JPH09148644A - Manufacture of oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable an oscillator which is high in quality and easily processed to be manufactured. SOLUTION: An electrode is provided to all the sides of a block material formed of oscillator material, and an unfinished oscillator which has such a structure that an oscillating part is expanded up to a driving part is cut out of the block material provided with electrodes. The unfinished oscillator is ground to be provided with the driving part, and the electrode provided to the unfinished oscillator is ground into a prescribed electrode pattern. Thereafter, the unfinished oscillator provided with the electrode pattern is polarized, and a lead wire is fused to the electrode pattern provided to the polarized oscillator for the formation of a finished oscillator.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a vibrator used in a linear ultrasonic motor that drives a driven body relatively linearly by ultrasonic vibration.

[0002]

2. Description of the Related Art FIG. 10 is a perspective view showing an example of a general linear ultrasonic motor. This linear ultrasonic motor 1
Has a configuration in which the vibrating body 2 and the driven body 3 are arranged in contact with each other. The vibrating body 2 has a shape in which two rectangular parallelepiped driver elements 2b and 2c are provided in parallel on one surface of a rectangular parallelepiped vibrator 2a. Electrodes 2d, which are divided into two vertically and horizontally, are respectively formed on two parallel surfaces that are perpendicular to the surface of the vibrator 2a on which the driver elements 2b and 2c are provided. Each electrode 2
Lead wires 2e are connected to d. Each tip of the driver elements 2b, 2c is pressed against the outer peripheral surface of the driven body 3, for example, the shaft having a circular cross section.
In such a configuration, by driving the vibrating body 2, ultrasonic vibrations are transmitted to the driven body 3, so that the vibrating body 2 and the driven body 3 relatively move linearly in the A direction. .

FIG. 11 is a flow chart for explaining an example of a conventional method of manufacturing the vibrating body 2. First, the shape of the vibrating body 2 having the above-described two driver elements 2b and 2c is cut out from the block material made of the vibrating body 2 (step STP1). Next, the vibrator 2a of the cut out vibrating body 2
Then, the above-mentioned pattern of the electrode 2d is formed (step STP2). The vibrating body 2 is polarized using the formed electrode 2d (step STP3). Then, the lead wire 2e is bonded to the electrode 2d by solder or an adhesive material (step STP4).

[0004]

However, in the above-described conventional method of manufacturing a vibrating body, the shape of the vibrating body, that is, the shape including the vibrator and the driver is required to be cut out, which is troublesome to process. There was a flaw. In addition, since polarization is performed after the electrode pattern is formed, distortion may occur near the adjacent electrodes, which may cause cracks or some disturbance of polarization. Furthermore, since solder or an adhesive material is used to bond the lead wires, the connection point becomes relatively large. For this reason, when the vibrating body becomes smaller, the occupancy ratio of the connection points relatively increases, so that the vibrating body has a sensitivity of 50% to 50%.
There was a problem of a decrease of 80%.

The present invention has been made in order to solve the above problems, and an object of the present invention is to provide a method of manufacturing a vibrating body which is easy to process and can produce a good quality vibrating body.

[0006]

In the present invention, the above object is to provide a vibrating portion which vibrates ultrasonically, and a drive portion which is integral with the vibrating portion and which is a protrusion and which transmits the ultrasonic vibration. In the method of manufacturing a vibrating body having a structure, electrodes are formed on the entire front and back surfaces of a block material made of the material of the vibrating body, and the vibrating portion is expanded from the block material having the electrodes to the driving portion. The body is cut out, the cut out substantially vibrating body is ground to form the shape of the driving portion, and the electrode formed on the substantially vibrating body having the shape of the driving portion is ground to form a predetermined electrode pattern, This is achieved by polarizing the substantially vibrating body on which the electrode pattern is formed, and fusing a lead wire to the electrode pattern formed on the polarized substantially vibrating body to form the vibrating body.

According to the above construction, the substantially vibration-shaped product is cut out at one end and then ground to form the driving portion, which facilitates the processing. Further, since the electrode pattern is formed after polarization, a good vibrating body can be obtained. Furthermore, since the lead wires are fused, the connection points can be reduced.

[0008]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Although the embodiments described below are preferred specific examples of the present invention, various technically preferable limitations are given. However, the scope of the present invention is not limited to the following description. It is not limited to these forms unless otherwise stated.

