JPH09143667A - Production of high temperature member made of rhenium - Google Patents

Production of high temperature member made of rhenium

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Publication number
JPH09143667A
JPH09143667A JP30288195A JP30288195A JPH09143667A JP H09143667 A JPH09143667 A JP H09143667A JP 30288195 A JP30288195 A JP 30288195A JP 30288195 A JP30288195 A JP 30288195A JP H09143667 A JPH09143667 A JP H09143667A
Authority
JP
Japan
Prior art keywords
mandrel
high temperature
member made
temperature member
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP30288195A
Other languages
Japanese (ja)
Inventor
Akira Fukushima
明 福島
Makoto Senda
誠 千田
Tsutomu Fujiwara
力 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP30288195A priority Critical patent/JPH09143667A/en
Publication of JPH09143667A publication Critical patent/JPH09143667A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a method for producing a high temp. member made of Re, capable of manufacturing a high quality, high temp. Re member suitable for various combustors, high temp. nozzles, etc., in a relatively short time at a low cost and also capable of facilitating the manufacture of large-size structures. SOLUTION: First, an Re or Re alloy film 2 is formed on the surface of a mandrel 1, having a shape fitted to the internal surface of the high temp. member to be produced, or on the surface of a thermal stress buffer layer formed on the mandrel, by thermal spraying. Then, the mandrel 1 or the mandrel 1 and the thermal stress buffer layer are removed, and the resultant member made of Re or Re alloy is subjected to heat treatment for improving strength characteristic.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は各種燃焼器や高温用
ノズルなどに好適なRe製高温部材の製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a high temperature member made of Re suitable for various combustors and high temperature nozzles.

【0002】[0002]

【従来の技術】ロケットエンジンの燃焼器などの各種燃
焼器や高温用ノズルなどに使用される高温部材には、高
い耐熱衝撃性(高温強度、高温延性)が要求され、これ
らの材料としては耐熱衝撃性に優れたReが使用れてい
る。従来、これらのRe製高温部材はCVD法(化学気
相成長法)により製造するのが一般的である。CVD法
によりRe製の燃焼器を製造するプロセスの概要を模式
的に示す説明図である図3により説明する。先ず、燃焼
器の内側の形状に合わせた形状のMo合金製などのマン
ドレル1を準備する。次いでマンドレル1の表面にCV
D法によりCVD法Re皮膜4を形成させる。その後、
マンドレル1を薬品により溶解させて除去することによ
りRe製の燃焼器を得ている。
2. Description of the Related Art High temperature shock resistance (high temperature strength, high temperature ductility) is required for high temperature members used in various combustors such as rocket engine combustors and high temperature nozzles. Re, which has excellent impact properties, is used. Conventionally, these Re-made high-temperature members are generally manufactured by the CVD method (chemical vapor deposition method). It will be described with reference to FIG. 3, which is an explanatory diagram schematically showing the outline of the process of manufacturing the Re combustor by the CVD method. First, a mandrel 1 made of Mo alloy or the like having a shape matching the shape of the inside of the combustor is prepared. Then CV on the surface of mandrel 1
The CVD method Re film 4 is formed by the D method. afterwards,
A combustor made of Re is obtained by dissolving and removing the mandrel 1 with a chemical.

【0003】[0003]

【発明が解決しようとする課題】前記の方法によれば、
耐熱衝撃性に優れたRe製高温部材を得ることができる
が、次のような問題点がある。すなわち (1)CVD法における蒸着速度は1時間当たり数10
〜数100μm程度であり、数mmの肉厚の高温部材を
形成するには数日〜数10日を必要とし、高コストの原
因となる。 (2)一般にCVD反応室は小型であり、大型構造物
(例えば直径70mm、長さ130mm程度の寸法の燃
焼室など)を入れることができず、大型構造物の製造は
困難である。
According to the above method,
Although it is possible to obtain a high temperature member made of Re having excellent thermal shock resistance, there are the following problems. That is, (1) the deposition rate in the CVD method is several tens per hour.
It is about several hundred μm, and several days to several tens days are required to form a high temperature member having a wall thickness of several mm, which causes a high cost. (2) Generally, the CVD reaction chamber is small, and a large structure (for example, a combustion chamber having a diameter of 70 mm and a length of about 130 mm) cannot be placed in the CVD reaction chamber, which makes it difficult to manufacture the large structure.

