JPH09161682A - Operating member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lower the cost, and to facilitate the manufacturing by moving an operating member forward and backward in the straight direction in relation to a short-circuit switch so as to be rotated at a position, in which the operating member can be engaged. SOLUTION: When a piece 21 is rotated so that one recessed part of plural recessed parts, which are formed in the piece 21, is fitted in a large diameter part 16c of a post 16, barrel 21 can be slid along the post 16. When the piece 21 is slid, with this movement, an engaging member 19, which is provided at an inner end of a shaft 18 and which is to be engaged with a short-circuit switch, is moved forward and backward in the straight direction in relation to the short-circuit switch so as to operate the short-circuit switch. In the condition that the switch is operated, one recessed part is fitted in a large diameter part 16c of the post 16. In this condition, the piece 21 is slid outward for backward movement, and the shaft 18 and the engaging member 19 are moved to the outer end in the axial direction. A small diameter part 16b is formed at the inner end of the post 16, and in ordinary, the piece 21 is held at an outer end position in the axial direction, in which the one recessed part is fitted in a large diameter part 16c.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an operating member for operating and operating an operated member by advancing and retreating in a linear direction with respect to the operated member and rotationally moving at a position where it can engage with the operated member. Regarding Such an operating member has an electrode switch (operated member) inside the electron microscope for short-circuiting the electrodes of the electron gun of the field emission electron microscope.
Used when operating from outside the electron microscope.

[0002]

2. Description of the Related Art In the electron gun of the field emission electron microscope, when a short-circuit mechanism is used (conditioning), electrodes having different potentials, an emitter (electron source), etc. are short-circuited so that they have the same potential. The one provided is known. Next, a conventional technique of the shorting mechanism will be described with reference to FIGS. FIG. 13 is an overall explanatory view of an electron gun equipped with an electrode short-circuit mechanism in a conventional field emission electron microscope. FIG. 14 is an enlarged view of a main part of FIG. 13 and is an explanatory view of an operating member of the electrode short-circuit mechanism. FIG. 15 is an explanatory view of a guide member that determines a movement path of the operation member, and FIG. 15A is a perspective view of the guide member.
B is a development view of the guide groove of the guide member.

In FIG. 13, a field emission electron microscope 0
1 has an outer cylinder 02 filled with an insulating gas, an insulator 03 arranged inside the outer cylinder 02, and a vacuum container 04.
The space surrounded by the insulator 03 and the vacuum container 04 is kept in vacuum. The electron gun 05 provided in the vacuum container 04 has an emitter (electron source) 06, a bias electrode 07, a first electrode 08, a second electrode 09, and the like. A short circuit switch unit 011 having a plurality of normally open short circuit switches 011a to 011d is arranged above the vacuum container 04. When the short-circuit switch unit 011 is opened, an arbitrary potential is applied to the vacuum container 04, the emitter (electron source) 06, and each of the electrodes 07 to 09 under a constant condition, and the electron beam is emitted from the emitter (electron source) 06. Can be pulled out.

In an apparatus having an insulating member such as the above-mentioned insulator 03, a work called conditioning is generally performed. This is an operation in which a voltage is gradually applied to one end of the insulating member, and finally a voltage is applied by about 10 to 20% when the device is used, and the cause of the discharge is removed by the discharge generated in the process. During the conditioning work, the normally open short circuit switches 011a to 011d are closed, and the vacuum container 04, the emitter (electron source) 06, and each electrode 07 are closed.
By holding ~ 09 at the same potential, discharge at an undesired location near the emitter (electron source) 06 is prevented, and thereby damage to the emitter (electron source) 06 due to discharge is prevented.

Each of the plurality of short-circuit switches 011a to 01
The outer cylinder (wall member) 02 in which 1d (that is, the operated member) is arranged is provided with an operating member mounting portion 02a which faces the short-circuit switch portion 011 and projects outward. The operation member mounting portion 02a has a plurality of nuts 0
2b (only one is shown in FIG. 14) is fixed. The operation member mounting portion 02a is formed with a through hole through which a shaft described later penetrates. An operation member 012 is attached to the outer surface of the operation member attachment portion 02a. 13 to 15, the operation member 012 is a cylindrical guide member 0.
13. The cylindrical guide member 013 is a flange portion 014 (see FIG. 1) attached to the operation member attachment portion 02a.
4 (see FIG. 15A). A plurality of nut accommodating portions 015 and a bolt through hole 016 shown in FIG. 12 are formed on the end surface of the flange portion 014 mounted on the operation member mounting portion 02a, corresponding to the plurality of nuts 02b. The cylindrical guide member 013 has the bolt through hole 016.
It is fixed to the outer cylinder (wall member) 02 by a bolt 017 which penetrates through and is screwed into the nut 02b.

