JPH09208235A - Production of silica glass - Google Patents

Production of silica glass

Info

Publication number
JPH09208235A
JPH09208235A JP8015988A JP1598896A JPH09208235A JP H09208235 A JPH09208235 A JP H09208235A JP 8015988 A JP8015988 A JP 8015988A JP 1598896 A JP1598896 A JP 1598896A JP H09208235 A JPH09208235 A JP H09208235A
Authority
JP
Japan
Prior art keywords
gel
polyvinyl acetate
sol
methanol
silica glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8015988A
Other languages
Japanese (ja)
Inventor
Koichi Takei
康一 武井
Yoichi Machii
洋一 町井
Toshikatsu Shimazaki
俊勝 嶋崎
Hiroki Terasaki
裕樹 寺崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP8015988A priority Critical patent/JPH09208235A/en
Publication of JPH09208235A publication Critical patent/JPH09208235A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)

Abstract

PROBLEM TO BE SOLVED: To prevent the cracking of dry gel in a low temp. region in a firing process and enhance the yield of a product by limiting polyvinyl acetate used for preparing a sol when silica glass is produced by a sol-gel method. SOLUTION: A sol prepd. by hydrolyzing a condensation polymer of a silicon alkoxide with a base catalyst in the presence of polyvinyl acetate and a mixed solvent consisting of methanol and a high b.p. solvent is made gel and this gel is dried and vitrified by firing. The polyvinyl acetate has >=1×10<-4> mol.cm<3> /g second virial. coefft. measured with a light scattering photometer.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、ゾルーゲル法によ
るシリカガラスの製造法に関する。
TECHNICAL FIELD The present invention relates to a method for producing silica glass by a sol-gel method.

【0002】[0002]

【従来の技術】ゾルーゲル法は、従来採用されてきた気
相法による合成石英ガラスの製造方法と比較して、1)
合成温度が低いことからエネルギーコストが低い、2)
気相法で大形・高均質ガラスを得るためには不可欠なガ
ラスの高温成形及びアニール処理なしで大形・高均質の
ガラスを得ることができる、3)ゾルを容器に注入、ゲ
ル化する過程で容器形状によりゲル形状が制御可能であ
るため、ガラスの加工コストと低減できる等の利点があ
り、研究が行われている。
2. Description of the Related Art The sol-gel method is 1) compared with the conventional method for producing synthetic quartz glass by the vapor phase method.
Low energy cost due to low synthesis temperature 2)
Large and highly homogeneous glass can be obtained without high temperature forming and annealing of glass, which is indispensable for obtaining large and highly homogeneous glass by the vapor phase method. 3) Inject sol into a container and gel Since the shape of the gel can be controlled by the shape of the container in the process, there are advantages such as the cost of processing the glass and reduction, and research is being conducted.

【0003】ゾルーゲル法による大形の石英ガラスを製
造するプロセスとして、ポリ酢酸ビニルなどの有機ポリ
マを添加し、ジメチルホルムアミド、テトラヒドロフル
フリルアルコールなどの高沸点溶媒を含む溶媒を使用
し、シリコンアルコキシドの縮重合物を塩基触媒を用い
て加水分解してゾルを調製し、ゲル化し、乾燥して乾燥
ゲルとし、これを焼成して石英ガラスを得る方法が提案
されている。上記の方法によれば、比較的容易に大形の
石英ガラスを作製できる。
As a process for producing large quartz glass by the sol-gel method, an organic polymer such as polyvinyl acetate is added, a solvent containing a high boiling point solvent such as dimethylformamide and tetrahydrofurfuryl alcohol is used, and a silicon alkoxide of A method has been proposed in which a condensation polymer is hydrolyzed using a base catalyst to prepare a sol, which is gelled, dried to obtain a dry gel, and the silica gel is fired to obtain quartz glass. According to the above method, large-sized quartz glass can be manufactured relatively easily.

