JPH05115825A - Coating device - Google Patents
Coating deviceInfo
- Publication number
- JPH05115825A JPH05115825A JP30850891A JP30850891A JPH05115825A JP H05115825 A JPH05115825 A JP H05115825A JP 30850891 A JP30850891 A JP 30850891A JP 30850891 A JP30850891 A JP 30850891A JP H05115825 A JPH05115825 A JP H05115825A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- fixed
- quantitative
- coating head
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
- B05C11/1021—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to presence or shape of target
Landscapes
- Coating Apparatus (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、塗布装置に係り、特に
所定の走行経路に沿って移動中の塗布対象物の表面に向
けて連続的に押し出された塗布物を、定量塗布ヘッドを
介して塗布対象物の表面に均一な厚さに塗布するエクス
トラージョン型の塗布装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus, and more particularly to a coating apparatus which continuously extrudes a coating object which is extruded toward a surface of a coating object which is moving along a predetermined traveling path, through a quantitative coating head. The present invention relates to an extrusion type coating device for coating a surface of a coating object with a uniform thickness.
【0002】[0002]
【従来の技術】一般に、エクストラージョン型の塗布装
置は、例えば特開昭64−58372号公報で開示され
るように、水平方向に回転可能でかつ上下動自在な塗布
物供給機構と、塗布対象物に対向して塗布供給機構の下
端に装着したノズルと、ノズルの近傍に備えた垂直方向
に回転可能なローラと、塗布対象物を表面に固着し水平
方向へ塗布物供給機構と相対的に移動するテーブルとか
ら構成されている。上記従来の塗布装置は、塗布物をノ
ズルから連続的に吐出すると同時にテーブルを水平方向
に移動し、塗布対象物の表面に塗布物を連続的に塗布す
る。この時、ローラが塗布対象物の表面に転接して塗布
物供給機構が塗布対象物の表面に凹凸に応じて上下動
し、塗布物が均一な膜厚で塗布される。2. Description of the Related Art Generally, an extrusion-type coating apparatus includes a coating material supply mechanism that is horizontally rotatable and movable up and down, as disclosed in, for example, Japanese Patent Laid-Open No. 58372/1988. A nozzle attached to the lower end of the coating supply mechanism facing the target object, a roller rotatable in the vertical direction provided in the vicinity of the nozzle, and a coating target object fixed to the surface and horizontally relative to the coating target supply mechanism. It consists of a table to move to. The above-mentioned conventional coating device continuously discharges the coating material from the nozzle and simultaneously moves the table in the horizontal direction to continuously coat the coating material on the surface of the coating object. At this time, the roller is brought into contact with the surface of the coating object and the coating material supplying mechanism moves up and down on the surface of the coating object in accordance with the unevenness, so that the coating material is coated with a uniform film thickness.
【0003】[0003]
【発明が解決しようとする課題】しかし、上記従来の塗
布装置にあっては、凹凸のある塗布対象物に塗布物を塗
布する場合、進行方向の凹凸に対しては、上記塗布供給
機構がそれに追従して上下動することで均一な塗布膜厚
が得られるが、進行方向に直角で、かつ塗布物の吐出方
向に直角な方向の凹凸に対しては追従して動くことがで
きず、塗布対象物上に膜幅の広い塗布膜を形成する場合
に、均一な塗布膜厚が得られないという問題点を有して
いた。However, in the above-mentioned conventional coating apparatus, when a coating object is coated on a coating object having irregularities, the coating supply mechanism is applied to the irregularities in the traveling direction. A uniform coating film thickness can be obtained by following up and down movement, but it cannot move following the unevenness at right angles to the traveling direction and at right angles to the discharge direction of the applied material. There is a problem that a uniform coating film thickness cannot be obtained when a coating film having a wide film width is formed on an object.
【0004】本発明は、上記従来の塗布装置の問題点に
鑑みなされたもので、凹凸のある塗布対象物の塗布面に
膜幅の広い塗布膜を形成する場合でも、均一な塗布膜厚
が得られる塗布装置を提供することを目的とする。The present invention has been made in view of the problems of the above-mentioned conventional coating apparatus. Even when a coating film having a wide film width is formed on the coating surface of an object having irregularities, a uniform coating film thickness is obtained. It is an object to provide an obtained coating device.