【0004】本発明は前記従来技術における問題点を解
決し、比較的短時間、低コストで高品質のRe製高温部
材を製造することができ、大型構造物の製造も容易なR
e製高温部材の製造方法を提供しようとするものであ
る。
The present invention solves the above-mentioned problems in the prior art, makes it possible to manufacture a high-quality Re-made high-temperature member in a relatively short time, at low cost, and to easily manufacture a large structure.
It is intended to provide a method for manufacturing a high temperature member made of e.

【0005】[0005]

【課題を解決するための手段】本発明は(1)製造する
高温部材の内表面に合わせた形状のマンドレルの表面に
溶射法によりRe又はRe合金の皮膜を形成させたのち
マンドレルを除去し、得られるRe又はRe合金からな
る部材に強度特性を向上させるための熱処理を施すこと
を特徴とするRe製高温部材の製造方法及び(2)製造
する高温部材の内表面に合わせた形状の、表面に熱応力
緩衝層を形成させたマンドレルの表面に溶射法によりR
e又はRe合金の皮膜を形成させたのち熱応力緩衝層を
含むマンドレルを除去し、得られるRe又はRe合金か
らなる部材に強度特性を向上させるための熱処理を施す
ことを特徴とするRe製高温部材の製造方法である。
Means for Solving the Problems The present invention comprises (1) removing a mandrel after forming a film of Re or Re alloy on the surface of a mandrel having a shape adapted to the inner surface of a high temperature member to be manufactured by a thermal spraying method, A method for producing a Re-made high temperature member, characterized by subjecting the obtained Re or Re alloy member to a heat treatment for improving strength characteristics, and (2) a surface having a shape adapted to the inner surface of the produced high-temperature member. R on the surface of the mandrel with the thermal stress buffer layer formed by thermal spraying
High temperature made of Re, characterized in that after forming a film of e or Re alloy, the mandrel including the thermal stress buffer layer is removed, and the resulting member made of Re or Re alloy is subjected to heat treatment for improving strength characteristics. It is a manufacturing method of a member.

【0006】本発明のRe製高温部材の製造方法は、特
にロケットエンジンの燃焼器などの各種燃焼器の製造方
法として好適なものである。
The method for producing a Re-made high temperature member of the present invention is particularly suitable as a method for producing various combustors such as a rocket engine combustor.

【0007】本発明の方法におけるRe皮膜の材質とし
ては、純Re金属以外にも、Moを最大60重量%添加
したRe−Mo合金やWを最大60重量%添加したRe
−W合金などのRe合金を使用することができる。
As the material of the Re coating in the method of the present invention, in addition to pure Re metal, a Re-Mo alloy containing up to 60% by weight of Mo or an up to 60% by weight of W is added.
Re alloys such as -W alloys can be used.

【0008】また、マンドレルの材質としては低熱膨張
率で、かつ塩酸等の薬品で溶出させることができる金属
であることが必要であり、例えばFe−30〜40wt
%Ni、Fe−30〜40wt%Ni−5〜10wt%
Co、純Moなどが使用できる。
The material of the mandrel must be a metal having a low coefficient of thermal expansion and capable of being eluted with a chemical such as hydrochloric acid. For example, Fe-30 to 40 wt.
% Ni, Fe-30 to 40 wt% Ni-5 to 10 wt%
Co, pure Mo, etc. can be used.

【0009】本発明の方法においては、溶射法によりR
e皮膜を形成させるので皮膜形成速度が1時間当たり1
〜5mmとなり、数mmの肉厚の部材の形成が1時間程
度で可能となる。また、直径200mm、長さ300m
m程度の大型構造物の製造も可能である。
In the method of the present invention, R
e The film is formed, so the film formation rate is 1 per hour.
The thickness is up to 5 mm, and a member having a thickness of several mm can be formed in about 1 hour. Also, diameter 200 mm, length 300 m
It is also possible to manufacture a large structure of about m.