The cylindrical guide member 013 has a shaft through hole 018. In addition, the cylindrical guide member 0
13 has a substantially U-shaped guide groove 019 shown in FIG. 15A. The guide groove 019 corresponds to the cylindrical guide member 01.
3 is formed between the outer side surface and the shaft through hole 018. A shaft 021 slidably and rotatably supported in the shaft through hole 018 has an operation knob 022 fixed to an outer end thereof, and an engagement member 023 provided on an inner end thereof. The engaging member 023 is the shaft 0.
When 21 moves inward and rotates in one direction, it engages the short-circuit switch unit 011 of FIG. 13 to turn on each short-circuit switch 011a to 011d, and when it rotates in the other direction, each short-circuit switch It is configured to turn off 011a to 011d.

A guide pin 0 is attached to the shaft 021.
24 is fixed, and the guided pin 024 is housed in the guide groove 019. Therefore, FIG.
In the case where the guided pin 024 is in the position indicated by 024a, the guided pin 024 is moved by rotating and axially moving the shaft 021.
024b, 024c, 02 sequentially from the position shown in FIG.
It is possible to move to 4d, 024e, and 024f. in this case,
The shaft 021 sequentially rotates, moves forward (moves inward in the axial direction), rotates in one direction, moves backward (moves outward in the axial direction),
It will rotate. When the shaft 021 is rotated at the position on the inner end side, the engaging member 02 at the inner end of the shaft 021 is rotated.
3 is engaged with the short-circuit switch unit 011 to turn on each of the short-circuit switches 011a to 011d, so that the conditioning work can be performed. Then, after the conditioning work is completed, the guided pin 024
Is moved from position 024f to 024a in FIG. 15B to turn off each of the short circuit switches 011a to 011d.

[0008]

However, in the operation member of the conventional short mechanism, the substantially U-shaped guide groove 019 of the cylindrical guide member 013 has a problem that the processing cost is high. Further, when the engaging member 023 is moved forward (moved inward in the axial direction), the shaft 0
Since the shaft 021 has to be long so that the operation knob 022 fixed to the outer end portion of 21 does not come into contact with the cylindrical guide member 013, the apparatus becomes large and the cost becomes high. .

In view of the circumstances described above, the present invention has the following contents. (O01) To provide an operating member that is low in processing cost and easy to manufacture.

[0010]

Next, the present invention devised to solve the above-mentioned problems will be described. Elements of the present invention are used to facilitate correspondence with elements of the embodiments described later. , The reference numerals of the elements of the embodiment are enclosed in parentheses. Further, the reason why the present invention is described in association with the reference numerals of the embodiments described later is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(Invention) In order to solve the above-mentioned problems, the operating member of the present invention has the following requirements, wherein the operated member (11) is arranged inside (Y01) and the shaft is A mounting surface (12a) mounted on a wall member (2) having a through hole (2b), a post support surface (12b) provided on the opposite side of the mounting surface (12a), and the mounting surface (12).
a) and a shaft through hole (12c) formed between the post supporting surface (12b), and a base member (12), (Y0
2) A small diameter which is provided parallel to the axis of the shaft through hole (12c) of the post supporting surface (12b) of the base member (12) and is formed at a position adjacent to the post supporting surface (12b) in the axial direction. A guide member (G) including a portion (16b) and a post (16) having a large diameter portion (16c) having a constant cross-sectional shape, (Y03) a shaft through hole (of the base member (12) and the wall member (2) ( 12c, 2b) and a shaft (18) penetrating slidably and rotatably,
An engaging member (19) with the operated member (11) connected to the inner end of the shaft (18);
8) A small diameter portion (16) of the post (16) fixed to the outer end and centered on the axis of the shaft (18).
b) a moving member (M) having a diameter smaller than the circumscribing circle to the post (16) and having a diameter larger than the circumscribing circle to the large diameter portion (16c) of the post (16), (Y04) the top ( 21) A plurality of recesses (22a, 22) formed on the outer periphery and into which the large diameter portion (16c) of the post (16) can be fitted.
The top (21) having b) and having a thickness rotatable at a position facing the small diameter portion (16b).

(Embodiment 1 of the present invention) Embodiment 1 of the operating member of the present invention is characterized in that the following requirements (Y001) to (Y002) are provided in the present invention.
001) Post supporting surface (12b) of the base member (12)
The guide member (G) having a plurality of posts arranged at the same distance from the axis of the shaft through hole (12c), (Y002) the plurality of posts (16) on the outer peripheral portion of the top (21). The top (21) having a plurality of recesses (22a, 22a or 22b, 22b) which are formed corresponding to the above and can be fitted with the large diameter parts (16c) of the plurality of posts (16) at the same time.