【0005】[0005]
【課題を解決するための手段】上記目的を達成するため
に、本発明の塗布装置は、図1および図2の概念図で示
すように、塗布物を塗布対象物1へ連続的に吐出する定
量塗布ヘッド2と、塗布物を定量塗布ヘッド2に供給す
る塗布物定量供給装置(図示省略)と、塗布対象物1を
固定し定量塗布ヘッド2に対して相対的に定速度で移動
する移動テーブル3とからなる塗布装置において、定量
塗布ヘッド1に取付けた少なくとも2個以上の定距離保
持部材4と、定量塗布ヘッド2を塗布対象物1の塗布面
に向かって移動可能に保持する直動部材5と、直動部材
5を介して定量塗布ヘッド2を回動自在に保持する回転
部材6とから構成してある。In order to achieve the above object, the coating apparatus of the present invention continuously discharges a coating material onto a coating object 1 as shown in the conceptual diagrams of FIGS. 1 and 2. Quantitative coating head 2, a coating material quantitative supply device (not shown) for supplying the coating material to the quantitative coating head 2, and a movement for fixing the coating object 1 and moving at a constant speed relative to the quantitative coating head 2. In a coating device including a table 3, at least two or more constant distance holding members 4 attached to the quantitative coating head 1 and a linear motion for movably holding the quantitative coating head 2 toward the coating surface of the coating object 1. It is composed of a member 5 and a rotary member 6 for rotatably holding the quantitative coating head 2 via the linear motion member 5.
【0006】[0006]
【作用】上記のように構成された塗布装置は、塗布対象
物1を移動テーブル3上に固定した後、塗布物を塗布物
定量供給装置(図示省略)からチューブ7を介して定量
塗布ヘッド2に供給し、定量塗布ヘッド2から連続的に
押し出す。同時に、移動テーブル3をX軸方向に定速で
移動する。この時、定距離保持部材4によってX軸方向
に対する塗布面上の凹凸には、直動部材5に案内されて
定量塗布ヘッド2が凹凸の状態に応じてZ軸方向に移動
する(図1参照)。また、Y軸方向に対する凹凸には、
回動部材6により定量塗布ヘッド2がX軸回りに回動す
る(図2参照)。そして、定量塗布ヘッド2のZ軸方向
の移動とX軸回りの回動が合成され、定量塗布ヘッド2
から押し出される塗布物の落下距離が常に一定となるよ
うに、定量塗布ヘッド2が塗布対象物の塗布位置に対し
て移動する。In the coating apparatus configured as described above, after fixing the coating object 1 on the moving table 3, the coating material is fed from the coating material quantitative supply device (not shown) through the tube 7 to the quantitative coating head 2. And is continuously extruded from the quantitative coating head 2. At the same time, the moving table 3 is moved in the X-axis direction at a constant speed. At this time, due to the constant distance holding member 4, the linear movement member 5 guides the unevenness on the coating surface in the X-axis direction, and the quantitative coating head 2 moves in the Z-axis direction according to the unevenness (see FIG. 1). ). In addition, the unevenness in the Y-axis direction includes
The rotating member 6 rotates the fixed quantity coating head 2 around the X axis (see FIG. 2). Then, the movement of the quantitative coating head 2 in the Z-axis direction and the rotation around the X-axis are combined, and
The quantitative coating head 2 moves with respect to the coating position of the coating object so that the fall distance of the coating material extruded from is always constant.
【0007】[0007]
【実施例1】図3から図5は、本発明の実施例1の塗布
装置を示し、図3は斜視図、図4は正面図、図5は側面
図である。本実施例の塗布装置10には、塗布対象物の
基板11を載置するテーブル12が図示しないX−Yテ
ーブル上に配置されており、X−Yテーブルは図示しな
い駆動装置でX軸,Y軸方向に所定の速度で移動し得る
ようになっている。テーブル12の近傍にはマグネット
スタンド13が固定され、マグネットスタンド13の上
部には回転部材固定板14が取り付けられている。回転
部材固定板14はテーブル12の上方に配置され、テー
ブル12と平行な回転軸を有する回転部材15が固定さ
れている。Embodiment 1 FIGS. 3 to 5 show a coating apparatus according to Embodiment 1 of the present invention, FIG. 3 is a perspective view, FIG. 4 is a front view, and FIG. 5 is a side view. In the coating apparatus 10 of the present embodiment, a table 12 on which a substrate 11 of an object to be coated is placed is arranged on an XY table (not shown), and the XY table is an X-axis, Y-axis driven by a drive unit (not shown). It can move in the axial direction at a predetermined speed. A magnet stand 13 is fixed near the table 12, and a rotary member fixing plate 14 is mounted on the magnet stand 13. The rotary member fixing plate 14 is arranged above the table 12, and the rotary member 15 having a rotary shaft parallel to the table 12 is fixed.