【0010】溶射法としては高融点のReを溶かす必要
があることからプラズマ溶射法が好ましく、また、材料
中への不純物の混入は材料特性(延性)を大きく悪化さ
せることから、不活性雰囲気中での溶射が好ましい。そ
のため、本発明の方法における溶射法としては低圧プラ
ズマ溶射法(LPPS)が最適である。
As the thermal spraying method, the plasma thermal spraying method is preferable because it is necessary to melt Re having a high melting point. Further, since the incorporation of impurities into the material greatly deteriorates the material characteristics (ductility), the plasma spraying method is performed in an inert atmosphere. Thermal spraying is preferred. Therefore, the low pressure plasma spraying method (LPPS) is optimal as the spraying method in the method of the present invention.

【0011】なお、溶射皮膜は一般に欠陥を内在するこ
とが多く、必ずしも十分な強度特性を示さない。また、
層状組織となっているため層間剥離が起こりやすい。こ
のことは、従来Re製高温部材の製造に溶射法が実用化
されていなかった一因でもある。本発明においては、溶
射による皮膜の形成後、適切な熱処理を施すことによ
り、皮膜内で再結晶を生じさせ、組織を均一化させると
ともにその強度特性(引張強さ、伸び等)を向上させる
点に特徴がある。
In general, thermal spray coatings often have defects therein and do not always exhibit sufficient strength characteristics. Also,
Due to the layered structure, delamination is likely to occur. This is also one reason why the thermal spraying method has not been put to practical use in the manufacture of Re high temperature members. In the present invention, after forming a film by thermal spraying, by performing an appropriate heat treatment, recrystallization is caused in the film to homogenize the structure and improve its strength characteristics (tensile strength, elongation, etc.). Is characterized by.

【0012】熱処理の最適条件は皮膜の材質、厚み等に
より異なるが、一般的には1300〜1800℃の温度
で0.5〜6時間程度保持すればよい。また、マンドレ
ルを除去する前に熱処理を行うとマンドレルの材料と溶
射材料の間で反応が生じたり、両者の熱膨張差により割
れが生じるといった不具合を起こすおそれがあるので、
熱処理はマンドレルの除去後に行うのが好ましい。
The optimum conditions for the heat treatment vary depending on the material and thickness of the film, but generally the temperature should be maintained at 1300 to 1800 ° C. for 0.5 to 6 hours. Also, if heat treatment is performed before removing the mandrel, a reaction may occur between the material of the mandrel and the thermal spray material, or there may be a problem that cracks may occur due to the difference in thermal expansion between the two,
The heat treatment is preferably performed after removing the mandrel.

【0013】なお、肉厚(例えば1.5mm以上)の高
温部材を製造する場合には、低温プラズマ溶射中に熱応
力により皮膜に割れが生じることがある。これを防止す
るために低熱膨張率の金属からなるマンドレルとRe溶
射皮膜との間に熱応力緩衝層を設けるのが有効である。
When manufacturing a high temperature member having a wall thickness (for example, 1.5 mm or more), cracks may occur in the coating due to thermal stress during low temperature plasma spraying. In order to prevent this, it is effective to provide a thermal stress buffer layer between the mandrel made of a metal having a low coefficient of thermal expansion and the Re thermal spray coating.

【0014】熱応力緩和層を形成させる材料としては柔
らかい金属であることが必要であり、例えばCu、Ni
などが使用できる。この熱応力緩和層の厚みは0.5〜
3mm程度でよい。
The material for forming the thermal stress relaxation layer needs to be a soft metal, such as Cu or Ni.
Etc. can be used. The thickness of this thermal stress relaxation layer is 0.5 to
It may be about 3 mm.

【0015】[0015]

