JPS5989583A - Driving device using piezoelectric vibrator - Google Patents

Driving device using piezoelectric vibrator

Info

Publication number
JPS5989583A
JPS5989583A JP57199051A JP19905182A JPS5989583A JP S5989583 A JPS5989583 A JP S5989583A JP 57199051 A JP57199051 A JP 57199051A JP 19905182 A JP19905182 A JP 19905182A JP S5989583 A JPS5989583 A JP S5989583A
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
electrode
vibrator
electrodes
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57199051A
Other languages
Japanese (ja)
Inventor
Makoto Matsuura
松浦 真
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Group Corp
Original Assignee
Aiwa Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aiwa Co Ltd filed Critical Aiwa Co Ltd
Priority to JP57199051A priority Critical patent/JPS5989583A/en
Publication of JPS5989583A publication Critical patent/JPS5989583A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/002Driving devices, e.g. vibrators using only longitudinal or radial modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To effectively utilize a piezoelectric vibrator which solely vibrates by providing an electrode lacking part so as to partly suppress the vibration displacing amount of a cantilever piezoelectric vibrator in the lengthwise direction and differentiating the areas of the electrodes from each other. CONSTITUTION:A rectangular piezoelectric vibrator 3 is supported by a cantilever beam, and electrodes 1, 2 are formed at both side surfaces. An electrode lacking part 4 is formed at the electrode 1, and the area of the electrode 1 is reduced to be smaller than that of the electrode 2. The electrodes 1, 2 of the vibrator 3 are connected to AC voltage applying means 7, and a rotor 5 is rotated in a displacement based on the vibrating trace of the vibrator 3.

Description

【発明の詳細な説明】 本発明は圧電振動子の振動を駆動源とした駆動装置に関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a drive device using vibration of a piezoelectric vibrator as a drive source.

本発明の目的は、特に第1図に示すように分極方向に対
して振動方向が直角であり、電極(1)(2)への電圧
印加時に長さ方向に単一振動する圧電振動子(3)を有
効に利用した新規な駆動装置を提案することにあり、第
2図以下に従って本発であって、図中右端側のみ固定せ
る、いわゆる片持ち梁で支持されており、同番号は第1
図の構成を援用するも電極欠除部(4)を設けて電極(
1)の面積を電極(2)の面積に比して小さく設定して
いる。
The purpose of the present invention is to create a piezoelectric vibrator (particularly as shown in FIG. 3), and is supported by a so-called cantilever beam that can be fixed only on the right side in the figure. 1st
Although the structure shown in the figure is used, an electrode missing part (4) is provided and the electrode (
The area of electrode (1) is set smaller than that of electrode (2).

但し本実施例においては電極(1)の面積を小さくして
いるが、これは分極方向によって拘束される条件ではな
く、電極(2)側を小さくしても良いのであって、要は
以下の詳細な実施例における当接状態に至らしめること
にある。
However, in this example, the area of the electrode (1) is made small, but this is not a condition that is restricted by the polarization direction, and the electrode (2) side may be made small. The purpose is to bring about the contact state in the detailed embodiment.

分極を施した圧電振動子が電界に比例した歪を発生して
振動する、いわゆる圧電効果については周知の通りであ
るが、第2図において電極(I)、(2)へ電界を印加
した場合の圧電振動子(3)内の電界分布は、電極が欠
損せる電極欠除部(4)近傍で分布が抑制された第2図
斜線部の如くとなる。
The so-called piezoelectric effect, in which a polarized piezoelectric vibrator vibrates with a strain proportional to the electric field, is well known, but in Figure 2, when an electric field is applied to electrodes (I) and (2), The electric field distribution inside the piezoelectric vibrator (3) becomes as shown in the shaded area in FIG. 2, where the distribution is suppressed near the electrode missing part (4) where the electrode is missing.

よって圧電振動子(3)の長さ方向の単一振動も電極欠
除部(4)近傍で部分的に抑制され、同図中圧電振動子
(3)の固定端側とは反対側の遊端に着のように漸次減
少するものと考えられる0以下上記圧電振動子を利用し
た各種駆動装置の実施例をそれ゛ぞれ説明する。
Therefore, the single vibration in the length direction of the piezoelectric vibrator (3) is also partially suppressed near the electrode cutout (4), and the vibration on the side opposite to the fixed end side of the piezoelectric vibrator (3) in the figure is suppressed. Examples of various drive devices using the piezoelectric vibrators described above will be described below.

