JPH09145332A - Detection data reader for object measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance accuracy in the measurement of shape or the like of object by a constitution wherein all detection data from respective detectors in an array of an optical detector can be read out at same Z position. SOLUTION: A shutter means 10 is opened when an object 7 is stopped and each detector in an array 9 of optical detector stores the observation image of optical slice at same Z position through photoelectric conversion. When the stored charges are read out from each detector in the array 9 of optical detector, the shutter 10 is closed and the object 7 is moved. Consequently, the detection data at same Z position can be obtained from each detector in the array and read out. A light source 1 may be flickered in place of opening the shutter means 10 and the light source 1 may be unlighted in place of closing the shutter means 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an object measuring apparatus for measuring an object by injecting light into an object moving in a predetermined direction and receiving the reflected light by a photodetector array, and more particularly, The present invention relates to an apparatus for reading detection data of a photodetector array.

[0002]

2. Description of the Related Art As a technique for measuring the shape of an object by injecting light into an object moving in a predetermined direction and receiving the reflected light by a photodetector array, for example, As shown in JP-A-4-265918, there is a system in which confocal optical systems are two-dimensionally arranged.

That is, in the apparatus shown in FIG. 10, the light source 1
Light becomes parallel light through the lenses 2 and 3 and is incident on the pinhole array PH1. Pinhole array PH1
Indicates that the pinholes are arranged in a matrix.

The light passing through the pinhole array PH1 is
The light passes through the half mirror 4, is condensed by the lenses 5 a and 5 b forming the telecentric system by the aperture stop, and is projected onto the measured object 7. The measured object 7 is placed on a moving stage 8 which can be displaced in the Z-axis direction.

The light reflected by the object 7 to be measured is reflected by the lens 5
The light is condensed by a and b, is reflected by the half mirror 4, and forms an image at a position conjugate with the pinhole array PH1. The pinhole array PH2 is arranged at this image forming position, and the light passing through the pinhole is detected by each photodetector of the photodetector array 9.

According to this structure, the movement control unit 40 displaces the moving stage 8 in the Z direction, and the three-dimensional measuring unit 30 separately samples the outputs of the individual photodetectors of the photodetector array 9. Then, a so-called optical slice observation image for each Z position can be acquired, and the Z direction position when the output of each photodetector becomes maximum can be measured as the surface position of the object 7.

FIG. 11 is a plan view showing the arrangement of the individual photodetectors D11, D12, D13, ... D21 ... Dmn of the photodetector array 9.

Here, usually, in order to read the detection data of the individual photodetectors of the photodetector array 9 such as the MOS type,
As shown in FIG. 11, the charges accumulated in the photodetectors D11 ... By photoelectric conversion are read out one by one by raster scanning. Therefore, there is a difference in read time between the first photodetector D11 and the last photodetector Dmn.

As described above, when the detection data of the individual photodetectors of the photodetector array 9 are sequentially sampled while the moving stage 8 is displaced in the Z direction, there is a difference in the read time for each photodetector. Therefore, the Z position at the time of detection differs for each photodetector. This causes a measurement error.

Further, since the moving stage 8 is driven by, for example, a pulse motor or the like, the measured object 7 moves stepwise as shown in FIG. 12, and does not move continuously.

Therefore, in one photodetector, the detection data is data at the same Z position as shown in A, and in another photodetector, the detection data is at different Z positions as shown in B. Since the data is straddled, the Z position movement amount of the detection data differs for each photodetector, which has been a factor for further widening the measurement error.
The present invention has been made in view of the above problems,
An object of the present invention is to improve the accuracy of measurement of the shape of an object, etc. by making it possible to read the detection data so that the detection data of each detector of the photodetector array are all at the same Z position. Is.

