JPH09159625A - Ingot orientation measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To fix an ingot to an application plate while maintaining the gap between the crystal lattice surface of the ingot and the reference surface of the application plate at a constant angle. SOLUTION: A device 21 fixes an ingot 18 to an application plate 19 while maintaining its crystal lattice surface and a reference surface 19A of the application plate 19 at a constant angle, at the same time accurately moving the application plate 19 in parallel with a parallel move mechanism 23, and fixes a next ingot 18 to the application plate 19 while maintaining it at a constant angle. The parallel move mechanism 23 consists of a reference plate 28 which becomes a reference for the accurate move of the application plate 19 and a parallel move part 29 for accurately moving the application plate 19 in parallel for the reference plate 28 while supporting the application plate 19. A sensor 34 is provided at the reference plate 28 and the gap between the reference surface 19A of the application plate 19 and the reference plate 28 is constantly maintained without any contact. With the sensor 34, the reference surface 19A and the reference plate 28 can be maintained in parallel even if dust or flaw exists on them.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention, when cutting a large number of crystalline samples from an ingot, measures and orients the orientation of the ingot so that the cut surface is at a predetermined angle with respect to the crystal lattice plane. The present invention relates to an ingot azimuth measuring device for fixing to a plate.

[0002]

2. Description of the Related Art Generally, an ingot azimuth measuring device is shown in FIG.
And as shown in FIG. FIG. 3 is a front view showing the ingot azimuth measuring device 1, and FIG. 4 is a plan view showing the ingot azimuth measuring device 1.

The ingot azimuth measuring device 1 mainly comprises a device main body 2 and a parallel moving mechanism 3 provided in the device main body 2.

The apparatus main body 2 is mainly composed of a goniometer 5 installed on a base 4 and a support base portion 6 mounted on the goniometer 5 and supporting the parallel moving mechanism 3.
The goniometer 5 mainly consists of a fixed cylinder part 7 installed on the base 4 side.
And a rotary cylinder portion 8 rotatably inserted in the fixed cylinder portion 7, and a rotary cylinder portion 8 provided between the fixed cylinder portion 7 and the rotary cylinder portion 8 to rotate the rotary cylinder portion 8 with respect to the fixed cylinder portion 7. And a bearing 9 that supports it as much as possible. The support base 6 is a rotary cylinder 8
A support plate 11 integrally attached to the support plate 11 and a positioning arm portion 12 extending from one side of a reference plate 13 to be described later to the other side with the base end portion fixed to the support plate 11. It is configured.

The parallel moving mechanism 3 is composed of a square bar-shaped reference plate 13 mounted on the support plate 11, and a parallel moving portion 14 for supporting and translating the sticking plate 19. The reference plate 13 serves as a reference for accurate parallel movement of the attachment plate 19. The translation unit 14 attaches the attachment plate 19 to
The reference plane 19A and the reference plate 13 are moved in an exactly parallel state, and the two rails 15 arranged on the support plate 11 of the apparatus main body 2 in parallel with the reference plate 13 are provided. The reference plate 13 is slidably mounted on the two rails 15.
It is composed of a moving plate 16 that moves in parallel with and a knob 17 that moves the moving plate 16.

A plurality of ingots 18 are fixed in parallel on a sticking plate 19 with the orientation of the crystal lattice planes adjusted to a constant angle. In this case, the ingot 18
X-rays are used to accurately measure the orientation of the crystal lattice planes of. An X-ray oscillator (not shown) is provided on one side of the apparatus main body 2.
Is provided, and a counter 20 for detecting X-rays diffracted by the ingot 18 is provided on the other side. X-rays from the X-ray oscillator are emitted toward the tip of the positioning arm portion 12.

The reference surface 19A of the sticking plate 19 is the ingot 1
The ingot 18 is adjusted to a constant angle with respect to the reference surface 19A and is fixed to the upper surface of the sticking plate 19 by a surface serving as a reference when cutting 8.

In the ingot azimuth measuring device 1 configured as described above, a plurality of ingots 18 are stuck in parallel on the sticking plate 19 and fixed in the following manner.

First, the sticking plate 19 is mounted on the moving plate 16 with its reference surface 19A in contact with the reference plate 13. Then, the leading end of the ingot 18 is brought into contact with the leading end of the positioning arm portion 12 for rough positioning. In this state, the tip of the ingot 18 is irradiated with X-rays, and the reflected X-rays are detected by the counter 20. As a result, the ingot 18 is accurately positioned, and is stuck and fixed on the sticking plate 19.

