JPH09193141A - Wire type cutting processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure the running direction and distance of a wire by providing a rotary plate rotated in connection with the running of the wire and having a part to be detected arranged thereto and the detection means arranged in the vicinity of the rotary plate and detecting the part to be detected. SOLUTION: In a wire type cutting processing apparatus cutting a member to be cut while allowing a wire 4 to run, a rotary plate 13b rotated in connection with the running of the wire 4 and having notches 10 (parts to be detected) arranged thereto and the optical sensors 13c, 13d (detection means) arranged in the vicinity of the rotary plate 13b and detecting the notches 110 are provided and the optical sensors 13c, 13d are arranged at an unequal interval in the peripheral direction of the rotary plate 13b in order to measure the rotary direction of the rotary plate 13b in the passing order of the notches 110.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire type cutting apparatus for cutting a semiconductor material, a magnetic material, or a high hardness brittle material such as ceramics with a wire.

[0002]

2. Description of the Related Art Conventionally, as a wire type cutting apparatus, a wire stretched between a plurality of groove rollers is run at a predetermined speed in one direction by a wire running apparatus while a member to be cut is pressed by a pressing apparatus. Known are those that press against a wire and supply a machining liquid containing abrasive grains to the cutting portion of the member to be cut to cut the member to be cut, and those that cause wires to run in opposite directions alternately to perform cutting. There is.

In the former one-way cutting method, the cutting width on the cutting start end side (cutting entrance side) of the wire with respect to the member to be cut is wider than the cutting width on the wire exit side, and the thickness of the cut product is the wire entrance. Different phenomena occur on the outlet side and the outlet side. Therefore, when it is necessary to grind a cut product, it takes time to grind. In this respect, the latter two-way cutting method does not have the above-mentioned inconvenience because the cutting inlet side and the outlet side are alternately changed.

By the way, in the case of the latter wire-type cutting and processing apparatus in which the traveling direction of the wire is changed alternately, the traveling speed is gradually reduced from the start of the operation for changing the traveling direction, and the point at which the traveling speed becomes zero. After passing, the vehicle gradually travels in the opposite direction at a gradually increasing speed, and reaches the predetermined speed in the opposite direction, thus ending the operation of changing the traveling direction. In this case, in order to improve the controllability of the cutting process in the wire type cutting device and improve the processing accuracy, it is essential to accurately measure and control the traveling distance of the wire.

Conventionally, the running distance of a wire is measured by winding the wire around the measuring reel in the middle of the running path of the wire and measuring the number of revolutions of the measuring reel that rotates as the wire runs. Was there. Further, the traveling direction of the wire is determined by the drive control signal for the feeding reel or the winding reel.

[0006]

However, with the above-described method for determining the wire traveling direction, there is a time lag from the time when the drive control signal is issued to the time when the drive control signal is actually transmitted to the wire. Therefore, it was not always possible to measure accurately. In this case, providing an additional correction circuit in the control system to correct the time lag makes the control system complicated.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a wire-type cutting apparatus capable of easily measuring the traveling direction and traveling distance of a wire.

[0008]

A wire type cutting and processing apparatus according to claim 1, wherein a wire stretched between a plurality of groove rollers is made to travel by a wire running device while a member to be cut is pressed. In the wire-type cutting and processing device that presses the wire relatively to the wire and supplies the cutting liquid containing abrasive grains to the cutting part of the member to be cut to cut the member to be cut, And a detection unit for detecting the detection unit, which is arranged in the vicinity of the rotation plate and which detects the detection unit. It is characterized in that a plurality of things are arranged along the circumferential direction, and the arrangement intervals are non-uniform. In the wire-type cutting and processing apparatus according to claim 2, while the wire stretched between the plurality of groove rollers is run by the wire running device, the member to be cut is pressed by the pressing device relative to the wire. In a wire type cutting and processing device that presses and supplies a processing liquid containing abrasive grains to the cutting processing part of the member to be cut to cut the member to be cut, the wire-type cutting device rotates in conjunction with the traveling of the wire and the detected part is arranged. A rotating plate and a detecting means for detecting the detected part which is arranged in the vicinity of the rotating plate, and the detected parts are plural along the circumferential direction of the rotating plate. Are arranged, and at least one of the arrangement interval and the length in the circumferential direction is unequal.

