JPH09108637A - Transporting system for glass substrate and cassette inspecting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the clogging of cassettes in a transporting system for glass substrates and to embody the non-stopping of a production line by easily and surely detecting the deformation of the cassettes and previously sorting and removing the deformed cassettes. SOLUTION: Plural cassette shape detectors which consist of a cassette detector 2 for detecting the transportation of the cassettes to the inspection position of a conveyor device 1, cassette shape detectors 5 and 6 arranged to face each other in a direction orthogonal with the cassette transporting direction and cassette shape detectors 7 and 8 arranged to face each other in a direction parallel with the cassette transporting path and detect the deformation of the cassette bases are installed in the cassette inspection position of the conveyor device 1. Whether the cassette shapes are defective or non-defective is discriminated by the detection signals of the plural cassette shape detectors 5, 6, 7, 8 and the deformed cassettes are sorted when the cassette detector 2 detects the cassette transported to the inspection position.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate transfer system using a glass substrate transfer cassette,
The present invention relates to a cassette inspection device for detecting deformation of a cassette and a glass substrate transfer system provided with the inspection device.

[0002]

2. Description of the Related Art Display panels such as liquid crystal displays are
In order to impart various electro-optical functions such as a liquid crystal alignment film, a transparent conductive film, a color filter and a polarizing plate, the glass substrate is manufactured by various physical or chemical processing treatments. In such a display panel manufacturing line, glass substrates for processing into display panels are stored in a cassette in units of several tens of lots, and mounted on a conveyor device that connects each processing step and transported. Therefore, the operator of the manufacturing line can manufacture the display panel without directly touching the glass substrate.

FIG. 5 is a perspective view showing an example of a glass substrate carrying cassette used in a display panel manufacturing line such as the above-mentioned liquid crystal display. As shown in FIG. 5, since the cassette 20 accommodates the glass substrates 21 separately, the supporting columns 2 provided with supporting members at equal intervals.
2, 23, a top plate 24 that fixes the upper ends of the support columns 22 and 23, and a bottom plate 25 that fixes the lower ends, and a stopper 26 is provided to prevent the contained glass substrate from protruding from the cassette. is there.

The supporting columns 22, 23, the top plate 24, and the bottom plate 2
The members constituting the glass substrate transport cassette 20, such as 5, further reduce the weight of the cassette itself, and further accommodate the glass substrate so as not to be affected by various physical or chemical processing in the display panel manufacturing line. It is manufactured by molding and processing a synthetic resin material such as fluororesin to prevent scratches and dirt.

The glass substrate housed in the cassette 20 is used in each processing step of the display panel manufacturing line.
In order to perform the predetermined processing, the sheets are taken out one by one from the cassette and supplied to the processing apparatus, and when the processing is finished, the sheets are again discharged from the apparatus and stored in the cassette one by one.
Each lot is transported to the next processing equipment.

[0006]

By the way, since the glass substrate carrying cassette is manufactured by molding and processing a synthetic resin material such as a fluororesin as described above, the inside of the member formed during molding and processing is manufactured. The cassette may be deformed due to stress, and in order to improve the heat resistance of the electro-optical functional coating film formed on the glass substrate in the display panel manufacturing line, when the coating film is cured. ,
The cassette itself may be partially heated and the deformation as shown in FIG. 6 may occur on the bottom surface of the cassette.

FIG. 6 is a perspective view schematically showing a modified example of the bottom surface of the glass substrate carrying cassette. FIG. 6A is a modified example which can be confirmed when the cassette is viewed from the carrying direction. ) Is an example of a modification that can be confirmed when the cassette is viewed from the side in the transport direction.

If a glass substrate carrying cassette having a deformed bottom surface as shown in FIG. 6 is mixed in the display panel manufacturing line, it may hinder the accommodation of the glass substrate and the cassette may be clogged by the conveyor device. Yes, each time, the operation of the production line is stopped, the deformed cassette is taken out, the contained glass substrate is reloaded into another cassette, the cassette is returned to the production line again, and then the operation is restarted. .

When the production line operation is interrupted by such a deformed cassette, the production efficiency of the display panel is reduced, and the production line and the glass substrate transport cassette, which should be in a dust-free state, are restored. Therefore, there was a problem such as being contaminated and causing a defective product. Therefore,
In order to solve the above-mentioned problems, the present invention provides a cassette inspection device capable of easily and reliably detecting the deformation of a cassette in a glass substrate transfer system, and by selecting and removing the deformed cassette, the modified cassette The purpose is to prevent clogging in the transport system and to make the production line non-stop.