[0012]

Therefore, in the main invention of the present invention, moving means for moving the object to be measured in a predetermined direction and light from the light source toward the object to be measured moving in the predetermined direction. A light projection means for projecting light, a photodetector array for detecting light reflected by the object to be measured by a plurality of photodetectors, and the light detection for each moving position of the object to be measured. And a reading means for reading the detection data of each photodetector of the detector array, and stopping the object measuring device for measuring the object to be measured based on the read detection data for each moving position. Movement stopping means for stopping the movement of the measured object in response to a command,
Shutter means provided between the light projecting means and the object to be measured or between the object to be measured and the photodetector, for shutting off light input to the photodetector array in response to a closing command; In the detection step, a stop command is output to the movement stop means, a close command to the shutter means is turned off, and the photodetector is output while the stop command is output and the close command is turned off. Light is detected by each photodetector of the array, and in the detection data reading process, the stop command to the movement stop means is turned off, and the close command is output to the shutter means, and the stop command is turned off, and The reading means includes control means for reading the detection data of each photodetector of the photodetector array while the close command is output.

According to this structure, since the shutter means is opened when the object to be measured is stopped, each photodetector of the photodetector array accumulates the optical slice observation image at the same position by photoelectric conversion. To do. And
While the electric charge accumulated from each photodetector of the photodetector array is read out, the shutter means is closed and the object to be measured is moved. Therefore, the detection data of each photodetector of the photodetector array is obtained at the same position, and the detection data at the same position can be read. Also,
In the above configuration, the light source may be turned on instead of opening the shutter means, and the light source may be turned off instead of closing the shutter means.

In the above construction, when the shutter means is open or the light source is on for a sufficiently short time, the object is stopped while the shutter means is open or the light source is on. Instead, the optical slice observation image may be photoelectrically converted and stored in each photodetector of the photodetector array. In this case, the detection data of each photodetector of the photodetector array is obtained at substantially the same position, and the detection data at the substantially same position can be read. Then, the measurement accuracy can be improved without suffering a delay in the measurement time due to the stop of the movement of the object.

Furthermore, in the above structure, while the shutter means is open or the light source is on, electric charge is accumulated in each photodetector of the photodetector array, and the accumulated detection data is stored. The reading process may be performed.

In this way, the detection data is read out so that the detection data of each detector of the photodetector array are all at the same Z position, so that the accuracy of measurement of the shape of the object is dramatically improved. .

The time when the shutter means is open or the time when the light source is turned on is set according to the reflectance of the measured object.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a detection data reading device in an object measuring device according to the present invention will be described below with reference to the drawings.

First Embodiment FIG. 1 shows the overall configuration of the first embodiment. This device is shown in FIG.
The optical shutter 10 is added to the device shown in FIG. 0, and the same parts as those in FIG.

The optical shutter 10 shuts off the optical path in response to a closing command output from the three-dimensional measuring unit 30 and allows light to pass when the closing command is turned off. In the case of FIG.
It is arranged between the light source 1 and the lens 2. The arrangement position of the optical shutter 10 is not limited to this, and it is an arbitrary position between the light source 1 and the pinhole array PH1, an arbitrary position between the pinhole array PH1 and the half mirror 4, and a half position. An arbitrary position between the mirror 4 and the inspection surface of the measured object 7, an arbitrary position between the pinhole array PH2 and the half mirror 4, a position between the pinhole array PH2 and the photodetector array 9, and the like, It can be arranged at any position as long as it can block the optical path and prevent light from entering the photodetector array 9.

Here, as the optical shutter 10, for example, the following can be used.

(1) Mechanical shutter-Mechanical shutter such as camera shutter-Disc (cylindrical) optical chopper (2) Shutter composed of polarization rotating optical element and polarizing plate Here, the polarization rotating optical element means optical rotation. And an element whose refractive index is changed by a magnetic field, an electric field, an electromagnetic wave, etc. to rotate the polarization direction. The following can be used:

Liquid crystal (optical rotation), Pockels effect (PLZT, etc.), Faraday effect (optical rotation), (optical) Kerr effect (CS2, etc.), etc. can be used.

2 (a) and 2 (b) are views for explaining the operation of such a shutter. As shown in FIG. 2 (a),
Normally, the direction of the polarizing plate 12 is set so that the incident light passes through the polarizing plate 12. Then, as shown in FIG. 2 (b), the polarization rotating optical element 1 receives a magnetic field, an electric field, an electromagnetic wave or the like.
The polarization direction is rotated by applying to the polarizing plate 1.
Prevent light from passing through 2.

