JPH09108318A - Ozone sterilization device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ozone sterilization device with a feature to prevent damage from being inflicted to an ozone generation part. SOLUTION: This ozone pterilizaticn device consists of an ozone generation part for generating an ozone and an oxygen supply part for supplying oxygen to the ozone generation part. Energization of the ozone generation part is performed after the lapse of a specified time since the supply of oxygen to the oxygen supply part is begun (step 56). In addition, a flow sensor for detecting an oxygen flow rate is provided-in an oxygen supply passage, and when the oxygen supply is lowered to a level below a specified quantity, energization of the ozone generation part is suspended (step 54). A temperature sensor is installed on the ozone generation part, and when the temperature of the ozone generation part shows a specified soaring percentage, energization of the ozone generation part is suspended (steps 62, 64).

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone sterilizer used to sterilize a space to be sterilized with ozone, and more specifically to an ozone sterilizer having a function of protecting an ozone generating portion that generates ozone. .

[0002]

2. Description of the Related Art As an ozone sterilizer for sterilizing a space to be sterilized, for example, as shown in Japanese Patent Laid-Open No. 5-57005, an ozone generator 4 for generating ozone and oxygen for the ozone generator 4 are generated. An air having an oxygen generator 5 for supplying the air, and operating the ozone generator for a predetermined time based on a control signal from the controller 8 at the time of starting the system to draw the ozone generated by the ozone generator from the space to be sterilized. It is known that the air containing ozone is mixed with the mixing box 3 and is returned to the sterilized space.

[0003]

As an ozone generator for generating ozone from supplied oxygen, it is considered that a high voltage is applied to a discharge electrode to generate ozone from oxygen by discharge. In the configuration, if the oxygen is not sufficiently supplied, the ozonizer will overheat and not only the amount of ozone generated will decrease, but in the worst case due to the overheating of the ozonizer, the internal electrodes will short and the ozonizer itself will be damaged. Or even if the drive power of the ozonizer is damaged.

Therefore, it is an object of the present invention to provide an ozone sterilizer capable of realizing appropriate control for preventing damage to the ozone generator (ozonizer, driving power source thereof, etc.).

[0005]

SUMMARY OF THE INVENTION The ozone sterilizer according to the present invention comprises an ozone generating section for generating ozone and an oxygen supplying section for supplying oxygen for generating ozone to the ozone generating section. Having an apparatus for supplying ozone generated in the ozone generation section to the sterilized space, energization of the ozone generation section is performed after a predetermined time has elapsed since the supply of oxygen by the oxygen supply section was started. (Claim 1)

More specifically, the intake means for sucking the air in the sterilized space, the oxygen supply device for supplying oxygen, and the ozone generation for converting the oxygen supplied from the oxygen supply device into ozone by discharging. Section and a control section for controlling ON / OFF of the oxygen supply device and control of whether or not the ozone generating section is energized, and the ozone generated in the ozone generating section and the air sucked from the sterilized space are separated from each other. In the ozone sterilizer that mixes and returns the air containing ozone to the sterilized space, a determination unit that determines whether or not a predetermined time has elapsed since the supply of oxygen by the oxygen supply unit was started, and this determination unit It is conceivable that the device is provided with means for starting energization to the ozonizer of the ozone generator when it is determined that the predetermined time has passed.

Here, the time from the start of the supply of oxygen by the oxygen supply unit to the start of energization to the ozone generation unit is
It depends on the oxygen pressure, the length of the pipe, the flow resistance, etc., but may be several seconds to several minutes.

Therefore, when the discharge by the ozone generator and the supply of oxygen by the oxygen supplier are performed at the same time when the ozone sterilizer is operated, the ozone generator may be supplied before oxygen is sufficiently supplied. However, according to the present invention, since the ozone generating unit is activated after a predetermined time has elapsed since the supply of oxygen by the oxygen supplying unit was started, the ozone generating unit is activated. Oxygen supplied from the oxygen supply unit can be filled in the ozone generation unit before the operation of the unit, and therefore overheating in the ozone generation unit can be avoided.