1 and 2 are a perspective view and a side view showing an example of a linear ultrasonic motor to which a vibrating body manufactured by an embodiment of the vibrating body manufacturing method of the present invention is applied.
The linear ultrasonic motor 10 has a configuration in which a vibrating body 11 and a driven body 12 are arranged in contact with each other. Vibrator 11
Has a shape in which two rectangular parallelepiped driver elements 11b and 11c are provided in parallel on one surface of the rectangular parallelepiped vibrator 11a. The surfaces of the tips of the driver elements 11b and 11c and the driver element 11
The surface of the vibrator 11a provided with b and 11c has an arc shape. Electrodes 11d, which are divided into two vertically and horizontally, are respectively formed on two parallel surfaces perpendicular to the surface of the vibrator 11a on which the driver elements 11b and 11c are provided.
A lead wire 11e is connected to each electrode 11d. The tip ends of the driver elements 11b and 11c are pressed against the outer peripheral surface of the driven body 12, for example, a shaft having a circular cross section.

Here, as the material of the vibrating body 11, for example, a ceramic material such as barium titanate or lead zirconate titanate is used. Further, a polymer material such as poly-vinylidene fluoride can also be used. The material of the electrode 11d is preferably one that is close to or close to the linear expansion coefficient of the vibrating body 11, has good conductivity and oxidation resistance, and is easy to solder, for example, nickel, silver,
A metal material such as lead, molybdenum, or tin, or an alloy material thereof is used.

An example of the operation in such a configuration will be described. The vibration mode of the vibrating body 11 includes vibrations in the arrangement direction of the two driver elements 11b and 11c and two driver elements 11c.
This is a combination of vibrations in a direction orthogonal to the arrangement direction of b and 11c. Therefore, the two driver elements 11b, 1
The tip portion of 1c will alternately make an elliptical motion or a circular motion. Therefore, a thrust force due to contact friction is generated in the driven body 3 that is in pressure contact with the tips of the driver elements 11b and 11c, so that the vibrating body 11 and the driven body 3 relatively move linearly.

FIG. 3 is a flow chart for explaining an embodiment of the method for manufacturing a vibrator according to the present invention. First, as shown in FIG. 4, the electrodes 21 are formed on the entire front and back surfaces of the plate-shaped block member 20 made of the material of the vibrating body 11 (step S).
TP11). As a method of forming the electrode 21, a paste of the above material is applied to the surface of the vibrating body 11 by a screen printing method or the like and dried or baked, or metal spraying, vacuum deposition, sputtering, electroless plating, or the like. There is a method of forming. Since the electrodes 21 may be formed on the entire front and back surfaces of the block member 20 in this manner,
It is not necessary to form the electrode pattern from the beginning as in the conventional case, and the number of steps can be significantly reduced.

Next, as shown in FIG. 5, from the block member 20 on which the electrode 21 is formed, the shape of the vibrating body 11, that is, the shape of the vibrator 11a is made to include the shape of the two driver elements 11b and 11c. The substantially oscillating body 22 having a rectangular parallelepiped shape that has been enlarged is cut out (step STP12). This cutting is performed, for example, by a cutting machine or the like. Since it suffices to cut it into a rectangular parallelepiped shape in this way, the vibrator 1
Vibrating body 11 having 1a and two driver elements 11b and 11c
Since it is not necessary to cut out into the shape of, the number of steps can be significantly reduced.

Then, as shown in FIG. 6, the substantially vibrator 22 cut out in the shape of a rectangular parallelepiped is ground to grind the two driver elements 11.
The shapes of b and 11c are formed (step STP13).
This grinding is performed by using three cylindrical grindstones 23 as shown in FIG.
a, 23b, and 23c are performed by the general-purpose grindstones 23 that are arranged at intervals of the driver elements 11b and 11c. As described above, since the single-step grinding process is completed by using the all-round grindstone 23, it is not necessary to cut into the shape of the vibrator 11a having the vibrator 11a and the two drivers 11b and 11c as in the conventional case, and the number of steps is significantly reduced. Can be planned.