【0008】回転部材15は、図6および図7に示すよ
うに、同軸上で相対的に回動自在な2個の円筒部材から
なり、一方の円筒部材15a(以下、固定回動部材15
aという)が回転部材固定板14に固定されるととも
に、他方の円筒部材15b(以下、回動回転部材15b
という)にリニアガイド部材16が固定されている(図
5参照)。固定回転部材15aと回動回転部材15bと
は、固定回転部材15aに形成した凹部と回動回転部材
15bに形成した突部を嵌合するとともに、この凹部と
突部の周面にそれぞれ形成したV溝17,18内にボー
ルベアリング19を配し、回転方向の動きを規制しつつ
回転自在に連結されている。なお、20は、固定回転部
材15aの回転部材固定板用のネジ孔、21は回動回転
部材15bのリニアガイド取付用のネジ孔である。As shown in FIGS. 6 and 7, the rotary member 15 is composed of two cylindrical members which are coaxially rotatable relative to each other, and one of the cylindrical members 15a (hereinafter referred to as the fixed rotary member 15).
a) is fixed to the rotary member fixing plate 14, and the other cylindrical member 15b (hereinafter referred to as the rotary rotary member 15b).
The linear guide member 16 is fixed (see FIG. 5). The fixed rotary member 15a and the rotary rotary member 15b are fitted in the recess formed in the fixed rotary member 15a and the projection formed in the rotary rotary member 15b, and are formed on the peripheral surfaces of the recess and the projection, respectively. Ball bearings 19 are arranged in the V-grooves 17 and 18 and are rotatably connected while restricting movement in the rotation direction. Reference numeral 20 is a screw hole for the rotary member fixing plate of the fixed rotary member 15a, and 21 is a screw hole for attaching the linear guide of the rotary rotary member 15b.
【0009】リニアガイド部材16には、定量塗布ヘッ
ド22がZ軸方向に移動自在に取付けられている。すな
わち、リニアガイド部材16には側面を凹形状としたガ
イド16aが形成され、このガイド16bに定量塗布ヘ
ッド22に設けた凹部材22aが摺動自在に嵌合されて
いる。A fixed amount coating head 22 is attached to the linear guide member 16 so as to be movable in the Z-axis direction. That is, a guide 16a having a concave side surface is formed on the linear guide member 16, and a concave member 22a provided on the quantitative coating head 22 is slidably fitted to the guide 16b.
【0010】定量塗布ヘッド22の上部には、図示しな
い塗布物定量供給装置と接続したチューブ23が接続さ
れている。定量塗布ヘッド22の下端には、塗布物の吐
出口24a(図8参照)を形成した吐出口部24が設け
られ、吐出口部24の両脇に定距離保持部材25が設け
られている。A tube 23 connected to a coating material quantitative supply device (not shown) is connected to the upper portion of the quantitative coating head 22. A discharge port portion 24 having a discharge port 24a (see FIG. 8) for the coating material is provided at the lower end of the quantitative coating head 22, and constant distance holding members 25 are provided on both sides of the discharge port portion 24.
【0011】定距離保持部材25は、吐出口24aと基
板11間との距離を一定に保持するための部材で、図8
および図9に示すように、ケース26,カバー27およ
びボールベアリング28等からなっている。ケース26
は、定量塗布ヘッド25の下端で吐出口部24の両脇に
ネジ29によってそれぞれ固定されている。ケース26
の下面中央には凹部26aが形成され、コイルバネ30
が収納されている。また、ケース26の下面には、カバ
ー27がネジ31で固定されている。カバー27には、
上記凹部26aと対応して突状の開口26aが形成さ
れ、開口26の先端は、上記ボールベアリング28の径
より小径に形成されている。ボールベアリング28は、
コイルバネ30によって外側に付勢されるとともに、カ
バー27の開口27a先端で抜け止めされつつ、その一
部が外側に出た状態で凹部26a内に回動自在に配設さ
れている。なお、定距離保持部材には、図10に示す一
対の自在キャスター32を用いることができる。The constant distance holding member 25 is a member for holding the distance between the discharge port 24a and the substrate 11 constant, and FIG.