【発明の実施の形態】次に本発明の方法について、その
実施態様を示す図面を参照して説明する。図1は前記
(1)の発明の方法によりRe製の燃焼器を製造するプ
ロセスを模式的に示す説明図である。この実施態様にお
いては、先ず燃焼器の内表面の形状に合わせた形状の低
熱膨張合金製のマンドレル1を準備する。このマンドレ
ル1の表面をブラスト処理したのち、低圧プラズマ溶射
により表面にRe溶射皮膜2を形成させる。次に塩酸等
の薬品によりマンドレル1を溶出させ、Re溶射皮膜2
のみからなる構造体を得る。得られた構造体を真空炉若
しくは水素炉中で、例えば1400℃で2時間程度の熱
処理を施して、内部欠陥を消滅させるとともに再結晶に
より微細結晶を析出させ、材質を高強度化、高延性化す
る。
BEST MODE FOR CARRYING OUT THE INVENTION Next, the method of the present invention will be described with reference to the drawings showing the embodiments thereof. FIG. 1 is an explanatory view schematically showing a process of manufacturing a Re-made combustor by the method of the invention (1). In this embodiment, first, a mandrel 1 made of a low thermal expansion alloy having a shape matching the shape of the inner surface of the combustor is prepared. After blasting the surface of the mandrel 1, a Re sprayed coating 2 is formed on the surface by low pressure plasma spraying. Next, the mandrel 1 is eluted with a chemical such as hydrochloric acid, and the Re sprayed coating 2
Get a structure consisting of only. The obtained structure is subjected to heat treatment at, for example, 1400 ° C. for about 2 hours in a vacuum furnace or a hydrogen furnace to eliminate internal defects and to precipitate fine crystals by recrystallization to increase the material strength and ductility. Turn into.

【0016】この方法は肉薄(例えば1mm程度の肉
厚)のRe製燃焼器の製造に適しており、使用時の内部
圧力が比較的低圧な場合などに、極力軽量化したRe製
燃焼器を低コストで供給することができる。
This method is suitable for manufacturing a thin-walled Re combustor (for example, a wall thickness of about 1 mm). When the internal pressure during use is relatively low, a Re-combustor that is as light as possible is used. It can be supplied at low cost.

【0017】図2は前記(2)の発明の方法によりRe
製の燃焼器を製造するプロセスを模式的に示す説明図で
ある。この実施態様においては、先ず低熱膨張合金製の
マンドレル1を準備する。このマンドレル1の表面をブ
ラスト処理したのち、低圧プラズマ溶射により表面に熱
応力緩衝層としてのCu皮膜3を形成させる。次に必要
に応じて、機械加工によりこのCu皮膜3の表面を燃焼
器の形状に合わせて切削仕上げしたのち、低圧プラズマ
溶射により表面にRe溶射皮膜2を形成させる。次に塩
酸等の薬品によりマンドレル1とCu皮膜3を溶出さ
せ、Re溶射皮膜2のみからなる構造体を得る。得られ
た構造体を前記図1の態様の場合と同じく真空炉若しく
は水素炉中で、例えば1400℃で2時間程度の熱処理
を施して、内部欠陥を消滅させるとともに再結晶により
微細結晶を析出させ、材質を高強度化、高延性化する。
FIG. 2 shows Re by the method of the invention of (2) above.
It is explanatory drawing which shows typically the process of manufacturing the combustor made from. In this embodiment, first, a mandrel 1 made of a low thermal expansion alloy is prepared. After blasting the surface of the mandrel 1, a Cu coating 3 as a thermal stress buffer layer is formed on the surface by low pressure plasma spraying. Next, if necessary, the surface of the Cu coating 3 is cut and finished according to the shape of the combustor by machining, and then the Re sprayed coating 2 is formed on the surface by low pressure plasma spraying. Next, the mandrel 1 and the Cu coating 3 are eluted with a chemical such as hydrochloric acid to obtain a structure consisting only of the Re sprayed coating 2. As in the case of the embodiment shown in FIG. 1, the obtained structure is subjected to heat treatment in a vacuum furnace or a hydrogen furnace at, for example, 1400 ° C. for about 2 hours to eliminate internal defects and precipitate fine crystals by recrystallization. To increase the strength and ductility of the material.

【0018】この態様の方法では、マンドレルとRe溶
射皮膜との間に応力緩和層を設けているので、厚肉構造
としても割れを生じることはないので、5mm程度まで
の厚肉とすることができ、高い内部圧力での使用が可能
な高効率の燃焼器を低コストで供給することができる。
In the method of this aspect, since the stress relaxation layer is provided between the mandrel and the Re sprayed coating, cracks do not occur even in a thick wall structure, so the wall thickness can be up to about 5 mm. It is possible to supply a highly efficient combustor that can be used at high internal pressure at low cost.