(3) Scattering Liquid Crystal Shutter The scattering liquid crystal shutter is a shutter using a transmission scattering type liquid crystal, and is an element whose transmittance changes by applying a magnetic field, an electric field, an electromagnetic wave or the like. Is. It changes the transmittance to transmit light, or scatters light (blocks light).

(4) Electronic shutter The electronic shutter is, for example, Sony XC77RRCE.
Can be used. It is placed on the photodetector array 9 and blocks light.

When the shutters (2) and (3) are arranged, it is desirable to arrange them between the light source 1 and the pinhole array PH1 in consideration of the aberration of the optical system.

FIG. 3 is a flow chart showing the procedure of processing performed by the three-dimensional measuring unit 30 and the movement control unit 40 of the first embodiment (FIG. 1).

As shown in FIG. 3, first, the movement control unit 4
From 0, a movement stop command is output to the moving stage 8 moving in the Z-axis direction, and the moving stage 8 is stopped (step 101). At the same time, the close command output from the three-dimensional measuring unit 30 to the optical shutter 10 is turned off, the optical shutter 10 is opened, and light is allowed to pass between the light source 1 and the lens 2. (Step 1
02).

Then, when the set time elapses, the three-dimensional measuring unit 30 outputs a close command to the optical shutter 10, the optical shutter 10 is closed, and the optical path between the light source 1 and the lens 2 is closed. Is blocked (step 104).
At the same time, the movement stop command output from the movement control unit 40 to the movement stage 8 is turned off, and the movement stage 8 starts moving (step 106).

Here, the time during which the optical shutter 10 is opened is set according to the reflectance of the measured object 7.

In this way, light is accumulated as electric charge in each photodetector of the photodetector array 9 while the measured object 7 is stopped and the optical shutter 10 is opened.
Therefore, the detection data of each detector of the photodetector array 9 is obtained as the same Z position (step 103).

Then, while the object 7 to be measured is moving in the Z direction (step 106), the three-dimensional measuring section 30 performs a process of reading detection data from each photodetector of the photodetector array 9. (Step 105). Then, the shape of the object 7 is measured based on this detection data. When the moving stage 8 moves by the predetermined moving amount ΔZ, the procedure moves to step 101 again, and the same processing is repeatedly executed thereafter.

As described above, since the detection data of each detector of the photodetector array 9 are all read out at the same Z position, the accuracy of the measurement of the shape of the object 7 is dramatically improved.

Further, the processing may be performed according to the procedure shown in FIG. Steps 201, 202, 203 shown in FIG.
Steps 204, 205 and 206 correspond to steps 101, 102, 103, 105, 104 and 106 shown in FIG. 3, respectively.

That is, the same "processing for reading detection data" (step 204) as in step 105 is not performed while the object 7 to be measured is moved and the optical shutter 10 is closed, but not to be measured. It may be performed while the object 7 is stopped and the optical shutter 10 is opened (steps 201 to 206).

If the time during which the optical shutter 10 is open is sufficiently short and the amount of movement in the Z direction during that time is almost negligible, the procedure shown in FIG. 5 may be used. Steps 301, 302, 303, 30 shown in FIG.
4 is steps 102, 103 and 1 shown in FIG. 3, respectively.
It corresponds to 04 and 105.

In the case of FIG. 5, unlike the case of FIG. 3, the moving stage 8 is continuously moved without being stopped.

That is, while the optical shutter 10 is open (steps 301 to 303), light is received and detected by the photodetector array 9 (step 302), and while the optical shutter 10 is closed, From the photodetector array 9,
The detection data is read (step 304).

Further, in FIG. 5, as in FIG.
“Detection data read processing” (step 304)
It may be performed while the optical shutter 10 is opened. That is, in FIG. 5, steps 301 and 30
Instead of repeating the processing in the order of 2, 303, 304, the processing is repeated in the order of steps 301, 302, 304, 303.