Next, as shown in FIG. 7, the driver 11b,
Electrodes 2 on the front and back surfaces of the substantially vibrating body 22 whose shape is 11c.
1. Connect the DC power supply 24 to 1 for polarization (step STP
14). Then, as shown in FIG. 8, the electrodes 21 on the front and back surfaces of the polarized substantially vibrating body 22 are partially ground to form an electrode pattern (step STP15). This grinding is also performed by using a grindstone as shown in FIG. 6 in which the grindstones are arranged at intervals of the electrodes 11d, so that each grinding can be performed only once in the direction of the arrow shown in the figure, so that the number of man-hours can be significantly reduced. You can Since the electrode pattern is formed after polarization in this way, there is no risk of cracks or partial polarization disturbance in the vicinity of adjacent electrodes as in the conventional case. Can be kept good.

Finally, as shown in FIG. 8, the lead wire 11e is fused to each electrode 11d on the front and back surfaces of the substantially vibrator 22 having the electrode pattern formed thereon by the wire bonding method (step STP16), and finally. The vibrating body 11 is used.
This fusion is performed under appropriate conditions of pressure, vibration and heat.
The connection point is desirable because it does not affect the vibration near the vibration node, that is, near the center of the vibrator 11a. Since the lead wire 11e is fused by the wire bonding method in this way, the connection point becomes a pin point, and the vibrating body 1
Even if 1 becomes small, it is possible to prevent a decrease in vibration sensitivity.

By attaching or coating a friction material such as rubber or resin to the tip surfaces of the driver elements 11b and 11c, the motions of the driver elements 11b and 11c can be transmitted more efficiently. Alternatively, only the vibrator 11a may be molded with a piezoelectric material, and the driver elements 11b and 11c may be separately molded with a friction material such as metal or rubber or resin so that the both are fixed by adhesion or the like.

[0018]

As described above, according to the present invention, since the processing is easy, the manufacturing cost can be reduced. Further, it can be provided as a vibrating body having a good appearance and high sensitivity.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of a linear ultrasonic motor to which a vibrating body manufactured by an embodiment of a vibrating body manufacturing method of the present invention is applied.

FIG. 2 is a side view of the linear ultrasonic motor shown in FIG.

FIG. 3 is a flowchart showing an embodiment of a vibrating body manufacturing method according to the present invention.

FIG. 4 is a perspective view showing a first step of the method for manufacturing a vibrator according to the present invention.

FIG. 5 is a perspective view showing a second step of the method for manufacturing a vibrator according to the present invention.

FIG. 6 is a perspective view showing a third step of the method of manufacturing a vibrator according to the present invention.

FIG. 7 is a perspective view showing a fourth step of the method of manufacturing a vibrator according to the present invention.

FIG. 8 is a perspective view showing a fifth step of the method of manufacturing a vibrator according to the present invention.

FIG. 9 is a perspective view showing a sixth step of the method for manufacturing a vibrator according to the present invention.

FIG. 10 is a perspective view showing an example of a linear ultrasonic motor to which a vibrating body manufactured by an example of a conventional vibrating body manufacturing method is applied.

FIG. 11 is a flowchart showing an example of a conventional vibrating body manufacturing method.

[Explanation of symbols]

 1, 10 Linear ultrasonic motors 2, 11 Vibrators 2a, 11a Vibrators 2b, 2c, 11b, 11c Drivers 2d, 11d, 21 Electrodes 2e, 11e Lead wires 3, 12 Driven bodies 20 Block materials 22 Substantially vibrating bodies 23 Shaped grindstones 23a, 23b, 23c Grindstone 24 DC power supply

Claims (3)

[Claims] 1. A method of manufacturing a vibrating body, comprising: a vibrating portion that vibrates ultrasonically; and a driving portion that is integral with the vibrating portion and that transmits the ultrasonic vibration. Electrodes are formed on the entire front and back surfaces of the block material consisting of, and from the block material on which the electrodes are formed, a substantially vibrating body having a shape in which the vibrating portion is enlarged to the driving portion is cut out, and the substantially vibrating body cut out is ground to drive the The electrode formed on the substantially vibrating body forming the shape of the driving portion is ground to form a predetermined electrode pattern, and the substantially vibrating body having the electrode pattern is polarized, A method of manufacturing a vibrating body, comprising: forming a vibrating body by fusing a lead wire to an electrode pattern formed on the vibrating body. 2. The method for manufacturing a vibrator according to claim 1, wherein the shape of the driving portion is formed by grinding with a grindstone. 3. The vibrating body manufacturing method according to claim 1, wherein the fusion of the lead wire is performed by wire bonding.