【0019】[0019]

【実施例】次に実施例により本発明の方法をさらに具体
的に説明するが、本発明はの実施例に限定されるもので
はない。本発明の方法により図1、2に示す形状(製品
としての大きさは高さ130mm、入口部直径42m
m、スロート部直径26mm、スカート部直径71m
m)の燃焼器を作製した。作製方法は次のとおりであ
る。Fe−36wt%Niのマンドレルに低温プラズマ
溶射により厚さ1mmのCuからなる熱応力緩和層を形
成させた。次にこの熱応力緩和層の上に低温プラズマ溶
射により厚さ2mmの純Re皮膜を形成させたのち、塩
酸を用いてマンドレル及びCu層を溶出させて除去して
Re製の構造体を得た。この構造体を1400℃で2時
間保持して熱処理し、Re製の燃焼器を得た。熱処理前
後における製品の強度及び延性を測定した結果は表1の
とおりであり、熱処理により特性が改善され、高強度、
高延性のRe製燃焼器が得られていることがわかる。
EXAMPLES Next, the method of the present invention will be described in more detail by way of examples, but the present invention is not limited to the examples. By the method of the present invention, the shape shown in FIGS.
m, throat diameter 26 mm, skirt diameter 71 m
The combustor of m) was produced. The manufacturing method is as follows. A thermal stress relaxation layer of Cu having a thickness of 1 mm was formed on a Fe-36 wt% Ni mandrel by low temperature plasma spraying. Then, a 2 mm-thick pure Re film was formed on this thermal stress relaxation layer by low temperature plasma spraying, and then the mandrel and the Cu layer were eluted and removed using hydrochloric acid to obtain a structure made of Re. . This structure was held at 1400 ° C. for 2 hours for heat treatment to obtain a Re combustor. The results of measuring the strength and ductility of the product before and after the heat treatment are shown in Table 1, and the characteristics are improved by the heat treatment, and the high strength,
It can be seen that a Re-combustor with high ductility is obtained.

【0020】[0020]

【表1】 [Table 1]

【0021】[0021]

【発明の効果】本発明の方法によれば次のような効果が
ある。 (1)皮膜形成速度が速いので、低コストでの製造が可
能となり、大型構造物の製造も容易である。 (2)溶射後の熱処理により組織制御が可能であり、高
強度、高延性の特性を有する高品質の構造物を得ること
ができる。
According to the method of the present invention, the following effects can be obtained. (1) Since the film formation rate is high, it is possible to manufacture at a low cost, and it is easy to manufacture a large structure. (2) The structure can be controlled by heat treatment after thermal spraying, and a high-quality structure having high strength and high ductility can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の1実施態様によるRe製高温部材の製
造プロセスを模式的に示す説明図。
FIG. 1 is an explanatory view schematically showing a manufacturing process of a Re-made high temperature member according to one embodiment of the present invention.

【図2】本発明の他の実施態様によるRe製高温部材の
製造プロセスを模式的に示す説明図。
FIG. 2 is an explanatory view schematically showing a manufacturing process of a Re-made high temperature member according to another embodiment of the present invention.

【図3】従来のCVD法によるRe製高温部材の製造プ
ロセスを模式的に示す説明図。
FIG. 3 is an explanatory view schematically showing a manufacturing process of a Re-made high temperature member by a conventional CVD method.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 藤原 力 愛知県名古屋市港区大江町10番地 三菱重 工業株式会社名古屋航空宇宙システム製作 所内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Riki Fujiwara 10 Oemachi, Minato-ku, Nagoya, Aichi Mitsubishi Heavy Industries, Ltd. Nagoya Aerospace Systems Works