(Embodiment 2 of the present invention) An embodiment 2 of the operating member of the present invention is characterized in that the operating member of the present invention and the embodiment 1 of the present invention have the following requirements. (Y003) Post support surface (12b)
The guide member (G) having a post (16) having a small diameter portion (16a) formed at a position away from the guide member (G).

(Embodiment 3 of the present invention) Further, Embodiment 3 of the operating member of the present invention has the following requirements in the operating member of the present invention and Embodiments 1 and 2 of the present invention. Characteristic, (Y004) the frame (21)
The movable member (M) provided with a knob (24) having an inner diameter hole that is fixed to the shaft and has a large diameter portion (16c) of the post (16) centered on the axis of the shaft (18). ).

Next, the operation of the present invention having the above features will be described. (Operation of First Invention) In the operating member of the first invention of the present application having the above-mentioned characteristics, the shaft (1) of the moving member (M) is
8) penetrates through the shaft through holes (2b) of the base member (12) and the wall member (2) slidably and rotatably. It is fixed to the outer end of the shaft (18) and is smaller than the circumscribed circle with the small diameter portion (16b) of the post (16) about the axis of the shaft (18) and the large diameter portion of the post (16) ( 16c) the top (21) having a diameter larger than the circumscribed circle with the small diameter portion (16)
It can rotate in b) but cannot rotate in the large diameter portion (16c). When the top (21) rotates in the small diameter portion (16b), the operated member (1) connected to the inner end of the shaft (18) as the top (21) rotates.
The engaging member (19) with 1) rotates.

In the small diameter part (16b) of the post (16), the top (21) is rotated and the recess (22b) formed in the top (21) is replaced by the large diameter part (16c) of the post (16). Move to the position where
1) will be slidable along the post (16). When the top (21) is slid along the post (16), the shaft (1) is moved along with the movement of the top (21).
8) The engaging member (19) connected to the operated member (11) connected to the inner end linearly moves back and forth with respect to the operated member (11). Therefore, the small-diameter portion is attached to the post (1
6) is formed on the inner end portion, and the top (21) is slid to the small diameter portion to move the engaging member (19) to a position where it can be engaged with the operated member (11). By rotating the top (21) and rotating the engaging member (19), the engaging member (19) is moved to the operated member (1).
The operated member (11) can be operated by engaging with 1). After actuating the operated member (11), the recess (22) of the top (21) is replaced by the large diameter portion (1) of the post (16).
6c) The top (21) is rotated to a position where the top (21) is fitted, and the top (21) is slid outward. At this time, the frame (2
With the movement of 1), the engaging member (19) connected to the inner end of the shaft (18) is moved outward. The top (21) slid outward is fixed so as not to slide at a predetermined position.

(Operation of the Invention) In the operating member of the first invention of the present application having the above-mentioned characteristics, the shaft (18) of the moving member (M) includes the base member (12) and the wall member (2). ) The shaft through hole (2b) is slidably and rotatably penetrated. It is fixed to the outer end of the shaft (18) and is smaller than the circumscribed circle with the small diameter portion (16b) of the post (16) about the axis of the shaft (18) and the large diameter portion of the post (16) ( The top (21) having a diameter larger than the circumscribed circle with respect to 16c) is rotatable in the small diameter portion (16b) but is large in diameter (1).
In 6c) it cannot rotate.

One of the plurality of recesses (22a, 22b) formed in the top (21) by rotating the top (21) in the small diameter portion (16b) of the post (16) (22a). Is the large diameter portion (16) of the post (16).
In the state where it is rotated to the position where it fits into c),
1) will be slidable along the post (16). When the top (21) is slid along the post (16), the shaft (1) is moved along with the movement of the top (21).
8) The engaging member (19) connected to the operated member (11) connected to the inner end linearly moves back and forth with respect to the operated member (11). Therefore, the small diameter portion (16b) is connected to the inner end portion of the post (16) (the post supporting surface (12b)).
(A position adjacent to the position), and usually the one recess (22a) is fitted to the large diameter part (16c) of the post (16) so that the top (21) is located at the outer end in the axial direction. Hold in position.

When the operated member (11) is operated, the top (21) is slid from the outer end in the axial direction to the small diameter part (16b) of the inner end to engage the engaging member (19). Is advanced to a position where it can be engaged with the operated member (11). At this position, insert the top (21) into the large diameter portion (16
It is rotated from a position where the one concave portion (22a) is fitted in c) to a position where the other concave portion (22b) is engaged. At this time, the shaft (18) and the engaging member (19) rotate together with the top (21), so that the engaging member (19) engages with the operated member (11) and the operated member (11).
Can be activated. By operating the operated member (11) as described above, the recess (22b) of the top (21)
At the position where is fitted to the large diameter portion (16c) of the post (16), the top (21) is retracted (slipped outward). At this time, the shaft (1
8) The engaging member (19) connected to the inner end is slid outward. Frames slid outward (21)
Are held in place at their axially outer ends.