In the case of FIG. 5, since the measured object 7 continuously moves, the measurement time can be shortened as compared with that of FIG. 3 because there is no loss while the object 7 is stopped.

However, while the optical shutter 10 is open (steps 301 to 303), the reflected light from the moving object 7 to be measured is detected by each detector of the photodetector array 9. In terms of accuracy, it is slightly inferior to that of FIG.

However, all the photodetectors of the photodetector array 9 receive the reflected light under the same condition while the object 7 to be measured is moving by the same amount of movement, so that the measurement error is different from the conventional one. Becomes smaller.

Example 2 FIG. 6 shows a polarization rotating optical element 13 and a half mirror (polarization beam splitter) 4 instead of the optical shutter 10 of FIG.
An embodiment is shown in which a shutter constituted by the 1/4 wavelength plate 14 and the 1/4 wavelength plate 14 is provided. The same parts as those in FIG. 1 are designated by the same reference numerals and the description thereof is omitted.

The three-dimensional measuring unit 30 includes the polarization rotation optical element 1
Apply magnetic field, electric field, electromagnetic wave, etc. to 3 as necessary,
Rotate the polarization direction.

When the shutter is opened, the polarization direction is rotated so that the polarization of the light emitted from the pinhole array PH1 becomes the P polarization. As a result, the light passes through the polarization beam splitter 4 and the quarter-wave plate 14 and is projected onto the measured object 7. The reflected light from the measured object 7 is 1 /
The light passes through the four-wave plate 14 to become S-polarized light, is reflected by the polarization beam splitter 4, and is received by the photodetector array 9. When closing the shutter, the polarization direction is rotated so that the polarization of the light emitted from the pinhole array PH1 becomes the S polarization. As a result, the light is reflected by the polarization beam splitter 4 (see the broken line), the projection component returning to the photodetector array 9 disappears, and the light is not received by the photodetector array 9.

In the three-dimensional measuring section 30 and the movement control section 40,
Similar to the first embodiment described above, the process shown in FIG. 3, the process shown in FIG. 4, or the process shown in FIG. 5 is executed.

Embodiment 3 FIG. 7 is a diagram showing a main part of an embodiment in which a shutter composed of an optical deflecting means 15 and an aperture 6'is used instead of the optical shutter 10 shown in FIG. The same as in Fig. 1,
The same reference numerals are given and the description is omitted.

This shutter can be arranged at any place in FIG. 1 as long as it is in the optical path. Three-dimensional measuring unit 30
Inputs a required signal to the light deflector 15 and changes the direction of the light output from the light deflector 15 as shown by a solid line or a broken line.

When the shutter is opened, the light deflecting means 15
Causes the direction of light to change as shown by the solid line. As a result, the light passes through the openings 6 ′ and is received by the photodetector array 9.

When the shutter is closed, the light deflection means 1
The direction of light is changed by 5 as shown by the broken line.
As a result, the light does not pass through the aperture 6'and the light is not received by the photodetector array 9.

In the three-dimensional measuring unit 30 and the movement control unit 40,
Similar to the first embodiment described above, the process shown in FIG. 3, the process shown in FIG. 4, or the process shown in FIG. 5 is executed.

As the light deflector 15, for example, the following can be used.

Polygon Mirror, Galvano Mirror, AOM (Q Switch), Fourth Embodiment Now, with the optical system having the conventional configuration shown in FIG. 10,
An example in which the same effect as that in which a shutter is provided as in the first to third examples can be obtained will be described below.

That is, in FIG. 10, the light source 1 can be turned on and off freely, and the command signal (ON signal) for turning on the light source 1 from the three-dimensional measuring unit 30 as required, and the light source 1 is turned off. Command signal (OFF signal) for
Can be output.

To obtain the same effect as opening the shutter, a lighting command is output to the light source 1 to light the light source 1. As a result, light is received by the photodetector array 9.

To obtain the same effect as closing the shutter, the light source 1 may be turned off by turning off the lighting command for the light source 1. As a result, light is not received by the photodetector array 9.