但し以下の実施例においては交流電圧を圧電振動子へ印
加して駆動させるものであって、圧壬 電振動子において振動軸の形状あるいは分極方向等によ
り多少は異なるが、一般的に振動子固有の弾性固有振動
と共振する共振周波数を有することは周知であり、該共
振周波数にて振動子が特に強く振動することを利用して
、共振周波数あるいは共振周波数近傍を含む所定の周波
数帯域内で印加交流周波数を可変することにより、は特
に説明しない。
However, in the following embodiments, AC voltage is applied to the piezoelectric vibrator to drive it, and although it varies somewhat depending on the shape of the vibration axis or polarization direction of the piezoelectric vibrator, in general, the It is well known that the oscillator has a resonant frequency that resonates with the elastic natural vibration of By varying the AC frequency, no particular explanation will be given.

(ト)第1の実施例 本実施例は第3図におけるローター(5)を、軸(6)
を中心に回転させる駆動装置である。
(g) First embodiment In this embodiment, the rotor (5) in Fig. 3 is replaced with the shaft (6).
It is a drive device that rotates around the .

第3図に示す片持ち圧電振動子(3)の電極(1)、(
2)は交流電圧印加手段(7)に接続され所望時にON
、OFFされるものであり、円板状のローター(5)は
軸(6)により回動自在に枢着されている。
Electrodes (1), (
2) is connected to the AC voltage applying means (7) and turned on when desired.
, and the disc-shaped rotor (5) is rotatably mounted on a shaft (6).

ローター(5)を回転せしめるべく圧電振動子(3)を
当接させるも本実施例は薄型の駆動装置を構成すべくロ
ーター(5)の外周面(曲面)に当接させている。
In order to rotate the rotor (5), the piezoelectric vibrator (3) is brought into contact with the outer circumferential surface (curved surface) of the rotor (5) in this embodiment to constitute a thin drive device.

また、該当接は同図で示すように面積の大きな電極(2
)側をローター(5)の外周面に対峙させるような状態
で一端を固定した圧電振動子(3)の同図遊端下側をし
てローター(5)外周面へ持ち来たしてい、る。
In addition, as shown in the figure, the corresponding contact is an electrode with a large area (2
The free end of the piezoelectric vibrator (3), which has one end fixed, is brought to the outer circumferential surface of the rotor (5) with its free end lower side in the figure facing the outer circumferential surface of the rotor (5).

この状態より交流電圧印加手段(力をONにすれば圧電
振動子(3)は振動するが、振動変位量が第2図で示す
如く微視的に厚み方向で不均衡のため該振動は単なる往
復直線運動ではなく、ローター(5)の外周面に当接し
た後に第3図においてローター(5)より離隔した側へ
移行された形となって結果的に遊端の振動変位の軌跡は
図示の如く擬似楕円となり、振動変位復路においてロー
ター(5)の駆動を妨げることなく、よって圧電振動子
(3)の振動軌跡に基づく変位をもってローター(5)
は図示の方向に回転する。
In this state, when the AC voltage applying means (force) is turned on, the piezoelectric vibrator (3) vibrates, but the vibration is only a simple vibration because the amount of vibration displacement is microscopically unbalanced in the thickness direction as shown in Figure 2. It is not a reciprocating linear motion, but after coming into contact with the outer peripheral surface of the rotor (5), it moves to the side away from the rotor (5) in Figure 3, and as a result, the trajectory of the vibration displacement of the free end is not shown in the figure. It becomes a pseudo-ellipse as shown in FIG.
rotates in the direction shown.

単に単一振動する圧電振動子であれば、特に本実施例の
構成の如く当接面が曲面である場合いかなる状態で当接
させてもローターは回転しないが、本実施例のように振
動方向を移行させるように構成することで安定した駆動
力が得られることが本発明者の実験により明らかになっ
たO (イ)第2の実施例 本実施例は第4図における板状体(8)を直線運動せし
めるべく駆動装置である。
If the piezoelectric vibrator simply vibrates in a single manner, the rotor will not rotate no matter what state it contacts, especially if the contact surface is a curved surface as in the configuration of this example. It has been revealed through experiments by the present inventor that a stable driving force can be obtained by configuring the structure so that the ) is a drive device for linear movement.

本実施例は板状体に限らず棒状体等にも適用しうるもの
であるが、第4図に示す片持ち圧電振動子(3)の電極
(1)、(2)は交流電圧印加手段(7)に接続され、
圧電振動子(3)の当接は同図で示すよ5− うに面積の大きな電極(2)側を板状体(8)に対峙さ
せるような状態で一端を固定した圧電振動子(3)の同
図遊端下側をして板状体(8)表面へ持ち来たしている
Although this embodiment can be applied not only to plate-shaped bodies but also to rod-shaped bodies, the electrodes (1) and (2) of the cantilever piezoelectric vibrator (3) shown in FIG. (7) connected to
As shown in the figure, the piezoelectric vibrator (3) is in contact with the piezoelectric vibrator (3) with one end fixed so that the large-area electrode (2) side faces the plate-shaped body (8). The lower side of the free end in the figure is brought to the surface of the plate-shaped body (8).

