JPH09204668A - Matrix recorder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To apply a laser beam to a recording negative vertically by a method wherein an attitude detecting means which detects whether a movable surface plate is moved horizontally or not is provided on the movable surface plate which moves an object lens in the radial direction of the recording matrix. SOLUTION: The inclination of a movable surface plate 3 from the surface of a glass plate 4 placed on a turntable 5 can be adjusted. A lens L3, a mirror MR which turns the light path of a laser beam 6 by approximately 90 degrees so as to apply the laser beam 6 to the glass plate 4 vertically and an object lens OBJ by which the laser beam 6 is squeezed to form a minute laser spot on the glass plate 4 are arranged on the movable surface plate 3. Further, an attitude detecting means 8 is placed on the movable surface plate 3 and it is detected whether the light pass of the laser beam 6 on the movable surface plate 3 is parallel with the surface of the glass plate 4 on the turntable 5 or not.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a master recording apparatus for recording data on a recording master of an optical disk by using a laser beam.

[0002]

2. Description of the Related Art In an optical disk mastering process, data recording, so-called cutting, is performed by exposing a laser beam onto a glass plate coated with a photoresist by a master recording device.

Such a master recording apparatus includes a laser device which is a light source, an optical modulator which modulates a laser beam with a signal processed in a predetermined format, and a recording master which rotates a laser beam mounted on a turntable. It is composed of an optical system and the like that guides the beam upward and forms a minute beam spot on the recording source board.

[0004]

By the way, in the above-described master recording apparatus, the shape (hereinafter referred to as "beam profile") of the beam spot of the laser beam irradiated onto the recording master during cutting and the irradiation. The angle has a great influence on the quality of the optical disc finally produced. Further, the quality of the optical disk is affected by the fluctuation of the output level of the laser beam and the fluctuation of the irradiation position during the cutting work.

Therefore, prior to the cutting operation, in order to minimize the above influence, it is necessary to adjust the optical system to make the beam profile, the irradiation angle, the output level, the irradiation position, etc. appropriate. The adjustment work was done manually using dedicated measuring equipment.

For example, to confirm the output level of a laser beam emitted from a so-called object lens, the power meter is brought into contact with the object lens for measurement, and the display value of the power meter changes depending on the contact method. Sometimes. Further, since the beam profile of the laser beam emitted from the object lens cannot be directly confirmed, the only method is to indirectly confirm the reflected light reflected by the glass plate and to infer the beam profile by the reflected light. It was That is, the above reflected light appears on the monitor of the measuring instrument as interference between the reflected light from the surface of the glass plate and the reflected light from the surface of the photoresist.

Therefore, in such a situation, if the adjustment operation of the above optical system is erroneous, a large number of defective optical discs may be produced, so that the worker is highly skilled. Was required.

[0008]

Therefore, in the master disk recording apparatus of the present invention as defined in claim 1, an object lens or the like for narrowing the laser beam to form a minute beam spot on the recording master disk is arranged. Attitude detection means for detecting whether or not the movable surface plate moves horizontally is provided on the movable surface plate that moves the object lens in the radial direction of the recording master disk.

Therefore, according to the master recording apparatus of the present invention as defined in claim 1, the laser beam traveling on the movable surface plate is recorded by the attitude detecting means for detecting whether or not the movable surface plate moves in the horizontal direction. It is possible to irradiate the recording master with the laser beam perpendicularly so as to be parallel to the surface of the recording master.

The master disk recording apparatus of the present invention according to claim 2 is
The power and / or spot of the laser beam is moved to a position opposite to the moving range of the object lens that moves in the radial direction of the recording master by the movable surface plate and narrows the laser beam to form a minute beam spot on the recording master. A beam spot measuring means for measuring the shape is provided, the beam spot measuring means is arranged on an extension line in the radial direction of the recording master mounted on the turntable, and the light receiving surface of the beam spot measuring means is the recording master. The height is the same as the surface.

Therefore, according to the master disk recording apparatus of the present invention as defined in claim 2, the output level and profile of the laser beam output from the object lens by the beam spot measuring means are actually applied to the surface of the master disk. Since the measurement can be performed under exactly the same conditions and conditions as when data is recorded, the power of the optical system and laser device can be adjusted accurately and in real time while adjusting and adjusting the optical system. The work can be easily performed even by an unskilled person.