In the three-dimensional measuring section 30 and the movement control section 40,
Similar to the first embodiment described above, the process shown in FIG. 3, the process shown in FIG. 4, or the process shown in FIG. 5 is executed.

However, instead of the process of opening the shutter, the process of turning on the light source 1 is performed (step 102, step 202, step 30).
1), instead of the process of "closing the shutter", the process of "turning off the light source 1" is performed (step 104, step 205, step 303).

Any light source 1 can be used as long as it can electrically control blinking. For example, flash lamps, pulsed lasers, semiconductor light emitting devices such as LEDs, ELs, laser diodes, etc. can be used.

Example 5 FIG. 8 shows an example in which a point light source array 16 is used instead of the light source 1, lens 2, lens 3 and pinhole array PH1 shown in FIG.

The point light emitting elements of the point light source array 16 are arranged so as to be positioned at the portions corresponding to the pinholes of the pinhole array PH1 of FIG.

In contrast to the fifth embodiment, the same shutters as those of the first, second and third embodiments described above are provided,
The three-dimensional measuring unit 30 and the movement control unit 40 can execute the process shown in FIG. 3, the process shown in FIG. 4, or the process shown in FIG. 5 in the same manner as in the first embodiment described above.

As in the case of the above-described fourth embodiment, the point light source array 16 is controlled to be turned on and off without providing a shutter so that the same processing as opening and closing the shutter is performed. Good.

Example 6 FIG. 9 shows a prior application (Japanese Patent Application No. 6-237804) relating to the present applicant.
No.), the case where the present invention is applied to the invention described in the embodiment of the specification is shown.

In this apparatus, the hologram 20 functions as a point light source array of an optical system and an optical component that transmits received light.

That is, the hologram 20 is used as a point light source light generating means, and when the reference light is incident from the light source 21 via the lens 22 and the lens 23, it is as if each pin of the pinhole array PH. Reproduces light as if it were emitted from a hole.

In this way, the hologram 3 reproduces the object light by the reference light. Object light is a plurality of wavefronts emitted from each pinhole of the pinhole array PH.
In this embodiment, a plurality of parallel lights converted by the lens 19a are assumed.

The plurality of reproduced object lights are reflected by the lens 19b.
The light focused on the inspection surface of the object to be measured 7 by the object 7 and reflected by the object 7 is passed through the lens 19b, the hologram 20, and the lens 19a to the pinhole array PH and the photodetector array 9 behind the lens 17. To be detected. That is, the light passing through each pinhole of the pinhole array PH is imaged on each photodetector of the photodetector array 9 in a one-to-one manner via the eyepiece lens 17. In this case, the pitch of the pinholes in the pinhole array PH and the pitch of the photodetectors in the photodetector array 9 do not have to be the same, and each pitch may be set according to the magnification of the eyepiece lens 17.

Here, between the light source 21 and the lens 22,
The optical shutter 18 equivalent to the shutters shown in the above-described first embodiment (FIG. 1) and third embodiment (FIG. 7) is provided, and the three-dimensional measurement unit 30 and the movement control unit 40 are provided as the above-described first embodiment. Similarly, the process shown in FIG. 3, the process shown in FIG. 4, or the process shown in FIG. 5 can be executed.

Further, without providing the optical shutter 18, as in the above-described fourth embodiment, by controlling the lighting and extinguishing of the point light source array 16, it is possible to perform the same processing as the opening and closing of the shutter. You may

In the above-described embodiments, the case of applying to the three-dimensional measuring device to which the confocal optical system is applied has been described as an example. However, according to the present invention, light is applied to an object moving in a predetermined direction. Any measuring device can be applied as long as it is an object measuring device that measures an object by receiving the incident light and receiving the reflected light by the photodetector array.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a first embodiment of the present invention.

2 (a) and 2 (b) are views for explaining the operation when the optical shutter shown in FIG. 1 configured with a polarization rotating optical element and a polarizing plate is used.

FIG. 3 is a flowchart showing a first example of a processing procedure of the embodiment.