との状態より交流電圧印加手段(7)をONにすれば前
述と同様に遊端振動変位の軌跡は楕円となり、よって板
状体(8)は図示の方向に駆動される。
When the AC voltage applying means (7) is turned on from the above state, the locus of the free end vibration displacement becomes an ellipse as described above, and the plate-shaped body (8) is therefore driven in the direction shown.

単なる往復直線運動の振動子であれば、振動に対応せる
板状体(8)の駆動ストローク変位量は振動子の当接角
度によって一義的に決定してしまうが、本実施例によれ
ば振動変位の軌跡は電極欠除部(4)の面積にも依存し
ているため、電極欠除部(4)面積を可変することによ
り板状体(8)の駆動ストローク変位量は同一当接角度
において調整可能であって、圧電振動子の当接角度の自
由度は向上する。
If the vibrator is a simple reciprocating linear motion, the drive stroke displacement amount of the plate-shaped body (8) corresponding to the vibration will be uniquely determined by the contact angle of the vibrator, but according to this embodiment, the vibration Since the locus of displacement also depends on the area of the electrode cutout (4), by varying the area of the electrode cutout (4), the drive stroke displacement amount of the plate-shaped body (8) can be maintained at the same contact angle. The degree of freedom of the contact angle of the piezoelectric vibrator is improved.

以上の実施例における圧電振動子(3)の構造について
は多数の薄い振動板を積層して多層構造となした方が、
理論的効率はよく、この場合に6− おいても電極面積を異ならせて電界分布を所望勤 に設定することができ、本発明の助果は得られ(る0 また圧電振動子(3)において第5図の如く摩耗性向上
のための耐摩耗性部材(9)を焼き付け、あるいは接着
等により設けたとしても、電極面積の差による振動変位
を利用して駆動力を得るものは本発明が包有するもので
ある。
Regarding the structure of the piezoelectric vibrator (3) in the above embodiment, it is better to form a multilayer structure by laminating a large number of thin diaphragms.
The theoretical efficiency is good, and in this case, the electric field distribution can be set to the desired intensity by varying the electrode area, and the benefits of the present invention can be obtained. Even if a wear-resistant member (9) is provided by baking or bonding to improve wear resistance as shown in Fig. 5, the present invention does not apply to a device that obtains driving force by utilizing vibration displacement caused by a difference in electrode area. It encompasses.

以上述べたように本発明の圧電振動子を用いた駆動装置
は、片持ち圧電振動子の長さ方向の振動変位量を遊端に
て部分的に抑制すべく電極欠除部を設けて相互の電極面
積を異ならせてなり、上記遊端を機械的に関連づけて当
接させたときの上記圧電振動子の振動変位をもって駆動
力を得るようにしており、構造の簡単な駆動装置を提供
するに好適なものであり、その実用的価値は大きい。
As described above, in the drive device using the piezoelectric vibrator of the present invention, an electrode cutout is provided in order to partially suppress the amount of vibrational displacement in the longitudinal direction of the cantilever piezoelectric vibrator at the free end. The piezoelectric vibrator has different electrode areas, and when the free ends are mechanically related and abutted, the vibration displacement of the piezoelectric vibrator is used to obtain a driving force, thereby providing a drive device with a simple structure. It is suitable for this purpose and has great practical value.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の圧電振動子を説明するための模式図、第
2図は本発明実施例に供する圧電振動子を説明するため
の模式図、第3図は第1の実施例における駆動装置の模
式図、第4図は第2の実施例における駆動装置の模式図
、第5図は他の実施例の圧電振動子を説明するための模
式図である。 符号の説明 (1) 、 (2)・・・・・・電極       (
3)・・・・・・圧電振動子(4)・・・・・・電極欠
除部      (5)・・・・・・ローター(力・・
・・・・交流電圧印加手段   (8)・・・・・・板
状体特許出願人   アイ ワ株式会社 / h−5図 9    54
Fig. 1 is a schematic diagram for explaining a conventional piezoelectric vibrator, Fig. 2 is a schematic diagram for explaining a piezoelectric vibrator used in an embodiment of the present invention, and Fig. 3 is a schematic diagram for explaining a piezoelectric vibrator used in an embodiment of the present invention. FIG. 4 is a schematic diagram of a driving device in a second embodiment, and FIG. 5 is a schematic diagram for explaining a piezoelectric vibrator of another embodiment. Explanation of symbols (1), (2)... Electrode (
3)... Piezoelectric vibrator (4)... Electrode missing part (5)... Rotor (force...
・・・・・・AC voltage application means (8)・・・Plate body patent applicant Aiwa Co., Ltd. / h-5 Figure 9 54