The ozone sterilizer has an ozone generating section for generating ozone and an oxygen supplying section for supplying oxygen for generating ozone to the ozone generating section, and the ozone generated in the ozone generating section is covered. Regarding the device for supplying to the sterilization space, a flow rate sensor for detecting the oxygen flow rate is provided in the oxygen supply passage connected from the oxygen supply section to the ozone generation section, and when the flow rate sensor reduces the oxygen supply rate to a predetermined amount or less. The electricity supply to the ozone generator may be stopped (claim 2).

More specifically, the intake means for sucking air in the space to be sterilized, the oxygen supply device for supplying oxygen, and the ozone generation for converting the oxygen supplied from the oxygen supply device into ozone by discharging. Section and a control section for controlling ON / OFF of the oxygen supply device and control of whether or not the ozone generating section is energized, and the ozone generated in the ozone generating section and the air sucked from the sterilized space are separated from each other. In the ozone sterilizer for mixing and returning the air containing ozone to the sterilized space, a flow rate sensor for detecting the oxygen flow rate is provided in the oxygen supply passage connected from the oxygen supply section to the ozone generation section, and this flow rate sensor is used. The determination means for determining whether or not the oxygen supply amount has dropped below a predetermined amount, and the case where the oxygen supply amount is determined to be below the predetermined amount by this determination means Those and means to turn OFF the power supply to the ozone generator is considered.

Various types of the flow rate sensor can be considered, but the flow rate sensor is constituted by a photoelectric switch or the like which is turned on / off according to the movement of the float that opens and closes the oxygen supply passage, and an ON signal is generated when the oxygen flow exceeds a predetermined flow rate. May be output.

Therefore, the lack of oxygen in the oxygen cylinder,
If oxygen is not sufficiently supplied to the ozone generation part due to oxygen leakage from the oxygen supply passage, etc., there is a risk of overheating if the ozone generation part continues to operate, but if the amount of oxygen supply decreases, Since this state is detected by the flow rate sensor and the energization of the ozone generator is stopped, overheating of the ozone generator can be avoided.

The ozone sterilizer is provided with an ozone generating part for generating ozone and an oxygen supplying part for supplying oxygen for generating ozone to the ozone generating part, and the ozone generated in the ozone generating part is sterilized. Regarding what is supplied to the space, a temperature detection sensor for detecting the temperature of this portion is provided in the ozone generation section, and when the temperature detected by this temperature detection sensor is equal to or higher than a predetermined temperature, the ozone generation section is energized. It may be stopped (claim 3).

More specifically, the intake means for sucking air in the space to be sterilized, the oxygen supply device for supplying oxygen, and the ozone generation for converting the oxygen supplied from the oxygen supply device into ozone by discharging. Section and a control section for controlling ON / OFF of the oxygen supply device and control of whether or not the ozone generating section is energized, and the ozone generated in the ozone generating section and the air sucked from the sterilized space are separated from each other. In the ozone sterilizer that mixes and returns the air containing ozone to the sterilized space, a temperature sensor that detects the temperature of this part is provided in the ozone generation part, and the temperature detected by this temperature sensor is equal to or higher than a predetermined temperature. Determination means for determining whether or not there is, and a power supply to the ozone generation section when the determination section determines that the temperature of the ozone generation section is equal to or higher than a predetermined temperature. Structure and means to OFF are considered.

Therefore, according to such a configuration, when the oxygen supplied to the ozone generator is insufficient and the temperature of the ozone generator gradually rises, this state is detected by the temperature sensor and the detected temperature is detected. When the temperature exceeds a predetermined temperature, the electricity supply to the ozone generating portion is stopped, so that the ozone generating portion can be prevented from overheating.