FIG. 4 is a flowchart showing a second example of the processing procedure of the embodiment.

FIG. 5 is a flowchart showing a second example of the processing procedure of the embodiment.

FIG. 6 is a diagram showing a configuration of a second embodiment of the present invention.

FIG. 7 is a diagram showing a main part of a configuration of a third embodiment of the present invention.

FIG. 8 is a diagram showing a configuration of a fifth embodiment of the present invention.

FIG. 9 is a diagram showing a configuration of a sixth embodiment of the present invention.

FIG. 10 is a diagram showing a configuration of a conventional technique.

FIG. 1 is a plan view illustrating how detection data is read from a photodetector array.

FIG. 12 is a graph for explaining that the measured object changes its moving position stepwise with the lapse of time.

[Explanation of symbols]

 9 Photodetector array 10 Optical shutter 30 Three-dimensional measuring unit 40 Movement control unit

Claims (8)

[Claims] 1. A moving means for moving an object to be measured in a predetermined direction, a light projecting means for projecting light from a light source toward an object to be measured moving in the predetermined direction, and reflection by the object to be measured. A photodetector array for detecting the generated light by a plurality of photodetectors, and a reading means for reading the detection data of each photodetector of the photodetector array for each moving position of the measured object. In the object measuring device, which is configured to measure the object to be measured based on the read detection data for each moving position, a movement stop for stopping the movement of the object to be measured in response to a stop command. Means, and shutter means provided between the light projecting means and the object to be measured or between the object to be measured and the photodetector, for shutting off the light input to the photodetector array in response to a closing command. In the light detection process, A stop command is output to the movement stop means, a close command to the shutter means is turned off, and while the stop command is output and the close command is turned off, each photodetector of the photodetector array is detected. In the detection data reading process, the stop command to the movement stopping means is turned off, and the closing command is output to the shutter means. The stop command is turned off and the closing command is output. And a control means for causing the reading means to read the detection data of each photodetector of the photodetector array while the detection data is being read. 2. A moving means for moving the measured object in a predetermined direction, a light projecting means for projecting light from a light source toward the measured object moving in the predetermined direction, and reflection by the measured object. A photodetector array for detecting the generated light by a plurality of photodetectors, and a reading means for reading the detection data of each photodetector of the photodetector array for each moving position of the measured object. In the object measuring device, which is configured to measure the object to be measured based on the read detection data for each moving position, between the light projecting unit and the object to be measured or the object to be measured. Shutter means provided between the photodetector array and the photodetector array to block light input to the photodetector array in response to a closing command; While the command is off , Light is detected by each photodetector of the photodetector array, and in the detection data reading process, a closing command is output to the shutter means, and while the closing command is being output, the reading means outputs the closing command. A detection data reading device in an object measuring device, comprising: a control means for reading the detection data of each photodetector of the photodetector array. 3. A moving means for moving the measured object in a predetermined direction, a light projecting means for projecting light from a light source toward the measured object moving in the predetermined direction, and reflection by the measured object. A photodetector array for detecting the generated light by a plurality of photodetectors, and a reading means for reading the detection data of each photodetector of the photodetector array for each moving position of the measured object. In the object measuring device, which is configured to measure the object to be measured based on the read detection data for each moving position, a movement stop for stopping the movement of the object to be measured in response to a stop command. Means, a light-off means for turning off the light source in response to a light-off command, and a light-detection step, in addition to outputting a stop command to the movement stopping means, turning off the light-off command for the light-off means. Output Light is detected by each photodetector of the photodetector array while the turn-off command is turned off, and in the detection data reading process, the stop command to the movement stop means is turned off and the turn-off command is turned off. A turn-off command to the photodetector, and while the stop command is turned off and the turn-off command is being output, the reading means is made to read the detection data of each photodetector of the photodetector array. A detection data reading device in an object measuring device comprising a control means. 