JPH09155724A - Wet type polishing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To height polishing efficiency and polish a work to a smooth surface on a wet polishing method, in which a plurality of wet type polishing processes are combined into one series of process, by using an alkaline, polished liquid for the final polishing process but an acid, polishing liquid for the processes other than the final one. SOLUTION: Respective rotative driving devices 2, 3 are provided with buffing wheel 22, 23 rotated by the power of a motor, so that the surface of a work (W) mounted on a supporting table 1, which is driven for rotation, is polishing through the rotation of the buffing wheels 22, 23 places on the top of shafts 21, 31. In this case, a polishing liquid is supplied to a space between the polishing surface of the rotating polishing liquid and the surface to be polished of the work (W). The polishing liquid is alkaline for the final finishing and polishing process, but it is acid for the processes, or the rough pre-polishing process or finishing and polishing process, other than the final finishing ands polishing process. With this contrivance, the polishing efficiency before the final polishing process can be enhanced, and the work can be polished to a smooth surface at the final polishing process.

Description

Detailed Description of the Invention TECHNICAL FIELD OF THE INVENTION

The present invention relates to a wet polishing method.

[0002]

2. Description of the Related Art In a conventional wet polishing method,
There has been a method of improving the polishing efficiency by using an acidic polishing agent and a method of smoothly polishing a work by using an alkaline polishing agent.

[0003]

However, in the conventional polishing method as described above, when the acidic polishing agent is used as in the former method, the polishing efficiency is improved but the work is difficult to be polished smoothly. Further, as in the latter case, when an alkaline abrasive is used, the work is easily polished smoothly, but it is difficult to remove the oxide film and the like of the work, and as a result, it is difficult to improve the polishing efficiency.

An object of the present invention is to eliminate these disadvantages.

[0005]

In order to achieve the above object, in a wet polishing method according to the present invention, a wet polishing method in which a plurality of wet polishing steps are combined in series is provided, and final polishing in the plurality of polishing steps is performed. Since the process is performed with an alkaline polishing liquid and the polishing process before the final polishing process is performed with an acidic polishing liquid,
It is possible to improve the polishing efficiency in the polishing step before the final polishing step that does not affect the final product and to smoothly polish the work in the final polishing step that affects the final product.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of a wet polishing method according to the present invention, which comprises a series of a plurality of wet polishing steps.

A is a rough polishing step, B is a final polishing step, and C is a final final polishing step.

Each of these polishing steps A, B and C will be described with reference to FIG. 2. In the figure, 1 is a support board and 11 is a spindle installed at the axis of the support board 1. This support board 1
Is rotated about this support shaft 11 in the direction of the arrow by appropriate means. W is a board-shaped work and is placed on the support board 1. The upper surface of this work W is the surface to be polished.

Next, reference numeral 2 is a first rotation driving device, which has a driving source such as a motor. Reference numeral 21 denotes a rotary shaft, which is installed in the rotary drive device 2. The rotary shaft 21 is rotated around the shaft center by the power of the motor or the like.
A first buff wheel 22 is fixed to the tip of the rotary shaft 21. While rotating, the buff wheel 22 polishes the work W by the polishing surface 221 which is the bottom surface thereof. At this time, the polishing liquid is supplied between the polishing surface of the rotating buff wheel 22 and the surface to be polished of the work W. This polishing liquid
It is alkaline in the final finishing polishing step C, and acidic in the other steps, that is, in the rough polishing step A and the final polishing step B.

Reference numeral 3 denotes a second rotary drive device, which has a drive source such as a motor, like the first rotary drive device 2. Reference numeral 31 is a rotary shaft, which is installed in the rotary drive device 3. The rotating shaft 31 rotates about the shaft center by the power of the motor or the like. A second buff wheel 32 is fixed to the tip of the rotating shaft 31. This buff wheel 32 is a polishing surface 32 that is the bottom surface while rotating.
The work W is polished by 1. At this time, the polishing liquid is supplied between the polishing surface of the rotating buff wheel 22 and the surface to be polished of the work W, but since the property thereof is the same as that of the first buff wheel 22, the description thereof will be omitted.

Since the first buff wheel 22 and the second buff wheel 32 rotate in mutually opposite directions, the surface to be polished of the work W is polished in the reciprocating direction.

[0012]

The wet polishing method according to the present invention is a wet polishing method in which a plurality of wet polishing steps are combined in series.

Since the final polishing step in the plurality of polishing steps is performed with an alkaline polishing solution and the polishing steps before this final polishing step are performed with an acidic polishing solution,

It is possible to improve the polishing efficiency in the polishing step before the final polishing step that does not affect the final product and to smoothly polish the work in the final polishing step that affects the final product.

Therefore, if this wet polishing method is used,
The polishing efficiency can be improved in a series of polishing steps, and finally the work can be smoothly polished.

[Brief description of the drawings]

FIG. 1 is a series of process diagrams of a wet polishing method according to the present invention.

FIG. 1 is an explanatory diagram of a wet polishing apparatus according to the present invention.

[Explanation of symbols]

 A ... Roughing polishing step (wet polishing step) B ... Finish polishing step (wet polishing step) C ... Final finish polishing step (wet polishing step)

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[Procedure amendment]

[Submission date] March 22, 1996

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Brief description of drawings

[Correction method] Change

[Correction contents]

[Brief description of the drawings]

FIG. 1 is a series of process diagrams of a wet polishing method according to the present invention.

FIG. 2 is an explanatory diagram of a wet polishing apparatus according to the present invention.

[Explanation of Codes] A ... Roughing polishing step (wet polishing step) B ... Final polishing step (wet polishing step) C ... Final finish polishing step (wet polishing step)

Claims (1)

[Claims] 1. A wet polishing method in which a plurality of wet polishing steps are combined in series, wherein the final polishing step in the plurality of polishing steps is performed with an alkaline polishing solution, and the polishing steps before the final polishing step are performed with an acidic polishing solution. Wet polishing method characterized by being performed by.