Further, the ozone sterilizer is provided with an ozone generating section for generating ozone and an oxygen supplying section for supplying oxygen for generating ozone to the ozone generating section, and the ozone generated in the ozone generating section is removed. Regarding what is supplied to the space to be sterilized, a temperature sensor that detects the temperature of this portion is provided in the ozone generation unit, and the ozone generation unit is used when the rate of increase in temperature detected by the temperature detection sensor is equal to or greater than a predetermined value. You may make it stop the electricity supply to (Claim 4).

More specifically, the intake means for sucking air in the sterilized space, the oxygen supply device for supplying oxygen, and the ozone generation for converting the oxygen supplied from the oxygen supply device into ozone by discharging. Section and a control section for controlling ON / OFF of the oxygen supply device and control of whether or not the ozone generating section is energized, and the ozone generated in the ozone generating section and the air sucked from the sterilized space are separated from each other. In the ozone sterilizer for mixing and returning the air containing ozone to the space to be sterilized, a temperature sensor for detecting the temperature of this portion is provided in the ozone generating section, and the temperature increase rate detected by the temperature sensor is predetermined. Determination means for determining whether or not the value is greater than or equal to a value, and the ozone generation in the case where the determination means determines that the temperature rise rate of the ozone generation part is greater than or equal to a predetermined value. Configuration is conceivable and means for the power supply OFF to.

Therefore, when the oxygen supplied to the ozone generating section becomes insufficient, the rate of increase in the temperature of the ozone generating section becomes larger than that in the normal state. However, according to this configuration, this state is detected by the temperature sensor. When the temperature rise rate of the detected temperature becomes equal to or higher than a predetermined value, the electricity supply to the ozone generating portion is stopped, so that the ozone generating portion can be prevented from overheating.

In the above description, the ozone generator has a high-voltage power supply and an ozonizer having a discharge electrode to which a high voltage is applied by the high-voltage power supply, and supplies oxygen from the oxygen supply device to the ozonizer. It is conceivable that the oxygen supply unit has an oxygen cylinder and a solenoid valve that opens and closes the oxygen supply passage, and opens and closes the solenoid valve to turn ON / OFF the oxygen supply to the ozone generation unit.

[0020]

Embodiments of the present invention will be described below with reference to the drawings.

In FIG. 1, an ozone sterilization apparatus 1 according to the present invention is arranged outside a sterilized space 2 including a pass box, a safety cabinet, etc., and the sterilized space 2 and an intake duct 3 and a delivery duct 4 are provided. It is connected and sucks air from the sterilized space 2 and sends the sucked air to the space.

As shown concretely in FIG. 2, the ozone sterilizer 1 has an inflow / outflow space 5 defined therein by a corrosion resistant material such as stainless steel. The inflow / outflow space 5 is composed of an intake side space portion 6 and a delivery side space portion 7, and these space portions communicate with each other via a blower 8.
That is, the blower 8 is composed of, for example, a sirocco fan arranged in the intake side space 6, the blower opening 8 a is opened in the delivery side space 7, and the air is pressure-fed from the intake side space 6 to the delivery side space 7. It is like this.

The air intake side space portion 6 communicates with the sterilized space via the air intake duct 3 (shown in FIG. 1) connected to the duct connection portion 9 formed in a projecting manner at the upper portion thereof, and is connected to the duct connection portion 9. A first passage 11 in which an ozone decomposing catalyst 10 such as activated carbon is arranged between the blower 8 and a second passage 12 bypassing the first passage 11.
It is divided into A first opening / closing damper 13 for opening / closing the first passage 11 is provided upstream of the ozone decomposing catalyst in the first passage 11, and a second opening / closing damper 13 for opening / closing the second passage is provided in the second passage 12. An opening / closing damper 14 is provided.