4. A moving means for moving an object to be measured in a predetermined direction, a light projecting means for projecting light from a light source toward the object to be measured moving in the predetermined direction, and reflection by the object to be measured. A photodetector array for detecting the generated light by a plurality of photodetectors, and a reading means for reading the detection data of each photodetector of the photodetector array for each moving position of the measured object. In an object measuring device configured to measure the object to be measured based on the read detection data for each moving position, an extinguishing means for extinguishing the light source in response to an extinguishing command, and light detection In the step, the extinguishing means is turned off, and while the extinguishing instruction is turned off, light is detected by each photodetector of the photodetector array, and in the detection data reading step, the extinguishing means is turned on. Command to turn off the light Data in the measuring device for the object, the control means for causing the reading means to read the detection data of each photodetector of the photodetector array while the turning-off command is output. Reading device. 5. A moving means for moving the measured object in a predetermined direction, a light projecting means for projecting light from a light source toward the measured object moving in the predetermined direction, and reflection by the measured object. A photodetector array for detecting the generated light by a plurality of photodetectors, and a reading means for reading the detection data of each photodetector of the photodetector array for each moving position of the measured object. In the object measuring device, which is configured to measure the object to be measured based on the read detection data for each moving position, a movement stop for stopping the movement of the object to be measured in response to a stop command. Means, and shutter means provided between the light projecting means and the object to be measured or between the object to be measured and the photodetector, for shutting off the light input to the photodetector array in response to a closing command. And the movement stopping means And outputs a stop command, and turns off the closing command for the shutter means. While the stop command is output and the closing command is off,
An apparatus for measuring an object, comprising: control means for detecting light by each photodetector of the photodetector array and for causing the reading means to read detection data of each photodetector of the photodetector array. Detection data reading device in. 6. A moving means for moving an object to be measured in a predetermined direction, a projecting means for projecting light from a light source toward the object to be measured moving in the predetermined direction, and reflection by the object to be measured. A photodetector array for detecting the generated light by a plurality of photodetectors, and a reading means for reading the detection data of each photodetector of the photodetector array for each moving position of the measured object. In the object measuring device, which is configured to measure the object to be measured based on the read detection data for each moving position, between the light projecting unit and the object to be measured or the object to be measured. And a shutter unit that is provided between the photodetector and blocks light input to the photodetector array according to a closing command, and a closing command for the shutter unit is turned off, and the closing command is turned off. While the photo detector Reading detection data in a measuring device for an object, which is provided with control means for detecting light with each photodetector of a ray and for causing the reading means to read detection data of each photodetector of the photodetector array. apparatus. 7. A moving means for moving an object to be measured in a predetermined direction, a light projecting means for projecting light from a light source toward the object to be measured moving in the predetermined direction, and reflection by the object to be measured. A photodetector array for detecting the generated light by a plurality of photodetectors, and a reading means for reading the detection data of each photodetector of the photodetector array for each moving position of the measured object. In the object measuring device configured to measure the object to be measured based on the read detection data for each moving position, a movement stop for stopping the movement of the object to be measured in response to a stop command. Means for turning off the light source in response to an extinguishing command, and outputting a stop command to the movement stopping means, turning off the extinguishing command to the extinguishing means, outputting this stop command, and extinguishing Command While is off
An apparatus for measuring an object, comprising: control means for detecting light by each photodetector of the photodetector array and for causing the reading means to read detection data of each photodetector of the photodetector array. Detection data reading device in. 8. A moving means for moving an object to be measured in a predetermined direction, a light projecting means for projecting light from a light source toward the object to be measured moving in the predetermined direction, and reflection by the object to be measured. A photodetector array for detecting the generated light by a plurality of photodetectors, and a reading means for reading the detection data of each photodetector of the photodetector array for each moving position of the measured object. In an object measuring device configured to measure the object to be measured based on the read detection data for each moving position, an extinguishing means for extinguishing the light source according to an extinguishing command, and the extinguishing means A turn-off command to the means is turned off, and while the turn-off command is turned off, each photodetector of the photodetector array detects light, and the read-out means detects each photodetection of the photodetector array. The detection data of the vessel Detecting data reading device in the object of the measuring device and control means for causing the teeth.