Further, as shown in FIG. 9, it comprises a case 26, a cover 27, a ball bearing 28 and the like. Case 26
Are fixed to the both sides of the ejection port 24 at the lower end of the quantitative application head 25 by screws 29. Case 26
A recess 26a is formed in the center of the lower surface of the coil spring 30.
Is stored. A cover 27 is fixed to the lower surface of the case 26 with screws 31. The cover 27 has
A projecting opening 26a is formed corresponding to the recess 26a, and the tip of the opening 26 is formed with a diameter smaller than the diameter of the ball bearing 28. The ball bearing 28 is
The coil spring 30 is urged outward, and while being prevented from coming off at the tip of the opening 27a of the cover 27, the cover 27 is rotatably disposed in the recess 26a with a part thereof protruding outward. The pair of swivel casters 32 shown in FIG. 10 can be used as the constant distance holding member.
【0012】次に、本実施例の塗布装置10の作用を説
明する。塗布対象物である基板11をテーブル12上に
固定し、その後、塗布物を塗布物定量供給装置(図示省
略)からチューブ23を介して定量塗布ヘッド22へ供
給し、吐出口25aから連続的に基板11上に押し出
す。同時に、テーブル12をX軸方向に定速で移動す
る。この時、定距離保持部材25のボールベアリング2
8は基板11上を転接して、基板11と吐出口25aと
の間隔を一定に保っている。そして、基板11上に凹凸
が存在する場合にも、ボールベアリング28は凹凸上を
転接する。かかる場合、X軸方向の凹凸には、リニアガ
イド部材16に案内されて定量塗布ヘッド22が凹凸の
状態に応じてZ軸方向に移動する。また、Y軸方向の凹
凸には、回動回転部材15bがX軸回りに回動し、リニ
アガイド部材16とともに定量塗布ヘッド22が回動す
る。そして、定量塗布ヘッド22のZ軸方向の移動とX
軸回りの回動が合成され、定量塗布ヘッド22の吐出口
25aから押し出される塗布物の落下距離が常に一定に
保持される。Next, the operation of the coating apparatus 10 of this embodiment will be described. The substrate 11, which is the object to be coated, is fixed on the table 12, and then the coated material is supplied from the coating material quantitative supply device (not shown) to the quantitative coating head 22 via the tube 23 and continuously from the ejection port 25a. Extrude onto the substrate 11. At the same time, the table 12 is moved at a constant speed in the X-axis direction. At this time, the ball bearing 2 of the constant distance holding member 25
Reference numeral 8 rolls on the substrate 11 to keep the distance between the substrate 11 and the discharge port 25a constant. Even if the substrate 11 has irregularities, the ball bearing 28 rolls on the irregularities. In this case, in the unevenness in the X-axis direction, the quantitative coating head 22 is guided by the linear guide member 16 and moves in the Z-axis direction according to the unevenness. Further, on the unevenness in the Y-axis direction, the rotary rotation member 15b rotates around the X-axis, and the fixed quantity coating head 22 rotates together with the linear guide member 16. Then, the X-axis direction movement of the quantitative coating head 22 and X
The rotation about the axis is combined so that the distance of fall of the coating material extruded from the ejection port 25a of the quantitative coating head 22 is always kept constant.
