JPH09148410A - Wafer transferring pencil holder for semiconductor manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pencil holder which can easily exchange not only the uppermost pencil, but also the other pencils. SOLUTION: A wafer transferring pencil holder holds pencils 22a1 -22a5 in such a way that the base sections of the pencils 22a1 -22a5 are inserted into the pencil inserting sections of pencil fixing sections 21a1 -21a5 and two fastener 23a1 and 23a2 fasten the adjacent areas of the pencil inserting sections of the pencil fixing sections 21a1 -21a5 from both sides. At the time of inserting the base sections of the pencils 21a1 -21a5 into the inserting sections, the wedge- shaped parts of the base sections are inserted into the wedge-shaped parts of the inserting sections and the fasteners 23a1 and 23a2 are engaged with wedge-shaped recessed sections formed on side walls of the fixing sections 21a1 -21a5 adjacent to the wedge-shaped parts of the inserting sections. Therefore, the pencils 22a1 -22a5 can be easily fixed to the fixing sections 21a1 -21a5 , respectively, by inserting the wedge-shaped sections of the pencils 22a1 -22a5 into the wedge-shaped sections of the fixing sections 21a1 -21a5 and fixing the wedge- shaped sections of the pencils to the wedge-shaped sections of the fixing sections with screws 24a1 and 24a2 .

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a pencil holding device for wafer transfer in a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art A conventional semiconductor manufacturing apparatus for forming a semiconductor single crystal on a material wafer has a structure as shown in FIG. In the figure, reference numeral 1 is a semiconductor manufacturing apparatus which forms a dust-free chamber, and 2 is a robot which is a transfer apparatus, and is used for wafer transfer, which is also called a finger provided at the tip of an arm 3 of the robot 2. With the pencil 4 of FIG. 3, the wafer 5 as a material is transferred from the carrier stage 6 to the wafer storage groove or shelf 8 provided on the column inside the boat 7 and loaded, and the boat 7 having the wafer 5 loaded is shown in the figure. The material wafer 5 is raised by an elevating means, and the required heat treatment is carried out in the reactor 9. Further, 10 is a control device of the semiconductor manufacturing apparatus 1, and 11 is an operation panel thereof. In addition, a plurality of columns (usually 100 to 150) are provided on the columns inside the boat 7 shown in FIG.
Individual) wafer storage grooves or shelves 8 are provided, and
In a cassette (not shown here) of the carrier stage 6, a groove or a shelf for accommodating the wafers 5 stacked in 25 stages is usually formed. Therefore, when the wafer 5 is transferred by the pencil 4 provided at the tip of the arm 3 of the robot 2 as described above, a plurality of wafers (in this example, 5
I was trying to transfer them all at once. Here, FIG. 4 shows a vertical sectional front view of a conventional one in which five pencils 4 are integrally fixed. In FIG. 4, 4a _{1 to} 4a ₅ are pencils, and these pencils are the pencil fixing portion 12a.
_It is fixed to screws _{1 to} 12a ₅ by screws 14a _{1 to} 14a ₁₀ and held by a pencil holder 13a. 13b is a pencil holding part.

[0003]

By the way, in the conventional wafer transfer pencil and holding device in the semiconductor manufacturing apparatus, as described above, the pencil and the pencil fixing portion of the pencil holder are directly fixed by screws from above. Because of this, there were the following problems. (1) Even if a pencil other than the topmost pencil is to be replaced due to breakage or the like, it is necessary to remove all the pencils above the broken pencil, or disassemble the pencil holder and reassemble it. (2) In such a case, it is difficult to restore accurately including the intervals between the pencils, and the work is complicated. It is an object of the present invention to provide a pencil holding device for wafer transfer in a semiconductor manufacturing apparatus, which solves the above-mentioned problems (problems) of conventional ones.

[0004]