[0010]

According to the present invention, a top plate and a bottom plate are connected by a plurality of supporting columns, and a plurality of glass substrate supporting portions provided on the supporting columns support a glass substrate. In a glass substrate transfer system for transferring a glass substrate using a cassette, an inspection device for detecting deformation of the bottom plate of the cassette is provided in the transfer path of the cassette, and a cassette sorting device is provided downstream of the inspection device, When the inspection device detects deformation of the bottom plate of the cassette, the glass substrate transfer system is configured to eject the cassette with the deformed bottom plate from the transfer path.

Further, in order to connect the top plate and the bottom plate with a plurality of supporting columns, and to inspect the bottom surface of the cassette configured to support the glass substrate with a plurality of glass substrate supporting portions provided on the supporting columns, A cassette detector that is provided in a conveyor device that conveys the cassette and that detects that the cassette has been conveyed to an inspection position of the conveyor device; and a plurality of detectors that are arranged toward the cassette inspection position and that detect deformation of the bottom surface of the cassette. And a cassette shape detector configured to detect deformation of the bottom surface of the cassette by output signals of the plurality of cassette shape detectors when the cassette detector detects the first cassette conveyed to the inspection position. It is an inspection device.

Further, the plurality of cassette shape detectors of the inspection apparatus face the cassette shape detector arranged in a direction orthogonal to the transport path of the cassette and the cassette shape detector in a direction parallel to the transport path of the cassette. The cassette shape detector, which is composed of the arranged cassette shape detector and is arranged to face the direction parallel to the conveyance path of the cassette, inspects the cassette when the cassette is conveyed by the conveyor device. A cassette inspection device that is a cassette shape detector that returns to the inspection portion of the cassette when the cassette is separated from the portion and stopped at the inspection position.

[0013]

In a transport system for transporting a glass substrate using a glass substrate transport cassette, the inspection device provided in the transport path of the cassette detects deformation of the bottom plate of the cassette, and the cassette provided downstream of the inspection device. The sorting device of (1) discharges the cassette having the deformed bottom plate from the conveying path, thereby preventing the deformed cassette from clogging the conveying system.

In the inspection device provided in the transfer system, when the cassette detector detects that the cassette has been transferred to the inspection position in the previous period, the cassette transfer device is arranged toward the cassette inspection position of the conveyor device. In a plurality of cassette shape detectors composed of a cassette shape detector arranged opposite to each other in a direction orthogonal to the path, and a cassette shape detector arranged opposite to each other in a direction parallel to the cassette transport path, By detecting the bottom position of the cassette and detecting the deformation of the bottom face of the cassette, different deformations of the bottom face of the cassette can be reliably detected.

Further, among the plurality of cassette shape detectors, the cassette shape detectors arranged to face each other in a direction parallel to the cassette conveying path are the conveyor devices when the cassettes are conveyed by the conveyor device. In order not to hinder the transportation of the cassette that is being transported by, the cassette is evacuated below the transporting path.

[0016]

1 is a perspective view showing an embodiment of a cassette inspection apparatus of the present invention, and FIG. 2 is a side view showing a state in which a cassette is inspected by the cassette inspection apparatus shown in FIG. is there.

In the embodiment of FIG. 1, the cassette inspecting apparatus uses a conveyor device 1 composed of a plurality of roller conveyors arranged in parallel as a cassette conveying path. It is an inspection position for stopping the glass substrate transport cassette and inspecting the shape of the cassette, and is also a reference plane 9 when detecting deformation of the bottom surface of the cassette.

Below the reference surface 9 of the conveyor device 1, a cassette detector 2 composed of a reflection type photosensor is arranged, and the bottom surface of the glass substrate carrying cassette conveyed on the conveyor device 1. By detecting the reflected light from, it is detected that the glass substrate transport cassette has been transported to the inspection position of the cassette inspection device.

Further, cassette shape detectors 5 and 6 for detecting the deformation of the bottom face of the cassette are arranged on both sides of the conveyor device 1 for conveying the cassette so as to face each other in the direction orthogonal to the cassette conveying path. Cassette shape detectors 7 and 8 for detecting deformation of the bottom surface of the cassette are axially supported so as to be able to stand up beyond a reference surface 9 in the center of the cassette transport path, and are arranged to face each other in a direction parallel to the cassette transport path. Has been done.