【0013】本実施例によれば、基板11上のあらゆる
方向の凹凸に対応して、定量塗布ヘッド22がリニアガ
イド部材16と回転部材15を介して移動でき、吐出口
25aと基板11の塗布位置の距離を常に一定に保こと
ができる。そして、基板11の移動の際に、基板11と
定距離保持部材25のボールベアリング28が転接する
ため、基板11とボールベアリング28の接触面積が小
さくなり、基板11の微小な凹凸にも定量塗布ヘッド2
2が追従して移動することができる。According to this embodiment, the quantitative coating head 22 can be moved via the linear guide member 16 and the rotating member 15 in response to irregularities on the substrate 11 in all directions, and the ejection port 25a and the substrate 11 can be coated. The distance between positions can always be kept constant. When the substrate 11 is moved, the substrate 11 and the ball bearing 28 of the constant distance holding member 25 are in rolling contact with each other, so that the contact area between the substrate 11 and the ball bearing 28 is reduced, and even minute irregularities on the substrate 11 are quantitatively applied. Head 2
2 can follow and move.
【0014】[0014]
【実施例2】図11および図12は、本発明の実施例2
の塗布装置を示し、図11は正面図、図12は側面図で
ある。本実施例の塗布装置40は、実施例1と同様に配
置した回転部材固定板14にDCサーボモータ41が固
定されている。DCサーボモータ41の回転軸41a
は、回転部材固定板14を貫通して、DCサーボモータ
41の固定した面と反対側の面に突出されている。回転
軸41aの先端には凸型の回転板43が固着されてい
る。回転板43には、断面コ字状のステージ44が固定
されている。Second Embodiment FIGS. 11 and 12 show a second embodiment of the present invention.
11 is a front view and FIG. 12 is a side view. In the coating device 40 of this embodiment, the DC servomotor 41 is fixed to the rotary member fixing plate 14 arranged in the same manner as in the first embodiment. Rotation shaft 41a of DC servo motor 41
Penetrates through the rotary member fixing plate 14 and projects to the surface opposite to the surface where the DC servo motor 41 is fixed. A convex rotary plate 43 is fixed to the tip of the rotary shaft 41a. A stage 44 having a U-shaped cross section is fixed to the rotary plate 43.
【0015】ステージ44には、定量塗布ヘッド22と
平行でかつZ軸方向に立設した状態で2本のローラガイ
ド45が取付けられている。2本のローラガイド45の
中間には、ローラガイド45と平行に、1本のボールネ
ジ46が設けられ、ボールネジ46の上端には、ステー
ジ44の上面に固定したDCサーボモータ47に連結さ
れている。ボールネジ46には、定量塗布ヘッド22に
設けたステージ48が螺合されている。ステージ48の
側面は、上記2本のローラガイド45に摺動自在に保持
されている。Two roller guides 45 are attached to the stage 44 in parallel with the quantitative coating head 22 and in an upright state in the Z-axis direction. A ball screw 46 is provided in the middle of the two roller guides 45 in parallel with the roller guide 45, and the upper end of the ball screw 46 is connected to a DC servo motor 47 fixed to the upper surface of the stage 44. .. A stage 48 provided on the quantitative coating head 22 is screwed onto the ball screw 46. The side surface of the stage 48 is slidably held by the two roller guides 45.
【0016】定量塗布ヘッド22の下面には、吐出口部
24を挟んで一対の定距離保持部材49が固着されてい
る。一対の定距離保持部材49には、それぞれ発光素子
50と光位置検出素子51からなる測長センサが取付け
られている(図13参照)。すなわち、発光素子50か
ら照射した光は対象物11の塗布面で反射し、光位置検
出素子51で受光する。これにより、定量塗布ヘッド2
2と塗布対象物11の塗布面との距離を測定し、かつ定
量塗布ヘッド22と塗布面との傾き度合いを検出し有る
ように構成されている。A pair of constant distance holding members 49 are fixed to the lower surface of the quantitative coating head 22 with the discharge port portion 24 interposed therebetween. A length measuring sensor including a light emitting element 50 and a light position detecting element 51 is attached to each of the pair of constant distance holding members 49 (see FIG. 13). That is, the light emitted from the light emitting element 50 is reflected by the coating surface of the object 11 and is received by the light position detecting element 51. As a result, the quantitative coating head 2
2 is configured to measure the distance between the coating surface of the coating object 11 and the inclination degree between the quantitative coating head 22 and the coating surface.