Next, the movable plate 16 is moved to one side (downward in FIG. 4) by the knob 17. At this time, the adhesive plate 19
The reference surface 19A of is kept in contact with the reference plate 13,
The sticking plate 19 is accurately translated. Then, the next ingot 18 is fixed to the sticking plate 19 at the same angle as the first ingot 18 with respect to the reference surface 19A by the same process as described above.

Then, a plurality of ingots 18 are attached to the attachment plate 1.
9 is attached to a cutting device (not shown) together with the attachment plate 19 in a state of being attached to the upper surface of each ingot 1
8 is cut with its crystal lattice plane and the cut plane keeping a constant angle.

[0012]

By the way, when the ingot 18 is fixed to the sticking plate 19 by the ingot azimuth measuring apparatus 1 as described above, there are the following problems.

In order to maintain the sticking plate 19 in an accurate position, the reference surface 19A of the sticking plate 19 is brought into direct contact with the reference plate 13. However, if there is dust or scratches on the contact surfaces, the reference surface 19A Cannot adhere to the reference plate 13 accurately. As a result, the reference plane 19A of the sticking plate 19 and the reference plate 13 cannot be kept in an accurate parallel state, and the crystal lattice plane of the ingot 18 fixed to the sticking plate 19 and the reference plane 19A have a constant angle. Can't be kept at. As a result, there is a problem in that the crystal lattice plane of the ingot 18 and the cut surface of the crystalline sample after it has been cut cannot be kept at a constant angle.

The reference surface 19A of the sticking plate 19 and the reference plate 13 may be worn due to long-term use, and in this case also, there are the same problems as described above.

The present invention has been made in view of the above circumstances, and keeps the reference planes of the pasting plate and the reference plate in a precisely parallel state so that the crystal lattice plane of the ingot and the reference plane have a constant angle. It is an object of the present invention to provide an ingot azimuth measuring device that can be kept at a low temperature.

[0016]

An ingot orientation measuring apparatus according to the present invention measures an orientation of a crystal lattice plane of an ingot of a crystalline sample, and makes the crystal lattice plane and a reference plane of a sticking plate at a constant angle. While fixing the ingot to the sticking plate in the state of keeping, the parallel moving mechanism provided in the main body of the device accurately translates the sticking plate, and the next ingot, its crystal lattice plane and the reference plane of the sticking plate. In the ingot azimuth measuring device which is fixed to the sticking plate in a state of being kept at a constant angle, the parallel moving mechanism is provided on the main body of the device and serves as a reference plate for accurate movement of the sticking plate, and the sticking plate. In a supported state, the reference surface of the sticking plate and the reference plate are opposed to each other, and the parallel moving part accurately translates the sticking plate relative to the reference plate, and the reference surface of the sticking plate and the reference plate. Between, Characterized in that a sensor for maintaining a distance to have constant.

According to the present invention, the sensor maintains the reference plane of the attachment plate and the reference plate in parallel. At this time, if the distance between the reference surface and the reference plate is kept parallel by the sensor in a non-contact state, even if there is dust or scratches between the reference surface and the reference plate, The parallel state is maintained.

Even when the reference plane and the reference plate are brought into contact with each other to maintain the parallelism, if there is dust or scratches between the reference plane and the reference plate, it is checked by the sensor whether or not they are parallel to each other. , It is found that the reference plane and the reference plate are kept in parallel by removing dust and the like.

[0019]

Embodiments of the present invention will be described below with reference to the accompanying drawings.

[First Embodiment] FIG. 1 is a front view of essential parts of an ingot azimuth measuring device 21 according to the present embodiment. The ingot azimuth measuring device 21 has substantially the same configuration as the conventional ingot azimuth measuring device 1.
That is, the ingot azimuth measuring device 21 mainly includes a device main body 22 and a parallel movement mechanism 23 provided in the device main body 22.

The apparatus main body 22 is mainly composed of a goniometer (not shown).
And a support base 24. Support base 24
Is composed of a support plate 25 and a positioning arm portion 26. The parallel movement mechanism 23 includes the reference plate 28 and the parallel movement unit 2
9. The parallel moving part 29 is composed of two rails 30, a moving plate 31, and a knob (not shown). The attachment plate 19 is attached to the upper side of the moving plate 31, and the ingot 18 is attached to the upper side of the attachment plate 19. These configurations are almost the same as those of the conventional ingot azimuth measuring device 1.