FIG. 2 shows a state in which the deformation of the bottom surface of the glass substrate carrying cassette 20 carried on the conveyor device 1 is inspected in the cassette inspection device of the present invention, as seen from the side. Shows. In FIG. 2, the cassette shape detector 7 is arranged in the center of the cassette transport path so as to face the cassette transport direction in a direction parallel to the cassette transport direction.
And 8 indicate that the conveyor device 1 has the glass substrate transport cassette 2
While 0 is being transported, each of them rotates in the direction of the arrow and retracts below the cassette transport path, and when the cassette 20 reaches the cassette detector 2 and stops at the inspection position, the position facing the end face of the bottom plate of the cassette. It is connected to a rotating mechanism (not shown) so as to stand upright.

The cassette shape detectors 7 and 8 shown in FIG.
Corresponds to the deformation (a) of the bottom surface of the glass substrate carrying cassette shown in FIG. 6, and is arranged orthogonal to the cassette shape detectors 7 and 8 on both sides of the carrying path. The cassette shape detectors 5 and 6 are arranged at a substantially intermediate position between the cassette shape detectors 7 and 8 which are arranged to face each other.
This corresponds to the deformation (b) of the bottom surface of the glass substrate transport cassette shown in FIG.

The deformation of the bottom surface of the cassette 20 shown in FIGS. 2 and 6 is exaggerated for the purpose of explanation of the present invention, and is shown downstream of the cassette inspection apparatus shown in FIGS. Although not shown in the figure, a cassette sorting device 11 is provided for discharging the cassette whose bottom surface is deformed, which is detected by the cassette inspection device, from the transport path of the cassette.

FIG. 3 is a perspective view showing an embodiment of the cassette shape detector for detecting the deformation of the glass substrate carrying cassette in the cassette inspection apparatus of the present invention. As shown in FIG. 3, the cassette shape detectors 6 and 8 are composed of three light receivers S1, S2, and S3 linearly arranged at regular intervals, while facing the light receivers S1, S2, and S3, respectively. The three projectors are arranged on the cassette shape detectors 5 and 7 which are arranged to face each other.

From the projectors of the cassette shape detectors 5 and 7,
The three light rays projected toward the light receivers S1, S2, S3 are intercepted by the cassette stopped for inspection between the opposed cassette shape detectors 6, 8, and the light rays at a position lower than the bottom surface of the cassette. Incident on the opposite receiver.

In FIG. 3, the cassette shape detectors 6 and 8 are shown.
Of three light receivers S1, S2, S3 respectively provided in
Corresponds to the positions A, B, C and D on the bottom surface of the cassette in Table 1.
The on and off signals shown in (3) are output, and the deformation of the bottom surface of the cassette is detected based on the signal state to determine whether the shape of the cassette is good or bad.

[0026]

[Table 1]

An example of the quality judgment of the cassette shape shown in Table 1 is
The position of the light receiver S2 provided on the cassette shape detector is shown in FIG.
Shows the case where the reference surface 9 is hatched, and the position of the bottom surface of the cassette is A or D, and the shape is defective, and B or C is the good product.

For example, if S1 is off and S3 is on in both light receivers of the cassette shape detectors 6 and 8, the bottom position of the cassette is B or C.
The deformation of the bottom of the cassette can be regarded as the normal range. On the other hand, when all of the light receivers S1, S2, and S3 are on or off, the position of the bottom surface of the cassette is at A or D, so that the deformation of the cassette exceeds the normal range and it is determined that the shape is defective.

FIG. 4 is a block diagram showing the configuration of the cassette inspection apparatus of the present invention. In FIG. 4, the conveyor device 1
The cassette detector 2 that detects the glass substrate transport cassette that is transported by the cassette detector 2 is connected to the controller 3 that controls the drive of the conveyor device 1.
When the glass substrate carrying cassette is detected, the control device 3 controls the drive of the conveyor device 1 based on the detection signal to stop the cassette at the inspection position.
After stopping the cassette at the inspection position, the control device 3 actuates a rotation mechanism (not shown) connected to the cassette shape detectors 7 and 8 to raise the detectors 7 and 8, and then the cassette shape detector 5 Drive 8 to detect the bottom position of the cassette.

In FIG. 4, the detection signals of the cassette shape detectors 5 to 8 for detecting the bottom surface position of the glass substrate transport cassette are input to the control device 3 and compared with a preset pass / fail judgment standard. As a result, when it is determined that the product is non-defective, the rotation mechanism (not shown) is operated to retract the cassette shape detectors 7 and 8, and then the conveyor device 1 is driven to send the cassette to the display panel manufacturing line.