【0004】[0004]

【発明が解決しようとする課題】しかし、有機ポリマと
してポリ酢酸ビニルを用い、溶媒としてメタノールとジ
メチルホルムアミド、テトラヒドロフルフリルアルコー
ルなどの高沸点溶媒の混合溶媒を用いて、大形の乾燥ゲ
ルを得、ついで焼成して石英ガラスを作製する場合、焼
成過程の低温(200℃以下)で割れが発生し、製品歩
留まりが著しく低下するという問題が発生した。
However, using polyvinyl acetate as an organic polymer and a mixed solvent of a high boiling point solvent such as methanol and dimethylformamide or tetrahydrofurfuryl alcohol as a solvent, a large dry gel is obtained. Then, when quartz glass is produced by firing, cracks occur at a low temperature (200 ° C. or less) in the firing process, resulting in a problem that the product yield is remarkably reduced.

【0005】本発明は、ポリ酢酸ビニル及びメタノール
と高沸点溶媒の混合溶媒の共存下でシリコンアルコキシ
ドの縮重合物を塩基触媒を用いて加水分解してゾルと
し、ゲル化し、乾燥して乾燥ゲルとし、ついで焼成して
シリカガラスとするゾルーゲル法によるシリカガラスに
製造方法において、乾燥ゲルの焼成過程の低温域での割
れ発生を防止し、製品歩留まりを向上させる方法を提供
するものである。
The present invention hydrolyzes a polycondensation product of a silicon alkoxide using a base catalyst in the presence of a mixed solvent of polyvinyl acetate and methanol and a high boiling point solvent to give a sol, which is gelled and dried to give a dried gel. Then, in the method for producing silica glass by the sol-gel method in which the silica glass is then fired, a method for preventing the occurrence of cracks in the low temperature region of the firing process of the dry gel and improving the product yield is provided.

【0006】[0006]

【課題を解決するための手段】本発明は、ポリ酢酸ビニ
ル及びメタノールと高沸点溶媒の混合溶媒の存在下で、
シリコンアルコキシドの縮重合物を塩基触媒を用いて加
水分解してゾルをゲル化し、乾燥して乾燥ゲルとし、つ
いで焼成してガラスとするシリカガラスの製造法におい
て、ポリ酢酸ビニルのメタノール溶液を光散乱光度計で
計測して測定される第2ビリアル係数が1×10-4mo
l・cm3/g2以上のポリ酢酸ビニルを使用すること
を特徴とするシリカガラスの製造法である。
The present invention is carried out in the presence of polyvinyl acetate and a mixed solvent of methanol and a high boiling point solvent,
Hydrolysis of a polycondensation product of silicon alkoxide using a base catalyst causes the sol to gel, is dried to give a dry gel, and is then fired to give a glass. The second virial coefficient measured by a scattering photometer is 1 × 10 -4 mo
A method for producing silica glass, characterized by using polyvinyl acetate of 1 · cm3 / g2 or more.

【0007】すなわち本発明では、ポリ酢酸ビニルとし
て、そのメタノール溶液を光散乱光度計にかけて測定し
た第2ビリアル係数が1x10-4mol・cm3/g2
以上となるポリ酢酸ビニルを使用することとした。ポリ
酢酸ビニルのメタノール溶液を用い、25℃の温度で光
散乱光度計を用いて測定された第2ビリアル係数が1x
10-4mol・cm3/g2未満の場合、作製された乾
燥ゲルを焼成ガラス化する際に割れが発生しやすい。本
発明で、第2ビリアル係数の測定に使用した装置は大塚
電子(株)製DLS−700であるが、本発明で規定し
た第2ビリアル係数は測定装置に限定されるものでない
ことは言うまでもなく、同等の性能あるいは同様の値を
求めることができるを他の装置を用いて測定してもかま
わない。
That is, in the present invention, as polyvinyl acetate, the second virial coefficient of the methanol solution thereof measured by a light scattering photometer is 1 × 10 −4 mol · cm 3 / g 2
It was decided to use the above-mentioned polyvinyl acetate. The second virial coefficient measured using a light scattering photometer at a temperature of 25 ° C. using a methanol solution of polyvinyl acetate has a value of 1 ×
When it is less than 10 −4 mol · cm 3 / g 2, cracks are likely to occur when the produced dry gel is vitrified into a glass. In the present invention, the device used for measuring the second virial coefficient is DLS-700 manufactured by Otsuka Electronics Co., Ltd. However, it goes without saying that the second virial coefficient specified in the present invention is not limited to the measuring device. , It is possible to obtain equivalent performance or a similar value, but the measurement may be performed by using another device.