Claims (1)

【特許請求の範囲】[Claims] 片持ち圧電振動子の長さ方向の振動変位量を遊端にて部
分的に抑制すべく電極欠除部を設けて相互の電極面積を
異ならせてなり、上記遊端を機械的に関連づけて当接さ
せたときの上記圧電振動子の振動変位をもって駆動力を
得るようにしたことを特徴とする圧電振動子を用いた駆
動装置。
In order to partially suppress the amount of vibrational displacement in the longitudinal direction of the cantilever piezoelectric vibrator at the free end, an electrode cutout is provided to make the mutual electrode areas different, and the free ends are mechanically related to each other. A drive device using a piezoelectric vibrator, characterized in that a driving force is obtained by the vibration displacement of the piezoelectric vibrator when the piezoelectric vibrator is brought into contact with the piezoelectric vibrator.
JP57199051A 1982-11-15 1982-11-15 Driving device using piezoelectric vibrator Pending JPS5989583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57199051A JPS5989583A (en) 1982-11-15 1982-11-15 Driving device using piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57199051A JPS5989583A (en) 1982-11-15 1982-11-15 Driving device using piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPS5989583A true JPS5989583A (en) 1984-05-23

Family

ID=16401290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57199051A Pending JPS5989583A (en) 1982-11-15 1982-11-15 Driving device using piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPS5989583A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308172A (en) * 1988-05-31 1989-12-12 Honda Electron Co Ltd Ultrasonic wave driver
US5132582A (en) * 1989-03-20 1992-07-21 Nihon Kohden Corporation Recording medium transferring apparatus and vibrating element used therein
US5877579A (en) * 1993-07-09 1999-03-02 Nanomotion Ltd. Ceramic motor
US6121717A (en) * 1997-12-20 2000-09-19 U.S. Philips Corporation Driving device for at least two rotation elements, which device comprises at least one piezoelectric driving element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229192A (en) * 1975-09-01 1977-03-04 Ki Porichiefunichiesukii I Im Piezooelectric motor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229192A (en) * 1975-09-01 1977-03-04 Ki Porichiefunichiesukii I Im Piezooelectric motor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308172A (en) * 1988-05-31 1989-12-12 Honda Electron Co Ltd Ultrasonic wave driver
JP2657183B2 (en) * 1988-05-31 1997-09-24 本多電子株式会社 Ultrasonic drive
US5132582A (en) * 1989-03-20 1992-07-21 Nihon Kohden Corporation Recording medium transferring apparatus and vibrating element used therein
US5877579A (en) * 1993-07-09 1999-03-02 Nanomotion Ltd. Ceramic motor
US6064140A (en) * 1993-07-09 2000-05-16 Nanomotion Ltd Ceramic motor
US6121717A (en) * 1997-12-20 2000-09-19 U.S. Philips Corporation Driving device for at least two rotation elements, which device comprises at least one piezoelectric driving element

Similar Documents

Publication Publication Date Title
JP3118251B2 (en) Ultrasonic driving device and method
CN111464070B (en) Linear ultrasonic motor stator and electric excitation method thereof
JP4119903B2 (en) Flat plate piezoelectric ultrasonic motor
JPS63294281A (en) Piezoelectric driving device
JPS5989583A (en) Driving device using piezoelectric vibrator
JPS62126874A (en) Ultrasonic vibrator and drive controlling method thereof
US5532541A (en) Ultrasonic motor
JP3029677B2 (en) Ultrasonic transducer, driving method thereof, and ultrasonic actuator
JP3118252B2 (en) Ultrasonic vibrating device and method, and driving device and method using the same
JPH0773428B2 (en) Piezoelectric drive
JPS63294279A (en) Piezoelectric driving device
JPS63110973A (en) Piezoelectric driver
JPH0150196B2 (en)
JP2538033B2 (en) Planar ultrasonic actuator
JPH05111268A (en) Piezoelectric actuator
JPH03118780A (en) Ultrasonic motor
JPS63294280A (en) Piezoelectric driving device
JPS63217983A (en) Ultrasonic driving device
JP2004289914A (en) Ultrasonic motor
JPS6356181A (en) Piezo-electric motor
JPH0345174A (en) Ultrasonic oscillator and ultrasonic motor
JP2650122B2 (en) Vibrator type actuator
JPS6062879A (en) Vibration wave motor
JPS62155782A (en) Ultrasonic vibrator and drive control method thereof
JPS62135278A (en) Drive method of ultrasonic vibrator