The detection signals of the cassette shape detectors 5-8 are
If it is determined that the shape is defective as a result of comparison with preset quality determination criteria, the alarm device 1
0 is notified to the operator of the manufacturing line that the deformed cassette is detected, the cassette shape detectors 7 and 8 are retracted, and then the conveyor device 1 is driven to convey the deformed cassette and sort The device 11 is controlled to eject the modified cassette.

When an uninspected glass substrate transport cassette is continuously placed on the conveyor device 1, until the undetected cassette is detected by the cassette detector 2,
When the conveyor device 1 is driven to convey the cassette to the inspection position and the cassette detector 2 detects an uninspected cassette, the control device 3 stops the driving of the conveyor device 1 and the cassette shape detectors 5 to 8 Control to restart the detection of the bottom surface position of the glass substrate transport cassette.

FIG. 7 is a schematic view showing an example of the case where the cassette inspection apparatus shown in FIGS. 1 and 2 is incorporated in a display panel manufacturing line, and a glass substrate transfer used in the display panel manufacturing line. When the cassette for use is sent out from the cassette supply device 31, it is first conveyed to the cleaning device 32 to remove dust and dirt adhering to the cassette itself.

Next, in order to inspect whether or not the deformed cassette is mixed, it is conveyed to the cassette inspection device 30a provided in the cassette conveying path 33 of the manufacturing line, and the cassette is deformed, particularly in this embodiment, the bottom face of the cassette. Deformation is detected and the cassette is selected.

When the inspection device 30a detects the deformation of the bottom surface of the cassette and compares it with the quality judgment standard, and when it is judged that the shape is defective, the deformation cassette is sent to the discharge conveyor 34, and the cassette conveyance path 33 of the manufacturing line. To remove from. Further, as a result of comparison with the quality determination standard, the cassettes determined to be non-defective are temporarily accumulated in the cassette supply stocker 35 of the manufacturing line for carrying the glass substrate.

Further, the transport cassette, which has passed through the cassette transport path 33 of the manufacturing line and accumulated in the cassette discharge stocker 36, removes dust and dirt adhering to the cassette itself in the manufacturing line, and also during use. In order to inspect the presence or absence of the generated deformation, the cleaning device 32 again cleans the deformed cassettes, and the inspection device 30a selects the deformed cassettes, which are then accumulated in the cassette supply stocker 35 and used again for conveying glass substrates.

On the other hand, the processing glass substrate 37 for imparting the electro-optical function is accommodated in the glass substrate transport cassette sent from the cassette supply stacker 35 to the conveyor device of the cassette transport path 33, and the manufacturing process is performed. Processing devices A ... M, N ... Z arranged according to
The sheets are sequentially transported to and subjected to a predetermined processing treatment.

Incidentally, in FIG. 7, the inspection device 30b is
Since it is expected that the transport cassette will be deformed in the processing apparatus M, the cassette inspection apparatus is provided in the cassette transport path of the manufacturing line, and the modified cassette is prevented from being mixed into the processing apparatus N and thereafter. Inspection device 30b
The modified cassette is detected and selected.

When the inspection device 30b is installed between the processing devices of the manufacturing line, a reservoir of replenishment cassettes is provided in the inspection device in order to quickly replenish the alternative cassette when the deformed cassette is discharged. It is desirable to inspect and sort the transport cassette before accommodating the glass substrates so as to avoid the trouble of replacing the substrates.

In this embodiment, the cassette shape detector is provided with three sets of light emitters / receivers to detect the position of the bottom surface of the cassette in four steps. By narrowing down, it is possible to detect the cassette deformation more finely.Furthermore, the control device aggregates and analyzes the signals obtained by the detector to control the shape quality of the transport cassette and Life can also be determined.

Further, in this embodiment, the cassette for inspecting glass substrates is temporarily stopped in the cassette inspection device to detect the deformation of the bottom surface of the cassette, but it may be detected during the transportation without stopping the cassette. . In this embodiment,
Although the transport cassette is transported by the roller conveyor, it may be replaced with a belt conveyor using a material that does not generate dust or dirt. Further, the cassette inspection device of the present invention, in addition to the present embodiment, for the material or product conveyed on the conveyor device of the production line, by changing the arrangement of the shape detector, objects of various shapes and It can be easily applied to the inspection site.