(Operation of Embodiment 1 of the Present Invention) In Embodiment 1 of the operating member of the present invention, the plurality of posts (1
One of the plurality of recesses (22a, 22a or 22b, 22b) into which the large diameter part (16c) of 6) can be fitted simultaneously is the large diameter part of the plurality of posts (16). The top (21) while being fitted to (16c) at the same time
Is moved forward from the inner end in the axial direction to the outer end. And
From the position where the top (21) is fitted to the large diameter portion (16c) of the plurality of posts (16) simultaneously, the top (21) is fitted at a position where the top (21) faces the small diameter portion (16b). The other recesses (22b, 22b) are rotated to a position where they are simultaneously fitted into the large diameter parts (16c) of the plurality of posts (16). During this rotation, the operated member (11) can be operated by the engaging member (19) at the front end of the shaft (18). In a state where the operated member (11) is operated, the other recessed portions (22b, 22b) are simultaneously fitted into the large diameter portions (16c) of the plurality of posts (16). In this state, the top (21) is moved backward (sliding outward), and the shaft (18) and the engaging member (19) are moved.
To the axially outer end.

(Operation of Embodiment 2 of the Present Invention) In Embodiment 2 of the operating member of the present invention, the top (21) is located on the axially inner end side (position adjacent to the post supporting surface (12b)). The small diameter portion (16a) of the post (16) is rotatable at the position of the small diameter portion (16b) and is formed at a position distant from the post supporting surface (12b).
Even in the small diameter portion (that is, the outer end side), the top (21)
Is rotatable. Therefore, normally, the frame (2
When 1) is the position of the small diameter portion (16a) on the outer end side in the axial direction, the recesses (22a, 22b) of the top (21) rotate to a position where they do not fit with the large diameter portion (16c) of the post (16). Has been done. Therefore, the top (21) does not move in the axial direction.

When the operated member (11) is operated, the top (21) is rotated to a position where the recess (22a) is fitted with the large diameter portion (16c) of the post (16). , The top (21) is advanced at that position. And
The top (21) is moved to the small diameter portion on the inner end side. At this position, when the top (21) is rotated from the position where the recess (22a) is fitted to the large diameter portion (16c) of the post (16) to the position where another recess (22b) is fitted,
The engaging member (19) at the tip of the shaft (18) rotates,
The operated member (11) is operated. Next, the top (21) is moved to the outer end side to face the small diameter portion (16a). At this position, the top (21) is rotated to a position where the large diameter portion (16c) of the post (16) does not fit the recesses (22a, 22b). In this position the piece (21)
Does not move axially, so it is held in its axial position.

(Operation of Embodiment 3 of the Present Invention) In Embodiment 3 of the operating member of the present invention, the moving member (M) has a knob (24) fixed to the top (21). Therefore, when the knob (24) is rotationally operated, the knob (24) is outside the circle in which the large diameter portion (16c) of the post (16) centering on the axis of the shaft (18) is included. The frame (21) also rotates at this time. Further, the top (21) can be moved forward or backward by moving the knob (24) in the axial direction. That is, by operating the knob (24), the frame (2
The rotation of 1) and forward / backward movement can be performed. And
The knob (24) fixed to the top (21) can be formed in any shape that is easy to operate.
It is easy to improve the operability as compared with the case of directly operating.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION Next, examples (embodiments) of embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following examples. In order to facilitate understanding of the following description, orthogonal coordinate axes X axis, Y axis, Z in the directions of arrows X, Y, Z orthogonal to each other in the drawings.
The axes are defined, and the arrow X direction is the front, the arrow Y direction is the left, and the arrow Z direction is the upper. In this case, the direction opposite to the X direction (front) (-X direction) is the rear, the direction opposite to the Y direction (left) is the right (-Y direction), and the direction opposite to the Z direction (upper) (-Z direction). Is below. The front (X direction) and the rear (-X direction) are referred to as the front-back direction or the X-axis direction, and the left (Y direction) and the right (-Y direction) are included in the left-right direction or the Y-axis direction. That is, the upper direction (Z direction) and the lower direction (−Z direction) are referred to as the vertical direction or the Z axis direction.
Furthermore, in the figure, the ones with "・" in the "○" mean the arrows from the back of the paper to the front, and the ones with "X" in the "○" are from the front of the paper. It means an arrow pointing to the back.