The reference plate 28 of this embodiment is arranged so as not to come into direct contact with the sticking plate 19. The reference plate 28 has a sensor mounting hole 33. The sensor mounting hole 33 is provided on the attachment plate 19 of the reference plate 28.
It is provided at a position facing the reference surface 19A. Inside the sensor mounting hole 33, the reference surface 19 of the attachment plate 19 is provided.
The sensor 34 is attached to face A. This sensor 3
4 is for measuring the distance between the reference surface 19A of the attachment plate 19 and the reference plate 28. The sensor 34 measures the distance between the reference surface 19A and the reference plate 28, and confirms that the distance is kept constant. With this, the sticker plate 1
Even if 9 is moved by the parallel moving mechanism 23, the reference surface 19A of the sticking plate 19 can always be maintained in an accurate parallel state with respect to the reference plate 28.

As the sensor 34, a known sensor capable of measuring a predetermined interval is used. For example, there are sensors that use light such as laser light, ultrasonic waves, and the like to detect light reflected on an object to measure the distance, and sensors that can measure changes in intervals as changes in capacitance. Further, the sensor mounting hole 33 and the sensor 34 may be provided only one or two or more along the reference surface 19A of the sticking plate 19. When two or more sensors 34 are provided, the reference surface 19A and the reference plate 28
The parallel state between and can be maintained more accurately.

In the ingot azimuth measuring device 21 configured as described above, a plurality of ingots 18 are formed as follows.
Are attached and fixed in parallel on the attachment plate 19.

First, the sticking plate 19 is mounted on the moving plate 31 with the reference surface 19A thereof facing the reference plate 28 at a constant interval. At this time, the sticking plate 19 is adjusted while confirming with the sensor 34 so that the reference surface 19A thereof is in an accurate parallel state to the reference plate 28. The sticking plate 19 is fixed to the moving plate 31 when the sticking plate 19 is brought into an accurate parallel state with respect to the reference plate 28.

Then, the tip of the ingot 18 abuts on the positioning arm 26, so that the ingot 18 is roughly positioned, and then accurately positioned by X-rays, and then fixed on the sticking plate 19. To be done.

Next, the sticking plate 19 is moved together with the moving plate 31 by the knob, and the next ingot 18 is attached. When the attachment plate 19 is moved, its reference surface 19A
Are not in contact with the reference plate 28 and are kept at a constant interval. After the movement and before the ingot 18 is fixed, the distance between the reference surface 19A and the reference plate 28 and the parallel state are reconfirmed by the sensor 34.

By the way, the ingot 18 is attached to the attachment plate 19 with the reference plate 28 as a reference. That is, the ingot 18 is attached to the attachment plate 19 with the crystal lattice plane of the ingot 18 set at a constant angle with respect to the reference plate 28. At this time, since the reference surface 19A of the sticking plate 19 is accurately parallel to the reference plate 28, as a result, the ingot 18 with respect to the reference surface 19A of the sticking plate 19.
The crystal lattice plane of is set to a constant angle.

As described above, the sensor 34 accurately maintains the distance between the reference plane 19A and the reference plate 28 and the parallel state, and the crystal lattice plane of the ingot 18 and the reference plane 19A of the sticking plate 19 indirectly form a constant angle. Ingot 18 in the assembled state
Is fixed to the attachment plate 19. The next ingot 18 is also fixed by the same process as described above.

Then, a plurality of ingots 18 are attached to the attachment plate 1.
9 is attached to the cutting device (not shown) together with the attachment plate 19 while being attached to the upper side surface of the attachment plate 9. Then, each ingot 18 is cut with the crystal lattice plane and the cut plane maintaining a constant angle with reference to the reference plane 19A of the attachment plate 19.

As described above, the reference surface 19A of the attachment plate 19
Since it is possible to keep the space between the reference plate 28 and the reference plate 28 exactly parallel to each other, the crystal lattice plane of the ingot 18 is attached to the attachment plate 1.
It becomes possible to attach the ingot 18 to the attachment plate 19 in a state where the ingot 18 is accurately maintained at a constant angle with respect to the reference surface 19A of No. 9. At this time, the reference surface 19A and the reference plate 28
Even if there is dust or scratches on the surface of the ingot 18, the reference plane 19A and the reference plate 28 can be kept in a parallel state accurately, and the crystal lattice plane of the ingot 18 can be used as the reference plane 19A of the attaching plate 19.
It becomes possible to maintain a constant angle with respect to.

[Second Embodiment] The second embodiment of the present invention will be described below.
An embodiment will be described with reference to FIG. Since the overall configuration of the ingot azimuth measuring device 41 of the present embodiment is almost the same as that of the ingot azimuth measuring device 21 of the first embodiment, the same members are designated by the same reference numerals and the description thereof is omitted.

The feature of this embodiment resides in the parallel moving mechanism 42. The parallel moving mechanism 42 includes a reference plate 43 and a parallel moving portion 44. The parallel moving part 44 is composed of two rails 45, a moving plate 46, and a knob (not shown).