In order to solve the above problems, a pencil holder for wafer transfer in a semiconductor manufacturing apparatus according to the present invention separately provides a plurality of pencils for wafer transfer in a semiconductor manufacturing apparatus. In the pencil holding device to be held in the pencil holder through the pencil fixing portion, each of the above-mentioned pencils is fitted with a fitting surface formed at a mutual joining portion between the base portion and each pencil fixing portion, By assembling the two stoppers from both sides to the adjacent portions of the pencil and the fitting portion of the pencil fixing portion, the connection between each pencil and each pencil fixing portion is reinforced. In this case, the above-mentioned respective pencils and the respective fixing portions of the respective pencils are fitted to each other by fitting the respective wedge-shaped portions formed at the respective joints, and the above-mentioned stoppers are assembled on both sides of each pencil. Wedge-shaped recesses are formed adjacent to the wedge-shaped portions of the wall, and the side walls of each of the pencil fixing portions are provided with concave-convex portions that fit with the stoppers, and the stoppers include the concave-convex portions and the wedge-shaped concave portions. By forming a concave portion and a wedge-shaped portion that are respectively fitted to each other, by fitting the wedge-shaped portion of the stopper to the wedge-shaped concave portion of each pencil through the concave-convex portion of each pencil fixing portion, and fixing with a screw. It may be configured so that Since the pencil holding device for wafer transfer in the semiconductor manufacturing apparatus of the present invention is configured so that the pencil, the fixing portion of the pencil holder, and the stopper are formed into a shape that meshes with each other and are fixed with screws or the like from the lateral direction, Even if the pencil other than the upper one is damaged, only the damaged pencil can be removed and repaired. Further, since the pencil, the pencil holder and the stopper are formed in such a shape as to be meshed with each other, the pencil can be accurately restored to the conventional position even if it is removed and replaced. Therefore, the pencil holding device for wafer transfer in the semiconductor manufacturing apparatus can be easily maintained.

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below with reference to an embodiment shown in FIG. FIG. 1 (A) is a front view showing a pencil mounting portion of a robot arm according to an embodiment of the present invention, and FIG. 1 (B) is X- of FIG. 1 (A).
1 is a pencil and a pencil holder shown in the X'section. 1 (A) and 1 (B), the same reference numerals as those in FIG. 4 are attached to the same configuration as the conventional one, and the description thereof is omitted. 21a _{1 to} 21a ₅ are pencil holders 13 respectively
Pencil fixing portion which is held in a, 22a ₁ ~22a ₅ in each pencil, by means described below, it is attached to the pencil the fixed portion 21a ₁ ~21a _5. Since the attachments of the respective pencils to the fixing portion may be performed in exactly the same manner, the following description will be made by exemplifying the connection between the pencil 22a ₁ and the pencil fixing portion 21a ₁ . First, pencil 22a _1, as shown in portion B shown enclosed by a broken line in FIG. 1 (A), the base side of the pencil 22a ₁ formed in a wedge shape, while the pencil fixed held in the pencil holder 13a Part 21a ₁ is a pencil 22
A wedge-shaped portion corresponding to the wedge-shaped portion of a ₁ is formed, and the two are fitted and connected by these wedge-shaped portions. Note that this combination alone is not sufficient, so in order to supplement this,
As generally shown in (B), stoppers 23a ₁ and 23a ₂ and screws 24a ₁ and 24a ₂ that are assembled to the pencil 22a ₁ from the right and left sides are also used. FIG. 2 shows how the stoppers 23a ₁ and 23a ₂ are assembled.
Next, supplementary explanation will be given using (A) to (C). That is, as shown in FIG. 2 (A), the pencil 22a ₁ has a wedge-shaped recess 22h ₁ formed on a side surface portion thereof which is joined to the stopper 23a _{1 on the} right side thereof, while the stopper 23a _{1 is provided} on the side thereof. Figure 2
As shown in FIG. 2C, a wedge-shaped portion 23k ₁ is formed as a corresponding portion of the wedge-shaped recessed portion 22h ₁ in FIG.
As shown in (B), the protrusion 21 formed as a result of forming the notches 21k ₁ and 21k ₂ on the side wall of the pencil fixing portion 21a _1.
By also forming the recesses 23h ₁ corresponding to T _1, Ategai the recess 23h ₁ fasteners 23a ₁ relative to the convex portion 21T ₁ pencil fixing portion 21a _1, with respect to wedge-shaped recess 22h ₁ pencil 22a ₁ wedge-shaped portion of the fastener 23a ₁ 23k ₁
On which the fitted, pencil fixing portion 21 from the stopper 23a ₁
Screws 24a ₁ relative to the screw holes N _1, N ₂ provided respectively in a _1,
24a ₂ is screwed in to reinforce the connection between the pencil 22a ₁ and the pencil fixing portion 21a ₁ . The pencil fixing portion 21a ₁ is formed in a drawer shape as shown in FIG. 2 (B). The above is the pencil 22
a ₁ , the configuration of the pencil fixing portion 21a _{1 for} the right stopper 23a ₁ has been described, but the pencil 22a ₁ corresponds to the wedge-shaped portion 23k ₂ and the recess 23h ₂ provided for the left stopper 23a ₂ . Further, the pencil fixing portion 21a ₁ is provided with a wedge-shaped recess 22h ₂ and notches 21k ₁ and 21k ₂ corresponding to the notches and protrusions 21T ₂ to connect the pencil 22a ₁ and the pencil fixing portion 21a _{1 on} the left side. Just do it. Wedge-shaped recesses 22h ₁ and 22 of the pencil 22a ₁
Each length L of h _{2 corresponds to} the total length of the notches 21k ₁ and 21k ₂ and the protrusion 21T _{1 on} the side wall of the pencil fixing portion 21a ₁ and the lengths of the stoppers 23a ₁ and 23a ₂ , respectively. Shall be set to. Since the pencil holding device for wafer transfer according to the present invention is configured as described above, in FIG. 1, for example, when the pencil 22a ₄ is broken, only the two fasteners fixing the broken pencil 22a ₄ are fixed. was removed from the lateral direction, it is possible to remove the pencil 22a ₄ by simply pulling the pencil 22a ₄ forward.
Therefore, by inserting a new pencil into the pencil fixing portion 21a ₄ from the front to the back and installing two stoppers from the left and right lateral directions and fixing them with screws, the pencil can be easily fixed at an accurate position. . According to the embodiment of the present invention, the connection between the pencil and the pencil fixing portion is fitted with a wedge-shaped portion, and the pencil is fixed from the left and right lateral directions to the pencil holder through the pencil fixing portion using a stopper. There is a structural feature in that,
Also, since the pencil, the pencil fixing part, and the fastener are shaped and fixed so that they fit with each other, even if the pencil is replaced, there is no deviation from the regular position before replacement, and the pencil is always accurate. Mounted in position.
Here, in the embodiment of the present invention, the case where the pencil, the pencil fixing portion, and the stopper are formed in a diagonal direction as described above is shown, but they can be fitted and fixed to each other. Of course, any other shape may be used as long as it has a shape.