The space 7 on the delivery side communicates with the space to be sterilized via the delivery duct 4 (shown in FIG. 1) connected to the duct connection portion 15 formed on the upper portion of the space 7. Further, in this space portion 7, a forward path 17 and a return path 18 leading to the humidifier 16 are provided.
And an ozone supply passage 19 for supplying ozone.

The humidifier 16 is for applying humidity to the space 7 on the delivery side in order to enhance the sterilization effect by ozone. When the power source 20 is turned on, the water in the water tank 21 is atomized by using ultrasonic waves. The air is converted into air and discharged into the air sent through the outward path 17, and the air having the humidity is supplied to the delivery side space 7 through the return path 18.

The ozone generator 22 includes an ozonizer 30 having a discharge electrode and a high-voltage power supply 31 for applying a high voltage to the discharge electrode, and an oxygen cylinder 23 to an oxygen supply passage 24.
Oxygen is supplied to the ozonizer 30 via the manual valve 25, the cylinder mounting regulator 26, the oxygen regulator 27, the oxygen supply solenoid valve 28, and the oxygen flow rate control valve 29 provided in the ozonizer 3 by turning on the high-voltage power supply 31.
0 is discharged, the oxygen supplied here is converted into ozone, and this ozone is supplied from the ozone supply passage 19 to the space 7 on the delivery side.
To be supplied to

The humidifier 16 and the ozone generator 22 are located outside the inflow / outflow space 5 in the apparatus (atmosphere atmosphere area 3).
2), and a ventilation fan 33, a control unit 34 for controlling each device, and the like are further arranged in this portion. The ventilation fan 33 sucks and discharges the outside air through a ventilation hole 35 formed in the wall surface of the device to actively ventilate the inside of this area, and each device (humidifier 16, ozonizer 30) arranged therein. , Various power sources 20, 31,
It has a function of cooling the control unit 34, etc.). In particular, in this aspect, the air sucked by the ventilation fan 33 is blown directly to the ozonizer 30 to accelerate the cooling of the ozonizer 30.

The oxygen flow rate control valve 29 is, for example, an area type having a float inside the taper tube, and is equipped with a sensor (oxygen flow rate sensor 36) for detecting the oxygen flow rate.
The oxygen flow rate sensor 36 is, for example, a photoelectric switch that detects movement of the float. The photoelectric switch is turned off when the float blocks the pipeline or when the oxygen flow rate is below a predetermined flow rate, and the float floats and oxygen flows above a predetermined flow rate. The photoelectric switch is set to ON in the open state. Here, when the photoelectric switch is turned on, the oxygen flow rate that does not overheat the ozonizer 30 (for example, 1.4 liter / m 2
in or more) is obtained. A temperature detection sensor 37 that detects the temperature of the ozonizer 30 is provided on the inside or the outside surface of the ozonizer 30.

The control unit 34 includes a microcomputer, a memory, an I / O, a drive circuit for driving and controlling various operating devices, and the like. When the power switch 38 is turned on, the oxygen flow rate sensor 36, the temperature detection sensor 37, and the like are operated. Actuators 39 and 40 for inputting information and driving the first and second opening / closing dampers 13 and 14 according to a predetermined program, a blower 8, a ventilation fan 33, an oxygen supply solenoid valve 28, a humidifier 16, and ozone generation. It controls various operating devices such as the section 22.

FIG. 3 shows a specific operation example of the control unit 34 in the ozone generation mode. The control unit 34 is activated by turning on the power switch 38 before entering this mode, and the first opening / closing damper 13 is activated. Is closed and the second opening / closing damper 14 is opened to communicate the duct connection portion 9 and the blower 8 with the second passage 12, and the blower 8 and the ventilation fan 32 are rotated at a predetermined rotation speed. As a result, the air in the sterilized space 2 is sucked into the intake side space 6 of the inflow / outflow space 5 via the intake duct 3 and returned from the delivery side space 7 to the sterilized space 2 via the delivery duct 4. While the state is formed, even in the atmosphere atmosphere region 32 in the apparatus main body, the ventilation fan 33 forms the ventilation state in which the outside air is forced to flow.