(Embodiment 1) FIG. 1 is an overall explanatory view of an electron gun equipped with an electrode short-circuit mechanism in a field emission electron microscope of Embodiment 1 of the present invention. FIG. 2 is an enlarged view of a main part of FIG. 1 and is an explanatory view of an operating member of the electrode short-circuit mechanism of the first embodiment. FIG. 3 is a sectional view taken along line III-III of FIG. FIG. 4 is an explanatory view of the action of the moving member of the first embodiment, and is a view in which the top of the moving piece is rotationally moved from the state shown in FIG. FIG. 5 is an operation explanatory view of the moving member of the first embodiment, and is a view in which the moving member is moved forward from the state shown in FIG. FIG.
5 is an explanatory view of the operation of the moving member according to the first embodiment, showing VI of FIG.
FIG. 6 is a sectional view taken along line VI-VI. FIG. 7 is an explanatory view of the operation of the moving member according to the first embodiment.

In FIG. 1, a field emission electron microscope 1 is shown.
Has an outer cylinder (wall member) 2, an insulator 3 arranged inside the outer cylinder 2, and a vacuum container 4. The inside of the outer cylinder 2 is filled with insulating gas, and the space surrounded by the insulator 3 and the vacuum container 4 is maintained in vacuum. As a gas filling device for filling the inside of the outer cylinder 2 with an insulating gas and a vacuum device for making a space surrounded by the insulator 3 and the vacuum container 4 into a vacuum, a conventionally known device can be used. An electron gun 5 is arranged in the vacuum container 4.
The electron gun 5 includes an emitter (electron source) 6, a bias electrode 7,
The first electrode 8 and the second electrode 9 are included.

A short-circuit switch section 11 as an operated member is arranged above the vacuum container 4. Short circuit switch unit 1
Reference numeral 1 is composed of normally open short-circuiting switches 11a to 11d. When the short-circuit switch unit 11 is opened, an arbitrary potential is applied to the vacuum container 4, the emitter (electron source) 6 and the electrodes 7 to 9 under constant conditions, so that electrons are emitted from the emitter (electron source) 6. The line can be pulled out. On the outer cylinder 2 in which the plurality of short-circuit switches 11a to 11d are arranged, an operation member mounting portion 2a is provided so as to face the short-circuit switch portion 11 and project outward. A shaft through hole 2b (see FIG. 2) through which a shaft described later penetrates is formed in the operation member mounting portion 2a. A base member 12 is mounted on the outer surface of the operation member mounting portion 2a.

In FIG. 2, the base member 12 is provided with a plurality of bolts 13 (only two of which are shown) for the operation member mounting portion 2
It is fixed to the outer surface of a. The base member 12 has a post support surface 12b provided on the opposite side of the mounting surface 12a mounted on the outer surface of the operation member mounting surface 2a,
A shaft through hole 12c through which a shaft described later penetrates is formed between the mounting surface 12a and the post supporting surface 12b. O-ring grooves 14, 14 are formed in the mounting surface 12a of the base member 12 and the shaft through hole 12c. O-rings 15, 15 are provided in the O-ring grooves 14, 14.
Is housed.

Two posts 16 and 16 are fixed to the post supporting surface 12b at positions equidistant from the axis of the shaft through hole 12c in parallel with the axis. In this embodiment, a guide member G (see FIGS. 2 and 5) for axially advancing and retracting a frame to be described later by the two posts 16 and 16 described above.
Is configured. The posts 16 and 16 have an axial direction (X
The first small-diameter portion 16a is provided at two locations apart from each other in the axial direction,
A second small diameter portion 16b is formed, and a large diameter portion 16c having a circular cross section and a constant shape is formed between the first small diameter portion 16a and the second small diameter portion 16b. The two posts 16, 16
A fixing member 17 that connects and fixes the outer ends of the posts 16 and 16 is fixed to the outer end (the end in the -X direction) of the. A stopper described later is fixed to the post fixing member 17. A shaft 18 is slidably and rotatably supported in the shaft through hole 12c of the base member 12. An engagement member 19 is provided at the inner end (end in the X direction) of the shaft 18. The engagement member 19 engages with the short-circuit switch unit 11 (that is, the operated member) to turn on the short-circuit switches 11a to 11d when the shaft 18 advances to the inner position and rotates in one direction. Each of the short-circuiting switches 11a to 11d is turned off when it is rotated in the other direction.