【0017】本実施例の塗布装置40にあっては、図示
しない制御部によりX軸方向の凹凸に対しては、定距離
保持部材49である測長センサによって定量塗布ヘッド
22と塗布対象物11の塗布面との距離を測定して初期
設定距離との差を検出し、DCサーボモータ47を回転
する。これにより、ボールネジ46が回転し、ステージ
48を介して定量塗布ヘッド22が初期設定距離に移動
する。一方、Y軸方向の凹凸に対しては、各々の定距離
保持部材49である測長センサによって定量塗布ヘッド
22と塗布対象物11との傾きの度合いを検出し、その
検出した値だけDCサーボモータ41を回転して、凸型
の回転板43,ステージ44を介し定量塗布ヘッド22
を回動する。上記距離と傾き度合いの測定は、図13に
示すように、発光素子50から照射され塗布対象物11
の測定位置塗布面52で反射した光を光位置検出素子5
1が検知した位置と、塗布対象物11の初期設定位置塗
布面53で反射した光を光位置検出素子51で検知すべ
き位置との差を検出して行なう。その他の作用は上記実
施例1と同様である。In the coating device 40 of the present embodiment, the control unit (not shown) controls the quantitative coating head 22 and the coating target 11 by the length measuring sensor which is the constant distance holding member 49 for the unevenness in the X-axis direction. The distance from the coating surface is measured to detect the difference from the initially set distance, and the DC servo motor 47 is rotated. As a result, the ball screw 46 rotates, and the quantitative coating head 22 moves to the initial set distance via the stage 48. On the other hand, with respect to the unevenness in the Y-axis direction, the degree of inclination between the quantitative coating head 22 and the coating object 11 is detected by the length measuring sensor which is each constant distance holding member 49, and the DC servo is performed by the detected value. The motor 41 is rotated, and the quantitative coating head 22 is rotated through the convex rotary plate 43 and the stage 44.
Rotate. As shown in FIG. 13, the measurement of the distance and the inclination degree is performed by irradiating from the light emitting element 50 the object to be coated 11
Measurement position of the light reflected by the coating surface 52 of the optical position detection element 5
This is performed by detecting the difference between the position detected by No. 1 and the position where the light position detecting element 51 should detect the light reflected by the initial setting position coating surface 53 of the coating object 11. Other functions are the same as those in the first embodiment.
【0018】本実施例によれば、上記実施例1の効果に
加えて、移動する基板11と接触することなく定量塗布
ヘッド22を所定位置に移動できるので、弾性のある柔
らかい基板に対応でき、かかる基板にも均一な膜厚で塗
布することができる。According to the present embodiment, in addition to the effect of the first embodiment, since the quantitative coating head 22 can be moved to a predetermined position without coming into contact with the moving substrate 11, it is possible to cope with an elastic and soft substrate. A uniform film thickness can be applied to such a substrate.
【0019】[0019]
【実施例3】図14および図15は、本発明の実施例3
の塗布装置を示し、図14は斜視図、図15は平面図で
ある。本実施例の塗布装置60は、定量塗布ヘッド22
がアリ溝16bに案内されてZ軸方向に移動し得るよう
に、リニアガイド部材16に取付けられている。定量塗
布ヘッド22の前面中央には、溝51がZ軸方向に形成
されている。溝51は内部が幅広に形成され、横断面形
状がT字型に形成されている。溝51内には、溝51の
形状と対応したT字型の頭部を有するボルト52が摺動
自在に装着されている。ボルト52には、2枚の板53
が端部を貫通して回動自在に取付けられている。Third Embodiment FIGS. 14 and 15 show a third embodiment of the present invention.
14 is a perspective view and FIG. 15 is a plan view. The coating device 60 according to the present embodiment is provided with a fixed amount coating head 22.
Is attached to the linear guide member 16 so that it can be moved in the Z-axis direction while being guided by the dovetail groove 16b. A groove 51 is formed in the Z-axis direction at the center of the front surface of the quantitative coating head 22. The groove 51 is formed to have a wide inner portion and has a T-shaped cross section. A bolt 52 having a T-shaped head corresponding to the shape of the groove 51 is slidably mounted in the groove 51. The bolt 52 has two plates 53
Is rotatably attached through the end.