【0008】[0008]

【発明の実施の形態】溶媒としては、メチルアルコール
とジメチルホルムアミド、テトラヒドロフルフリルアル
コールなどの高沸点溶媒の混合溶媒が使用できる。高沸
点溶媒として、その他にジメチルアセトアミド、メチル
セロソルブ、エチルセロソルブなどのセロソルブ類など
を使用してもよい。
BEST MODE FOR CARRYING OUT THE INVENTION As the solvent, a mixed solvent of methyl alcohol and a high boiling point solvent such as dimethylformamide and tetrahydrofurfuryl alcohol can be used. As the high boiling point solvent, cellosolves such as dimethylacetamide, methyl cellosolve and ethyl cellosolve may be used.

【0009】シリコンアルコキシドの縮重合物として
は、シリコンメトキシド、シリコンエトキシド、シリコ
ンプロポキシドなどの縮重合物が使用できるが、原料コ
スト及び加水分解のしやすさの点でシリコンメトキシド
の縮重合物の使用が好ましい。
As polycondensation products of silicon alkoxides, polycondensation products such as silicon methoxide, silicon ethoxide and silicon propoxide can be used, but in view of raw material cost and easiness of hydrolysis, polycondensation products of silicon methoxide can be used. The use of polymers is preferred.

【0010】シリコンアルコキシドの縮重合物の加水分
解に使用する塩基触媒としては、水酸化アンモニウム、
水酸化テトラメチルアンモニウム、水酸化テトラエチル
アンモニウム、水酸化n−プロピルアンモニウム、コリ
ンなどが使用でるが、コリンが好適な結果を与える。
As the base catalyst used for the hydrolysis of the condensation product of silicon alkoxide, ammonium hydroxide,
Tetramethylammonium hydroxide, tetraethylammonium hydroxide, n-propylammonium hydroxide, choline and the like can be used, with choline providing suitable results.

【0011】[0011]