In FIGS. 2 and 3, a top 21 having a circular outer peripheral portion with a recess is fixed to the outer end portion (end portion in the -X direction) of the shaft 18. The top 21 has a diameter that is smaller than the circumscribed circle with the first small diameter portion 16a or the second small diameter portion 16b of the posts 16 and 16 and that is larger than the circumscribed circle with the large diameter portion 16c around the axis of the shaft 18. have. The top 21 is set to have a thickness smaller than the length of the small diameter portion 16b, and is rotatable at the position of the small diameter portion 16b. The thickness of the top piece 21 needs to be set to a value smaller than the length of the small diameter portion 16b only in the outer peripheral portion that enters the small diameter portion 16b (that is, only the outer portion of the circumscribed circle with the large diameter portion 16c). However, the thickness of the inner portion of the circumscribed circle can be set to be larger than the length of the small-diameter portion 16b, and the outer peripheral portion of the top 21 has four concave portions 22a at every 90 degrees.
22b, 22a, 22b are formed (see FIG. 3).
The pair of recesses 22a, 22a are arranged at a position shifted by 180 °, and the pair of recesses 22b, 22b are also arranged at a position displaced by 180 °. The pair of recesses 22a, 22a
Alternatively, at the position where 22b and 22b face the two posts 16 and 16, the top 21 has concave portions 22a and 22a,
Alternatively, it is possible to slide along the posts 16 and 16 in the front-rear direction (X-axis direction) with the large-diameter portions 16c and 16c fitted to the 22b and 22b. Therefore, the frame 21 is
The first small diameter portion 16a and the second small diameter portion 16b of the posts 16 and 16 can rotate, but the large diameter portion 16c cannot rotate.

Support members 23, 23 are fixed to both front and rear surfaces of the top 21 fixed to the shaft 18. An operation knob 24 is fixed to the support members 23, 23. The operation knob 24 has a hole having an inner diameter larger than a circle in which the post large-diameter portion 16c centered on the axis of the shaft 18 is contained. Therefore, at the position where the top 21 faces the first small diameter portion 16a or the second small diameter portion 16b of the posts 16 and 16, the operation knob 24 is operated by the pair of posts 16 and 16 according to the rotation of the top 21.
Can be rotated outside the
The operation knob 24 is slidable integrally with the top 21 when sliding in the front-back direction along 6, 16.
Therefore, when the operator rotates the operation knob 24 or moves it in the front-rear direction (X-axis direction), the top 21 and the shaft 18 rotate or move the front-rear direction (X-axis direction).
The engaging member 19 fixed to the inner end of the shaft 18 can be rotated or moved in the front-rear direction (X-axis direction). Reference numerals 18 to 24
The moving member M according to the first exemplary embodiment of the present invention is configured from the elements indicated by.

In FIGS. 2 and 3, a stopper 25 is provided on the front surface (X side surface) of the post fixing member 17. The stopper 25 has a role of coming into contact with the support member 23 and restricting the rotation range of the top 21 when the top 21 rotates. In the state of FIG. 3, the top 21 can rotate counterclockwise but cannot rotate clockwise.

(Operation of First Embodiment) Next, the operation of the first embodiment of the present invention having the above-described structure will be described. In FIG.
The switches 11a to 11d of the switch unit 11 are in the off state. 1 and 2, the moving member M
Are arranged rearward (-X direction), and the top 21 is located at the first small diameter portion 16a of the posts 16,16. At this time, since the support member 23 is in contact with the stopper 25, the top 21 can rotate counterclockwise but cannot rotate clockwise (see FIG. 3). In the state of FIG. 3, when the top 21 is rotated in the direction of the arrow by the operation knob 24, the support member 23 moves the posts 16, 1
It contacts the large diameter portion 16c of 6 (see FIG. 4A). This figure 4
In the state A, the posts 16 and 16 are fitted into the recesses 22a and 22a of the top 21, and the top 21 can slide along the posts 16 and 16 in the front-rear direction (X-axis direction).

In the state of FIG. 4A, the operation knob 24 is moved forward (X direction, that is, inside the outer cylinder 2) to slide the top 21 along the posts 16 and 16 to the second small diameter portion 16b ( (See FIGS. 4B and 5). At this time, the engaging member 19 connected to the inner end of the shaft 18 is moved forward (X direction) as the top 21 moves forward, and each switch 11a of the switch portion 11 (that is, the operated member) is moved.
Engage ~ 11d. From the state of FIG. 4B, the top 21 is rotated clockwise by 90 degrees to obtain the state of FIG. 6A. At this time, the engagement member 19 connected to the inner end of the shaft 18 rotates 90 degrees clockwise with the rotation of the top 21, and the switches 11a to 11d of the switch unit 11 are turned on.
In the state shown in FIG. 6A, the top 21 is moved backward along the posts 16 and 16 to the first small diameter portion 16a by the operation knob 24 to obtain the state shown in FIG. 6B. In the state of FIG. 6B (the state where the top 21 is moved to the first small diameter portion 16a), the operation knob 24 and the top 21 are rotated counterclockwise to the state of FIG. In FIG. 7, the support member 23 is the stopper 2
It is in contact with 5. At this time, the top 21 moves in the front-back direction (X
It cannot move in the axial direction). Then, the conditioning work is ready. After the conditioning work is completed, the switches 11a to 11d of the switch unit 11 can be turned off by the procedure reverse to the above.