In this state, when the ozone generation mode is entered,
In step 50, the high voltage power source 3 of the ozone generator 22
An AC voltage (AC 100V) is supplied from a nearby outlet to the power supply 1 through a power supply line (not shown). At this stage,
No voltage is applied from the high-voltage power supply 31 to the ozonizer 30, and a high voltage can be applied to the ozonizer 30 at any time according to an instruction from the control unit 34 (step 50).

Next, an opening command is output to the oxygen supply solenoid valve 28, and this solenoid valve is opened to supply oxygen from the oxygen cylinder 23 to the ozonizer 30 via the oxygen supply passage 24 (step 52).

Thereafter, it is determined whether or not the oxygen flow rate sensor 36 provided in the oxygen flow rate control valve 29 is ON, that is, whether or not the oxygen flow rate flowing through the oxygen supply passage 24 is a predetermined amount or more. If it is determined (step 54) and the amount is equal to or more than the predetermined amount, then in the next step 56, it is determined whether or not a predetermined time has elapsed since the oxygen supply electromagnetic valve 28 was opened.

If a predetermined time has not passed since the oxygen supply was started, there is a possibility that sufficient oxygen is not supplied to fill the ozonizer 30. Therefore, a high voltage is applied to the ozonizer 30 at this point. This could cause the ozonizer to overheat and break. Therefore, in this case, the voltage is not applied to the ozonizer 30 and the control routine is exited from step 56.

On the other hand, when a predetermined time has passed since the oxygen supply was started, sufficient oxygen is supplied to the ozonizer as long as there is no shortage of oxygen supply or oxygen leakage. However, there is no danger of overheating. Therefore, in this case, the process proceeds to step 58 and the ozonizer 3
A high voltage is applied to 0 to start discharge, and ozone is generated from the supplied oxygen. The ozone generated here is supplied to the delivery side space portion 7 through the ozone supply passage 19, mixed with the air sucked from the sterilized space 2, and returned to the sterilized space 2 through the delivery duct 4. . The air in the sterilized space 2 repeats such a mixing process with ozone to increase the ozone concentration to about 200 ppm. At the same time, the humidifier 16 is operated to increase the efficiency of ozone sterilization, and the humidity of the sterilized space 2 is increased to 80% RH or higher.

In the ozone generation process described above, when it is determined in step 54 that the oxygen flow rate is less than the predetermined amount, the ozonizer 30 continues to discharge even though oxygen is not sufficiently supplied, so the ozonizer gradually becomes available. 30 may be overheated and damaged. Therefore, in this case, the process proceeds to step 60, the application of the high voltage to the ozonizer 30 is stopped, and the discharge by the ozonizer 30 is stopped.

When the high voltage supply to the ozonizer 30 is stopped, the humidifier 16 is stopped at the same time, or the oxygen supply is continued for about 3 minutes to discharge the ozone remaining in the ozonizer, and then the oxygen supply is continued. The electromagnetic valve 28 for use may be closed. In addition, it may be possible to display on the indicator that the application of high voltage has been stopped due to insufficient oxygen flow rate, and if such a situation occurs, fumigation sterilization in which ozone is left in the sterilized space It seems that it is possible to shift to the mode, but the ozone decomposition work was started and the first
The opening / closing damper 13 is opened and the second opening / closing damper 14 is closed so that the duct connecting portion 9 and the blower 8 are communicated with each other through the first passage 11, and the ozone-containing air that is recirculating is discharged into the ozone decomposition catalyst 1
You may make it pass to 0.