【0020】2枚の板53は、重ね合わされかつ交差し
て配置され、板53の前面でボルト52に螺着したナッ
ト54により、定量塗布ヘッド22に固定かつ移動自在
に設けられている。2枚の板53のそれぞれの他端に
は、定量塗布ヘッド22の両脇に別体で配置して定距離
保持部材65がネジ66を介して回動自在に取付けられ
ている。定距離保持部材25にはY軸方向に貫通穴が形
成されている。一方、定量塗布ヘッド22の下部にはY
軸方向に長尺なガイド棒67が取付けられており、定距
離保持部材25の貫通孔にガイド棒67を挿通し、定距
離保持部材65がY軸方向のみ移動可能に保持されてい
る。なお、68は定距離保持部材65の抜け止め用の頭
部である。The two plates 53 are superposed and arranged so as to intersect with each other, and are fixedly and movably provided to the fixed quantity coating head 22 by a nut 54 screwed to the bolt 52 on the front surface of the plates 53. At the other end of each of the two plates 53, a constant distance holding member 65, which is separately arranged on both sides of the quantitative coating head 22, is rotatably attached via a screw 66. The constant distance holding member 25 has a through hole formed in the Y-axis direction. On the other hand, at the bottom of the quantitative coating head 22, Y
A long guide rod 67 is attached in the axial direction, the guide rod 67 is inserted into the through hole of the constant distance holding member 25, and the constant distance holding member 65 is held so as to be movable only in the Y-axis direction. Reference numeral 68 is a head for preventing the constant distance holding member 65 from coming off.
【0021】本実施例の塗布装置60にあっては、ナッ
ト64を緩め、ボルト62を溝61で案内してZ軸方向
に移動すると、2枚の板63を介して一対の定距離保持
部材25がガイド棒67に案内されてY軸方向に移動
し、一対の定距離保持部材25の間隔が変化する。すな
わち、ボルト62を基板11方向に移動すると定距離保
持部材25の間隔が拡がり、ボルト62を基板11から
遠ざけるように移動すると狭くなるように定距離保持部
材25が移動する。そして、所望の間隔が得られた後、
ナット64を締め付け、2枚の板63を定量塗布ヘッド
22に固定する。その他の作用は上記実施例1と同様で
ある。In the coating apparatus 60 of the present embodiment, when the nut 64 is loosened, the bolt 62 is guided by the groove 61 and moved in the Z-axis direction, a pair of constant distance holding members are provided via the two plates 63. 25 is guided by the guide rod 67 and moves in the Y-axis direction, and the distance between the pair of constant distance holding members 25 changes. That is, when the bolt 62 is moved toward the substrate 11, the distance between the constant distance holding members 25 is widened, and when the bolt 62 is moved away from the substrate 11, the constant distance holding member 25 is moved so as to be narrowed. And after the desired spacing is obtained,
The nut 64 is tightened and the two plates 63 are fixed to the fixed quantity coating head 22. Other functions are the same as those in the first embodiment.
【0022】本実施例によれば、上記実施例1の効果に
加えて、基板11のパターンの近傍に別のパターンがあ
り、定距離保持部材25と別のパターンが接触する危険
がある場合、定距離保持部材25の間隔を変えることに
よってその危険を回避し、目的のパターンに塗布するこ
とができる。According to the present embodiment, in addition to the effect of the first embodiment, when there is another pattern in the vicinity of the pattern of the substrate 11 and there is a risk that the constant distance holding member 25 and the other pattern come into contact with each other, By changing the distance between the constant distance holding members 25, the danger can be avoided and the target pattern can be applied.
【0023】[0023]
【発明の効果】本発明によれば、凹凸を有する塗布対象
物上に膜幅の広い塗布膜を形成する場合にあっても、定
量塗布ヘッドが凹凸の状態に対応して直動部材と回転部
材により移動するので、定量塗布ヘッドと塗布対象物の
塗布位置との間隔を常に一定に保ことができ、均一な塗
布膜厚を得ることができる。According to the present invention, even when a coating film having a wide film width is formed on an object to be coated having irregularities, the constant quantity coating head rotates with the linear member in correspondence with the state of irregularities. Since it is moved by the member, the interval between the quantitative coating head and the coating position of the coating object can be always kept constant, and a uniform coating film thickness can be obtained.
【図1】本発明の塗布装置を概念的に示す側面図であ
る。FIG. 1 is a side view conceptually showing a coating apparatus of the present invention.