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 製造する高温部材の内表面に合わせた形
状のマンドレルの表面に溶射法によりRe又はRe合金
の皮膜を形成させたのちマンドレルを除去し、得られる
Re又はRe合金からなる部材に強度特性を向上させる
ための熱処理を施すことを特徴とするRe製高温部材の
製造方法。
1. A member made of Re or Re alloy obtained by forming a coating film of Re or Re alloy on the surface of a mandrel having a shape adapted to the inner surface of a high temperature member to be manufactured and then removing the mandrel. A method of manufacturing a high temperature member made of Re, which comprises performing a heat treatment for improving strength characteristics.
【請求項2】 製造する高温部材の内表面に合わせた形
状の、表面に熱応力緩衝層を形成させたマンドレルの表
面に溶射法によりRe又はRe合金の皮膜を形成させた
のち熱応力緩衝層を含むマンドレルを除去し、得られる
Re又はRe合金からなる部材に強度特性を向上させる
ための熱処理を施すことを特徴とするRe製高温部材の
製造方法。
2. A thermal stress buffer layer after forming a film of Re or Re alloy by a thermal spraying method on the surface of a mandrel having a thermal stress buffer layer formed on the surface of a high temperature member to be manufactured. A method for producing a high temperature member made of Re, characterized in that the mandrel containing is removed, and the obtained member made of Re or Re alloy is subjected to heat treatment for improving strength characteristics.
【請求項3】 前記Re製高温部材が燃焼器であること
を特徴とする請求項1又は2に記載のRe製高温部材の
製造方法。
3. The method for producing a high temperature member made of Re according to claim 1, wherein the high temperature member made of Re is a combustor.
JP30288195A 1995-11-21 1995-11-21 Production of high temperature member made of rhenium Withdrawn JPH09143667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30288195A JPH09143667A (en) 1995-11-21 1995-11-21 Production of high temperature member made of rhenium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30288195A JPH09143667A (en) 1995-11-21 1995-11-21 Production of high temperature member made of rhenium

Publications (1)

Publication Number Publication Date
JPH09143667A true JPH09143667A (en) 1997-06-03

Family

ID=17914233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30288195A Withdrawn JPH09143667A (en) 1995-11-21 1995-11-21 Production of high temperature member made of rhenium

Country Status (1)

Country Link
JP (1) JPH09143667A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997048601A3 (en) * 1996-06-06 1998-04-09 Allied Signal Inc Method for making a rhenium rocket nozzle
JP2004214194A (en) * 2002-12-27 2004-07-29 General Electric Co <Ge> Sealing tube material for high pressure short-arc discharge lamp
EP1449937A1 (en) * 2001-10-31 2004-08-25 Japan Science and Technology Agency Re ALLOY COATING FOR DIFFUSION BARRIER
WO2005068685A1 (en) * 2004-01-15 2005-07-28 Ebara Corporation Alloy coating for diffusion barrier, method for forming same, and high-temperature device member
US7060368B2 (en) 2001-10-31 2006-06-13 Japan Science And Technology Agency ReCr alloy coating for diffusion barrier
US7192655B2 (en) 2001-10-31 2007-03-20 Japan Science And Technology Agency ReCrNi alloy coating for diffusion barrier
JP2007521395A (en) * 2003-09-26 2007-08-02 ドヴォラック,ミヒャエル Method of coating a substrate surface using a plasma beam

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997048601A3 (en) * 1996-06-06 1998-04-09 Allied Signal Inc Method for making a rhenium rocket nozzle
EP1449937A1 (en) * 2001-10-31 2004-08-25 Japan Science and Technology Agency Re ALLOY COATING FOR DIFFUSION BARRIER
EP1449937A4 (en) * 2001-10-31 2004-11-24 Japan Science & Tech Agency Re ALLOY COATING FOR DIFFUSION BARRIER
US7060368B2 (en) 2001-10-31 2006-06-13 Japan Science And Technology Agency ReCr alloy coating for diffusion barrier
US7192655B2 (en) 2001-10-31 2007-03-20 Japan Science And Technology Agency ReCrNi alloy coating for diffusion barrier
US7205053B2 (en) 2001-10-31 2007-04-17 Japan Science And Technology Agency Re alloy coating for diffusion barrier
JP2004214194A (en) * 2002-12-27 2004-07-29 General Electric Co <Ge> Sealing tube material for high pressure short-arc discharge lamp
JP2007521395A (en) * 2003-09-26 2007-08-02 ドヴォラック,ミヒャエル Method of coating a substrate surface using a plasma beam
WO2005068685A1 (en) * 2004-01-15 2005-07-28 Ebara Corporation Alloy coating for diffusion barrier, method for forming same, and high-temperature device member
JPWO2005068685A1 (en) * 2004-01-15 2007-09-06 株式会社荏原製作所 Alloy film for diffusion barrier, method for producing the same, and high temperature apparatus member
US7851070B2 (en) 2004-01-15 2010-12-14 National University Corporation Hokkaido University Diffusion barrier alloy film and high-temperature apparatus member
JP4753720B2 (en) * 2004-01-15 2011-08-24 株式会社荏原製作所 Alloy film for diffusion barrier, method for producing the same, and high temperature apparatus member

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