(Second Embodiment) Next, a second embodiment of the operating member of the present invention will be described with reference to FIG. FIG. 8 shows the second embodiment.
FIG. 4 is an explanatory view of the top 21 and posts 16 and 16 and corresponds to FIG. 3. In the description of the second embodiment, components corresponding to the components of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. The second embodiment differs from the first embodiment in the following points, but has the same configuration as the first embodiment in other points.
In the second embodiment, the post 16 of the first embodiment,
The large diameter portion 16c of 16 has a quadrangular cross section and has a constant shape. The second embodiment has the same operation as the first embodiment.

(Third Embodiment) Next, a third embodiment of the operating member of the present invention will be described with reference to FIGS. 9 to 11 are diagrams illustrating the configuration and operation of the top 21 according to the third embodiment. Next, the correspondence between the diagram of the third embodiment and the diagram of the first embodiment will be shown. (Example 3: Example 1) = (FIG. 9A: FIG. 3), (FIG. 9)
B: FIG. 4A), (FIG. 10A: FIG. 4B), (FIG. 10B: FIG. 6A), (FIG. 11A: FIG. 6B), (FIG. 11B: FIG. 7). In the description of the third embodiment, components corresponding to the components of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. The third embodiment differs from the first embodiment in the following points, but is configured similarly to the first embodiment in other points.

In the third embodiment, the support member 23 and the operation knob 24 of the first embodiment are omitted. Further, instead of the stopper 25, the stopper 21 is attached to the top 21.
1, 31 are fixed. That is, the top 21 can be rotated to a position where the stoppers 31, 31 contact the posts 16, 16. The moving member M according to the third exemplary embodiment of the present invention is configured by the elements indicated by the reference numerals 18 to 31. In the third embodiment, the operator directly rotates the top 21 and rotates in the front-back direction (X-axis direction) without using the operation knob 24 of the first embodiment for rotating the top 21 and moving in the front-back direction (X-axis direction). Direction).

(Operation of Third Embodiment) Next, the operation of the third embodiment will be described. When the top 21 is rotated in the direction of the arrow in the state of FIG. 9A, the stopper 31 comes into contact with the large diameter portion 16c of the posts 16 and 16 (see FIG. 9B). In the state of FIG. 9B, the posts 16 and
16 is fitted, and the top 21 can slide along the posts 16 and 16 in the front-rear direction (X-axis direction). In the state of FIG. 9B, the top 21 is moved inward along the posts 16 and 16 to the inside of the outer cylinder 2 and slid to the second small diameter portion 16b to obtain the state of FIG. 10A. In the state shown in FIG. 10A, the engaging member 19 connected to the inner end of the shaft 18 moves forward (X
Direction) and is engaged with the switches 11a to 11d of the switch portion 11 (that is, the operated member).

In the state of FIG. 10A, the top 21 is rotated clockwise by 90 degrees. At this time, as the top 21 rotates, the engaging member 19 connected to the inner end of the shaft 18 rotates 90 degrees clockwise, resulting in the state of FIG. 10B. At this time,
The switches 11a to 11d of the switch unit 11 are turned on. In the state of FIG. 10B, the top 21 is attached to the posts 16, 1.
11A by retracting along 6 to the first small diameter portion 16a. In the state of FIG. 11A (the state where the top 21 is moved backward to the first small diameter portion 16a), the top 21 is rotated clockwise to the state of FIG. 11B. In FIG. 11B, the stopper 31 is in contact with the post 16. At this time, the top 21 cannot move in the front-rear direction (X-axis direction). Then, the conditioning work is ready. After the conditioning work is completed, the switches 11a to 11d of the switch unit 11 can be turned off by the procedure reverse to the above.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. A modified embodiment of the present invention is illustrated below.

(H01) The present invention can be applied to various devices that require rotation and movement of the shaft 18 in addition to the operating member. For example, as shown in FIG. 12, it can be applied to sample exchange such as an electron microscope. FIG.
At the inner end of the shaft 18, a sample holder 32
Is provided. As this sample holder 32, a conventionally known one can be adopted. The sample holder 32 has a frame 21
Is moved to the second small diameter portion 16b of the posts 16 and 16, and is conveyed to the sample stage 33 arranged at a position facing the sample holder 32, and is fitted into the sample holder hole 34 formed in the sample stage 33. It is like this. The sample holder 32 is connected to the sample stage 33.
It cannot rotate while it is fitted in the sample holder hole 34. When the shaft 18 is rotated in one direction in this state, the sample holder 32 does not rotate but only the shaft 18 rotates. By retracting the shaft 18 in this state, the inner end of the shaft 18 can be separated from the sample holder 32. That is, the frame 21
It is possible to transport the sample holder 32 to the sample stage 33 and to collect the sample holder 33 from the sample stage 33 by rotating or sliding along the posts 16. (H02) In each of the above-described embodiments, the post 16 is formed with the two small-diameter portions 16a and 16b.
It is possible to omit the first small diameter portion (16a) formed at the outer end portion of 6. Therefore, the top 21 can rotate only in the second small diameter portion 16b. In this case, it is possible to rotate the top 21 to operate the operated member 11 by the second small diameter portion 16b on the inner end side in the sliding movement direction of the shaft 18. Further, it is possible to provide a structure for holding or locking the top 21 at the position on the outer end side so as not to advance along the post 16. As a structure for holding or locking the slidably movable member at a predetermined position, various conventionally known structures can be adopted. (H03) In each of the above-mentioned embodiments, the number of posts 16 forming the guide member G and the number of recesses formed in the top 21 can be arbitrarily changed. For example, one post 16 may be arranged and two recesses 22a and 22b may be formed on the outer peripheral portion of the top 21 at angular intervals of 90 degrees.