【作用】本発明で解決しようとした乾燥ゲルの焼成過程
の低温域での割れ発生原因及びそれに対する本発明の効
果については以下のように考えられる。第2ビリアル係
数は溶媒と溶質の相互作用の強さを表すものとして知ら
れている。すなわち、測定されたメタノール溶液中での
ポリ酢酸ビニルの第2ビリアル係数が小さいと言うこと
は、メタノールとポリ酢酸ビニルとの相互作用が小さ
く、逆に言えば溶液中でのポリ酢酸ビニル分子同士の相
互作用が強いことを表し、これはこのようなポリ酢酸ビ
ニルではメタノール溶液中で分子同士の凝集が起こりや
すいことを示している。これより、第2ビリアル係数の
小さなポリ酢酸ビニルをメタノールを含むゾル調製用混
合液に添加した場合、溶液中でポリ酢酸ビニル分子の凝
集が起こり、その際に共存する液相(シリコンアルコキ
シドの縮重合物、ジメチルホルムアミド、テトラヒドロ
フルフリルアルコールなど)の凝集体内への取り込みが
発生すると考えられる。さらに上記の混合溶液にシリコ
ンアルコキシドの縮重合物の加水分解用として塩基触媒
を添加すると、ポリ酢酸ビニルは塩基触媒によって容易
にけん化を受けポリビニルアルコールになりポリビニル
アルコールは系内に多量に存在するアルコールに不溶な
ため、上記のような高分子の凝集はさらに促進されるこ
とになり、系内に内部に多くのシリコンアルコキシドの
縮重合物、ジメチルホルムアミド、テトラヒドロフルフ
リルアルコールを含有した高分子の凝集体が数多く生ず
るであろう。このような高分子凝集体を含む溶液を用い
てゾルを作製し、ゲル化、乾燥すると、高分子の凝集体
内部に取り込まれた液相の蒸発が遅いため、他の部分よ
りもジメチルホルムアミドやテトラヒドルフルフリルア
ルコールの含有量が多い高分子凝集体を含んだ乾燥ゲル
が得られることになる。このような乾燥ゲルを焼成する
と、加熱過程で高分子凝集体内部のジメチルホルムアミ
ド及びテトラヒドロフルフリルアルコールが急激に放出
される、あるいは高分子の軟化及び凝集体内部のガス圧
の増加により凝集体が膨張し、その結果としてゲルの割
れが発生すると考えられる。上記のような割れ発生原因
についての考察は、ゾルをゲル化した後ゲル内の液相を
遠心分離によって取り出し、これを乾燥して得たゲルの
比表面積及び含まれるジメチルホルムアミド、テトラヒ
ドロフルフリルアルコール量を分析すると、本発明で規
定した値より小さな第2ビリアル係数を持つポリ酢酸ビ
ニルを用いた場合、比表面積の値は著しく小さくなり、
またジメチルホルムアミド及びテトラヒドロフルフリル
アルコールの量が多くなるという実験結果によって支持
されると考えられる。本発明で規定したような第2ビリ
アル係数の大きなポリ酢酸ビニルを用いると、ゲル内の
液相を乾燥して得たゲルの比表面積が大きくなり、一
方、ジメチルホルムアミド及びテトラヒドロフルフリル
アルコール含有量が小さくなることから、上記のような
割れの原因となる高分子凝集体の生成が抑制されたもの
と考えられる。
The cause of cracking in the low temperature region during the firing process of the dry gel and the effect of the present invention on it, which are intended to be solved by the present invention, are considered as follows. The second virial coefficient is known to represent the strength of the interaction between the solvent and the solute. That is, the fact that the second virial coefficient of polyvinyl acetate in the measured methanol solution is small means that the interaction between methanol and polyvinyl acetate is small, and conversely, the polyvinyl acetate molecules in the solution are Is strong, which means that in such a polyvinyl acetate, molecules tend to aggregate in a methanol solution. From this, when polyvinyl acetate having a small second virial coefficient is added to a mixed solution for sol preparation containing methanol, polyvinyl acetate molecules are agglomerated in the solution, and the coexisting liquid phase (condensation of silicon alkoxide) occurs. It is considered that the incorporation of the polymer, dimethylformamide, tetrahydrofurfuryl alcohol, etc.) into the aggregate occurs. Furthermore, when a base catalyst is added to the above-mentioned mixed solution for hydrolysis of a polycondensation product of silicon alkoxide, polyvinyl acetate is easily saponified by the base catalyst to become polyvinyl alcohol, and polyvinyl alcohol is an alcohol present in a large amount in the system. Therefore, the agglomeration of the polymer as described above is further promoted, and the condensation of the polymer containing a large amount of a polycondensation product of silicon alkoxide, dimethylformamide, and tetrahydrofurfuryl alcohol in the system is further promoted. Many collections will occur. When a sol is prepared using a solution containing such polymer aggregates, and gelled and dried, the liquid phase taken inside the polymer aggregates evaporates slowly, so dimethylformamide and It is possible to obtain a dry gel containing a polymer aggregate having a high content of tetrahiddlefurfuryl alcohol. When such a dried gel is fired, dimethylformamide and tetrahydrofurfuryl alcohol inside the polymer aggregate are rapidly released during the heating process, or the aggregate is formed due to the softening of the polymer and the increase in gas pressure inside the aggregate. It is believed that the gel expands and, as a result, the gel cracks. Regarding the cause of cracking as described above, the gel phase of the sol, the liquid phase in the gel was removed by centrifugation, and the specific surface area of the gel obtained by drying this and the dimethylformamide contained therein and tetrahydrofurfuryl alcohol were included. When the amount is analyzed, when polyvinyl acetate having a second virial coefficient smaller than the value specified in the present invention is used, the value of the specific surface area becomes remarkably small,
It is also believed to be supported by the experimental results that the amounts of dimethylformamide and tetrahydrofurfuryl alcohol are high. When polyvinyl acetate having a large second virial coefficient as defined in the present invention is used, the specific surface area of the gel obtained by drying the liquid phase in the gel is increased, while the content of dimethylformamide and tetrahydrofurfuryl alcohol is increased. It is considered that the formation of polymer aggregates that cause the above-described cracking was suppressed because the value of γ becomes smaller.