Therefore, in this ozone sterilizer, the oxygen supply passage 24 is provided downstream of the oxygen flow rate sensor 36.
If there is a crack in the pipe, the pipe that constitutes this passage is disconnected, or the oxygen flow sensor 36 itself fails, the amount of oxygen in the cylinder is insufficient, or the oxygen supply is upstream of the oxygen flow sensor 36. When the oxygen flow rate sensor 36 determines that the oxygen flow rate has decreased due to a crack in the passage or a failure of the manual valve 24 or the oxygen supply solenoid valve 27, the oxygen cylinder 23 supplies the oxygen to the ozonizer 30. Since the oxygen flow rate is actually reduced, in such a case, the application of high voltage can be stopped to prevent damage to the ozonizer due to overheating and damage to the high-voltage power supply due to damage to the ozonizer.

FIG. 4 shows another control example in the ozone generation mode. In the following, different steps will be mainly described, and the same processing steps as those in the control example will be denoted by the same reference numerals and description thereof will be omitted.

In this control example, step 62 is added between step 52 and step 54 of the control example. In this step 62, the temperature T of the ozonizer 30 detected by the temperature detection sensor 37 is detected. ,
It is determined whether or not the temperature is equal to or lower than a preset predetermined temperature α.

The reason why such a treatment is provided is that the oxygen supply passage is cracked on the downstream side of the oxygen flow rate sensor 36,
This is for grasping the shortage of oxygen supply that cannot be recognized only by the information from the oxygen flow rate sensor 36, such as when the pipes forming this passage are disconnected or the oxygen flow rate sensor itself fails. Even if the oxygen supply is sufficient, if the ventilation fan malfunctions and the cooling function of the ozonizer 30 is impaired, the temperature of the ozonizer 30 may increase and the amount of ozone generated may decrease. This is because such a situation can be grasped after all by detecting the temperature of the ozonizer 30.

However, if the temperature of the ozonizer 30 is lower than the predetermined temperature, the condition of the ozonizer 30 evaluated from the temperature can be said to be normal. Therefore, the process proceeds to the step 54 and the oxygen flow rate sensor 30 is evaluated. Ozonizer 3
If the temperature of 0 is equal to or higher than the predetermined temperature, the process proceeds to step 60, and the above-described processing such as stopping the application of the high voltage to the ozonizer 30 is performed.

Further, FIG. 5 shows still another control example in the ozone generation mode, and when the different steps are mainly explained, the steps 62 and 54 are described.
And a step 64 is added between and, and by this step 64, it is determined whether or not the increase rate (ΔT) of the ozonizer temperature detected by the temperature detection sensor is equal to or less than a preset predetermined value γ.

The step 64 is added for the same purpose as the step 62. From this point, the step 64 may be provided in place of the step 62. However, even when the step 62 is provided, if the ozonizer temperature is rapidly increased by using the step 64 together, it is possible to detect the abnormality before the ozonizer 30 reaches the predetermined temperature α, and the abnormality is detected. The ozonizer 30 and the high-voltage power supply 31 can be protected more reliably in the initial stage of occurrence.

Therefore, in step 64, the ozonizer 30
If the temperature rise rate is less than the predetermined value γ, the state of the ozonizer 30 evaluated from the temperature rise rate can be said to be normal. Therefore, the process proceeds to step 54, the oxygen flow rate sensor 36 evaluates, and the temperature rise of the ozonizer 30 increases. If the rate is equal to or greater than the predetermined value γ, the process proceeds to step 60 and the above-described processing such as stopping the application of the high voltage to the ozonizer 30 is performed.

Further, in this example, the rotation speed of the ventilation fan 33 is varied according to the temperature T of the ozonizer 30 before the temperature determination process (steps 62 and 64) to converge the ozonizer temperature within a predetermined range. You may make it add the process (step 66) which makes it do. In this step 66, control is performed so as to increase the rotation speed of the ventilation fan 33 as the temperature of the ozonizer 30 rises. However, if such processing is performed, the ozone generation amount due to the high temperature of the ozonizer is reduced. In addition to being able to suppress, the ozonizer 30 can be cooled quickly even when the high voltage application is stopped due to the rise in temperature of the ozonizer.