【図2】本発明の塗布装置を概念的に示す正面図であ
る。FIG. 2 is a front view conceptually showing the coating apparatus of the present invention.
【図3】本発明の実施例1の塗布装置を示す斜視図であ
る。FIG. 3 is a perspective view showing a coating device according to a first embodiment of the present invention.
【図4】本発明の実施例1の塗布装置を示す正面図であ
る。FIG. 4 is a front view showing the coating apparatus according to the first embodiment of the present invention.
【図5】本発明の実施例1の塗布装置を示す側面図であ
る。FIG. 5 is a side view showing the coating apparatus according to the first embodiment of the present invention.
【図6】回転部材を示す斜視図である。FIG. 6 is a perspective view showing a rotating member.
【図7】回転部材を切り欠いて示す断面図である。FIG. 7 is a cross-sectional view showing a rotating member by cutting it out.
【図8】定距離保持部材を示す斜視図である。FIG. 8 is a perspective view showing a constant distance holding member.
【図9】定距離保持部材の断面図である。FIG. 9 is a sectional view of a constant distance holding member.
【図10】実施例1の変形例を示す側面図である。FIG. 10 is a side view showing a modified example of the first embodiment.
【図11】本発明の実施例2の塗布装置を示す正面図で
ある。FIG. 11 is a front view showing a coating device according to a second embodiment of the present invention.
【図12】本発明の実施例2の塗布装置を示す側面図で
ある。FIG. 12 is a side view showing a coating apparatus according to a second embodiment of the present invention.
【図13】定距離保持部材の要部を示す図である。FIG. 13 is a view showing a main part of a constant distance holding member.
【図14】本発明の実施例3の塗布装置を示す斜視図で
ある。FIG. 14 is a perspective view showing a coating device according to a third embodiment of the present invention.
【図15】本発明の実施例3の塗布装置を示す平面図で
ある。FIG. 15 is a plan view showing a coating device according to a third embodiment of the present invention.
1 塗布対象物 2 定量塗布ヘッド 3 移動テーブル 4 定距離保持部材 5 直動部材 6 回転部材 1 coating object 2 fixed amount coating head 3 moving table 4 constant distance holding member 5 linear motion member 6 rotating member
Claims (1)
定量塗布ヘッドと、塗布物を塗布ヘッドに供給する塗布
物定量供給装置と、塗布対象物を固定し定量塗布ヘッド
に対して相対的に定速で移動する移動テーブルとからな
る塗布装置において、上記定量塗布ヘッドに取付けた少
なくとも2個以上の定距離保持部材と、定量塗布ヘッド
を上記塗布対象物の塗布面に向かって移動可能に保持す
る直動部材と、直動部材を介して定量塗布ヘッドを回動
自在に保持する回転部材とから構成したことを特徴とす
る塗布装置。1. A quantitative coating head for continuously ejecting a coating material onto a coating object, a coating material quantitative supply device for feeding the coating material to the coating head, and a fixed coating object relative to the quantitative coating head. In a coating device including a moving table that moves at a constant speed, it is possible to move at least two constant distance holding members attached to the quantitative coating head and the quantitative coating head toward the coating surface of the coating object. And a rotating member that rotatably holds the fixed quantity coating head via the linear moving member.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30850891A JPH05115825A (en) | 1991-10-28 | 1991-10-28 | Coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30850891A JPH05115825A (en) | 1991-10-28 | 1991-10-28 | Coating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05115825A true JPH05115825A (en) | 1993-05-14 |
Family
ID=17981871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30850891A Withdrawn JPH05115825A (en) | 1991-10-28 | 1991-10-28 | Coating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05115825A (en) |
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-
1991
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US7087118B2 (en) * | 1999-12-17 | 2006-08-08 | Tokyo Electron Limited | Coating film forming apparatus and coating unit |
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WO2014063806A1 (en) * | 2012-10-26 | 2014-05-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Combination nozzle and device for applying a viscous material to a component edge |
CN103567113A (en) * | 2013-11-14 | 2014-02-12 | 宁波职业技术学院 | Multipoint once-injecting device |
CN103567113B (en) * | 2013-11-14 | 2016-05-04 | 宁波职业技术学院 | Material injecting device of a kind of multiple spot |
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Legal Events
Date | Code | Title | Description |
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A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990107 |