【0012】[0012]

【実施例】【Example】

実施例1 シリコンメトキシドの縮重合物100重量部にメタノー
ル50重量部、ジメチルホルムアミド35重量部、テト
ラヒドロフルフリルアルコール27重量部、及び本発明
の詳細な説明で述べた方法で測定された第2ビリアル係
数が2×10-4mol・cm3/g2のポリ酢酸ビニル
メタノール溶液(固形分濃度50%、重合度:150
0)10重量部を加えて30分撹拌し、これにコリンメ
タノール溶液(1M)1重量部を加えた。ついで水39
重量部を滴下してゾルを作製した。得られたゾルを60
cm角のテフロンコーテイングしたステンレス製容器に
注入し、開口部にポリ塩化ビニルフイルムとアルミ箔を
張った蓋をポリ塩化ビニル面側をゲル側にして容器に設
置し、室温に放置しゾルをゲル化した。ついで容器を乾
燥機に移し、50℃で30h加熱した後、温度を室温に
戻し、容器の蓋についているアルミ箔を除去し、ついで
温度を30℃から120℃まで順次温度を上昇させて乾
燥を行った。得られた乾燥ゲルを空気中、室温から10
0℃まで20℃/hで、100℃から200℃まで2℃
/hの速度で昇温し、割れの発生の有無を調べたとこ
ろ、割れは観察されなかった。
Example 1 100 parts by weight of a polycondensation product of silicon methoxide, 50 parts by weight of methanol, 35 parts by weight of dimethylformamide, 27 parts by weight of tetrahydrofurfuryl alcohol, and a second amount measured by the method described in the detailed description of the present invention. Polyvinyl acetate methanol solution with virial coefficient of 2 × 10 -4 mol · cm3 / g2 (solid concentration 50%, degree of polymerization: 150
0) 10 parts by weight was added and stirred for 30 minutes, and 1 part by weight of choline methanol solution (1M) was added thereto. Then water 39
A weight part was dropped to prepare a sol. The sol obtained is 60
Pour into a cm-square Teflon-coated stainless steel container, place a lid with polyvinyl chloride film and aluminum foil on the opening with the polyvinyl chloride side facing the gel side, and place it in the container and let stand at room temperature to gel the sol. Turned into Then, the container was transferred to a dryer and heated at 50 ° C. for 30 hours, then the temperature was returned to room temperature, the aluminum foil on the container lid was removed, and then the temperature was raised from 30 ° C. to 120 ° C. in order to dry. went. The obtained dry gel is heated in air from room temperature to 10
20 ℃ / h to 0 ℃, 2 ℃ from 100 ℃ to 200 ℃
When the temperature was raised at a rate of / h and the presence or absence of cracks was examined, no cracks were observed.

【0013】実施例2 本発明の詳細な説明で述べた方法で測定された第2ビリ
アル係数が2.5×10-4mol・cm3/g2のポリ
酢酸ビニルメタノール溶液(固形分50%、重合度15
00)を用い、実施例1と同様にして乾燥ゲルを作製
し、200℃までの焼成過程での割れ発生の有無を調べ
たところ、割れは観察されなかった。
Example 2 Polyvinyl acetate methanol solution having a second virial coefficient of 2.5 × 10 −4 mol · cm 3 / g 2 measured by the method described in the detailed description of the present invention (solid content 50%, polymerization 15 degrees
00) was used to prepare a dry gel in the same manner as in Example 1, and the presence or absence of cracks in the firing process up to 200 ° C. was examined. No cracks were observed.

【0014】比較例 本発明の詳細な説明で述べた方法で測定された第2ビリ
アル係数が0.8×10-4mol・cm3/g2のポリ
酢酸ビニルメタノール溶液(固形分50%、重合度15
00)を用い、実施例1と同様にして乾燥ゲルを作製
し、200℃までの焼成過程での割れ発生の有無を調べ
たところ、割れが観察された。
Comparative Example Polyvinyl acetate methanol solution having a second virial coefficient of 0.8 × 10 −4 mol · cm 3 / g 2 measured by the method described in the detailed description of the present invention (solid content 50%, degree of polymerization) 15
No. 00) was used to prepare a dry gel in the same manner as in Example 1, and the presence or absence of cracks in the firing process up to 200 ° C. was examined. As a result, cracks were observed.