The reference plate 43 is the reference plate 2 of the first embodiment.
It is formed smaller than No. 8.

The moving plate 46 is formed in a substantially flat plate shape as a whole, and a rising wall 47 is formed at the end of the reference plate 43 side. The rising wall 47 is formed to be slightly higher than the attaching plate 19 placed on the upper side of the moving plate 46. The rising wall 47 is provided with a sensor mounting hole 49. The sensor mounting hole 49 is provided in the rising wall 47 so as to face the reference surface 19A of the sticking plate 19 placed on the moving plate 46. Inside the sensor mounting hole 49,
The sensor 50 is provided facing the reference surface 19A of the sticking plate 19. The sensor 50 is for checking whether the reference surface 19A is in close contact with the rising wall 47. When dust adheres to the reference surface 19A or the rising wall 47 or is damaged, the reference surface 19A does not adhere to the rising wall 47 and the sensor 50 confirms that the parallel state is impaired.

At the end of the moving plate 46 on the side of the reference plate 43, a hanging wall 51 is formed to hang downward together with the rising wall 47. The hanging wall 51 is formed so as to face the reference plate 43. A sensor 52 is provided on the surface of the hanging wall 51 on the reference plate 43 side. This sensor 52 is for confirming the distance from the reference plate 43, and can confirm whether the moving plate 46 maintains an accurate distance and a parallel state with respect to the reference plate 43.

Then, it is confirmed by the sensor 50 that the reference surface 19A of the sticking plate 19 is in close contact with the rising wall 47, and the hanging wall 51 is kept parallel to the reference plate 43 by the sensor 52. Confirm that it is in the state. As a result, the reference surface 19A of the sticking plate 19 and the reference plate 43 can be maintained in an accurate parallel state.

As a result, the same action and effect as those of the first embodiment can be obtained.

[Modification] In each of the above embodiments, a non-contact type sensor is used as each of the sensors 34, 50 and 52.
A contact type sensor may be used. As this contact-type sensor, a known sensor such as a switch for turning on / off a switch between contact and non-contact, a sensor for passing a current, or the like is used. This sensor is used to monitor the parallel state between the reference plane and the reference plate, and if there is dust or scratches between the reference plane and the reference plate and they are not in the parallel state, they are immediately corrected. Thereby, the parallel state between the reference plane and the reference plate is maintained.

[0040]

As described in detail above, according to the ingot azimuth measuring apparatus of the present invention, the sensor for keeping the mutual spacing constant is provided between the reference surface of the sticking plate and the reference plate. , It becomes possible to keep the reference plane of the pasting plate exactly parallel to the reference plate. At this time, when the sensor that monitors the parallelism in the non-contact state is used, the reference surface and the reference plate do not contact each other, so that the parallel state between the reference surface and the reference plate is maintained even if there is dust or scratches. .

When a sensor for monitoring parallelism in a contact state is used, it is immediately known that the reference surface or the reference plate has scratches or the like and they are not in parallel with each other. The parallel state between the reference plane and the reference plate is maintained.

[Brief description of the drawings]

FIG. 1 is a front view of essential parts showing an ingot azimuth measuring device according to a first embodiment of the present invention.

FIG. 2 is a main part front view showing an ingot azimuth measuring device according to a second embodiment of the present invention.

FIG. 3 is a front view showing a conventional ingot azimuth measuring device.

FIG. 4 is a plan view showing a conventional ingot azimuth measuring device.

[Explanation of symbols]

19: affixed plate, 19A: reference plane, 21: ingot azimuth measuring device, 22: device body, 23: parallel movement mechanism, 24: support base part, 25: support plate, 26: positioning arm part, 28: reference plate , 29: parallel moving part, 33: sensor mounting hole, 34: sensor.

Claims (1)

[Claims] 1. The orientation of a crystal lattice plane of an ingot of a crystalline sample is measured, and the ingot is fixed to the sticking plate while keeping the crystal lattice plane and the reference plane of the sticking plate at a constant angle. An ingot for accurately translating the pasting plate by a parallel movement mechanism provided in the apparatus main body, and fixing the next ingot to the pasting plate with its crystal lattice plane and the reference plane of the pasting plate kept at a constant angle. In the azimuth measuring device, the parallel moving mechanism is provided on the device body side and serves as a reference for accurate movement of the sticking plate, and a reference surface of the sticking plate and the reference plate while supporting the sticking plate. And a parallel moving part that moves the sticking plate accurately in parallel with respect to the reference plate, and a sensor is provided between the reference surface of the sticking plate and the reference plate to keep a constant distance from each other. Characterized by Ingots orientation measurement device.