In the structure according to the first aspect, the detection means detects the detected portion. In this case, since the plurality of detecting means are arranged at non-uniform intervals along the circumferential direction, the direction of rotation of the rotating plate can be known by the order in which each detecting means detects the detected portion. In the configuration according to claim 2,
The detection unit detects the detected portion. In this case, since the plurality of detected portions are arranged at non-uniform intervals along the circumferential direction, or because the lengths in the circumferential direction are arranged unevenly, the pattern for detecting the detected portion by the detection means The direction of rotation of the rotating plate can be known from.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the wire type cutting and processing apparatus of the present invention will be described below with reference to FIGS.

[First Embodiment] FIGS. 1 to 5 show a first embodiment of a wire type cutting and processing apparatus of the present invention. In FIG. 1, reference numeral 1 is a device frame. The device frame 1 is provided with a wire traveling device 2, a pressing device 3, and the like.

As shown in FIG. 3, the wire traveling device 2 is
Reels 7L and 7R that are individually rotated by drive motors 6L and 6R such as AC servomotors, tension holding mechanisms 8L and 8R, and tension detection mechanisms 10L, 10R and 1
1, a cutting mechanism 12, and a traveling amount detection mechanism 13,
The wire 4 is reeled 7L, running amount detecting mechanism 13, tension holding mechanism 8L, tension detecting mechanism 10L, cutting mechanism 12, tension detecting mechanism 10R, tension holding mechanism 8R, tension detecting mechanism 1
1. Reel 7R order and vice versa, for example, 1 on one side
For example, the wire 4 is fed at the same speed for 7.5 seconds and the other side for 12.5 seconds.

In the above and the drawings, "L" indicates the feeding side or winding side of the wire 4, and "R" is "L".
Indicates the winding side, and "L" indicates the winding side. Members having the same numeral reference except "L" and "R" have the same function. Hereinafter, “L” and “R” will be omitted unless the description becomes confusing.

The tension holding mechanism 8 includes a dancer roller 8a,
An urging member 8b such as a pneumatic cylinder for urging the dancer roller 8a and a moving position detector 8c such as a potentiometer for detecting the moving position of the dancer roller 8a are provided. The rotation speed of the drive motor 6 on the 8 side is controlled so that the tension of the wire 4 between the reel 7 and the tension holding mechanism 8 maintains a predetermined tension.

Further, the tension detecting mechanism 10 includes a movable roller 1
0a and a load detector 10b such as a load cell for detecting the tension of the wire 4 applied to the movable roller 10a. The other tension detection mechanism 11 includes a movable roller 11a and a load detector 11b such as a load cell that detects the tension of the wire 4 applied to the movable roller 11a, and is provided between the reel 7R and the tension holding mechanism 8R. .

The cutting mechanism 12 comprises three groove rollers 12a, 12b, which are arranged in parallel and horizontally in an inverted triangular shape.
12c and a drive motor 12d for cutting traveling that rotates the lower groove roller 12a.
Between R, the wire 4 is connected to each groove roller 12a, 12
b and 12c are wound in parallel with each other on a plurality of grooves formed at predetermined intervals. Upper two groove rollers 12b, 1
The wire 4 between 2c is horizontal.

The running amount detecting mechanism 13 is a feature of the present invention, and is a detecting roller 13a rotated by the running of the wire 4 and the roller 1.
The rotating plate 13b that is rotated by the traveling of the wire 4 by being rotated by 3a, and the light emitting means 100 that is arranged on both sides (near the direction) in the thickness direction of the rotating plate 13b so as to sandwich the rotating plate 13b. And light receiving means 101
(Both of which are shown in FIG. 4), two pairs of transmissive optical sensors (detection means) 13c and 13d are provided.