Further, the attitude detecting means and the beam spot measuring means for detecting whether or not the movable surface plate in the inventions according to the above-mentioned claim 1 and the invention according to claim 2 move in the horizontal direction are the master disk recording apparatus. It's built into the mechanism, so whenever you need these checks,
You can do this.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a master disk recording apparatus of the present invention will be described below with reference to the illustrated embodiments.

The master recording apparatus 1 comprises a fixed surface plate 2, a movable surface plate 3, and a turntable 5 on which a glass plate 4 as a recording master is placed and rotated.

On the fixed surface plate 2, an EO (electro-optical effect) for sequentially modulating a laser beam 6 from the laser device LA by a signal processed in a predetermined format from the laser device LA as a light source. The modulator EOM, the beam splitter BS1 that bends the laser beam 6 approximately 90 degrees and guides a part of the laser beam 6 to the photodetector PD1, the lens L1, and the laser beam 6 are predetermined in the same manner as the EO modulator EOM. AO (acoustic optical effect) modulator AOM for performing modulation or the like with a signal processed according to the specified format, a lens L2, and a shifter SH for adjusting the deviation of the laser spot in the tangential direction of the recording track on the surface of the glass plate 4. And again, the optical path of the laser beam 6 is bent about 90 degrees and guided to the movable surface plate 3 side, and a part of it is Beam splitter BS2 for guiding the O preparative detector PD2 are arranged. The photo detectors PD1 and PD2 are the laser beams 6
The output level of the laser beam 6 is measured in the middle of the optical path.

Then, the lens L3 and the glass plate 4 are vertically irradiated with the laser beam 6 on the movable platen 3 whose inclination with respect to the surface of the glass plate 4 arranged on the turntable 5 can be adjusted. Laser beam 6 in such a direction
An object lens OBJ for narrowing a mirror MR that bends the optical path of 90 degrees and a laser beam 6 and irradiating with a minute laser spot on the glass plate 4 is arranged.

The spindle motor 7 is for rotating the turntable 5.

Further, on the movable surface plate 3, a posture detecting means for detecting whether or not the movable surface plate moves horizontally to a position between the beam splitter BS2 and the lens L3 on the fixed surface plate 2 ( Hereinafter, it will be referred to as “posture detecting means”) 8. The posture detecting means 8 is a position sensor P.
A laser beam 6 is applied to S1 and the position sensor PS1.
Laser beam 6 on the movable surface plate 3 and a beam splitter BS4 for guiding a part of
Is for measuring whether or not the optical path of is parallel to the surface of the glass board 4 on the turntable 5.

That is, whether or not the optical path of the laser beam 6 on the movable platen 3 is parallel to the surface of the glass plate 4 on the turntable 5 depends on whether the movable platen 3 is in the radial direction of the glass plate 4, that is, FIG. In the direction indicated by the broken line 11 (left and right direction in FIG. 1), the laser beam 6 is moved to the light receiving surface of the position sensor PS1 at two end points, a near point and a far point with respect to the glass plate 4 in this moving range. It is judged by checking whether or not the same point is illuminated. And
If the same point is not irradiated, the inclination of a slider (not shown) that repeatedly supports the movable surface plate 3 movably in the radial direction of the recording master 4 until the position sensor PS1 detects that the same point is irradiated. Etc. will be adjusted.

Furthermore, at the position between the slider of the movable platen 3 of the master recording apparatus 1 and the turntable 5, the beam power measuring unit of the laser beam and the beam profile measuring unit of the laser beam are placed on the movement locus of the object lens. A beam spot measuring means 9 having is provided. A photodetector PD3 is used as a beam power measuring unit of the beam spot measuring unit 9, and a camera (hereinafter referred to as "CCD camera") 10 using a solid-state image pickup device is used as a beam profile measuring unit.

The photodetector PD3 and the CCD camera 10 each have a light-receiving surface facing upward, and as shown by a broken line 12 in FIG. 1, the surface of the glass plate 4 placed on the turntable 5. It is designed to be the same height as.

Therefore, the movable surface plate 3 is moved so that the object lens OBJ is located right above the photodetector PD1 of the beam spot measuring means 9 or the CCD camera 10, and the state of the laser beam from the object lens OBJ is changed. Find out.