[0042]

As described above, the glass substrate transfer system using the cassette of the present invention is provided with an inspection device for detecting the deformation of the bottom plate of the cassette in the transfer path of the cassette, and the cassette is provided downstream of the inspection device. When the inspection device detects the deformation of the bottom plate of the cassette, the cassette having the deformed bottom plate is discharged from the transport path, so that the transport system can be prevented from being clogged by the deformed cassette. Since the production efficiency can be improved by making the line non-stop and the dust-free state of the production line and the glass substrate transport cassette can be maintained, the quality and yield of the display panel can be improved.

Further, a cassette detector for detecting that the cassette is conveyed to the inspection position provided in the conveyor device of the conveying system, and a plurality of cassette shape detectors for detecting the deformation of the bottom surface of the cassette are provided in the cassette of the conveyor device. The cassette is provided at the inspection position, and when the cassette detector detects that the cassette has been conveyed to the predetermined inspection position, the output signal from the cassette shape detector is used to determine the quality of the cassette shape. The deformation of the bottom can be inspected.

Further, the cassette shape detector is composed of a cassette shape detector arranged to face the direction perpendicular to the cassette carrying path and a cassette shape detector arranged to face the direction parallel to the cassette carrying path. Since it is configured, it is possible to reliably detect different deformations of the bottom surface of the cassette, and the cassette shape detectors arranged to face each other in the direction parallel to the cassette transport path are: Since it is configured to return to the inspection site when the cassette is separated from the inspection site and stopped at the inspection position, the deformation of the bottom surface of the cassette can be quickly detected without hindering the conveyance of the cassette.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a cassette inspection device of the present invention.

FIG. 2 is a side view showing an embodiment of the cassette inspection device of the present invention.

FIG. 3 is a perspective view showing a configuration of a cassette shape detector.

FIG. 4 is a block diagram showing an embodiment of the cassette inspection device of the present invention.

FIG. 5 is a perspective view showing an example of a glass substrate carrying cassette.

FIG. 6 is a schematic diagram showing a modified example of the cassette.

FIG. 7 is a schematic diagram showing an example of a display panel manufacturing line.

[Explanation of symbols]

 1 Conveyor device 2 Cassette detector 3 Control device 5, 6, 7, 8 Cassette shape detector 9 Reference plane 10 Alarm device 11 Sorting device 20 Cassette 21 Glass substrate 22, 23 Support pillar 24 Top plate 25 Bottom plate 26 Stopper 30a, 30b Inspection device 31 Cassette supply device 32 Cleaning device 33 Cassette transport path 34 Ejection conveyor 35 Cassette supply stocker 36 Cassette ejection stocker 37 Processing glass substrate 38 Processing device A 39 Processing device M 41 Processing device N 42 Processing device Z 43 Processed glass substrate Substrate

Claims (4)

[Claims] 1. A glass substrate is transported by using a cassette configured to connect a top plate and a bottom plate with a plurality of supporting columns and to support the glass substrate with a plurality of glass substrate supporting portions provided on the supporting columns. In the glass substrate transfer system, the inspection device for detecting the deformation of the bottom plate of the cassette is provided in the transfer path of the cassette, and the sorting device of the cassette is provided downstream of the inspection device, and the inspection device deforms the bottom plate of the cassette. When detecting the, the glass substrate transfer system is characterized in that the cassette with the deformed bottom plate is discharged from the transfer path. 2. A bottom plate of a cassette configured to connect a top plate and a bottom plate with a plurality of supporting columns and to support a glass substrate with a plurality of glass substrate supporting portions provided on the supporting columns, A cassette detector that is provided in a conveyor device that conveys the cassette and that detects that the cassette has been conveyed to an inspection position of the conveyor device; and a plurality of detectors that are arranged toward the cassette inspection position and that detect deformation of the bottom surface of the cassette. When the cassette detector detects the cassette that has been transported to the inspection position, the deformation of the bottom surface of the cassette is detected by the output signals of the plurality of cassette shape detectors. Cassette inspection device characterized by 3. The cassette shape detector, wherein the cassette shape detector is arranged so as to face a direction perpendicular to a cassette conveying path, and the cassette shape detector is arranged so as to face a direction parallel to the cassette conveying path. 3. The cassette inspection device according to claim 2, wherein the cassette inspection device comprises a detector. 4. The cassette shape detector, which is arranged in opposition to the direction parallel to the transport path of the cassette, separates from the inspection site of the cassette when the cassette is being transported by the conveyor device. 4. The cassette inspection device according to claim 3, wherein when it is stopped at the inspection position, it returns to the inspection portion of the cassette.