At this time, as shown in FIG.
At b, a notch (detected portion) 110 for passing the light from the light emitting means 100 to the light receiving means 101 is provided at the edge 11
0a and 110a are formed so as to be separated from each other by 180 °, that is, they are formed to be evenly spaced in the circumferential direction of the rotary plate 13b. In addition, two pairs of transmissive optical sensors 13c, 1
3d is arranged so that the intervals along the circumferential direction are non-uniform. That is, the spaces s1 and s2 are arranged so as to be different from each other, and in the illustrated example, they are arranged 90 ° apart.

On the other hand, as shown in FIG.
A support mechanism 20 for supporting the member W to be cut, and the support mechanism 2
A moving mechanism 21 such as a ball screw that moves 0 up and down, a moving drive motor 22 such as an AC servo motor that operates the moving mechanism 21, and a pressing force such as a load cell that detects the pressing force of the member W to be cut against the wire 4. A detector 23 and a movement amount detector 24 such as a rotary encoder for detecting the movement amount of the support mechanism 20 from the number of rotations of the drive motor 22 are provided.

The pressing device 3 supports the member W to be cut by the supporting mechanism 2.
The groove rollers 12b, 1 of the cutting mechanism 12
The pressing force of the member to be cut W against the wire 4 is appropriately controlled by the detection signal of the pressing force detector 23.

In the wire type cutting apparatus having the above-described structure, the wire traveling device 2 travels the wire 4 while appropriately changing the direction, and at the same time, the pressing device 3 moves the member W to be cut into the wire 4. It is possible to perform the cutting process of the member W to be cut by pressing it against and supplying a working liquid containing abrasive grains to the cutting part of the member W to be cut.

In the above cutting process, the transmission type optical sensor 1
The passage of the notch 110 is detected by 3c and 13d. When the rotary plate 13b is rotating in the direction of the arrow A in FIG. 4B, the detection results of the transmissive optical sensors 13c and 13d are as shown in FIG. The result that the phase is always delayed by 90 ° is obtained. This is because the transmissive optical sensor 13d is located on the rear side of the rotation with a distance of 90 ° from the transmissive optical sensor 13c. On the contrary, the rotary plate 13
When b is rotated in the direction of arrow B in FIG. 4B, the detection results of the transmission optical sensors 13c and 13d are as shown in FIG.
In 3d, the result in which the phase is advanced by 90 ° is always obtained. This is also because the transmissive optical sensor 13d is located on the front side of the rotation with a distance of 90 ° from the transmissive optical sensor 13c.

That is, the transmissive optical sensors 13c and 13d
However, since they are arranged so that the intervals along the circumferential direction are non-uniform, the edge of the notch 110 depends on the mutual phase relationship, that is, which transmissive optical sensor detects the notch 110 at the leading phase. Rotating plate 1 can determine the passing order of 110a.
The direction of rotation of 3b can be known.

Further, since the notches 110 are formed such that the respective end edges 110a are separated from each other by 180 °, in each of the light receiving means 101, as shown by the symbol X in FIG. Light is detected at regular time intervals.
Therefore, the rotation speed of the rotating plate 13b can be measured very easily by simply counting the number of passing light without performing the procedure of obtaining the rotation cycle from the light passing pattern.
The traveling distance of the wire 4 can be easily calculated.

[Second Embodiment] Next, a second embodiment of the wire cutting apparatus of the present invention will be described with reference to FIG. The present embodiment is different from the first embodiment in that the transmissive optical sensor 13d is omitted. Instead of the notch 110, a through hole (detected portion) 120 is provided near the circumferential outer edge of the rotating plate 13b. , 121 are formed, and the other parts have the same configuration. The same members are designated by the same reference numerals and the description thereof is omitted.

In FIG. 6, the through holes 120 and 121 are
The lengths along the circumferential direction are the same as indicated by d.
However, the through holes 120 and 121 have a space along the circumferential direction,
That is, the intervals s1 and s2 shown in FIG. 6 have different lengths, that is, they are arranged non-uniformly.