That is, the object lens OBJ is moved up and down, and the CCD camera 10 is used to check whether or not the beam profile is blurred in all directions (whether the beam profile is similar to the ideal profile). . If the beam profile is not blurred in all directions, the position of each optical component is adjusted so that the beam profile is blurred in all directions. As a result, the laser beam 6 is applied to the light receiving surface of the CCD camera 10, that is, the surface of the glass plate 4.
It is possible to make the laser beam 6 hit the surface of the glass disk 4 vertically while it becomes clear whether or not it hits the glass disk 4 vertically.

Further, the photodetector PD3 is used to check the output level of the laser beam 6 output from the object lens OBJ when the laser device LA is operated with a prescribed power, and the value measured by the photodetector PD3 is predetermined. Adjust to the value of. Thus, the light receiving surface of the photodetector PD3, that is, the surface of the glass plate 4 can be irradiated with the laser beam at a predetermined output level.

[0025]

As is apparent from the above description, in the master recording apparatus according to the first aspect of the present invention, the movable platen is moved horizontally on the movable platen for moving the object lens in the radial direction of the recording master. Since the attitude detection means for detecting whether or not the laser beam moves on the recording master is provided, the laser beam running on the movable surface plate is parallel to the surface of the recording master by the attitude detection means. It can be illuminated.

According to a second aspect of the present invention, in the master disk recording apparatus, a beam spot measuring means for measuring the power and / or the spot shape of the laser beam is provided at a position facing the moving range of the object lens, and the beam spot measuring means is provided. Since it is arranged on the extension line of the recording master mounted on the turntable in the radial direction, and the light receiving surface of the beam spot measuring means is at the same height as the surface of the recording master,
The output level and profile of the laser beam output from the object lens can be measured under exactly the same conditions and conditions as when recording the data by actually irradiating the laser beam on the surface of the recording master. The power of the laser device can be adjusted accurately and while monitoring it in real time, and the adjustment work of the optical system can be easily performed even by an unskilled person.

Further, according to the invention described in claim 1 and the invention described in claim 2, the attitude detecting means and the beam spot measuring means for detecting whether or not the movable surface plate moves in the horizontal direction are the master disk. Since it is built into the mechanism of the recording device, it can be done whenever these checks are needed.

It should be noted that the specific shapes and structures shown in the above embodiments are merely examples of the implementation in carrying out the present invention, and the technical scope of the present invention is limited by these. Is not to be interpreted.

[Brief description of drawings]

FIG. 1 is a side view schematically showing a master recording apparatus of the present invention.

FIG. 2 is a plan view schematically showing a method of measuring a beam power and a beam profile by a beam spot measuring means.

[Explanation of symbols]

1 ... Master recording device, 3 ... Movable surface plate, 4 ... Recording master, 5 ...
Turntable, 6 ... Laser beam, 8 ... Attitude detecting means, BS4 ... Beam splitter, PS1 ... Position sensor, 9 ... Beam spot measuring means, 10 ... Beam profile measuring section, PD3 ... Beam power measuring section, O
BJ ... Object lens

Claims (6)

[Claims] 1. A master recording apparatus for recording data on a recording master mounted on a turntable by using a laser beam, wherein the laser beam is narrowed down to form a minute beam spot on the recording master. An object lens or the like is provided, and attitude detecting means for detecting whether or not the movable surface plate moves in the horizontal direction is provided on the movable surface plate that moves the object lens in the radial direction of the recording master. Master recording device. 2. A master recording apparatus for recording data on a recording master mounted on a turntable by using a laser beam, wherein the movable master moves in the radial direction of the recording master and narrows the laser beam. A beam spot measuring means for measuring the power and / or the spot shape of the laser beam is provided at a position facing the moving range of the object lens that forms a minute beam spot on the recording master. It is arranged on the extension line of the recording master mounted on the table in the radial direction, and
A master recording apparatus, wherein the light-receiving surface of the beam spot measuring means is made to be at the same height as the surface of the master recording. 3. The position detecting means for detecting whether or not the movable surface plate moves horizontally is composed of a position sensor and a beam splitter for guiding a part of the laser beam to the position sensor. The master recording device described. 4. The master disk recording apparatus according to claim 2, wherein the beam spot measuring means comprises a beam power measuring section and a beam profile measuring section. 5. The master recording apparatus according to claim 4, wherein the beam power measuring unit is a photodetector. 6. The master disk recording apparatus according to claim 4, wherein the beam profile measuring unit is a camera using a solid-state image sensor.