

FIG. 3 is a perspective view of an essential part of the touch signal probe showing a state in which a piezoelectric element is attached.

FIG. 4 is a diagram corresponding to FIG. 2 showing a main part of a touch signal probe according to a second embodiment of the present invention.

FIG. 5 is a front view of relevant parts for explaining a problem of the touch signal probe according to the first embodiment.

FIG. 6 is a view showing a main part of a touch signal probe according to a third embodiment of the present invention and is a view corresponding to FIG. 2.

7A and 7B are front views for explaining a press-fitting operation of a piezoelectric element in a touch signal probe according to a third embodiment of the present invention.

FIG. 8 is a main part front view showing a modified example of the touch signal probe according to the third embodiment of the invention.

FIG. 9 is a perspective view showing a main part of a touch signal probe according to a fourth embodiment of the invention.

FIG. 10 is a view showing a main part of a touch signal probe according to a fifth embodiment of the present invention and is a view corresponding to FIG. 2.

[Explanation of symbols]

 2 Oscillator 2A Contact part 4,24,34 Piezoelectric element 6A, 46A Mounting surface 7,27,37,57B, 57C Flange part 7A, 27A, 37A, 57A Wall surface 10,20,30,40,50 Touch signal probe 46B groove

Claims (5)

[Claims] 1. A vibrator formed in a substantially columnar shape having a contact portion for contacting an object to be measured at the tip, and a vibrator which is arranged in the vicinity of a node of natural vibrations in the axial direction of the vibrator and has a natural frequency substantially equal to the natural frequency. A touch signal probe comprising a piezoelectric element for exciting the vibrator at a matched frequency, wherein a flange portion having a pair of wall surfaces facing each other is provided in the vicinity of a vibration node of the vibrator, and the flange portion is provided. A touch signal probe, wherein a mounting surface parallel to the axis of the vibrator is formed between the piezoelectric element and the piezoelectric element is press-fitted and fixed so as to come into contact with the mounting surface between the wall surfaces of the flange portion. 2. The touch signal probe according to claim 1, wherein the pair of wall surfaces are formed at an acute angle with respect to the mounting surface, and the piezoelectric element has a wedge shape so that both sides thereof correspond to the wall surface. A touch signal probe characterized by being formed. 3. The touch signal probe according to claim 1 or 2, wherein the pair of wall surfaces are formed such that a distance between the pair of wall surfaces is narrowed in a direction parallel to the mounting surface, and the piezoelectric element has both side portions. A touch signal probe, which is formed so as to correspond to the wall surface. 4. The touch signal probe according to claim 1, wherein a groove for guiding a lead wire connected to the piezoelectric element is formed on the mounting surface. Signal probe. 5. The touch signal probe according to claim 1, wherein the flange portion is detachably attached to the vibrator.