In the present embodiment, as a result of detection by the transmissive optical sensor 13c during cutting, for example, if the rotating direction of the rotary plate 13b is the direction shown by the arrow C in FIG. The passing pattern of the through holes as shown is detected. This reflects the non-uniform arrangement of the through holes 120 and 121 in the circumferential direction. In this case, it is clear that if the direction of rotation is opposite, a passage pattern that is opposite with respect to time is obtained. That is, since the through holes 120 and 121 are formed non-uniformly in the circumferential direction of the rotary plate 13b, the direction of rotation of the rotary plate 13b can be known from the passage pattern of the transmissive optical sensor 13c. In this case, the rotation cycle can be measured from the passing pattern, and the traveling distance of the wire 4 can be calculated.

Further, with this configuration, the transmission type optical sensor 1
Since the number of 3c is one, the processing cost can be reduced.

[Third Embodiment] Further, a third embodiment of the wire cutting apparatus of the present invention will be described with reference to FIG. This embodiment differs from the second embodiment in that the through holes 130, 1 are replaced by the through holes 130, 1 instead of the through holes 120, 121.
31 is formed, and the other parts have the same configuration. The same members are designated by the same reference numerals, and the description thereof will be omitted.

In FIG. 7, the through holes 130 and 131 are
It should be noted that the arrangement intervals in the circumferential direction are different from each other depending on the orientation, that is, the rotational plate 13b is formed asymmetrically in the circumferential direction. In FIG. 7, the through holes 130 and 131 are opposite in length to the second embodiment and the lengths along the circumferential direction are non-uniform as indicated by d1 and d2, and the intervals along the circumferential direction are indicated by s. Is the same as.

In this embodiment, it is possible to obtain the same effects as those of the second embodiment.

The present invention is not limited to the above-described embodiment, and the following modifications do not depart from the gist of the present invention. a) Instead of applying the configuration of the present invention to a wire-type cutting and processing apparatus of a type in which wires are alternately run in opposite directions, a wire-type cutting and processing apparatus of a type in which wires are run in only one direction It is applied to measure the running distance of the wire. b) Instead of applying the configuration of the present invention to a wire-type cutting and processing apparatus that presses a member to be cut against a wire, a wire-type cutting and processing apparatus that presses a wire against a member to be cut And measure the distance traveled by the wire. c) Using a reflective photosensor instead of using a transmissive photosensor as the sensing means. d) Using a magnetic sensor instead of using a transmissive optical sensor as the sensing means. In this case, as the detected object, a magnetic material or a magnet is used instead of the through hole or the notch. The magnetic body or the magnet can be used by being attached to the surface of the rotating plate 13b in the form of a pad or a sheet, for example.
Of course, other usage methods may be used. e) Instead of using a transmissive optical sensor as the sensing means, using any other sensor. In this case, instead of the through hole or the notch, the object to be detected corresponds to the type of sensor used. f) In the first embodiment, instead of using two detection means, use three or more detection means. In this case, it goes without saying that the three or more detecting means are arranged at non-uniform intervals in the circumferential direction of the rotary plate 13b. g) In the first embodiment, two pairs of detection means are connected to each other.
Instead of arranging them apart from each other by 0 ° in the circumferential direction, arranging them in an arbitrary positional relationship. However, only arranging them 180 degrees apart in the circumferential direction is excluded because two pairs of detecting means are arranged at equal intervals. h) In the first embodiment, the notch 110 is formed in the rotary plate 13b.
Instead of forming the through holes, forming through holes having the same circumferential arrangement. i) In the second and third embodiments, forming three or more through holes or notches instead of forming two through holes or notches in the rotary plate 13b. In this case, it goes without saying that the through holes or the notches are arranged so that the intervals s or the lengths d along the circumferential direction are not uniform. j) In the second embodiment, instead of forming the through holes 120 and 121 in the shape shown in FIG. 6, forming the through holes in another arbitrary shape. However, the arrangement is such that the intervals s along the circumferential direction are non-uniform. k) In the third embodiment, the notches 130 and 131 are shown in FIG.
Instead of forming into the shape shown in, form into any other shape. However, the arrangement is such that the lengths d along the circumferential direction are not uniform. l) In the second and third embodiments, instead of using only one detecting means, using a plurality of detecting means.