[0047]

As described above, according to the present invention,
In an ozone sterilizer that supplies ozone generated in the ozone generator to the space to be sterilized, the ozone generator is energized after a predetermined time has elapsed from the start of oxygen supply, so sufficient oxygen is supplied. It is possible to eliminate the risk that the ozone generating section will operate before it is overheated and damaged.

Further, if an oxygen flow rate sensor is provided in the oxygen supply passage and the flow of oxygen supplied to the ozone generation portion drops below a predetermined amount, energization to the ozone generation portion is stopped. It is possible to detect a situation in which oxygen is not sufficiently supplied to the ozone generating section due to oxygen leakage from the ozone generating section, and even in this case, it is possible to avoid overheating and damage of the ozone generating section. Further, by utilizing the output of the flow rate sensor, it is possible to protect the expensive ozone generating section without providing a special device.

Further, if the ozone generator is powered off when the temperature of the ozone generator exceeds a predetermined temperature or when the rate of temperature rise exceeds a predetermined value, the oxygen flow rate sensor cannot detect oxygen. In addition to being able to cope with the shortage, it is also possible to deal with the case where the cooling of the ozone generating portion is insufficient, and it is possible to avoid damage to the ozone generating portion and a decrease in the ozone generating ability.

[Brief description of the drawings]

FIG. 1 is a diagram showing a state in which an ozone sterilizer according to the present invention and a space to be sterilized are connected by a duct.

FIG. 2 is a schematic diagram showing a configuration of an ozone sterilizer.

FIG. 3

FIG. 3 to FIG. 5 are flowcharts showing a control operation example of a control unit of an ozone sterilizer.

[Explanation of symbols]

 1 Ozone Sterilizer 2 Sterilized Space 3, 4 Duct 22 Ozone Generator 23 Oxygen Cylinder 24 Oxygen Supply Passage 30 Ozonizer 31 High Voltage Power Supply 34 Control Unit 36 Oxygen Flow Sensor 37 Temperature Detection Sensor

Claims (4)

[Claims] 1. An ozone generating part for generating ozone, and an oxygen supplying part for supplying oxygen for generating ozone to the ozone generating part, wherein the ozone generated by the ozone generating part is supplied to a sterilized space. In the ozone sterilizer, the energization of the ozone generator is performed after a lapse of a predetermined time after the supply of oxygen by the oxygen supplier is started. 2. An ozone generating section for generating ozone, and an oxygen supply section for supplying oxygen for generating ozone to the ozone generating section, the ozone generated by the ozone generating section being supplied to a sterilized space. In the ozone sterilizer, the flow rate sensor that detects the oxygen flow rate is provided in the oxygen supply passage connected to the ozone generation unit from the oxygen supply unit, and the oxygen supply amount supplied to the ozone generation unit by the output of the flow rate sensor is An ozone sterilizer characterized by stopping energization to an ozone generator when it is determined that the amount of water drops below a predetermined amount. 3. An ozone generating section for generating ozone, and an oxygen supply section for supplying oxygen for generating ozone to the ozone generating section, the ozone generated by the ozone generating section being supplied to a sterilized space. In the ozone sterilizer, a temperature sensor for detecting the temperature of this portion is provided in the ozone generation unit, and when the temperature detected by the temperature detection sensor is equal to or higher than a predetermined temperature, the energization to the ozone generation unit is stopped. An ozone sterilizer characterized in that 4. An ozone generating part for generating ozone and an oxygen supplying part for supplying oxygen for generating ozone to the ozone generating part, and supplying the ozone generated in the ozone generating part to the sterilized space. In the ozone sterilizer, a temperature sensor for detecting the temperature of this portion is provided in the ozone generator, and the ozone generator is energized when the temperature increase rate detected by the temperature sensor is equal to or higher than a predetermined value. Ozone sterilization device characterized by stopping.