[0041]

The operating member of the present invention described above can achieve the following effects. (E01) It is possible to provide an operating member that is low in processing cost and easy to manufacture.

[Brief description of the drawings]

FIG. 1 is an overall explanatory diagram of an electron gun including an electrode short-circuit mechanism in a field emission electron microscope according to a first embodiment of the present invention.

FIG. 2 is an enlarged view of a main part of FIG. 1 and is an explanatory view of an operating member of the electrode short-circuit mechanism of the first embodiment.

3 is a sectional view taken along line III-III of FIG.

FIG. 4 is an explanatory view of the operation of the moving member of the first embodiment, and is a view in which the top of FIG. 3 is rotationally moved and the recess of the top is fitted to the large diameter portion of the post.

FIG. 5 is an explanatory view of the operation of the moving member according to the first embodiment, and is a view in which the moving member is moved forward in FIG.

FIG. 6 is a view for explaining the action of the moving member according to the first embodiment, and is a sectional view taken along line VI-VI in FIG.

FIG. 7 is an operation explanatory view of the moving member according to the first embodiment.

FIG. 8 is a top 21 and a post 1 according to a second embodiment.
6 and 16 are explanatory views corresponding to FIG. 3.

9A and 9B are explanatory views of the top 21 of the third embodiment, FIG. 9A being a view corresponding to FIG. 3 of the first embodiment, and FIG. 9B being a view corresponding to FIG. 4A of the first embodiment. .

10A and 10B are explanatory views of the top 21 of the third embodiment, FIG. 10A is a view corresponding to FIG. 4B of the first embodiment, and FIG. 10B is a view corresponding to FIG. 6A of the first embodiment. .

11A and 11B are explanatory views of the top 21 of the third embodiment, FIG. 11A is a view corresponding to FIG. 6B of the first embodiment, and FIG. 11B is a view corresponding to FIG. 7 of the first embodiment. .

FIG. 12 is an explanatory diagram of a modified example of the present invention.

FIG. 13 is an overall explanatory diagram of an electron gun including an electrode short-circuit mechanism in a conventional field emission electron microscope.

FIG. 14 is an enlarged view of a main part of FIG. 13 and is an explanatory view of an operating member of the electrode short-circuit mechanism.

15A and 15B are explanatory views of a guide member that defines a movement path of an operation member, FIG. 15A is a perspective view of the guide member, and FIG. 15B is a developed view of a guide groove of the guide member.

[Explanation of symbols]

G ... Guide member, M ... Moving member. 2 ... Wall member, 2b ... Shaft through hole, 11 ... Operated member, 12 ... Base member,
12a ... Mounting surface, 12b ... Post supporting surface, 12c ... Shaft through hole, 16 ... Post, (16a; 16b) ... Small diameter portion,
16c ... large diameter part, 18 ... shaft, 19 ... engaging member, 2
1 ... Top, 22 ... Recess, 24 ... Knob.

Claims (1)

[Claims] 1. An operating member having the following requirements, a mounting surface to be mounted on a wall member having a shaft through hole in which an operated member is arranged inside (Y01), and the mounting surface. A base member having a post supporting surface provided on the opposite side and a shaft through hole formed between the mounting surface and the post supporting surface; (Y02) parallel to the axis line of the shaft through hole of the post supporting surface of the base member. A guide member provided with a post having a small diameter portion and a large diameter portion having a constant cross-sectional shape formed at a position adjacent to the post supporting surface in the axial direction, (Y03) a shaft through hole of the base member and the wall member An engaging member of a shaft penetrating slidably and rotatably through the shaft and the operated member connected to the inner end of the shaft, and an axial line of the shaft fixed to the outer end of the shaft A moving member having a center smaller than a circumscribed circle with the small diameter portion of the post and having a diameter larger than a circumscribed circle with the large diameter portion of the post,
(Y04) The top having a plurality of recesses formed on the outer periphery of the top and into which the large diameter portion of the post can be fitted, and having a thickness rotatable at a position facing the small diameter portion.