[0033]

The wire-type cutting and processing apparatus of the present invention has the following effects. According to the wire type cutting and processing apparatus of the first aspect, the plurality of detecting means are arranged so that the intervals along the circumferential direction are not uniform, so that the order in which the detected portion detects each detecting means is different. The direction of rotation of the rotating plate can be measured. In this case, the rotation cycle can be measured and the traveling distance of the wire can be calculated from the passage pattern of the detected portion in the detection means. According to the wire-type cutting and processing apparatus of the second aspect, the plurality of detected portions are arranged so that the intervals along the circumferential direction are not uniform, so that the detection means can detect the detected portion by the pattern. The direction of rotation of the rotating plate can be measured. In this case, the rotation cycle can be measured and the traveling distance of the wire can be calculated from the passage pattern of the detected portion in the detection means. Further, with this configuration, the number of detecting means may be one, so that the processing cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a front view showing a first embodiment of a wire cutting apparatus according to the present invention.

FIG. 2 is a front view showing a cutting mechanism and a pressing device in the wire-type cutting processing device shown in FIG.

FIG. 3 is a front view of a wire traveling device in the wire cutting device shown in FIG. 1.

4A and 4B show a traveling amount detection mechanism in the wire type cutting and processing apparatus shown in FIG. 1, in which FIG. 4A is a front view and FIG. 4B is a side view corresponding to a cross section taken along line IV-IV in FIG. Is.

5 is a diagram showing a passage pattern by the optical sensor in FIG. 4, and FIGS. 5A and 5B correspond to the rotation direction of the rotary plate in FIG.

FIG. 6 is a side view showing a traveling amount detecting mechanism in the second embodiment of the wire type cutting and processing apparatus of the present invention.

7 is a diagram showing a light passage pattern detected by an optical sensor in FIG.

FIG. 8 is a side view showing a traveling amount detection mechanism in a wire type cutting and processing apparatus according to a third embodiment of the present invention.

[Explanation of symbols]

 2 wire traveling device 3 pressing device 4 wire 12a groove roller 12b groove roller 12c groove roller 13b rotating plate 13c optical sensor (detecting means) 13d optical sensor (detecting means) 110 notch (detected portion) 120 through hole (detected portion) 121 Through Hole (Detected Part) 130 Through Hole (Detected Part) 131 Through Hole (Detected Part) W Cut Member s1 Arrangement s2 Arrangement Interval d1 Circumferential Length d2 Circumferential Length

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Atsushi Sakamoto 1-7-5 Sakuragi-cho, Omiya-shi, Saitama Sonic City Building 21F, Mitsubishi Materials Corporation Ikuno Manufacturing Omiya Office (72) Inventor Takahiro Uchida Omiya-shi, Saitama Prefecture Sakuragicho 1-7-5 Sonic City Building 21F Mitsubishi Materials Co., Ltd. Ikuno Manufacturing Omiya Office

Claims (2)

[Claims] 1. A wire stretched between a plurality of groove rollers is moved by a wire traveling device while pressing a member to be cut relative to the wire by a pressing device and cutting the member to be cut. In a wire type cutting and processing apparatus for cutting and processing a member to be cut by supplying a processing liquid containing abrasive grains to the section, a rotating plate that rotates in conjunction with traveling of the wire and a detected section is arranged, and the rotation A detection means for detecting the detected part, which is arranged in the vicinity of the plate, and the detection means includes a plurality of detection means arranged along the circumferential direction of the rotary plate, and the arrangement interval thereof. Is a wire-type cutting and processing device characterized by being non-uniform. 2. A wire stretched between a plurality of groove rollers is moved by a wire traveling device while a member to be cut is pressed relatively against the wire by a pressing device and a cutting process of the member to be cut is performed. In a wire type cutting and processing apparatus for cutting and processing a member to be cut by supplying a processing liquid containing abrasive grains to the section, a rotating plate that rotates in conjunction with traveling of the wire and a detected section is arranged, and the rotation A detection means for detecting the detected portion, which is arranged in the vicinity of the plate, and a plurality of the detected portions are arranged along the circumferential direction of the rotary plate, and the arrangement thereof. At least one of a space | interval and a circumferential direction length is non-uniform, The wire-type cutting processing apparatus characterized by the above-mentioned.