[0006]

Since the pencil holding device for wafer transfer in the semiconductor manufacturing apparatus of the present invention is constructed as described above, it has the following excellent effects. (1) No matter which stage of the pencil is to be replaced, the pencil can be detached from the side by easily removing the stopper of the pencil to be replaced from the side, so that a new pencil can be attached at the correct position. (2) Therefore, the maintenance of the pencil holding device for wafer transfer in the semiconductor manufacturing apparatus can be easily performed.

[Brief description of the drawings]

FIG. 1A is a front view showing a pencil mounting portion of a robot arm according to an embodiment of the present invention, and FIG. 1B is a sectional view taken along line XX ′ in FIG. 1A. Is.

FIG. 2A is an enlarged perspective view of an essential part of a pencil, FIG. 2B is an enlarged perspective view of an essential part of a pencil fixing part, and FIG.
FIG. 4 is an enlarged perspective view of a main part of a stopper.

FIG. 3 is a front view showing the outline of the overall configuration of a semiconductor manufacturing apparatus to which the present invention and a conventional one are applied.

FIG. 4 is a vertical cross-sectional front view showing a pencil mounting portion of a conventional robot arm.

[Explanation of symbols]

21a ₁ ~21a _5: Pencil fixing portion 21T _1, 21T _2: convex portion 22a ₁ ~22a _5: Pencil 22h _1, 22h _2: wedge recess 23a _1, 23a _2: stop 23h _1, 23h _2: recess 23k _1, 23k _2: wedge portion 24a _1, 24a _2: screw N _1, N _2: threaded hole

Claims (2)

[Claims] 1. A pencil holding device in which a plurality of pencils for wafer transfer in a semiconductor manufacturing apparatus are held in a pencil holder via different pencil fixing parts, wherein each pencil has its base and By fitting at the fitting surfaces formed at the mutual joining portion with the pencil fixing portion and by assembling the two stoppers from both sides to the adjacent portions of the pencil and the fitting portion of the pencil fixing portion, respectively, A pencil holding device for wafer transfer in a semiconductor manufacturing apparatus, characterized in that the connection between each pencil and each pencil fixing part is reinforced. 2. The above-mentioned respective pencils and the respective fixing portions of the respective pencils are fitted to each other by fitting the respective wedge-shaped portions formed in the respective joints, and the assembling of said stopper is carried out to each pencil. Wedge-shaped recesses are formed on both side walls of the pencil-fixed portion adjacent to the wedge-shaped portions, respectively. By forming a recess and a wedge-shaped part that respectively fit in the wedge-shaped recess, the wedge-shaped part of the stopper is fitted into the wedge-shaped recess of each pencil via the uneven parts of each pencil fixing part, and then fixed with screws. The pencil holding device for wafer transfer in the semiconductor manufacturing apparatus according to claim 1, wherein the pencil holding device is used.