【0015】[0015]

【発明の効果】本発明のゾルーゲル法による石英ガラス
の製造方法によれば、ゲルの乾燥歩留まりを飛躍的に向
上させることができ、製品コストを低減できる。
According to the method for producing quartz glass by the sol-gel method of the present invention, the dry yield of gel can be dramatically improved and the product cost can be reduced.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 寺崎 裕樹 茨城県つくば市和台48 日立化成工業株式 会社筑波開発研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroki Terasaki 48 Wadai, Tsukuba City, Ibaraki Prefecture Hitachi Chemical Co., Ltd. Tsukuba Development Laboratory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ポリ酢酸ビニル及びメタノールと高沸点
溶媒の混合溶媒の存在下で、シリコンアルコキシドの縮
重合物を塩基触媒を用いて加水分解してゾルをゲル化
し、乾燥して乾燥ゲルとし、ついで焼成してガラスとす
るシリカガラスの製造法において、ポリ酢酸ビニルのメ
タノール溶液を光散乱光度計で計測して測定される第2
ビリアル係数が1×10-4mol・cm3/g2以上の
ポリ酢酸ビニルを使用することを特徴とするシリカガラ
スの製造法。
1. A polycondensation product of a silicon alkoxide is hydrolyzed using a base catalyst in the presence of a mixed solvent of polyvinyl acetate and methanol and a high-boiling-point solvent to gelate a sol, and is dried to give a dry gel. Then, in the method for producing silica glass that is fired into glass, the second method is to measure a solution of polyvinyl acetate in methanol with a light scattering photometer.
A method for producing silica glass, characterized in that polyvinyl acetate having a virial coefficient of 1 × 10 −4 mol · cm 3 / g 2 or more is used.
JP8015988A 1996-01-31 1996-01-31 Production of silica glass Pending JPH09208235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8015988A JPH09208235A (en) 1996-01-31 1996-01-31 Production of silica glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8015988A JPH09208235A (en) 1996-01-31 1996-01-31 Production of silica glass

Publications (1)

Publication Number Publication Date
JPH09208235A true JPH09208235A (en) 1997-08-12

Family

ID=11904052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8015988A Pending JPH09208235A (en) 1996-01-31 1996-01-31 Production of silica glass

Country Status (1)

Country Link
JP (1) JPH09208235A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6294601B1 (en) 1997-10-29 2001-09-25 Samsung Electronics Co., Ltd. Silica glass composition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6294601B1 (en) 1997-10-29 2001-09-25 Samsung Electronics Co., Ltd. Silica glass composition
CN1113044C (en) * 1997-10-29 2003-07-02 三星电子株式会社 Silica glass composition

Similar Documents

Publication Publication Date Title
EP0328715B1 (en) A catalyst for sol-gel method using metal alkoxide and sol-gel method using the same
JPH09208235A (en) Production of silica glass
JPH01317155A (en) Production of ceramic compact
JP3431197B2 (en) Method for producing porous silica body by sol-gel method
JP2635313B2 (en) Method for producing silica glass
JPH09208234A (en) Production of silica glass
JPH03275510A (en) Production of alumina sol
JP2907667B2 (en) Method for producing transparent airgel
JPH0124734B2 (en)
JPH08231230A (en) Production of silica glass
JP2621491B2 (en) Method for producing silica glass
JPH0825757B2 (en) Silica glass manufacturing method
JP2621467B2 (en) Method for producing silica glass
JP3806956B2 (en) Method for producing synthetic quartz glass powder
JPH0825756B2 (en) Silica glass manufacturing method
JPH0238326A (en) Production of silica glass
JPH01176235A (en) Production of silica glass
JPH0238321A (en) Production of silica glass
JP3847819B2 (en) Method for producing synthetic quartz glass powder
JPH0798665B2 (en) Silica glass manufacturing method
JPH0214832A (en) Production of silica glass
JPS63171630A (en) Spherical porous body and its production
JP2587876B2 (en) Method for producing glass from liquid phase
JPH0214833A (en) Production of silica glass
JPH05286725A (en) Production of silica glass

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees