JPH09129141A - Metal oxide thin film forming coating agent - Google Patents

Metal oxide thin film forming coating agent

Info

Publication number
JPH09129141A
JPH09129141A JP7309825A JP30982595A JPH09129141A JP H09129141 A JPH09129141 A JP H09129141A JP 7309825 A JP7309825 A JP 7309825A JP 30982595 A JP30982595 A JP 30982595A JP H09129141 A JPH09129141 A JP H09129141A
Authority
JP
Japan
Prior art keywords
organic acid
coating agent
thin film
oxide thin
metal oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7309825A
Other languages
Japanese (ja)
Inventor
Kazuki Takatani
和樹 高谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinto Paint Co Ltd
Original Assignee
Shinto Paint Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinto Paint Co Ltd filed Critical Shinto Paint Co Ltd
Priority to JP7309825A priority Critical patent/JPH09129141A/en
Publication of JPH09129141A publication Critical patent/JPH09129141A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a coating agent which is easy to apply, and by which it is possible to form a dielectric protective film having an excellent transparency and film thickness as the panel characteristics of a plasma display panel by using both the coating agent composed of organic acid metal salt, solvent, a thickener and an organic substance, and a specified compound. SOLUTION: A coating agent for forming a metal oxide thin film contains an addition agent composed of the organic acid metal salts of alkaline earth metal and/or rare earth metal, solvent, a thickener and an organic substance, and a polyhydric alcohol derivative, organic acid of C1to6 , and amine are used together therewith. The coating agent is formed into a metal oxide thin film by an application heat decomposition method. As the organic acid metal salt, it is desirable that the single organic acid metal salt of Mg, Ba, or Sr, or mixture of two or more of them are used together with one or two or more of the organic acid metal salts of Ca or the rare earth metal.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、カラープラズマディス
プレイパネルの透明な誘電体保護膜を、塗布熱分解法に
より形成するための、金属酸化物薄膜形成用コーティン
グ剤(以下、コーティング剤)に関するものである。
FIELD OF THE INVENTION The present invention relates to a coating agent for forming a metal oxide thin film (hereinafter referred to as a coating agent) for forming a transparent dielectric protective film of a color plasma display panel by a coating pyrolysis method. Is.

【0002】[0002]

【従来の技術】従来より、AC型のプラズマディスプレ
イパネル(以下、PDP)において、放電電極の保護、
及び放電開始電圧及び放電維持電圧を低減のため、アル
カリ土類金属酸化物からなる誘電体保護膜で電極を覆う
ことが行われている。
2. Description of the Related Art Conventionally, in an AC type plasma display panel (hereinafter referred to as PDP), protection of discharge electrodes,
In order to reduce the discharge start voltage and the discharge sustaining voltage, the electrodes are covered with a dielectric protective film made of an alkaline earth metal oxide.

【0003】フルカラーAC型面放電反射型PDPの誘
電体保護膜は前面ガラスに形成されるため、特に透明性
と電気特性の優れたものが必要である。そのためその保
護膜は蒸着法で形成されているが、高価で複雑な設備が
必要であり、さらに生産性が悪いため経済的な問題があ
る。
Since the dielectric protective film of the full-color AC type surface discharge reflection type PDP is formed on the front glass, it is necessary to have particularly excellent transparency and electric characteristics. Therefore, the protective film is formed by the vapor deposition method, but it is expensive and requires complicated equipment, and the productivity is poor, so that there is an economical problem.

【0004】そのため高価で複雑な装置の必要がなく、
しかも簡単な工程で誘電体保護膜を形成できる方法とし
て塗布熱分解法があり、具体例としては例えば有機溶剤
に可溶なアルカリ土類金属化合物を含有する、透明皮膜
形成用ペースト(特開昭58−135155号公報)、
アルカリ土類金属含有有機化合物を誘電体に塗布熱分解
して金属酸化物から成る保護層を形成する、誘電体保護
層の形成方法(特開平6−162920号公報)、誘電
体層にMgなどの金属アルコキシドを塗布熱分解し、金
属酸化物保護膜を被覆したPDP(特開平6−2203
72号公報)、アルカリ金属酸化物粒子と、Al,S
i、Ti、Zrなど金属有機化合物からなる誘電体保護
剤(特開平6−316671号公報)、AC型PDPの
陰極及び誘電体層を金属酸化物保護膜で被覆するように
したPDP(特開平7−14516号公報)など多数が
提案されている。
Therefore, there is no need for expensive and complicated equipment,
Moreover, there is a coating pyrolysis method as a method of forming a dielectric protective film in a simple process, and a specific example is a paste for forming a transparent film containing an alkaline earth metal compound soluble in an organic solvent (Japanese Patent Laid-Open No. SHO11-96, 58-135155),
A method for forming a dielectric protective layer (Japanese Patent Laid-Open No. Hei 6-162920), in which an organic compound containing an alkaline earth metal is applied to a dielectric and pyrolyzed to form a protective layer made of a metal oxide, and Mg or the like is applied to the dielectric layer. PDP coated with a metal alkoxide and thermally decomposed to cover a metal oxide protective film (Japanese Patent Laid-Open No. 6-2203).
72), alkali metal oxide particles, Al, S
A dielectric protective agent composed of a metal organic compound such as i, Ti, and Zr (JP-A-6-31667), a cathode of an AC type PDP, and a PDP in which a dielectric layer is covered with a metal oxide protective film (JP-A-6-31970). 7-14516) has been proposed.

【0005】[0005]

【発明が解決しようとする課題】しかしながら上述した
従来技術において、アルカリ土類金属の有機酸金属塩、
或いは金属アルコキシドを誘電体保護膜前駆体に用いた
場合、金属酸化物薄膜を形成することが可能であるが、
形成された均一で透明な膜の膜厚は0.3μm以下であ
り、その膜は誘電体との付着性が悪い。また膜厚を0.
3μm以上にすると不均一で不透明な膜を形成するため
実用上の問題がある。
However, in the above-mentioned prior art, organic acid metal salt of alkaline earth metal,
Alternatively, when a metal alkoxide is used as a dielectric protective film precursor, it is possible to form a metal oxide thin film,
The thickness of the formed uniform and transparent film is 0.3 μm or less, and the film has poor adhesion to the dielectric. Moreover, the film thickness is set to 0.
If the thickness is 3 μm or more, a non-uniform and opaque film is formed, which is a practical problem.

【0006】本発明の目的は、塗布熱分解法により、金
属酸化物薄膜を誘電体に形成する、有機金属酸金属塩
と、それを溶解する溶剤、増粘剤及び有機物からなる添
加剤とを含有するコーティング剤において、塗布し易
く、PDPのパネル特性として、実用上望ましい透明性
と膜厚を有する、誘電体保護膜を形成できるコーティン
グ剤を提供することにある。
An object of the present invention is to provide an organic metal acid metal salt for forming a metal oxide thin film on a dielectric by a coating pyrolysis method, and an additive composed of a solvent, a thickener and an organic substance for dissolving it. It is an object of the present invention to provide a coating agent that can be easily applied and has a practically desirable transparency and film thickness as a panel property of a PDP, which can form a dielectric protective film.

【0007】[0007]

【課題を解決するための手段】本発明は目的を達成する
ため、アルカリ土類金属及び又は稀土類金属の有機酸塩
を溶解する溶剤として、多価アルコール誘導体を他の溶
剤と共に用い、さらに炭素数1〜6の有機酸及びアミン
を併用し、増粘剤と溶剤を用い、スクリーン印刷、スピ
ンコート、ディッピング、或いはスプレイなどの方法で
塗布し易い粘度に粘度調整することにより透明なMgO
薄膜の前駆体にすることができ、そのコーティング剤を
塗布乾燥後、350〜600℃で焼成することにより、
PDPのパネル特性として、実用上望ましい透明性と膜
厚を有する、誘電体保護膜を形成できることを見いだし
たものである。
In order to achieve the object, the present invention uses a polyhydric alcohol derivative together with other solvent as a solvent for dissolving an organic acid salt of an alkaline earth metal and / or a rare earth metal, and further Transparent MgO is prepared by using organic acids and amines of the formulas 1 to 6 together, using a thickener and a solvent, and adjusting the viscosity to a viscosity that is easy to apply by a method such as screen printing, spin coating, dipping, or spraying.
It can be used as a precursor of a thin film, and by coating and drying the coating agent, baking at 350 to 600 ° C.
As a panel property of the PDP, it was found that a dielectric protective film having practically desirable transparency and film thickness can be formed.

【0008】すなわち本発明は、アルカリ土類金属、及
び又は稀土類金属の有機酸金属塩、溶剤、増粘剤及び有
機物からなる添加剤を含有する金属酸化物薄膜形成用コ
ーティング剤であって、多価アルコール誘導体、炭素数
1〜6の有機酸及びアミンを併用することを特徴とす
る、塗布熱分解法により金属酸化物薄膜を形成する、金
属酸化物薄膜形成用コーティング剤である。
That is, the present invention is a coating agent for forming a metal oxide thin film, which comprises an organic acid metal salt of an alkaline earth metal and / or a rare earth metal, a solvent, a thickener and an additive made of an organic substance, A coating agent for forming a metal oxide thin film for forming a metal oxide thin film by a coating thermal decomposition method, which comprises using a polyhydric alcohol derivative, an organic acid having 1 to 6 carbon atoms and an amine together.

【0009】本発明によれば、有機酸金属塩、溶剤、増
粘剤及び添加剤はそれぞれ有機物であり、これら有機成
分はコーティング剤を塗布乾燥、或いは焼成させた際に
気化或いは熱分解して雰囲気中へと散逸する。従ってコ
ーティング剤の塗布乾燥及び焼成により金属と有機成分
とに分解し、その後の加熱による酸化で光透過率の高い
透明な金属酸化物薄膜が形成される。
According to the present invention, the organic acid metal salt, the solvent, the thickener and the additive are organic substances, and these organic components are vaporized or thermally decomposed when the coating agent is applied and dried or baked. Dissipates into the atmosphere. Therefore, the coating agent is decomposed into a metal and an organic component by coating and drying and baking, and the subsequent oxidation by heating forms a transparent metal oxide thin film having a high light transmittance.

【0010】本発明におけるアルカリ土類金属及び又は
稀土類金属の有機酸金属塩を溶液とするための溶剤は、
これらのみに限定されないが、例えばキシレン、トルエ
ン、イソプロピルアルコール、メチルイソブチルケト
ン、酢酸ブチル、ブチルカービトール、ミネラルスピリ
ット、シクロヘキサン、シクロヘキサノンなどの溶剤
を、単独或いは複数のものを併用し用いることが可能で
あるが、その溶液と増粘剤を組み合わせて塗布し易いコ
ーティング剤とし、塗布乾燥後350〜600℃で1〜
30分焼成しても、誘電体と付着性の良い透明な金属酸
化物薄膜は形成出来ない。
The solvent for dissolving the organic acid metal salt of alkaline earth metal and / or rare earth metal in the present invention into a solution is
Although not limited to these, for example, xylene, toluene, isopropyl alcohol, methyl isobutyl ketone, butyl acetate, butyl carbitol, mineral spirits, cyclohexane, cyclohexanone, and the like solvents can be used alone or in combination. However, the solution and thickener are combined to form a coating agent that is easy to apply.
Even if baked for 30 minutes, a transparent metal oxide thin film having good adhesion to the dielectric cannot be formed.

【0011】しかし、アルカリ土類金属及び又は稀土類
金属の有機酸金属塩を、本発明の多価アルコール誘導
体、例えばブチルカービトール、カービトール、メチル
カービトール、ブチルセロソルブ、セロソルブ、メチル
セロソルブ、エチレングリコール、ジエチレングリコー
ルなどを単独或いは1種類以上併用、或いは他の溶剤と
併用して溶解した溶液に、炭素数1〜6の有機酸0.1
〜30%(コーティング剤中の重量%)とアミン0.1
〜10%(コーティング剤中の重量%)を添加し、さら
に増粘剤でスクリーン印刷、スピンコート、ディッピン
グ、或いはスプレイなどの方法で塗布し易い粘度に粘度
調整することにより、誘電体に塗布後熱分解することに
より、誘電体と付着性が良く、均一で透明な薄膜を形成
するコーティング剤とすることが出来る。それら有機酸
金属塩溶液、炭素数1〜6の有機酸、アミン及び増粘剤
の混合の仕方に制限は無く、コーティング剤の調製過程
で必要量を単に混合するのみで良い。
However, an organic acid metal salt of an alkaline earth metal and / or a rare earth metal is added to the polyhydric alcohol derivative of the present invention, such as butyl carbitol, carbitol, methyl carbitol, butyl cellosolve, cellosolve, methyl cellosolve, ethylene glycol. A solution of diethylene glycol or the like, alone or in combination of one or more, or in combination with another solvent, is added to a solution of 0.1 to 6 carbon atoms of an organic acid.
~ 30% (weight% in coating agent) and amine 0.1
After applying 10% (% by weight in the coating agent), and further adjusting the viscosity with a thickener to a viscosity that makes it easy to apply by a method such as screen printing, spin coating, dipping, or spraying, after applying it to the dielectric By thermally decomposing, it is possible to obtain a coating agent that has good adhesion to the dielectric and forms a uniform and transparent thin film. There is no limitation on the method of mixing the organic acid metal salt solution, the organic acid having 1 to 6 carbon atoms, the amine and the thickener, and it is sufficient to simply mix the necessary amounts in the process of preparing the coating agent.

【0012】また本発明では有機酸金属塩1種又は2種
以上混合して使用できるが、特にMg、Ba、Srの有
機酸金属塩1種類、或いは2種以上と、Ca或いは稀土
類金属の有機酸金属塩1種、或いは2種類以上を混合し
て使用したとき、Mg、Ba、Srを主体とした金属酸
化物薄膜の物理強度を上げ、誘電体との付着性を良くす
ることが出来る。
In the present invention, one or more kinds of organic acid metal salts can be mixed and used. Particularly, one or more kinds of organic acid metal salts of Mg, Ba and Sr and Ca or rare earth metal are used. When one kind or a mixture of two or more kinds of organic acid metal salts is used, the physical strength of the metal oxide thin film mainly composed of Mg, Ba and Sr can be increased and the adhesion to the dielectric can be improved. .

【0013】本発明のコーティング剤に用いる有機酸金
属塩を形成している有機酸の種類としては、生成した有
機酸金属塩が有機溶剤に溶解するものであれば特に制限
は無いが、例えばカプロン酸、カプリル酸、カプリン
酸、オクチル酸、セカノイック酸、ネオデカン酸、ネオ
ヘプタン酸、ネオノナン酸、N−ヘプタノイック酸、ナ
フテン酸、トール油脂肪酸などを単独或いは2種類以上
を併用して有機酸金属塩を反応して作製したものが望ま
しい。しかし炭素数6以下の有機酸例えば酢酸、プロピ
オン酸などを炭素数7以上のものに混合して作製した有
機酸金属塩を用いたものも使用可能である。また平均炭
素数が6以下の有機酸を出発原料にした有機酸金属塩
は、溶剤に対する溶解性が劣るため単独で用いることは
困難であるが、他の有機酸金属塩に溶解する範囲で使用
しても差し支えない。
The type of the organic acid forming the organic acid metal salt used in the coating agent of the present invention is not particularly limited as long as the formed organic acid metal salt can be dissolved in an organic solvent. For example, capron. Acid, caprylic acid, capric acid, octylic acid, secanoic acid, neodecanoic acid, neoheptanoic acid, neononanoic acid, N-heptanoic acid, naphthenic acid, tall oil fatty acid, etc. alone or in combination of two or more kinds of organic acid metal salts Those produced by reaction are preferable. However, an organic acid metal salt prepared by mixing an organic acid having 6 or less carbon atoms, such as acetic acid or propionic acid, with one having 7 or more carbon atoms can also be used. Further, an organic acid metal salt obtained by using an organic acid having an average carbon number of 6 or less as a starting material is difficult to use alone because it has poor solubility in a solvent, but is used within a range in which it is soluble in other organic acid metal salts. It doesn't matter.

【0014】また本発明で用いる溶剤としては、ブチル
カービトール、カービトール、メチルカービトール、ブ
チルセロソルブ、セロソルブ、メチルセロソルブ、エチ
レングリコール、ジエチレングリコールなどのような多
価アルコール誘導体の他に、これらと均一に混合し有機
酸金属塩が溶解するものであれば特に制限はなく、キシ
レン、トルエン、イソプロピルアルコール、メチルイソ
ブチルケトン、酢酸ブチル、ブチルカービトールアセテ
ート、ミネラルスピリットなどの溶剤複数のものを併用
することが好ましい。
As the solvent used in the present invention, a polyhydric alcohol derivative such as butyl carbitol, carbitol, methyl carbitol, butyl cellosolve, cellosolve, methyl cellosolve, ethylene glycol, diethylene glycol, etc., or a homogeneous mixture thereof can be used. There is no particular limitation as long as the organic acid metal salt can be dissolved, and it is preferable to use a plurality of solvents such as xylene, toluene, isopropyl alcohol, methyl isobutyl ketone, butyl acetate, butyl carbitol acetate, mineral spirits in combination. .

【0015】本発明で用いる炭素数1〜6の有機酸とし
ては、蟻酸、酢酸、プロピオン酸、ペンタン酸、ヘキサ
ン酸、ヘプタン酸、アクリル酸など有機酸金属塩に用い
る有機酸より炭素数の少ないものが望ましく、それらは
一種類単独或いは複数のものを併用することが可能であ
る。全使用量はコーティング剤に対し0.1〜30%重
量%、好ましくは2〜8重量%の範囲で用いることが望
ましい。またこれら有機酸すなわち炭素数1〜6の有機
酸の代わりに、それら有機酸のアルカリ土類金属或いは
稀土類金属塩の状態で用いることも可能である。その場
合用いる量は、炭素数1〜6の有機酸金属塩を構成する
有機成分換算で、コーティング剤に対し0.1〜30重
量%用いることが望ましい。
The organic acid having 1 to 6 carbon atoms used in the present invention has a smaller carbon number than the organic acid used for the organic acid metal salt such as formic acid, acetic acid, propionic acid, pentanoic acid, hexanoic acid, heptanoic acid and acrylic acid. It is preferable to use one type, and it is possible to use one type alone or a plurality of types in combination. It is desirable that the total amount used is in the range of 0.1 to 30% by weight, preferably 2 to 8% by weight, based on the coating agent. Further, instead of these organic acids, that is, organic acids having 1 to 6 carbon atoms, it is also possible to use them in the state of alkaline earth metal or rare earth metal salts of these organic acids. In that case, the amount used is preferably 0.1 to 30% by weight based on the coating agent, in terms of the organic component constituting the organic acid metal salt having 1 to 6 carbon atoms.

【0016】本発明で用いるアミンとしては、有機酸金
属塩溶液の表面張力を低下させるものであればこれらの
みに限定されるものではないが、アリルアミン、ジアリ
ルアミン、トリアリルアミン、イソプロピルアミン、ジ
イソプロピルアミン、イミノビスプロピルアミン、エチ
ルアミン、ジエチルアミン、トリエチルアミン、3−エ
トキシプロピルアミン、sec−ブチルアミン、プロピ
ルアミン、メチルアミノプロピルアミン、ジメチルアミ
ノプロピルアミン、メチルイミノビスプロピルアミン、
3−メトキシプロピルアミンなどが好ましく、これらア
ミンは一種類単独、或いは複数のものを併用することが
できる。
The amine used in the present invention is not limited to these as long as it reduces the surface tension of the organic acid metal salt solution, but allylamine, diallylamine, triallylamine, isopropylamine, diisopropylamine, Iminobispropylamine, ethylamine, diethylamine, triethylamine, 3-ethoxypropylamine, sec-butylamine, propylamine, methylaminopropylamine, dimethylaminopropylamine, methyliminobispropylamine,
3-Methoxypropylamine and the like are preferable, and these amines can be used alone or in combination of two or more.

【0017】これらアミンはコーティング剤に対し、
0.1〜20重量%の範囲で用いることが可能である
が、2〜5重量%の範囲で用いることが好ましい。
These amines are used for coating agents.
It can be used in the range of 0.1 to 20% by weight, but it is preferably used in the range of 2 to 5% by weight.

【0018】また本発明に用いる有機物からなる増粘剤
は、エチルセルロース、ニトロセルロース、アクリル樹
脂、ブチラール樹脂などを増粘剤として用いることが望
ましい。
As the thickener made of an organic material used in the present invention, it is desirable to use ethyl cellulose, nitrocellulose, acrylic resin, butyral resin or the like as the thickener.

【0019】本発明のコーティング剤を、スクリーン印
刷用のペーストとする場合は、有機酸金属塩溶液にエチ
ルセルロース、ニトロセルロース、アクリル樹脂、ブチ
ラール樹脂などの増粘剤を一種類単独或いは複数のもの
を必要量添加して溶解し、さらにブチルカービトール、
テルピネオール、テキサノールなどの溶剤で印刷に適し
た粘度に調整する必要がある。スピンコートやスプレイ
塗布する場合は、スクリーン印刷用ペーストを溶剤で希
釈して用いることも可能であるが、特に多量の増粘剤を
用いる必要は無く、単に有機酸金属塩を溶剤で希釈する
のみでも差し支えない。また消泡剤やレベリング剤は必
要に応じ用いることが可能である。
When the coating agent of the present invention is used as a paste for screen printing, one or a plurality of thickeners such as ethyl cellulose, nitrocellulose, acrylic resin and butyral resin are added to the organic acid metal salt solution. Add the required amount and dissolve, then butyl carbitol,
It is necessary to adjust the viscosity suitable for printing with a solvent such as terpineol or Texanol. In the case of spin coating or spray coating, it is possible to use the screen printing paste diluted with a solvent, but it is not necessary to use a particularly large amount of thickener, and the organic acid metal salt is simply diluted with the solvent. But it doesn't matter. Further, an antifoaming agent or a leveling agent can be used as necessary.

【0020】しかしいずれの塗布方法を採用する場合で
もコーティング剤中の合計金属含有量が高い場合は、薄
く均一に塗布することが困難なため、所望する透明で均
一な金属酸化物薄膜を形成することが困難になる。また
反対にコーティング剤中の合計金属含有量が低い場合に
は、均一な薄膜を形成可能であるが、一度に0.4〜
1.3μmの膜厚を得るためには塗布熱分解を数回繰り
返さなければならない。したがってコーティング剤中の
合計金属含有量は、溶剤や増粘剤などの量を調整してス
クリーン印刷の場合は5.0重量%以下、好ましくは
2.0〜5.0重量%、スプレイ塗布の場合は4.0重
量%以下、好ましくは0.5〜2.0重量%にする必要
がある。
However, whichever coating method is used, if the total metal content in the coating agent is high, it is difficult to coat thinly and uniformly, so that a desired transparent and uniform metal oxide thin film is formed. Becomes difficult. On the other hand, if the total metal content in the coating agent is low, a uniform thin film can be formed, but 0.4-
The coating pyrolysis must be repeated several times to obtain a film thickness of 1.3 μm. Therefore, the total metal content in the coating agent is 5.0% by weight or less, preferably 2.0 to 5.0% by weight in the case of screen printing by adjusting the amount of solvent, thickener, etc. In this case, it should be 4.0% by weight or less, preferably 0.5 to 2.0% by weight.

【0021】本発明の金属酸化物薄膜形成用コーティン
グ剤の調製方法に特に制限は無く、有機酸金属塩溶液
に、予め溶剤に増粘剤を溶解した液を添加して溶解し、
希釈溶剤で粘度調整することが好ましい。また必要に応
じて行うろ過方法に制限は無いが、加圧ろ過が好まし
く、長時間かけて減圧ろ過をすることは望ましくない。
The method for preparing the coating agent for forming a metal oxide thin film of the present invention is not particularly limited, and a solution prepared by previously dissolving a thickener in a solvent is added to an organic acid metal salt solution and dissolved.
It is preferable to adjust the viscosity with a diluting solvent. Although there is no limitation on the filtration method performed as necessary, pressure filtration is preferable, and it is not desirable to perform vacuum filtration for a long time.

【0022】[0022]

【実施例】【Example】

(実施例1)表1の配合で番号順に各原料を混合して試
料を作成し、その溶液を75μmのアプリケータで70
mm×150×2のガラス板に塗布し、100℃の熱風
乾燥機で5分間乾燥後、電気炉で450℃で5分間焼成
した。その結果、表1のとおり、ガラス表面に透明な金
属酸化物の薄膜が形成できた。しかし比較例は膜を形成
しなかった。
Example 1 A sample was prepared by mixing each raw material in the order of numbers according to the formulation shown in Table 1, and the solution was mixed with an applicator of 75 μm to 70 μm.
It was applied on a glass plate of mm × 150 × 2, dried for 5 minutes with a hot air dryer at 100 ° C., and then baked for 5 minutes at 450 ° C. in an electric furnace. As a result, as shown in Table 1, a transparent metal oxide thin film could be formed on the glass surface. However, the comparative example did not form a film.

【0023】[0023]

【表1】 [Table 1]

【0024】(評価基準) 膜の状態: ○(透明均一膜)、△(微白濁膜)、×
(膜を形成しない) 膜厚: 触針タイプの膜厚計(表面形状測定器:日本真
空社製)で測定。 透過率: 分光光度計で測定。 (注) (*1)ブチルカービトールとキシレンの混合溶剤(重
量比1:1)で、Mg含有量を2重量%に調整したオク
チル酸Mg溶液。 (*2)ブチルカービトールにエチルセルロース(45
cp)を7.5重量%溶解した液。
(Evaluation criteria) Film condition: ○ (transparent uniform film), Δ (slightly cloudy film), ×
(No film is formed) Film thickness: Measured with a stylus type film thickness meter (surface shape measuring instrument: manufactured by Nippon Vacuum Co., Ltd.). Transmittance: Measured with a spectrophotometer. (Note) (* 1) Mg octylate solution in which the Mg content is adjusted to 2% by weight with a mixed solvent of butyl carbitol and xylene (weight ratio 1: 1). (* 2) Butyl carbitol with ethyl cellulose (45
A liquid in which 7.5 wt% of cp) is dissolved.

【0025】(実施例2)表2の配合で番号順に各原料
を混合して試料を作成し、その溶液をエアスプレイで7
0mm×150×2のガラス板に塗布し、100℃の熱
風乾燥機で5分間乾燥後、電気炉で450℃で5分間焼
成した。その結果、表2のとおり、ガラス表面に透明な
金属酸化物の薄膜が形成できた。しかし比較例は膜を形
成しなかった。
Example 2 A mixture was prepared by mixing each raw material in the order of the numbers shown in Table 2 to prepare a sample.
It was applied on a glass plate of 0 mm × 150 × 2, dried for 5 minutes by a hot air dryer at 100 ° C., and then baked at 450 ° C. for 5 minutes in an electric furnace. As a result, as shown in Table 2, a transparent metal oxide thin film could be formed on the glass surface. However, the comparative example did not form a film.

【0026】[0026]

【表2】 [Table 2]

【0027】(評価基準) 膜の状態: ○(透明均一膜)、△(微白濁膜)、×
(膜を形成しない) 膜厚: 触針タイプの膜厚計(表面形状測定器:日本真
空社製)で測定。 透過率: 分光光度計で測定。 (注) (*1)ブチルカービトールとキシレンの混合溶剤(重
量比1:1)で、Mg含有量を2重量%に調整した有機
酸Mg溶液。 (*2)ブチルカービトールにエチルセルロース(45
cp)を7.5重量%溶解した液。
(Evaluation Criteria) Film condition: ○ (transparent uniform film), Δ (slightly cloudy film), ×
(No film is formed) Film thickness: Measured with a stylus type film thickness meter (surface shape measuring instrument: manufactured by Nippon Vacuum Co., Ltd.). Transmittance: Measured with a spectrophotometer. (Note) (* 1) Organic acid Mg solution whose Mg content is adjusted to 2% by weight with a mixed solvent of butyl carbitol and xylene (weight ratio 1: 1). (* 2) Butyl carbitol with ethyl cellulose (45
A liquid in which 7.5 wt% of cp) is dissolved.

【0028】(実施例3)表3の配合で番号順に各原料
を混合して試料を作成し、その溶液をエアスプレイで7
0mm×150×2のガラス板に塗布し、100℃の熱
風乾燥機で5分間乾燥後、電気炉で450℃で5分間焼
成した。その結果、表3のとおりガラス表面に透明な金
属酸化物の薄膜が形成できた。
Example 3 A mixture was prepared by mixing each raw material in the order of the numbers shown in Table 3 to prepare a sample.
It was applied on a glass plate of 0 mm × 150 × 2, dried for 5 minutes by a hot air dryer at 100 ° C., and then baked at 450 ° C. for 5 minutes in an electric furnace. As a result, as shown in Table 3, a transparent metal oxide thin film could be formed on the glass surface.

【0029】[0029]

【表3】 [Table 3]

【0030】(評価基準) 膜の状態: ○(透明均一膜)。 膜厚: 触針タイプの膜厚計(表面形状測定器:日本真
空社製)で測定。 透過率: 分光光度計で測定。 (注) (*1)ブチルカービトールとキシレンの混合溶剤(重
量比1:1)で、Mg含有量を2重量%に調整した有機
酸Mg溶液。 (*2)ブチルカービトールにエチルセルロース(45
cp)を7.5重量%溶解した液。
(Evaluation Criteria) Film Condition: ◯ (Transparent uniform film). Film thickness: Measured with a stylus type film thickness meter (surface shape measuring instrument: manufactured by Nippon Vacuum Co., Ltd.). Transmittance: Measured with a spectrophotometer. (Note) (* 1) Organic acid Mg solution whose Mg content is adjusted to 2% by weight with a mixed solvent of butyl carbitol and xylene (weight ratio 1: 1). (* 2) Butyl carbitol with ethyl cellulose (45
A liquid in which 7.5 wt% of cp) is dissolved.

【0031】(実施例4)表4の配合で番号順に各原料
を混合してスクリーン印刷用ペーストを作成し、400
メッシュ(SUS)で70mm×150×2のガラス板
に印刷し、100℃との熱風乾燥機で5分間乾燥後、電
気炉で450℃で5分間焼成した。その結果、表4のと
おり、ガラス表面に透明な金属酸化物の薄膜が形成でき
た。しかし比較例は膜を形成しなかった。
(Example 4) The ingredients shown in Table 4 were mixed in the order of numbers to prepare a screen printing paste.
It was printed on a 70 mm × 150 × 2 glass plate with a mesh (SUS), dried for 5 minutes by a hot air dryer at 100 ° C., and then baked at 450 ° C. for 5 minutes in an electric furnace. As a result, as shown in Table 4, a transparent metal oxide thin film could be formed on the glass surface. However, the comparative example did not form a film.

【0032】[0032]

【表4】 [Table 4]

【0033】(評価基準) 膜の状態: ○(透明均一膜)、△(微白濁膜)、×
(膜を形成しない) 膜厚: 触針タイプの膜厚計(表面形状測定器:日本真
空社製)で測定。 透過率: 分光光度計で測定。 (注) (*1)ブチルカービトールとキシレンの混合溶剤(重
量比1:1)で、Mg含有量を2重量%に調整した有機
酸Mg溶液。 (*2)ブチルカービトールにエチルセルロース(45
cp)を7.5重量%溶解した液。
(Evaluation Criteria) Film condition: ○ (transparent uniform film), Δ (slightly cloudy film), ×
(No film is formed) Film thickness: Measured with a stylus type film thickness meter (surface shape measuring instrument: manufactured by Nippon Vacuum Co., Ltd.). Transmittance: Measured with a spectrophotometer. (Note) (* 1) Organic acid Mg solution whose Mg content is adjusted to 2% by weight with a mixed solvent of butyl carbitol and xylene (weight ratio 1: 1). (* 2) Butyl carbitol with ethyl cellulose (45
A liquid in which 7.5 wt% of cp) is dissolved.

【0034】(実施例4)表5の配合で番号順に各原料
を混合して試料を作成し、その溶液を75μmのアプリ
ケータで70mm×150×2のガラス板に塗布し、1
00℃の熱風乾燥機で5分間乾燥後、電気炉で450℃
で5分間焼成した。その結果、表5のとおり、ガラス表
面に傷の付きにくい透明な金属酸化物の薄膜が形成でき
た。
(Example 4) According to the formulation of Table 5, raw materials were mixed in the order of numbers to prepare a sample, and the solution was applied onto a 70 mm x 150 x 2 glass plate with an applicator of 75 µm, and 1
After drying for 5 minutes in a hot air dryer at 00 ℃, 450 ℃ in an electric furnace
And baked for 5 minutes. As a result, as shown in Table 5, it was possible to form a transparent metal oxide thin film on the glass surface, which is not easily scratched.

【0035】[0035]

【表5】 [Table 5]

【0036】(評価基準)焼成して形成した膜を冷却
後、ガーゼで軽く擦った時の傷の付き易さを調べた。 ○ : 良好(傷が付かない)。 △ : やや不良(傷が付きやすい)。 膜の状態: ○(透明均一膜)。 膜厚: 触針タイプの膜厚計(表面形状測定器:日本真
空社製)で測定。 (注) (*1)ブチルカービトールとキシレンの混合溶剤(重
量比1:1)で、Mg含有量を2重量%に調整したオク
チル酸Mg溶液。 (*2)ブチルカービトールにエチルセルロース(45
cp)を7.5重量%溶解した液。
(Evaluation Criteria) After the film formed by firing was cooled, the easiness of scratching when lightly rubbing with gauze was examined. ○: Good (no scratches). Δ: Slightly defective (easily scratched). Film condition: ○ (transparent uniform film). Film thickness: Measured with a stylus type film thickness meter (surface shape measuring instrument: manufactured by Nippon Vacuum Co., Ltd.). (Note) (* 1) Mg octylate solution in which the Mg content is adjusted to 2% by weight with a mixed solvent of butyl carbitol and xylene (weight ratio 1: 1). (* 2) Butyl carbitol with ethyl cellulose (45
A liquid in which 7.5 wt% of cp) is dissolved.

【0037】[0037]

【発明の効果】従来、面放電反射型カラーPDPの誘電
体の透明MgO保護膜は蒸着法で形成されているが、生
産性が悪く経済的な問題がある。しかし本発明の金属酸
化物薄膜形成用コーティング剤を、PDPの誘電体にス
クリーン印刷又はスプレイ塗布し、乾燥後、350〜6
00℃で1〜30分焼成することにより、膜厚が0.1
〜1.3μmの透明な金属酸化物薄膜の形成が可能にな
った。そのことにより大幅な経済効果が期待出来る。
The transparent MgO protective film of the dielectric of the surface discharge reflection type color PDP is conventionally formed by the vapor deposition method, but the productivity is poor and there is an economical problem. However, the coating material for forming a metal oxide thin film of the present invention is screen-printed or spray-coated on the dielectric of PDP, and after drying, 350 to 6
By baking at 00 ° C for 1 to 30 minutes, the film thickness becomes 0.1
It became possible to form a transparent metal oxide thin film of ˜1.3 μm. As a result, a significant economic effect can be expected.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 アルカリ土類金属、及び又は稀土類金属
の有機酸金属塩、溶剤、増粘剤及び有機物からなる添加
剤を含有する金属酸化物薄膜形成用コーティング剤であ
って、多価アルコール誘導体、炭素数1〜6の有機酸及
びアミンを併用することを特徴とする、塗布熱分解法に
より金属酸化物薄膜を形成する、金属酸化物薄膜形成用
コーティング剤。
1. A coating agent for forming a metal oxide thin film, which comprises an organic acid metal salt of an alkaline earth metal and / or a rare earth metal, a solvent, a thickener, and an additive, and is a polyhydric alcohol. A coating agent for forming a metal oxide thin film for forming a metal oxide thin film by a coating thermal decomposition method, which comprises using a derivative, an organic acid having 1 to 6 carbon atoms and an amine together.
【請求項2】 有機酸金属塩としてMg、Ba、Srの
有機酸金属塩単独、又は2種類以上の混合物に、Caま
たは稀土類金属の有機酸金属塩1種類又は2種類以上を
併用することを特徴とする、請求項1記載の金属酸化物
薄膜形成用コーティング剤。
2. An organic acid metal salt of Mg, Ba, Sr alone or a mixture of two or more kinds of organic acid metal salts, and one or more kinds of organic acid metal salts of Ca or rare earth metals are used in combination. The coating agent for forming a metal oxide thin film according to claim 1, characterized in that:
JP7309825A 1995-11-01 1995-11-01 Metal oxide thin film forming coating agent Pending JPH09129141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7309825A JPH09129141A (en) 1995-11-01 1995-11-01 Metal oxide thin film forming coating agent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7309825A JPH09129141A (en) 1995-11-01 1995-11-01 Metal oxide thin film forming coating agent

Publications (1)

Publication Number Publication Date
JPH09129141A true JPH09129141A (en) 1997-05-16

Family

ID=17997723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7309825A Pending JPH09129141A (en) 1995-11-01 1995-11-01 Metal oxide thin film forming coating agent

Country Status (1)

Country Link
JP (1) JPH09129141A (en)

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EP1415976A1 (en) 2002-10-28 2004-05-06 Nof Corporation Organic acid metal salt and coating liquid containing the same for forming a metal oxide film
US6911072B2 (en) 2003-03-18 2005-06-28 Nof Corporation Aqueous coating liquid for forming a magnesium oxide film
JP2006140000A (en) * 2004-11-11 2006-06-01 Sumitomo Osaka Cement Co Ltd Coating solution for protective film formation
WO2010052931A1 (en) * 2008-11-10 2010-05-14 パナソニック株式会社 Light emission display device partition, plasma display device, light emission display device, and method for manufacturing light emission display device partition
WO2010055845A1 (en) * 2008-11-12 2010-05-20 積水化学工業株式会社 Metal oxide microparticle dispersed slurry
JP5126412B2 (en) * 2009-08-25 2013-01-23 パナソニック株式会社 Method for manufacturing plasma display panel
US9777167B2 (en) 2004-05-19 2017-10-03 Flexcon Company, Inc. Liquid formulations for coating and printing substrates

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1415976A1 (en) 2002-10-28 2004-05-06 Nof Corporation Organic acid metal salt and coating liquid containing the same for forming a metal oxide film
US7018462B2 (en) 2002-10-28 2006-03-28 Nof Corporation Organic acid metal salt and coating liquid containing the same for forming a metal oxide film
US6911072B2 (en) 2003-03-18 2005-06-28 Nof Corporation Aqueous coating liquid for forming a magnesium oxide film
US9777167B2 (en) 2004-05-19 2017-10-03 Flexcon Company, Inc. Liquid formulations for coating and printing substrates
US9777168B2 (en) 2004-05-19 2017-10-03 Flexcon Company, Inc. Liquid formulations for coating and printing substrates
JP2006140000A (en) * 2004-11-11 2006-06-01 Sumitomo Osaka Cement Co Ltd Coating solution for protective film formation
JP4519610B2 (en) * 2004-11-11 2010-08-04 住友大阪セメント株式会社 Coating liquid for forming protective film for plasma display panel
WO2010052931A1 (en) * 2008-11-10 2010-05-14 パナソニック株式会社 Light emission display device partition, plasma display device, light emission display device, and method for manufacturing light emission display device partition
WO2010055845A1 (en) * 2008-11-12 2010-05-20 積水化学工業株式会社 Metal oxide microparticle dispersed slurry
JP5126412B2 (en) * 2009-08-25 2013-01-23 パナソニック株式会社 Method for manufacturing plasma display panel
JPWO2011024445A1 (en) * 2009-08-25 2013-01-24 パナソニック株式会社 Method for manufacturing plasma display panel

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